520/580.495 integrated circuits, cmos and mems andreas g ...aandreo1/495/archives/2002/...a.g....
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A.G. Andreou 2002 1
520/580.495
Integrated Circuits, CMOS and MEMS
Andreas G. Andreou
Lecture notes adapted from handout notes for
Principles of Electronic Circuits
By Burns and Bond
MEMS on CMOS Figures from Gary Fedder at CMU
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A.G. Andreou 2002 2
Integrated Circuits (1958)
Jack Kilby Texas Instruments, Phase Shift Oscillator
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Planar Process (1962)
RTL Logic (Noyce and Hoerni)
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CMOS Fabrication History
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CMOS Fabrication (I)
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CMOS Fabrication (II)
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CMOS Process Cross Section
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PowerPC
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PowerPC Metal Layers
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CMOS on Insulator
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Multilevel Interconnects (2002)
IBM Technology
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MEMS on CMOS
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