nrc hands on chemical training sophands on chemical training meets in nrc’s 1st floor lobby no...
TRANSCRIPT
NRC Hands On Hazardous Chemical & Safety Training
Standard Operating Procedure
Version: 1.0 March 2017
UNIVERSITY OF TEXAS AT ARLINGTON
Nanotechnology Research Center
TABLE OF CONTENTS 1. Introduction…………………………………………….……………………..................4
1.1 Scope of Document ………………………………………………………..….4
1.2 Description…………………………………….…….……………………….…5
Registration, Chemical Training Location and Times,
Entering the Clean Room, General Cleanroom Rules
and Guidelines….…….………………………………………………………10
1.3 NRC Emergency Contact Phone Numbers, Chemical Incident /
Emergency Procedures….…….……………………………………………11
1.4 Draegergard 8/16-Vision 7000 Software toxic gas Alarm
monitoring system, NRC Evacuation Procedures…………………..…….14
1.5 NIOSH Guide to Chemical Hazards; MSDS terms and
Definitions user guide. …………………………………..………………..…16
1.6 Safety Equipment : Location and Operation of Eye Wash Stations, Safety Showers, Fire Extinguishers, Emergency Phone Locations and Emergency exits..………..…………………………………………..….22
2. Wet Chemical Processing Facilities, Chemical Storage Locations,
NRC Material Inventory List and Precautions, General Facilities and Chemical Safety Usage rules……………………………………………………………………………..25
2.1.1 Fume Exhaust Hood Locations & Descriptions, Accompanying
Equipment for Wafer Processing and Associated Safety Rules………..25
2.2.1. Chemical (Fresh) Storage Locations and Associated Rules………....…29
2.2.2 Waste Chemical Storage Locations and Associated Rules Rules…………….32
2.2.3 NRC Chemical Inventory List showing the chemical names, symbols, %
concentration and special precautions to take during handling and
processing. …………………………………………………..………………35
2.2.4 General Facilities , Standard Chemical Safety and
Standard Chemical Usage Rules……………………………………...….36
3. Requirements, CEMS Training, Critically Important Rules
and Procedures to Follow………………………………………………...………..39
3.1 Requirements for Hands on Chemical Training…………………………39
3.2 CEMS Training………………………...……………………………………40
3.3 User Supplies Needed and Storage Boxes …………………………......41
3.4 Secondary Container Labeling Rules ………..……………………..…....44
3.5 Hot Plate Usage Rules……………. .….................................................45
3.6 Waste Chemical Disposal and Log Books Procedures…………...…....46
4 Wet Processing Safety Procedures, Rules and Precautions ………………..51
4.1 Acetic Acid Safety Precautions……………………………………………51
4.2 HCL Acid Safety Precautions………….…............................................52
4.3 HF Acid Safety Precautions………….…...............................................53
4.4 Piranha Solution Acid Safety Precautions………….….........................54
4.5 Nitric Acid Safety Precautions………….…...........................................57
4.6 Phosphoric Acid Safety Precautions………….….................................58
4.7 Sulfuric Acid Safety Precautions………….….......................................60
4.8 Strong Base Safety Precautions………….….......................................61
4.9 Photoresist Developer & Alkali Safety Precautions………….…..........63
4.10 Solvents Safety Precautions………….….............................................64
5 Chemical Spill Cleanup Procedures……………………………………………..68
5.1 Large UNKNOWN Hazardous Material (EH&S) Spill Response Procedures……………………………………………………..68
5.2 Small Known Hazardous Material Spill Procedure ……………………69 5.3 Mercury Spill Cleanup and Disposal …………………………………….70
6 Miscellaneous Safety Topics …...………………………………………………..72
6.1 Broken Glass Disposal………………………………………………..…..72 6.2 Broken Wafer Disposal…………………………………………………...72 6.3 Compressed Gas Cylinder Safety and Storage………………………..73 6.4 Cryogenic Safety and Handling…………………………………….…..73 6.5 Squeeze Bottle Safety…………………………………………………....74 6.6 Proper Disposal of Empty Chemical Containers………………………75
1.0 INTRODUCTION
1.1 Scope of Document
The purpose of the NRC Hands On Hazardous Chemical and Safety Training SOP is to familiarize all cleanroom and Lab 207 users with the equipment, procedures and safety protocols, rules and regulations, emergency response and contact information that are associated with wet chemical operations in Bay1, Bay4, Teaching Fab Yellow Room and Lab 207 of the NRCrication Research Center.
This document describes the Hands on Chemical and Safety Training requirements and the policies that must be followed to conduct laboratory research in the NRC clean room and lab 207. It is intended to augment existing CDC/NIOSH guidelines, UT Arlington Office of Emergency Management, UT Arlington Environmental Health & Safety Office policies and procedures and NRC Safety and Protocol Training. Researchers can refer to the UT Arlington Environmental Health & Safety Office and SIRT websites for additional safety information and policies.
http://www.uta.edu/campus-ops/ehs/Emergency/index.php
http://www.uta.edu/campus-ops/ehs/chemical/docs/lab-safety-manual.pdf
http://www.uta.edu/sirt/nano/user_information.php
Working safely and following NRC and UT Arlington Environmental Health & Safety Office safety policies are necessary conditions for conducting laboratory research.
Topics include:
Hours of Operation and the Buddy Rule Policy for regular-hour users and 24/7 users who have been given access 24 hours a day ,7 days a week.
Required Materials (safety glasses, tweezers, beakers, graduated cylinders) and there proper storage rules. Glass cleaning and disposal.
Location and description of Material Safety Data Sheets (MSDS Binders)
Locations and proper use of Acid, Base and Solvents Fume Hoods and associated storage cabinets.
Locations of Acid, Base and Solvents Hazardous Waste storage cabinets.
Location and use of required Personal Protection Equipment (PPE: goggles, acid aprons, acid gloves, etc.)
Proper use, storage and disposal of acids, bases, and solvents and associated Waste Log Book entries.
Hot Plate, Ultra Sonic Cleaners and weighing scale rules
Secondary Containment Labeling rules and infraction penalties.
Chemical Operations, General Solution Preparation Procedure. Proper mixing and dilution of acids and bases. Hydrofluoric acid safety, Piranha Solution
Accidents, locations and proper use of fire extinguishers, first aid kits, spill kits, safety showers and eyewash stations.
Clean Room and Chemical Safety Policy Violation policies and penalties.
1.2 Description: Registration, Chemical Training Location and Times, and entering the Clean Room, General Cleanroom and Chemical Guidelines
The NRC Hands on Hazardous Chemical Training is offered on 3rd and 4th Tuesdays or Wednesdays (alternating) of every month. The requirements for scheduling your NRC Hand on Chemical training are registration, approved application, NRC Safety & Protocol Training, successful completion of the NRC Safety Exam, and the General HAZCOM Training. To register send an email at least one working day in advance with your name, current email address, department, faculty advisor’s name, and the desired session to [email protected] . For registration the items to bring with you: Your Mav ID.
Hands on Chemical training meets in NRC’s 1st Floor Lobby no later than 9:15AM. All participants in Hands on Chemical and Safety training are required read this SOP prior to the
training date. New and returning Users will be led into gowning room to put on clean room garments and will enter the clean room where training will be held. Hands On Chemical training takes approximately 2 ½ to conclude and will end by 12PM.
Hands on Chemical training meets in NRC’s 1st Floor Lobby no later than 9:15AM
On the day of the training below are rules before you can enter the cleanroom. Before entering into the Clean Room Gowning area:
Clean clothes, shoes ,no heavy makeup or cosmetics
NO sandals or open toes shoes are allowed.
NO dangling jewelry, sharp bracelets or rings.
Everybody needs to bring their own goggles.
Small items can go through the pass through window but they need to be cleaned first.
You can leave your personal items in the day use lockers located on the 1st floor near the back door of Clean Storage Room. UTA NRC is not responsible for stolen items, therefore you are advised to bring your own combination lock.
Entering the NRC clean room Gowning areas:
Everyone needs to slide his card whenever it is activated, the card reader keep track on whoever is inside.
One person has to enter gowning room at the time to keep the room pressurized, so let one person at the time go inside the gowning room.
Clean your shoes (bottom) on the black mat for several seconds (10-15 secs) until they are clean, then take 5 baby steps on the blue tacky mat.
Trailing is not allowed.
Entering the clean room’s 1st Gowning area:
Do not go beyond the yellow ribbon until you have put on the following items:
Use the wire bench to put on the plastic shoe covers.
Put on hair net, and face net. Tuck in all long hairs and beards within the hair and face nets. No hair should be exposed.
Put on pair appropriate size rubber gloves, do not touch the outside of glove with your bare hands rather handle the gloves from the sleeves only.
Push the button on the glass door leading to the second gowning area to enter. This second gowning area where the cleanroom garments are hanging.
Entering the clean room’s 2nd Gowning area:
Push the button on the glass door leading to the second gowning area to enter. This second gowning area where the cleanroom garments are hanging.
Correctly put on a hood (with seams on the inside of hood) 1st, Coverall 2nd
and booties 3rd; in this order.
The hoods should be tucked into the gown and gown tucked into the booties.
Wear your UTA MAV ID
Wear you safety glasses.
Check yourself in the gowning area mirror to ensure you have gowned up correctly.
Retrieve any small items from the pass through window.
Enter the clean room air shower and make one complete 360˚ rotation to remove all particles, after the air shower has fully stopped exit the shower into the clean room. (Do not enter the cleanroom without going through the air shower first).
pass through window
Inside NRC Clean Room: General Cleanroom, Equipment & Processing Rules and Guidelines
General Cleanroom Rules and Guidelines:
1. Do not work in the cleanroom if you feel tired or sick, have taken any medication that may
make you drowsy, or have been drinking alcohol or taking any illegal substance.
2. No food, drink or medicine of any kind is allowed in the cleanroom. This includes candy, gum,
cough drops, coffee, etc.
3. No personal items such as backpacks, makeup, combs, brushes, handkerchiefs are allowed in
the cleanroom.
4. Only cleanroom paper, cleanroom notebook, ballpoint pen are allowed in the
cleanroom. Regular notebooks, pencil, eraser, mechanical pencil are not allowed in the
cleanroom
5. No wood products are allowed in the cleanroom.
6. No exposed leather is allowed in the cleanroom.
7. Do not sit on the floor.
8. ‼ Violations of these rules may result in suspension or loss of cleanroom access;
repeated Violations of these rules WILL result in suspension or loss of cleanroom
access ‼
9. Do not lean against or sit on the tables.
10. Do not lean on the equipment.
11. Do not open your gown zipper in the cleanroom.
12. Do not nap or sleep on the chairs. This is a very serious safety hazard to you and others.
13. Do not run or walk fast in the cleanroom.
14. Do not write on the wipes.
15. Do not touch your face, nose or any part of your body with your gloves on.
16. When you enter through the entrance door to the cleanroom, do not cross the yellow ribbon
line without your shoe covers on.
17. Do not enter the gowning area without your shoe cover, hairnet, face-net and latex gloves on.
18. Do not enter the cleanroom without going through the air shower.
19. Any item that sheds particles is not allowed in the cleanroom. This includes regular paper,
cardboard, leather, pencil, etc.
20. You must get permission from the NRC manager to bring any new chemical into the
facility. The MSDS of the chemical and description of how it will be used must be sent
to the NRC manager for review and approval. A list of previously approved chemicals
and their MSDS are available from the NRC office.
21. Do not leave your work area or table messy. Clean your work area when your work is finished.
22. Do not open the pass through door if the other door is open. Wait until the other door is closed
before you open the door on your side.
23. Do not take any chairs into Bay-1.
24. Do not use any chemical or material that does not belong to your group without prior
approval from the advising faculty of that group.
25. If you do not have 24/7 access, you cannot not stay in the cleanroom beyond 6 PM.
26. If you do not use the cleanroom for six (6) consecutive months, your access will be revoked
and you will need to retake the appropriate training on the facility and equipment.
27. All materials being transported from one workstation to another must be within a covered box
or appropriate carrier/container. Do not carry wafers in open containers.
28. Clean Room Buddy Rule: Do not enter the cleanroom after hours if there is nobody in
the cleanroom except for sputtering and e- beam/thermal deposition of metals and
electrical tests and wire bonding.
29. Immediately leave the cleanroom if you enter the cleanroom and there is no one inside
the cleanroom
30. Violations of the Buddy Rule WILL result in suspension or loss of cleanroom accessᴉ
General Equipment and Process Rules and Guidelines:
31. Do not take any equipment into the cleanroom without permission from the manager
32. Do not use equipment or tools without proper training and authorization
33. Do not assume that you are proficient on any equipment or tools because you have used
something similar in the past.
34. When you are trained on any equipment, you should demonstrate to the tool owner your
efficiency with the equipment within two weeks from the date you received training, otherwise,
your training will be voided and you will need to be trained again.
35. Only approved processes are allowed.
36. Each equipment must be operated within its operating limits, e.g. temperature, pressure,
vacuum, etc. should not exceed or go below the specified limits.
37. No facility modifications are allowed.
38. Do not use equipment that is subject to reservation without a reservation (extended
reservations are available from the NRC manager upon request)
39. Do not tamper with anyone’s running process.
40. Do not try to fix any equipment. Never open equipment panels.
41. Use the equipment for the process you are trained for. Any changes in the process or any new
process must be approved by the management or staff before use.
42. ‼ Always be aware of the conditions of your rubber gloves, if they become
contaminated with any resist , chemicals or solvents change them immediately.
43. You must fill in the equipment logbook with all the required information for each use.
44. Do not remove the logbook from the area around the corresponding equipment
45. Equipment and supplies should be cleaned before you bring them into the cleanroom.
46. Do not reserve equipment for the maximum allowed time if process time does not require it.
47. If the user does not attend and start the process on the reserved equipment within 30 minutes
from the start of the reservation, his/her reservation will be canceled. The equipment will be
considered available to other users.
48. Beware of UV light exposure is Bay 1 (OAI Aligner) and TFAB yellow room (MJB3 Aligner)
49. Beware of LASER light exposure in Bay 3 ( Coherent Excimer LASER)
50. When you use any equipment and you have doubt about ant part of operation, do not
guess and do not try an uncertain process or procedure. Ask the equipment owner.
51. ‼ Violations of these rules may result in suspension or loss of cleanroom access ‼
52. ‼Repeated Violations of these rules WILL result in suspension or loss of cleanroom
access ‼
1.3 NRC Emergency Contact Phone Numbers, Chemical Incident/ Emergency Procedures
1.3.1 In the event of Emergency involving a person in NRC, NRC clean room or NRC wet labs (lab 207) are the list of UTA and NRC Emergency contact numbers listed below. Emergency phones are located in Bay 1, Alcove, Teaching Fab or any available cell phone.
In the event of a User exposed to chemicals or injuries requiring immediate medical attention always call 911
1.3.2 In the event of Chemical Incident or an Emergency involving you or other individual(s) immediately stop what you are doing and assess the situation. Remove all personnel (Users, students, visitors, staff employees) from the immediate danger area and immediately call NRC staff members, NRC management , UTA EH%S office or emergency personnel.
Give the following information:
• Your name
• Location (NRC -clean room, clean room Bay number, clean room chase number, lab
room number)
• Nature of Emergency (fire, chemical leak, injury, etc.)
• Any injuries resulting from the chemicals involved
• Name or other description of chemicals involved
• Quantity of chemicals involved
Do the following:
• Avoid breathing vapors or dust from chemical involved
• If chemical is flammable, turn off all ignition and heat sources near the chemical, if possible
• Leave any chemically contaminated materials (i.e., acid aprons, acid gloves, PPE etc.) in the affected hood or area of spill.
• If the chemical involved is a spill in any NRC processing Bay or Lab, close and the door and post a "DO NOT ENTER" sign on the door
1.3.3 If the Chemical Incident / Emergency involving you or another User that has been exposed to chemical contamination (acid, base, alkali base, solvents, flammable liquids, toxic gases or vapors any chemicals stocked in NRC) REQUIRING IMMEDIATE MEDICAL ATTENTION or an injury has occurred (burn, inhalation injury, electrocution, radiative, crushing, cuts or any injury using a piece of equipment) requiring immediate medical attention.
‼ For any injuries requiring immediate medical attention call 911 ‼
Follow the procedure as listed below:
• Remove the victim, yourself and other personnel from the immediate danger area.
• Avoid breathing vapors or dust from any spilled.
• For Chemical Contamination Immediately decontaminate the victim or yourself with running water for at least 15 minutes using the safest and closest Safety Showers located in Bay1,Bay4, Teaching Fabs,
• For Chemical Contamination in the victims or your eyes use the safest and closest Eye Wash Stations located in Bay1, Bay4, Teaching Fabs and rinse your eyes for 15 minutes.
• While the victim or yourself is under running water, remove the contaminated clothing quickly ( the longer a person is exposed to chemical contamination the more damage will incur),
• Following the 15minute decontamination call 911
• For any injuries requiring immediate medical attention call 911
• Consult MSDS for guidance on appropriate first aid
Have yourself or the first responder have the following information to give to the emergency personal and the medical facility.
• Your name
• Location (NRC -clean room, clean room Bay number, clean room chase number, lab room number)
• Nature of Emergency (Chemical contamination, burn, type of injury, etc.)
• Identity or other description of the chemical.
• The label, if it can be removed from the container
• Material Safety Data Sheet (MSDS) for the chemical.
1.3.4 In the event of a Chemical Incident/Emergency that does not involve a victim exposed to chemical contamination or injury that does not require medical attention occurs on official school closure days, holidays, or at a time other than during normal working hours of Monday through Friday 0700am to 6.00pm immediately call UT Arlington Policy Emergency number.
1.3.5 In the event of a Chemical Incident/Emergency that does not involve a victim exposed to chemical contamination or injury that does not require medical attention occurs during normal working hours of Monday through Friday 0700am to 6.00pm immediately call and immediately call NRC staff members, NRC management , UTA EH%S office or emergency personnel.
1.4 Draegergard 8/16-Vision 7000 Software toxic gas Alarm monitoring system, NRC Evacuation Procedures
1.4.1 Within the NRC cleanroom toxic gas PPM (parts per million) levels are continuously monitored ( 24/7) using the Drager Polytron 2 XP, 7000 and 8000 Transmitters, DragerGard 8/16 controller and Vision 7000 Software. The sources of all toxic gas bottle releases, acid or base hood reactions causing large amounts of vapor outgassing, chemical spills , broken acid or base bottles where large amounts of vapors are release, incorrect mixing of acid or bases into the waste bottles causing outgassing and vapors , any chemical processing errors that have sufficient out- gassing are detected by the Drager system. The system allows for real time monitoring gas or chemical vapor concentrations, trending, data logging, PPM history and ALARMING.
If a PPM level exceeds an alarm set point the controller will relay an audible and visual alarm throughout the building. If the Drager system’s alarm light tower that is mounted in Bay3 wall YELLOW light goes ON , stop what you are doing immediately leave the NRC building in a quick and orderly manner using the normal exit route and informing others to leave as you make your way out. Notify NRC management, staff or emergency personnel. If the light tower’s RED alarm light and audible alarm message goes ON ordering all personal to evacuate the clean room and NRC building , stop what you are doing and immediately leave in clean room attire the NRC building through the closest and safest emergency exit and wait for emergency personnel to arrive.
NRC Emergency Exits
1.4.2 For an Emergency Evacuation that is not activated by the Drager system. Follow these general rules:
• Stop whatever you are doing
• Assess the emergency
• Evacuate in a quick and orderly manner
• Evacuate by any of the following three ways depending on severity of the emergency o Evacuate as you normally exit o Evacuate through main exit or clean storage in clean room attire o Exit through nearest available emergency exit in clean room attire
• Notify NRC management, Staff or emergency personnel
NRC Emergency Exits
NRC Cleanroom Emergency Exits are located in East Hallway, North Hallway, Cleanroom Entry Door and Clean Storage Entrance/Exit door
1.5 NIOSH Pocket Guide to Chemical Hazards; MSDS terms and definitions user guide.
1.5.1 Prior to ANY chemical processing ALWAYS read the appropriate MSDS and other pertinent fact sheets for all the chemicals you will be using. Be familiar with product identification, hazardous ingredients/identity information, physical/chemical characteristics, fire and explosion hazard data, reactivity data, health hazard data, precautions for safe handling and use and control measures. The MSDS binders in the clean room are located in Bay 1 at the solvent storage cabinet, Bay 4, Teaching Fab Chemical storage cabinets and TFAB yellow room. Throughout the fab the MSDS binders will be stored and assessable below the MSDS INFO location sign as shown below :
National Institute for Occupational Safety and Health (NIOSH): NIOSH Pocket Guide to Chemical Hazards website: https://www.cdc.gov/niosh/npg/default.html
The Pocket Guide has been designed to provide chemical-specific data to supplement general industrial hygiene knowledge. To maximize the amount of data provided in this limited space, abbreviations and codes have been used extensively. These abbreviations and codes, which have been designed to permit rapid comprehension by the regular user, are discussed for each column in the subsections. 1.5.2 Refer to the following MSDS users guide to become familiar with the terms and definitions of a MSDS or SDS.
MSDS or SDS
1 MATERIAL SAFETY DATA SHEET USER'S GUIDE
The following information is intended to serve as a general guide to assist in the evaluation and understanding of a MSDS. This MSDS User's Guide is presented using the Occupational Safety and Health Administration (OSHA) form No. 174 (see Exhibit 1D) to describe data typically found in an MSDS and the general arrangement or location of data. An explanation of each section of the form follows.
SECTION I: PRODUCT IDENTIFICATION
General Comments:
The identity of the material must be included on the MSDS. This identity will usually be systematic, scientific name, often with a unique Chemical Abstract Service (CAS) registry number. The product identity on the MSDS must match the identity on the label affixed to the chemical container.
Sometimes common synonyms are used for the products. Every known chemical designation or competitor's trade name is not necessarily listed.
Manufacturer's Name, Address, and Telephone Number
The manufacturer of the product is listed along with the manufacturer's address and telephone number for non- emergency information.
Emergency Telephone Number
The telephone number for information on the chemical in emergency situations (spill, explosion, fire, or
container leak.
Chemical Name and Synonyms
Refers to the chemical name of the material and any synonyms. Refers only to products consisting of a single
element or compound, and not to mixtures.
Trade Name and Synonyms
The trade name (or name the product is sold by) is listed along with any synonyms.
Chemical Family
This indicates the general class of compounds to which a material belongs, such as ethers, acids, ketones, etc.
Formula
Refers to the chemical formula for single element or compound products.
Date Prepared
Date the MSDS was prepared or last revised.
SECTION II: HAZARDOUS INGREDIENTS/IDENTITY INFORMATION
General Comments:
The terms listed in this section should be those components in the product which individually meet any criteria for
a defined hazardous substance. A component of a multi-component product might be listed based on its toxicity,
flammability, reactivity, or combination of these. AS numbers are not required to be listed under the Federal or
Hawaii Hazard Communication Standard, but are required under California's Hazard Communication Standard.
Chemical Names
Names of the product's hazardous ingredients.
CAS Number
A unique identification number assigned to a chemical or product by the Chemical Abstract Service (CAS).
TLV
Threshold Limit Value (TLV) is a term used by the American Conference of Governmental Industrial Hygienists
(ACGIH) to express the airborne concentration of a material to which nearly all adults can be repeatedly exposed
day-after-day without adverse effects.
PEL
Permissible Exposure Limit (PEL) is an exposure limit established by OSHA's regulatory authority. The PEL may
be a time- weighted average (TWA) or a maximum concentration exposure limit
Percent
Describes the percent by weight or volume of each ingredients listed. The percentages of hazardous ingredients
in a product may be given, but are not required in the present regulation.
SECTION III: PHYSICAL/CHEMICAL CHARACTERISTICS
General Comments:
The data in this section should be for the total mixture or product. The information provided in this section is
useful for the control of toxic vapors and for designing proper ventilation systems.
Vapor Density
Relative density or weight of a vapor or gas compared to the weight of an equal volume of air. Materials lighter
than air will have vapor densities less than 1.0.Materials heavier that air will have vapor densities greater than
1.0.
Specific Gravity
The ratio of the weight of a volume of materials to the weight of an equal volume of water.
Solubility in Water
The percentage of a material that will dissolve in water at a specified temperature. Less than 0.1% considered
negligible; 0.1% to 10% is moderate; more than 10% is appreciable and, if it can be dissolved in all proportions, it
has complete solubility.
Vapor Pressure
The pressure exerted by gas or vapor from the surface of the liquid in a closed container. A high vapor pressure
indicates that a liquid will evaporate easily
Evaporation Rate
The rate at which a material will evaporate when compared to a reference material (such as butyl acetate).If a
substance has an evaporation rate greater than 1, it evaporates more easily that the reference material. If the
rate is less than 1, it evaporates more slowly than the reference material.
Appearance and Odor
The color, form, and other identifying features of the material, to help identify
the substance.
Melting Point
The temperature at which a solid changes to a liquid state.
Boiling Point
The temperature at which a liquid changes to vapor state at a given pressure.
Percent Volatile
Refers to the percentage of a liquid or solid by Volume(by volume) that will evaporate at an ambient temperature
of 70 degrees Fahrenheit or 15.5 degrees Centigrade. This information may be found in place of melting point.
SECTION IV: FIRE AND EXPLOSION HAZARD DATA
General Comments:
This section should contain the appropriate fire and explosion data for the product. If the product poses no fire
hazard, a statement to that effect should be included in this section.
Flash Point
The lowest temperature at which a liquid (Method Used) gives off enough vapor to form a ignitable mixture in air
in a test container. Since flashpoints vary according to how they are obtained, the methods used are also listed.
Tag Closed Cup (TCC), Penshymartens Closed Cup (PMCC), and Setaflash (SETA) methods are those used
most extensively.
Flammable Limits
When flammable vapors are mixed with air in the proportions, the mixture can be ignited by a spark or flame. The
range of concentrations over which the flash will occur is designated by the lower explosive limit (LEL) and the
upper explosive limit (LEL)
Extinguishing Media
The selection of fire extinguishing media is based on the type of chemical, its physical properties, and flammable
characteristics. The most common types of extinguishing media
are water, CO, dry chemical and foam.
Special Fire-fighting Procedures
Special handling procedures and personal protective equipment for fighting fires as applicable.
Special Fire-fighting Procedures and Precautions
General firefighting methods are not described but special "exception to the rule" procedures are listed.
Unusual Fire and Explosion Hazards
Described are hazards associated with a chemical reaction or change in chemical
composition which might occur under heat or fire conditions. Also described are hazards which may need to be
considered while extinguishing fire with one of the available types of extinguishing media.
SECTION V: REACTIVITY DATA
General Comments:
This section relates to safe storage and handling of unstable hazardous substances. Essential information
regarding the instability or incompatibility of the product to common substances or circumstances such as water,
direct sunlight, metals used in piping, or containers, acids alkalies, etc.Under "Hazardous Decomposition
Products", dangerous products created by aging should be included, like the production of peroxides in the
decomposition of some ethers. The product's shelf life should also be indicated under this section when
applicable.
Stability
An indication of the ability of the material
to remain unchanged under reasonably fore- seeable conditions. Conditions which may cause instability are
stated.
Incompatibility
Common materials that could cause dangerous reactions when in contact with the product are listed.
Hazardous Decomposition Products Hazardous products that may be produced when the material breaks down (by heat, chemical reaction, oxidation, decay, or other processes).
Hazardous Polymerization Polymerization is a chemical reaction in which two or more small molecules combine to form larger molecules that contain repeating structural units of the original molecules. A hazardous polymerization is the above reaction with an uncontrolled release of energy. SECTION VI: HEALTH HAZARD DATA
General Comments:
This section should be a combined estimate of the hazard of the total product. Severity of the effect of exposure and basis for the finding, such as animal or human studies may be included.
Symptoms of Overexposure
Physical signs of overexposure (inhalation, skin, or eye contact, absorption through the skin and ingestion).
Health Effects or Risks From Exposure Acute health effects which develop quickly from a single dose or short exposure to a substance are described. Chronic health effects which develop slowly over a long period of time, or recur frequently are also described.
First Aid and Emergency Procedure First Aid procedures to follow until professional medical help is available in case of eye contact, skin contact swallowing, or breathing excessive amounts of the material are described.
Suspect Cancer Agent This section states whether the product has been found to be a carcinogen (cancer causing agent) by any of the sources listed.
Medical Conditions Aggravated by Exposure Carcinogenicity cancer.
The product has the ability to produce A chemical or product is considered to be a carcinogen or potential carcinogen if it is listed in the International Agency for monographs, National Toxicology Program (NTP) report, or OSHA list of regulated carcinogens. Medical conditions which are aggravated by exposure to the material are listed.
SECTION VII: PRECAUTIONS FOR SAFE HANDLING AND USE
Spill and Leak Procedures This describes methods for control and cleanup of spills or leaks. Appropriate materials, equipment, and personal protective equipment clothing are also listed.
Preparing Wastes for Disposal
Methods for packaging, neutralizing, or otherwise preparing waste product for disposal are described. Methods should be explicit, including proper labeling and handling of containers holding cleanup residue and specify acceptable disposal methods, such as sanitary landfill, incineration, etc.
SECTION VIII: CONTROL MEASURES
Ventilation and Engineering Controls The type of ventilation which may be used is described. General exhaust removes contaminated air circulation or exchange system.
Local captures and removes contaminants from the air at the point where the contaminant are released.
Respiratory Protection
Devices (respirators) for use in conditions exceeding exposure limits when properly selected, maintained, operated, and worn by the user, will protect the user's respiratory system from overexposure to air borne contaminants by inhalation.
Eye Protection
The type of eye protection needed for handling the product.
Gloves The type and material of gloves to use for protection of skin. Other Clothing and Equipment Additional clothing or personal protective equipment which may be needed to prevent exposure to a material. Work/Hygienic Practices Any specific practices for working with the material are described. Other Handling and Storage Requirements Specific requirements for storing and hand- ling the material described. Protective Measures During Maintenance of Contaminated Equipment Additional precautions for handling contaminated equipment.
1.6 Safety Equipment : Location and Operation of Eye Wash Stations, Safety Showers, , Fire Extinguishers, First Aid Kits , Emergency Phone Locations and Emergency Exits
1.6.1 There are five safety showers and eyewash stations in NRC Clean room and another safety shower and eyewash station in Lab 207. With the cleanroom the safety showers and eyewash stations are located in Bay 1 by the door, Bay 4 next to the Acid Hood, Chase 4 by Tystar Furnaces, Teaching Fab by the large double door, and inside Teaching Fab Yellow Room.
Chemical Spills on your clothes or body: Dangerous chemicals on your clothes or body require the immediate use of the shower. Speed
is essential. To activate the safety shower pull the shower’s chain-ring downward and immediately begin flushing with plenty of water and continue to flush for at least 15 minutes. While showering, remove your affected clothing so as to remove the source of chemical danger from yourself. Concerns about modesty must not interfere with avoiding serious injury. Do not put contaminated clothing back on after rinsing. Call the appropriate posted emergency phone numbers to get medical assistance as soon as possible and to obtain medical care.
Chemical Splashes into your eyes: Use the eyewash stations if chemicals have splashed into your eyes. Call for help so that your
buddy can lead you to the eyewash station. Speed is essential. Do not hesitate. To activate the eyewash station push the lever in the forward direction, let the water flow
over your closed eyes for a few moments before beginning to open them. This will make sure that the water is as clean as possible. Wash out your eyes with water for at least 15 minutes after opening them.
Chemical Splashes into your eyes and body: If you have splashed chemicals both in your eyes and on your body, then you may want to use
the shower first and rinse your eyes in the shower. After showering, rinse your eyes using the eyewash station as well. Remove any affected clothing while rinsing your eyes at the eyewash station, so as to remove the source of chemical danger. Concerns about modesty must not interfere with avoiding serious injury. Call the appropriate emergency assistance phone numbers as soon as possible and obtain medical care.
Bay 1 TFAB Yellow Room Bay 4 Lab 207
1.6.2 Fire extinguishers are located in all Bays and Chases in NRC Cleanroom and lab 207.
Maintain unfettered access to the fire extinguishers at all times, remove any storage boxes, chairs tables away from the fire extinguishers. At UTA NRC, "ABC" fire extinguishers are filled with a fine yellow powder. The greatest portion of this powder is composed of monoammonium phosphate. Nitrogen is used to pressurize the extinguishers. ABC fire extinguishers are red and range in size from 5 lbs to 20 lbs on campus.
Before you begin to fight a small fire activate fire alarm call UTA PD at 817-272-3003 (from a safe location) be sure fire is confined to small area and is not spreading be sure that a safe and unobstructed exit is readily available PROPER USE OF FIRE EXTINGUISHERS:
Every accident/fire shall be reported to the Environmental Health & Safety Office by the "in-charge" faculty member, administrator, supervisor or foreman. Department heads and directors, on being notified of an accident/fire, should insure that the proper emergency response agencies have been notified and confirm that the Environmental Health & Safety Office has been advised. Accidents occurring at other than normal office hours should be reported to the Environmental Health & Safety Office at the beginning of the next workday. Campus accidents or fires resulting in a fatality, serious disabling injury or major facility damage during other than normal office hours will be reported to the Environmental Health & Safety Office (ext. 22185) by the University Police Department.
1.6.3 First Aid Kits are available in Bay 1, Bay 4, TFAB Yellow Room, Lab 207 and in the gowning
room. These kits are used for self-treatment of minor injuries that do not require the attention of a medical professional. These kits can also be used to provide supplies to immediately treat more serious injuries and minimize health effects before treatment can be done by a medical professional.
1.6.4 Emergency phones are located in Bay 1, Alcove, Teaching Fab or any available cell phone.
When making an emergency call use the most readily available telephone or cell phone (if building power is affected) and limit non-emergency phone calls. Depending on the incident and personal affected or injured call the appropriate emergency phones numbers per section 1.3.1 to 1.3.5 .
Alcove Bay 1
1.6.5 NRC Cleanroom Emergency Exits are located in East Hallway ,North Hallway, Cleanroom Entry Door and Clean Storage Entrance/Exit door. See the map below map for First Aid kits, Fire Extinguishers, Safety Showers and Eyewash Stations and Emergency Telephone locations.
2.0 NRC WET CHEMICAL PROCESSING FACILITES, CHEMICAL STORAGE LOCATIONS, NRC MATERIAL INVENTORY LIST AND PRECAUTIONS, CHEMICAL PROCESSING USAGE RULES
2.1 Chemical Fume Exhaust Hood Locations & Descriptions, Accompanying Equipment for Wafer Processing and Associated Safety Rules
2.1.1 The chemical fume exhaust hoods located Bay1,Bay4,TFAB Yellow room and Lab 207 are types of ventilation systems providing personnel protection against toxic fumes, vapors and dust and also provides protection against chemical spills, runaway reactions and fires by acting as a physical barrier. A additional function of the hoods is for exhausted Chemical waste bottle storage compartments located in behind the doors at the base of the hoods.
In the drawings below shows the NRC “Wet” Equipment comprised of acid, base and solvent fume hoods locations in the clean room and Lab 207 and there accompany equipment available for Users to utilize. All supporting equipment requires training by the tool equipment owner before you can use the additional processing tools.
2.1.2 NRC clean room and Lab 207are equipped with the following “Wet” Equipment: The Cleanroom is equipped with an acid and base hood, solvent and a “develop” hood. The acid, base and develop hoods are equipped with high purity Millipore DI water (18Mohm resistivity) for clean rinsing device wafers and beakers , RO Water (1 MOhm resistivity) for cleaning beakers, processing vessels and city water (for initial cleaning or cooling). All hoods have nitrogen N2 blow guns and countdown clock timers. The hoods are equipped with clear plastic face shields-sash. These serve two purposes: They provide protection from chemical splashes or other mishaps. They also help protect the user from toxic vapors, which are just as hazardous if not more to your health. The hood’s exhaust removes a limited volumetric flow rate of air through the hood. Therefore work with the fume hood sashes in the lowest possible position (down position) and keep the sash in the down/closed position when not working in the fume hood. The only time the sash is in the up position is to plug in a hot plate or analytical balance, retrieving beakers and vessels and deposing of waste chemicals into the waste bottles.
Acid and Base Hoods: The acid and base hood is a large exhausted hood with enough space for two to four people to work at the same time. The hood has two sinks, each equipped with city water. This water may be used for cooling water baths when diluting concentrated sulfuric acid, or for rinsing items that do not require ultra- pure water. When ultra-pure water is required, it is obtained from the deionized water (DI) tap. There are two Millipore DI water taps located at the left and right sink locations. The acid hood is made of polypropylene; thus, it is not suitable for use with solvents, other than water. The hood is connected to a fiberglass exhaust duct, which is flammable. Burning solvent vapors could ignite this material. It is imperative that volatile SOLVENTS not be used in the acid and base hood. Acids and bases either fresh/new chemical bottles or waste chemical bottles may not be stored on the Acid and Base hood deck. However, the Acid and Base cabinet below the hood is used for storing waste acid bottles (right side) and waste base (left side).It is permissible to use both hot plates and Branson ultrasonic cleaners in the acid hood , although it is important to watch these processes closely and follow all the hot plate rules Again the only time the Acid and Base hood sash is in the up position is to plug in a hot plate or analytical balance, retrieving beakers and vessels and deposing of waste chemicals into the waste bottles.
Hot plate rules
Solvent Hoods: This hood is to be used for operations requiring non-aqueous solvents. It is made of stainless steel in order to be fire resistant. The hood exhaust ducting is galvanized steel. Consequently, acid solutions should not be used in this hood, as the vapors will corrode both the hood and the exhaust duct.
Again the only time the Solvent hood sash is in the up position is to plug in a hot plate or analytical balance, retrieving beakers and vessels and deposing of waste chemicals into the waste bottles, at all other times and during wafer processing the sash needs to be in the down position.
It is permissible to use the Branson ultra-sonic cleaners or hot plates in this hood, although it is important to watch these processes closely and follow all the hot plate rules. The cabinet beneath the hood is used for storing fresh/new solvents and solvent waste bottles such as non-halogenated acetone, methanol and isopropyl alcohol, halogenated solvents such as TCE and others such as solvent strippers No user labeled chemical bottles or containers may be stored in the solvent hood deck. These must be placed in appropriate, labeled secondary containment bottles and stored in the Solvent cabinet. Beakers covered with aluminum foil, are not acceptable for chemical storage, any secondary chemical container bottle not properly labeled and will be disposed of. Secondary containment rules are also applied to this cabinet.
Hot plate rules
Develop and Akali Hood: The develop hood is small, and is used primarily for developing photolithographic patterns. All developer solutions are alkali and alkali base thus they are used in this hood. The fresh/new developer bottles are stored below the Headway Research Spinner station 1. Do not store chemicals on the developer hood deck. The hood is equipped with exhausted ducting, nitrogen blow gun, Millipore RO and city water. Used developer waste bottles are to be disposed of in the appropriate labeled waste bottles, and stored in the Developer Waste cabinet under the develop hood.
Again the only time the Developer hood sash is in the up position is clean and retrieve beakers, vessels and to safety depose of waste chemicals into the waste bottles, at all other times and during wafer processing the sash needs to be in the down position.
Developer Waste cabinet
Fresh (new) developer bottles are stored below the Headway Research Spinner station 1.
2.2 Chemical (Fresh) Storage Locations, Waste Chemical Storage Locations Chemical Inventory List & Precautions; and Chemical Storage and Usage Rules
2.2.1 The Fresh (unused) chemical storage locations are described below:
Acid (fresh/new) Cabinets: The fresh acid cabinet is located at the far end of Bay 1 next to the double doors leading to the chase, on the left hand side, TFAB yellow room below the acid hood, Lab 207 and in Bay 4. These cabinet is polypropylene, and connected to the fiberglass exhaust. It, like the acid cabinet is unsuitable for organic solvent storage.
Always wear all the Personal Protection Equipment when you are retrieving fresh acids from this cabinet for use, and when transporting the fresh acid bottles within the Bay.
When transporting acid bottles, use the acid bottle carrier stored next to the fresh acid cabinet. This will prevent acid from spilling even if the bottle is dropped
The top two shelves are used for storing both NRC (open use) acids, and individually owned bottles of acid. Mixed solutions may also be stored, provided that they are in closed properly labeled secondary container. High density polyethylene bottles are the preferred container. The label must list the contents, the advisor/owner, MSDS hazard, and the expiration date. Bottles that are not properly labeled or updated within 6 months will be considered abandoned and will be disposed of.
Secondary containment rules are also applied to these cabinets. Fresh (unused) chemical storage locations are described below
Bay 1 Bay 4 Teaching Fab Yellow Room Lab 207
Base cabinets: The base storage cabinet is located by the entrance to Bay1 and TFAB yellow room below solvent hood. All base solutions and all alkaline materials, such as NaOH and KOH, are stored in this cabinet. Secondary containment rules are also applied to this cabinet.
Always wear all the Personal Protection Equipment when you are retrieving fresh bases from this cabinet for use, and when transporting the fresh base bottles within the Bay.
When transporting base bottles, use the acid/base bottle carrier stored next to the fresh acid cabinet. This will prevent bases from spilling even if the bottle is dropped
Solvent Cabinets: This cabinet is to the immediate left of the Bay1 solvent hood, Bay4, Lab 207 and TFAB yellow room below the Solvent Hood. It is made of steel, and is connected to the same exhaust duct as the solvent hood. All chemicals stored in this hood must be in closed bottles or cans, and must be clearly labeled with the contents, the name of the advisor/owner, MSDS hazards and the expiration date. The label should be updated at least every 6 months. Containers that have not been labeled correctly or not updated for 6 months will be considered to be abandoned, and will be disposed of. Secondary containment rules are applied to this cabinet.
Solvents that are for common use will be labeled “NRC.” Solvents with an individual’s name on them are considered private property. Do not use these materials without the owner’s consent.
Bay 1 Bay 4
Lab 207 Teaching Fab Yellow Room
TFAB Acid, Base and Solvent Storage Cabinets: These three cabinets are located in Teaching Fab. Chemicals stored according to their type in these cabinets are for common use will be labeled “NRC.” Chemical with an advisor’s group name, or labeled EE5343 on them are considered private property. Do not use these materials without the owner’s consent. Do use any chemical bottle labeled EE5343 at all. These cabinets are for NRC, EE5343 chemical stocks/storage only so these cabinets’ doors are always locked until you need some fresh chemicals. Ask staff for the key if you do not have the chemical available in the other wet processing bays chemical storage cabinets.
Secondary containment rules are applied to this cabinet.
Always wear all the Personal Protection Equipment when you are retrieving fresh acids ,bases and alkali bases from these cabinet for use and when transporting these acids and base bottles to other acid and base storage cabinets in Bay 1 , Bay4 and Teaching Fab Yellow Room.
When transporting all chemical bottles from these chemical storage cabinets USE the bottle carrier stored next to the fresh acid cabinet. This will prevent any chemical from spilling even if the bottle is dropped
Hydrogen Peroxide (H2O2) Storage Cabinets: The Hydrogen Peroxide are stored in TFAB yellow room small flammable cabinet and Bay1 base storage secondary Container or tub. This chemical is extremely oxidizing, reducing chemical agent that requires a separate storage cabinet or tub from all other chemical. Be careful when
stockpiling this chemical from TFAB supply to Bay1 or TFAB yellow room. Be careful not to store Hydrogen Peroxide with any other chemical.
TFAB yellow room Bay1
Flammable Liquid Storage in the Flammable Proof Refrigerators To optimize the storage life photoresist, Polyamide, SOD, SOG and any flammable liquids that needs to be refrigerated can be stored flammable proof refrigerators in Chase1 and Chase 5. Secondary containment rules are applied to these refrigerators.
2.2.2 The Waste Chemical Storage Locations are described below: Acid Waste Storage Cabinets: The cabinets below the acid hoods in Bay1, Teaching Fab Acid hood and in Bay4 acid cabinet on the lower shelf is used for storing Acid Waste Bottles. All acid waste storage cabinets are exhausted to protect the users from toxic vapors. All acid waste bottles are high density polyethylene bottles (reused bottles from chemical
supply manufactures) or plastic-coated explosion proof glass bottles with vented caps for Piranha solutions.
All waste bottles have Hazard Waste labels, NRC chemical waste tags attached to the bottle
handle identifying the specific acid waste bottle contents. All acid waste bottles have a “Fill Line” that users are not to go above when deposing chemicals.
NRC Acid Waste Bottles Do not fill any Chemical Waste Bottle above the fill line !!
Bay 1 Teaching Fab Yellow Bay 4 Lab 207
Base and Alkali Waste Storage Cabinets: The cabinets below the Developer hood in Bay1, Teaching Fab Solvent hood are used to store Developer, Base and Alkali Waste chemicals.The Solvent cabinet in Bay 4 and Lab 207 is used to store only fresh and Waste Developer and Alkali bottles.
All Base and Alkali waste storage cabinets are exhausted to protect the users from toxic vapors. All waste bottles are high density polyethylene bottles (reused bottles from chemical supply manufactures)
All waste bottles have Hazard Waste labels, NRC chemical waste tags attached to the bottle
handle identifying the specific acid waste bottle contents. All acid waste bottles have a “Fill Line” that users are not to go above when deposing chemicals.
Bay 1 Teaching Fab Yellow Bay 4 Lab 207
Solvent Waste Storage Cabinets: The cabinets below the Solvent hood in Bay1,Teaching Fab Yellow Room Solvent hood; the Solvent storage cabinet in Bay 4 and the solvent storage below the Solvent Hood in Lab 207 is used to store fresh and Waste Solvents
All Solvent waste storage cabinets are exhausted to protect the users from toxic vapors. All waste bottles are high density polyethylene bottles (reused bottles from chemical supply manufactures)
All waste bottles have Hazard Waste labels, NRC chemical waste tags attached to the bottle
handle identifying the specific acid waste bottle contents. All acid waste bottles have a “Fill Line” that users are not to go above when deposing chemicals
Bay 1 Teaching Fab Yellow Bay 4 Lab 207
2.2.3 The tables below are the NRC chemical inventory list showing the chemical names, symbols, % concentration and special precautions to take during handling and processing. These chemicals are stocked and available for internal user as part of the NRC fee structure .All the chemical purchased by NRC are CMOS microelectronics grade; thus they are very concentrated and very hazardous and can be FATAL in small amounts if you are exposed or contaminated due to an chemical accident or spill. Therefore you must be very careful when carrying, pouring, and disposing of these chemicals. These chemical are also very expensive DO NOT waste chemicals by using more than necessary to perform your wet processes.
Available Acids for NRC internal users:
Chemical Symbol Properties Special Precautions
Hydrochloric 38%
HCL Highly corrosive to skin and mucous membranes. Repeated exposure causes erosion of teeth. Strong chlorine odor detectable at 1-5 PPM.
Use only glass containers
Hydrofluoric 49%
HF
Liquid and vapors cause burns that may not be immediately painful or visible. HF attacks glass. HF looks like water and can KILL in small amounts (100ml). Found in Buffered Oxide Etch (BOE).
Use only PTFE, Teflon containers.
Buffered Oxide Etch 6:1
NH : HF4 (6:1)
6:1 BOE Ammonium
Fluoride 30%-40% Hydrofluoric acid
5% – 10%
Corrosive: Causes severe skin and eye burns. Causes digestive burns. May be fatal if inhaled, absorbed through skin, or swallowed. Mist or vapor extremely irritating to eyes and respiratory tract. Causes blood, cardiovascular system and respiratory system damage. Prolonged exposure may cause chronic effects. Material reacts with water
Use only PTFE, Teflon containers.
HF Dip 10:1
HF/water [1:10]
Hydrogen Fluoride < 1% - 10% Water> 90%
Reacts violently with strong alkaline substances. May be corrosive to metals. Fatal if swallowed. Fatal in contact with skin. Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. Causes damage to organs through prolonged or repeated exposure
Use only PTFE, Teflon containers
HF Dip 50:1
HF/water [1:50]
Hydrogen Fluoride <1% - 2%
Water> 98%
Reacts violently with strong alkaline substances. May be corrosive to metals. Fatal if swallowed. Fatal in contact with skin. Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. Causes damage to organs through prolonged or repeated exposure
Use only PTFE, Teflon containers
Nitric 70%
HNO3 Highly corrosive to skin, mucous membranes and teeth. Highly reactive with acetic acid. Reacts explosively with combustible organic or other oxidizable materials
Use only glass containers.
Phosphoric 85%
H3PO4 Liquid is highly irritating to skin. Vapors are highly toxic. Contact with most metals causes formation of flammable and explosive hydrogen gas.
Use only glass containers
Sulfuric 95-98%
H2SO4 Liquid and vapors are extremely corrosive to skin and mucous membranes. Generates heat upon contact with water. Reacts with acetic acid.
Keep away from water. Use only glass
containers
Available Bases and Alkali Salts for NRC internal users:
Chemical Symbol Properties Special Precautions
Ammonium Hydroxide
29%
NH4OH
Irritating to skin, eyes, nose and mucous membranes. Emits highly toxic vapors when heated. A harmful contamination of the air can be reached very quickly on evaporation of this substance at 20°C
Reacts with many heavy metals and their salts forming explosive compounds. The solution in water is a strong base, it reacts violently with acids. Use only glass containers
Hydrogen Peroxide
30% H2O2
Strong oxidizing agent. Irritating to skin and mucous membranes. Reactive violently with reducing agents, combustible materials, organic materials, metals, acids, alkalis
Cap with vented cap. Do not boil in open vessels, may cause explosion. Store separate from all other chemicals. Use only glass containers
Available Solvents for NRC internal users:
Chemical Symbol Properties Special Precautions
2-Propanol 99.5%
CH3CHOHCH3
Highly flammable liquid and vapour. Keep away from heat/sparks/open flames/hot surfaces. Beware of vapours accumulating to form explosive concentrations. Vapours can accumulate in low areas. Keep container tightly closed.
Face shield and safety glasses Use equipment for eye protection
Acetone 99.9%
(CH3)CO
Danger! Extremely flammable liquid and vapor .Acetone may form explosive mixtures with chromic anhydride, chromyl alcohol, hexacholromelamine, hydrogen peroxide, permonosulfuric acid, potassium terbutoxide and thioglycol. Strong oxidizers
Danger! Extremely flammable liquid and vapor. Keep away from heat/sparks/open flames/hot surfaces.Vapors may cause flash fire or explosion. Harmful if inhaled. Vapor concentrations may cause drowsiness. Face shield and safety glasses Use equipment for eye protection.
Methanol 99.9%
CH3OH
Methanol is used as a solvent and as an intermediate in chemical synthesis. Component of deicing mixtures and preservatives. Toxic. Highly flammable liquid and vapor, toxic if inhaled.
Methanol is a hazardous chemical that is highly flammable and toxic, Methanol is extremely toxic to humans if ingested or if vapors are inhaled. Direct exposure to methanol should be avoided, Methanol can also degrease the skin, which may cause dermatitis.
2.2.4 General Facilities & Standard Chemical Usage Rules :
Do not take any chemical into the cleanroom without prior approval from the manager.
Do not bring any chemical in the NRC building without prior approval from the manager.
This also includes Lab 207 and any private labs located inside the NRC building.
Before using any chemicals read all sections the SDS or MSDS of all the chemicals you
will be using. For mixtures you are required to read all the components MSDS
information. You need to understand and remember all chemical properties,
incompatibles, handling requirements, first aid responses etc... Before using the
chemicals.
Follow all chemical safety instructions, such as those listed in Material Safety Data
Sheets or on chemical container labels, precisely.
Know all the hazards of the chemicals with which you work. For example, perchloric acid
is a corrosive, an oxidizer, and a reactive.
Minimize your exposure to any chemical, regardless of its hazard rating, and avoid
repeated exposure.
Never underestimate the potential hazard of any chemical or combination of chemicals.
Consider any mixture or reaction product to be at least as hazardous as, if not more
hazardous than its most hazardous component.
Assume that any unfamiliar chemical is hazardous and treat it as such.
Never use any substance that is not properly labeled.
Use the buddy system when working with HAZARDOUS CHEMICALS. Don’t work in the
laboratory alone. Violation of the Buddy Rule will results result in suspension or loss of
cleanroom access ‼
Never use any substance that is not properly labeled.
Chemicals must be stored in designated chemical storages. Acids must be stored in acid
storages, Bases must be stored in base storage. Solvents must be stored in solvent
storages. If you are not sure ask staff to clarify.
‼ Always be aware of the conditions of your nitrile rubber gloves, if they become
contaminated with any resist, chemicals or solvents change them immediately. Rubber
gloves with tears and holes will expose your hands and finger to potentially hazardous
chemical contact with your skin. If your glove tears get a new one first !
Assemble all the supplies you will need to perform your wet process, such as compatible
beakers, graduated cylinders, clean glassware, timers, and clean room paper. Organizes
and place them on the wet deck before processing with the chemicals.
Know the exact locations and operations of the eye wash stations, safety showers, fire
extinguishers and emergency exits.
Do not answer the phone if you are in the middle of chemical transport, mixing,
processing, or disposing chemicals
Before retrieving fresh chemicals from Acid, Base, Alkali’s and Solvents storage cabinets
put on all the Personal Protective Equipment (PPE).
Personal protective equipment (PPE) is chemical resistant apron, acid gloves, protective
sleeves and full face shields when working with any hazardous chemicals. Any additional
safety equipment must be used if required in the MSDS of the particular chemical.
When retrieving chemical out of the storage cabinet, hold the chemical bottle with both
hands and place in the bottle carrier to move to the appropriate hood you will be using.
Any Acid, Base, Alkali , Solvent or any chemical bottle that are malformed, bowed in, and
damaged inform NRC staff immediately to dispose and replace
When carrying chemical bottle, carry only one bottle at a time. Chemical bottle should be
kept in front of your chest and held by both hands. Use containers for the bottles if
possible.
When carrying chemicals, always walk in the middle of the bays. Avoid getting too close
to the walls.
All chemicals must be used in their respective chemical hoods : Acid in acid hoods, Base
in base hoods , Solvent in solvent hoods and Developers in the develop hoods
Do not place Acid, Base, Alkali’s, solvent bottles or any liquid or solid chemicals on the
floor where they can be kicked over. Place them on the working hood deck area during
your dispensing steps.
Use your own groups labeled glassware, beakers, stirrers, hotplates etc.
After you have dispensed the appropriate amount of chemicals need to perform your
process immediately return the fresh chemical bottle back to their respective storage
cabinets.
Do not use more chemicals than necessary to perform your process. The chemicals are
very expensive
Keep your wet process work area well organized and clean.
All Chemical Hood sashes are required to be in the furthest down position possible in
order to safely perform your wet processing steps such as measuring, mixing; including
during wafer processing. The only time hood sashes are UP is when you are retrieving
hotplates, powering on the plates or weighing scale, removing chemicals that are cooling,
disposing the waste chemical into the waste bottle with the funnel; otherwise they are
always kept down.
Do not grab wafers and samples with hands. Always use the proper tweezers.
Do not place wet samples on any equipment, chuck, or surfaces.
If you have to leave a chemical process running while taking a short break (no more than
one hour), you must label on clean room notebook paper each chemical clearly with its
name, write your name, name of your advisor, date, departure time, time of return and a
valid telephone number. Do not use abbreviations or formulae for the chemicals. Write
full name of the chemicals.
Use extreme caution while running your process and follow all MSDS safety guidelines.
Always be aware of the conditions of your Acid gloves, if they become contaminated with
any Acid , Base , Alkalis or solvents rinse them with water immediately.
Always wear all the Personal Protection Equipment when you are disposing the Acid,
Base or any Hazardous Chemicals waste into their respective Chemical Waste bottles,
and when transporting waste bottles within the Bay.
Do not dispose of any Acid, Base, Alkali or any chemicals unless you are 100% sure of
the correct Waste bottle to use.
Any Chemical Waste bottles that do not have a contents Tag inform NRC staff
immediately to dispose and replace.
Any Chemical waste bottle that is at or close to the “Fill Line” inform NRC staff
immediately to dispose replace.
Always use the polypropylene funnel while pouring the hazardous waste into the waste
bottle.
No chemical is to be discarded in drains.
When transporting Acid Waste Bottles, use the acid bottle carrier stored next to the fresh
acid cabinet. This will prevent waste acid from spilling even if the bottle is dropped
When transporting HAZARDOUS Waste Chemical Bottles, use the bottle carrier stored
next to the fresh acid cabinet in Bay 1. This will prevent hazardous waste chemicals from
spilling even if the bottle is dropped
All secondary containers containing mixed or un-mixed chemicals must be properly
labeled with each component and its ratio, the date, name of user and faculty advisor,
MSDS hazard warning description and expiration date. Use the label maker in Bay3 to
make the labels.
All waste chemicals should be collected properly in designated and labeled waste bottles
followed by filling out the waste chemical logbook.
Use the buddy system when working with HAZARDOUS CHEMICALS. Don’t work in the
laboratory alone. Violation of the Buddy Rule will results result in suspension or loss of
cleanroom access ‼
Violations of these rules may result in suspension or loss of cleanroom access; repeated
violations of these rules WILL result in suspension or loss of cleanroom access ‼
3.0 REQUIREMENTS AND PROCEDURE FOR HANDS ON CHEMICAL & SAFETY TRAINING, CEMS TRAINING, USER SUPPLIES NEEDED
AND STORAGE BOXES, CRITICALLY IMPORTANT RULES AND PROCEDURES TO FOLLOW
3.1 Requirements for Hands on Chemical Training for NRC Cleanroom and Lab 207: (Wet Lab Room 207, located on second floor of the NRC building is an access-limited lab for all eligible INTERNAL and EXTERNAL users.)
The requirements for scheduling your NRC Hand on Chemical training are registration, approved application, the General HAZCOM Training , the NRC Safety & Protocol Training and the successful completion of the NRC Safety Exam. To register send an email at least one working day in advance with your name, current email address, department, faculty advisor’s name, and the desired session to [email protected] . For registration the items to bring with you: Your Mav ID.
Access to NRC Cleanroom and Lab 207 for internal and external users who request access
to the labs with the following conditions :
The Applicant should take the UTA online HAZCOM and provide the certificate to
Ms. Thanh Bui, The admin at [email protected] .
The Applicant should take the NRC Site Specific Safety Protocol Training and pass. The schedule of the training can be found at http://www.uta.edu/sirt/nano/user_information.php
The Applicant is required to read NRC Hands On Hazardous Chemical & Safety Training Standard Operating Procedure and attend Hands on Chemical Training after completion of step . The schedule of chemical training can be found at address site given in item #
Access to the Clean room and Lab 207 is through a card reader. No one is allowed in the Cleanroom or Lab 207 without access granted by the Manager of NRC.
3.2 CEMS Training: If you are assigned by your PI/Supervisor to be responsible to update the
PI/supervisors chemical inventory then go online to http://cems.uta.edu and read the CEMS notices see when the next CEMS group training session’s date, time and the room location. If your schedule does not permit attending the training session and you prefer an individual training, please inform Elisabeth Rowlett at [email protected] of the date/time convenient for you.
The following are the steps to take for managing your PI and group chemical inventory.
Attend CEMS group or individual training provided by EH&S. Go to http://cems.uta.edu for training date, time and location information.
Submit a request for a new CEMS account by going to http://www.uta.edu/campus-ops/ehs/cems/ and click on SOP-Request New CEMS Account and fill out the required information and submit.
Update and supervise your PI and groups chemical inventory by following the SOP procedures at http://www.uta.edu/campus-ops/ehs/cems/
3.3 User Supplies Needed and Storage Boxes: Internal and External Users are required to supply their own wafers, substrates, wet
processing supplies, wafers holders, beakers ,graduated cylinders, hot plates, magnetic stirrers, thermometers and any other processing equipment and supplies not provided by NRC. “Borrowing” from the Teaching Fab, Bay 1 hoods or racks, or anybody else supplies (unless given permission by the owner) will not be permitted. Label you name on all your supplies your using the label maker in Bay 3 Required materials include, but are not limited to:
Safety Glasses: Any person entering the clean room and all wet processing bays, must have, and be wearing, their safety glasses. Regular eyeglasses are not acceptable. Storing safety glasses in Bay 1, thus requiring entry without safety glasses is not acceptable. It is recommended that personnel obtain a chain or strap, of the type used for hanging reading glasses around the neck, so that they can keep their glasses with them at all times. Label you name on your safety glasses using the label maker in Bay 3.
‼ Violation of this rule may result in suspension or loss of cleanroom access ‼ Si and other Semiconductor and thin film substrates Si Wafers, other Semiconductor substrates and films can be found locally at: http://www.novawafers.com/index.html Label you name on your wafer boxes using the label maker in Bay 3
Tweezers (both Metal and PFA or Teflon): PFA tweezers are cumbersome and have very little gripping strength. It is recommended that they be avoided whenever possible. For most purposes, metal tweezers and a PFA/Teflon dipper, or holder, are preferable. If whole wafers are to be used, it is advisable to obtain “limited grip” metal tweezers. These instruments have a right-angle bend in the tips, so that only the edge of wafers can be gripped. This prevents accidentally destroying devices on the wafer. For small pieces of wafers, flat “duck-bill” tweezers are superior. The very sharp tweezers used for manipulating individual die are not a good choice for handling wafers. These tweezers will grip at only one point. The wafer will slip and rotate around this point, resulting in a scratched wafer, which will be susceptible to breaking. Teflon coating of tweezers may not protect the wafers, and does not make them suitable for immersion in acidic solutions. It is important to protect tweezers tips so that they do not develop burrs, which will scratch wafers, ultimately leading to wafer breakage. Examples of these may be found at: http://www.tedpella.com/tweezers-pelco_html/pelco-pro-wafer.htm
Label you name on your tweezers using the label maker in Bay 3.
Diamond-tipped scribe:
All groups whose work requires cleaving wafers should own one or more of these. Protect the tip from damage with a cap, so that the diamond tip will not be knocked off. In order to cleave wafers, make a very small scratch at the edge, then grip the wafer on either side of the scratch with two pair of tweezers. Bend the wafer along a cleavage plane so that the wafer will break cleanly. For (100) material, this means gripping either parallel, or perpendicular, to the flat. . Label you name on your scribe using the label maker in Bay 3.
Cleanroom Notebook: This is a plastic-bound, spiral notebook made of lint-free paper. Other types of notebook are not permitted in the Cleanroom. Label you name on your cleanroom notebook using the label maker in Bay 3. Wafer holder (PFA or Teflon): Examples of these may be found at: http://www.wafercare.com/Page.aspx?id=1024 These are, by far, the most effective means of handling individual wafers in wet-chemistry procedures. It is strongly advised that, at the minimum, each faculty member’s group have at least several of these available for Cleanroom work. Label you name on your cleanroom notebook using the label maker in Bay 3.
Beakers of a size appropriate to the wafers to be processed: Pyrex is suitable for solvent cleaning and for most acid etch procedures but not for HF use. Teflon or PFA is REQIURED for procedures using HF. For vessels that are going to be used for HF (Hydrofluoric 6:1 BOE, HNA,10:1 HF,50:1 HF) , HCL, Nitric ,Piranha Solution and Base processes you MUST label the Teflon ,PFA or Pyrex vessels with the name of acid or base being used . Dedicate this labeled beaker/vessel for the particular process. The purpose to provide a visual warning for staff and other users of the hazards currently present in the hood. Labeling your glassware/beakers will give yourself and others working in the Acids hoods a visual indicator of the hazards and dangers in front of him or her. This is avoid anyone from being exposed and to minimize any accidents that would be extremely serious and potentially FATAL. Label your group name and name of acid or base being used for that vessel on your Pyrex, glass, Teflon or PFA vessels using the label maker in Bay 3.
‼ Violation of this rule WILL result in suspension or loss of cleanroom access ‼
For DI water rinsing, Solvent and Developer use Rubbermaid vessels are acceptable. Examples may be found at: http://www.rubbermaidcommercial.com/rcp/products/searchresults.jsp?search_text=luch%20box&search=luch%20box&submitIt.x=0&submitIt.y=0&submitIt=submit
‼ Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products
‼ Violation of this rule WILL result in suspension or loss of cleanroom access ‼
Graduate Cylinders:
These should be of a size appropriate to the volumes to be measured. It would be inappropriate to use a 1 liter graduate to measure 10 ml, and it would be equally inappropriate to measure 1000 ml using a 50 ml graduate. Properly used, a graduate cylinder can measure volumes to within 1%. Beakers are rated to +/- 5%, but are usually much worse. Graduate cylinders are available in both Pyrex and in Heavy- Duty plastic (PFA) suitable for measuring HF. Label your name on your graduate cylinder using the label maker in Bay 3.
Pasteur Pipets: These can be either disposable plastic, or disposable borosilicate glass. They are useful for adjusting the level of liquids in graduate cylinders. The borosilicate glass type have a very long tip that is useful for adjusting the volume of liquids in graduate cylinders. Examples of these may be found at: https://us.vwr.com/store/product/4758225/falcon-disposable-transfer-pipets-corning http://www.kartersci.com/SearchResults.asp?Cat=80&Click=31314&gclid=CLCyjpWJ-84CFZOIaQodnFgKbw
Label your name on your Pasteur Pipets box using the label maker in Bay 3.
Plastic Box (to store all the materials): A plastic box appropriate to the volume of equipment and supplies to be held may be purchased at any “Big-Box” store or Walmart. It should be labeled with the owner’s name. It is reasonable to keep “group” equipment in a box with the group name, and to have a smaller box for individual equipment and materials. .Label your name on your Plastic Box storage box or the larger Group Box using the label maker in Bay 3. These storage boxes are used to store wafers, clean beakers, tweezers, photolithography mask etc. Absolutely NO CHEMICALS are to be stored in these boxes.
Absolutely NO CHEMICALS are to be stored in these boxes
‼ Violation of this rule may result in suspension or loss of cleanroom access ‼ 3.4 Secondary Container Labeling Rules: The secondary containers must be labeled with:
PI Name / Supervisor Name.
Chemical Names as it appears on the Safety Data Sheet (MSDS or SDS). No abbreviations, No molecular formulas
Hazards that this chemical presents as indicated on the Safety Data Sheet (MSDS or SDS) in words or pictograms . Examples of Chemical Hazards:
Ethyl Alcohol: Flammable, Irritant
Cyclohexane: Toxic, Flammable, Irritant
S1813 PHOTO RESIST: Irritant, Combustible
MF-319 DEVELOPER: Alkaline, Irritant
Ammonium Hydroxide: Corrosive, Irritant
Acetic Acid: Corrosive, Flammable
Sulfuric Acid: Corrosive, Very Toxic
Nitric Acid: Corrosive, Strong Oxidizer Examples of standardly approved pictgrams :
Expiration Date
Any secondary containers without correct labeling will be discarded. 3.5 Hot Plate Usage Rules: The following rules apply to the Cleanroom and Lab 207:
You must wear Personal Protective Equipment (PPE) when heating chemicals.
Use only rated hot plate compatible beakers: Pyrex, Kimax lab beakers.
Know where the Hot Plate power cord is plugged in to the wall or power strip. In an Emergency pull the power out cord out of socket to stop the heating.
Hot Plates used for Chemical Heating must be ATTENDED AT ALL TIMES.
You must monitor the temperature with a thermometer (non-mercury thermometers recommended), thermocouple probe, or pyrometer.
Acids, Bases and Acid Mixtures must be heated in the Acid Hood only.
Solvents must be heated in the Solvent Hood only.
You may NOT heat Acids or Acid Mixtures within 10 ºC (18 ºF) of the lowest MSDS flash point value, or within the lowest Mixture component MSDS flashpoint value.
You may NOT heat Solvents within 10 ºC (18 ºF) of the MSDS flash point.
Know the MSDS boiling points before heating.
Heating Acetone is NOT allowed.
Heating Polypropylene beakers is NOT allowed.
You must enter the required information in the HOT PLATE LOGBOOK prior to heating your solution.
Permission is required to heat HF containing solutions.
Permission is required to heat FLAMMABLE LIQUIDS
Allow your solutions to cool within 5 ºC of room temperature (19C˚-22C˚) before disposing.
For wafers left in the hood to cool down you must write a note on clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” )
3.6 Waste Chemical Disposal and Log Books Procedures:
The Waste Chemical disposal and Logbook Procedures are standardized for all wet processing Bays and Lab 207. The procedure is as follows.
Always wear all the Personal Protection Equipment when you are disposing the Acid, Base or any Hazardous Chemicals waste into their respective Chemical Waste bottles, and when transporting waste bottles within the Bay.
Personal protective equipment (PPE) is chemical resistant apron, acid gloves, protective sleeves and full face shields when working with any hazardous chemicals. Any additional safety equipment must be used if required in the MSDS of the particular chemical.
The correct method of donning PPE is as follows:
Put on an apron. The apron will have “FRONT” written on the front side. This side should face away from you. This is done so that, if someone spills a chemical on the front of an apron, the next person does not don the apron with chemical next to his body.
Obtain left and right gloves in an appropriate size from the cabinet on top of the Base hood. If there are no gloves in a size appropriate to your hand, ask a staff member for some.
Inspect the inside of the gloves for moisture. Do no use gloves that are wet inside. Dispose of them and request new gloves.
Test the gloves by first opening them wide, then folding over the open end so that air is trapped inside. Squeeze the glove so that a slight pressure is developed. Hold
the fingers side of the gloves near your face. If you feel air blowing out, there is a leak. Dispose of the gloves and request new gloves.
If the gloves are good, put them on.
Obtain a pair of sleeves from the Base hood cabinet. Assure that they are free from obvious contamination. The sleeves have a large opening, and a small opening. Put your gloved hand through the large opening, and pull them up to your elbow. The small end should be over the wrist portion of the glove. The glove should be inside the sleeve, not on the outside. This way, if chemicals splash on your sleeve they will not run down inside the glove.
Put on a face shield. The face shields can be adjusted to fit your head. Additionally, the tension on the visor can be adjusted so that it can be raised and lowered. If you have difficulty, seek assistance from a staff member.
Remove the equipment, when you are finished with it, in the opposite order. Dispose of any contaminated or defective equipment.
When transporting HAZARDOUS Waste Chemical Bottles, use the bottle carrier stored next to the fresh acid cabinet in Bay 1. This will prevent hazardous waste chemicals from spilling even if the bottle is dropped
Select the appropriate Chemical Waste bottle from the Logbook Index for the chemicals
that you used in your wet process and carefully retrieve the waste bottle from the storage cabinet.
Do not dispose any Chemical unless you are 100% sure of the correct Waste bottle.
No chemical is to be discarded in drains.
Any Chemical Waste bottles that do not have a contents Tag inform NRC staff
immediately to dispose and replace
Any Chemical waste bottle that is at or close to the “Fill Line” inform NRC staff
immediately to dispose replace.
Always use the polypropylene funnel while CAREFULLY pouring the Hazardous waste
into the waste bottle.
After you have disposed your Hazardous Chemical into the waste bottle, wipe the bottle
exterior with a wet (water) clean room wipe to remove any chemical drops.
Secure the Waste bottle cap and return the Hazardous Waste bottle to the appropriate
storage cabinet.
Rinse your acid gloves with water and set to dry, then return the acid gloves to the acid
glove storage cabinet.
Fill out the Chemical Waste Logbook after each use. Select the appropriate chemical
waste bottle from the Logbook Index and fill the logbook completely
The chemical waste logbook procedure are as follows:
4 Wet Processing Safety Procedures, Rules and Precautions
4.1 Acetic Acid Safety Precautions (CH3COOH also written as CH3CO2H or C2H4O2): Acetic acid is a liquid solvent and can be a hazardous chemical if not used in a safe and appropriate manner. This liquid is highly corrosive to the skin and eyes and, because of this, must be handled with extreme care. Acetic acid can also be damaging to the internal organs if ingested or in the case of vapor inhalation. Read the SDS carefully before using this Acid (liquid solvent).
The use of PPE (personal protective equipment) is required when handling this chemical.
The Buddy rule must be strictly followed.
Always process in the Solvent Hood.
Always Add Acid to Water, never add water to this Acid/Liquid Solvent. Always keep acetic acid away from sources of heat, sparks or flames
Materials to avoid Oxidizing agents, soluble carbonates and phosphates, Hydroxides, Metals, Peroxides, permanganates, e.g. potassium permanganate, Amines, Alcohols, Nitric acid
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of acid(s) being used . Dedicate this labeled beaker/vessel for this particular process as a visual warning to others.
Do not use this Chemical with Rubbermaid products
For wafers left in the hood hood to cool down or for a long running process you must write a note on clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” )
Any Acid/Solvent that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of this rule WILL result in suspension or loss of cleanroom access ‼
4.2 HCL Acid Safety Precautions :
Hydrochloric acid is a colorless to light yellow water-soluble liquid with a pungent, irritating odor. The acid itself is corrosive, and concentrated forms release acidic mists that are also dangerous. If the acid or mist come into contact with the skin, eyes, or internal organs, the damage can be irreversible or even fatal in severe cases. Read the SDS carefully before using this Acids.
The use of PPE (personal protective equipment) is required when handling this chemical.
The Buddy rule must be strictly followed.
Always process in the Acid Hood.
Always Add Acid to Water: Never add water to this Acid.
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of acid(s) being used. Dedicate this labeled beaker/vessel for this particular process as a visual warning to others
For wafers left in the hood to cool down or for a long running process you must write a on note clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” ).
Any Acid that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products.
‼ Violation of these rules WILL result in suspension or loss of cleanroom access ‼
4.3 HF Acid Safety Precautions : Hydrofluoric acid (HF) and Hydrofluoric containing acids such as BOE, 10:1 HF, 50:1 HF, HNA has a number of physical, chemical, and toxicological properties that make it especially hazardous to handle. Both anhydrous hydrofluoric acid and aqueous solutions are clear, colorless, and corrosive liquids. When exposed to air, anhydrous HF and concentrated solutions produce pungent fumes which are as dangerous if not more dangerous than liquid form. HF shares the corrosive properties common to mineral acids, but possesses the unique ability to cause deep tissue damage and SYSTEMIC TOXICITY. HF can cause more extensive DEEP TISSUE DESTRUCTION (including loss of limbs) or at a minimum, internal pain, than many common inorganic acids due to delayed awareness of exposure. Partly because HF is a relatively weak acid, it can easily penetrate the skin, bypassing typical physiological warning signs of acid exposure. It can distribute throughout your body. The fluorine ions bind very easily and tightly to calcium and magnesium ions to form insoluble salts. In the body, Ca and Mg ions mediate a variety of physiological processes, such as muscle movement. Calcium is also a chief component in bone. The result can be several severe forms of damage to your body, including DEATH Severity and timing of effects depends on the concentration, duration of exposure, and penetrability of the exposed tissue. Symptoms may start immediately or pain may be delayed for up to 24 hours. Contact with aqueous solutions with concentration < 5% can cause extreme pain and tissue loss. HF exposure of 100 ml can be FATAL Concentrated HF is considered to be extremely toxic—a “4” on the health hazard scale of 0-4. This is because it is a source of free fluorine ions. Any solution containing a source of free fluorine ions is also hazardous. A concentrated Ammonium Fluoride solution is “very” toxic (3 on the health hazard scale) and becomes “extremely” toxic when made more acidic, such as in Buffered Oxide Etch (BOE) mixtures. Consequently, BOE presents the same level of toxic hazard to your body as 49% HF even though 20:1 BOE has much less HF in it (about 7% of volume) than “pure” HF (about 49%of volume). It is equally hazardous because it also has about 38% NH4F, and is acidic. Read the SDS carefully before using these HF containing Acids.
The use of PPE (personal protective equipment) is required when handling this chemical.
The Buddy rule must be strictly followed.
Always process in the Acid Hood.
Always Add Acid to Water: Never add water to this Acid.
Only use PFE or Teflon tweezers, graduated cylinders, and beakers/vessels ONLY.
Know the location of the Calcium Gluconate gel tube is located. The Calcium Gluconate tube is stored at the acid hoods in Bay 1, Bay 4, Lab 207 and Teaching Fab yellow room.
The PFE or Teflon vessel used for this process MUST labeled with the name of acid(s) being used . Dedicate this labeled beaker/vessel for this particular process as a visual warning to others.
Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products.
For wafers left in the hood to cool down or for a long running process you must write a on note clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” ) .
Any Acid that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of these rules WILL result in suspension or loss of cleanroom access
4.4 Piranha Solution Safety Precautions "Piranha" is used to remove organic residues from substrates. Two different solutions are used. The most common is the Acid Piranha: a 3:1 mixture of concentrated sulfuric acid (H2SO4) with hydrogen peroxide(H2O2) Also used is the base piranha: a 3:1 mixture of ammonium hydroxide (NH4OH) with hydrogen peroxide (H2O2) Both are equally dangerous when hot, although the reaction in the Acid Piranha is exothermic self-starting whereas the base piranha must be heated to 60 degrees before the reaction takes off. There are many things which will cause the reaction to accelerate out of control. "Out of control" can mean anything from the piranha foaming out of its bin and on the deck, to an explosion with a huge shock wave including glove and acid-gown shredding glass sharps. Piranhas burn organic compounds. If you provide sufficient fuel for them (i.e. photoresist, IPA), they will generate enormous quantities of heat and gas. Whenever handling Piranha, ONLY use glass containers (Pyrex). Piranha can melt and even attack plastic containers. Containers used during the experiment must be very clearly labeled
Piranha Solution Safety Precaution (cont.): and a warning sign, visible by any user working under the flow hood, must be posted at all time to indicate that the solutions contains Piranha mixture. Mix the solution in the flow hood with the sash between you and the solution. Wear the full protection. When preparing the piranha solution, always add the Peroxide to the Acid very slowly. The H2O2 is added immediately before the etching process because it immediately produces an exothermic reaction with gas (pressure) release. If the H2O2 concentration is at 50% or greater, an explosion could occur. Piranha solution is very energetic and potentially explosive. It is very likely to become hot, more than 100 degrees C. Handle with care. Picking up a beaker that is this hot will be very painful, might melt your gloves, and may cause you to spill it! Substrates should be rinsed and dried before placing them in a piranha bath.
Piranhas are used to remove photoresist and acetone residue, not the compounds themselves Leave the hot piranha solution in an open container until cool, minimum of 90 minutes Never store hot piranha solutions. Piranha stored in a closed container will likely explode. Adding any acids or bases to piranha or spraying it with water will accelerate the reaction. Mixing hot piranha with organic compounds may cause an explosion. This includes acetone, photoresist, isopropyl alcohol, and nylon. Do not transport chemicals around the room in beakers. Never pour chemicals back into the original container. Read the SDS carefully before mixing this solution.
The use of PPE (personal protective equipment) is required when handling this chemical
The Buddy rule must be strictly followed.
Always process in the Acid Hood.
Use Only Pyrex beakers and vessels due to the exothermic heating
Use ONLY 3:1 or 5:1 Piranha Solution (Sulfuric Acid : Hydrogen Peroxide)
Do NOT try a 2:1 or 1:1 Piranha Solution an explosion could occur.
Piranha Solution Safety Precaution (cont.):
Always Slowly Add Hydrogen Peroxide (H2O2) to the Sulfuric Acid (H2SO4).
The exothermic reaction will increase the temperature of Piranha to 100C˚
Chemicals and Material to avoid to: Acetone, IPA, Methanol (and their squirt bottles), thick photo resist or other organics such as clean room paper.
Let the solution cool in open container for a MINIMUM 90 MINUTES before disposing.
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of acid(s) being used . Dedicate this labeled beaker/vessel for this particular process as a visual warning to others.
Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products.
For wafers left in the hood to cool down or for a long running process you must write a on note clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” ).
Any Acid that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of this rule WILL result in suspension or loss of cleanroom access ‼
3:1 or 5:1 Piranha Solution (Sulfuric Acid : Hydrogen Peroxide) cool down chart
4.5 Nitric Acid Safety Precautions (HNO3) Nitric Acid synonyms are Aqua Cortis, white fuming nitric acid (WFNA), red fuming nitric acid (RFNA) and hydrogen nitrate .The appearance can be colorless, yellow, or red fuming liquid with a suffocating, acrid odor. Nitric acid vapor or mist is an irritant of the eyes, mucous membranes, and skin. When nitric acid is exposed to air or comes in contact with organic matter, it decomposes to yield a mixture of toxic oxides of nitrogen, including nitric oxide and nitrogen dioxide. Exposure to high concentrations of nitric acid vapor or mist causes pneumonitis and pulmonary edema which may be fatal; onset of symptoms may be delayed for 4 to 30 hours. In contact with the eyes, the liquid produces severe burns which may result in permanent damage and visual impairment. On the skin, the liquid or concentrated vapor produces immediate, severe and penetrating burns; concentrated solutions cause deep ulcers and stain the skin a bright yellow or yellowish brown color. The vapor and mist may erode the ex posed teeth. Ingestion of the liquid will cause immediate pain and burns of the mouth, esophagus, and gastrointestinal tract. Nitric Acid Safety Precautions (HNO3 cont.) Nitric acid is Incompatible with many organic materials, combustible materials, metallic powders, hydrogen sulfide, carbides, alcohols; reacts with water to produce heat; corrosive to metals. May generate hydrogen gas on contact with certain metals (e.g., aluminum). Not combustible but enhances combustion of other substances. May give off poisonous oxides of nitrogen and acid fumes when heated in fires. The substance decomposes on warming producing nitrogen oxides. The substance is a strong oxidant and reacts violently with combustible and reducing materials (e.g., turpentine, charcoal, alcohol). The substance is a strong acid: it reacts violently with bases. Reacts very violently with organic chemicals (e.g., acetone, acetic acid, acetic anhydride), causing fire and explosion hazard. Attacks some plastics. Reacts explosively with metallic powders, carbides, cyanides, sulfides, alkalis, and turpentine. Read the SDS carefully before using this Acid.
The use of PPE (personal protective equipment) is required when handling this chemical.
The Buddy rule must be strictly followed.
Always process in the Acid Hood.
Always Add Acid to Water: Never add water to this Acid.
Use ONLY Pyrex or glass beaker or vessels
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of acid(s) being used. Dedicate this labeled beaker/vessel for this particular process as a visual warning to others.
Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products.
Nitric Acid Safety Precautions (HNO3 cont.)
For wafers left in the hood to cool down or for a long running process you must write a note clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” ).
Any Acid that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of these rules WILL result in suspension or loss of cleanroom access ‼
4.6 Phosphoric Acid Safety Precautions (H3PO4):
Phosphoric acid is a clear colorless liquid or transparent crystalline solid. The pure solid melts at 42.35°C and has a density of 1.834 g / cm3. Liquid is an 85% aqueous solution. Corrosive to metals and tissue. Phosphoric acid mist is an irritant to the eyes, upper respiratory tract, and skin. A 75% solution will cause severe skin burns. The substance is a medium strong acid. Reacts violently with bases. The substance violently polymerizes under the influence of azo compounds and epoxides. On combustion, forms toxic fumes of phosphorus oxides. Decomposes on contact with alcohols, aldehydes, cyanides, ketones, phenols, esters, sulfides or halogenated organics. This produces toxic fumes. Attacks many metals. This produces flammable/explosive gases. Read the SDS carefully before using this Acid.
The use of PPE (personal protective equipment) is required when handling this chemical.
The Buddy rule must be strictly followed.
Always process in the Acid Hood.
Always Add Acid to Water: Never add water to this Acid.
Use ONLY Pyrex or glass beaker or vessels
For heating Phosphoric Acid you MUST follow all the Hot Plate Rules.
Phosphoric Acid Safety Precautions (H3PO4 cont)
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of acid(s) being used. Dedicate this labeled beaker/vessel for this particular process as a visual warning to others.
Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products.
For wafers left in the hood to cool down or for a long running process you must write a note clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” ).
Any Acid that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of these rules WILL result in suspension or loss of cleanroom access ‼
4.7 Sulfuric Acid Safety Precautions (H2SO4) :
Sulfuric acid is very exothermic (when dissolving in water), several safety precautions are taken with the handling, storage, dilution and transportation of sulfuric acid. Water placed in sulfuric acid is extremely dangerous, as the water completely ionizes small amounts of water in concentrated amounts of sulfuric acid will boil and form an acidic mist which is highly acidic and damaging if inhaled. In order to prevent this dilution of sulfuric acid happens with small amounts of sulfuric acid added to large quantities of water or slowly over a period of time and allowed to cool. In contrast, concentrated solutions of other acids already contain enough water so they are mostly ionized meaning less heat is released. Sulfuric acid is also a strong acid which can corrode metals and other materials and damage both the structure and function of living organisms. It acts as a strong oxidizing agent, which allows it to attack materials which are normally resistant to attack from hydrogen ions of simpler acids. It is also a strong dehydrating agent, easily destroying a wide range of organic materials (e.g. living tissue) Concentrated sulfuric acid is extremely corrosive and can cause serious burns when not handled properly. This chemical is unique because it not only causes chemical
burns, but also secondary thermal burns as a result of dehydration. This dangerous chemical is capable of corroding skin, paper, metals, and even stone in some cases. If sulfuric acid makes direct contact with the eyes, it can cause permanent blindness. If ingested, this chemical may cause internal burns, irreversible organ damage, and possibly death. Exposure to sulfuric acid vapors at high concentrations leads to severe eye and respiratory tract irritation and tissue damage. Consistent exposure to sulfuric acid vapors, even at low concentrations, can cause a person’s teeth to erode. Read the SDS carefully before using this Acid.
Sulfuric Acid Safety Precautions (H2SO4 cont):
The use of PPE (personal protective equipment) is required when handling this chemical.
The Buddy rule must be strictly followed.
Always process in the Acid Hood.
Always Add Acid slowly to Water: Never add water to this Acid.
Use ONLY Pyrex or glass beaker or vessels
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of acid(s) being used. Dedicate this labeled beaker/vessel for this particular process as a visual warning to others .
Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products.
For wafers left in the hood to cool down or for a long running process you must write a note clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” ).
Any Acid that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of these rules WILL result in suspension or loss of cleanroom access ‼
4.8 Bases ( Strong Bases) Safety Precautions : Solutions of hydroxides (OH-) in water form STRONG BASES with a high pH. They are highly corrosive to the skin and eyes. Strong bases are insidious in that even a concentrated solution often causes no pain until the corrosive damage is severe. Concentrated hydroxide solutions evolve heat when mixed with water or acids, which may cause boiling and splattering. Alkali Metal Hydroxides The hydroxides of alkali metals (Li, Na, and K) and calcium in their pure form are water soluble, hygroscopic solids. Dissolving solid hydroxides in water is a highly exothermic process that generates excessive heat. Sodium and potassium hydroxides are STRONG BASES and are extremely destructive to the skin and eyes. Concentrated hydroxide solutions dissolve aluminum, resulting in the evolution of flammable hydrogen gas. Hydroxides slowly attack glass forming soluble silicates. This reaction causes glass joints and stopcocks to “freeze.” Hydroxide solutions rapidly react with carbon dioxide in the air, forming bicarbonates (HCO3-) for alkali hydroxides,
or carbonates (CO32-) for calcium hydroxide, respectively, and decreasing the pH of the solution when stored open to air.
When preparing solutions from solid hydroxides, the container has to be cooled with ice or under cold water. The container should be swirled constantly until the pellets are dissolved to prevent them from getting stuck to the bottom where they can generate excessive heat, possibly leading to container rupture. Always dilute base solutions by adding base to water and not water to base. Adding water to concentrated bases may cause violent boiling of the solution and splashing. Alkali metals react violently with carbon dioxide and carbon tetrachloride and also are incompatible with acids, organics, halogenated hydrocarbons, and plastic (e.g. Teflon and polyvinyl chloride). Ammonium Hydroxide (NH4OH) Ammonium hydroxide is a solution of ammonia (NH3) in water. Only a small fraction actually exits as ionic NH4+ and OH-. Concentrated ammonium hydroxide contains approximately 29% ammonia and has a pungent odor. With increasing temperature, more ammonia evaporates. Ammonia gas is flammable and has a narrow explosive range in air of 15–25%. The vapors of aqueous ammonia solutions are irritating and toxic. Ammonium hydroxide should be handled in a chemical fume hood to avoid breathing ammonia gas.Always dilute base solutions by adding base to water and
not water to base. Adding water to concentrated bases may cause violent boiling of the solution and splashing. Tetramethylammonium hydroxide (TMAH) Tetramethylammonium hydroxide pentahydrate is a solid that is highly toxic if ingested and toxic by skin contact. An aqueous TMAH solution has a high acute oral and dermal toxicity. Skin contact of a solution of >1% TMAH to a small area of the body surface or ingestion can be FATAL. Always dilute base solutions by adding base to water and not water to base. Adding water to concentrated bases may cause violent boiling of the solution and splashing. Bases (Strong Bases) Safety Precautions (cont...)
Read the SDS carefully before using these Bases.
The use of PPE (personal protective equipment) is required when handling this chemical.
The Buddy rule must be strictly followed.
Always process in the Base Hood.
Use ONLY Pyrex or glass beaker or vessels.
Always Add Base slowly to Water: Never add water to this Base.
This is an Exothermic Process that generates excessive heat.
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of Base(s) being used. Dedicate this labeled beaker/vessel for this particular process as a visual warning to others.
Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products.
For wafers left in the hood to cool down or for a long running process you must write a note clean room logbook paper with Date, Time, Group name, your name, Chemical Name (mixture name), good contact cell number and a description of the status of the chemical ( i.e. “cooling down” ).
Any Base that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of these rules WILL result in suspension or loss of cleanroom access ‼
4.9 Photoresist Developer Safety Precautions : Most of the alkali waste in NRC is either used photoresist developer. Most photoresist developers are volatile solvents. It is not a skin irritant and will not burn your skin. It is flammable, but not nearly as flammable as acetone. It is volatile, and prolonged exposure to fumes my cause dizziness All are to be stored in the cabinet below the develop hood. Photoresist developers are to be stored in containers marked “Photoresist Developer Waste.” Conduct all photo developing procedures in Photo Develop fume hood. Dispose of chemicals as described in section 3.6 Waste Chemical Disposal and Log Books Procedures. Personal Protective Equipment is Nitrile gloves, Acid gloves, Full face shield and safety goggles eye protection required for all procedures. Read the SDS carefully before using these Developers.
Nitrile gloves and Acid gloves, Full face shield and safety goggles eye protection required for all procedures.
The Buddy rule must be strictly followed.
Always process in the Photo Developing Hood.
Use ONLY Pyrex or glass beaker or vessels. Rubbermaid products may be OK to use, Ask staff if for your particular developer, some developers should be used only in glass vessels.
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of Base(s) being used. Dedicate this labeled beaker/vessel for this particular process as a visual warning to others.
For wafers and developer left in the develop hood for long running process you must write a note clean room logbook paper with Date, Time, Group name, your name, Chemical Name, good contact cell number and a description of the status of the chemical (i.e. “developing”).
Any Developer that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of these rules WILL result in suspension or loss of cleanroom access ‼
4.10 Solvent Safety Precautions : Liquid Organic solvents are often the most hazardous chemicals in the work place. https://www.organicdivision.org/orig/organic_solvents.html https://www.cdc.gov/niosh/topics/organsolv/
Polar Protic Solvents : Water(nonflammable solvent) ,Methanol, Ethanol, Isopropanol, Tert-butanol and Acetic Acid
Polar Aprotic Solvents: Acetone, Dimethylsulfoxide (DMSO), N,N-Dimethylformamide (DMF)
Ethers :Ether , Tetrahydrofuran (THF)
Chlorinated Solvents :Dichloromethane, Chloroform
Hydrocarbon Solvents
Amine Solvents: Triethylamine; Pyridine
Miscellaneous Solvents :Ethyl Acetate (EtOAc), Acetonitrile
Solvents such as Acetone, Methanol, IPA alcohols, Ethers and toluene, for example, are highly volatile and FLAMMABLE. Most organic solvents have a lower density than water, which means they are lighter and will form a separate layer on top of water. An important exception is halogenated solvents like dichchlormethane or chloroform will sink to the bottom of a container This is important to remember when partitioning compounds between solvents and water in a separator funnel during chemical syntheses. Per-chlorinated solvents, such as carbon tetrachloride (CCl4), are non-flammable. But most hydrogen-containing chlorinated solvents, such as chloroform, are flammable. When exposed to heat or flame, chlorinated solvents may produce carbon monoxide, chlorine, phosgene, or other highly toxic gases. Read the SDS carefully before using any Solvents. Always use VOLATILE and FLAMMABLE SOLVENTS in the Solvent fume hoods located in Bay 1 and Teaching Fab yellow room. Never use ether or other highly flammable solvents in a room with open flames or other ignition sources present, including non-intrinsically safe fixtures. Solvent Exposure Hazards Health hazards associated with solvents include exposure by the following routes: -Inhalation of a solvent may cause
bronchial irritation, dizziness, central nervous system depression, nausea, headache, coma, or death. Prolonged exposure to excessive concentrations of solvent vapors may cause liver or kidney damage. Skin contact with solvents (Methanol, IPA, Acetone) may lead to defatting, drying, and skin irritation. Always check your nitrile gloves are good condition with no holes or tears while working with solvents. Ingestion of a solvent may cause severe toxicological effects. Seek medical attention immediately. The odor threshold for the following chemicals exceeds acceptable exposure limits. Therefore, if you can smell it, you may be overexpose; increase ventilation immediately! Solvent Safety Precautions (cont...) Examples of such solvents are: -Chloroform -Benzene 12 -Carbon tetrachloride -Methylene chloride NOTE: Do not depend on your sense of smell alone to know when hazardous vapors are present. The odor of some chemicals is so strong that they can be detected at levels far below hazardous concentrations (e.g., xylene). Some solvents (e.g., benzene) are known or suspected carcinogens. Reducing Solvent exposure to decrease the effects of solvent exposure, substitute hazardous solvents with less toxic or hazardous solvents whenever possible. A flammable solvent is an organic liquid whose vapor can form an ignitable mixture with air. ALL flammable solvents evaporate readily. ALL the elements of the fire triangle are present when an ignition source is added. Sources of ignition include, but are not limited to, open flames, heaters, electrical equipment, and static electricity. ALL equipment that uses electricity or has moving parts should be considered a possible ignition source.
One measure of the flammability of a solvent is determined by its flash point. The flash point is the lowest temperature at which enough of the solvent can evaporate to form a mixture of vapor and air which will ignite if an ignition source is introduced. Many solvents have flash points below room temperature and are considered to be extremely flammable. For example, the flash point of IPA is 53° F. If a beaker of IPA is allowed to sit uncovered in the middle of a room, enough vapors would escape to form an ignitable mixture. Since cleanroom temperature is about 62° F or above it would only take one spark to cause a fire or explosion. When using volatile and flammable solvents always use in the solvent fume hood and for long processes cover the vessel with aluminum foil. Read the SDS carefully before using any Solvents.
Solvent disposal: Waste solvents are to be disposed of in the solvent waste bottles, which are stored in the cabinet beneath the Solvent Hoods in Bay 1 and Teaching Fab. These are labeled “Non Halogenated Solvent Waste” and “Halogenated Solvent Waste.” All acetone, methyl alcohol, isopropyl alcohol, ethyl alcohol, hexane, and cyclohexane are to be disposed of in the “Non Halogenated Solvent Waste” bottle. Tetrachloroethylene and trichloroethylene are disposed of in the “Halogenated Solvent Waste bottle”. If you are unsure which bottle to use for any solvent, consult cleanroom
Solvent Safety Precautions (cont...) staff before proceeding. Do not create separate solvent waste bottles for “acetone,” “methyl alcohol,” etc. There is no need to segregate the various non-halogenated waste solvents, and there is no room to store an sufficient waste bottles. If any of the solvent waste bottle are near or at the waste bottle fill line inform staff or GRA to replace with a new waste bottle. Place the appropriate solvent waste bottle in the solvent hood, remove the cap and insert the funnel that is stored in the hood. Slowly pour the solvent into the bottle, making sure that your face is away from the bottle. Remove the funnel and put the cap on the bottle. Tighten the cap until it is snug, and return it to the bottom cabinet. If the solvent fills the bottle to above the fill line then the bottle is full and must be replaced. Do not leave waste solvents in the plastic container that holds the waste funnel. This allows the solvents to evaporate and be discharged with the exhaust air. Fill out the Chemical Waste Logbook after each use per section 3.6
The following Rules and Precautions and are listed for your own protection and the protection of those in your work area. By adhering to these safety rules, you will greatly reduce the number of accidents protecting your self and other NRC members. Read the SDS carefully before using any Solvents.
You must wear, full face shield and your safety glasses, nitrile glove under the acid gloves and acid apron when using solvents
Use only solvent compatible beakers: Pyrex, Kimax, glass lab beakers. Rubbermaid products maybe be OK, and staff to check for the solvent you are using.
Continually check the conditions of your nitrile and acid gloves and replace them immediately if they are torn and have holes to prevent solvents coming in contact with
your skin.
Do not use the same pair of gloves to handle acid and solvents, cross contamination could cause a reaction and a severe burn.
Solvents must be used in the exhausted Solvent Hood only. These hood prevent the
buildup of vapors.
Pour Solvents only in the Solvent Hood and solvent sink (TFAB Yellow) .
Never mix Acids or Bases with Solvents. Acids, Base reacts with solvents to chemically produce gases and a great amount of heat. THE MIXTURE IS EXPLOSIVE.
Never allow Solvent fumes to come into contact with ignition sources. Most Solvents are extremely flammable and explosive
Know the Solvent SDS boiling and flash points before heating. Solvent Safety Precautions (cont...)
You may NOT heat Solvents within 10 ºC (18 ºF) of the MSDS flash point.
Heating Acetone is NOT allowed.
Allow your solutions to cool within 5 ºC of room temperature (19C˚-22C˚) before disposing.
Wash your gloves after use to remove any solvent residues.
The Pyrex or glass beaker or vessel used for this process MUST labeled with the name of Base(s) being used. Dedicate this labeled beaker/vessel for this particular process as a visual warning to others.
For wafers and develop left in the develop hood for long running process you must write a note clean room logbook paper with Date, Time, Group name, your name, Chemical Name, good contact cell number and a description of the status of the chemical ( i.e. “ developing” ).
Any Solvent that has failed to be disposed properly and has been found in the hood (forgotten by the user) the user processing /responsible for that chemical will be disciplined up to suspension and loss of cleanroom access.
‼ Violation of these rules WILL result in suspension or loss of cleanroom access ‼
Note : There is expiration dates and self-life.
Most expiration are 1 year, after the year there no guarantee that the chemical components have not inadvertently affected by vapor loss through the cap or bottle itself.
For shelf life is much longer if the cap is well sealed or tight (even better that it’s tapped).
Last there the history of the bottle itself, users may not have tightened the cap from before the expiration dates. If the bottle and cap looks fine and the expiration date is not exceeded by 1-3 years it could be good for processing or cleaning.
5 Chemical Spill Cleanup Procedures 5.1 Large UNKNOWN hazardous material Spill Response Procedures:
For large unknown hazardous chemical spill follow UTA EH%S office procedures.
If there has been a spill or release of an unknown hazardous material, follow these guidelines:
Pull the nearest fire alarm pull station. Evacuate the building. Contact the UT Arlington Police Department (UTAPD) at 817-272-3003.
If there has been a spill or release of known hazardous material, follow these guidelines:
Under one gallon: Unless you have been trained to do so, do not attempt to clean up the spill. Refer to the chemical’s Safety Data Sheet (SDS) for spill clean-up instructions. Notify Environmental Health & Safety of the spill at 817-272-2185. After business hours contact UTAPD at 817-272-3003.
Over one gallon:
Pull the nearest fire alarm pull station. Evacuate the building. Contact UTAPD at 817-272-3003.
For more instructions please see the Laboratory Safety Manual (Chemical Hygiene Plan).
5.2 Small Known hazardous material Spill Procedure :
Notify NCR Staff immediately of the spill. Clean up of chemical spills shall be performed by NRC Staff, or under NRC staff supervision during normal working hours Monday to Friday 0700am to 6.00pm. Personnel working outside of normal working hours are expected to have sufficient experience to perform known small spill cleanup safely without supervision. The Spill-X spill cleanup kits are located by the Base cabinet in Bay 1, Bay 4, Lab 207 and in the Teaching FAB Yellow room.
Chemical spills will present a variety of hazards. For example corrosives such as acids and bases can cause severe burns on contact with your skin and eyes, and the presence of fumes can be damaging to the respiratory system. Also many organic solvents are flammable and release vapors which are irritating to the eyes and respiratory system.
Small Chemical Spill Clean-up Procedures :
Safety First: Evacuate the area of all unnecessary personnel and isolate the spill area.
Eliminate any ignition sources until the area is determined to be free from explosion or fire hazards
Notify NRC staff via cell or office phone numbers and email immediately per section 1.3.2
Wear adequate protection, full PPE will be suitable for the hazard to prevent direct contact with the spilled substance and vapors. The eye and hand protection is provided with the Spill-X kit. If necessary use a staff respirator.
Identify the spilled chemical as an Acid, Caustic, Solvent, formaldehyde or other chemical. Knowledge of particular chemicals hazardous characteristics can be obtained from the manufactures labeling, the MSDS, the secondary container label. These characteristics and MSDS information are critical in selecting the correct spill control neutralizers, absorbers and any additional personal protection measured needed such as a respirator. In the case of an small unknown chemical ph paper is available in Chase 1 tan cabinet and Lab 207.
Select the appropriate Spill-X treatment agent that is specially formulated for the class and size of the chemical spill. Each container of spill control agents (acids neutralizer, caustic neutralizer, solvent absorber, formaldehyde polymerizer) will treat < 2 pints of spilled chemical. The agents are granular based which speeds up the spill cleanup and limits worker exposure. If you need more Spill-X treatment agent call staff immediately
Spill-X-A Acid-Neutralizing Adsorbent neutralizes and solidifies most mineral and organic acids for safe and easy cleanup, including sulfuric, hydrochloric, nitric and hydrofluoric
Spill-X-C Caustic-Neutralizing Adsorbent neutralizes and solidifies many caustics for safe and easy cleanup, including sodium hydroxide (50%) and ammonium hydroxide (29%)
Spill-X-S Solvent Adsorbent adsorbs spills of many common hydrocarbon solvents, reagents
and fuels; solidified liquid is easier to clean up
Encircle the spilled chemical with the agent and then cover the agent evenly over the spill. Avoid splashing the chemical as you apply the agent.
Mix the agent carefully with the scraper provided to achieve the most complete reaction. If the spill was corrosive any neutralization reaction will subside in a few minutes and leave a paste–like residue. Complete solidification may not occur.
After the treatment reaction cools use the scraper and pan to pick up residue and place in a labeled bag.
Rinse and decontaminate the utensils, scraper and pan.
Decontaminate the affected area with DI water, vacuum to remove any residual particles.
Place the collected material in the heavy-duty zip-lock bags provided with the spill kit. Write the contents (e.g., Sulfuric acid, hydrogen peroxide, etc.) on the bag label and set the bag in the Chase for disposal by EH&S personnel.
5.3 Mercury Spill Cleanup and Disposal :
Mercury is liquid metal that vaporizes at temperatures as low as 10°F/-12°C. Mercury vapor is colorless, odorless, and may be toxic when inhaled. Most health effects result from chronic exposure. Symptoms of chronic exposure include fatigue, anorexia, weight loss, inflammation of gums, and tremors. The symptoms of acute overexposure are bronchitis, cough, chest pain, excessive salivation, and a metallic taste. Short-term exposures to low-level mercury vapors present little hazard.
A large mercury spill is > 25 mL, such as a broken manometer. For a large spill immediately call EH&S at 817-272-2185, or the University Police at 817-272-3003. Prevent people from walking through the spill area. Notify others to leave the immediate area. Close all doors to the room and wait outside the area for EH&S responders.
A small spill of mercury, such as a broken thermometer, can be cleaned up immediately by laboratory personnel. Mercury Spill Clean-Up :
If your lab work requires you to work with mercury you should obtain a mercury spill kit containing supplies for a mercury cleanup. Mercury spill kits are commercially available and convenient. Refer to Safe Operating Procedure for Laboratory Chemical Spills. At a minimum, you should wear a lab coat, mercury compatible gloves (nitrile gloves won't protect you from the hazards of Mercury- see glove guide below), and disposable shoe covers during cleanup of mercury spills to prevent skin absorption or contamination of clothing.
When possible clean up all mercury spills with a specially designed high efficiency particulate air (HEPA)-filtered vacuum with a charcoal filter. EH&S will respond with this equipment when necessary.
Under no circumstances should you sweep mercury with a broom or vacuum with an ordinary vacuum cleaner. These procedures will disperse mercury vapors and droplets quickly into the air and spread the contamination.
Clean up very small amounts of mercury using an index card or rubber squeegee to form a larger bead that you can vacuum with a HEPA device or amalgamate.
You can also collect beads of mercury with a disposable pipette, a water-trapped vacuum line attached to a disposable pipette, or a hand-operated vacuum pump.
You can use mercury-absorbing powders, if available, to amalgamate mercury in non- accessible locations.
Place mercury waste and all materials used in spill cleanup in a sealed bottle or in a double layer of plastic bags. Label for disposal by EH&S through the hazardous waste program.
After you have collected all visible mercury, wash the area with a detergent solution, rinse, and allow drying before use.
In areas that you cannot completely clean of mercury, you can apply a sulfur slurry to oxidize the mercury and reduce the possibility for airborne vapors. Vacuum or wet-clean excess sulfur powder during final clean-up after it has had time to react with the mercury.
Carpets heavily contaminated during a mercury spill may have to be removed if EH&S monitoring of mercury vapor levels after vacuum cleaning determines this need.
Mercury Disposal: All mercury and mercury-containing wastes must be packaged, labeled and disposed via the EH&S hazardous waste program and according to the University’s Guidelines
for Disposal of Hazardous Waste. DO NOT MIX MERCURY COMPUNDS WITH OTHER SOLVENT WASTE.
6 Miscellaneous Safety Topics 6.1 Broken Glass Disposal :
Inspect all Pyrex and glass beakers, flasks, graduated cylinders, stirrers, and any glass product before use. Discard any large broken, cracked, or chipped glassware. If you break a piece of glass the affected area must also be vacuumed and wipe with cleanroom paper and IPA to remove the particles to maintain low particle counts inside the cleanroom. Place non-contaminated broken large size glassware into the dedicated broken glass disposal box located in Clean Storage These containers and boxes provided by Custodial Services or Environmental Health and Safety Office (EH&S) and disposed of by Custodial Services. For small pieces of broken glass dispose in the small plastic broken galls boxes located in Bay 1, Bay 3 and Teaching Fab yellow room ONLY. No broken glassware are to be thrown away in the regular paper trash containers.
Never overfill the broken glass containers. Once the large box or smaller container is full, cover it using the container’s lid, seal it with tape, and leave it outside NRC clean storage room for Custodial Services to pick up with a note indicating that it is trash.
6.2 Broken Wafer Disposal : If you break a wafer the affected area must also be vacuumed and wipe with cleanroom paper and IPA to remove the particles to maintain low particle counts inside the cleanroom. Broken wafers are to be disposed into the dedicated Broken Wafer Box located in Bay 3 ,TFAB andTeaching Fab yellow room. The broken wafer are disposed separately in Si or GaAs(III-V material) boxes. No broken wafers are to be thrown away in the regular paper trash containers.
TFAB Si Wafers pieces Bay 3 Si Wafer pieces Bay3 GaAs (III-V wafer pieces)
6.3 Compressed Gas Cylinder Safety and Storage: Compressed gas cylinders can pose significant safety hazards. A broken valve would allow high-pressure gas to launch the cylinder with devastating force. Improperly handled cylinders containing toxic or pyrophoric gases can injure or kill personnel. Even inert gases can displace sufficient air to cause asphyxiation.
Only personnel authorized by the NRC Management are allowed to change, replace, or otherwise handle compressed gas bottles. There are no exceptions.
User are not allowed to adjust the compressed gas bottle pressure regulators. There are no exceptions.
Toxic gas bottles may only be stored and used inside designated toxic gas cabinets appropriate for them. Toxic gas monitors will be employed where necessary for safety. Only authorized personnel may handle these systems. There are no exceptions.
All full sized compressed gas bottles are to be stored within the service chases. Bottles may only be moved with the protective cap installed over the valve. A cylinder cart is stored in the Gas Room and Clean Storage; this must be used whenever cylinders are moved. Cylinders must be properly anchored. Some user equipment may require the use of small gas bottles within the machinery – these will be handled on a case-by-case manner and need NRC management final approval for any installation or modifications.
6.4 Cryogenic: Safety, Handling and usage Rules.
Only trained NRC staff members and trained GRA’s are allowed to work with LN2 supply in the cleanroom.
All personnel working with LN2 supply must wear appropriate PPE for the extremely cold temperature – 320F˚
LN 2 should only be handled in approved containers and not transport in uncovered containers
Avoid breathing LN2 vapors filling and while carrying and transporting LN2 containers.
Always keep the LN2 container away from your body and face.
Do not leave open containers unattended.
Any use of the LN2 supply by NRC research members require NRC Mangers approval.
Any modification or upgrades to LN2 or Liquid He tanks, plumbing, apparatus or set-up in a private lab within the NRC building requires NRC manger approval.
6.5 Squeeze Bottle Safety : Squeeze bottles are commonly used in Bay 1, Bay 4, Lab 207 and Teaching Fab yellow room. They provide a quick and easy source of commonly used solvents such as Acetone, Isopropyl Alcohol, Methanol, and Ethanol. These are all flammable solvents and care is needed to prevent fires or dangerous chemical reactions.The hazards are fire from contact with ignition sources and chemical reaction due to mixing of incompatible materials. The following precautions must be followed when using and storing squeeze bottles:
Squeeze bottles must be clearly identified for contents. At a minimum, they must have the
chemical name indicated. It is also recommended that they have a hazard warning indicated
such as “flammable” or a hazard symbol. When using generic squeeze bottles, the chemical
identity must be clearly indicated in permanent ink or label. Do not use abbreviations or
chemical formulas.
Squeeze bottles that are leaking, damaged, or not clearly identified should not be used. Report
the problem to NRC staff members to replace the squeeze bottle.
Squeeze bottles made of Low Density Polyethylene (LDPE) are intended for short term
dispensing (not long-term storage) and will degrade over time depending on the solvent used.
Use only with solvents compatible with LDPE.
Do not overfill squeeze bottles. Leave an inch or more of headspace from the cap to prevent
spillage or drips.
Use of “safety vented” squeeze bottles is recommended. These have a venting assembly that
prevents pressure build-up causing drips from the spout.
Solvent squeeze bottles use during a wafer process can ONLY be used and stored in the
Solvent Hoods in Bay 1, Lab 207 and Teaching Fab, the only times can squeeze bottles can be
used outside of the hoods is during maintenance PM’s and cleanings.
Do not store squeeze bottles containing flammable liquids near sources of heat or
ignition such as hot plates. At no time should a plastic squeeze bottle be placed on top
of a hot plate (even if it is not “on”).
Store squeeze bottles containing flammable liquids in a secondary containment tray to catch
any drips that may occur. Large accumulations of squeeze bottles should be placed in a
flammables storage cabinet when not in use and not stored in a fume hood.
Always check the squeeze bottle label prior to adding solvent to avoid accidentally
mixing with another chemical.
Do not use squeeze bottles for dispensing highly hazardous chemicals such as
hydrofluoric acid, nitric acid, or hydrogen peroxide. If accidentally mixed with an
incompatible solvent, a dangerous reaction could occur.
6.6 Proper Disposal of Empty Chemical Containers : Disposal procedures for empty chemical containers depend on the previous contents. Containers of pourable contents must be completely emptied, in other words, no significant amount of the contents should remain. Containers of thick or solidified materials must be scraped out or drained until no more than one inch of material remains in the bottom of the container or no more than 3% of the original weight of the contents remains. Chemical containers that meet these criteria are considered empty and may be disposed of through normal trash collection procedures, if the sole active ingredient of the previous contents was not acutely hazardous. If containers are not or cannot be emptied or if they contain acutely hazardous waste, submit request for waste disposal via CEMS http://cems.uta.edu to EH&S. Also, 20 L (5 gal) containers must be submitted to EH&S as waste.
Step 1: Deface (or remove completely) the original label from the empty chemical container;
Step 2: Mark the container as “empty” on CEMS or remove the UT Arlington inventory barcode and attach it to the laminated sheet “ATTACH UTA BARCODES OF THE EMPTY CONTAINERS HERE” found on the lab wall in NRC clean storage.
Step 3: Triple (3X) rinse the empty chemical container with water or other appropriate solvent (acetone, propanol, ethanol, etc.) pouring the rinse solution into appropriate (labeled as Non-halogenated, Halogenated, or Heavy Metal Waste) 6 or 10 L Nalgene Waste Container provided by EH&S.
Step 4: Place the container into a Fume Hood to dry completely (at least overnight).
Step 5: Discard (or re-cycle) the container as regular trash or re-use for laboratory needs. Attention! Do not drop whole glass containers into the Box for Broken Glass.
Step 6: For containers that are recycled for use as secondary chemical storage containers all original chemical manufacturing labels MUST be remove completely from the bottle. The bottle must be thoroughly cleaned and inspected for any defects. Any defective bottle with leaks, old, cracks, deformed must be disposed.
Step 7 New labeling MUST comply with NRC secondary container labeling rules as per section 3.4 in order to prevent any mixing of chemicals that could lead to a chemical reaction causing chemical incident, explosion or a medical emergency for a User or staff member.
Any secondary containers without correct labeling will be discarded.
DOCUMENT: UTA SIRT NRC Hands On Chemical Training SOP Version: 1.0