physical and chemical industry p-e12-16a

8/17/2019 Physical and Chemical Industry P-e12-16a

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General Purpose Equipment/ Measuring Equipment

Cultivation/Separation/ Analysis

Storage/Transfer

Experimental Equipment

Cleaning/Sterilization

Process Gas Equipment

High Vacuum Equipment

Clean Series/ Static Electricity Elimination

Equipment

P.1

P.5

P.6

P.6

P.7

P.7

P.8

P.8

Test-tube ............................Electric Actuator

Thermostatic/Drying ..........Thermoelectric BathHeating/Cooling .................ChillerEquipment for DI Water .....Filter/Regulator/Flow Switch/Piping etc.Fluid Feed, Pressure Feed, Pressurization,Pressure Reduction ...........Pump/Flow Switch/PipingStirring ...............................Air CombinationBalance .......................Ionizer

TubingFittings

2 Port ValveFilter

RegulatorDiaphragm Valve

Ionizer


Cooling Unit for Evaporator.......ChillerDispense PumpLiquid Dispense Pump

P-E12-16A


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Equipment for DI water line, such as DI water manufacture equipment or analysis equipment, and peripheral devices.Stainless steel or fluoropolymer products

Needle Valve (Restrictor)Fluoropolymer Needle Valve/ LVN

RegulatorsClean Regulator/Fluororesin Type/ SRFClean Regulator/ SRHRegulator for Water/ WR

Flow SwitchesDigital Flow Switch for Deionized Water and Chemical Liquids/ PF2DDigital Flow Switch for PVC Piping/ PF3W

HEPO 2 element

Membrane element

RestrictorFilter Regulator Flow Switch 2 Port Valve

Equipment for DI Water

High Precision Filters for LiquidsHigh Precision Filter for Liquids/ FGH

Quick Change Filter for Cleaning Fluid/ FQ1

P. 28 P. 18

P. 28

FittingsStainless Steel 316 One-touch Fittings/ KQG2Stainless Steel 316 Insert Fittings/ KFG2S Couplers Stainless Steel Type/ KKAClean One-touch Fittings for Blowing/ KPFluoropolymer Fittings/ LQ

TubingFluoropolymer Tubing/ TLFluoropolymer Tubing (PFA)/ TLMFEP Tubing (Fluoropolymer)/ THSoft Fluoropolymer Tubing (Modified PTFE)/ TD

P. 16P. 17

P. 17P. 17

P. 17

P. 19P. 20

P. 19P. 19

2 Port ValvesAir Operated Chemical Liquid Valve/Integral Fitting Type/ LVC

Air Operated Chemical Liquid Valve/Threaded Type/ LVAManually Operated Chemical Liquid Valve/Integral Fitting/Threaded Type/ LVHAir Operated Chemical Liquid Valve/Compact Type/ LVDChemical Liquid Valve/Non-Metallic Exterior/ LVQVinyl Chloride Air Operated Valve/ LVPPVC Quick Drain Valve/ LVW

P. 25P. 25P. 25

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P. 25P. 25

P. 14P. 14

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P. 22

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Discharge of chemicals

Flow switch

N2

Series LQHBBore Through Connector

Series LQMale Connector

A changing of the tube position is available in accordancewith the depth of the container.

Transferring liquidby pressure Atomizing liquid

Stirring liquid

Transferring and Collecting liquidProcess Pumps (Diaphragm Pumps)Automatically Operated Type (Internal Switching Type) Air OperatedType (External Switching Type)/ PA(F) 3000/5000Built-in Solenoid Valve Air Operated Type (External Switching Type)/PB1000A/PB1313A

Flow SwitchesDigital Flow Switch for Air/ PF2A3-Color Display Digital Flow Switch for Water/ PF3WDigital Flow Switch for Deionized Water and Chemical Liquids/ PF2D

General Purpose Equipment/Measuring Equipment

P. 26

P. 26

P. 22P. 22

P. 22

Fittings & TubingFluoropolymer Fittings/ LQFluoropolymer Bore Through Connector/ LQHB

Fluoropolymer TubingFluoropolymer Tubing/ TLFluoropolymer Tubing (PFA)/ TLMFEP Tubing (Fluoropolymer)/ THSoft Fluoropolymer Tubing (Modified PTFE)/ TD

P. 17

P. 17

P. 19P. 20

P. 19

P. 19

Digital Pressure Switches2-Color Display Digital Pressure Switch/ ZSE80(F)/ISE80(H)Pressure Sensor for General Fluids/ PSE560Low Differential Pressure Sensor/ PSE550

P. 20P. 21

P. 21

Dispense PumpDispense Pump/ LDP P. 26

P. 26

Liquid Dispense PumpLiquid Dispense Pump/ LSP

Chemical Liquid ValveDirect Operated 2/3 Port Solenoid Valvefor Chemical Liquids/ LVM P. 24

Installation Examples

Reagents Transfer

Pressure Feed of Chemicals

P

LVM3 port

Head

Syringe pumpBellows

Fluid Feed, Pressure Feed, Pressurization, Pressure Reduction

Analyzer

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Static Electricity Elimination EquipmentAntistatic equipment for samples or containers of electronicbalance

Balance

IonizersIonizer/ IZS40/41/42Ionizer/Nozzle Type/ IZN10

Ionizer/Fan Type/ IZF10Electrostatic Sensor/ IZD10Electrostatic Sensor Monitor/ IZE11Handheld Electrostatic Meter/ IZH10

P. 23P. 23

P. 23P. 23

P. 23

P. 23

Clean Air ModuleClean Air Module/ LLBAir Blow Module/ LLB1Component Parts: Flow switch, Regulator, ON/OFF valve,

Restrictor, Filter

P. 11P. 11

Stirring

P. 12P. 12

P. 12

P. 13

P. 12

¡ Fittings & TubingOne-touch Fittings/ KQ2

¡ Finger Valve (2 Port)/ VHK

Air Filters/RegulatorsModular Type F.R.L. Unit/ AC

Air Filter/ AF

Regulator/ AR

Filter regulator/ AW

Mist Separator/ AFM

Filter, regulator, and oil mist separator for air motor type stirring machine. Removes the dust and oil mist.

P. 24P. 15

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Cultivation/Separation/Analysis

Temperature control of concentration fluid

Highly integrated resin manifold (Made to Order)

Circulating Fluid Temperature ControllerApplicable to rotary evaporators, various concentrators, and distillators.

Thermo-chillerThermo-chiller Compact Type/ HRS

Cooling Capacity: 1 kW to 5 kWTemperature Stability: ± 0.1 ° C

P. 28 P. 29Thermoelectric BathPeltier-type Thermoelectric Bath/ INR-244-757

Peltier-type Thermoelectric Bath/ INR-244-757

Conductivity meter

Cooling Unit for Evaporator

Dispense PumpDispense Pump/ LDP P. 26 P. 26

Liquid Dispense PumpLiquid Dispense Pump/ LSP

Chemical Liquid ValveDirect Operated 2/3 Port Solenoid Valvefor Chemical Liquids/ LVM P. 24

Cooling Capacity: 200 WTemperature Stability: ± 0.04 ° C

LVM100

LVM150

LVM200

LVM095

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Storage/Transfer

Electric ActuatorsElectric Actuator/Slider Type/ LEFElectric Slide Table/ LESElectric Gripper/ LEHCard Motor/ LAT

P. 31P. 33

P. 33P. 34

Application example ofspecimen transfer system

Test-tube

Tubing

Polyurethane Tubing/ TUPolyurethane Coil Tubing/ TCUPolyolefin Tubing / TPH

Fluoropolymer Tubing

FEP Tubing (Fluoropolymer)/ THSoft Fluoropolymer Tubing (Modified PTFE)/ TD

Fluoropolymer Tubing/ TLFluoropolymer Tubing (PFA)/ TLMAntistatic Tubing/ TA Tube Cutter/ TK

P. 18 P. 19 P. 19P. 19

P. 20P. 19

P. 20

P. 19P. 20

P. 15P. 17P. 15

P. 16P. 16

P. 17P. 17 P. 16

P. 17P. 17

Experimental Equipment

Fittings

Fluoropolymer Fittings Hyper Fittings/ LQS Couplers/ KK/KKHS Couplers Stainless Steel Type/ KKAS Couplers/ KK130Clean One-touch Fittings for Blowing/ KP

Tubing

FittingsOne-touch FittingsOne-touch Fittings/ KQ2Brass One-touch Fittings/ KQB2Stainless Steel 316 One-touch Fittings/ KQG2Stainless Steel 316 Insert Fittings/ KFG2Miniature Fittings/ MS

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RegulatorDiaphragm ValveCheck Valve

Vacuum GeneratorFlow Switch

Process Gas EquipmentP. 27

P. 27

P. 27

P. 27

P. 27

2 Port ValvesDirect Operated 2 Port Solenoid Valve/ VX21/22/23Pilot Operated 2 Port Solenoid Valve/ VXDZero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve/ VXZCompact Direct Operated 2/3 Port Solenoid Valve for Water and Air/ VDWZero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve/ VXSDirect Operated 2/3 Port Solenoid Valve for Chemical Liquids/ LVM

P. 24P. 24

P. 24P. 24P. 24

P. 24

Pinch ValvePinch Valve/ AXTP

Cleaning/Sterilization

Air Filters for Clean BlowClean Gas Filter / SFClean Air Filter/ SFD

P. 11P. 11

FiltersClean Gas Filter

2 Port Valves

P. 24

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Clean Series/Static Electricity Elimination EquipmentIonizersIonizer/ IZS40/41/42Ionizer/Nozzle Type/ IZN10Ionizer/Fan Type/ IZF10

High Vacuum ValvesAluminum High Vacuum Angle Valve/ XL Stainless Steel High Vacuum Angle Valve/ XMStainless Steel High Vacuum In-line Valve/ XYSmooth Vent Valve/ XVDSlit Valve/ XGT

P. 30P. 30P. 30

P. 31P. 31

P. 23P. 23

P. 23

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Air Preparation Equipment (Dryers, Filters)Refrigerated Air Dryer IDF ······························································ P.11

Heatless Air Dryer ID ········································································ P.11

Membrane Air Dryer IDG ································································· P.11

Clean Gas Filter SF ··········································································· P.11

Clean Air Filter SFD ··········································································· P.11

Clean Air Module LLB ······································································ P.11

Air Blow Module LLB1 ······································································ P.11

F.R.L. UnitsModular Type F.R.L. Unit AC ·························································· P.12

Air Filter AF ··························································································· P.12

Mist Separator AFM ··········································································· P.12Micro Mist Separator AFD ······························································ P.12

Regulator AR ························································································ P.12

Regulator with Backflow Function AR ······································· P.12

Lubricator AL ························································································ P.12

Filter Regulator AW ··········································································· P.13

Filter Regulator with Backflow Function AW ·························· P.13

Mist Separator Regulator AWM ··················································· P.13

Micro Mist Separator Regulator AWD ······································· P.13

Modular Type F.R.L Unit ACG ······················································· P.13

Pressure Control Equipment (Regulators)Regulator with Built-in Pressure Gauge ARG ······················· P.14

Regulator with Built-in Pressure Gauge with BackflowFunction ARG K ··········································································· P.14

Filter Regulator with Built-in Pressure Gauge AWG ··········· P.14

Filter Regulator with Built-in Pressure Gaugewith Backflow Function AWG K ············································ P.14

Clean Regulator SRH ······································································· P.14

Precision Clean Regulator SRP ··················································· P.14

Clean Regulator/Fluororesin Type SRF ···································· P.14

Regulator for Water WR110 ··························································· P.14

Fittings and TubingOne-touch Fittings KQ2 ··································································· P.15

Metal One-touch Fittings KQB2 ··················································· P.15

Rotary One-touch Fittings KS/KX ··············································· P.15

One-touch Fittings Manifold KM ·················································· P.15

Insert Fittings KF ················································································ P.15

Miniature Fittings M ··········································································· P.15

Self-align Fittings H/DL/L/LL ························································· P.15

Self-seal Fittings KC ·········································································· P.15

S Couplers KK/KKH ·········································································· P.16S Couplers KK130 ············································································· P.16

Multi-connector DM············································································ P.16

Multi-connector with One-touch Fittings DMK ······················· P.16

Rectangular Multi-connector KDM·············································· P.16

Piping Module KB ··············································································· P.16

Antistatic One-touch Fittings KA ················································· P.16Stainless Steel 316 One-touch Fittings KQG2 ······················ P.16

Stainless One-touch Fittings KG ················································· P.17

Stainless Steel 316 Insert Fittings KFG2 ································ P.17

Miniature Fittings Stainless Steel 316 MS ······························ P.17

S Couplers Stainless Steel Type KKA ······································ P.17

Clean One-touch Fittings for Blowing KP ································ P.17

Fluoropolymer Fittings Hyper Fitting LQ1 ······························· P.17

Fluoropolymer Fittings Hyper Fitting LQ3 ······························· P.17

Fluoropolymer Bore Through Connector LQHB ··················· P.17

Fluoropolymer Needle Valve LVN················································ P.18

Low Torque Rotary Joint MQR ······················································ P.18

Nylon Tubing T ····················································································· P.18

Soft Nylon Tubing TS ········································································· P.18

Polyurethane Tubing TU ··································································· P.18

Soft Polyurethane Tubing TUS ······················································ P.18

Hard Polyurethane Tubing TUH ···················································· P.18

Wear Resistant Tubing TUZ ··························································· P.18

Polyurethane Coil Tubing TCU ······················································ P.19

Polyurethane Flat Tubing TFU ······················································ P.19

2-Layer Soft Fluoropolymer Tubing TQ ····································· P.19

Antistatic Soft Nylon Tubing TAS ················································· P.19Antistatic Polyurethane Tubing TAU ··········································· P.19

Fluoropolymer Tubing TL ································································ P.19

FEP Tubing (Fluoropolymer) TH ·················································· P.19

Soft Fluoropolymer Tubing TD ······················································ P.19

Fluoropolymer Tubing (PFA) TLM ··············································· P.20

Polyolefin Tubing TPH ······································································· P.20

Tube Cutter TK ····················································································· P.20

Pressure Switches2-Color Display High-Precision Digital Pressure Switch

ZSE30A(F)/ISE30A ······································································· P.202-Color Display High-Precision Digital Pressure Switch

ZSE40A(F)/ISE40A ······································································· P.20

Digital Pressure Switch ZSE10(F)/ISE10 ································ P.20

2-Color Display Digital Pressure SwitchZSE80(F)/ISE80(H) ······································································· P.20

Air Checker: Electronic Pressure SwitchPS1000/1100/1200 ········································································ P.21

Compact Pneumatic Pressure Sensor PSE53 ·················· P.21

Compact Pneumatic Pressure Sensor PSE54 ·················· P.21

Low Differential Pressure Sensor PSE55 ···························· P.21

Pressure Sensor for General Fluids PSE56 ······················· P.21Multi-Channel Digital Pressure Sensor Controller PSE200 ······· P.21

2-Color Display Digital Pressure Sensor Controller PSE300 ···· P.21

Pressure Switch / Read Switch Type IS10 ······························ P.21

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Flow Switches2-Color Display Digital Flow Switch PFM ································ P.22

Digital Flow Switch for Air PF2A ·················································· P.22

3-Color Display Digital Flow Switch for Water PF3W ········· P.22

3-Color Display Digital Flow Switch for PVC Piping PF3W ··· P.22Digital Flow Switch for Deionized Water and

Chemical Liquids PF2D ······························································· P.22

Static Electricity Elimination EquipmentIonizer IZS40/41/42 ············································································ P.23

Ionizer/Nozzle Type IZN10 ······························································ P.23

Ionizer/Fan Type IZF10 ····································································· P.23

Electrostatic Sensor IZD10 ····························································· P.23Electrostatic Sensor Monitor IZE11 ············································ P.23

Handheld Electrostatic Meter IZH10 ·········································· P.23

2/3 Port Valves for Fluid ControlFinger Valve VHK················································································ P.24

Direct Operated 2 Port Solenoid Valve VX2 ··························· P.24

Pilot Operated 2 Port Solenoid Valve VXD ····························· P.24

Zero Differential Pressure Type/Pilot Operated2 Port Solenoid Valve VXZ························································· P.24

Zero Differential Pressure Type/Pilot Operated

2 Port Solenoid Valve VXS ························································· P.24Compact Direct Operated 2 Port Solenoid Valve VDW ····· P.24

Compact Direct Operated 2/3 Port Solenoid Valvefor Chemical Liquids LVM··························································· P.24

Pinch Valve AXTP20 ········································ P.24

Air Operated Chemical Liquid Valve/Integral Fitting Type

LVC ······································································································ P.25

Air Operated Chemical Liquid Valve/Threaded Type LVA··· P.25Manually Operated Chemical Liquid Valve/Integral Fitting/

Threaded Type LVH······································································· P.25Air Operated Chemical Liquid Valve/Compact Type LVD······· P.25

Chemical Liquid Valve/Non-Metallic Exterior LVQ ··············· P.25Vinyl Chloride Air Operated Valve LVP ····································· P.25

PVC Quick Drain Valve LVW ························································· P.25

PumpsProcess Pump/Double Acting Pump PA ·································· P.26

Process Pump/Diaphragm Pump PB ········································ P.26

Non-Metallic Pump/Double Acting Pump PAF ······················ P.26

Fixed Amount Liquid Dispense Pump (Solenoid Type)LSP ······································································································· P.26

Dispense Pump LDP ······································· P.26

Process Gas EquipmentRegulator/Back Pressure Regulator for Ultra High Purity

AP/SL/AZ/BP ··················································································· P.27

Regulator/Back Pressure Regulatorfor General Applications AK/BP ·············································· P.27

Diaphragm Valve for Ultra High Purity AP ······························· P.27Diaphragm Valve for Ultra High Purity AZ ······························· P.27

Check Valve/Vacuum Generator/Flow Switch AP ························· P.27

Filters for LiquidsHigh Precision Filter for Liquids FGH ········································ P.28

For cleaning Fluid/Quick Change Filter FQ1 ·························· P.28

Chillers (Circulating Fluid Temperature Controller)Refrigerated Thermo-cooler HRG ··············································· P.28

Thermo-chiller HRS ··········································································· P.28

Thermo-chiller HRS-X017 ······························································· P.28

Refrigerated Thermo-chiller HRZ ················································ P.29

Refrigerated Dual Thermo-chiller HRZD ·································· P.29

Water-cooled Thermo-chiller HRW ············································· P.29

Peltier-type Thermo-con HEC ······················································· P.29

Peltier-type Chemical Thermo-con HED ·································· P.29

Thermoelectric BathPeltier-type Thermoelectric Bath INR-244-757 ····················· P.29

Peltier-type Thermoelectric Bath HEB ······································ P.29

Temperature Control EquipmentPeltier-type Air-thermo HEA ·························································· P.30

Thermo-dryer with Air Temperature Adjustment FunctionIDH ··································································································· P.30

High Vacuum EquipmentAluminum High Vacuum Angle Valve XL ····························· P.30

Stainless Steel High Vacuum Angle/In-line Valve XM/XY ··· P.30Smooth Vent Valve XVD··································································· P.31

Slit Valve XGT ······················································································· P.31

Electric ActuatorsElectric Actuator/Slider Type LEF ················································ P.31

Electric Actuator/Rod Type LEY ··················································· P.32

Electric Actuator/Guide Rod Type LEYG ································· P.32

Electric Slide Table LES ··································································· P.33

Electric Rotary Table LER ······························································· P.33

Electric Grippers LEH ······································································ P.33

Controller LEC ····················································································· P.34

Programless Controller LECP1 ···················································· P.34

Pulse Input Driver LECPA ······························································ P.34AC Servo Motor Driver LECS ··················································· P.34

Card Motor LAT3 ················································································ P.34

Card Motor Controller LATC4 ······················································· P.34

10


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Equipment Lineup for Physical and Chemical Industry

¡ Supply dry air with a low dew point below –30 °C.¡ Heater or electric control board is not required.¡ Possible to check the outlet dew point with the

indicator. (Selfregenerative style allows for easymaintenance.)

Heatless Air Dryer ID

Outlet flow L/min (ANR) Inlet flow L/min (ANR)Series

ID 80 to 780 100 to 975

Outlet flow L/min (ANR) Standard dew point ( ° C)Series

IDG A/IDG 10 to 1000 −15, −20, −40, −60

¡ Possible to easily supply dry air using thehollow fiber membrane!

¡ Non-fluorocarbon¡ Power supply not required¡ No vibration or heat discharge.¡ With a dew point indicator.

Membrane Air Dryer IDG

¡ Cartridge type allows element replacement (SFA100/200/300, SFB100)¡ Compact disposable type (SFB300, SFC100)

Clean Gas Filter SF

Series Operating pressure FiltrationType

Clean Gas Strainer

Cartridge type disc

Cartridge type straight

Disposable type straight

Disposable type multiple disc

Cartridge type straight

SFA100·200·300SFB100SFB300SFC100

SFB200

Max.0.99 MPa (Vacuum: 1.3 x 10 −6 kPa)





0.01 µm

(Filtration efficiency 99.99%)

120 µm

¡ Built-in hollow fiber element¡ Pressure drop

(Inlet pressure 0.7 MPa,Max. flow rate)

Clean Air Filter SFD

Type Operating pressure FiltrationSeries

SFD100

SFD200

Disposable type(Irreplaceable element)

Cartridge type

(Replaceable element)

MAX.1.0 MPa0.01 µm

(Filtration efficiency:99.99%)

¡ Clean equipment modularized (Reduction of piping labor/ Space-saving)

¡ Clean air is easily available.¡ Nominal filtration rating: 0.01 µm (Filtration

efficiency 99.99%)¡ Wetted parts: Grease-free, Silicone-free¡ Assembled in a clean room, shipped

and packed in a duplicate package¡ 24 combinations available

Clean Air Module LLB ¡ Reduction of piping labor/Space-saving¡ Nominal filtration rating: 0.01 µm (Filtration efficiency 99.99%)¡ Wetted parts: Grease-free¡ 3 combinations available

Air Blow Module LLB1

Fluid Set pressure Flow range L/min (ANR)Series

LLB3LLB4

Clean AirN2 gas Note)

0.05 to 0.4 MPa

Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1

5 to 100

50 to 500 Fluid Set pressure Flow range L/min (ANR)Series

LLB1 Air N2 gas 0.05 to 0.6 MPa Up to 100

Air Preparation Equipment (Dryers, Filters)

¡ Refrigerant: R134a(HFC)[IDF1E to 15E1]R407C(HFC)[IDF22E to 75E]

¡ Improved corrosion resistance with the useof a stainless steel, plate type heat changer.(IDF4E to 75E)

Refrigerated Air Dryer IDF

Applicablecompressor

Air flow capacity m 3 /min (ANR)

50 HzSeries

IDF1E to 75E 0.75 to 75 kW 0.10 to 11.060 Hz

0.12 to 12.4

SFA

SFB

SFB300 SFB200SFC

SFD100 SFD200

LLB3

LLB4

11


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¡ Easy replacement of the elementThe element and the bowl are in one piece. Replacement can be done in hand.

¡ Energy saving regulator Pressure drop: Max. 50% improvement¡ Reduced required maintenance space: Max. 46% reduction¡ Better visibility & safer

The bowl is covered with a transparent bowl guard.

Modular Type F.R.L. Unit AC

Series Set pressure (MPa)Port sizeCombination equipment

AC20 to 40-A

AC20A to 40A-A

AC20B to 40B-A

AC20C to 40C-A

AC20D to 40D-A

1/8, 1/4, 3/8, 1/2, 3/4

Air filter, Regulator,Lubricator

Filter regulator,Lubricator

Air filter, Regulator

Air filter, Mist separator, Regulator

Filter regulator, Mist separator

0.05 to 0.7

Air Filter AF

Port size Filtration ( µm)Series

AF20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 5

Mist Separator AFM

Micro Mist Separator AFD


AFD20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 0.01

Regulator AR


AFM20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 0.3

Port size Set pressure (MPa)Series

AR20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 0.05 to 0.7

¡ Easy replacement of the elementThe element and the bowl are in one piece. Replacementcan be done in hand.

¡ Reduced required maintenance space: Max. 46%reduction

¡ Better visibility & saferThe bowl is covered with a transparent bowl guard.

¡ Energy saving regulatorPressure drop: Max. 50% improvement

F.R.L. Units

¡ Built-in mechanism to release air pressure from theoutlet side efficiently and quickly. (Built-in check valve:With backflow function)

¡ Better visibility & saferThe bowl is covered with a transparent bowlguard.



Regulator with Backflow Function AR


AR20K to 60K 1/8, 1/4, 3/8, 1/2, 3/4, 1 0.05 to 0.85

Port size Bowl capacity (cm 3)Series

AL20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 25 to 135

Lubricator AL

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Modular Type F.R.L Unit ACG

Series Set pressure (MPa)Port sizeCombination equipment

AF + ARG + ALAWG + ALAF + ARGAF + AFM + ARGAWG + AFM

1/8, 1/4, 3/8, 1/2

Air filter, Regulator with integral pressure gauge, Lubricator

Filter regulator with integral pressure gauge, Lubricator

Air filter, Regulator with integral pressure gauge

Air filter, Mist separator, Regulator with integral pressure gauge

Filter regulator with integral pressure gauge, Mist separator

0.05 to 0.85

¡ Built-in mechanism to release air pressurefrom the outlet side efficiently and quickly.(Built-in check valve: With backflowfunction)

¡ Easy replacement of the element The element and the bowl are in one piece.

Replacement can be done in hand.¡ Energy saving regulator

Pressure drop: Max. 50% improvement¡ Reduced required maintenance space: Max.

46% reduction¡ Better visibility & safer The bowl is covered with a transparent bowl

guard.

Filter Regulator with Backflow Function AW

Port size Set pressure (MPa) Filtration ( µm)Series

AW20K to 40KAW60K

1/8, 1/4, 3/8, 1/2, 3/4

3/4, 10.05 to 0.85 5

Filter Regulator AW

Micro Mist Separator Regulator AWD


AWD20 to 40 1/8, 1/4, 3/8, 1/2 0.05 to 0.85 0.01Port size Set pressure (MPa) Filtration ( µ m)Series

AWM20 to 40 1/8, 1/4, 3/8, 1/2 0.05 to 0.85 0.3


AW20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 0.05 to 0.7 5

Mist Separator Regulator AWM

¡ Improves visibility of pressure gaugeslocated in various locations.

13


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Regulator with Built-in Pressure Gauge ARG


ARG20 to 40 1/8, 1/4, 3/8, 1/2 0.05 to 0.85


Regulator with Built-in Pressure Gauge with Backflow Function ARG K


ARG20K to 40K 1/8, 1/4, 3/8, 1/2 0.05 to 0.85


Filter Regulator with Built-in Pressure Gauge AWG ¡ Improves visibility of pressure gauges

located in various locations.

Filter Regulator with Built-in Pressure Gauge with Backflow Functio AWG K

Port size Set pressure (MPa) Filtration ( µ m)Series

AWG20K to 40K 1/8, 1/4, 3/8, 1/2 0.05 to 0.85 5

Port size Set pressure (MPa) Filtration ( µ m)Series

AWG20 to 40 1/8, 1/4, 3/8, 1/2 0.05 to 0.85 5

¡ Contamination controlled stainless steel regulator¡ Oil-free¡ Two types of d iaphragm materials:

PTFE, Fluororubber

Clean Regulator SRH

Applicable tubing O.D. Set pressure (MPa)Series

SRF

Metric size Inch size

ø4 to ø19

—

Integrated with fitting

With nut

Tube extension

ø1/8 to ø3/4

Tubing O.D.ø1/4 to ø3/4

0.02 to 0.4

¡ High precision low flow consumption stainless steel regulator¡ Bleed air flow 0.5 L/min (ANR) or less (0.2 MPa at outlet

pressure)¡ Setting sensitivity: 0.3% F.S.¡ Repeatability: 1% F.S.

Precision Clean Regulator SRP


SRP M5, 1/8Low pressure type: 0.005 to 0.2

High pressure type: 0.01 to 0.4

Relief mechanism Port size Set pressure (MPa)Series

SRHNon-relief

Relief

Rc 1/8, 1/4, 3/8,1 /29/16-18UNF, 7/8-14UNF

Rc 1/8, 1/4, 3/8, 1/2

Low pressure type: 0.02 to 0.2High pressure type: 0.05 to 0.7

¡ Wetted partsBody: New PFADiaphragm: PTFE

¡ Recommended maximum flow rate: 20L/min (SRF50)(0.3 MPa at inlet pressure, fluidization)

Clean Regulator/Fluororesin Type SRF

Fitting size: 2 to 6

Regulator for Water WR110


WR110-X224 Rc 1/4 0.08 to 0.39

Pressure Control Equipment (Regulators)

14


16/36


Applicable tubing O.D. Connection threadSeries

M- -2M

ø2

ø3.2, ø4, ø6

M3, M5

M3, M5, 1/8

Applicable tubing O.D. Connect ion threadSeries

KS

KX (High Speed Type)ø4, ø6, ø8, ø10, ø12

M5 x 0.8, M6 x 1.01/8, 1/4, 3/8, 1/2


HDLLLL

ø4, ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2Applicable tubing O.D. Connection threadSeries

KC ø4, ø6, ø8, ø10, ø12M5 x 0.8

1/8, 1/4, 3/8, 1/2

¡ Applicable to use for oscillating and rotating sections in robots.¡ Low torque rotation style rotary One-touch fittings.¡ Copper-free (Electroless nickel plated)

Rotary One-touch Fittings KS/KX

¡ Compact and non-tool connection¡ Compact piping space¡ Hose nipple, Hose elbow, Barb

Miniature Fittings M

¡ Applicable for use on soft copper steel pipe.¡ Flared ridge metal ferrule.

Self-align Fittings H/DL/L/LL¡ One-touch installation and removal.¡ Built-in self-seal mechanism.¡ Air does not exhaust after removal of

tubing.¡ Copper-free (Electroless nickel plated)

Self-seal Fittings KC


KM ø4, ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2


KF ø4, ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2

¡ Compact manifold piping possible.

One-touch Fittings Manifold KM

¡ Vacuum −101.3 kPa applicable¡ Piping can be done without removing nut.¡ Fluid temperature: −5 to 150 ° C (Brass sleeve) −5 to 60 ° C (Resin sleeve)¡ Steam can be used.¡ Grease-free

Insert Fittings KF

Applicable tubing: Metric size

Fittings and Tubing

One-touch Fittings KQ2


KQ2 Metric Metricø2, ø3.2, ø4, ø6, ø8ø10, ø12, ø16

M5 x 0.8, M6 x 1.0, M3 x 0.5R, Rc 1/8, 1/4, 3/8, 1/2


KQB2 ø3.2, ø4, ø6, ø8ø10, ø12, ø16M5

R/Rc/G 1/8, 1/4, 3/8, 1/2

¡ Compact and lightweight¡ Fluid temperature: −5 to 150 ° C¡ Brass parts: Electroless nickel plated¡ Grease-free

Metal One-touch Fittings KQB2 ¡ Possible to use in vacuum to −100 kPa.¡ Improved tube insertion/removal: Insertion force: Max. 30% reduction

: Removal force: Max. 20% reduction∗ ∗Tube pulling out strength is ensured to be equivalent to existing model.

¡ Compact and lightweight: Dimensions height direction 24% shorter∗

Dimensions horizontal direction 23% shorter∗ : Weight 57% lighter∗∗ Existing model KQ2 series Male elbow/Applicable tubing O.D.: 6/ Connection thread: R1/8

¡ Body type: totaled 51 models¡ Thread material/Surface treatment: 2 types ∗∗Brass, Brass + Electroless nickel plated

15


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Applicable tubing O.D. Connection thread (R, NPT)Series

KK130 ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2

No. of connecting tubes Applicable tubing O.D.Series

DMK 6, 12 ø3.2, ø4


KB ø4, ø6, ø8, ø10, ø12, ø16 1/8, 1/4, 3/8, 1/2


KK

KKH

ø3.2, ø4, ø6, ø8ø10, ø12, ø16

—

M5 x 0.8, 1/8, 1/43/8, 1/2, 3/4

1/8, 1/4, 3/8, 1/2


DM 6, 12 ø4, ø6


KDM 10, 20 ø3.2, ø4, ø6, ø8

¡ One-touch fitting type standardized.(KK)¡ Use of ultra high-impact PBT resin.(KKH)

S Couplers KK/KKH ¡ Cv factor: increased by 34% ∗¡ Plug insertion force: reduced by 22%

(20 N) ∗¡ Lightweight: reduced by 14% (12 g) ∗

∗ : Compared to the existing model

S Couplers KK130

¡ One-touch installation and removal ofmulti-tubes.

¡ Prevents installation mistakes.

Multi-connector DM ¡ One-touch installation and removal of

multi-tubes.¡ Prevents installation mistakes.

Multi-connector with One-touch Fittings DMK

¡ One-touch installation and removal ofmulti-tubes.

¡ Prevents installation mistakes.¡ Built-in One-touch fittings.

Rectangular Multi-connector KDM ¡ Centralized distribution of supply air.¡ One-touch fitting installation without the

use of tools.¡ Air output direction possible

through 360 ° C.

Piping Module KB


KA ø3.2, ø4, ø6, ø8, ø10, ø12 M5 x 0.8, M6 x 1.0standard UNI thread, 1/8, 1/4, 3/8, 1/2

¡ Surface resistance: 10 4 Ω to 10 7 Ω¡ For preventing static electricity¡ Body: Conductive resin used for seal

parts¡ Copper-free (Electroless nickel plated)¡ Uni thread

Antistatic One-touch Fittings KA¡ Compact and lightweight¡ Fluid temperature: −5 to 150 ° C¡ Material: Metal parts stainless steel 316,

seal parts special FKM¡ Grease-free/Can be used with steam.

Certified to meet current FoodSanitation Law standards.

Stainless Steel 316 One-touch Fittings KQG2


MetricKQG2 ø3.2, ø4, ø6, ø8ø10, ø12, ø16M5

R/Rc 1/8, 1/4, 3/8, 1/2

16


18/36


Connection threadSeries

KKA 1/8, 1/4, 3/8, 1/2, 3/4, 1, 1 1 / 4, 1 1 / 2

Maximum operating pressure Operating temperatureSeries

LQ1 1.0 MPa 0 to 200 ° C

¡ Body material: Stainless steel 304¡ Seal material: Fluoropolymer (Special

FKM) is employed.¡ Grease-free¡ Check valve built in to both plug and

socket

S Couplers Stainless Steel Type KKA

Fluoropolymer Fittings Hyper Fitting LQ1


MS ø3.2, ø4, ø6 M5


KP ø4, ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2

Maximum operating pressure Operating temperatureSeries

LQ3 1.0 MPa Nut material PVDF: 0 to 150° C

Nut material PFA: 0 to 200 ° C

¡ Possible to use in corrosive conditions¡ Compact piping space¡

Hose nipple, Hose elbow, Barb

Miniature Fittings Stainless Steel 316 MS

¡ One-touch fittings for clean room blowing systems¡ Completely oil-free (Fluoro coated rubber portions)¡ Wetted parts are non-metallic.¡ Parts washed and assembled in a clean room,

packed in a duplicate package.¡ Can be used in a vacuum (−100 kPa).

Clean One-touch Fittings for Blowing KP

Fluoropolymer Fittings Hyper Fitting LQ3

Insert bushing type

Flare type ¡ Freely choose tube positioningAs the tube runs through the fitting itself,a setting is available for any optionalposition.

¡ Can be used in pressure feed of chemicals,etc., during the production process ofsemiconductors.

¡ Applicable to chemicals such as acid,alkali and deionized water.

¡ Material: New PFA (Body, nut), PTFE(Collet)

Fluoropolymer Bore Through Connector LQHB

Applicable tubing O.D. Operatingtemperature ( ° C)Series

LQHBMetric size Inch size

3 to 25 1/8 to 1 0 to 200


MetricKFG2 ø4, ø6, ø8ø10, ø12, ø16 R·Rc 1/8, 1/4, 3/8, 1/2

¡ Possible to use in corrosive conditions¡ Metal parts: Stainless steel 303

Stainless One-touch Fittings KG


KG ø4, ø6, ø8, ø10, ø12, ø16 M5 x 0.8, M6 x 1.01/8, 1/4, 3/8, 1/2

¡ Compact and lightweight¡ Fluid temperature: −65 to 260 ° C (Swivel

elbow:−5 to 150 ° C )¡ Material: Stainless steel 316

Rubber material is not used.(Exceptswivel elbow)

¡ Grease-free/Can be used with steam.Certified to meet current Food SanitationLaw standards

Stainless Steel 316 Insert Fittings KFG2

17


19/36


¡ Metal seal type.¡ Air suppy to rotary/pivot shafts of turntables

and robot arms.¡ Low rotational torque: 0.003 to 0.50 N·m or less¡ Operating temperature: −10 to 80 ° C¡ Allowable RPM: 200 to 3000 min −1(r.p.m)

Low Torque Rotary Joint MQR

No. of circuits Port size Operating pressureSeries

MQR 1, 2, 4, 8, 12, 16 M5 x 0.8 −100 kPa to 1 MPa

¡ For general pneumatic tubing¡ Maximum operating pressure: 1.5 MPa

(at 20°

C)

Nylon Tubing T ¡ Maximum operating pressure: 1.0 MPa

(at 20 ° C)

Soft Nylon Tubing TS

Color FluidSeries

T · TIA ø4, ø6, ø8, ø10, ø12, ø16 Black, White, Red, Blue, Yellow, Green

Tubing O.D.

Metric size

Air, Water

Color FluidSeries

TU · TIUB ø2, ø4, ø6, ø8ø10, ø12, ø16

Black, White, Red, Blue, Yellow,Green, Clear, Orange, and Others

Total 29 colors

Tubing O.D.

Metric size

Air, Water

Tubing O.D. Color FluidSeries

TUS ø4, ø6, ø8, ø10, ø12 Black, White, Red, Blue, Yellow,Green, Translucent, Yellow brown

Air

¡ Maximum operating pressure: 0.8 MPa(at 20 ° C)

Polyurethane Tubing TU ¡ Maximum operating pressure: 0.6 MPa

(at 20 ° C)

Soft Polyurethane Tubing TUS

¡ Material: New PFA¡ Fitting integrated, all-in-one structure

· Hyper fitting/LQ2 series used¡ Triple seal structure

Fluoropolymer Needle Valve LVN

Applicable tubing O.D.

Metric InchSeries Flow adjustment range

(L/min)

LVN

Orifice dia. (mm ø)

4 to 12 1/8 to 1/2 0 to 12 4.4 to 10

Color FluidSeries

TS · TISA ø4, ø6, ø8, ø10, ø12, ø16 Black, White, Red, Blue, Yellow, Green

Tubing O.D.Metric size

Air, Water ∗

∗ Compatible with water due to a change in materials. Compatible fluid typesare printed on the tube body for differentiation, so please be sure to checkthis. (Refer to the table below.) If using the previous TS/TISA series with“water”, the tube may shrink and cause air leakage or the tube may fall out.

Print code FluidPrevious

NEWSMC TS 0604 SOFTNYLON 6 x 4¡ SMC TS 0604 SOFTNYLON 6 x 4

Air

Air, Water

Printing/Fluid

Color FluidSeries

TUZ ø4, ø6, ø8, ø10, ø12 Black, White, Red, Blue, Yellow, Green


Air

¡ Superior restoring compared to the nylontubing.

Hard Polyurethane Tubing TUH ¡ Abrasion: Approx. 1/3 (Compared with

SMC polyurethane tubing TU series)

Wear Resistant Tubing TUZ

Maximum operating pressureTubing O.D. FluidSeries

TUH0.8 MPa (at 20° C)

1.0 MPa (at 20° C)

Standard type

High pressure typeø4, ø6, ø8ø10, ø12

Air

ColorBlack, White, Blue,

Translucent

18


20/36


¡ Flexible¡ Maximum operating pressure: 0.8 MPa

(at 20 °C)¡ For moving applications.

Polyurethane Coil Tubing TCU ¡ Maximum operating pressure: 0.8 MPa

(at 20 °C)¡ Compact piping

Polyurethane Flat Tubing TFU


TFU ø4, ø6, ø8 BlackNumber of cores

2, 3 Air

Air


TCU ø4, ø6, ø8 BlackNumber of cores

1, 2, 3 Air

Note) Colors other than black are available as Made-to-Order specifications.

Color FluidSeries

TQ ø4, ø6, ø8, ø10, ø12Translucent

(Material color)

Tubing O.D.

Metric size

Air, Water,Inert gas, Solvent

Color FluidSeries

TAU ø3.2, ø4, ø6, ø8, ø10, ø12 Black

Tubing O.D.

Metric size

Air

¡ Carries fluid such as solvent with a softand abrasion resistant tube.

¡ 2-layer structureOuter layer: Special nylon resin

¡ Inner layer: Special fluoropolymerInternal smoothness: Equivalent to Ra0.02 µm

2-Layer Soft Fluoropolymer Tubing TQ

Color FluidSeries

TAS ø3.2, ø4, ø6, ø8, ø10, ø12 Black

Tubing O.D.

Metric size

ColorSeries

TL/TIL ø4, ø6, ø8, ø10, ø12, ø19 Translucent

Tubing O.D.

Metric size

¡ Maximum operating pressure: 1.2 MPa(at 20 °C)

¡ For preventing static electricity.

Antistatic Soft Nylon Tubing TAS

¡ Maximum operating pressure: 0.9 MPa(at 20 °C)

¡ For preventing static electricity.

Antistatic Polyurethane Tubing TAU ¡ Maximum operating pressure: 1.0 MPa

(at 20 °C)¡ Maximum operating temperature: 260 °C

(This can vary according to operatingpressure.)

Fluoropolymer Tubing TL

Color FluidSeries

TH/TIH ø4, ø6, ø8, ø10, ø12 Translucent, Black, Red, Blue


Air, Water

Color FluidSeries

TD/TID ø4, ø6, ø8, ø10, ø12 Translucent


Air, Water

FEP Tubing (Fluoropolymer) TH ¡ Maximum operating pressure: 1.6 MPa (at 20 ° C)∗¡ Food Sanitation Law compliant¡ Complies with FDA (Food and Drug Administration) §177-1550

dissolution test.¡ Maximum operating temperature: 260 ° C (This can

vary according to operating pressure.)∗ This can vary according to size.

Soft Fluoropolymer Tubing TD ¡ Maximum operating pressure: 2.3 MPa (at 20 ° C)∗¡ Food Sanitation Law compliant¡ Complies with FDA (Food and Drug Administration) §177-1550 dissolution test.¡ Maximum operating temperature: 200° C (This can vary according to operating pressure.)∗ This can vary according to size.

19


21/36


ColorSeries

TLM/TILM ø2, ø3, ø4, ø6, ø8, ø10, ø12, ø16, ø19, ø25 Translucent, Black, Red, Blue

Tubing O.D.

Metric sizeColor FluidSeries

TPH ø4, ø6, ø8, ø10, ø12 Black, White, Red, Blue, Yellow, Green

Tubing O.D.

Metric size

Air, Water, Other

¡ Maximum operating temperature: 260 °C (This can vary accordingto operating pressure.)

¡ Food Sanitation Law compliant¡ Complies with FDA (Food and Drug Administration) §177-1550

dissolution test.

Fluoropolymer Tubing (PFA) TLM Polyolefin Tubing TPH

Tube Cutter TK

Applicable tubing materialSeries

TK-1TK-2TK-3

13 mm or less

18 mm or less

12 mm or less

Nylon, Soft nylon,Polyurethane, and

other soft plastic tubing

Applicable tubing O.D.

¡ With One-touch fitting (Straight, Elbow)¡ Space-saving. Mountable side by side

without clearance.¡ Precision indicator setting function¡ Simultaneous copying is possible

for maximum 10 units.

2-Color Display High-Precision Digital Pressure SwitchZSE30A(F)/ISE30A

Type Rated pressure rangeSeries

ZSE30AFZSE30AISE30A

Compound pressure

Vacuum pressure

Positive pressure

−100.0 to 100.0 kPa

0.0 to −101.0 kPa

−0.100 to 1.000 MPa


ZSE40AFZSE40AISE40A

Compound pressure

Vacuum pressure

Positive pressure

−100.0 to 100.0 kPa

0.0 to −101.3 kPa

−0.100 to 1.000 MPa

¡ IP65¡ Applicable fluid: Air, Non-corrosive gas,

Non-flammable gas¡ Simultaneous copying is possible

for maximum 10 units.¡ 3-step setting¡ With One-touch fitting

2-Color Display High-Precision Digital Pressure SwitchZSE40A(F)/ISE40A

Pressure Switches


ZSE10FZSE10ISE10

Compound pressure

Vacuum pressure

Positive pressure

−100.0 to 100.0 kPa

0.0 to −101.0 kPa

−0.100 to 1.000 MPa


ZSE80FZSE80ISE80ISE80H

Compound pressure

Vacuum pressure

Positive pressure

Positive pressure

−100.0 to 100.0 kPa

0.0 to −101.0 kPa

−0.100 to 1.000 MPa

−0.100 to 2.000 MPa

¡ Low profile 9.8 mm¡ Vertical mounting space reduced to approx. 1/2

(Compared to ZSE/ISE30A series)¡ Simultaneous copying is possible for maximum 10 units.¡ 3-step setting

Digital Pressure Switch ZSE10(F)/ISE10

¡ Suitable for a wide variety of fluids withstainless diaphragm

¡ IP65¡ RoHS compatible¡ Low leakage VCR, Swagelok compatible fittings can be selected. With One-touch fitting (Straight, Elbow)¡ Back piping, underside piping

2-Color Display Digital Pressure SwitchZSE80(F)/ISE80(H)

ø4, ø6

ø8, ø10, ø12

1.0 MPa

0.7 MPa (at 20 °C)

¡ Maximum operating pressure

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PSE531PSE533PSE532PSE530

Vacuum pressure

Compound pressure

Low pressure

Positive pressure

0 to −101 kPa

−101 to 101 kPa

0 to 101 kPa

0 to 1 MPa

¡ Connector¡ Analog output (voltage)

Compact Pneumatic Pressure Sensor PSE53


PSE541PSE543PSE540

Vacuum pressure

Compound pressure

Positive pressure

0 to −101 kPa

−100 to 100 kPa

0 to 1 MPa


PSE550 Differential pressure 0 to 2 kPa

¡ Analog output (voltage)

Compact Pneumatic Pressure Senso r PSE54 ¡ Suitable for applications such as air current volume

maintenance, filter blockage, and liquid surface detection¡ Analog output (voltage/current)

Low Differential Pressure Sensor PSE55

¡ Wetted parts: Stainless steel 316L¡ IP65¡ Suitable for a wide variety of fluids¡ Analog output (voltage/current)¡ Low leakage VCR , Swagelok compatible fittings can be selected.

Pressure Sensor for General Fluids PSE56


PSE561PSE563PSE564PSE560

Vacuum pressure

Compound pressure

Positive pressure

Positive pressure

0 to −101 kPa

−100 to 100 kPa

0 to 500 kPa

0 to 1 MPa

Set pressure rangeSeries

PSE300

−101 to 101 kPa

10 to −101 kPa

−10 to 100 kPa

−0.1 to 1 MPa−50 to 500 kPa

−0.2 to 2 kPa

Set pressure rangeSeries

PSE200

−101 to 101 kPa

10 to −101 kPa

−10 to 101 kPa

−0.1 to 1 MPa

Type Set pressure rangeSeries

IS10 Positivepressure0.1 to 0.4 MPa0.1 to 0.6 MPa

¡ Four sensors can be connected.¡ Applicable sensors: PSE53 , 54 , 56¡ Capable of controlling various different

applications from one controller¡ 4 inputs, 5 outputs (2 outputs for 1ch, 1

output for 2 to 4ch)

Multi-Channel Digital Pressure Sensor ControllerPSE200

¡ Applicable sensors: PSE53 , 54 , 550, 56¡ Compatible with voltage input and current input¡ Response time: 1 ms¡ Space-saving, capable of vertical and horizontal contact mounting¡ Panel mounting, Bracket mounting, DIN rail mounting

2-Color Display Digital Pressure Sensor ControllerPSE300 ¡ 16% lighter, 11% smaller (Compared with IS1000)

¡ Service life: 5 million cycles¡ Can be connected to modular type F.R.L. units.

Pressure Switch/Read Switch Type IS10

Type Set pressure rangeSeries

PS1000PS1100PS1200

Positive pressure

For vacuum/residual pressure

For vacuum

−0.1 to 0.45 MPa

−0.1 to 0.4 MPa

−100 to 0 kPa

¡ Plug-in reducer for One-touch fittings.¡ With LED light.

Air Checker: Electronic Pressure Switch PS1000/1100/1200

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¡ Air, N 2, Ar, CO 2¡ Grease-free¡ Integrated flow adjustment valve¡ Compact, Lightweight, Space-saving

2-Color Display Digital Flow Switch PFM

Set flow range (L/min)

( ): For CO 2

Series

PFM

0.2 to 10 (0.2 to 5)

0.5 to 25 (0.5 to 12.5)

1 to 50 (1 to 25)

2 to 100 (2 to 50)

Set flow range (L/min)Series

PF3W

0.5 to 4

2 to 16

5 to 40

10 to 100

50 to 250


PF2A

1 to 10

5 to 50

10 to 100

20 to 200

50 to 500

150 to 3000

300 to 6000

600 to 12000

¡ Integrated type and separate monitor type are available.¡ Switch output, accumulated pulse output, analog output¡ Capable of switching back and forth between cumulative and instantaneous flow¡ IP65

Digital Flow Switch for Air PF2A

¡ 3-color / 2-screen display¡ Integrated flow adjustment valve and

temperature sensor¡ 40% smaller than existing

product (PF2W)¡ IP65 compliant,

non-grease type¡ Fluid temperature: 0 to 90°C

3-Color Display Digital Flow Switch for Water PF3W


PF2D0.4 to 4

1.8 to 20

4.0 to 40


PF3W10 to 100

30 to 250

¡ Body sensor: New PFA, Tube: Super PFA¡ Low-particle generation, Excellent flow-through

characteristics

Digital Flow Switch for Deionized Water and Chemical Liquids PF2D

¡ Applicable fluid: Deionized water and chemical, etc¡ 3-color / 2-screen display¡ IP65 compliant, non-grease type¡ Fluid temperature: 0 to 70 ° C

3-Color Display Digital Flow Switch for PVC Piping PF3W

Flow Switches

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Electrostatic Sensor IZE11

Rated measurementrange

Minimum unitsetting OutputSeries

IZE11 −0.4 kV to +0.4 kV−20 kV to +20 kV

0.001 kV(at ± 0.4 kV)

0.1 kV(at ± 20 kV)

Switch output x 2 + Analog output(1 to 5 V, 4 to 20 mA)

¡ Detects electrostatic potential of theworkpiece, and is capable of switch output,analog output or output of current.

¡ Detects electrostatic potential of theworkpiece, and is capable of switch output,analog output or output of current.

Electrostatic Sensor IZD10

Output voltageMeasurement potentialEffective detection

distanceSeries

IZD10-110

IZD10-510

± 0.4 kV(At detection distance 25 mm)

± 20 kV(At detection distance 50 mm)

1 to 5 V

(Output impedance: )Approx. 100 Ω10 to 50 mm

25 to 75 mm

Ion generation method Ion balanceSeries

IZN10 Corona discharge type Energy saving static electricity elimination nozzle:±10 V or less

High flow static electricity elimination nozzle:±15 V or less

¡ Dust removal and static electricity elimination by air blowSpot type static electricity elimination.

¡

Slim design: Thickness dimension 16 mm¡ Nozzle type can be selected according to applications.• Energy saving static electricity elimination

nozzle (Short range static electricity elimination,design focuses on ion balance)

• High flow static electricity elimination nozzle(Long range static electricity elimination anddust removal)

¡ With alarm functionHigh-voltage error, electrode needlecontamination detector

Ionizer/Nozzle Type IZN10

Type Ion balanceSeries

IZS42IZS41IZS40

Dual AC type

Feedback sensor type

Standard type

Ion generation method

Corona discharge type ± 30 V

¡ Potential amplitude is reduced with Dual AC type.25 V or less (Installation height: 300 mm)

¡ Rapid elimination of static electricity by afeedback sensor.

¡ Reduction of adjustment and maintenancelabor by auto balance sensor.

¡ Simple operation: Can be controlled bypowering the ionizer ON. (Standard type)

¡ Setting ionizer with remote controller.¡ Transition wiring may be used.¡ High speed static electricity elimination cartridges

and energy saving static electricity eliminationcartridges are available.

Ionizer/Bar type IZS40/41/42

Rated measurement range Minimum display unitSeries

IZH10 ± 20.0 kV

¡ Compact design: 80 mm × 110 mm × 39 mm¡ Weight: 280 g¡ Static electricity elimination time: 1.5 seconds¡ With alarm function

High-voltage error, electrode needlecontamination detector

¡ 2 types of fans available.Rapid static electricity eliminating fan/ Low-noise fan

Ionizer/Fan Type IZF10

Ion generation method Ion balanceSeries

IZF10 Corona discharge type (DC)±

13 V

¡ Easy-to-use handheld electrostatic meter.¡ Weight: 85g (excluding dry cell batteries)¡ With backlight¡ LOW battery indicator¡ Peak/Bottom value indication¡ Zero-clear function¡ Auto power-off function

Handheld Electrostatic Meter IZH10

0.1 kV ( ± 1.0 to ± 20.0 kV)0.01 kV (0 to ± 0.99 kV)

Static Electricity Elimination Equipment

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¡ The valve direction clearly indicates whether thevalve is open or closed.

¡ Small knob operating force. (0.04 to 0.14 N·m)

Finger Valve VHK ¡ For Air, medium vacuum, water, oil, steam (can be used with heated water.)¡ Body material: (Air) Aluminum, Resin (Water, oil, medium vacuum) C37, Stainless steel¡ Available with One-touch fittings (resin body)¡ Flow rate: 20% more flow∗

¡ Height: 10% smaller ∗

¡ Lightweight: 30% lighter∗

∗ Comparison with SMC existing model

Direct Operated 2 Port Solenoid Valve VX2

Actuation Port size Orifice diameter (mmø)Series

VX21/22/23 N.C./N.O. 1/8 to 1/2ø6 to ø12 2 to 10

Description Type Port sizeSeries

VHK2VHK3

Finger Valve2 port valve

3 port valveø4 to ø12

M5, 1/8 to 1/2

2 or 3 port valve selectable

¡ For air, water, oil, heated water, high temperature oil¡ Body material: C37, CAC407, Aluminum, Resin and Stainless steel¡ Height: Approx. 7% smaller (7 mm) ∗¡ Enclosure: IP65

(Electrical entry “Faston” type terminal is IP40)∗Comparison with SMC existing model (VXD24)

Pilot Operated 2 Port Solenoid Valve VXD ¡ For air, water, oil, heated water, high temperature oil¡ Body material: C37, Stainless steel, Aluminum, and Resin

(With One-touch fittings)¡ Enclosure: IP65

Zero Differential Pressure Type/ Pilot Operated 2 Port Solenoid Valve VXZ


VXZ N.C./N.O. 1/4 to 1 10 to 25

¡ For air, water, heated water, steam¡ Body material: C37, Stainless steel¡ Special FKM seal material for high temperature

(Leakage rate: 1 cm 3 /min or less)¡ Enclosure: IP65

Zero Differential Pressure Type/ Pilot Operated 2 Port Solenoid Valve VXS

¡ For air, medium vacuum, water¡ Body material: Aluminum, Resin (PPS), C37, Stainless steel¡ With One-touch fittings (resin body)¡ IP65

Compact Direct Operated 2 Port Solenoid Valve VDW

Actuation Port size Orifice diameterSeries

VDW10/20 N.C. ø3.2, ø4, ø6, M5, 1/8 ø1 to ø3.2


VXD N.C./N.O. 1/4 to 132 A to 50 A

10 to 50


VXS N.C./N.O. 1/4 to 1 10 to 25

Compact Direct Operated 2/3 Port SolenoidValve for Chemical Liquids LVM

Pinch Valves AXTP20

Actuation Tubing Operating pressureSeries

AXTP20 N.O. Silicone etc.Outside diameter (O.D.) ø4, ø6 ø1/4

0 to 100 kPa

Valve structure Actuation Orifice diameter (mmø)Series

LVM09/090

LVM11

LVM10/100LVM15/150LVM20/200

Diaphragm typeDirectly operated poppet

(Locker type)



(Locker type)

N.C.N.O.

Universal

N.C.

N.C.N.O.

Universal

1.1

1.5

1.4

1.6

2

¡ Isolated structureDiaphragm isolates the solenoid drive body from the fluid.

¡ Wetted parts: Body/plate: PEEKDiaphragm: EPDM, FKM, Kalrez ® can be selected.

2/3 Port Valves for Fluid Control

24


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Actuation Port sizeSeries

Threadedtype

LVA N.C./N.O.Double acting 1/8 to 1

Orifice diameter (mmø)

2 to 22

¡ Body material: New PFA/Stainless steel/PPS¡ Diaphragm material: PTFE, EPDM, NBR can be selected.

Air Operated Chemical Liquid Valve/Threaded TypeLVA

ActuationPort size

(Applicable tubing O.D.)Series

Manual type(Integral fitting/ Threaded type)

LVH N.C.1/8 to 1/2

(Metric:ø3 to ø12Inch:1/8 to 1/2)

Orifice diameter(mm ø)

4 to 12

ActuationApplicable tubing O.D.Note)

Metric InchSeries

Integral fitting

Tube extensionLVD

N.C. N.O./ Double acting


¡ Body material:New PFA/Stainless steel/ PPS

¡

Compatible with locking and non-lockingtypes

Manually Operated Chemical Liquid Valve/Integral Fitting/Threaded TypeLVH ¡ Lineup of compact and space-saving types

Up to 29% reduction in dimensions on

piping side¡ Body material: New PFA¡ Diaphragm material: PTFE¡ Actuator material: PPS

Air Operated Chemical Liquid Valve/Compact TypeLVD

¡ No screws, all-in-one integrated designNon-metallic structure with no metalscrews used to fasten the actuator portionand body portion

¡ Body material: New PFA¡ Diaphragm material: PTFE¡ Actuator material: PVDF

Chemical Liquid Valve/Non-Metallic Exterior LVQ ¡ Applicable to rigid vinyl chloride tube: Union type

with PVC unfixed union¡ Body material: CPVC, Diaphragm material: PTFE¡ O-ring material: FKM, EPDM (selectable)¡ Applicable fluids: Deionized water, chemicals

Vinyl Chloride Air Operated Valve LVP

3 to 19

6 to 19

1/8 to 3/4

1/4 to 3/4

2 to 16

4 to 16

Note) Tubing O.D. for tube extension type.

Actuation OptionApplicable tubing O.D.Type

LVP5

LVP6


N.C.N.O.

Double acting

ActuationApplicable tubing O.D.

Metric InchSeries

Integral fitting

Space-saving type

Tube extension

LVQN.C.N.O.

Double acting


3 to 25 1/8 to 1

4 to 22

Note) Tubing size

Fitting size: 2 to 6

6 to 25Note) 1/4 to 1Note)

ø22 (Nominal dia.16A)



16

22

With flow rateadjustment

Applicable tubing O.D. Orifice diameter ActuationSeries




ø60 (Nominal dia.50A)ø75 (Nominal dia.65A)


¡ Complies to JIS standard for polyvinyl chloride piping (JIS K 6742)¡ Applicable fluids: Deionized water, Chemicals¡ Fluid contact materials:

PVC (Body)PTFE (Poppet)FKM (O-ring: Standard)EPDM (O-ring: Optional)

¡ Flow-rate characteristics:Cv factor 10 to 198

¡ Easy piping with union connection

PVC Quick Drain Valve LVW

ø25

ø40

LVW60

LVW80

LVW90ø65

ø80

Double acting

¡ Body material:New PFA¡ Same configuration N.C./N.O./double-acting¡ Able to handle fluid temperatures up to 100 °C

Air Operated Chemical Liquid Valve/Integral Fitting TypeLVC

Actuation Applicable tubing O.D.Series

Integralfitting

LVC N.C./N.O.Double acting

Metric: 3 to 25Inch: 1/8 to 1

Orifice diameter (mmø)

4 to 22

25


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Process Pump/Double Acting Pump PA

Type ActionDischarge rate

(L/min) Wetted part materialSeries

PA3000

PA5000

Automatically operated type

Air operated type


Air operated type

ADC12(Aluminum)

SCS14(Stainless steel)

1 to 20

0.1 to 12

5 to 45

1 to 24

Process Pump/Single Acting Pump PB

Non-Metallic Pump/Double Acting PumpPAF Liquid Dispense Pump (Solenoid type) LSP

Discharge rate adjustment range Wetted part materialSeries

LSP5 to 50 µL

50 to 100 µL

100 to 200 µL

Body: PEEKDiaphragm/Check valve: EPDM,FKM

PA3 0PA3 13PA5 0PA5 13

Type ActionDischarge rate

(L/min) Wetted part materialSeries

PAF3000

PAF5000


Air operated type


Air operated type

New PFA(Fluororesin)

1 to 20

1 to 15

5 to 45

5 to 38

PAF3410PAF3413PAF5410PAF5413

Type ActionDischarge rate(mL/min) Wetted part materialSeries

PB1000

Built-in solenoid valve

Air operated type

Air operated type

PolypropyleneStainless Steel 316

8 to 2000

8 to 1000

8 to 1000

PB1011APB1013A

PB1313A New PFA(Fluororesin)

∗ Tightening bolt, Air switching valve: Stainless steelUse the PAF series standard products when metal-free pump is necessary

for hydrofluoric acid, etc./div.

Fluid adsorption/ discharge rate setting range RepeatabilitySeries

LDP 0.05 to 5 mL

Fluid adsorption/ discharge rate resolution

0.005 mL ±1%

Dispense Pump LDP

Pumps

¡ Discharge rate can be adjusted.¡ Discharge rate stability (repetition

accuracy ±1 )∗ ±2% at 5 to 15 µL

¡ Shutoff function¡ Self-contained system does not need any

priming.¡ Fluid used: Water, deionized water,

diluent, and cleaning fluid

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Process Gas Equipment

¡ For UHP gas delivery in semiconductor and other cleanindustries.

¡ Body material: Stainless steel 316L secondary remelt orStainless steel 316L

¡ Wetted parts material: Electropolish¡ External metal seal construction

Regulator/Back Pressure Regulator for Ultra High Purity AP/SL/AZ/BP

Connection sizeSeries

AP/SL

AP

AZ

BP

Distribution (Compact)

Distribution

Bulk gas delivery

Source

Sub-atmospheric

Source

Distribution

Source

Sub-atmospheric

−

Body material

Stainless steel 316Lsecondary remelt

Connection type

Face sealTube stub

1/4", 3/8"

1/4", 3/8", 1/2", 3/4"

1/2", 3/4", 1"Single

stage

Two stage

Single

stage

Back pressure

regulator

Stainless steel 316L




1/4", 3/8"1/2", 3/4"

1/4", 3/8"

1/4", 3/8"1/2"

1/4", 3/8"

¡ For wide variety of applications from semiconductor to general¡ Body material Stainless steel 316 or brass available depending on gas

Regulator/Back Pressure Regulator for General Applications AK/BP


AK

BP

Distribution

Source

Sub-atmospheric

Source

−

Body material

Stainless steel 316Brass

Connection type

NPT,Compression

fitting

1/4", 3/8"1/2"

Single

stage

Two stage

Back pressureregulator

1/4"

1/4"

¡ For UHP gas delivery in semiconductor and other clean industries.¡ Shut off valve which uses a diaphragm for a moving element to open and

close the valve.¡ Springless diaphragm valves do not have a wetted spring.

Diaphragm Valve for Ultra High Purity AP


AP

Body material


Connection type

Face sealTube stub

1/4", 3/8"1/2", 3/4"

Air operated type

Manually operated type ∗ 1/2: Machined type/Tube weld only

Body material Connection sizeSeries

AZStainless steel

316L1/4, 3/8

1/2∗

Connection type

Face seal

¡ Cleaned for high purity semiconductor applications.¡ Cleanroom assembled and He leaked tested.¡ Valve meets dimensional requirements of SEMI Standard.¡ User-friendly forged body

Diaphragm Valve for Ultra High Purity AZ

Air operated type

Manually operated type

[Check Valve]¡ To prevent reverse flow.¡ Unique design with only one moving part in the gas stream, an O-ring.¡ It is a springless design, free of springs and poppets.[Vacuum Generator]¡ Vacuum generator¡ Applicable to emission of unnecessary gas remaining inside piping during replacement

of gas cylinder.[Flow Switch]¡ It detects excess flow above a given flow rate, caused by pipe breakage etc.

Check Valve/Vacuum Generator/Flow Switch AP

Body material Connection sizeSeries

AP1/4", 3/8"

1/2", 3/4"

Connection type

Face sealTube stub

Check valve

Vacuum generator

Flow switch

Stainless steel 316L secondary remelt, Stainless steel 316L


Stainless steel 316L secondary remelt, Stainless steel 316L

27


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Port size Temperature ( °C)Series

FQ1 Rc1/2, 3/4, 1Maximum operating pressure

1 MPa MAX.80

¡ Ideal for low flow filtration (MAX.30 L/min)¡ No tools required.

Quick Change Filter/For Cleaning Fluid FQ1

Filters for Liquids

Chillers (Circulating Fluid Temperature Controller)

¡ Filtration efficiency: 99% or more

High Precision Filter for Liquids FGH

Port size Temperature ( °C)Series

FGH Rc3/8 to 1Maximum operating pressure

1 MPa MAX.80

¡ Air-cooled models provide cooling water whereverneeded thanks to easy mounting and easy operation.

¡ Proven performance with a wide range of applicationssuch as lasers/analysis equipment/LCD manufacturingequipment/mold temperature regulators, etc.

Refrigerated Thermo-cooler HRG

Cooling capacity Circulating liquidSeries

HRG 10 to 15 kW

Temperature stability

± 1.0/ ± 0.5 ° C

Cooling method

Air-cooledrefrigeration/ Water-cooledrefrigeration

Set temperature range

5 to 35 ° C

Clear water,Deionized water,Ethylene glycol

aqueous solution

Economy type chiler(Three-phase power supply) ¡ Compact

W 377 x H 615 x D 435, 31 kg¡ Basic type with simple function and performance¡ With ready-to-use power cord

Thermo-chiller HRS-X017

Maximum cooling capacity Circulating liquidSeries

HRS-X017 1200 W


± 2 ° C

Cooling method

Air-cooledrefrigeration


10 to 30 ° CClear water,Ethylene glycol

aqueous solution

Basic type


HRS

1300 W1900 W2400 W

5100 W


± 0.1 ° C

Cooling method

Air-cooledrefrigeration/ Water-cooledrefrigeration

Air-cooled refrigeration


5 to 40 ° CClear water,

Ethylene glycolaqueous solution

¡ Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.¡ Proven performance with a wide range of applications such as lasers/analysis equipment/LCD manufacturing equipment/mold temperature regulators, etc.¡ Compact W 377 x H 615 x D 500, 40 kg¡ Timer operation function, Low level in tank detecting function, Power failure auto-restart function, Anti-freezing function¡ Self diagnosis function¡ Ideal for overseas models (single-phase 200 to 230 VAC, single-phase 100 and 115 VAC)¡ Conforms to UL specifications, CE-marking.

Thermo-chiller HRS Compact type

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HRZD 9.5 kW x 2Temperature stability

± 0.1 ° C

Cooling method

Water-cooled refrigeration


−30 to 90 ° C Fluorinated liquid


HRW 2 to 30 kW


± 0.3 ° C

Cooling method

Water-cooledrefrigeration


20 to 90 ° C

Fluorinated liquid,Clear water,

Deionized water,Ethylene glycol

aqueous solution

¡ Temperature for two systems can be controlled

separately by one chiller.¡ Double inverter type: Substantially more energy is

saved by using a DC inverter refrigerator and inverterpump.

¡ Space saving: Footprint reduced by 23 %¡ Reduced wiring, piping and labor: Single power cable,

single facility-water piping system¡ CE-marking

Refrigerated Dual Thermo-chiller HRZD

¡ Direct heat exchanger for water circulated within a plant¡ For temperature regulation within the temperature

range where no freezer is needed¡ Proven performance with semiconductor process equipment, with a wide range of features

such as high temperature stability, wide temperature range, failure testing, external signal.¡ Conforms to UL and SEMI specifications, CE-marking.¡ Inverter type can be selected.

Water-cooled Thermo-chiller HRW (Double inverter type) (High-performance chiller (Water-cooled type)


HEC230, 600W

140, 320,600, 1200 W

Temperature stability±0.01 to 0.03°C

±0.01 to 0.03°C

Cooling method

Peltier-type air cooled

Peltier-type water cooled


10 to 60 ° C

Clear waterClear water,Fluorinated

liquid

¡ For applications requiring high-precision temperature control¡ High-precision, refrigerant-free temperature control equipment

employing Peltier elements¡ Simple structure and high reliability¡ Can easily be built into equipments with

compact and low-vibration design¡ Compatible with wide range of

power supply voltages¡ Conforms to UL specifications, CE-marking.

Peltier-type Thermo-con HEC High-precision chiller

Cooling capacitySeries

300 W

Temperature stability± 0.04 ° C

Cooling method




HED 300 to750 W


± 0.1 ° C

Cooling method

Peltier-typewatercooled


10 to 60 ° C

0 to 60 ° C−

Deionizedwater,

Chemical liquids

Peltier-type Thermoelectric Bath INR-244-757

¡ Heat exchanger employs Peltier elements for direct temperature controlof chemical liquids.

¡ Fluoropolymer heat exchanger is suitablefor a wide range of chemical liquids.

¡ Conforms to UL specifications,CE-marking.

Peltier-type Chemical Thermo-con HED Fluoropolymer temperature control equipment for chemical liquids


HEB 140 W


± 0.1 ° C

Cooling method

Peltier-typewater cooled


−15 to 60 ° CClear water,Fluorinated

aqueous liquid

¡ High-precision temperature-regulation thermostatic chamber thatemploys Peltier elements

¡ Compact and low vibration¡ Unique agitation method keeps up-down

temperature distribution to a minimum.

Peltier-type Thermoelectric Bath HEB High-precision thermoelectric bath


HRZ 1 to 15 kW


± 0.1 ° C

Cooling method



−20 to 40 ° C

20 to 90 ° C

−20 to 90 ° C



aqueous solution


HRZ 1.8 to10 kW


± 0.1 ° C

Cooling method


Set temperature range Set temperature range

−20 to 90 ° C



aqueous solution

¡ Proven performance with semiconductor processequipment, with a wide range of features suchas high temperature stability, wide temperaturerange, failure testing, external signal.

¡ All models conform to safety standards.¡ Conforms to UL and SEMI specifications, CE-marking.

Refrigerated Thermo-chiller HRZ

¡ In addition to the state-of-the-art functions of the HRZ series, these modelsemploy a DC inverter compressor to achieve better energy efficiency.

¡ Wide temperature range and cooling capacity range covered by one unit¡ Suited to the short innovation cycle of semiconductor equipment, and

capable of responding flexibly to changes in the process conditions.¡ Conforms to UL and SEMI specifications, CE-marking.

Refrigerated Thermo-chiller HRZ High-performance chiller (High-performance chiller (Built-in inverter)

Thermoelectric Bath

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HEA 22 WTemperature stability

± 0.1

Cooling method



0 to 50 Air

physical and chemical industry p-e12-16a

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