novellus sabre xt-200 - ag semiconductor semiconductor services • [email protected] • 1...

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 1 EQUIPMENT DATASHEET Tool ID SABRF01 OEM/Model NOVELLUS Sabre xT-200 Serial Number 01-40-CUXT0081 Process ECP Vintage June, 2002 Wafer Size 200 mm NOVELLUS – Sabre xT-200

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AG Semiconductor Services • [email protected] • www.agsemiconductor.com 1

EQUIPMENT DATASHEET

Tool ID SABRF01 OEM/Model NOVELLUS Sabre xT-200

Serial Number 01-40-CUXT0081 Process ECP

Vintage June, 2002 Wafer Size 200 mm

NOVELLUS – Sabre xT-200

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 2

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 3

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 4

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 5

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 6

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 7

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 8

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 9

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 10

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 11

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 12

EQUIPMENT DATASHEET

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 13

EQUIPMENT DATASHEET

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