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Microscale Heat Transfer Lab – University of Virginia Phonon Scattering Processes Affecting Thermal Conductance at Solid-solid Interfaces in Nanomaterial Systems Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering March 10, 2008

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Phonon Scattering Processes Affecting Thermal Conductance at Solid-solid Interfaces in Nanomaterial Systems. Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering March 10, 2008. Moore’s Law. Rocket nozzle 10 7 W/m 2. Nuclear reactor 10 6 W/m 2. - PowerPoint PPT Presentation

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Page 1: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Phonon Scattering Processes Affecting Thermal Conductance at Solid-solid Interfaces in Nanomaterial Systems

Patrick Hopkins

University of Virginia

Department of Mechanical and Aerospace Engineering

March 10, 2008

Page 2: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Moore’s Law

Hot plate

105 W/m2

Transistor size

Eq

uiv

alen

t p

ow

er d

ensi

ty [

W/m

2]

Nuclear reactor

106 W/m2

500 nm100 nm

45 nm

Rocket nozzle

107 W/m2

Page 3: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Heat generated

Rejected heat

Field effect transistors

Thermal management is highly dependent on the boundary between materials

Page 4: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Thermoelectrics

k

TSZT

2

ZT = figure of meritS = Seebeck coefficientσ = electrical conductivityk = thermal conductivityT = temperature

Page 5: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Thermal boundary resistance•Thermal boundary resistance creates a temperature drop, T, across an interface between two different materials when a heat flux is applied.

•First observed by Kapitza for a solid and liquid helium interface in 1941.

Thq BD

x

Tem

pera

ture

T

A typical resistance of

10-9-10-7 m2K/W

is equivalent to

~ 0.15-15 m Si

~ 1-100 nm SiO2

Mismatch in materials causes a resistance to heat flow across an interface.

BDBD Rh 1

Page 6: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Two types of interface resistance

Thermal Boundary ResistanceThermal Boundary Resistance• Due to difference in the acoustic

properties: Phonon reflection at the interface

• Electron-phonon interaction • Present even in the case of perfect

contact with no roughness• Microscopic quantity

hBD= thermal boundary conductance

1/hBD = thermal boundary resistance TThothot

TTcoldcold

T

Distance

Thermal Contact ResistanceThermal Contact Resistance• Important for bulk surfaces• Macroscopic quantity• Due to imperfect contact or

voids in microstructure

Distance

TThothot

TTcoldcold

T

A B

TTcoldcold

.

Q.

Q

TThothot

.

QA

TThothot.

Q B

Voids, imperfect contact

TTcoldcold

Page 7: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Major research objectives

• the role of interface disorder on interfacial heat transfer

• the effects of different phonon scattering mechanisms on interfacial heat transfer

Page 8: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Outline of presentation• Theory of phonon interfacial transport

• Measurement of interfacial transport with the transient thermoreflectance (TTR) technique

• Influence of atomic mixing on interfacial phonon transport

• Influence of high temperatures on interfacial phonon transport

• Summary

Page 9: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Thermal conduction in bulk materialsThermal conduction

Z

k = thermal conductivity [Wm-1K-1] = thermal flux [Wm-2]

T

qz

Tkqz

z

T

q

= mean free path [m]

phonon-phonon scattering length in homogeneous material

Microscopic picture

What happens if is on the order of L?

L

Page 10: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Thermal conduction in nanomaterials

n

Microscopic picture of nanocomposite

Ln

keffective of nanocomposite does not depend on phonon scattering in the individual materials but on phonon scattering at the interfaces

T

Z

Z

T

hBD = thermal boundary conductance [Wm-2K-1]

Change in material properties gives rise to hBD

q=hBDT

Page 11: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Theory of hBDPhonon flux transmitted across interface

ThddjvtzfDq BDjj

jj

cj

sincos,,,,2

1,1

2/

0 0,1,11

,1

Spectral phonon density of states[s m-3]

Phonon distribution

Phonon energy

[J]

Phonon speed[m s-1]

Phonon interfacial transmission

Projects phonon transport perpendicular to interface

jjj vtzfDI

),,()(4

1

Thq BD1

1 2I

q

j

j

jc

ddIq

4 01

,

Page 12: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Diffuse scattering

Diffuse Mismatch Model (DMM) E. T. Swartz and R. O. Pohl, 1989, "Thermal boundary resistance,” Reviews of Modern Physics, 61, 605-668.

j

jjBD

cutoffj

dvTfDT

h,1

0

1,1,11, ,4

1

diffuse scattering – phonon “looses memory” when scattered

• Scattering completely diffuse• Elastically isotropic materials• Single phonon elastic scattering

T > 50 K and realistic interfaces

Averaged properties in different crystallographic directions

Is this assumption valid?

ThddjvtzfDq BDjj

jj

cutoffj

sincos,,,,2

1,1

2/

0 0,1,11

,1

Page 13: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Maximum hBD with elastic scattering

Phonon radiation limit (PRL)

Same assumptions as DMM

DOS side 1 (softer) in DMM

DOS side 2 (harder) in PRL

PRL

DMM

j

jjBD

cutoffj

dvTfDT

h,1

01,1,11, ,

4

1

j

jjBD

cutoffj

dvTfDT

h,1

0,2,21, ,

4

1

Frequency [Hz]

Deb

ye d

ensi

ty o

f Sta

tes

[m-3

]

cutoff1

cutoff2

B

cD k

Page 14: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

DMM and PRL calculations

Page 15: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Outline of presentation

• Theory of phonon interfacial transport

• Measurement of hBD with the TTR technique

• Influence of atomic mixing on hBD

• Influence of high temperatures (T > D) on hBD

• Summary

Page 16: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Transient ThermoReflectance (TTR)Mira 900

p ~ 190 fs @ 76 MHz

= 720-880 nm16 nJ/pulse

PolarizerDetector

Lock-in AmplifierAutomated Data

Acquisition System

Verdi V5= 532 nm

5 W

RegA 9000

p ~ 190 fssingle shot - 250

kHz4 J/pulse

Verdi V10= 532 nm

10 W

Probe Beam

Sample

Dovetail Prism

Delay ~ 1500 ps

Lenses

/2 plate Beam Splitter

Acousto-Optic Modulator

VariableND Filter

Pump Beam

Page 17: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Transient ThermoReflectance (TTR)

SUBSTRATE

FILM

HEATING “PUMP”

PROBE

Thermal Diffusion

Ballistic Electron Transport

Electrons Transfer

Energy to the Lattice

Thermal Diffusion by Hot

Electrons

Thermal Equilibrium

Thermal Diffusion within Thin Film

Thermal Conductance Across the

Film/Substrate Interface

Electron-PhononCoupling (~2 ps)

Thermal Diffusion (~100 ps)

Thermal BoundaryConductance (~2 ns)

Thermal Diffusion within Substrate

Substrate Thermal Diffusion (~100 ps – 100 ns)

Focus of current analysis

Free Electrons Absorb Laser Radiation

Page 18: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

TTR data

Thermal Conductance across the

Film/Substrate Interface

Thermal Boundary Conductance (~1-10 ns)

Free Electrons Absorb Laser Radiation

50 nm Cr/Si

)](),0([)(

ttdC

h

dt

tdfs

f

bdf

2

2 ),(),(

x

tx

t

tx ss

s

)],0()([),0(

tthx

tk sfBD

ss

0

0,, )0( TT

TT

f

sfsf

0

),(

x

ts

Page 19: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Stevens, Smith, Norris, JHT, 2005Lyeo, Cahill, PRB, 2006Stoner, Maris, PRB, 1993New data

DMM compared to experimental data

Goal: investigate the over- and under-predictive trends of the DMM based on the single phonon elastic scattering assumption

Page 20: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Outline of presentation• Theory of phonon interfacial transport

• Measurement of hBD with the TTR technique

• Influence of atomic mixing on hBD

• Influence of high temperatures (T > D) on hBD

• Summary

Page 21: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

DMM assumptions

DMM Assumption Realistic Interface

Slight changes in deposition conditions can give rise to different elemental compositions around solid interfaces

Page 22: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

AES depth profiles

0

0.2

0.4

0.6

0.8

1

30 40 50 60

Ele

me

nta

l fr

ac

tio

n

0

0.2

0.4

0.6

0.8

1

30 40 50 60

Ele

me

nta

l fr

ac

tio

n

Cr-1: no backsputter

Cr-2: backsputter

Cr/Si mixing layer9.5 nm

Cr/Si mixing layer14.8 nm

Depth under Surface [nm]

Ele

men

tal F

ract

ion Si change

9.7 %/nm

Si change16.4 %/nm

Page 23: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Results from AES dataSample

IDCr Film

Thickness [nm]

Mixing Layer[nm]

Slope of Si in Beginning of Mixing

Layer [%/nm]

Cr-1 38 ± 2.1 9.5 ± 0.6 9.7 ± 0.7

Cr-2 37 ± 0.4 14.8 ± 1.0 16.4 ± 0.7

Cr-3 35 ± 0.5 11.5 ± 0.7 16.6 ± 1.0

Cr-4 35 ± 2.8 10.8 ± 0.8 7.4 ± 1.0

Cr-5 39 ± 0.5 5.8 ± 0.5 24.1 ± 1.0

Cr-6 45 ± 0.5 7.0 ± 0.4 28.1 ± 1.2

Page 24: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

TTR testing

P. E. Hopkins and P. M. Norris, Applied Physics Letters 89, 131909 (2006).

Page 25: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

hBD results

DMM predicts a constant hBD = 855 MWm-2K-1

Hopkins, Norris, Stevens, Beechem, and Graham, to appear in the Journal of Heat Transfer, 2008

Decreasing hBD with increasing mixing layer thickness

Page 26: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Virtual crystal DMM

T. E. Beechem, S. Graham, P. E. Hopkins, and P. M. Norris, Applied Physics Letters 90, 054104 (2007)

int

int

D

multiple scattering events from interatomic mixing

ppVC

jppVCjpp

BDBD RRR

D

hR 2

,1

,int

int1

The disordered region is replaced by a homogenized virtual crystal of thickness Dint having effective properties based on the disordered medium with MFP= int.

Page 27: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Virtual crystal DMM

int

int

D

multiple scattering events from interatomic mixing

ppVC

jppVCjpp

BDBD RRR

D

hR 2

,1

,int

int1

Majumdar and Reddy, APL, 2006

eppep hGk

R11

In well-matched material systems such as Cr on Si,

Rpp is very small and on the

same order as Rep, so this

additional resistance must be considered and added in

parallel with Rpp.

G = electron-phonon coupling factor

Page 28: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Virtual crystal DMM

1

2,

1,int

int 111

j

VCjpp

j

VCjppp

BDhh

D

Gkh

int

int

D

multiple scattering events from interatomic mixing

ppVC

jppVCjpp

BDBD RRR

D

hR 2

,1

,int

int1

Majumdar and Reddy, APL, 2006

eppep hGk

R11

Page 29: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

VCDMMDMM predicts hBD that is almost 8 times larger than that measured on the samples and no dependence on mixing layer thickness or composition.

The VCDMM calculations are within 18% of the measured values and show the same trend with mixing layer thickness as the measurements.

Hopkins, Norris, Stevens, Beechem, and Graham, to appear in the Journal of Heat Transfer, 2008

Page 30: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Summary

• Examined the effects of interfacial properties on hBD in the acoustically matched Cr/Si system with TTR

• DMM predicts hBD 855 MWm-2K-1 at room temperature• Measured data varies from 100-200 MWm-2K-1, depending

on deposition conditions• Multiple phonon elastic scattering could cause this over-

prediction of the DMM• DMM only takes into account single scattering events• DMM assumes a perfect interface, but interface disorder

will increase the scattering thus decreasing the hBD

• VCDMM is introduced and predicts same values and trends for Cr/Si at room temperature as experimental data

Investigate the role of interface disorder on interfacial heat transfer

Page 31: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Stevens, Smith, Norris, JHT, 2005Lyeo, Cahill, PRB, 2006Stoner, Maris, PRB, 1993New data

Summary

Goal: investigate the over- and under-predictive trends of the DMM based on the single phonon elastic scattering assumption

The presence of an interfacial mixing region causing multiple elastic scattering events which are not accounted for and may be the cause of the overestimation of the DMM in well matched material systems with Debye temperature ratios close to one.

Page 32: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Outline of presentation• Theory of phonon interfacial transport

• Measurement of hBD with the TTR technique

• Influence of atomic mixing on hBD

• Influence of high temperatures (T > D) on hBD

• Summary

Page 33: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Single phonon elastic scatteringhBD from DMM limited by f1

1exp

1

Tk

f

B

B

cD k

*Kittel, 1996, Fig. 5-1

Linear in classical regime (T>D)

f=T/Df

j

jjBD

cutoffj

dvTfDT

h,1

0

1,1,11, ,4

1

Page 34: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Single phonon elastic scatteringElastic scattering – hBD is a function of f/T in lower D material

f

j

jjBD

cutoffj

dvTfDT

h,1

01,1,11, ,

4

1

B

cD k

DMM Predictions

T/D

DPb=105 K

DAl=428 K

Page 35: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Molecular dynamics simulations

Stevens, Zhigilei, and Norris, IJHMT, 2007

0

0.4

0.8

1.2

1.6

2

0 0.1 0.2 0.3 0.4 0.5

Temperature [T *]

h* B

D/ h

* BD

( T*

=0.

25)

R=0.2

R=0.5

Linear(R=0.2)Linear(R=0.5)

Debye Temperature Ratios

R=0.5 trendline

R=0.2 trendline

Chen, Li, Yang, Wu, Lukes and Majumdar, Physica B, 2004

Kr/Ar Superlattice NanowireLennard-Jones Potential with Different Atomic Sizes

Computational results indicate a linear increase in conductance (decrease in resistance) with temperature.

Page 36: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Mismatched samples at low temperatures

Lyeo and Cahill, PRB, 2006Stoner and Maris, PRB, 1993

Page 37: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

hBD results at temperatures above D of the softer material

P. E. Hopkins, R. J. Stevens, and P. M. Norris, To appear in the Journal of Heat Transfer, HT (2008).

Pt/Al2O3 Pt/AlN

Page 38: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Analysis• Linear trend in MDS in classical regime (T>>D)• MDS calculates hBD making no assumption of elastic scattering in

interfacial phonon transport• Several samples show linear hBD trends around classical regime

j

jjBD

cj

dT

TfDvh

,1

0,11,1

),()(

4

1

DMM

JOINT FREQUENCY DMM

j

jjBD

cj

dT

TfDvh

mod,

0mod,1mod,

),()(

4

1

P. E. Hopkins and P. M. Norris, Nanoscale and Microscale Thermophysical Engineering 11, 247 (2007)

f/

T

Film (Pb)

Subs

trat

e (d

iam

ond)

Page 39: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

DMM vs. JFDMM

DMMJFDMM

Page 40: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Summary

• Measured hBD at different metal-dielectric interfaces with a range of acoustic similarity

• Observed linear trend in hBD around D

• Evidence of inelastic scattering – not predicted with DMM• JFDMM takes into account substrate phonons – and

provides better agreement with experimental data

Investigate the effects of different phonon scattering mechanisms on interfacial heat transfer

Page 41: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Stevens, Smith, Norris, JHT, 2005Lyeo, Cahill, PRB, 2006Stoner, Maris, PRB, 1993New data

Summary

Goal: investigate the over- and under-predictive trends of the DMM based on the single phonon elastic scattering assumption

The presence of inelastic scattering events, which add an additional channel of interfacial energy transport may be the cause of the underestimation of the DMM in mismatched material systems with distinctly different Debye temperatures.

Page 42: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Outline of presentation

• Theory of phonon interfacial transport

• Measurement of hBD with the TTR technique

• Influence of atomic mixing on hBD

• Influence of high temperatures (T > D) on hBD

• Summary

Page 43: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Conclusions

• Determined that interfacial mixing can play a role in phonon transport by inducing multiple phonon scattering events

• Accurately described with VCDMM taking into account e-p resistance

Investigate the role of interface disorder on interfacial heat transfer

Investigate the effects of different phonon scattering mechanisms on interfacial heat transfer

• Inelastic scattering contributes to hBD at temperatures close to D of the softer material where substrate phonon population is still quantum mechanically increasing

• Developed JFDMM to take into account some portion of inelastic scattering

Page 44: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

ImpactHow does the knowledge of phonon scattering affect

nanoapplications?

k

TSZT

2

Page 45: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Acknowledgments• Pamela Norris, my doctoral advisor and head of the Microscale

Heat Transfer laboratory at UVA

• Funding from the National Science Foundation (NSF) Graduate Research Fellowship Program (GRFP)

• Funding from the Virginia Space Grant Consortium (VSGC)

• Collaborators: Leslie Phinney (Sandia), Robert Stevens (RIT), Samuel Graham (GaTech), Thomas Beechem (GaTech) Rob Kelly (UVA), Avik Ghosh (UVA), Mikiyas Tsegaye (UVA), David Cahill (UIUC), John Hostetler (Trumpf Photonics), Mike Klopf (Jefferson Lab), Vickie Connors (NASA Langley)

• Microscale Heat Transfer Crew – Rich Salaway, Jennifer Simmons, John Duda, Justin Smoyer

Page 46: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Transient ThermoReflectance (TTR)

SUBSTRATE

FILM

HEATING “PUMP”

PROBE

Thermal Diffusion

Electrons Transfer

Energy to the Lattice

Thermal Diffusion by Hot

Electrons

Thermal Equilibrium

Thermal Diffusion within Thin Film

Thermal Conductance across the

Film/Substrate Interface

Electron-PhononCoupling (~2 ps)

Thermal Diffusion (~100 ps)

Thermal BoundaryConductance (~2 ns)

Thermal Diffusion within Substrate

Substrate Thermal Diffusion (~100 ps – 100 ns)

Focus of current analysis

Focus of previous analysis

Ballistic Electron Transport

Free Electrons Absorb Laser Radiation

Page 47: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Electron-phonon (e-p) nonequlibrium

),(),( tzSTTGz

TTTk

zt

TT pe

epee

eee

pep

p TTGt

TC

Electron-phonon

coupling factor

Energy stored in e- system

Energy conducted through e- system Energy deposited

into e- system

Energy transferred from e- system to l

system

Energy stored in l system

Energy gained by l system from e-

system

z

time

PARABOLIC TWO-STEP

MODEL (PTS)

*Anisimov, 19740 50 100 150

300

320

340

360

380

400

420

440

lattice temperature

Te

mp

era

ture

Time [fs]

electron temperature

Page 48: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Relate temperature to reflectance pe

pp TTG

t

TC

)(tSTTGt

TT pe

eee

R/R = aTe + bTl – only valid for Te < 150 K

• Test at fluences up to 15 J m-2

• Te in Au of up to ~ 4000 K• ITT 2.4 eV > 1.55 eV TTR energy

Christensen, PRB, 1976

Intraband reflectance model Valid for all electron temperatures

Smith and Norris, APL, 2001

Page 49: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Measure G in Au with TTR

Different e-p equilibration curves for different fluencesBut G should be a material property????

Hopkins and Norris, App. Surf. Sci., 2007

1),( pe

ep

eeRTpe TT

B

AGTTG

20 nm Au/glass 20 nm Au/glass

Page 50: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Single phonon elastic scattering

12,2

2,1

2,2

03,2

2

2

,2

03,1

2

2

,1

03,2

2

2

,2

1,2,1

,2

22

2)(

j jjj

jj

j jj

j jj

j jj

vv

v

dv

vdv

v

dv

v

cutoffj

cutoffj

cutoffj

Simplifies transmission coefficient

21 qq

j

jj

cutoffji

dvTfDq,

0

1,1,11 ,4

1

3,2/1

2

2

,2/1 2)(

jj v

D

121 1 R

Frequency [Hz]

Deb

ye d

ensi

ty o

f Sta

tes

[m-3

]

cutoff1

cutoff2

Page 51: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

hBD results for Al/Al2O3

Stoner and Maris, PRB, 1993P. E. Hopkins, et al., International Journal of Thermophysics 28, 947 (2007)

Page 52: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Thermal model

0

0.2

0.4

0.6

0.8

1

0 200 400 600 800 1000 1200 1400

Time [ps]

R

[a.u

.]

h BD = 1.0x108 W m-2 K

h BD = 2.0x108 W m-2 K

h BD = 3.0x108 W m-2 K

Change in temperature across a 50 nm Cr film on Si substrate interface

Page 53: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Resolving TBC with TTR

2df

BD

fi h

dC

1f

BD

i

f

k

dh

Resolving TBC with TTR Al/Al2O3 interfaces kf = 237 Wm-1K-1

hBD = 2.0 x 108 Wm-2K-1

0

0.5

1

1.5

0 25 50 75 100

Film thickness [nm]

Tim

e co

nsta

nt [n

s]

0

5

10

15

20

0 250 500 750 1000

if

Page 54: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Thermal ModelLumped capacitance

BD

f

f

BD

h

kd

k

dhBi

1.01.0

T

x

Bi<<1

Bi = 1

Bi>>1

film substrate Al/Al2O3 interfaces kf = 237 Wm-1K-1

hBD = 2.0 x 108 Wm-2K-1

d =75 nm< 120 nm

0

0.2

0.4

0.6

0.8

1

1.2

1.4

0 25 50 75 100

Film thickness [nm]

Tim

e c

on

sta

nt

[ns]

Page 55: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Sample fabricationSample

IDBacksputter

EtchHeat Treat Prior

to DepositionDeposition Notes(on Si substrates)

Cr-1 none none 50 nm Cr @ 300 K

Cr-2 5 min none 50 nm Cr @ 300 K

Cr-3 5 min 20 min @ 873 K 50 nm Cr @ 300 K

Cr-4 5 min 50 min @ 873 K 50 nm Cr @ 300 K

Cr-5 5 min 20 min @ 873 K 50 nm Cr @ 573 K

Cr-6 5 min none 10 nm of Cr at 300 K;heating to 770 K;40 nm of Cr at 300 K

Page 56: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Interface characterizationAuger electron spectroscopy (AES)

Relaxation andAuger emissionIonizationElectron bombardment

Higher levels

Core level

Vacuum Energy

e- [3 keV]Monitor energy

Page 57: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

AES depth profiling

Ar+ gun

e- gundetector

Si

O2

Cr

C

dN

/dE

Energy [eV]

Page 58: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

AES depth profile

0

0.2

0.4

0.6

0.8

1

0 10 20 30 40 50 60

Depth into film [nm]

Ele

me

nta

l fra

cti

on

Cr/Si mixing regionCr

Si

C

O2

Page 59: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Energetic Electrons

k

E

Interband

Intraband

Valence Band

Conduction BandIntraband excitation – E<Eg

Interband excitation – E>Eg

Doped Semiconductors (T = Troom)

Ef

Eg

Page 60: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Energetic Electrons

Electron transport – Noble metals

Electron transport – Transition metals

Metals (T = Troom)

k

E

Ef

Ef

d

s

ITT

Noble Metal

d

Transition Metals

ITT

Page 61: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Band StructuresGaAs

* Swaminathan and Macrander, 1991

Gold

*Christensen, 1976

Nickel

*Weiling and Callaway, 1982

c

s

d

v ds

Page 62: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

*Sun, et al., 1994*Fatti et al., 2000

Reflectance at ITTGoldSilver

Page 63: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

G Measurement in Gold

*Smith and Norris, 2001*Hohlfeld et al., 2000

G @ energies lower than ITT G @ energies around ITT

Ef

d

s

Page 64: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Transient Thermoreflectance Data

Page 65: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Thermal Model

),(),(' txSTTGx

TTTk

xt

TTC le

elee

eee

lel

l TTGt

TC

nmG

kthermal 17

k = 91 Wm-1K-1

G = 3.6 x 1017 Wm-3K-1 -1 0 1 2 3 4 5

Time [ps]

No

rma

lize

d R

efl

ec

tan

ce

R

/R [

arb

. un

its

]

1.3 eV

20 nm

50 nm

Page 66: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

G Measurements

30 nm Ni/Si

1.3 eVG = 5.8 x 1017 Wm-3K-1

1.55 eVG = 3.7 x 1017 Wm-3K-1

R = aTe + bTl

Page 67: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Analysis•G measurement at 1.3 eV interband transition yields higher results than measurements taken at other energies (~6.0 x 1017 Wm-3K-1)

•This study: ~3.7 x 1017 Wm-3K-1 at 1.55 eV

•Wellershoff et al., 1998: ~3.6 x 1017 Wm-3K-1 at 3.11 eV

•Previous Au measurements of G were same at ITT and other energies

•1.3 eV in Ni is not at ITTbut at a higher interband transitionlower d-band Fermi level

0

0.2

0.4

0.6

0.8

1

0 10 20 30 40 50 60 70 80 90 100

Thickness [nm]

Re

fle

cta

nc

e

Ni/Glass

Ni/Si

Page 68: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Reflectance Model

R = aTe + bTl

ll

ee

ll

ee

TT

TT

iTT

TT

i 221121

12

22

11

1

RR

RR

R

eT

Ra

&lT

Rb

Page 69: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

How do we define temperature?•Temperature is an equilibrium property•How can we define temperature when there is a nonequilibrium (TTM)?

Consider case of homogeneous heating in Aut > ee

Temporally•Both e- and phonon systems are in local thermal equilibrium•When e- scatters and emits phonon, e- system redistributes into a new temperature distribution (lower T).

What about e- substrate scattering work?•Homogeneous heating so lumped capacitance

1.0f

BD

k

dhBi

hBDe-=1E8 Wm-2K-1

d=50 nmke=317

Bi = .02

very conservative

Page 70: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

How do we define temperature?•However, how can we determine temperature spatially if there is a thermal gradient?•Can temperature, which is an equilibrium concept, still be invoked in a nonequilibrium process such as heat conduction? (Cahill, JAP, 2003)

Box is 4 long

Consider 1D conduction

Can resolve local temperature

Cannot resolve local temperature

Kinetic Theory

CMean free path

speed

#Collisions/time

*Since equilibrium is achieved through multiple collisions

lepeeeepee TBTA 2at Te=Tl=300, ~1E13, ~1E4 m/sC

~1 nm

~15 nm

Page 71: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Joint frequency DMM

j

jjBD

cj

dT

TnDvh

mod,

0mod,1mod,

),()(

4

1

3mod,

2

2

mod,2 j

jv

D

c

jmod,

3/12211

2mod,mod, 6 NNv j

cj

2211mod, vvv j

212

1

12

1

1MM

NN

MNN

j

jjBD

cj

dT

TfDvh

,1

0,11,1

),()(

4

1

Weighting factor is simply a percentage of the composition of each material in the unit volume

(M=atomic mass)(N=number of oscillators per unit volume)

DMM JFDMM

Page 72: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Analysis• Inelastic scattering – DMM does not account for this

• Data at solid-solid interfaces taken at temperatures around Debye temperature show linear trend

• DMM predicts flattening of predicted hBD around Debye temperature

• Accounting for substrate phonons in DMM improves prediction (JFDMM)

j

jjBD

cj

dT

TfDvh

,1

0,11,1

),()(

4

1

DMM

JFDMM

j

jjBD

cj

dT

TfDvh

mod,

0mod,1mod,

),()(

4

1

PRL

j

jjBD

cutoffj

dvTfDT

h,1

0,2,2 ,

4

1

Is there an upper limit to inelastic scattering?

jjjBD

cutoffj

dvTfDT

h,2

0,2,2 ,

4

1

Inelastic phonon radiation limit (IPRL)

Page 73: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

IPRL

)()( ThhTh inelBD

elBDBD )()()( ThTBAhTh IPRL

BDPRLBDBD

Page 74: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Elastic and inelastic contributions

In classical limit

)()()()( ThAhThThTB inelBD

PRLBDBD

IPRLBD

PRLBD

elBD

h

hA

Pb/diamond Pb/diamondPb/diamond

)()()( ThTBAhTh IPRLBD

PRLBD

LimBD

Page 75: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Elastic and inelastic contributions

1)()(

PRLBD

BDelBD

inelBD

Ah

Th

h

Th

Relative contribution to hBD of inelastic scattering compared to elastic scattering increases with sample mismatch and with temperature

DPb/Ddiamond

~0.05

DPt/DAl2O3

~0.23

Hopkins, Norris, and Stevens, Submitted to the Journal of Heat Transfer

Page 76: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Future directionsThermal testing in novel nanostructures

k

TSZT

2

CNT and nanocomposites

Page 77: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Future directionsSteady state and 3 electrical resistance techniques

Hopkins and Phinney, MNHT2008-52293 B. W. Olson, S. Graham, and K. Chen, Review

of Scientific Instruments 76, 053901 (2005).

Page 78: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Future directions

11 nnnnAnAn uuuuKuMF

NonEquilibrium Green’s Function (NEGF) modeling

0102

0 uuKuMF BB

Page 79: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Future directions

Hopkins et al., MHT08-52244

NEGF to calculate phonon conductivity in nanostructures from first principles

Relies on basic quantum mechanics

No assumptions based on scattering or transport

Can be extended to any nanostuctures

Si wire data from: D. Li, Y. Wu, P. Kim, L. Shi, P. Yang and A. Majumdar, 2003, "Thermal conductivity of individual silicon nanowires," Applied Physics Letters, 83, 2934-2936.

Page 80: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Future directions

Electrons Transfer

Energy to the Lattice

Thermal Diffusion by Hot

Electrons

Free Electrons Absorb Laser Radiation

20 nm Au/glass ),(),( tzSTTG

z

TTTk

zt

TT pe

epee

eee

pep

p TTGt

TC

Insulated boundary conditions always assumed

More TTR applications – electron-phonon scattering

P. E. Hopkins and P. M. Norris, Applied Surface Science 253, 6289 (2007)

Page 81: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Future directions

Different e-p equilibration curves for different fluences

But G should be a material property

z

1),( pe

ep

eeRTpe TT

B

AGTTG

P. E. Hopkins, et al., Submitted to Phys Rev B.

More TTR applications – electron-phonon scattering

Page 82: Patrick Hopkins University of Virginia Department of Mechanical and Aerospace Engineering

Microscale Heat Transfer Lab – University of Virginia

Future directions

• Extend nanoscale thermophysics to realistic low dimensional nanostructures

• Electrically based resistance techniques to measure thermal transport and thermophysical properties of nanomaterials

• NEGF formalism for accurate modeling of real nanosystems

• TTR technique to measure electron-phonon coupling and interfacial thermal transport