NRC Hands On Hazardous Chemical & Safety Training

Standard Operating Procedure

Version: 1.0 March 2017

UNIVERSITY OF TEXAS AT ARLINGTON

Nanotechnology Research Center

TABLE OF CONTENTS 1. Introduction…………………………………………….……………………..................4

1.1 Scope of Document ………………………………………………………..….4

1.2 Description…………………………………….…….……………………….…5

Registration, Chemical Training Location and Times,

Entering the Clean Room, General Cleanroom Rules

and Guidelines….…….………………………………………………………10

1.3 NRC Emergency Contact Phone Numbers, Chemical Incident /

Emergency Procedures….…….……………………………………………11

1.4 Draegergard 8/16-Vision 7000 Software toxic gas Alarm

monitoring system, NRC Evacuation Procedures…………………..…….14

1.5 NIOSH Guide to Chemical Hazards; MSDS terms and

Definitions user guide. …………………………………..………………..…16

1.6 Safety Equipment : Location and Operation of Eye Wash Stations, Safety Showers, Fire Extinguishers, Emergency Phone Locations and Emergency exits..………..…………………………………………..….22

2. Wet Chemical Processing Facilities, Chemical Storage Locations,

NRC Material Inventory List and Precautions, General Facilities and Chemical Safety Usage rules……………………………………………………………………………..25

2.1.1 Fume Exhaust Hood Locations & Descriptions, Accompanying

Equipment for Wafer Processing and Associated Safety Rules………..25

2.2.1. Chemical (Fresh) Storage Locations and Associated Rules………....…29

2.2.2 Waste Chemical Storage Locations and Associated Rules Rules…………….32

2.2.3 NRC Chemical Inventory List showing the chemical names, symbols, %

concentration and special precautions to take during handling and

processing. …………………………………………………..………………35

2.2.4 General Facilities , Standard Chemical Safety and

Standard Chemical Usage Rules……………………………………...….36

3. Requirements, CEMS Training, Critically Important Rules

and Procedures to Follow………………………………………………...………..39

3.1 Requirements for Hands on Chemical Training…………………………39

3.2 CEMS Training………………………...……………………………………40

3.3 User Supplies Needed and Storage Boxes …………………………......41

3.4 Secondary Container Labeling Rules ………..……………………..…....44

3.5 Hot Plate Usage Rules……………. .….................................................45

3.6 Waste Chemical Disposal and Log Books Procedures…………...…....46

4 Wet Processing Safety Procedures, Rules and Precautions ………………..51

4.1 Acetic Acid Safety Precautions……………………………………………51

4.2 HCL Acid Safety Precautions………….…............................................52

4.3 HF Acid Safety Precautions………….…...............................................53

4.4 Piranha Solution Acid Safety Precautions………….….........................54

4.5 Nitric Acid Safety Precautions………….…...........................................57

4.6 Phosphoric Acid Safety Precautions………….….................................58

4.7 Sulfuric Acid Safety Precautions………….….......................................60

4.8 Strong Base Safety Precautions………….….......................................61

4.9 Photoresist Developer & Alkali Safety Precautions………….…..........63

4.10 Solvents Safety Precautions………….….............................................64

5 Chemical Spill Cleanup Procedures……………………………………………..68

5.1 Large UNKNOWN Hazardous Material (EH&S) Spill Response Procedures……………………………………………………..68

5.2 Small Known Hazardous Material Spill Procedure ……………………69 5.3 Mercury Spill Cleanup and Disposal …………………………………….70

6 Miscellaneous Safety Topics …...………………………………………………..72

6.1 Broken Glass Disposal………………………………………………..…..72 6.2 Broken Wafer Disposal…………………………………………………...72 6.3 Compressed Gas Cylinder Safety and Storage………………………..73 6.4 Cryogenic Safety and Handling…………………………………….…..73 6.5 Squeeze Bottle Safety…………………………………………………....74 6.6 Proper Disposal of Empty Chemical Containers………………………75

1.0 INTRODUCTION

1.1 Scope of Document

The purpose of the NRC Hands On Hazardous Chemical and Safety Training SOP is to familiarize all cleanroom and Lab 207 users with the equipment, procedures and safety protocols, rules and regulations, emergency response and contact information that are associated with wet chemical operations in Bay1, Bay4, Teaching Fab Yellow Room and Lab 207 of the NRCrication Research Center.

This document describes the Hands on Chemical and Safety Training requirements and the policies that must be followed to conduct laboratory research in the NRC clean room and lab 207. It is intended to augment existing CDC/NIOSH guidelines, UT Arlington Office of Emergency Management, UT Arlington Environmental Health & Safety Office policies and procedures and NRC Safety and Protocol Training. Researchers can refer to the UT Arlington Environmental Health & Safety Office and SIRT websites for additional safety information and policies.

http://www.uta.edu/campus-ops/ehs/Emergency/index.php

http://www.uta.edu/campus-ops/ehs/chemical/docs/lab-safety-manual.pdf

http://www.uta.edu/sirt/nano/user_information.php

Working safely and following NRC and UT Arlington Environmental Health & Safety Office safety policies are necessary conditions for conducting laboratory research.

Topics include:

Hours of Operation and the Buddy Rule Policy for regular-hour users and 24/7 users who have been given access 24 hours a day ,7 days a week.

Required Materials (safety glasses, tweezers, beakers, graduated cylinders) and there proper storage rules. Glass cleaning and disposal.

Location and description of Material Safety Data Sheets (MSDS Binders)

Locations and proper use of Acid, Base and Solvents Fume Hoods and associated storage cabinets.

Locations of Acid, Base and Solvents Hazardous Waste storage cabinets.

Location and use of required Personal Protection Equipment (PPE: goggles, acid aprons, acid gloves, etc.)

Proper use, storage and disposal of acids, bases, and solvents and associated Waste Log Book entries.

Hot Plate, Ultra Sonic Cleaners and weighing scale rules

Secondary Containment Labeling rules and infraction penalties.

Chemical Operations, General Solution Preparation Procedure. Proper mixing and dilution of acids and bases. Hydrofluoric acid safety, Piranha Solution

Accidents, locations and proper use of fire extinguishers, first aid kits, spill kits, safety showers and eyewash stations.

Clean Room and Chemical Safety Policy Violation policies and penalties.

http://www.uta.edu/campus-ops/ehs/Emergency/index.phphttp://www.uta.edu/campus-ops/ehs/chemical/docs/lab-safety-manual.pdfhttp://www.uta.edu/sirt/nano/user_information.php

1.2 Description: Registration, Chemical Training Location and Times, and entering the Clean Room, General Cleanroom and Chemical Guidelines

The NRC Hands on Hazardous Chemical Training is offered on 3rd and 4th Tuesdays or Wednesdays (alternating) of every month. The requirements for scheduling your NRC Hand on Chemical training are registration, approved application, NRC Safety & Protocol Training, successful completion of the NRC Safety Exam, and the General HAZCOM Training. To register send an email at least one working day in advance with your name, current email address, department, faculty advisor’s name, and the desired session to tbui@uta.edu . For registration the items to bring with you: Your Mav ID.

Hands on Chemical training meets in NRC’s 1st Floor Lobby no later than 9:15AM. All participants in Hands on Chemical and Safety training are required read this SOP prior to the

training date. New and returning Users will be led into gowning room to put on clean room garments and will enter the clean room where training will be held. Hands On Chemical training takes approximately 2 ½ to conclude and will end by 12PM.

Hands on Chemical training meets in NRC’s 1st Floor Lobby no later than 9:15AM

On the day of the training below are rules before you can enter the cleanroom. Before entering into the Clean Room Gowning area:

Clean clothes, shoes ,no heavy makeup or cosmetics

NO sandals or open toes shoes are allowed.

NO dangling jewelry, sharp bracelets or rings.

Everybody needs to bring their own goggles.

Small items can go through the pass through window but they need to be cleaned first.

You can leave your personal items in the day use lockers located on the 1st floor near the back door of Clean Storage Room. UTA NRC is not responsible for stolen items, therefore you are advised to bring your own combination lock.

mailto:tbui@uta.edu

Entering the NRC clean room Gowning areas:

Everyone needs to slide his card whenever it is activated, the card reader keep track on whoever is inside.

One person has to enter gowning room at the time to keep the room pressurized, so let one person at the time go inside the gowning room.

Clean your shoes (bottom) on the black mat for several seconds (10-15 secs) until they are clean, then take 5 baby steps on the blue tacky mat.

Trailing is not allowed.

Entering the clean room’s 1st Gowning area:

Do not go beyond the yellow ribbon until you have put on the following items:

Use the wire bench to put on the plastic shoe covers.

Put on hair net, and face net. Tuck in all long hairs and beards within the hair and face nets. No hair should be exposed.

Put on pair appropriate size rubber gloves, do not touch the outside of glove with your bare hands rather handle the gloves from the sleeves only.

Push the button on the glass door leading to the second gowning area to enter. This second gowning area where the cleanroom garments are hanging.

Entering the clean room’s 2nd Gowning area:

Push the button on the glass door leading to the second gowning area to enter. This second gowning area where the cleanroom garments are hanging.

Correctly put on a hood (with seams on the inside of hood) 1st, Coverall 2nd

and booties 3rd; in this order.

The hoods should be tucked into the gown and gown tucked into the booties.

Wear your UTA MAV ID

Wear you safety glasses.

Check yourself in the gowning area mirror to ensure you have gowned up correctly.

Retrieve any small items from the pass through window.

Enter the clean room air shower and make one complete 360˚ rotation to remove all particles, after the air shower has fully stopped exit the shower into the clean room. (Do not enter the cleanroom without going through the air shower first).

pass through window

Inside NRC Clean Room: General Cleanroom, Equipment & Processing Rules and Guidelines

General Cleanroom Rules and Guidelines:

1. Do not work in the cleanroom if you feel tired or sick, have taken any medication that may

make you drowsy, or have been drinking alcohol or taking any illegal substance.

2. No food, drink or medicine of any kind is allowed in the cleanroom. This includes candy, gum,

cough drops, coffee, etc.

3. No personal items such as backpacks, makeup, combs, brushes, handkerchiefs are allowed in

the cleanroom.

4. Only cleanroom paper, cleanroom notebook, ballpoint pen are allowed in the

cleanroom. Regular notebooks, pencil, eraser, mechanical pencil are not allowed in the

cleanroom

5. No wood products are allowed in the cleanroom.

6. No exposed leather is allowed in the cleanroom.

7. Do not sit on the floor.

8. ‼ Violations of these rules may result in suspension or loss of cleanroom access;

repeated Violations of these rules WILL result in suspension or loss of cleanroom

access ‼

9. Do not lean against or sit on the tables.

10. Do not lean on the equipment.

11. Do not open your gown zipper in the cleanroom.

12. Do not nap or sleep on the chairs. This is a very serious safety hazard to you and others.

13. Do not run or walk fast in the cleanroom.

14. Do not write on the wipes.

15. Do not touch your face, nose or any part of your body with your gloves on.

16. When you enter through the entrance door to the cleanroom, do not cross the yellow ribbon

line without your shoe covers on.

17. Do not enter the gowning area without your shoe cover, hairnet, face-net and latex gloves on.

18. Do not enter the cleanroom without going through the air shower.

19. Any item that sheds particles is not allowed in the cleanroom. This includes regular paper,

cardboard, leather, pencil, etc.

20. You must get permission from the NRC manager to bring any new chemical into the

facility. The MSDS of the chemical and description of how it will be used must be sent

to the NRC manager for review and approval. A list of previously approved chemicals

and their MSDS are available from the NRC office.

21. Do not leave your work area or table messy. Clean your work area when your work is finished.

22. Do not open the pass through door if the other door is open. Wait until the other door is closed

before you open the door on your side.

23. Do not take any chairs into Bay-1.

24. Do not use any chemical or material that does not belong to your group without prior

approval from the advising faculty of that group.

25. If you do not have 24/7 access, you cannot not stay in the cleanroom beyond 6 PM.

26. If you do not use the cleanroom for six (6) consecutive months, your access will be revoked

and you will need to retake the appropriate training on the facility and equipment.

27. All materials being transported from one workstation to another must be within a covered box

or appropriate carrier/container. Do not carry wafers in open containers.

28. Clean Room Buddy Rule: Do not enter the cleanroom after hours if there is nobody in

the cleanroom except for sputtering and e- beam/thermal deposition of metals and

electrical tests and wire bonding.

29. Immediately leave the cleanroom if you enter the cleanroom and there is no one inside

the cleanroom

30. Violations of the Buddy Rule WILL result in suspension or loss of cleanroom accessᴉ

General Equipment and Process Rules and Guidelines:

31. Do not take any equipment into the cleanroom without permission from the manager

32. Do not use equipment or tools without proper training and authorization

33. Do not assume that you are proficient on any equipment or tools because you have used

something similar in the past.

34. When you are trained on any equipment, you should demonstrate to the tool owner your

efficiency with the equipment within two weeks from the date you received training, otherwise,

your training will be voided and you will need to be trained again.

35. Only approved processes are allowed.

36. Each equipment must be operated within its operating limits, e.g. temperature, pressure,

vacuum, etc. should not exceed or go below the specified limits.

37. No facility modifications are allowed.

38. Do not use equipment that is subject to reservation without a reservation (extended

reservations are available from the NRC manager upon request)

39. Do not tamper with anyone’s running process.

40. Do not try to fix any equipment. Never open equipment panels.

41. Use the equipment for the process you are trained for. Any changes in the process or any new

process must be approved by the management or staff before use.

42. ‼ Always be aware of the conditions of your rubber gloves, if they become

contaminated with any resist , chemicals or solvents change them immediately.

43. You must fill in the equipment logbook with all the required information for each use.

44. Do not remove the logbook from the area around the corresponding equipment

45. Equipment and supplies should be cleaned before you bring them into the cleanroom.

46. Do not reserve equipment for the maximum allowed time if process time does not require it.

47. If the user does not attend and start the process on the reserved equipment within 30 minutes

from the start of the reservation, his/her reservation will be canceled. The equipment will be

considered available to other users.

48. Beware of UV light exposure is Bay 1 (OAI Aligner) and TFAB yellow room (MJB3 Aligner)

49. Beware of LASER light exposure in Bay 3 ( Coherent Excimer LASER)

50. When you use any equipment and you have doubt about ant part of operation, do not

guess and do not try an uncertain process or procedure. Ask the equipment owner.

51. ‼ Violations of these rules may result in suspension or loss of cleanroom access ‼

52. ‼Repeated Violations of these rules WILL result in suspension or loss of cleanroom

access ‼

1.3 NRC Emergency Contact Phone Numbers, Chemical Incident/ Emergency Procedures

1.3.1 In the event of Emergency involving a person in NRC, NRC clean room or NRC wet labs (lab 207) are the list of UTA and NRC Emergency contact numbers listed below. Emergency phones are located in Bay 1, Alcove, Teaching Fab or any available cell phone.

In the event of a User exposed to chemicals or injuries requiring immediate medical attention always call 911

1.3.2 In the event of Chemical Incident or an Emergency involving you or other individual(s) immediately stop what you are doing and assess the situation. Remove all personnel (Users, students, visitors, staff employees) from the immediate danger area and immediately call NRC staff members, NRC management , UTA EH%S office or emergency personnel.

Give the following information:

• Your name

• Location (NRC -clean room, clean room Bay number, clean room chase number, lab room number)

• Nature of Emergency (fire, chemical leak, injury, etc.)

• Any injuries resulting from the chemicals involved

• Name or other description of chemicals involved

• Quantity of chemicals involved

Do the following:

• Avoid breathing vapors or dust from chemical involved

• If chemical is flammable, turn off all ignition and heat sources near the chemical, if possible

• Leave any chemically contaminated materials (i.e., acid aprons, acid gloves, PPE etc.) in the affected hood or area of spill.

• If the chemical involved is a spill in any NRC processing Bay or Lab, close and the door and post a "DO NOT ENTER" sign on the door

1.3.3 If the Chemical Incident / Emergency involving you or another User that has been exposed to chemical contamination (acid, base, alkali base, solvents, flammable liquids, toxic gases or vapors any chemicals stocked in NRC) REQUIRING IMMEDIATE MEDICAL ATTENTION or an injury has occurred (burn, inhalation injury, electrocution, radiative, crushing, cuts or any injury using a piece of equipment) requiring immediate medical attention.

‼ For any injuries requiring immediate medical attention call 911 ‼

Follow the procedure as listed below:

• Remove the victim, yourself and other personnel from the immediate danger area. • Avoid breathing vapors or dust from any spilled. • For Chemical Contamination Immediately decontaminate the victim or yourself with

running water for at least 15 minutes using the safest and closest Safety Showers located in Bay1,Bay4, Teaching Fabs,

• For Chemical Contamination in the victims or your eyes use the safest and closest Eye Wash Stations located in Bay1, Bay4, Teaching Fabs and rinse your eyes for 15 minutes.

• While the victim or yourself is under running water, remove the contaminated clothing quickly ( the longer a person is exposed to chemical contamination the more damage will incur),

• Following the 15minute decontamination call 911 • For any injuries requiring immediate medical attention call 911 • Consult MSDS for guidance on appropriate first aid

Have yourself or the first responder have the following information to give to the emergency personal and the medical facility.

• Your name

• Location (NRC -clean room, clean room Bay number, clean room chase number, lab room number)

• Nature of Emergency (Chemical contamination, burn, type of injury, etc.)

• Identity or other description of the chemical.

• The label, if it can be removed from the container

• Material Safety Data Sheet (MSDS) for the chemical.

1.3.4 In the event of a Chemical Incident/Emergency that does not involve a victim exposed to chemical contamination or injury that does not require medical attention occurs on official school closure days, holidays, or at a time other than during normal working hours of Monday through Friday 0700am to 6.00pm immediately call UT Arlington Policy Emergency number.

1.3.5 In the event of a Chemical Incident/Emergency that does not involve a victim exposed to chemical contamination or injury that does not require medical attention occurs during normal working hours of Monday through Friday 0700am to 6.00pm immediately call and immediately call NRC staff members, NRC management , UTA EH%S office or emergency personnel.

1.4 Draegergard 8/16-Vision 7000 Software toxic gas Alarm monitoring system, NRC Evacuation Procedures

1.4.1 Within the NRC cleanroom toxic gas PPM (parts per million) levels are continuously monitored ( 24/7) using the Drager Polytron 2 XP, 7000 and 8000 Transmitters, DragerGard 8/16 controller and Vision 7000 Software. The sources of all toxic gas bottle releases, acid or base hood reactions causing large amounts of vapor outgassing, chemical spills , broken acid or base bottles where large amounts of vapors are release, incorrect mixing of acid or bases into the waste bottles causing outgassing and vapors , any chemical processing errors that have sufficient out- gassing are detected by the Drager system. The system allows for real time monitoring gas or chemical vapor concentrations, trending, data logging, PPM history and ALARMING.

If a PPM level exceeds an alarm set point the controller will relay an audible and visual alarm throughout the building. If the Drager system’s alarm light tower that is mounted in Bay3 wall YELLOW light goes ON , stop what you are doing immediately leave the NRC building in a quick and orderly manner using the normal exit route and informing others to leave as you make your way out. Notify NRC management, staff or emergency personnel. If the light tower’s RED alarm light and audible alarm message goes ON ordering all personal to evacuate the clean room and NRC building , stop what you are doing and immediately leave in clean room attire the NRC building through the closest and safest emergency exit and wait for emergency personnel to arrive.

NRC Emergency Exits

1.4.2 For an Emergency Evacuation that is not activated by the Drager system. Follow these general rules:

• Stop whatever you are doing • Assess the emergency • Evacuate in a quick and orderly manner • Evacuate by any of the following three ways depending on severity of the emergency

o Evacuate as you normally exit o Evacuate through main exit or clean storage in clean room attire o Exit through nearest available emergency exit in clean room attire

• Notify NRC management, Staff or emergency personnel

NRC Emergency Exits

NRC Cleanroom Emergency Exits are located in East Hallway, North Hallway, Cleanroom Entry Door and Clean Storage Entrance/Exit door

1.5 NIOSH Pocket Guide to Chemical Hazards; MSDS terms and definitions user guide.

1.5.1 Prior to ANY chemical processing ALWAYS read the appropriate MSDS and other pertinent fact sheets for all the chemicals you will be using. Be familiar with product identification, hazardous ingredients/identity information, physical/chemical characteristics, fire and explosion hazard data, reactivity data, health hazard data, precautions for safe handling and use and control measures. The MSDS binders in the clean room are located in Bay 1 at the solvent storage cabinet, Bay 4, Teaching Fab Chemical storage cabinets and TFAB yellow room. Throughout the fab the MSDS binders will be stored and assessable below the MSDS INFO location sign as shown below :

National Institute for Occupational Safety and Health (NIOSH): NIOSH Pocket Guide to Chemical Hazards website: https://www.cdc.gov/niosh/npg/default.html

The Pocket Guide has been designed to provide chemical-specific data to supplement general industrial hygiene knowledge. To maximize the amount of data provided in this limited space, abbreviations and codes have been used extensively. These abbreviations and codes, which have been designed to permit rapid comprehension by the regular user, are discussed for each column in the subsections. 1.5.2 Refer to the following MSDS users guide to become familiar with the terms and definitions of a MSDS or SDS.

MSDS or SDS

https://www.cdc.gov/niosh/npg/default.html

1 MATERIAL SAFETY DATA SHEET USER'S GUIDE

The following information is intended to serve as a general guide to assist in the evaluation and understanding of a MSDS. This MSDS User's Guide is presented using the Occupational Safety and Health Administration (OSHA) form No. 174 (see Exhibit 1D) to describe data typically found in an MSDS and the general arrangement or location of data. An explanation of each section of the form follows.

SECTION I: PRODUCT IDENTIFICATION

General Comments:

The identity of the material must be included on the MSDS. This identity will usually be systematic, scientific name, often with a unique Chemical Abstract Service (CAS) registry number. The product identity on the MSDS must match the identity on the label affixed to the chemical container.

Sometimes common synonyms are used for the products. Every known chemical designation or competitor's trade name is not necessarily listed.

Manufacturer's Name, Address, and Telephone Number

The manufacturer of the product is listed along with the manufacturer's address and telephone number for non- emergency information.

Emergency Telephone Number

The telephone number for information on the chemical in emergency situations (spill, explosion, fire, or

container leak.

Chemical Name and Synonyms

Refers to the chemical name of the material and any synonyms. Refers only to products consisting of a single

element or compound, and not to mixtures.

Trade Name and Synonyms

The trade name (or name the product is sold by) is listed along with any synonyms.

Chemical Family

This indicates the general class of compounds to which a material belongs, such as ethers, acids, ketones, etc.

Formula

Refers to the chemical formula for single element or compound products.

Date Prepared

Date the MSDS was prepared or last revised.

SECTION II: HAZARDOUS INGREDIENTS/IDENTITY INFORMATION

General Comments:

The terms listed in this section should be those components in the product which individually meet any criteria for

a defined hazardous substance. A component of a multi-component product might be listed based on its toxicity,

flammability, reactivity, or combination of these. AS numbers are not required to be listed under the Federal or

Hawaii Hazard Communication Standard, but are required under California's Hazard Communication Standard.

Chemical Names

Names of the product's hazardous ingredients.

CAS Number

A unique identification number assigned to a chemical or product by the Chemical Abstract Service (CAS).

TLV

Threshold Limit Value (TLV) is a term used by the American Conference of Governmental Industrial Hygienists

(ACGIH) to express the airborne concentration of a material to which nearly all adults can be repeatedly exposed

day-after-day without adverse effects.

PEL

Permissible Exposure Limit (PEL) is an exposure limit established by OSHA's regulatory authority. The PEL may

be a time- weighted average (TWA) or a maximum concentration exposure limit

Percent

Describes the percent by weight or volume of each ingredients listed. The percentages of hazardous ingredients

in a product may be given, but are not required in the present regulation.

SECTION III: PHYSICAL/CHEMICAL CHARACTERISTICS

General Comments:

The data in this section should be for the total mixture or product. The information provided in this section is

useful for the control of toxic vapors and for designing proper ventilation systems.

Vapor Density

Relative density or weight of a vapor or gas compared to the weight of an equal volume of air. Materials lighter

than air will have vapor densities less than 1.0.Materials heavier that air will have vapor densities greater than

1.0.

Specific Gravity

The ratio of the weight of a volume of materials to the weight of an equal volume of water.

Solubility in Water

The percentage of a material that will dissolve in water at a specified temperature. Less than 0.1% considered

negligible; 0.1% to 10% is moderate; more than 10% is appreciable and, if it can be dissolved in all proportions, it

has complete solubility.

Vapor Pressure

The pressure exerted by gas or vapor from the surface of the liquid in a closed container. A high vapor pressure

indicates that a liquid will evaporate easily

Evaporation Rate

The rate at which a material will evaporate when compared to a reference material (such as butyl acetate).If a

substance has an evaporation rate greater than 1, it evaporates more easily that the reference material. If the

rate is less than 1, it evaporates more slowly than the reference material.

Appearance and Odor

The color, form, and other identifying features of the material, to help identify

the substance.

Melting Point

The temperature at which a solid changes to a liquid state.

Boiling Point

The temperature at which a liquid changes to vapor state at a given pressure.

Percent Volatile

Refers to the percentage of a liquid or solid by Volume(by volume) that will evaporate at an ambient temperature

of 70 degrees Fahrenheit or 15.5 degrees Centigrade. This information may be found in place of melting point.

SECTION IV: FIRE AND EXPLOSION HAZARD DATA

General Comments:

This section should contain the appropriate fire and explosion data for the product. If the product poses no fire

hazard, a statement to that effect should be included in this section.

Flash Point

The lowest temperature at which a liquid (Method Used) gives off enough vapor to form a ignitable mixture in air

in a test container. Since flashpoints vary according to how they are obtained, the methods used are also listed.

Tag Closed Cup (TCC), Penshymartens Closed Cup (PMCC), and Setaflash (SETA) methods are those used

most extensively.

Flammable Limits

When flammable vapors are mixed with air in the proportions, the mixture can be ignited by a spark or flame. The

range of concentrations over which the flash will occur is designated by the lower explosive limit (LEL) and the

upper explosive limit (LEL)

Extinguishing Media

The selection of fire extinguishing media is based on the type of chemical, its physical properties, and flammable

characteristics. The most common types of extinguishing media

are water, CO, dry chemical and foam.

Special Fire-fighting Procedures

Special handling procedures and personal protective equipment for fighting fires as applicable.

Special Fire-fighting Procedures and Precautions

General firefighting methods are not described but special "exception to the rule" procedures are listed.

Unusual Fire and Explosion Hazards

Described are hazards associated with a chemical reaction or change in chemical

composition which might occur under heat or fire conditions. Also described are hazards which may need to be

considered while extinguishing fire with one of the available types of extinguishing media.

SECTION V: REACTIVITY DATA

General Comments:

This section relates to safe storage and handling of unstable hazardous substances. Essential information

regarding the instability or incompatibility of the product to common substances or circumstances such as water,

direct sunlight, metals used in piping, or containers, acids alkalies, etc.Under "Hazardous Decomposition

Products", dangerous products created by aging should be included, like the production of peroxides in the

decomposition of some ethers. The product's shelf life should also be indicated under this section when

applicable.

Stability

An indication of the ability of the material

to remain unchanged under reasonably fore- seeable conditions. Conditions which may cause instability are

stated.

Incompatibility

Common materials that could cause dangerous reactions when in contact with the product are listed.

Hazardous Decomposition Products Hazardous products that may be produced when the material breaks down (by heat, chemical reaction, oxidation, decay, or other processes).

Hazardous Polymerization Polymerization is a chemical reaction in which two or more small molecules combine to form larger molecules that contain repeating structural units of the original molecules. A hazardous polymerization is the above reaction with an uncontrolled release of energy. SECTION VI: HEALTH HAZARD DATA

General Comments:

This section should be a combined estimate of the hazard of the total product. Severity of the effect of exposure and basis for the finding, such as animal or human studies may be included.

Symptoms of Overexposure

Physical signs of overexposure (inhalation, skin, or eye contact, absorption through the skin and ingestion).

Health Effects or Risks From Exposure Acute health effects which develop quickly from a single dose or short exposure to a substance are described. Chronic health effects which develop slowly over a long period of time, or recur frequently are also described.

First Aid and Emergency Procedure First Aid procedures to follow until professional medical help is available in case of eye contact, skin contact swallowing, or breathing excessive amounts of the material are described.

Suspect Cancer Agent This section states whether the product has been found to be a carcinogen (cancer causing agent) by any of the sources listed.

Medical Conditions Aggravated by Exposure Carcinogenicity cancer.

The product has the ability to produce A chemical or product is considered to be a carcinogen or potential carcinogen if it is listed in the International Agency for monographs, National Toxicology Program (NTP) report, or OSHA list of regulated carcinogens. Medical conditions which are aggravated by exposure to the material are listed.

SECTION VII: PRECAUTIONS FOR SAFE HANDLING AND USE

Spill and Leak Procedures This describes methods for control and cleanup of spills or leaks. Appropriate materials, equipment, and personal protective equipment clothing are also listed.

Preparing Wastes for Disposal

Methods for packaging, neutralizing, or otherwise preparing waste product for disposal are described. Methods should be explicit, including proper labeling and handling of containers holding cleanup residue and specify acceptable disposal methods, such as sanitary landfill, incineration, etc.

SECTION VIII: CONTROL MEASURES

Ventilation and Engineering Controls The type of ventilation which may be used is described. General exhaust removes contaminated air circulation or exchange system.

Local captures and removes contaminants from the air at the point where the contaminant are released.

Respiratory Protection

Devices (respirators) for use in conditions exceeding exposure limits when properly selected, maintained, operated, and worn by the user, will protect the user's respiratory system from overexposure to air borne contaminants by inhalation.

Eye Protection

The type of eye protection needed for handling the product.

Gloves The type and material of gloves to use for protection of skin. Other Clothing and Equipment Additional clothing or personal protective equipment which may be needed to prevent exposure to a material. Work/Hygienic Practices Any specific practices for working with the material are described. Other Handling and Storage Requirements Specific requirements for storing and hand- ling the material described. Protective Measures During Maintenance of Contaminated Equipment Additional precautions for handling contaminated equipment.

1.6 Safety Equipment : Location and Operation of Eye Wash Stations, Safety Showers, , Fire Extinguishers, First Aid Kits , Emergency Phone Locations and Emergency Exits

1.6.1 There are five safety showers and eyewash stations in NRC Clean room and another safety shower and eyewash station in Lab 207. With the cleanroom the safety showers and eyewash stations are located in Bay 1 by the door, Bay 4 next to the Acid Hood, Chase 4 by Tystar Furnaces, Teaching Fab by the large double door, and inside Teaching Fab Yellow Room.

Chemical Spills on your clothes or body: Dangerous chemicals on your clothes or body require the immediate use of the shower. Speed

is essential. To activate the safety shower pull the shower’s chain-ring downward and immediately begin flushing with plenty of water and continue to flush for at least 15 minutes. While showering, remove your affected clothing so as to remove the source of chemical danger from yourself. Concerns about modesty must not interfere with avoiding serious injury. Do not put contaminated clothing back on after rinsing. Call the appropriate posted emergency phone numbers to get medical assistance as soon as possible and to obtain medical care.

Chemical Splashes into your eyes: Use the eyewash stations if chemicals have splashed into your eyes. Call for help so that your

buddy can lead you to the eyewash station. Speed is essential. Do not hesitate. To activate the eyewash station push the lever in the forward direction, let the water flow

over your closed eyes for a few moments before beginning to open them. This will make sure that the water is as clean as possible. Wash out your eyes with water for at least 15 minutes after opening them.

Chemical Splashes into your eyes and body: If you have splashed chemicals both in your eyes and on your body, then you may want to use

the shower first and rinse your eyes in the shower. After showering, rinse your eyes using the eyewash station as well. Remove any affected clothing while rinsing your eyes at the eyewash station, so as to remove the source of chemical danger. Concerns about modesty must not interfere with avoiding serious injury. Call the appropriate emergency assistance phone numbers as soon as possible and obtain medical care.

Bay 1 TFAB Yellow Room Bay 4 Lab 207

1.6.2 Fire extinguishers are located in all Bays and Chases in NRC Cleanroom and lab 207.

Maintain unfettered access to the fire extinguishers at all times, remove any storage boxes, chairs tables away from the fire extinguishers. At UTA NRC, "ABC" fire extinguishers are filled with a fine yellow powder. The greatest portion of this powder is composed of monoammonium phosphate. Nitrogen is used to pressurize the extinguishers. ABC fire extinguishers are red and range in size from 5 lbs to 20 lbs on campus.

Before you begin to fight a small fire activate fire alarm call UTA PD at 817-272-3003 (from a safe location) be sure fire is confined to small area and is not spreading be sure that a safe and unobstructed exit is readily available PROPER USE OF FIRE EXTINGUISHERS:

Every accident/fire shall be reported to the Environmental Health & Safety Office by the "in-charge" faculty member, administrator, supervisor or foreman. Department heads and directors, on being notified of an accident/fire, should insure that the proper emergency response agencies have been notified and confirm that the Environmental Health & Safety Office has been advised. Accidents occurring at other than normal office hours should be reported to the Environmental Health & Safety Office at the beginning of the next workday. Campus accidents or fires resulting in a fatality, serious disabling injury or major facility damage during other than normal office hours will be reported to the Environmental Health & Safety Office (ext. 22185) by the University Police Department.

1.6.3 First Aid Kits are available in Bay 1, Bay 4, TFAB Yellow Room, Lab 207 and in the gowning

room. These kits are used for self-treatment of minor injuries that do not require the attention of a medical professional. These kits can also be used to provide supplies to immediately treat more serious injuries and minimize health effects before treatment can be done by a medical professional.

1.6.4 Emergency phones are located in Bay 1, Alcove, Teaching Fab or any available cell phone.

When making an emergency call use the most readily available telephone or cell phone (if building power is affected) and limit non-emergency phone calls. Depending on the incident and personal affected or injured call the appropriate emergency phones numbers per section 1.3.1 to 1.3.5 .

Alcove Bay 1

1.6.5 NRC Cleanroom Emergency Exits are located in East Hallway ,North Hallway, Cleanroom Entry Door and Clean Storage Entrance/Exit door. See the map below map for First Aid kits, Fire Extinguishers, Safety Showers and Eyewash Stations and Emergency Telephone locations.

2.0 NRC WET CHEMICAL PROCESSING FACILITES, CHEMICAL STORAGE LOCATIONS, NRC MATERIAL INVENTORY LIST AND PRECAUTIONS, CHEMICAL PROCESSING USAGE RULES

2.1 Chemical Fume Exhaust Hood Locations & Descriptions, Accompanying Equipment for Wafer Processing and Associated Safety Rules

2.1.1 The chemical fume exhaust hoods located Bay1,Bay4,TFAB Yellow room and Lab 207 are types of ventilation systems providing personnel protection against toxic fumes, vapors and dust and also provides protection against chemical spills, runaway reactions and fires by acting as a physical barrier. A additional function of the hoods is for exhausted Chemical waste bottle storage compartments located in behind the doors at the base of the hoods.

In the drawings below shows the NRC “Wet” Equipment comprised of acid, base and solvent fume hoods locations in the clean room and Lab 207 and there accompany equipment available for Users to utilize. All supporting equipment requires training by the tool equipment owner before you can use the additional processing tools.

2.1.2 NRC clean room and Lab 207are equipped with the following “Wet” Equipment: The Cleanroom is equipped with an acid and base hood, solvent and a “develop” hood. The acid, base and develop hoods are equipped with high purity Millipore DI water (18Mohm resistivity) for clean rinsing device wafers and beakers , RO Water (1 MOhm resistivity) for cleaning beakers, processing vessels and city water (for initial cleaning or cooling). All hoods have nitrogen N2 blow guns and countdown clock timers. The hoods are equipped with clear plastic face shields-sash. These serve two purposes: They provide protection from chemical splashes or other mishaps. They also help protect the user from toxic vapors, which are just as hazardous if not more to your health. The hood’s exhaust removes a limited volumetric flow rate of air through the hood. Therefore work with the fume hood sashes in the lowest possible position (down position) and keep the sash in the down/closed position when not working in the fume hood. The only time the sash is in the up position is to plug in a hot plate or analytical balance, retrieving beakers and vessels and deposing of waste chemicals into the waste bottles.

Acid and Base Hoods: The acid and base hood is a large exhausted hood with enough space for two to four people to work at the same time. The hood has two sinks, each equipped with city water. This water may be used for cooling water baths when diluting concentrated sulfuric acid, or for rinsing items that do not require ultra- pure water. When ultra-pure water is required, it is obtained from the deionized water (DI) tap. There are two Millipore DI water taps located at the left and right sink locations. The acid hood is made of polypropylene; thus, it is not suitable for use with solvents, other than water. The hood is connected to a fiberglass exhaust duct, which is flammable. Burning solvent vapors could ignite this material. It is imperative that volatile SOLVENTS not be used in the acid and base hood. Acids and bases either fresh/new chemical bottles or waste chemical bottles may not be stored on the Acid and Base hood deck. However, the Acid and Base cabinet below the hood is used for storing waste acid bottles (right side) and waste base (left side).It is permissible to use both hot plates and Branson ultrasonic cleaners in the acid hood , although it is important to watch these processes closely and follow all the hot plate rules Again the only time the Acid and Base hood sash is in the up position is to plug in a hot plate or analytical balance, retrieving beakers and vessels and deposing of waste chemicals into the waste bottles.

Hot plate rules

Solvent Hoods: This hood is to be used for operations requiring non-aqueous solvents. It is made of stainless steel in order to be fire resistant. The hood exhaust ducting is galvanized steel. Consequently, acid solutions should not be used in this hood, as the vapors will corrode both the hood and the exhaust duct.

Again the only time the Solvent hood sash is in the up position is to plug in a hot plate or analytical balance, retrieving beakers and vessels and deposing of waste chemicals into the waste bottles, at all other times and during wafer processing the sash needs to be in the down position.

It is permissible to use the Branson ultra-sonic cleaners or hot plates in this hood, although it is important to watch these processes closely and follow all the hot plate rules. The cabinet beneath the hood is used for storing fresh/new solvents and solvent waste bottles such as non-halogenated acetone, methanol and isopropyl alcohol, halogenated solvents such as TCE and others such as solvent strippers No user labeled chemical bottles or containers may be stored in the solvent hood deck. These must be placed in appropriate, labeled secondary containment bottles and stored in the Solvent cabinet. Beakers covered with aluminum foil, are not acceptable for chemical storage, any secondary chemical container bottle not properly labeled and will be disposed of. Secondary containment rules are also applied to this cabinet.

Hot plate rules

Develop and Akali Hood: The develop hood is small, and is used primarily for developing photolithographic patterns. All developer solutions are alkali and alkali base thus they are used in this hood. The fresh/new developer bottles are stored below the Headway Research Spinner station 1. Do not store chemicals on the developer hood deck. The hood is equipped with exhausted ducting, nitrogen blow gun, Millipore RO and city water. Used developer waste bottles are to be disposed of in the appropriate labeled waste bottles, and stored in the Developer Waste cabinet under the develop hood.

Again the only time the Developer hood sash is in the up position is clean and retrieve beakers, vessels and to safety depose of waste chemicals into the waste bottles, at all other times and during wafer processing the sash needs to be in the down position.

Developer Waste cabinet

Fresh (new) developer bottles are stored below the Headway Research Spinner station 1.

2.2 Chemical (Fresh) Storage Locations, Waste Chemical Storage Locations Chemical Inventory List & Precautions; and Chemical Storage and Usage Rules

2.2.1 The Fresh (unused) chemical storage locations are described below:

Acid (fresh/new) Cabinets: The fresh acid cabinet is located at the far end of Bay 1 next to the double doors leading to the chase, on the left hand side, TFAB yellow room below the acid hood, Lab 207 and in Bay 4. These cabinet is polypropylene, and connected to the fiberglass exhaust. It, like the acid cabinet is unsuitable for organic solvent storage.

Always wear all the Personal Protection Equipment when you are retrieving fresh acids from this cabinet for use, and when transporting the fresh acid bottles within the Bay.

When transporting acid bottles, use the acid bottle carrier stored next to the fresh acid cabinet. This will prevent acid from spilling even if the bottle is dropped

The top two shelves are used for storing both NRC (open use) acids, and individually owned bottles of acid. Mixed solutions may also be stored, provided that they are in closed properly labeled secondary container. High density polyethylene bottles are the preferred container. The label must list the contents, the advisor/owner, MSDS hazard, and the expiration date. Bottles that are not properly labeled or updated within 6 months will be considered abandoned and will be disposed of.

Secondary containment rules are also applied to these cabinets. Fresh (unused) chemical storage locations are described below

Bay 1 Bay 4 Teaching Fab Yellow Room Lab 207

Base cabinets: The base storage cabinet is located by the entrance to Bay1 and TFAB yellow room below solvent hood. All base solutions and all alkaline materials, such as NaOH and KOH, are stored in this cabinet. Secondary containment rules are also applied to this cabinet.

Always wear all the Personal Protection Equipment when you are retrieving fresh bases from this cabinet for use, and when transporting the fresh base bottles within the Bay.

When transporting base bottles, use the acid/base bottle carrier stored next to the fresh acid cabinet. This will prevent bases from spilling even if the bottle is dropped

Solvent Cabinets: This cabinet is to the immediate left of the Bay1 solvent hood, Bay4, Lab 207 and TFAB yellow room below the Solvent Hood. It is made of steel, and is connected to the same exhaust duct as the solvent hood. All chemicals stored in this hood must be in closed bottles or cans, and must be clearly labeled with the contents, the name of the advisor/owner, MSDS hazards and the expiration date. The label should be updated at least every 6 months. Containers that have not been labeled correctly or not updated for 6 months will be considered to be abandoned, and will be disposed of. Secondary containment rules are applied to this cabinet.

Solvents that are for common use will be labeled “NRC.” Solvents with an individual’s name on them are considered private property. Do not use these materials without the owner’s consent.

Bay 1 Bay 4

Lab 207 Teaching Fab Yellow Room

TFAB Acid, Base and Solvent Storage Cabinets: These three cabinets are located in Teaching Fab. Chemicals stored according to their type in these cabinets are for common use will be labeled “NRC.” Chemical with an advisor’s group name, or labeled EE5343 on them are considered private property. Do not use these materials without the owner’s consent. Do use any chemical bottle labeled EE5343 at all. These cabinets are for NRC, EE5343 chemical stocks/storage only so these cabinets’ doors are always locked until you need some fresh chemicals. Ask staff for the key if you do not have the chemical available in the other wet processing bays chemical storage cabinets.

Secondary containment rules are applied to this cabinet.

Always wear all the Personal Protection Equipment when you are retrieving fresh acids ,bases and alkali bases from these cabinet for use and when transporting these acids and base bottles to other acid and base storage cabinets in Bay 1 , Bay4 and Teaching Fab Yellow Room.

When transporting all chemical bottles from these chemical storage cabinets USE the bottle carrier stored next to the fresh acid cabinet. This will prevent any chemical from spilling even if the bottle is dropped

Hydrogen Peroxide (H2O2) Storage Cabinets: The Hydrogen Peroxide are stored in TFAB yellow room small flammable cabinet and Bay1 base storage secondary Container or tub. This chemical is extremely oxidizing, reducing chemical agent that requires a separate storage cabinet or tub from all other chemical. Be careful when

stockpiling this chemical from TFAB supply to Bay1 or TFAB yellow room. Be careful not to store Hydrogen Peroxide with any other chemical.

TFAB yellow room Bay1

Flammable Liquid Storage in the Flammable Proof Refrigerators To optimize the storage life photoresist, Polyamide, SOD, SOG and any flammable liquids that needs to be refrigerated can be stored flammable proof refrigerators in Chase1 and Chase 5. Secondary containment rules are applied to these refrigerators.

2.2.2 The Waste Chemical Storage Locations are described below: Acid Waste Storage Cabinets: The cabinets below the acid hoods in Bay1, Teaching Fab Acid hood and in Bay4 acid cabinet on the lower shelf is used for storing Acid Waste Bottles. All acid waste storage cabinets are exhausted to protect the users from toxic vapors. All acid waste bottles are high density polyethylene bottles (reused bottles from chemical

supply manufactures) or plastic-coated explosion proof glass bottles with vented caps for Piranha solutions.

All waste bottles have Hazard Waste labels, NRC chemical waste tags attached to the bottle

handle identifying the specific acid waste bottle contents. All acid waste bottles have a “Fill Line” that users are not to go above when deposing chemicals.

NRC Acid Waste Bottles Do not fill any Chemical Waste Bottle above the fill line !!

Bay 1 Teaching Fab Yellow Bay 4 Lab 207

Base and Alkali Waste Storage Cabinets: The cabinets below the Developer hood in Bay1, Teaching Fab Solvent hood are used to store Developer, Base and Alkali Waste chemicals.The Solvent cabinet in Bay 4 and Lab 207 is used to store only fresh and Waste Developer and Alkali bottles.

All Base and Alkali waste storage cabinets are exhausted to protect the users from toxic vapors. All waste bottles are high density polyethylene bottles (reused bottles from chemical supply manufactures)

All waste bottles have Hazard Waste labels, NRC chemical waste tags attached to the bottle

handle identifying the specific acid waste bottle contents. All acid waste bottles have a “Fill Line” that users are not to go above when deposing chemicals.

Bay 1 Teaching Fab Yellow Bay 4 Lab 207

Solvent Waste Storage Cabinets: The cabinets below the Solvent hood in Bay1,Teaching Fab Yellow Room Solvent hood; the Solvent storage cabinet in Bay 4 and the solvent storage below the Solvent Hood in Lab 207 is used to store fresh and Waste Solvents

All Solvent waste storage cabinets are exhausted to protect the users from toxic vapors. All waste bottles are high density polyethylene bottles (reused bottles from chemical supply manufactures)

All waste bottles have Hazard Waste labels, NRC chemical waste tags attached to the bottle

handle identifying the specific acid waste bottle contents. All acid waste bottles have a “Fill Line” that users are not to go above when deposing chemicals

Bay 1 Teaching Fab Yellow Bay 4 Lab 207

2.2.3 The tables below are the NRC chemical inventory list showing the chemical names, symbols, % concentration and special precautions to take during handling and processing. These chemicals are stocked and available for internal user as part of the NRC fee structure .All the chemical purchased by NRC are CMOS microelectronics grade; thus they are very concentrated and very hazardous and can be FATAL in small amounts if you are exposed or contaminated due to an chemical accident or spill. Therefore you must be very careful when carrying, pouring, and disposing of these chemicals. These chemical are also very expensive DO NOT waste chemicals by using more than necessary to perform your wet processes.

Available Acids for NRC internal users:

Chemical Symbol Properties Special Precautions

Hydrochloric 38%

HCL Highly corrosive to skin and mucous membranes. Repeated exposure causes erosion of teeth. Strong chlorine odor detectable at 1-5 PPM.

Use only glass containers

Hydrofluoric 49%

HF

Liquid and vapors cause burns that may not be immediately painful or visible. HF attacks glass. HF looks like water and can KILL in small amounts (100ml). Found in Buffered Oxide Etch (BOE).

Use only PTFE, Teflon containers.

Buffered Oxide Etch 6:1

NH : HF4 (6:1)

6:1 BOE Ammonium

Fluoride 30%-40% Hydrofluoric acid

5% – 10%

Corrosive: Causes severe skin and eye burns. Causes digestive burns. May be fatal if inhaled, absorbed through skin, or swallowed. Mist or vapor extremely irritating to eyes and respiratory tract. Causes blood, cardiovascular system and respiratory system damage. Prolonged exposure may cause chronic effects. Material reacts with water

Use only PTFE, Teflon containers.

HF Dip 10:1

HF/water [1:10]

Hydrogen Fluoride < 1% - 10% Water> 90%

Reacts violently with strong alkaline substances. May be corrosive to metals. Fatal if swallowed. Fatal in contact with skin. Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. Causes damage to organs through prolonged or repeated exposure

Use only PTFE, Teflon containers

HF Dip 50:1

HF/water [1:50]

Hydrogen Fluoride 98%

Reacts violently with strong alkaline substances. May be corrosive to metals. Fatal if swallowed. Fatal in contact with skin. Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. Causes damage to organs through prolonged or repeated exposure

Use only PTFE, Teflon containers

Nitric 70%

HNO3 Highly corrosive to skin, mucous membranes and teeth. Highly reactive with acetic acid. Reacts explosively with combustible organic or other oxidizable materials

Use only glass containers.

Phosphoric 85%

H3PO4 Liquid is highly irritating to skin. Vapors are highly toxic. Contact with most metals causes formation of flammable and explosive hydrogen gas.

Use only glass containers

Sulfuric 95-98%

H2SO4 Liquid and vapors are extremely corrosive to skin and mucous membranes. Generates heat upon contact with water. Reacts with acetic acid.

Keep away from water. Use only glass

containers

Available Bases and Alkali Salts for NRC internal users:

Chemical Symbol Properties Special Precautions

Ammonium Hydroxide

29%

NH4OH

Irritating to skin, eyes, nose and mucous membranes. Emits highly toxic vapors when heated. A harmful contamination of the air can be reached very quickly on evaporation of this substance at 20°C

Reacts with many heavy metals and their salts forming explosive compounds. The solution in water is a strong base, it reacts violently with acids. Use only glass containers

Hydrogen Peroxide

30% H2O2

Strong oxidizing agent. Irritating to skin and mucous membranes. Reactive violently with reducing agents, combustible materials, organic materials, metals, acids, alkalis

Cap with vented cap. Do not boil in open vessels, may cause explosion. Store separate from all other chemicals. Use only glass containers

Available Solvents for NRC internal users:

Chemical Symbol Properties Special Precautions

2-Propanol 99.5%

CH3CHOHCH3

Highly flammable liquid and vapour. Keep away from heat/sparks/open flames/hot surfaces. Beware of vapours accumulating to form explosive concentrations. Vapours can accumulate in low areas. Keep container tightly closed.

Face shield and safety glasses Use equipment for eye protection

Acetone 99.9%

(CH3)CO

Danger! Extremely flammable liquid and vapor .Acetone may form explosive mixtures with chromic anhydride, chromyl alcohol, hexacholromelamine, hydrogen peroxide, permonosulfuric acid, potassium terbutoxide and thioglycol. Strong oxidizers

Danger! Extremely flammable liquid and vapor. Keep away from heat/sparks/open flames/hot surfaces.Vapors may cause flash fire or explosion. Harmful if inhaled. Vapor concentrations may cause drowsiness. Face shield and safety glasses Use equipment for eye protection.

Methanol 99.9%

CH3OH

Methanol is used as a solvent and as an intermediate in chemical synthesis. Component of deicing mixtures and preservatives. Toxic. Highly flammable liquid and vapor, toxic if inhaled.

Methanol is a hazardous chemical that is highly flammable and toxic, Methanol is extremely toxic to humans if ingested or if vapors are inhaled. Direct exposure to methanol should be avoided, Methanol can also degrease the skin, which may cause dermatitis.

2.2.4 General Facilities & Standard Chemical Usage Rules :

Do not take any chemical into the cleanroom without prior approval from the manager.

Do not bring any chemical in the NRC building without prior approval from the manager. This also includes Lab 207 and any private labs located inside the NRC building.

Before using any chemicals read all sections the SDS or MSDS of all the chemicals you will be using. For mixtures you are required to read all the components MSDS

information. You need to understand and remember all chemical properties,

incompatibles, handling requirements, first aid responses etc... Before using the

chemicals.

Follow all chemical safety instructions, such as those listed in Material Safety Data Sheets or on chemical container labels, precisely.

Know all the hazards of the chemicals with which you work. For example, perchloric acid is a corrosive, an oxidizer, and a reactive.

Minimize your exposure to any chemical, regardless of its hazard rating, and avoid repeated exposure.

Never underestimate the potential hazard of any chemical or combination of chemicals. Consider any mixture or reaction product to be at least as hazardous as, if not more

hazardous than its most hazardous component.

Assume that any unfamiliar chemical is hazardous and treat it as such.

Never use any substance that is not properly labeled.

Use the buddy system when working with HAZARDOUS CHEMICALS. Don’t work in the laboratory alone. Violation of the Buddy Rule will results result in suspension or loss of

cleanroom access ‼

Never use any substance that is not properly labeled.

Chemicals must be stored in designated chemical storages. Acids must be stored in acid storages, Bases must be stored in base storage. Solvents must be stored in solvent

storages. If you are not sure ask staff to clarify.

‼ Always be aware of the conditions of your nitrile rubber gloves, if they become contaminated with any resist, chemicals or solvents change them immediately. Rubber

gloves with tears and holes will expose your hands and finger to potentially hazardous

chemical contact with your skin. If your glove tears get a new one first !

Assemble all the supplies you will need to perform your wet process, such as compatible beakers, graduated cylinders, clean glassware, timers, and clean room paper. Organizes

and place them on the wet deck before processing with the chemicals.

Know the exact locations and operations of the eye wash stations, safety showers, fire extinguishers and emergency exits.

Do not answer the phone if you are in the middle of chemical transport, mixing, processing, or disposing chemicals

Before retrieving fresh chemicals from Acid, Base, Alkali’s and Solvents storage cabinets put on all the Personal Protective Equipment (PPE).

Personal protective equipment (PPE) is chemical resistant apron, acid gloves, protective sleeves and full face shields when working with any hazardous chemicals. Any additional

safety equipment must be used if required in the MSDS of the particular chemical.

When retrieving chemical out of the storage cabinet, hold the chemical bottle with both hands and place in the bottle carrier to move to the appropriate hood you will be using.

Any Acid, Base, Alkali , Solvent or any chemical bottle that are malformed, bowed in, and damaged inform NRC staff immediately to dispose and replace

When carrying chemical bottle, carry only one bottle at a time. Chemical bottle should be kept in front of your chest and held by both hands. Use containers for the bottles if

possible.

When carrying chemicals, always walk in the middle of the bays. Avoid getting too close to the walls.

All chemicals must be used in their respective chemical hoods : Acid in acid hoods, Base in base hoods , Solvent in solvent hoods and Developers in the develop hoods

Do not place Acid, Base, Alkali’s, solvent bottles or any liquid or solid chemicals on the floor where they can be kicked over. Place them on the working hood deck area during

your dispensing steps.

Use your own groups labeled glassware, beakers, stirrers, hotplates etc.

After you have dispensed the appropriate amount of chemicals need to perform your process immediately return the fresh chemical bottle back to their respective storage

cabinets.

Do not use more chemicals than necessary to perform your process. The chemicals are very expensive

Keep your wet process work area well organized and clean.

All Chemical Hood sashes are required to be in the furthest down position possible in order to safely perform your wet processing steps such as measuring, mixing; including

during wafer processing. The only time hood sashes are UP is when you are retrieving

hotplates, powering on the plates or weighing scale, removing chemicals that are cooling,

disposing the waste chemical into the waste bottle with the funnel; otherwise they are

always kept down.

Do not grab wafers and samples with hands. Always use the proper tweezers.

Do not place wet samples on any equipment, chuck, or surfaces.

If you have to leave a chemical process running while taking a short break (no more than one hour), you must label on clean room notebook paper each chemical clearly with its

name, write your name, name of your advisor, date, departure time, time of return and a

valid telephone number. Do not use abbreviations or formulae for the chemicals. Write

full name of the chemicals.

Use extreme caution while running your process and follow all MSDS safety guidelines.

Always be aware of the conditions of your Acid gloves, if they become contaminated with any Acid , Base , Alkalis or solvents rinse them with water immediately.

Always wear all the Personal Protection Equipment when you are disposing the Acid, Base or any Hazardous Chemicals waste into their respective Chemical Waste bottles,

and when transporting waste bottles within the Bay.

Do not dispose of any Acid, Base, Alkali or any chemicals unless you are 100% sure of the correct Waste bottle to use.

Any Chemical Waste bottles that do not have a contents Tag inform NRC staff immediately to dispose and replace.

Any Chemical waste bottle that is at or close to the “Fill Line” inform NRC staff immediately to dispose replace.

Always use the polypropylene funnel while pouring the hazardous waste into the waste bottle.

No chemical is to be discarded in drains.

When transporting Acid Waste Bottles, use the acid bottle carrier stored next to the fresh acid cabinet. This will prevent waste acid from spilling even if the bottle is dropped

When transporting HAZARDOUS Waste Chemical Bottles, use the bottle carrier stored next to the fresh acid cabinet in Bay 1. This will prevent hazardous waste chemicals from

spilling even if the bottle is dropped

All secondary containers containing mixed or un-mixed chemicals must be properly labeled with each component and its ratio, the date, name of user and faculty advisor,

MSDS hazard warning description and expiration date. Use the label maker in Bay3 to

make the labels.

All waste chemicals should be collected properly in designated and labeled waste bottles followed by filling out the waste chemical logbook.

Use the buddy system when working with HAZARDOUS CHEMICALS. Don’t work in the laboratory alone. Violation of the Buddy Rule will results result in suspension or loss of

cleanroom access ‼

Violations of these rules may result in suspension or loss of cleanroom access; repeated violations of these rules WILL result in suspension or loss of cleanroom access ‼

3.0 REQUIREMENTS AND PROCEDURE FOR HANDS ON CHEMICAL & SAFETY TRAINING, CEMS TRAINING, USER SUPPLIES NEEDED

AND STORAGE BOXES, CRITICALLY IMPORTANT RULES AND PROCEDURES TO FOLLOW

3.1 Requirements for Hands on Chemical Training for NRC Cleanroom and Lab 207: (Wet Lab Room 207, located on second floor of the NRC building is an access-limited lab for all eligible INTERNAL and EXTERNAL users.)

The requirements for scheduling your NRC Hand on Chemical training are registration, approved application, the General HAZCOM Training , the NRC Safety & Protocol Training and the successful completion of the NRC Safety Exam. To register send an email at least one working day in advance with your name, current email address, department, faculty advisor’s name, and the desired session to tbui@uta.edu . For registration the items to bring with you: Your Mav ID.

Access to NRC Cleanroom and Lab 207 for internal and external users who request access

to the labs with the following conditions :

The Applicant should take the UTA online HAZCOM and provide the certificate to

Ms. Thanh Bui, The admin at tbui@uta.edu .

The Applicant should take the NRC Site Specific Safety Protocol Training and pass. The schedule of the training can be found at http://www.uta.edu/sirt/nano/user_information.php

The Applicant is required to read NRC Hands On Hazardous Chemical & Safety Training Standard Operating Procedure and attend Hands on Chemical Training after completion of step . The schedule of chemical training can be found at address site given in item #

Access to the Clean room and Lab 207 is through a card reader. No one is allowed in the Cleanroom or Lab 207 without access granted by the Manager of NRC.

3.2 CEMS Training: If you are assigned by your PI/Supervisor to be responsible to update the

mailto:tbui@uta.eduhttp://www.uta.edu/sirt/nano/user_information.php

PI/supervisors chemical inventory then go online to http://cems.uta.edu and read the CEMS notices see when the next CEMS group training session’s date, time and the room location. If your schedule does not permit attending the training session and you prefer an individual training, please inform Elisabeth Rowlett at rowlett@uta.edu of the date/time convenient for you.

The following are the steps to take for managing your PI and group chemical inventory.

Attend CEMS group or individual training provided by EH&S. Go to http://cems.uta.edu for training date, time and location information.

Submit a request for a new CEMS account by going to http://www.uta.edu/campus-ops/ehs/cems/ and click on SOP-Request New CEMS Account and fill out the required information and submit.

Update and supervise your PI and groups chemical inventory by following the SOP procedures at http://www.uta.edu/campus-ops/ehs/cems/

3.3 User Supplies Needed and Storage Boxes: Internal and External Users are required to supply their own wafers, substrates, wet

http://cems.uta.edu/mailto:rowlett@uta.eduhttp://cems.uta.edu/http://www.uta.edu/campus-ops/ehs/cems/http://www.uta.edu/campus-ops/ehs/cems/

processing supplies, wafers holders, beakers ,graduated cylinders, hot plates, magnetic stirrers, thermometers and any other processing equipment and supplies not provided by NRC. “Borrowing” from the Teaching Fab, Bay 1 hoods or racks, or anybody else supplies (unless given permission by the owner) will not be permitted. Label you name on all your supplies your using the label maker in Bay 3 Required materials include, but are not limited to:

Safety Glasses: Any person entering the clean room and all wet processing bays, must have, and be wearing, their safety glasses. Regular eyeglasses are not acceptable. Storing safety glasses in Bay 1, thus requiring entry without safety glasses is not acceptable. It is recommended that personnel obtain a chain or strap, of the type used for hanging reading glasses around the neck, so that they can keep their glasses with them at all times. Label you name on your safety glasses using the label maker in Bay 3.

‼ Violation of this rule may result in suspension or loss of cleanroom access ‼ Si and other Semiconductor and thin film substrates Si Wafers, other Semiconductor substrates and films can be found locally at: http://www.novawafers.com/index.html Label you name on your wafer boxes using the label maker in Bay 3

Tweezers (both Metal and PFA or Teflon): PFA tweezers are cumbersome and have very little gripping strength. It is recommended that they be avoided whenever possible. For most purposes, metal tweezers and a PFA/Teflon dipper, or holder, are preferable. If whole wafers are to be used, it is advisable to obtain “limited grip” metal tweezers. These instruments have a right-angle bend in the tips, so that only the edge of wafers can be gripped. This prevents accidentally destroying devices on the wafer. For small pieces of wafers, flat “duck-bill” tweezers are superior. The very sharp tweezers used for manipulating individual die are not a good choice for handling wafers. These tweezers will grip at only one point. The wafer will slip and rotate around this point, resulting in a scratched wafer, which will be susceptible to breaking. Teflon coating of tweezers may not protect the wafers, and does not make them suitable for immersion in acidic solutions. It is important to protect tweezers tips so that they do not develop burrs, which will scratch wafers, ultimately leading to wafer breakage. Examples of these may be found at: http://www.tedpella.com/tweezers-pelco_html/pelco-pro-wafer.htm

Label you name on your tweezers using the label maker in Bay 3.

Diamond-tipped scribe:

http://www.novawafers.com/index.htmlhttp://www.tedpella.com/tweezers-pelco_html/pelco-pro-wafer.htm

All groups whose work requires cleaving wafers should own one or more of these. Protect the tip from damage with a cap, so that the diamond tip will not be knocked off. In order to cleave wafers, make a very small scratch at the edge, then grip the wafer on either side of the scratch with two pair of tweezers. Bend the wafer along a cleavage plane so that the wafer will break cleanly. For (100) material, this means gripping either parallel, or perpendicular, to the flat. . Label you name on your scribe using the label maker in Bay 3.

Cleanroom Notebook: This is a plastic-bound, spiral notebook made of lint-free paper. Other types of notebook are not permitted in the Cleanroom. Label you name on your cleanroom notebook using the label maker in Bay 3. Wafer holder (PFA or Teflon): Examples of these may be found at: http://www.wafercare.com/Page.aspx?id=1024 These are, by far, the most effective means of handling individual wafers in wet-chemistry procedures. It is strongly advised that, at the minimum, each faculty member’s group have at least several of these available for Cleanroom work. Label you name on your cleanroom notebook using the label maker in Bay 3.

Beakers of a size appropriate to the wafers to be processed: Pyrex is suitable for solvent cleaning and for most acid etch procedures but not for HF use. Teflon or PFA is REQIURED for procedures using HF. For vessels that are going to be used for HF (Hydrofluoric 6:1 BOE, HNA,10:1 HF,50:1 HF) , HCL, Nitric ,Piranha Solution and Base processes you MUST label the Teflon ,PFA or Pyrex vessels with the name of acid or base being used . Dedicate this labeled beaker/vessel for the particular process. The purpose to provide a visual warning for staff and other users of the hazards currently present in the hood. Labeling your glassware/beakers will give yourself and others working in the Acids hoods a visual indicator of the hazards and dangers in front of him or her. This is avoid anyone from being exposed and to minimize any accidents that would be extremely serious and potentially FATAL. Label your group name and name of acid or base being used for that vessel on your Pyrex, glass, Teflon or PFA vessels using the label maker in Bay 3.

‼ Violation of this rule WILL result in suspension or loss of cleanroom access ‼

For DI water rinsing, Solvent and Developer use Rubbermaid vessels are acceptable. Examples may be found at: http://www.rubbermaidcommercial.com/rcp/products/searchresults.jsp?search_text=luch%20box&search=luch%20box&submitIt.x=0&submitIt.y=0&submitIt=submit

‼ Absolutely NO Acids, Bases or Alkali Base are be used with Rubbermaid products

‼ Violation of this rule WILL result in suspension or loss of cleanroom access ‼

Graduate Cylinders:

http://www.wafercare.com/Page.aspx?id=1024http://www.rubbermaidcommercial.com/rcp/products/searchresults.jsp?search_text=luch%20box&search=luch%20box&submitIt.x=0&submitIt.y=0&submitIt=submithttp://www.rubbermaidcommercial.com/rcp/products/searchresults.jsp?search_text=luch%20box&search=luch%20box&submitIt.x=0&submitIt.y=0&submitIt=submit

These should be of a size appropriate to the volumes to be measured. It would be inappropriate to use a 1 liter graduate to measure 10 ml, and it would be equally inappropriate to measure 1000 ml using a 50 ml graduate. Properly used, a graduate cylinder can measure volumes to within 1%. Beakers are rated to +/- 5%, but are usually much worse. Graduate cylinders are available in both Pyrex and in Heavy- Duty plastic (PFA) suitable for measuring HF. Label your name on your graduate cylinder using the label maker in Bay 3.

Pasteur Pipets: These can be either disposable plastic, or disposable borosilicate glass. They are useful for adjusting the level of liquids in graduate cylinders. The borosilicate glass type have a very long tip that is useful for adjusting the volume of liquids in graduate cylinders. Examples of these may be found at: https://us.vwr.com/store/product/4758225/falcon-disposable-transfer-pipets-corning http://www.kartersci.com/SearchResults.asp?Cat=80&Click=31314&gclid=CLCyjpWJ-84CFZOIaQodnFgKbw

Label your name on your Pasteur Pipets box using the label maker in Bay 3.

Plastic Box (to store all the materials): A plastic box appropriate to the volume of equipment and supplies to be held may be purchased at any “Big-Box” store or Walmart. It should be labeled with the owner’s name. It is reasonable to keep “group” equipment in a box with the group name, and to have a smaller box for individual equipment and materials. .Label your name on your Plastic Box storage box or the larger Group Box using the label maker in Bay 3. These storage boxes are used to store wafers, clean beakers, tweezers, photolithography mask etc. Absolutely NO CHEMICALS are to be stored in these boxes.

Absolutely NO CHEMICALS are to be stored in these boxes

‼ Violation of this rule may result in suspension or loss of cleanroom access ‼ 3.4 Secondary Container Labeling Rules: The secondary containers must be labeled with:

https://us.vwr.com/store/product/4758225/falcon-disposable-transfer-pipets-corninghttp://www.kartersci.com/SearchResults.asp?Cat=80&Click=31314&gclid=CLCyjpWJ-84CFZOIaQodnFgKbwhttp://www.kartersci.com/SearchResults.asp?Cat=80&Click=31314&gclid=CLCyjpWJ-84CFZOIaQodnFgKbw

PI Name / Supervisor Name. Chemical Names as it appears on the Safety Data Sheet (MSDS or SDS).

No abbreviations, No molecular formulas

Hazards that this chemical presents as indicated on the Safety Data Sheet (MSDS or SDS) in words or pictograms . Examples of Chemical