National Nanotechnology Coordinated Infrastructure (NNCI)

Lawrence S. GoldbergSenior Engineering Advisor

Division of Electrical, Communications and Cyber Systems (ECCS)lgoldber@nsf.gov

UGIMSalt Lake City, UtahJune 13, 2016

Outline

• NSF Funding History of Nano User Facilities• Background Leading to NNCI• NNCI Competition and Awards• Map of NNCI Site Awards• Role of NNCI Coordinating Office• Brief Overview of NNCI Sites

NSF Funding History of Nano User Facilities

NNIN User Numbers History

• NNIN enabled major discoveries, innovations, and contributions to commerce in nanoscale science, engineering, and technology

• Academic users predominantly graduate students, undergrads and postdocs• >1000/yr experimental PhD S&E degrees attributed to use of NNIN facilities• Start-ups and small companies used NNIN as prototyping labs, contributing to

innovation in new technologies and initial steps to commercialization• Highly successful REU and international REU (iREU) programs impacted student

career paths

NNIN Users by Field(Year 11: Mar 2014 - Feb 2015)

• The NNI 2014 Strategic Plan emphasized importance and critical need to sustain a dynamic infrastructure and toolset to advance nanotechnology, particularly the academic infrastructure represented by NNIN

• The PCAST 2014 Report to the President and Congress recommended strong support for nanoscale infrastructure networks such as NNIN.

• In May 2014, NSF sought input from the S&E community on a possible future nanotechnology infrastructure support program through a DCL– ~100 substantive responses to DCL were received, most supportive of

having an open competition for individual university user facilities. • A workshop was held in Aug 2014 of experts from academe, industry, and

government to:– develop a vision how such a future program could be structured, and– identify key needs for the user communities over the coming decade

• With this community input, NSF released a solicitation (NSF 15-519) in December 2014 to create the NNCI.

Background Leading to NNCI

NNCI Competition

• Successor program to NNIN (2004-2015) – Solicitation NSF 15-519• Competition for individual sites of university-based user facilities

– geographically distributed – with diverse and complementary capabilities across broad spectrum

of nanoscale science, engineering, and technology domains• 61 Letters of Intent received in response to the NNCI solicitation. • 55 Proposals received from individual institutions in April 2015• Organized the proposals into three regional panels: Eastern,

Central, Western• Two-stage review process: Mail/Panel; and Reverse Site Review

Panel with PIs via WebEx

• NSF working group recommended 16 proposals for awards

NNCI Competition results

• 16 NNCI sites were awarded (cooperative agreements) in Sept 2015 for 5 years duration– 8 sites are previous NNIN sites; 8 sites are new– 9 sites have regional partners– Sites are regionally diverse, located in 15 states– 27 universities are involved overall

• Annual award amounts range from $0.5M to $1.6M• $81M total NNCI funds over 5 years (~$16M annually)

– Two awards received EPSCoR funds in first year totaling $1.1M• A Coordinating Office was then competed from among the

awarded NNCI sites to enhance their impact as a national infrastructure network – The Coordinating Office award was to Georgia Tech, in March

2016, at $700K annually for 5 years – PI: Oliver Brand

NNCI Site Awards (NNCI.net)Yellow Indicates Previous NNIN Sites

Arizona State Universityw/ Maricopa County Community College and Science Foundation Arizona

Stanford University

University of Washingtonw/ Oregon State University

Montana State Universityw/ Carlton College

University of Nebraska - Lincoln

Univ. of Minnesota, Twin Citiesw/ North Dakota State University

University of Texas, Austin

Northwestern Universityw/ University of Chicago

University of Louisvillew/ University of Kentucky

Georgia Institute of Technology,w/ North Carolina A&T State University and University of North Carolina, Greensboro

North Carolina State Universityw/ Duke University and University of North Carolina, Chapel Hill

Virginia Polytechnic Institute and State University

University of Pennsylvania,w/ Community College of Philadelphia

Cornell University

Harvard University

University of California, San Diego

Role of NNCI Coordinating Office• Director of CO has key role in development of management strategies and

operational plans in concert with the Site Directors of the individual user facilities, and will serve as a principal contact person with the NSF.

• Establish comprehensive web portal to ensure close linkage among the individual facility websites to present a unified face to the user community of overall tools, instruments, and capabilities.

• Work with sites to guide users as to which site or sites, instruments, and processes would enable them to complete their projects most successfully

• Coordinate and disseminate best practices for national-level education and outreach programs.

• Work with individual sites to establish uniform methods for assessment and quantifiable metrics of site performance and impact.

• Share best practices and laboratory safety and training procedures across sites.

Role of NNCI Coordinating Office (cont)

• Coordinate instruction across sites in social and ethical implications (SEI) of nanotechnology

• Coordinate data management across all sites and the dissemination of shared knowledge to research, education, and technology communities.

• Harmonize capabilities for computational modeling and simulation across sites and interactions with NanoHUB of the NCN at Purdue.

• Enhance linkages with nationally funded centers or networks and facilities supported by government, the private sector, and internationally

• Coordinate discussion of acquisition needs of specialized instrumentation across sites to enhance new areas of research growth.

• Establish an External Advisory Board with membership of an individual from each NNCI site EAB to provide advice and guidance through the CO

• Engage sites in planning process to explore emerging areas of nanoscalescience, engineering, and technology that can lead to new research opportunities and future growth of the external user base.

Commercialization Education & OutreachOpen User Program

Nanooze – 14 issues and 1M+ copies in circulation, Disney Exhibit underway

REU – both 1st year and 2nd

year (international) internship program up and running .

TCN Short course Technology and Characterization at the Nanoscale offered in January and June

Blended Nano Course - Connection with regional university, lab experience at CNF

4H – NISE Net kits used in career exploration visit;

developing 4H as a distribution hub for Nanooze and other materials

www.cnf.cornell.edu

NNCI : Cornell NanoScale Science & Technology Facility

Foundry PartnersPartnership and tool mapping with two foundries: Novati and STC

Startups and SBIRs• Tech transfer• Manufacturing

Process Design• Designated Liaison

for 2 Business Incubators

• StartUp NY Designee (Tax Abatement Program)

• ~ 1.5 Startups per year

Incentives • StartUp CNF offers seed

match for new company users

• Fee cap offers huge discounts for heavy users

Advanced Tools • Lithography (3 EBL, 3 Steppers)• Thin Film Deposition & Growth• Thin Film Etching• Inspection & Characterization

Traditional &Emerging Fields• Chemistry & Chemical

Nanotechnology• Life Sciences & Medicine• MEMS & NEMS• Nanoscale Electronics• Optics & Optoelectronics• Physics & Nanostructures• Plant SciencesRapid Access• 450 staff-years of experience• Every tool available to all users

and trained by experts• Low cost housing for users• Remote Processing by Staff

Harvard Other UniversitySmall Company Large Corporation4-year college 2-year collegeIntl. Instit. or Corp.

Center for Nanoscale Systems:Harvard University

The Mission at CNS:Evolve and nurture one of the mostcomprehensive nanotechnologyresearch communities in the world.Supporting the development of newmaterials and devices.

Nanofabrication•Component driven•Complete lithography tool set

•Non-traditional materials

Electron Microscopy/Analysis•Advanced Tools•Core expertise in CryoTEM

•Atom Probe tomography

LABORATORY FOR INTEGRATEDSCIENCE AND ENGINEERING (LISE):

10000 ft2 Cleanroom

6000 ft2 Hi-resolu EM Imaging Suites

3000 ft2 Cell Culture Lab

Soft lithography/BioMaterials Lab

Optical Spectroscopy Lab

Scanning Probe Microscopy Lab

>1600 current users >190,000 hours of use>28 fulltime StaffMultidisciplinary userbase

CNS User Types FY15:

“Enabling Next Generation Nanoscience”

Materials

Life Science

Physics

Optics and Photonics

Chemistry

ElectronicsMEMS

OtherMechanics

MedicineEducational

LabsGeology

and Earth Science

Process Technology

CNS User disciplines FY15:

SENIC: Southeastern Nanotechnology Infrastructure Corridor

Extended Capabilities• Broad access to top-down and bottom-up

nanofabrication• Up to 200mm wafer and 300mm panel capabilities• Extended characterization capabilitiesServing a Diverse Community• Top producers of minority and women engineersRange of Industries Served• Traditional SE industries (textile, agriculture, paper) • New SE high-tech industries (energy, biotech,

automotive, aerospace)Education/Outreach/SEI• Provide programs with a focus on the SE US

Partnership of two nanotechnology centers in the southeastern US: Institute for Electronics and Nanotechnology (IEN), an Interdisciplinary Research Institute &

former NNIN site at Georgia Tech Joint School of Nanoscience and Nanoengineering (JSNN), an academic collaboration

between North Carolina A&T State University and University of North Carolina, Greensboro

Accomplishments (2015-2016)Served 900+ users (200+ external) 60+ companies and 30+ colleges/universities Installed 13 new toolsConnected with 10,000+ individuals at 100+ events Industry-supported summer REU program

Materials Processes Devices Systems & Appl.

North Carolina Research Triangle Nanotechnology Network (RTNN)

http://www.rtnn.org

Structure: Collaborative leadership: J. Jones (NC State), N. Jokerst (Duke),

J. Cahoon (UNC-Chapel Hill), D. Berube (NC State)100+ engaged principal faculty working in related nanotech areas.

50% use by non-traditional nanotechnology disciplines

The RTNN Innovation Hub is a collaboration between 3 major research institutions and 9 core user facilities within a 15 mile radius. The RTNN is pioneering innovative user engagement programs and new capabilities, with a focus on underrepresented demographics (e.g., HBCU researchers) and non-traditional disciplines (e.g., biology, biomedical engineering, textile engineering, agriculture, etc.)

Activities and Recent News/Events: Ongoing - RTNN provides “free access” to facilities for preliminary/seed data from diverse and/or

underserved researchers, resulting in 15 new users as of 5/16.Ongoing – Workshops, e.g. on vacuum technology, ellipsometry, cryo-electron-microscopy. Ongoing – Engagement with local industry and startups through business networks & non-profits.5/16 – Inaugural RTNN Workshop for Community College Educators.5/16 – RTNN encourages Spanish speaking researchers to engage, using 2 fluent staff members.12/15 – New K-12 outreach; pioneered remote use of SEM with a middle school classroom;

program is ongoing.

NNCI MANTH – Mid-Atlantic Nanotechnology Hub at the University of Pennsylvania

• Continued growth in user base noted since NNCI inception (currently in excess of 400 unique annual users)

• First User Day Annual Research Meeting held October 2015 – approximately 200 participants, 50 from industry

• Seed Grant Program launched; 5 proposals selected for funded facilities use• Undergraduate course in nanotechnology concepts, including discussions, labs,

SEI, and commercialization, launched Spring 2016 (participants from engineering, sciences, humanities, and Wharton business school)

• Technician Workforce Training Program at Community College of Philadelphia• First class of nanotechnology REU students arrived May 2016

Serving the industry-dense and academically-rich mid-Atlantic region, leveraging state-of-the-art shared user fabrication, characterization, and extensive scanning probe facilities to enable a diverse set of nanotechnology applications:- novel nanomaterials and devices, biomedical applications of nanotechnology, flexible electronics, MEMS, nano-enabled energy storage and conversion.

Areas of study • Geosciences• Geochemistry• Biogeochemistry• Environmental engineering & sciences• And related fields.

National Center for Earth and Environmental Nanotechnology Infrastructure (NanoEarth)

• Nanosynthesis, reactivity, sample prep labs• Bio culturing, growth, reactor facilities• Aerosol generation and reactivity chambers• Field expertise, nano methods and tools:

• Access to EMSL lab at DoE Pacific Northwest National Lab (PNNL)

・Electron, x-ray, ion, photon beam instruments: 4 TEMs, 2 SEMs, FIB, SIMS, XPS, Raman/AFM

・ Benchtop analysis: 3 AFMs, UV-Vis-NIR, BET, DLS, UF, etc.

Facilities

An NNCI Center for Earth and Environmental Nanoscience and Technology

www.nce2ni.ictas.vt.edu

Highlights to date • Celebrating the first dedicated NNIN/NNCI Center of this type• Already users from 16 universities and colleges; external usage rate has doubled in the first year• Highly vibrant and successful programs for underrepresented users

The KY Multi-scale Manufacturing and Nano Integration Node (KY MMNIN)

KY MMNIN

18

• NNCI SITE THEME – Advanced Manufacturing spanning multiple lengthscales from nano/micro to meso to macro

• Joint initiative between UofL (PI) and UK (co-PI)• Leverages over 25 years of expertise in the fields of

micro/nanofabrication and 3D additive manufacturing• Leverages over $250M of State and EPSCoR

investments in state-of-the-art advanced manufacturing equipment

Awarded complementary NSF “IMPACT” REU in advanced manufacturing (AM)

2 exchange students from the Japanese NIMS Hired 3 Endowed Chairs in Advanced

Manufacturing and Nano-integration Implemented FOM for facility management Hired 2 nano-coordinators and 2 integration

engineers Set up the KY MMNIN website Developed on-line Equipment Data Base Developed multi-scale demonstration

projects Increase in industrial clients

Accomplishments to Date

Soft and Hybrid Nanotechnology Experimental Resource

Vinayak Dravid (Director - Northwestern)Andrew Cleland (Co-Director - UChicago)

- Comprehensive nanoscale fabrication & characterization instrumentation and expertise- Soft nanomaterials: biological, polymeric, fluidic systems- Emerging nanotechnology

sectors in food, energy, agriculture, pharmaceutical and biomedical industries

We are exhibiting at

McCormick Place SouthChicago, IL USAJuly 17-19, 2016Booth 849

Institute of Food Technologists 2016

Meeting

www.shyne.northwestern.edu Contact: Ben Myers – shyne@northwestern.edu

NanoJournalism with Northwestern Medill School• Experiential and immersion learning• Print, social and digital media coverage• Science writing workshops for scientists

NUANCE - Soft nanopatterning, Surface Interface Char., Cryo-Bio Microscopy and AnalysisPNF - Micro/Nanofab MEMS/NEMS Wafer- Scale, Integrated FabNUFAB - Micro/Nanofabrication, MEMS, Physical-Bio InterfacesSQI - Bio-Molecular Peptide Synthesis and Char., Bio-Physical InterfaceNUCAPT - Atom-Probe TomographyXRD - X-ray Scattering, APS PrototypingIMSERC - Molecular Nanotech, Molecular Char.

SHYNE Facilities:

Nebraska Nanoscale Facility (NNF)NNF Nano Focus Areas Major Facilities and Capabilities

NNF Infrastructure Support NNF Outreach Events

• Nanotech Workshop—March 22, 65 attendees

• After-School Program—Culler Middle School (Title I)—Jan. 19-Mar. 15 and Sept. 15-Nov. 3

• Nano Days at the Mall—April 2

U. Nebraska – LincolnHub for Western region of Midwest

TNF Capabilities:22,000 ft2 cleanroom class 1000 ~ 130 shared nano-microfabrication tools

Technical Expertise access “Solutions Based” for Testbedsystem*

Imprint Lithography, R2R LithoFlex 100*, Jet Flash Imprint Litho IMPRIO 1100* Crystal growth by CVD*, MBE*Exfoliated Semiconductor2D materials*

“Tool Based” training for established process and heavy users.

Nanodevice Prototyping

State-of-the-art Characterization

Nanodevice Manufacturability

NNCI Texas Nanofabrication Facility (TNF) The University of Texas at Austin (PI: S.K Banerjee)

Focus Areas

Outreach

Northern Nano Lab Alliance• Supporting labs across the Midwest• First members meeting in July

Advanced Packaging (North Dakota State U)• Recruiting underway

Core Labs• Ext user base growing• New systems added

MINIC: Midwest Nano Infrastructure Corridor

2D Materials• New materials capabilities• Summer workshop

University of Minnesota-Twin Cities

Tissue templating

Bio-nano• Labs open• Users growing rapidly

Nanoparticle uptake

Stacked assembly

RF package

Graphene

Phosphorene

The Nanotechnology Collaborative Infrastructure SouthwestBuilding a southwest regional infrastructure for

nanotechnology discovery and innovation.

http://vft.asu.edu/vftvr/nanofab/

Social and Ethical Implications (SEI) of Nano

Education & Outreach

• Serves as lead SEI institution for NNCI• Science Outside the Lab – in Washington, DC, May 23-27.• 14 participants from ASU and GA Tech. • Recruit applicants from all NNCI sites for 2017

Research Focus • Nano-bio: Peptide arrays detect Ebola virus well before

symptoms occur• Nano-geo: Electron beam lithography to understand

fluid flow in shale rock for enhanced oil recovery• Nano-solar: World record efficiency in CdTe solar cells• Nano-commercialization: Providing cleanroom access

for Mossey Creek Technologies to develop nano-silicon for thermoelectric, solar, and battery storage

• New web site with social media links • REU/RET students/faculty from Navajo Technical University,

Crownpoint, NM and Scottsdale Community College• Started a regular webinar series

ebola response 3 days after infection

CdTe/MgCdTe cell with 17% efficiency

Visitors at the 2016 MRS Spring meeting take a virtual field trip

www.ncisouthwest.org

MONT: Montana Nanotechnology Facility

• Participating Facilities– Montana Microfabrication Facility (MMF)– Imaging and Chemical Analysis Lab (ICAL)– Center for Biofilm Engineering (CBE)– Center for Bio-Inspired Nanomaterials (CBIN)– Metabolomics, Proteomics and Mass Spec Facility (MPMS)– E&O Partner Science Education Resource Center (SERC) at Carleton College

Director: David Dickensheets, Deputy Director: Phil Stewart; Co-Directors: Recep Avci, Dave Mogk, Mark Young

• Program Emphases– Optical MEMS and Nanosystems – with local industrial

collaborations– Biology and Nanotechnology – Biofilms and Microfluidics– Novel optical and high temperature materials– Education and Outreach emphasizing undergraduate

research, K-12 students/teachers, web-based education, local Tribal colleges

• Highlights from Year 1– New PHI 710 Auger Nanoprobe installed, expanded

nanofab toolset, launched new Webinar Series

Northwest Nanotechnology InfrastructureUniversity of Washington / Oregon State University

Partners• Pacific Northwest National Lab (PNNL):

Environmental Molecular Sciences Laboratory• University of British Columbia: edX – Silicon Photonics

100’s of students building nanophotonic device• North Seattle College: NSF SHINE

Seattle Hub for Industry-driven Nanotech EducationInitiatives and Events• Educators-in-residence: innovative K-12 instruction• Native American outreach: transformational MS and PhD• Facility coordination with Clean Energy Institute• Summer short courses and lab sessions (coming in 2017)• Happening now:

–Workshop: New Directions in Biomed.l Surface Analysis,World Biomaterials Congress, 17-22 May 2016, Montreal

–Biomaterials Surface Characterization, 1-3 Aug 2016, UW –UW REU site in Clean Energy–NAMIS int’l graduate autumn school, 12-16 Sep 2016, U

TokyoCurrent Infrastructure Projects• Complete renovation & expansion of WNF• New UW Nano Engineering & Sciences building• New UW Clean Energy Institute Scale-up Testbed Facility• New OSU Johnson Hall: surface characterization and

collaborative space6/10/2016

Mission: Make – Measure – Model – Mentor• Enabling world-class science through technical

and educational leadership

World Class Facilities• UW: Washington Nanofabrication Facility (WNF),

Molecular Analysis Facility (MAF)

• OSU: Advanced Technology and Manufacturing Institute (ATAMI), Materials Synthesis & Characterization Facility (MaSC)

Flagship Capabilities• JEOL 6300 EBL, J105 3D Chemical Mass Spec, TPD/ESD,

XANES, Scattering SFG, Integrated NAP-XPS/NAP-STM

Principal Focus Areas• Integrated Photonics• Bio-nano Interfaces• Energy Materials & DevicesLeadership• Karl Böhringer, Site Director UW• Greg Herman, Site Director OSU• Dan Ratner, Educational Lead• Michael Khbeis, NNCI Industrial Liaison

NNCI @ Stanfordnano@Stanford provides access to world-leading facilities and expertise in nanoscale science and

engineering for internal and external users from academic, industrial, and government labs.

http://nanolabs.stanford.edu

Facilities Feature:• ~16,000 sqft fully equipped cleanroom

facilities, including resources that are not routinely available, such as an MOCVDand advanced e-beam lithography

• ~15,000 sqft of characterization facilities, including SEM, TEM, FIB, XRD, SPM, XPS and unique tools such as a NanoSIMS, and a scanning SQUID microscope.

• Over 1,100 annual users take advantage of a comprehensive array of advanced nanofabrication and nanocharacterization tools available within the:o Stanford Nano Shared Facilities (SNSF)o Stanford Nanofabrication Facility (SNF)o Mineral Analysis Facility (MAF)o Environmental Measurement Facility (EMF).

Broad research portfolio spanning traditional nano areas as well as life science, medicine, and earth and environmental science. Education and outreach programs, including a library of just-in-time educational materials, seminars, public events and tours.

San Diego Nanotechnology Infrastructure (SDNI)

SDNI Facility Structure: Consisting of UCSD Nano3 (Nanoscience, Nanoengineering, Nanomedicine) facility, Chip-Scaled Photonics Testing facility. Two new facilities, Cell Engineering Research Center (CERC), and NanoscaledStorage Processing and Simulation facility, will soon be added to SDNI.

Unique and Key Capabilities: In nanomedicine, nanophotonics,and nanomagnetics areas, SDNI offers nanofabrication, testing, pilot line manufacturing, and system integration capabilities.(e.g. concept-to-prototype for medical devices and systems, photonic chips-on-network, nanobio device-to-market)

Business Initiatives and milestones: Building an innovativeecosystem. Recruit and support 20 new external companies (including 12 startups) to reach technical milestones and securemulti-million dollar investments since Sept. 2015.

Education/outreach Initiatives and milestones: Hosted and supported 1600 attendees from 1st

generation college students and low-income families.

NNCI Site Awards (NNCI.net)Yellow Indicates Previous NNIN Sites

Arizona State Universityw/ Maricopa County Community College and Science Foundation Arizona

Stanford University

University of Washingtonw/ Oregon State University

Montana State Universityw/ Carlton College

University of Nebraska - Lincoln

Univ. of Minnesota, Twin Citiesw/ North Dakota State University

University of Texas, Austin

Northwestern Universityw/ University of Chicago

University of Louisvillew/ University of Kentucky

Georgia Institute of Technology,w/ North Carolina A&T State University and University of North Carolina, Greensboro

North Carolina State Universityw/ Duke University and University of North Carolina, Chapel Hill

Virginia Polytechnic Institute and State University

University of Pennsylvania,w/ Community College of Philadelphia

Cornell University

Harvard University

University of California, San Diego