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Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering, 2010 ASPE Annual Meeting, Atlanta, USA M. Steinlin 1 , S. Weikert 1 , K. Wegener 2 1 inspire AG, Swiss Federal Institute of Technology (ETH) Zürich, Switzerland 2 IWF, Swiss Federal Institute of Technology (ETH) Zürich, Switzerland Dipl. Masch. Ing. ETH Markus Steinlin do not publish images or complete slides without permission of the author

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Page 1: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

Open Loop Inertial Cross-Talk Compensation Based on Measurement DataAmerican Society for Precision Engineering, 2010 ASPE Annual Meeting, Atlanta, USAM. Steinlin1, S. Weikert1, K. Wegener2

1inspire AG, Swiss Federal Institute of Technology (ETH) Zürich, Switzerland2IWF, Swiss Federal Institute of Technology (ETH) Zürich, Switzerland

Dipl. Masch. Ing. ETH Markus Steinlin

do not publish images or complete slides without permission of the author

Page 2: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

24 November 2010 IWF/inspire ETH Zurich

Content

� Motivation� What is Cross-Talk?� Measurement� Modeling� Compensation Procedure� Results and Conclusion

Page 3: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

34 November 2010 IWF/inspire ETH Zurich

Motivation

axial view

top view

side

vie

w

start

end

Positioning 50 mmOrder of errors:� 5 µm

� Straightness� Hysteresis

� 50 µm� Cross-talk

cros

s-ta

lk

hyst

eres

is

hysteresis

straightness

Page 4: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

44 November 2010 IWF/inspire ETH Zurich

What is Cross-Talk?

� Standard ISO/TR 230-8� inertial cross-talk

� Effect� Deviation orthogonal to the accelerated

direction� Ẍ �EYẌ, EZẌ

� Influences� Stiffness k in guideway� Y offset (lateral) from point of force

application and center of mass (CM) (ΔY)

� X offset from center of mass to the tool center point (TCP) (ΔX)

� Acceleration (actuator force FX)

guideway

X-offset(ΔX)

Y-offset(ΔY)

TCP

orthogonalDeviation(EYẌ)

Y

X

actuator force in X (FX)

CM

side view

Page 5: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

54 November 2010 IWF/inspire ETH Zurich

Mathematical Description of Cross-Talk?

� Model� EYẌ Cross-talk� ¢ Proportional factor� FX Actuator force� ΔY Y offset (lateral)� ΔX X offset� kGuideway Stiffness

Δx

Δy

EYẌ

Y

X

Fx

side view

Guideway

yxx

k

Fc

∆⋅∆⋅⋅/=XEY &&

kGuideway

Page 6: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

64 November 2010 IWF/inspire ETH Zurich

Cross-Talk Countermeasures

� Machine design� Drive in the center of gravity (DCG)

� Reduction of the dynamic parameters

� Compensation using numerical control (NC)

1. Measurement of the cross-talk error2. Derivation of the cross-talk prediction

model3. Compensation of the position set-point

Mori Seiki, NMV5000 DCGPhoto: Mori Seiki

X

YZ

Page 7: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

74 November 2010 IWF/inspire ETH Zurich

Cross-Talk Measurement

� Cross-grid XY-measurement� 2D� Optical measurement system� Non-contact� Similar principle to an optical linear

scale

� Cross-Grid measurement for different� Y offsets (lateral)� Accelerations� X offsets do not change

0 20 40 60 80 100

-0.05

0

0.05

Position of accelerated axis [mm]

Ort

hogo

nal d

evia

tion

EYẌ

[mm

] nominal Ẍ2 m/s2

4 m/s2

8 m/s2

Position of accelerated axis X [mm]

X

Y

Page 8: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

84 November 2010 IWF/inspire ETH Zurich

How to Model the Cross-Talk Effect(Acceleration dependent for a given position)

� Orthogonal deviation EYẌ is proportional to the acceleration Ẍ� Linear fit of measurement data� Exclude sections to improve the linear fit � Low accelerations: non-cross-talk deviations are dominant� Low orthogonal deviations: acceleration influenced by numerical effects

0 20 40 60 80 100

-6000

-4000

-2000

0

2000

4000

6000

Position of accelerated axis [mm]

Acceleration Ẍ [mm/s2]

nominal Ẍ2 m/s2

4 m/s2

8 m/s2

Position of accelerated axis X [mm]0 20 40 60 80 100

-0.05

0

0.05

Position of accelerated axis [mm]

Orthogonal deviation EYẌ [mm]

nominal Ẍ2 m/s2

4 m/s2

8 m/s2

Position of accelerated axis X [mm]

-5000 0 5000

-0.05

0

0.05

Acceleration [mm/s2]

Linear fit

Measurements

Acceleration Ẍ [mm/s2]

Ort

hogo

nal d

evia

tion

EYẌ

[mm

]

excluded

modeluncertainty

Page 9: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

94 November 2010 IWF/inspire ETH Zurich

� Dependence of the Y-Position� Linear fitted proportionality factors

Position Dependence of Cross-Talk I

Y-PositionYTCP

EYẌ/Ẍ[ µm/(m/s2) ]

300 mm 7.6

1200 mm 10.8Y-position

EYẌ(orthogonal deviation)

Y

X

actuator force

center of mass

side view

Page 10: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

104 November 2010 IWF/inspire ETH Zurich

� Proportionality factor EYẌ/Ẍ for any YTCP

� Model

¢: proportional factor

Position Dependence of Cross-Talk II

( ) ( )( )( )TCP

TCPccTCP

YHHX

mYYmYXcXY

⋅+⋅=

⋅−+⋅⋅⋅/=

0

0,XEY&&

&&&&&&

Y-Position [ µm/(m/s2) ]

300 mm 7.6

YTCP EYẌ/Ẍ

1200 mm 10.8

Y

X

side view

YTCP

Y0

Yc

mc

m

Page 11: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

114 November 2010 IWF/inspire ETH Zurich

Compensation Procedure for Cross-Talk Error

� Step 1: Measurement of the cross-talk error� Step 2: Derivation of proportionality factors EYẌ/Ẍ� Step 3: Compensation of the position set-point depending

on the nominal acceleration and position

NC-Code Open-LoopControl

Closed-LoopControl

Machine

Cross-TalkCompensation

YTCP

Page 12: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

124 November 2010 IWF/inspire ETH Zurich

Limited Actuator Dynamics

� Direct compensation� Add model predicted cross-talk

to the set-point position of Y� Incomplete compensation

� Reason� Actuator dynamics, low pass

behavior of the drive� Modeling with a TP1 element

� Improved compensation� Scaling of the model predicted

compensation values Kp ∫TP1YactualYsetpoint

0 10 20 30 40

-0.04

-0.03

-0.02

-0.01

0

0.01

Ort

hogo

nal d

evia

tion

EYẌ

[mm

]Position of accelerated axis X [mm]

Cross-talkModel PredictedSimulated no scalingSimulated scaling +10%

Page 13: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

134 November 2010 IWF/inspire ETH Zurich

Results and Conclusion

� Cross-talk reduction realized only by set-point modification

� Procedure can be used also with multi-dimensional movement

� Reduction of the orthogonal deviation of about 50% in experiment

0 20 40 60 80 100

-0.05

0

0.05

Position of accelerated axis [mm]O

rtho

gona

l dev

iatio

n [m

m]

Original

CompensatedSet-point

Ort

hogo

nal d

evia

tion

EYẌ

[mm

]Position of accelerated axis X [mm]

Page 14: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

144 November 2010 IWF/inspire ETH Zurich

Discussion

� Further reduction of cross-talk should be possible

� Model uncertainty is about ±20 µm� To consider

� Position control cycle time (4.5 ms)� Better inversion of the drive dynamics� Dynamics of the compensating axis

0 20 40 60 80 100

-0.05

0

0.05

Position of accelerated axis [mm]

Ort

hogo

nal d

evia

tion

[mm

]

Original

CompensatedSet-point

-5000 0 5000

-0.05

0

0.05

Acceleration [mm/s2]

Linear fit

Measurements

Acceleration Ẍ [mm/s2]

Ort

hogo

nal d

evia

tion

EYẌ

[mm

]

modeluncertainty

Position of accelerated axis X [mm]

Ort

hogo

nal d

evia

tion

EYẌ

[mm

]

Page 15: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

154 November 2010 IWF/inspire ETH Zurich

Influence of the Machine Dynamics

� Low machine excitation by the acceleration of the compensating axis

� Effects that can not be compensated (vibrations e.g.)

Velocity and acceleration of the compensating axis

0 50 100-1

-0.5

0

0.5

1

Position X [mm]

Vel

ocity

Y [

mm

/s]

0 50 100-200

-100

0

100

200

Position X [mm]

Acc

eler

atio

n Y

[m

m/s

2 ]

0 20 40 60 80 100

-6000

-4000

-2000

0

2000

4000

6000

Position of accelerated axis [mm]C

orre

spon

ding

acc

eler

atio

n [m

m/s

2 ]

Acceleration of the positioning axis

nominal Ẍ2 m/s2

4 m/s2

8 m/s2

Acc

eler

atio

n Ẍ

[mm

/s2 ]

Position of accelerated axis X [mm]

Vel

ocity

Ẏ[m

m/s

]

Acc

eler

atio

n Ϋ

[mm

/s2 ]

Page 16: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

164 November 2010 IWF/inspire ETH Zurich

Summary

Compensation Procedure� Measurement of the dynamic orthogonal deviation

(cross-talk) during a single axis positioning movement� Determination of the proportionality factors between

acceleration and orthogonal deviation� Position dependent model of the cross-talk� Compensation of the nominal position values

Improvement:� The orthogonal deviation is reduced by 50% using the

proposed compensation strategy.

Page 17: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

174 November 2010 IWF/inspire ETH Zurich

Thank you for your AttentionQuestions ?

Page 18: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

184 November 2010 IWF/inspire ETH Zurich

Slides

3 Motivation 4 What is Cross-Talk

5 Mathematical Description 6 Countermeasures

7 Measurements 8 How to Model Cross-Talk

9 Position Dependence I 10 Position Dependence II

11 Compensation Procedure 12 Limited Actuator Dynamics

13 Results and Conclusion 14 Discussion

15 Influence of the Machine Dynamics 16 Summary

19 ISO/TR 230-8 20 Cross-Talk Principle

22 Cross-Grid 23 KGM+

Page 19: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

194 November 2010 IWF/inspire ETH Zurich

Inertial Cross-Talk Principle – ISO/TR 230-8

“displacements perpendicular to the intended direction of motion, owing to a lateral offset between the driving force and the center of mass, which load to tilt motions during acceleration and deceleration”

Page 20: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

204 November 2010 IWF/inspire ETH Zurich

Cross-Talk Principle I

center of gravity

rolling elements of guideway

driving force

Page 21: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

214 November 2010 IWF/inspire ETH Zurich

Cross-Talk Principle II

driving force

rolling elements of guideway

cross-talk

center of gravity

Page 22: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

224 November 2010 IWF/inspire ETH Zurich

Cross-Grid

1 reader2 grid platewww.heidenhain.com

Page 23: Open Loop Inertial Cross-Talk Compensation Based on … · 2013. 11. 21. · Open Loop Inertial Cross-Talk Compensation Based on Measurement Data American Society for Precision Engineering,

234 November 2010 IWF/inspire ETH Zurich

KGM+

S.Weikert, Dr. W.KnappASPE 1999, Monterey California