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Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and Area

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Page 1: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

Penn ESE370 Fall 2011 -- Townley & DeHon

ESE370:Circuit-Level

Modeling, Design, and Optimization for Digital Systems

Day 13: October 5, 2011

Layout and Area

Page 2: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

2

Today

• Layout– Transistors– Gates

• Design rules

• Standard cells

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 3: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

3

Transistor

Side view

Perspective view

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 4: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

4

Layout

• Sizing & positioning of transistors

• Designer controls W,L

• tox fixed for process– Sometimes

thick/thin oxide “flavors”

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 5: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

5

NMOS Geometry

Top view Perspective view

L

W

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 6: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

6

NMOS Geometry

Top view

L

W

• Color scheme– Red: gate– Green: source and drain

areas (n type diffusion)S DG

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 7: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

7

tox

• Transistors built by depositing materials– Constant rate of deposition (nm/min)– Time controls tox

• Oxides across entire chip deposited at same time– Same time interval– thickness is (roughly) constant– Process engineer sets value to:

• Assure yield• What does tox control?

– Field strength Vth, current– Achieve Performance, minimize leakage

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 8: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

8

NMOS vs PMOS

Rabaey text, Fig 2.1Penn ESE370 Fall 2011 -- Townley & DeHon

• Mostly talked about NMOS so far– PMOS: “opposite” in some sense– NMOS built on p substrate, PMOS built on n

substrate– Name refers to bias/carriers when channel is

inverted

Page 9: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

9

PMOS Geometry

n well

L

W

• Color scheme– Red: gate– Orange: source and drain

areas (p type)– Green: n well

• NMOS built on p wafer– Must add n material to

build PMOS

S DG

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 10: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

10

Body Contact

• “Fourth terminal”• Needed to set

voltage around device– PMOS: Vb = Vdd

– NMOS: Vb = GND

• At right: PMOS (orange) with body contact (dark green)

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 11: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

Penn ESE370 Fall 2011 -- Townley & DeHon

From: http://www.bioee.ee.columbia.edu/courses/cad/html/layout.html

Rotate All butPMOS Transistor90 degrees

Page 12: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

12

Interconnect

• How to connect transistors– Different layers of metal Intermediate

layers• “Contact” - metal to transistor• “Via” - metal to metal

Rabaey text, Fig 2.7kPenn ESE370 Fall 2011 -- Townley & DeHon

Page 13: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

13

Interconnect Cross Section

ITRS 2007Penn ESE370 Fall 2011 -- Townley & DeHon

Page 14: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Masks

• Define areas want to see in layer– Think of “stencil” for material deposition

• Use photoresist (PR) to form the “stencil”– Expose PR through mask– PR dissolves in exposed area– Material is deposited

• Only “sticks” in area w/ dissolved PR

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 15: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

15

Masking Process

• Goal: draw a shape on the substrate– Simplest example: draw a rectangle

Silicon wafer

Mask

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 16: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Masking Process

• First: deposit photoresist

photoresist

Mask

Silicon wafer

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 17: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

17

Masking Process

• Expose through mask– UV light

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 18: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Masking Process• Remove mask and

develop PR– Exposed area

dissolves– This is “positive

photoresist”

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 19: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Masking Process• Deposit metal through PR

window– Then dissolve remaining PR

• Why not just use mask?– Masks are expensive– Shine light through mask to

etch PR– Can reuse mask

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 20: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Logic Gates

• How to build compete inverter?– Connect NMOS,

PMOS using metal

• HW4, part 6: reverse engineer layouts into gates

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 21: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

21

Inverter Layout Example

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 22: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

22

Inverter Layout Example

• Start with PMOS, NMOS transistors

• Space for interconnect

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 23: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

23

Inverter Layout Example

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 24: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

24

Inverter Layout Example

• Add body contacts

• Connect gates of transistors

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 25: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

25

Inverter Layout Example

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 26: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

26

Inverter Layout Example

• Add contacts to source, drain, gate, body

• Connect using metal (blue)

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 27: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Design Rules• Why not adjacent

transistors?– Plenty of empty

space– If area is money,

pack in as much as possible

• Recall: processing imprecise– Margin of error for

process variation

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 28: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Design Rules• Contract between process engineer &

designer– Minimum width/spacing– Can be (often are) process specific

• Lambda rules: scalable design rules– In terms of = 0.5 Lmin (Ldrawn)– Can migrate designs from similar process– Limited scope: 45nm process != 1m

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 29: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

Design Rules: Some Examples

Penn ESE370 Fall 2011 -- Townley & DeHon

2

66

3

2

2

1.5

n doping

p doping

gate

contact

metal 1

metal 2

via

Legend

Page 30: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

30

Layout Revisited

• How to “decode” circuit from layout?

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 31: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

Penn ESE370 Fall2010 -- DeHon31

Layout to Circuit

• 1. Identify transistors

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 32: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Layout to Circuit

• 2. Add wires

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 33: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Layout to Circuit

• 2. Add wires

Penn ESE370 Fall 2010 -- Townley (DeHon)Penn ESE370 Fall 2011 -- Townley & DeHon

Page 34: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Layout to Circuit

• 2. Add wires

Penn ESE370 Fall 2010 -- Townley (DeHon)Penn ESE370 Fall 2011 -- Townley & DeHon

Page 35: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Layout to Circuit

• 2. Add wires

Penn ESE370 Fall 2010 -- Townley (DeHon)Penn ESE370 Fall 2011 -- Townley & DeHon

Page 36: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Layout #2 (practice)

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 37: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Layout #2 (practice)

• How many transistors?– PMOS?– NMOS?

• How connected?– PMOS, NMOS?

• Inputs connected?• Outputs?• What is it?

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 38: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Standard Cells• Lay out gates so that heights match

– Rows of adjacent cells– Standardized sizes

• Motivation: automated place and route– EDA tools convert HDL to layout

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 39: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

Penn ESE370 Fall 2011 -- Townley & DeHon

Standard Cell Area

inv nand3

All cellsuniformheight

Width ofchanneldeterminedby routing

Cell area

Identify the full custom and standard cell regions on 386DX diehttp://microscope.fsu.edu/chipshots/intel/386dxlarge.html

Page 40: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

Admin

• HW4 due Friday

• Exam next Wednesday– No class at noon that day

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 41: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

Exam

• Function from CMOS circuit

• CMOS circuit to implement function

• Restoration / Noise Margins– Potentially including MOS equations– Might include variation

• CMOS gate switching delay

Penn ESE370 Fall 2011 -- Townley & DeHon

Page 42: Penn ESE370 Fall 2011 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 5, 2011 Layout and

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Big Idea

• Layouts are physical realization of circuit– Geometry tradeoff

• Can decrease spacing at the cost of yield• Design rules

• Can go from circuit to layout or layout to circuit by inspection

Penn ESE370 Fall 2011 -- Townley & DeHon