plasma enhanced chemical vapor deposition...
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Plasma Enhanced Chemical Vapor Deposition (PECVD)
Pathros Cardenas & David Tung
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What is Chemical Vapor Deposition?
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What is Plasma Enhanced Chemical Vapor Deposition?
CVD process that uses plasmaUses cold plasmaKeeps wafers at low temperaturesEnhances properties of layers being deposited
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What is a Plasma?
Ionized gasHigh free electron contentUnique state of matterElectric fields energize plasmaCold plasma (not in thermal equilibrium)
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Where can we find Plasma?
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The Reaction
Gas is introducedIonized by plasmaDiffusions of particles through sheathElectron bombardment onto substrateAbsorption of particlesLayer formation
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PECVD Reactors
Parallel plate reactorInductive coupling reactor Advanced parallel plate reactorTubular reactor
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Parallel plate reactor
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Advanced parallel plate reactor
Double sided vertical holder reactor
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Tubular reactor
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Advantages of using PECVD
Low operation temperatureLower chances of cracking deposited layerGood dielectric properties of deposited layer Good step coverageLess temperature dependent
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Disadvantages of using PECVD
Toxic byproductsHigh cost of equipment
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Applications
Deposition of silicate layersDeposition of dopantsAnti-reflection and anti-scratch layers in opticsSolar cells -> amorphous silicon
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Conclusion
PECVD is not a replacement for CVDPECVD can give better layer quality than CVDPECVD has a wide variety applicationsPECVD process costs can be prohibitive
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References1. "Chemical Vapor Deposition." Wikipedia. 27 Sept. 2007. 11 Oct. 2007 <http://en.wikipedia.org/wiki/Chemical_vapor_deposition>.2. Jaeger, Richard C. Introduction to Microelectronic Fabrication. 2nd ed. Vol. 5. Upper Saddle River, NJ: Prentice Hall, 2002. 136-141.3. Konuma, Mitsuharu. Film Deposition by Plasma Techniques. Berlin: Spring-Verlag, 1992.4. Konuma, Mitsuharu. Plasma Techniques for Film Deposition. Harrow, U.K.: Alpha Science International Ltd., 2005.5. "PECVD Process." MicroFAB BREMEN GMBH. 17 May 2004. 14 Oct. 2007 <http://www.microfab.de/services/pecvd.htm>.6. "Plasma (Physics)." Wikipedia. 15 Oct. 2007. 12 Oct. 2007 <http://en.wikipedia.org/wiki/Plasma_%28physics%29>.7. "Plasma-Enhanced Chemical Vapor Deposition." Wikipedia. 30 Aug. 2007. 11 Oct. 2007 <http://en.wikipedia.org/wiki/Plasma_Enhanced_Chemical_Vapor_Deposition>.8. "Plasma Enhanced CVD." Hitech-Projects. 2007. 14 Oct. 2007 <http://www.hitech-projects.com/dts/docs/pecvd.htm>.9. Sherman, Arthur. Chemical Vapor Deposition for Microelectronics Principles, Technology, and Applications. Park Ridge, NJ: Noyes Publications, 1987.
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QUESTIONS?