Ready for TakeoffTURBOVAC MAGiNTEGRA

175.

56.0

2

APPLICATIONS

SOLAR■ Sputtering (TCO)

■ CIGS

DISPLAY■ Flat Panel

■ PVD

■ LCD

ANALYTICS■ Analytical systems

■ Electron microscopes

■ Particle accelerators

COATINGS■ Industrial glass coating

■ Web

■ Optical

TURBOVAC MAGiNTEGRA

Insensitivity to process particles/dust ✓

Shock venting tolerance ✓

Reliability in industrial environments ✓

Robust and trouble-free operation ✓

Low cost of ownership ✓

Suitability for vibration-sensitive applications ✓

ADVANTAGES OF MAGNETICALLY LEVITATED TURBOMOLECULAR PUMPS

ADDITIONAL BENEFITS OF TURBOVAC MAGiNTEGRA

■ Maintenance-free operation

in most applications

■ Monitoring of performance data

■ Self-protection in case of exceeding

operation limits or malfunction

Your Ticket to the next level of vacuum

Our TURBOVAC MAGiNTEGRA combines accuracy, precisionand reliability - qualities that are essential to the vacuum technology and aircraft industries alike.

When it comes to vacuum technology, magnetically levitated turbomolecular pumps from Oerlikon Leybold Vacuum featurehigh pumping and gas throughput for faster pumpdown to improve equipment cycle times. The new 5-axis active magnetic bearing and drive system combines high reliability and effi cient operation.

Your Ticket to the next level of vacuum

■ Fully integrated converter and power supply eliminate the need for a conventional rack-mounted controller and interconnecting cables

■ Flexible design with controller position on the side or bottom for easy system integration

■ Innovative and modular industrial communication solution allows easy integration with customer equipment to meet current and future requirements

■ High robustness in industrial environment due to protective class IP 54 required in PVD, display, solar and optical coating applications

HIGHLIGHTS

PERFORMANCE DATA

PUMPS AND OPTIONS

MAG W 300 iP(L) 400 iP(L) 600 iP(L) 700 iP(L) 1300 iP(L) 1600 iP(L) 1700 iP(L) 2200 iP(L)

High vacuum � ange DN 100 ISO-K 160 ISO-K 160 ISO-K 200 ISO-K

DN 200 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F

DN 100 CF 160 CF 160 CF 200 CF 200 CF 250 CF 250 CF

Pumping speed (PNEUROP)

N2l x s-1 300 365 550 590 1100 1600 1610 2100

Ar l x s-1 1050 1470 1480 1900

He l x s-1 260 280 570 600 1220 1770 1710 2050

H2l x s-1 190 200 410 430 1130 1570 1660 1750

Max. compression ratio

N2 > 1010 > 1010 > 1010 > 1010 > 108 > 107 > 108 > 108

Ar > 108 > 107 > 108 > 108

He at 1 sccm 9x104 9x104 2x106 2x106 2x105 6x104 2x105 5x104

H2 at 1 sccm 3x103 3x103 3x104 3x104 8x103 1x103 4x103 5x103

Max. gas throughput mbar x l x s-1

N2 > 10 > 10 > 15 > 15 > 30 > 60 > 30 > 30

Ar > 20 > 30 > 20 > 20

Max. forevacuum pressure

N2mbar 8.0 8.0 6.0 6.0 4.0 1.0 4.0 2.5

Nominal speed min-1 58800 58800 48000 48000 37800 33000 33000 30600

Ultimate pressure

ISO-K/F mbar < 10-8

CF mbar < 10-10

Run-up time, approx. min 5 5 6 6 7 8 8 9

Foreline � ange DN 16 KF (clamped) 25 KF (clamped) 40 KF

Purge gas / vent port DN 16 KF (clamped)

Weight, approx. kg 12 12 17 17 40 45 45 50

Noise level (according to ISO 3744) dB(A) < 41

Purge gas / vent port µm < 0.01

TECHNICAL DATA

2200

MAG W 2200

MAG W 1700

MAG W 1600

MAG W 1300

MAG W 700

MAG W 600

MAG W 400

MAG W 300

2000

1800

1600

1400

1200

1000

800

600

400

200

10-6 10-5 10-4 10-3 10-2 10-10

High vacuum pressure (mbar)

Pum

pin

g s

pee

d (l

/s)

■

supply eliminate the need for a conventional rack-mounted controller and interconnecting cables

■

on the side or bottom for easy system integration

■

communication solution allows easy integration with customer equipment to meet current and future requirements

■

environment due to protective class IP 54 required in PVD, display, solar and optical coating applications

■ MAG W 300, MAG W 400, MAG W 600, MAG W 700, MAG W 1300, MAG W 1600, MAG W 1700 and MAG W 2200

MAG W Turbomolecular pumps are available with these following features:

■ Inlet fl anges ISO-K, ISO-F, CF■ Mounting position of the integrated controller and power supply fl anking: iP version bottom: iPL version■ Interfaces 9 pin 24V PLC, Profi bus, RS485, Ethernet and others based on the customer’s particular needs.

Choose from a wide range of accessories to control and monitor performance of the TURBOVAC MAGiNTEGRA:■ Controllers for pressure measurement■ Systems for active and passive sensors, water and air cooling facilities, venting valves, cables, etc. ■ Forevacuum pumps and systems, engineering and application support

ACCESSORIES

MAG W 300 iP(L) 400 iP(L) 600 iP(L) 700 iP(L) 1300 iP(L) 1600 iP(L) 1700 iP(L) 2200 iP(L)

High vacuum � ange DN 100 ISO-K 160 ISO-K 160 ISO-K 200 ISO-K

DN 200 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F

DN 100 CF 160 CF 160 CF 200 CF 200 CF 250 CF 250 CF

Pumping speed (PNEUROP)

N2l x s-1 300 365 550 590 1100 1600 1610 2100

Ar l x s-1 1050 1470 1480 1900

He l x s-1 260 280 570 600 1220 1770 1710 2050

H2l x s-1 190 200 410 430 1130 1570 1660 1750

Max. compression ratio

N2 > 1010 > 1010 > 1010 > 1010 > 108 > 107 > 108 > 108

Ar > 108 > 107 > 108 > 108

He at 1 sccm 9x104 9x104 2x106 2x106 2x105 6x104 2x105 5x104

H2 at 1 sccm 3x103 3x103 3x104 3x104 8x103 1x103 4x103 5x103

Max. gas throughput mbar x l x s-1

N2 > 10 > 10 > 15 > 15 > 30 > 60 > 30 > 30

Ar > 20 > 30 > 20 > 20

Max. forevacuum pressure

N2mbar 8.0 8.0 6.0 6.0 4.0 1.0 4.0 2.5

Nominal speed min-1 58800 58800 48000 48000 37800 33000 33000 30600

Ultimate pressure

ISO-K/F mbar < 10-8

CF mbar < 10-10

Run-up time, approx. min 5 5 6 6 7 8 8 9

Foreline � ange DN 16 KF (clamped) 25 KF (clamped) 40 KF

Purge gas / vent port DN 16 KF (clamped)

Weight, approx. kg 12 12 17 17 40 45 45 50

Noise level (according to ISO 3744) dB(A) < 41

Purge gas / vent port µm < 0.01

Headquarter Germany

Oerlikon Leybold Vacuum GmbHBonner Strasse 498D-50968 Köln

T +49 (0) 221-347-0F +49 (0) 221-347-1250info.vacuum@oerlikon.com

www.oerlikon.com/leyboldvacuum

MAG W 300 iP(L) 400 iP(L) 600 iP(L) 700 iP(L)

MAGiNTEGRA with 9 pin 24V PLC 3) # 1) 2)

ISO-KiP 410300V0505 410400V0505 410600V0505 410700V0505

iPL on request on request 410600V0705 on request

CFiP 410300V0506 410400V0506 410600V0506 410700V0506

iPL on request on request on request on request

MAG W 1300 iP(L) 1600 iP(L) 1700 iP(L) 2200 iP(L)

MAGiNTEGRA with Pro� bus interface 3) # 1) 2)

ISO-FiP 411300V0504 411600V0504 411700V0504 412200V0504

iPL 411300V0704 411600V0704 411700V0704 412200V0704

CFiP 411300V0506 --- 411700V0506 412200V0506

iPL 411300V0706 --- 411700V0706 412200V0706

MAGiNTEGRA with 9 pin 24V PLC 3)

ISO-FiP 411300V0514 411600V0514 411700V0514 412200V0514

iPL 411300V0714 411600V0714 411700V0714 412200V0714

CFiP 411300V0516 --- 411700V0516 412200V0516

iPL 411300V0716 --- 411700V0716 412200V0716

1) IP: � anking controller installation 3) Additional interface options, including RS485 and Ethernet, are available on request.

2) IPL: bottom controller installation

ORDERING INFORMATION

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