microsystems: from nano to micro and macroaandreo1/487/487archive/2003/... · ieee cas tour 2002...
TRANSCRIPT
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IEEE CAS Tour 2002 A.G. Andreou
Microsystems: From Nano to Micro and Macro
Andreas GroupJohns Hopkins University
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IEEE CAS Tour 2002 A.G. Andreou
OUTLINE
Introduction: Emerging Information Technologies
Part I: Natural History of Nanotechnology
Part II: Engineering from Nano to Micro and Macro – Acetylcholine Receptor Biosensor– PVA Micro-polarizers and Polarization Camera– Ultra Thin Silicon CMOS Optoelectronics
Conclusions
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IEEE CAS Tour 2002 A.G. Andreou
Introduction
Emerging Information Technologies
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IEEE CAS Tour 2002 A.G. Andreou
CMOS• SOI• 3D• MRAM
Quantum ComputingDNA Computing
Quantum Cellular Automata
Self AssemblySoft Lithography
Single Quantum FluxElectron Interference
Spintronics
Carbon NanotubesMolecular Devices
Coulomb BlockadeInterband Tunneling
Resonance TunnelingGiant Magnetoresistance
Plastic ElectronicsPhotonic CrystalsEmerging
Information
Technologies
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IEEE CAS Tour 2002 A.G. Andreou
What is a micro-meter
Human Hair
111000
m mmµ →
100µm
Human Cell
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IEEE CAS Tour 2002 A.G. Andreou
What is a nano-meter
111000
nm mµ→
500 nm
Blue light
L
P-substrate(Bulk)
Gate
Gate Oxide
B
SourceDrainG
D
S
100 nm2 nm
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IEEE CAS Tour 2002 A.G. Andreou
Part I
Natural History of Nanotechnology
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IEEE CAS Tour 2002 A.G. Andreou
Periodic Table
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IEEE CAS Tour 2002 A.G. Andreou
2001November 9 December 21
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IEEE CAS Tour 2002 A.G. Andreou
Carbon Nanotube Circuits
Dekker group
Lieber group
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IEEE CAS Tour 2002 A.G. Andreou
2000
Montemagno Group, Cornell, Science November 24
200 nm
80 nmNickel Post
Nanopropeller750 to 1400 nm
F1 ATPase
8 rps80% efficiency
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IEEE CAS Tour 2002 A.G. Andreou 1tya1mya1bya
Nanotechnology Timeline 2000
1997
2001
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IEEE CAS Tour 2002 A.G. Andreou
1 billion years ago
E-coli bacterium
• Unicellular organism• Sensors, • Memory• Actuators (flagella) nanoscale molecular motors
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IEEE CAS Tour 2002 A.G. Andreou
Cell membrane and peptide structures
Lehninger , Bioenergetics, 1973
2.5 nm
3.5 nm
2.5 nm
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IEEE CAS Tour 2002 A.G. Andreou
Flagellar Molecular Motor
Evolving Brains, J. Allman 1999
2: forward (run), reverse (tumble)
Gears30Number of parts8Cylinders
ATP and proton current 100% efficiency
Power source10 hp per poundPower per unit weight0.1 atto hpPower output100 rpsSpeed25 nmDiameter
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IEEE CAS Tour 2002 A.G. Andreou
500 million years ago
Evolving Brains, J. Allman 1999
From cilia to receptors
Myelinated Cells (axons)
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IEEE CAS Tour 2002 A.G. Andreou 1tya1mya1bya
Nanotechnology Timeline 2000
1997
2001
Cam
brian
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IEEE CAS Tour 2002 A.G. Andreou
50 million years ago
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IEEE CAS Tour 2002 A.G. Andreou 1tya1mya1bya
Nanotechnology Timeline 2000
19972001
Cam
brian
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IEEE CAS Tour 2002 A.G. Andreou
Retina Architecture
5 µm
Kessel and Kardon
Rabbit retina
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IEEE CAS Tour 2002 A.G. Andreou
Outer plexiform cells and synapses
Chemicalsynapses
Electrical synapses
100 nm
200 nm
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IEEE CAS Tour 2002 A.G. Andreou
Part II
Engineering from nano to micro and macro
Acetylcholine receptor-based biosensor
M.E. Eldefrawi, S.M. Sherby, A.G. Andreou, N.A. Mansour, Z. Annau, N.A. Blum and J.J. Valdes, Analytical Letters, Vol. 21, No. 9,pp. 1665-1680, 1988.
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IEEE CAS Tour 2002 A.G. Andreou
Micro: Interdigitated-Electrode Capacitor
C5 um
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IEEE CAS Tour 2002 A.G. Andreou
Nano: Phospholipids and Ach Receptor
+ _ _+
85 nm
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IEEE CAS Tour 2002 A.G. Andreou
Acetylcholine Molecule and Receptor
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IEEE CAS Tour 2002 A.G. Andreou
Gating the Ach Channel
Na+
Na+Na+
Na+
Ach channel CLOSED
Na+
Na+
Na+Na+
Na+Ach
Ach channel OPEN
Ach
Ach
Ach
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IEEE CAS Tour 2002 A.G. Andreou
Sensitivity
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IEEE CAS Tour 2002 A.G. Andreou
Selectivity
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IEEE CAS Tour 2002 A.G. Andreou
Part II
Engineering from nano to micro and macro• PVA Micropolarizers and Polarization Camera
Z. Kalayjian and A.G. Andreou, “Integrated imaging linear polarimeter," ISA Transactions, Vol. 38, pp. 203-209, 1999.
L.B. Wolff, T.A. Mancini, P.O. Pouliquen and A.G. Andreou, “Liquid crystal polarization camera,” IEEE Transactions on Robotics and Automation, Vol. 13, No. 2, pp. 195-203, April 1997.
L.B. Wolff and A.G. Andreou, “Polarization camera sensors,” Image and Vision Computing, Vol. 13, No. 6, pp. 497-510, August 1995.
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IEEE CAS Tour 2002 A.G. Andreou
Polarization: The World that Humans Can’t See
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IEEE CAS Tour 2002 A.G. Andreou
Macro: Polarization-contrast Imager
180x186 PixelPhototransistor Array
ScannerPC Circuit
—
+
I1
Ib
I2Vb
Vref Vref
IPC
Q1 Q2 Q3 Q4
M1
M2 M3
OTAOTA
||
||
TR TRPC
TR TR⊥
⊥
−=
+
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IEEE CAS Tour 2002 A.G. Andreou
Micro: PVA filmNano: doped PVA molecules
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IEEE CAS Tour 2002 A.G. Andreou
Photolithography and Bleaching PVA films
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IEEE CAS Tour 2002 A.G. Andreou
Micro: PVA Micropolarizers
25µm
TR⊥||TR
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IEEE CAS Tour 2002 A.G. Andreou
Polarization Images
TR⊥||TR ||
||
TR TRPC
TR TR⊥
⊥
−=
+
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IEEE CAS Tour 2002 A.G. Andreou
Part II
Engineering from nano to micro and macro• Ultra Thin Silicon CMOS High speed Optoelectronics
A.G. Andreou, Z.K. Kalayjian, A. Apsel, P.O. Pouliquen, R.A. Athale, G. Simonis and R. Reedy, “Silicon on sapphire CMOS for optoelectronic microsystems,” IEEE Circuits and Systems Magazine, Vol. 1, No. 3, pp. 22-30, 3rd Quarter 2001.
A. Apsel and A.G. Andreou, “5mW, Gbit/s silicon on sapphire CMOS optical receiver,” IEE Electronics Letters, Vol. 37, No. 19, pp. 1186-1188, September 2001.
A. Apsel, Johns Hopkins University, Ph.D Dissertation, 2002.
A. Abshire, Johns Hopkins University, Ph.D. Dissertation, 2001.
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IEEE CAS Tour 2002 A.G. Andreou
Silicon on Insulator (sapphire) CMOS
10000 nm
200 nm
FT ~ 20 GHz, Fmax ~ 96 GHz (intrinsic devices)!
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IEEE CAS Tour 2002 A.G. Andreou
Silicon Lateral PIN photodiodes in CMOS
50 um
100 nm
Andreou et. al. NSF/OIDA Workshop 02
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IEEE CAS Tour 2002 A.G. Andreou
Spectral Response
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IEEE CAS Tour 2002 A.G. Andreou
Frequency Response
• 65 x 65 um • 784 nm light• Vb = 2.5 Volts
Theoretical BW ~ 5 GHz
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IEEE CAS Tour 2002 A.G. Andreou
Gb/s receiver
• 3.3 Volts
•5 mW
• 45 x 70 micron – small is good!-
Channel 6
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IEEE CAS Tour 2002 A.G. Andreou
CONCLUSIONS
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IEEE CAS Tour 2002 A.G. Andreou
Biology–Conductors: 20 -100 Ohms - cm–Insulators: 8 nm thickness
Leakage conductance ~ 1 x 1012 Ohms per 10 µm2
–Capacitance: 1 x 10-12 Farad per 10 µm2
3D structuresVLSI (standard CMOS - 2000)–Conductors: 1 x 10-3 to 10 x 103 Ohms - cm
Aluminum, Copper, Poly-crystalline silicon–Insulators: 2 nm thickness
Leakage conductance ~ 1 x 1015 Ohms per 10 µm2
–Capacitance: 5 x 10-15 Farad per 10 µm2
2D structures, quasi 3D in DRAM processes
Biological data from: B. Hille, “Ionic channels in excitable membranes”
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IEEE CAS Tour 2002 A.G. Andreou
3D and Wiring Complexity
CortexPower PC 601
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IEEE CAS Tour 2002 A.G. Andreou
Our Goal
To strive towards system complexity and functionality at the macroscopic scale through integration of heterogenous materials and a diversity of structures that exploit emergent physical/chemical properties at a hierarchy from nano to micro and meso.
Nature a good model to follow!
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IEEE CAS Tour 2002 A.G. Andreou
Challenges
Synthesis (design and structuring issues).Bridging the size scalesCost effectiveness.Merit criteria.Characterization and modeling
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IEEE CAS Tour 2002 A.G. Andreou
Bibliography
P. Abshire and A.G. Andreou, “Capacity and energy cost of information in biological and silicon photoreceptors ," Proceedings of the IEEE, Vol. 89, No. 7, pp. 1052-1064, July 2001 (Invited Paper).