VD901

Oil Rotary Vacuum Pump [VD Series]

VD series is a direct-drive low noise oil rotary vacuum pump. This pump is suitable for a wide range of applications such as

evaporator, sputtering and vacuum packaging.

Optimization Design for Quiet Operation

Easy MaintenancePump head can be removed without disconnecting the vacuum piping (except VD151, VD201). ＊See attached figure.Oil level gauge and drain valve accessible for easy oil exchange and daily inspection.

Forced Oil Circulation System Ensures Stable Pumping Speed below Atmospheric PressureWhen equipped with the optional oil mist trap and oil return mechanism, the VD301, VD401 and VD601 can continuously run at all pressure ranges under atmospheric pressure.

Totally enclosed fan cooled 3 phase AC motorMultiple voltage motor is equipped on the VD151 and VD201. Either 200V class or multiple voltage type is selectable for the VD301 to VD901. All model are complied with high efficiency regulation (GB3/IE2/EPAct).

Features

Evaporation, sputtering, and ion plating

Analytical instrument and leak test system

Gas exchange, gas filling, and vacuum insulation

Vacuum drying, freeze drying, vacuum degassing, vacuum packing, vacuum chuck and vacuum molding, etc.

Appl icat ions

Low Vacuum

Pump

Low Vacuum Pump

Oil Rotary Vacuum Pump [VD Series]

2020 20104 260

(513)100

54 64 90 84

9 43

3733

4220130

170

G.L.

222

1847

(394

)

Inlet (JIS B 8365 KF25 equivalency)

Rubber legs Oil drain plug M12 Filter cap

Oil level gauge

For O

il m

ist t

rap

TMX-

1

Outlet G1 (PF1)

Oil cap G3/4 (PF3/4)

Gas ballast valve

Totally-enclosed fan-cooled Flange inducton motor3phase 0.55kW 4P

170130

260(536)

116120 34

50 40

20

4432

20

7512419

20

G.L.

242

2352

(439

)

Inlet (JIS B 8365 KF25 equivalency)

Rubber legs Oil drain valve G3/8 (PF3/8)

Oil level gauge

Outlet G1 (PF1)

Oil cap G3/4 (PF3/4)

Gas ballast valve

Totally-enclosed fan-cooled Flange inducton motor3phase 0.75kW 4P

For O

il m

ist t

rap

TMX-

1

210660[680]

395365 4-φ11

128

289

200 40

363[383]210[230] 47 33

15063

G.L.

281 32

4 (561

)

(631

)

140

(214

)

287

259

φ17

5

31 Oil drain valve G1/2 (PF1/2)

Oil level gauge For O

il m

ist t

rap

TM20

1

For O

il m

ist t

rap

TM40

1

Outlet VG40 equivalency

Inlet VG40 equivalency

Oil cap G1 (PF1)

Oil mist trap (Option)

Gas ballast port G3/8(PF3/8)

Totally-enclosed fan-cooled Flange inducton motor3phase 1.5kW 4P

Note : [ ]VD401 dimension

Unit: mm

Unit: mm

Unit: mm

Dimensions

VD151

VD201

VD301, 401

Motor

Piping

Pump

280230200540

337

270 45

486306 3656

8-φ11

570831

182 87G.L.

328

348

311

φ21

9

164

371

(678

) (848

)

Oil drain valve G1/2 (PF1/2)

Oil level gauge

For O

il m

ist t

rap

TM40

1

For O

il m

ist t

rap

TM-2

Outlet VG40 equivalency

Inlet VG50 equivalency

Oil cap G1 (PF1)Oil mist trap (Option)

Gas ballast port G3/8(PF3/8)

Totally-enclosed fan-cooled Flange inducton motor3phase 3.7kW 4P

280230

87

255435

761390360

92 4-φ11

317

180 45

56 36

324

295

φ19

6

G.L.

164

41

328 37

1(6

78) (8

48)

Oil drain valve G1/2 (PF1/2)

Oil level gauge

For O

il m

ist t

rap

TM40

1

For O

il m

ist t

rap

TM-2

Outlet VG40 equivalencyInlet VG50 equivalency

Oil cap G1 (PF1)Oil mist trap (Option)

Gas ballast port G3/8(PF3/8)

Totally-enclosed fan-cooled Flange inducton motor3phase 2.2kW 4P

Unit: mm

Unit: mm

When a pump is removed (VD301〜VD901)

VD601

VD901

ULVAC, Inc. Components Division www.ulvac.co.jp/eng

Overseas Sales in Japan TEL +81-467-89-2261

USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC Singapore Philippines Branch TEL +63-2-828-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC Singapore Vietnam Representative Office TEL +84-8-62556762CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-312-4447TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700

This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.

Oil Rotary Vacuum Pump [VD Series]

Model VD151 VD201 VD301 VD401 VD601 VD901

Designed

pumping speed

50Hz m3/h 14.4 20.2 30 40 60 90L/min 240 336 500 670 1000 1500CFM 8.47 11.89 17.66 23.54 35.31 52.97

60Hz m3/h 17.3 24.2 36 48 72 108L/min 288 403 600 800 1200 1800CFM 10.18 14.24 21.29 28.25 42.38 63.57

Ultimate

pressure ＊1

GP close Pa 0.67Torr 5×10-3

mbar 6.7×10-3

GP open Pa 6.7 2Torr 5×10-2 1.5×10-2

mbar 6.7×10-2 2.0×10-2

Motor ＊2 Type Totally enclosed fan cooled 3 phase AC motorkW (number of poles) 0.55 (4) 0.75 (4) 1.5 (4) 2.2 (4) 3.7 (4) HP (number of poles) 0.75 (4) 1 (2) 2 (4) 2.95 (4) 4.96 (4)

Voltage/Freqency【Multiple voltage】

200V to 240V/380V to 415V（50Hz）200V to 240V/380V to 460V（60Hz）

【200V class】200V/50Hz,60Hz, 220V/60Hz

【Multiple voltage】220V to 240V/380V to 415V（50Hz）208V to 240V/380V to 460V（60Hz）

Oil ＊3 ULVOIL R-7Oil capacity 0.7 to 1.1 L 1.0 to 2.5 L 2.5 to 4.0 LCooling method Air cooledInlet JIS B 8365 KF25 equivalency VG40 equivalency / KF40 (optional) VG50 equivalency / KF50 (optional)Outlet G1 VG40 equivalency / KF40 (optional) VG40 equivalency / KF40 (optional)Weight 29 kg 34 kg 57 kg 59 kg 86 kg 109 kgExternal dimensions W×L×H 170×514×240mm 170×536×265mm 210×660×324mm 210×660×324mm 280×761×371mm 280×831×371mmCertification CE CE / cTUVusStandard accessories Motor, Oil for 1 pump, Operation manualOptions Oil mist trap Oil mist trap, Gas ballast valve, Oil return mechanism, Helium tight, ISO flange

＊1 Measured with a Pirani gauge. (Approx. 6.7×10-2Pa when measured with a McLeod vacuum gauge.)＊2 Increased safety explosion-resistant motor and pressure proof explosion-resistant flange motor are available as option except the VD151 and VD201.＊3 Other oil types are available upon request.

1171E-1/2013042500TL

Speci f icat ions

VD151, 201 VD301, 401 VD601, 901

Pumping Speed (JIS B8316/1985)Type： VD151,VD201Power： 3φ 0.55kw, 0.75kw 50/60HzOil： ULVOIL R-7

VD201 50HzVD201 60Hz

VD151 50HzVD151 60Hz

0

5

10

15

20

25

Pum

ping

Spe

ed [m

3 /h]

Gas Ballast ClosedGas Ballast Opened

Pressure

10–1

10–110–3 10–2

102 103 104 1051 10

10 102 7601[Pa][Torr]

(Note : 1mbar=100Pa)

0

10

20

30

40

Pum

ping

Spe

ed [m

3 /h]

Pumping Speed (JIS B8316/1985)Type： VD301,VD401Power： 3φ 1.5kw 50/60HzOil： ULVOIL R-7

VD401 60Hz

VD401 50Hz

VD301 60Hz

VD301 50Hz

Gas Ballast ClosedGas Ballast Opened

Pressure

10–1

10–110–3 10–2

102 103 104 1051 10

10 102 7601[Pa][Torr]

(Note : 1mbar=100Pa)

Pumping Speed (JIS B8316/1985)Type： VD601,VD901Power： 3φ 2.2kw, 3.7kw 50/60HzOil： ULVOIL R-7

VD901 60Hz

VD901 50Hz

VD601 60Hz

VD601 50Hz

0

20

40

60

80

100

Pum

ping

Spe

ed [m

3 /h]

Gas Ballast ClosedGas Ballast Opened

Pressure

10–1

10–110–3 10–2

102 103 104 1051 10

10 102 7601[Pa][Torr]

(Note : 1mbar=100Pa)

Pumping Speed Curves