Presenter: Prof. David Garmire

Agenda Minutes1.Goals of the course 15

2.Overview of material 20

3.Grading 10

4.Time change 5

Microsensors & Microactuators

Lecture 1: Introduction

Microsensors and Microactuators ?

Microsensors and Microactuators ?

Sandia National Labs

Microsensors and Microactuators ?

Texas Instruments DLP Technology

Microsensors and Microactuators ?

biomechanics.ecs.umass.edu

Microsensors and Microactuators ?

Microsensors and Microactuators ?

Courtesy Clark T.-C. Nguyen

Why go micro/nano ?

Courtesy Clark T.-C. Nguyen

Goals of the Course

Understand advantages/challenges of scaling downDesign your own Microsensors and Microactuators

Microelectromechanical Systems (MEMS)

Model and simulate various domains of interest Mechanical, Electrical, Magnetic, Fluidic, Thermal, Optical Interactions between domains

Understand methodologies to test devices Sources and distributions of noise Measurement circuits and methodologies

Iterate upon and optimize designs

Overview of Course Material

Knowledge Areas

Electrical Engineerin

g

Electrical Engineerin

g

MechanicalEngineeri

ng

MechanicalEngineeri

ng

Computer Science

Computer Science

Material ScienceMaterial Science Mathemati

csMathemati

cs

ApplicationKnowledge

GamingCell phones

DisplaysPrinters

NavigationMedicineSurgerySafetyEnergyTextiles

PhysicsPhysics

BiologyBiologyChemistr

yChemistr

y

Bioengineering

Bioengineering

Chemical Engineering

Chemical Engineering

Overview of Course Material

Design Process

1. Problem Description1. Problem Description

2. Choose Domains and Materials2. Choose Domains and Materials

4a. Develop Simplified Model of Design Space4a. Develop Simplified Model of Design Space

4b. Create Finite Element Simulation of Specific Designs4b. Create Finite Element Simulation of Specific Designs

3. Examine Initial Design Space3. Examine Initial Design Space

5. Layout Design with Parameterization for Testing5. Layout Design with Parameterization for Testing

6. Fabricate Devices 6. Fabricate Devices

7. Test Devices7. Test Devices

Grading

Homework Assignments 25%Take-home Exam 30%Final-Project Writeup 30%Final Presentation 15%

Rescheduling Class

Monday, Wednesday 11:00 – 12:30 ?Tuesday, Thursday ?Wednesday, Friday 11:00 – 12:30 ?

Reading Assignment for Next Class

Chapter 1 in Micromachined Transducers Sourcebook by G. T. Kovacs

First Homework Assignment

Bridge Building Use a single 11 by 8.5 inch sheet of paper

You may cut and fold the paper Suggestion: Print a pattern from the computer

Use not more than 1 foot of standard Scotch tape Double-sided or single-sided OK

Optimize for one of the following Longest suspension that can hold a single penny in the center Strongest suspension spanning 1 foot

Holds the most pennies placed at least 1 inch from the sides Most earthquake resistant suspension spanning 2 feet

Holds the most pennies placed at the center when shaken

Due in approximately 3 weeks.