nano materials improving gas

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    Nanomaterials: improving gas

    sensor performance

    John SaffellAlphasense Ltd.

    Technical Director

    [email protected]

    Paul Midgley

    Professor of Materials Science

    NANOMATERIALS 2010 University of Cambridge

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    We will consider:

    Technologies and markets for gas sensing

    Nanometrology

    Nanomaterials as catalysts

    Nanomaterials in optical gas sensing

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    Technologies and markets in

    gas detection

    A roadmap, which includes the matrix oftechnologies and markets is availableon:

    www.gas-sensor-roadmap.com

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    Gas detection has many

    marketsMarket segments

    Domestic safety

    Automotive

    Industrial safety

    Process control

    Military

    Emerging markets

    Niche

    Air quality

    Homeland security- Explosives/ terrorism

    Asthma, allergies

    MedicalHydrogen: fuel cells

    Extreme environments (space, volcanoes, oil)

    Breath analysis & capnography

    Existing markets

    Fire and home safety

    Leak detection

    Car emissions

    PM10, PM2.5

    Industrial safety & LELConfined space entry

    Stack emissions

    Process control and analysis

    Food processing, transport and storage

    Breathalyser / alcohol & drugs

    Ammonia

    Benzene, BTEXOutdoor air, Indoor air

    Odours (WWT, landfill)

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    Many technologies are

    employedComponents

    Lasers and optics

    UV, IR, microplasma sources

    Wavelength separation MEMS

    Low cost optics, detector arrays

    Fibre opticsMicro GC

    Micro MS

    PID, IMS

    QMB, SAW, BAW

    Sensor arrays

    Microprocessors/ FPGAs/ PICs/ ASIC

    Wireless

    Technologies

    MEMS

    Nanomaterials (QDs, CNT, catalysts, nano MO)

    Polymers, liquid crystals

    Electrochemistry

    Separation sciencePhysical chemistry (enthalpy, speed of sound)

    Products

    NIR spectrometers

    IR single line absorption

    IMS

    Micro GC/MSNanoparticle fluorescence

    IR, Visible, THz gas cameras

    Ultrasound, thermal conductivity imaging

    Electrochem/ optical/polymer/ nano arrays

    LIDAR, DOAS

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    Nanometrology

    Electron microscopy and AFM are regular tools

    for both R&D and quality control

    Scanning Electrochemical Microscopy,

    improved Raman and near field microscopy

    are offering new opportunities

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    TEM: Daresbury analysis of our Pt/Ru catalyst,identifying oxides and allowing us to determine

    the growth pattern

    3nm

    (010)

    [001]

    (001)

    (011)

    55o

    (100)

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    +12.72%

    +4.6

    5%

    RuO2 Ru

    - 4.28%

    (010)

    (100)

    (001) (110)

    +12.72%

    -4.2

    8%

    (001)

    (100)

    (i)

    (ii)

    (iii)

    +4.6

    5%

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    Zngrain

    Pt islanddeposited

    fromsolution

    RuO2

    deposited columnar

    growth

    Runanocrystal

    s at oxidesurface

    Growth

    mechanism

    time

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    Oxygen Map

    We also use Energy Filtered TEM toidentify the surface activity of our catalysts

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    SEM is routinely used to quantify catalystprimary particle size distribution

    2 4 6 8 10 120

    5

    10

    15

    20

    25

    30

    35

    ParticleCou

    nts

    Particle Diameter (nm)

    Dart 181A

    2 4 6 8 10 12 14 16 18 200

    2

    4

    6

    8

    10

    12

    14

    ParticleCou

    nts

    Particle diameter (nm)

    PtBO2

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    Nanoparticles agglomerate, so primary particlesize does not tell the entire story

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    Ru black

    5nm

    100nm

    Small 2-6 nm particles can agglomerate tolarge particles

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    Nanomaterials as catalysts

    We have been using nanomaterials ascatalysts for decades- they have just

    been rebranded as nanoparticles.

    With better analytical tools, we nowhave better control of our catalysts.

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    Nanomaterials for gas detection:

    many choices CNTsCNTs (MW)(MW)

    CNTsCNTs + polymer+ polymer

    CNTS + metal oxidesCNTS + metal oxides CNT + metal catalystsCNT + metal catalysts

    ZnO nanowiresZnO nanowires

    SnOSnO22 nanonano powderpowder

    Tungsten oxidesTungsten oxides IIIIII--V quantum dotsV quantum dots

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    Many growth/ deposition methods

    CVD

    PVD

    Nanopipette: QDs, MMOs, polymers electropolymerisation (polymers)

    in-situ CNT growth

    Flame ablation

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    Molecular structure of [Et2In(OS2CNMen

    Bu)]2

    NOAH: DTI funded project to make gas sensors from

    quantum dots and nanorods using single component

    CVD

    (Universities of Manchester & Keele, Alphasense, Teer, Epichem)

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    SEM image of InS nanorods

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    -In2S3 films grown at 375 C

    TEM shows straight In2S3 nanorods

    with average diameter of

    ca. 20 nm and ca. 400500 nm

    in length.

    High-resolution TEM confirms

    crystallinity by indicating well-resolved

    (103) lattice planes. The experimental

    lattice spacing, 0.66 nm is consistent

    with the 0.62 nm separation in bulkcrystals.

    Good deposition, but poor gas response

    TEM image of InS nanorods

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    Flame Spray Pyrolysis

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    SnO2 particles generated by

    flame spray pyrolysis

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    SnO2 by flame pyrolysis shows goodresponse and strong temperature

    dependence

    10 ppm C2H5OH (C). The sensors with Pd/Al2O3 filter (filled symbols) and without filter (open symbols)for both undoped SnO2 (black squares) and Pd-doped SnO2 (grey circles) are measured at 50% r.h. at 25C.

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    Carbons

    Graphite

    CNT (single and multiwalled)

    boron doped diamond glassy carbon

    graphene?

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    5nm

    TEM can also be used to follow a processsuch as ball milling of graphite

    2nm

    2nm

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    Increased ball milling increases theamorphous layer thickness

    5nm

    5nm

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    PECVD Chamber for direct growth of

    CNT Graphite heater usedto heat substrates

    (Plasma) DC Voltage-630V

    Temperature of

    Growth: 550 900o

    C Rotary PumpConnected to thebell jar

    Gas Inlet for Ammonia,Acetylene and Nitrogen

    GraphiteStage heater

    connected

    Gas Exposureoutlet for thesamples

    Top View Showingsamples on agraphite stage

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    Direct Growth of Carbon Nanotubes

    Novel Technique to growCNTs direct on chip

    Microheater heated to growCNTs locally on the desiredarea in 5mins in vacuum at0.2mbar.

    MWCNTs grown locally on thesmall heaters , radius 12um.

    SWCNTs can be grown athigher temperature and thinnercatalyst deposition.

    Small heater withCNTs

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    CNTs Grown on SOI Membranes

    ResistiveElectrodeswith CNT

    on SOIMembrane

    Depositionfor 15minsusing 2nmFe catalyst

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    How the CNTs will work as

    sensors Gases like NO2 are

    electrophillic so it canremove electrons fromCNTs (For SWCNTs)

    For MWCNTs chargetransfer mechanism.

    CNT conductanceincreases and therefore

    the resistance of the filmdecreases.

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    Reported CNT response to NO2

    Room temperature Response Time (2ppm) = 30sec, Sensitivity = ~15%F.Udrea et al , IEDM 2007, December

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    ZnO nanowires

    Nanowire grew properly in case of resistive sensor withAl metallization

    (Au plated)

    Resistance 10 k 300 k

    Growth on microhotplate: combining MEMS and nanomateria

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    Nanomaterials in optical gas

    sensingQuantum dots re-emit light at much longer wavelengths than

    excitaion wavelength- this allows us to shift LED emissions tomuch longer wavelengths (Trackdale)

    Controlled nanoparticles on surfaces give repeatable Surface

    Enhanced Resonant Raman Spectroscopy (SERRS)

    Nanoparticles can replace metal surfaces as the conductinglayer for surface plasmons (SPR)

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    Conclusion

    Improved, lower cost analytical tools (electron

    microscopy and AFM) bring quality control to

    nanomaterials

    Catalyst are being improved with III-V and carbon

    based materials now added to our catalyst choices

    Optics are using the unusual emission and

    conduction properties of nanomaterials

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    Acknowledgements

    Paul OBrien Manchester Chemistry

    Rod Jones Cambridge Chemistry

    Nicolae Barsan University of Tuebingen Physics

    Bill Milne, Sumita Santra and Florin UdreaCambridge Engineering

    James Covington and Julian GardnerWarwick Engineering

    Paul Midgeley and Cate DucattiCambridge Materials Science and Metallurgy

    Cambridge CMOS Sensors Daresbury Laboratory

    Technology Strategy Board (ULoGS project funding)

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    Thank you for your attention