ProberBenchOperating Environment

™

ProberBench start menu• Advanced start menu for quick access to

important functions and settings• Lists most-used programs for quick start up

Control center• All navigation and control elements are at the user’s

fingertips• Provides instant feedback about wafer and probe

positions for worry-free, safe wafer navigation and probing• Dock- and auto-hide function

Stage selector• Quick stage selection• Synchronized with Expert Control Panel

Wizard-style dialogs• Guided procedure of index setting, wafer and probe card theta

alignment

Software joystick• Easy navigation with digital or analogue movement• Graphical position feedback• Synchronized with Expert Control Panel

Programmable position buttons• Memorize user-defined positions referenced to either home or zero

Context-sensitive graphical user interface• Quick access to user-defined parameters

Z control• Easy access to three programmed Z positions

(Contact, Alignment, Separation) and chuck lift function to place chuck at a safe height

Micro-step function• In-die navigation using customizable

XY steps• Recent XY values are stored for quick access

First navigation tab• Safe operation of the system using only

programmed functions• Pre-programmed positions prevent errors

caused by accidental clicks

Fully-integrated thermal chuck interface

Sub-die setup• Setup sub-die coordinates and labels

WaferMap• Fully-customizable from single die

to sub-die mapping, binning and other useful features

Stop button• Stops all motorized moves with one click

Adjustable WaferMap coordinate system• Four orientations possible• Origin can be selected by user

Second navigation tab• Provides secure interface for control of Z and theta

movement• Setting of up to four different Z positions (Contact,

Alignment, Separation, Overtravel)• Direct access to wafer handling functions vacuum and load

Position tracking• In-die navigation• Gives feedback of where

the user is looking at the wafer currently

Turn all light sources on / off• Microscope• Chuck camera• ContactView™

Quick launch bar (customizable)• Quick access to most important programs - ControlCenter - SPECTRUM™ Vision System - WaferMap - SussCal® Professional

Scope follow mode• Synchronizes the movement

of the microscope and chuck Z-axis

Status bar• Live feedback about the most

important system states

Login and open / save project• Open or save all product related

data with one mouse click• Login required to access safety

relevant data

©Copyright 2010 Cascade Microtech, Inc. All rightsreserved. Cascade Microtech and SussCal are registeredtrademarks and iVista, ProberBench and SPECTRUM aretrademarks of Cascade Microtech, Inc. All other trademarksare the property of their own respective owners.

Data subject to change without notice.

PBOE-DD-0310

Patented ContactView™ system• Optical side view of the probing area, which precisely

controls the relationship between probe tips and wafer surface using the ProbeHorizon™ Wizard

Upward-looking chuck camera• Probe-tip observation and control• Probe-to-pad alignment with ReAlign™

SPECTRUMVision System

™

ProbeHorizon™Just three clicks automated wizard for:

• Elimination of probe and/or wafer damage• Fast and easy wafer loading• Set contact quickly and safely• Easy probe tip Z depth adjustment with probe

cards and single positioner• Easy and unique RF probe planarization

AutoAlign• Automatic wafer alignment• Automatic index measurement• Automatic wafer map generation

ReAlign™Automated probe-to-pad alignment based on an upward looking chuck camera enables unattended tests at multiple temperatures

• Automated generation of parameter and reliability data

• Constant contact quality over the whole wafer at temperature range

• Small pad probing at multiple temperatures• Easy to integrate in test executive programs

Real multi-cam imaging• Shows up to four live camera/ microscope views

simultaneousely

Multi-zoom Imaging• Up to eight freely adjustable zoom windows with

unlimited zoom• Real scale

Change objective• Change the pixel-to-micron scale quickly and easily

Two-point alignment function

Measurement function• Measures distances with

two mouse clicks

AutoFocus• Fast autofocus function

using iVista™ Pro

Snapshot function• Saves high-quality images• Raw data and screenshot

Adjust illumination Multi-view layout• Select the layout of up to

eight detail zoom windows

Change illumination• Choose between true color,

blue, green, yellow, cyan, magenta and white

Toggle between color andB/W mode

©Copyright 2010 Cascade Microtech, Inc. All rights reserved. Cascade Microtech is a registered trademark and ContactView, iVista, ProbeHorizon, ReAlign and SPECTRUM are trademarks of Cascade Microtech, Inc. All other trademarks are the property of their own respective owners.

Data subject to change without notice.

SPECTRUM-DD-0310

Function only available on systems with an iVista™ Digital Microscope.

ReAlign™ Guide