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Micromachined Devices and Components
Micromachined Devices and Components II
Micromachined Devices and Components III
Micromachined Devices and Components IV
Micromachined Devices and Components V
Electronics and Structures for MEMS
Device and Process Technologies for MEMS and Microelectronics
Micromachined Devices and Components VI
Electronics and Structures for MEMS II
Device and Process Technologies for MEMS and Microelectronics II
Micromachined Devices and Components
Plenary Papers
Projection displays and MEMS: timely convergence for a bright future (Abstract Only) Larry J. Hornbeck, [1995]
Recent trends in silicon micromachining technology Hal Jerman, [1995]
Actuators and Mechanical Devices I
Thermal microactuators for surface-micromachining processes John H. Comtois, Victor M. Bright, Mark W. Phipps, [1995]
Mechanical and optical characterization of thermal microactuators fabricated in a CMOS process
Britton C. Read, Victor M. Bright, John H. Comtois, [1995]
Three-dimensional structures for micro-optical mechanical systems in standard CMOS Ezekiel J. Kruglick, Shirish Damle, Kristofer S. J. Pister, [1995]
Measurement of static friction in mechanical couplings of articulated microrobots Richard Yeh, Kristofer S. J. Pister, [1995]
Actuators and Mechanical Devices II
Measured forces and displacements of integrated force arrays Scott Goodwin-Johansson, Stephen M. Bobbio, Charles Bartlett, Nadeem Eleyan, James Jacobson, Joseph Mancusi, Lindsey Yadon, Christian Ball, Thomas D. DuBois, William Palmer, David Vellenga, Farid M. Tranjan, [1995]
Design, fabrication, and characterization of electrostatic microrelays Shuvo Roy, Mehran Mehregany, [1995]
Silicon membrane gyroscope with electrostatic actuation and sensing David Wood, George Cooper, James S. Burdess, Alun J. Harris, Jane L. Cruickshank, [1995]
Thick-polysilicon-based surface micromachined capacitive accelerometer with force-feedback operation
Beatrice Wenk, J. Ramos-Martos, M. Fehrenbach, P. Lange, Michael Offenberg, Werner Riethmuller, [1995]
Monolithic multiple axis accelerometer design in standard CMOS Brett Warneke, Eric G. Hoffman, Kristofer S. J. Pister, [1995]
Chemical and Biological Sensors
Chemical gas sensors on silicon Henry G. Hughes, [1995]
Micromachined Devices and Components (cont.)
Silicon micromachined gas chromatographic system (SMGCS) for directly separating binary fugitive emissions of ammonia (NH3) and nitrigen dioxide (NO2)
Edward S. Kolesar, Rocky R. Reston, [1995]
Micromachined hydrocarbon-based gas sensors Ashok Srivastava, Naveen George, J. Cherukuri, [1995]
Heart cell contractions measured using a micromachined polysilicon force transducer Gisela Lin, Kristofer S. J. Pister, Kenneth P. Roos, [1995]
Microfabricated sensors for the measurement of electromagnetic fields in biological tissues James Monberg, Albert K. Henning, [1995]
Flow and Electromagnetic Devices
Static micromixer built up in silicon Norbert Schwesinger, Thomas Frank, [1995]
Rapid prototyping of a micro pump with laser micromachining C. Channy Wong, Dahwey Chu, Sally L. Liu, Melanie R. Tuck, Zahid Mahmud, Vincent A. Amatucci, [1995]
Smart electronics and MEMS for aerospace structures Vijay K. Varadan, Vasundara V. Varadan, [1995]
Design of an inductive proximity sensor using a two-coil planar transformer Vikas I. Gupta, Dean P. Neikirk, [1995]
Multiaxis microcoil sensors in standard CMOS Beverley Eyre, Kristofer S. J. Pister, Walter Gekelman, [1995]
Modeling
Finite element modeling microelectromechanical structures for sensing applications James T. Stewart, [1995]
Linearization techniques for capacitive sensors Barun K. Kar, Eric Joseph, [1995]
CAD framework concept for the design of integrated microsystems A. Poppe, M. Rencz, Vladimir Szekely, Jean-Michel Karam, Bernard Courtois, K. Hofmann, M. Glesner, [1995]
Microelectromechanical gyroscope: analysis and simulation using SPICE electronic simulator Amit Burstein, William J. Kaiser, [1995]
Finite element modeling of the dynamic response of a MEMS sensor Young-Hun Lim, Vasundara V. Varadan, Vijay K. Varadan, [1995]
Micromachined Devices and Components (cont.)
Pressure Sensors and Packaging
Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects Youngmin Kim, Dean P. Neikirk, [1995]
ARROW-based integrated optical pressure sensors Kamel Benaissa, Arokia Nathan, [1995]
Characterization of a surface micromachined pressure sensor array William P. Eaton, James H. Smith, [1995]
Effect of machine parameters on polymer die attach dispense and a method to optimize them Dave S. Mahadevan, [1995]
Packaging of MEMS devices Albert K. Hu, Evan D.H. Green, [1995]
Poster Session
Biodriven microsystem for treatment of hydrocephalus Jurgen Joswig, Jens Oswald, Steffen Seifert, [1995]
3DµV: a MEMS 3D visualization package Nanping R. Lo, Kristofer S. J. Pister, [1995]
Micromachined Devices and Components II Plenary Papers
Application of micromachining technology to optical devices and systems Hiroyuki Fujita, [1996]
Commercializing MEMS – too fast or too slow? S. Walsh, W. N. Carr, H. Mados, D. S. Narang, [1996]
Integrated Microdevices and Microsystems
New developments in the integration of micromachined sensors Pasqualina M. Sarro, Patrick J. French, Paul T. J. Gennissen, [1996]
Compatible CMOS microsystems for automotive and medical applications Ralf Kersjes, W. Mokwa, [1996]
Stacked multichip-module technology for high-performance intelligent transducers Siebe Bouwstra, [1996]
Thermopneumatical micropump and microvalves for a medical analyzing system Zouhair Sbiaa, H. Camon, Daniel Esteve, [1996]
Applications of bipolar compatible epitaxial polysilicon Paul T. J. Gennissen, Patrick J. French, [1996]
Chemical Sensors
Silicon integrated microsensor incorporating a metal-doped phthalocyanine organic semiconductor used to selectively detect nitrogen dioxide and an organophosphorus compound
Edward S. Kolesar, John M. Wiseman, [1996]
Deflection behavior of Fabry-Perot pressure sensors having planar and corrugated membrane Jaeheon Han, Dean P. Neikirk, [1996]
Technologies and microstructures for separation techniques in chemical analysis Vincent L. Spiering, Theo S. J. Lammerink, Henri V. Jansen, Jan H. Fluitman, Albert van den Berg, [1996]
Infrared Sensors
Antenna-coupled rectifying diode for IR detection Hideaki Yamagishi, Hitoshi Hara, Nobuhiko Kanbara, Yasushi Onoe, Naoki Kishi, [1996]
Micromachined VO2-based uncooled IR bolometric detector arrays with integrated CMOS readout electronics
Hubert Jerominek, Martin Renaud, Nicholas R. Swart, Francis Picard, Timothy D. Pope, Marc Levesque, Mario Lehoux, Ghislain Bilodeau, Martin Pelletier, Danick Audet, Philippe Lambert, [1996]
Micromachined Devices and Components II (cont.)
Optimization of CMOS infrared detector microsystems Niklaus Schneeberger, Oliver Paul, Henry Baltes, [1996]
Accelerometers and Gyroscopes
Silicon accelerometers: generic design and operating principles and a case study Eric Peeters, [1996]
Stress-induced warpage and the compensation in a composite micro-accelerometer Gary X. Li, Ron J. Gutteridge, Dan N. Koury, Z. L. Zhang, Ray M. Roop, [1996]
Micromachined vibrating gyroscopes Jan Soderkvist, [1996]
Micromachined rotating yaw-rate sensor Rob B. Yates, Connel B. Williams, Chris Shearwood, Phil Mellor, [1996]
Modeling
Microsystem CAD Jan G. Korvink, Henry Baltes, [1996]
Performance trade-offs for a surface micromachined microengine Samuel L. Miller, Jeffry J. Sniegowski, Glen LaVigne, Paul J. McWhorter, [1996]
Novel MEMS simulation tool for thermal-based radiation sensors Nicholas R. Swart, Hubert Jerominek, Philippe Lambert, [1996]
Actuators
Mercury-contact switching with gap-closing microcantilever Scott Saffer, Jonathan Simon, Chang-Jin Kim, Kyung Ho Park, Jong-Hyun Lee, [1996]
Design considerations of the electrical contacts in (micro)relays Hocine Ziad, Kris Baert, Harrie A. C. Tilmans, [1996]
Development and fabrication of a rotary micropump and its industrial and medical applications
Thomas Weisener, Gerald Voegele, Mark Widmann, Carlo Bark, Rolf Dieter Schraft, Axel Bertholds, Andreas Braunschweiler, [1996]
Development and manufacturing of a two-dimensional microactuator for moving an optical fiber
Thomas Frank, [1996]
Micromachined Devices and Components II (cont.)
Flow and Magnetic Sensor
Thermoelectric CMOS anemometers Felix Mayer, Marcel Hintermann, Heiko Jacobs, Oliver Paul, Henry Baltes, [1996]
Pressure and Strain Sensors
Analytical techniques for examining reliability and failure mechanisms of barrier-coated encapsulated silicon pressure sensors exposed to harsh media
Gordon Bitko, David J. Monk, Theresa Maudie, Dennis Stanerson, John Wertz, Jeanene Matkin, Slobodan Petrovic, [1996]
Planar surface-micromachined pressure sensor with a subsurface, embedded reference pressure cavity
William P. Eaton, James H. Smith, [1996]
Phase-sensitive techniques applied to a micromachined vacuum sensor Glenn H. Chapman, N. Sawadsky, P. P. S. Juneja, [1996]
Strain sensitive resonant gate transistor Shun-ichi Miyazaki, Takashi Yoshida, Kyoichi Ikeda, [1996]
Poster Session
Semiconductor acceleration sensor Katsumichi Ueyanagi, Mitsuo Kobayashi, Tomoaki Goto, [1996]
Force measurements of polysilicon thermal microactuators J. Robert Reid, Victor M. Bright, John H. Comtois, [1996]
Industrial microsystems on top of CMOS design and process Jordi Carrabina, Joaquin Saiz, David Marin, Xavier Marin, Angel Merlos, Juan Bausells, [1996]
Innovative frequency measurement technique used in the design of a single channel frequency to digital converter ASIC
Neranjen Ramalingam, Vijay K. Varadan, Vasundara V. Varadan, [1996]
Numerical analysis of an optical motor based on the radiation pressure Yoshiro Ohmachi, Kazuhiro Baba, Eiji Higurashi, [1996]
Micromachined Devices and Components III Reliability and Materials
IC microtransducers: new components with old materials? Henry Baltes, Dirk Lange, Andreas Koll, [1997]
First reliability test of a surface-micromachined microengine using SHiMMeR Danelle M. Tanner, Norman F. Smith, Duane J. Bowman, William P. Eaton, Ken A. Peterson, [1997]
Routes to failure in rotating MEMS devices experiencing sliding friction Samuel L. Miller, Glen LaVigne, M. Steven Rodgers, Jeffry J. Sniegowski, J. P. Waters, Paul J. McWhorter, [1997]
Friction and wear in surface-micromachined tribological test devices Donna Cowell Senft, Michael T. Dugger, [1997]
Optical Devices
Fabrication process for 256x256 bolometer-type uncooled infrared detector Hideo Wada, Mitsuhiro Nagashima, Masayuki Kanzaki, Tokuhito Sasaki, Akihiro Kawahara, Yoshio Tsuruta, Naoki Oda, Shouhei Matsumoto, [1997]
Microbinary element for optical wavelet transform Gaogui Huang, Wenyi Feng, Yingbai Yan, Guofan Jin, [1997]
Gyroscopes and Accelerometers
Silicon micromachined vibrating gyroscopes Ralf Voss, [1997]
Airbag accelerometer with a simple switched-capacitor readout ASIC Masahiro Tsugai, Yoshiaki Hirata, Koji Tanimoto, Teruo Usami, Toru Araki, Hiroshi Otani, [1997]
Design of a �-� converter-based automotive sensor Barun K. Kar, Eric Joseph, [1997]
Actuators and Acoustic Devices
Microfabrication of acoustic-wave devices Michael J. Vellekoop, [1997]
Contactless actuation of giant magnetostriction thin-film alloy bimorphs for two-dimensional scanning application
Elisabeth Orsier, Amalia Garnier, Toshiro Hiramoto, Hiroyuki Fujita, Jochen Betz, Ken MacKay, Jean-Claude Peuzin, Dominique Givord, [1997]
Electrostatic comb drive for vertical actuation Abraham P. Lee, Charles F. McConaghy, Peter A. Krulevitch, Eugene Warren Campbell, Gary E. Sommargren, Jimmy C. Trevino, [1997]
Micromachined Devices and Components III (cont.)
Advanced micromechanisms in a multilevel polysilicon technology M. Steven Rodgers, Jeffry J. Sniegowski, Samuel L. Miller, Carole Craig Barron, Paul J. McWhorter, [1997]
Optical measurement of micromachine engine performance Scott C. Holswade, Fred M. Dickey, [1997]
Packaging
Microsystem packaging in 3D Gerard Kelly, John C. Alderman, C. Lyden, James Barrett, Anthony Morrissey, [1997]
Low-cost reliable transfer mold sensor packaging concept Andre Bossche, Carmen V. B. Cotofana, P. Kaldenberg, I. Van Dommelen, J. R. Mollinger, [1997]
3D packaging of a microfluidic system with sensory applications Anthony Morrissey, Gerard Kelly, John C. Alderman, [1997]
Extension of high-density interconnect multichip module technology for MEMS packaging Jeffrey T. Butler, Victor M. Bright, Richard J. Saia, John H. Comtois, [1997]
Fluid Systems
Micromachining technology for thermal ink-jet products Sophie Verdonckt-Vandebroek, [1997]
Microfluidic flow control using selective hydrophobic patterning Kalyan Handique, Bishnu P. Gogoi, David T. Burke, Carlos H. Mastrangelo, Mark A. Burns, [1997]
Microfluidic plastic interconnects for multibioanalysis chip modules Piu Francis Man, Darren K. Jones, Carlos H. Mastrangelo, [1997]
Sensors and Applications
MEMS applications in space exploration William C. Tang, [1997]
Bulk-micromachined pressure sensor based on epi-poly techniques Paul T. J. Gennissen, Colin M. A. Ashruf, Martijn Kaak, Patrick J. French, Pasqualina M. Sarro, [1997]
Vibration signature analysis sensors for predictive diagnostics Eric Peeters, Jingkuang Chen, Joel A. Kubby, Olivera Vitomirov, [1997]
Modeling and CAD
MEMS CAD and foundries: where are we going? Jean-Michel Karam, [1997]
Micromachined Devices and Components III (cont.)
Improved meshing technique and its application in the analysis of large and complex MEMS systems
Yie He, James Marchetti, Fariborz Maseeh, [1997]
Computer modeling techniques applied to pneumatically driven micropumps In-Byeong Kang, Noel D. Samaan, Malcolm R. Haskard, Namsoo Kim, [1997]
Biochemical Sensors
Laser micromachined and laminated microchannel components for chemical sensors and heat transfer applications
Peter M. Martin, Wendy D. Bennett, D. J. Hammerstrom, John W. Johnston, Dean W. Matson, [1997]
Excimer laser micromachining system for the production of bioparticle electromanipulation devices
Nadeem H. Rizvi, Erol C. Harvey, Phil T. Rumsby, Julian P. H. Burt, Mark S. Talary, Jon A. Tame, Ron Pethig, [1997]
Stabilization of activity and repeated usage of biomaterial during integration with transducers and analysis of irreversible inhibitors
Nickolaj F. Starodub, Wladislaw Torbicz, Valentyna M. Starodub, Mykola I. Kanjuk, Konstantin S. Ternovoj, [1997]
Poster Session
SPICE modeling of polysilicon thermal actuators Jeffrey T. Butler, Victor M. Bright, William D. Cowan, [1997]
Pressure sensors based on the metal-semiconductor mesa structures Shamil D. Kurmashev, Andrey A. Gradoboev, Alexandr N. Sofronkov, Andjey Gavdzick, [1997]
Design and performance of a double hot arm polysilicon thermal actuator David M. Burns, Victor M. Bright, [1997]
Integrated thermal sensor using optical channel waveguide Amar K. Ganguly, [1997]
Micromachined accelerometer with a movable-gate-transistor sensing element Daniel M. Edmans, Adolfo O. Gutierrez, Chris Cormeau, Edward W. Maby, Howard Kaufman, [1997]
Compensating methods of corner undercutting in silicon micromachining Ganru Mao, Suying Yao, Hongwei Qu, Baiying Yu, Weixin Zhang, [1997]
Characteristic analysis of basic mechanisms with large deflective elastic hinges for three-dimensional micromechanisms
Mikio Horie, Daiki Kamiya, Kozo Ikegami, [1997]
Micromachined Devices and Components III (cont.)
Tensile testing of thin-film microstructures Staffan Greek, Stefan A. I. Johansson, [1997]
Three-dimensional silicon microcomponents manufactured by microelectrodischarge machining
Dominiek Reynaerts, Hendrik Van Brussel, [1997]
Electrothermal modeling of a microbridge gas sensor Ronald P. Manginell, James H. Smith, Antonio J. Ricco, Robert C. Hughes, Daniel J. Moreno, Robert J. Huber, [1997]
Thermally excited inchworm actuators and stepwise micromotors: analysis and fabrication Murat M. Okyar, Xiqing Sun, William N. Carr, [1997]
Micromachined Devices and Components IV Plenary Papers
Microassembly technologies for MEMS Michael B. Cohn, Karl F. Boehringer, J. Mark Noworolski, Angad Singh, Chris G. Keller, Kenneth Y. Goldberg, Roger T. Howe, [1998]
Finding markets for microstructures James W. Knutti, [1998]
Micromachining technologies for miniaturized communication devices Clark T.-C. Nguyen, [1998]
Keynote Session
Brave new world of biobotics: technology and ethics meet once again S. B. Crary, [1998]
Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology James H. Smith, M. Steven Rodgers, Jeffry J. Sniegowski, Samuel L. Miller, Dale L. Hetherington, Paul J. McWhorter, Mial E. Warren, [1998]
Bonding and Packaging
Wafer bonding with an adhesive coating Gerhard Klink, Bernhard Hillerich, [1998]
Simultaneous fabrication of dielectric and electric joints by wafer bonding Andreas Drost, Gerhard Klink, Sabine Scherbaum, Michael Feil, [1998]
Stress analysis for the optimization of a new plastic package for optical sensors Carmen V. B. Cotofana, Andre Bossche, J. R. Mollinger, P. Kaldenberg, [1998]
Vacuum maintenance in hermetically sealed MEMs packages Alessio Corazza, Richard C. Kullberg, [1998]
Chemical and Gas Sensors
Chemical imaging sensor for observation of microscopic pH distribution Motoi Nakao, Satoshi Nomura, Shuji Takamatsu, Katsuhiko Tomita, Tatsuo Yoshinobu, Hiroshi Iwasaki, [1998]
Acoustic wave chemical microsensors in GaAs Stephen A. Casalnuovo, Edwin J. Heller, Vincent M. Hietala, Albert G. Baca, Richard J. Kottenstette, Susan L. Hietala, John L. Reno, Gregory C. Frye-Mason, [1998]
Integration
Technological modules for on-chip integration of sensors with electronics A. Goetz, Carles Cane, [1998]
Micromachined Devices and Components IV (cont.)
Thin film front protection of CMOS wafers against KOH Ulrich Munch, Niklaus Schneeberger, Oliver Paul, Henry Baltes, Elko Doering, [1998]
Actuators
MEMS actuators based on smart film materials Eckhard Quandt, [1998]
Three-dimensional active microcatheter combining shape memory alloy actuators and direct-drive tubular electrostatic micromotors
Gilles Bourbon, Patrice Minotti, Philippe Langlet, Takahisa Masuzawa, Hiroyuki Fujita, [1998]
Performance of MEMS-based gas distribution and control systems for semiconductor processing
Albert K. Henning, John Fitch, James M. Harris, Errol B. Arkilic, Brad Cozad, Ben Dehan, [1998]
Characterization techniques for surface-micromachined devices William P. Eaton, Norman F. Smith, Lloyd W. Irwin, Danelle M. Tanner, [1998]
Micromachined scanning Fabry-Perot interferometer Paul M. Zavracky, K. L. Denis, H. K. Xie, Thomas E. Wester, Paul L. Kelley, [1998]
Inertial Sensors
Micromachined angular rate sensor MARS-RR Wolfram Geiger, Martin Kieninger, Mike Pascal, Bernd Folkmer, Walter Lang, [1998]
Comparison between an optical and a capacitive transducer for a novel multiaxial bulk-micromachined accelerometer
Gerold Schroepfer, Michel de Labachelerie, [1998]
Two-axis detection resonant accelerometer based on rigidity change Osamu Tabata, Takeshi Yamamoto, [1998]
High-Frequency Devices
Micromachined high Q inductors for high-frequency applications Jae Yeong Park, Mark G. Allen, [1998]
Wideband microwave switch by micromachining techniques Chien Liu Chang, Peizen Chang, Kaihsiang Yen, Shey-shi Lu, [1998]
Resonators and Acoustic Devices
CMOS resonant sensors Oliver Brand, Mark Hornung, Dirk Lange, Henry Baltes, [1998]
Micromachined Devices and Components IV (cont.)
Long-term stability of membrane transducers for proximity sensing Mark Hornung, Oliver Brand, Oliver Paul, Henry Baltes, [1998]
Microresonant devices for power conversion J. Mark Noworolski, Seth R. Sanders, [1998]
Fish-bone-structured acoustic sensor toward silicon cochlear systems Muneo Harada, Naoki Ikeuchi, Shoichi Fukui, Shigeru Ando, [1998]
Modeling and CAD
Integrated mixed-technology design environment to support micro-electro-mechanical systems development
Jean-Michel Karam, Bernard Courtois, Ariel D. Cao, K. Hofmann, 1998 [1998]
Efficient process development for bulk silicon etching using cellular automata simulation techniques
James Marchetti, Yie He, Olaf Than, Sandeep Akkaraju, [1998]
Mechanical Sensors
Polysilicon for everything? M. C. L. Ward, Mark E. McNie, Robert J.T. Bunyan, David O. King, Roger Timothy Carline, Rebecca Wilson, J. P. Gillham, [1998]
Solder-bonded micromachined capacitive pressure sensors Berthold Rogge, David Moser, Hermann Oppermann, Oliver Paul, Henry Baltes, [1998]
Self-aligned polysilicon MEMS-reduced mask count surface micromachining J. Mark Noworolski, Seth R. Sanders, [1998]
Acoustic wavelet analysis using micro-electro-mechanical sensors Markus Mueller, Hiroshi Toshiyoshi, Hiroyuki Fujita, [1998]
Micromachined inductive displacement sensor Thomas Velten, Peter Krause, D. Stefan, Ernst Obermeier, [1998]
Poster Session
Microprobes for highly localized cooling/heating applications Lei Huang, Wanjun Wang, Michael C. Murphy, [1998]
MEMS-based resonating xylophone bar magnetometers Dennis K. Wickenden, R. Ben Givens, Robert Osiander, John L. Champion, Douglas A. Oursler, Thomas J. Kistenmacher, [1998]
Shear sensitive silicon piezoresistive tactile sensor prototype Lin Wang, David J. Beebe, [1998]
Micromachined Devices and Components IV (cont.)
Fabrication of micro torsional actuator using surface plus bulk micromachining processes Jerwei Hsieh, Weileun Fang, [1998]
Piezoresistive effect: stable enough for high-accuracy sensor applications? Gerald Gerlach, Arne Nakladal, Reinhard Buchhold, Kurt Baumann, [1998]
Fabrication of a stainless steel microchannel microcombustor using a lamination process Dean W. Matson, Peter M. Martin, Anna Lee Y. Tonkovich, Gary L. Roberts, [1998]
Fabrication of micromachined microwave couplers by CMOS process Chien Liu Chang, Jinhong Chio, Kaihsiang Yen, Peizen Chang, Shey-shi Lu, [1998]
Micromachined gas detector based on self-aligned ionization tips Bahram Ghodsian, Marek Syrzycki, Ash M. Parameswaran, [1998]
Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs Gokhan Percin, Butrus T. Khuri-Yakub, [1998]
Hybrid microdosing system Nam-Trung Nguyen, Stefan Richter, Jan Mehner, Steffen Schubert, Wolfram Doetzel, Thomas Gessner, [1998]
First micromachined silicon load cell for loads up to 1000 kg Henk Wensink, Meint J. de Boer, Remeo J. Wiegerink, Robert A.F. Zwijze, Miko C. Elwenspoek, [1998]
Characterization techniques for surface-micromachined devices William P. Eaton, Norman F. Smith, Lloyd W. Irwin, Danelle M. Tanner, [1998]
Micromachined Devices and Components V Plenary Papers
Electrokinetic microfluidic systems L. J. Bousse, [1999]
3D silicon photonic lattices: cornerstone of an emerging photonics revolution J. G. Fleming, S.-Y. Lin, [1999]
Keynote Session
MEMS-based interferometric modulator for display applications Mark Miles, [1999]
Material-related effects on wet chemical micromachining of smart MEMS devices Aylin Hein, Stefan Finkbeiner, Jiri Marek, Ernst Obermeier, [1999]
Sensors
Pressure and flow sensor for use in catheters Hans Goosen, Patrick French, Pasqualina Sarro, [1999]
Acceleration sensitivity of micromachined pressure sensors Richard August, Theresa Maudie, Todd Miller, Erik Thompson, [1999]
Wireless surface-acoustic-wave-based humidity sensor Richard Hollinger, Anikumar Tellakula, C.-T. Li, Vasundara Varadan, Vijay Varadan, [1999]
Micromachined Inertial Sensors
Advances in MEMS using SFB and DRIE technology Bert Van Drieenhuizen, [1999]
Single-crystal silicon gyroscope with decoupled drive and sense Scott Adams, James Groves, Kevin Shaw, Timothy Davis, Dan Cardarelli, Raymond Carroll, Joseph G. Walsh, Mark Fontanella, [1999]
Development of silicon accelerometers using epi-micromachining Paul Gennissen, Patrick French, [1999]
Programmable micro accelerometers and gyroscopes Vijay Varadan, Vasundara Varadan, [1999]
Noise, Analysis, and Simulation
Analysis of noise and fluctuations in micromachined devices Andreas Greiner, Jan Korvink, [1999]
Micromachined Devices and Components V (cont.)
Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generation
Selden Crary, Peter Cousseau, Eva Mok, David Woodcock, Philippe Renaud, [1999]
Applications and Assembly
MEMS control moment gyroscope design and wafer-based spacecraft chassis study Joel Reiter, Karl Boehringer, Mark Campbell, [1999]
MEMS fixtures for handling and assembly of microparts Isam Tahhan, Yan Zhuang, Karl Boehringer, Kristofer Pister, Kenneth Goldberg, [1999]
RF and Inductors
MEMS millimeter-wave transceiver architectures Jung-Chih Chiao, Debabani Choudhury, [1999]
New fabrication method for high-Q on-chip spiral inductor Hongrui Jiang, Jer-Liang Yeh, Norman Tien, [1999]
Characterization and Reliability
Static and dynamic characterization of polysilicon surface-micromachined actuators Volker Laible, Paul Hagelin, Olav Solgaard, Ernst Obermeier, [1999]
Micromachining and Actuators
Polymers: an excellent and increasingly used material for microsystems Peter Bley, [1999]
Additive electroplating technology as a new integration concept for MEMS Josef Binder, Wolfgang Benecke, [1999]
Parallel-plate electrostatic dual-mass oscillator Christopher Dyck, James Allen, Robert Huber, [1999]
Energy and Energy Storage
Microelectromechanical high-density energy storage/rapid release system M. Steven Rodgers, James Allen, Kent Meeks, Brian Jensen, Samuel Miller, [1999]
Novel thin film solid-oxide fuel cell for microscale energy conversion Jeffrey Morse, Alan Jankowski, Jeffrey Hayes, Robert Graff, [1999]
Production-ready silicon microvalve Tak Wang, Phillip Barth, Rod Alley, James Baker, David Yates, Leslie Field, Gary Gordon, Christopher Beatty, Lori Tully, [1999]
Micromachined Devices and Components V (cont.)
Micromachined flame ionization detector and flame spectrometer Stefan Zimmermann, S. Wischhusen, Joerg Mueller, [1999]
Poster Session
Development of novel piezoresistive sensor Zhongshen Lin, Weileun Fang, [1999]
Linear arrays of uncoolded poly SiGe microbolometers for IR detection Piet De Moor, Sherif Sedky, Deniz Tezcan, Chris Van Hoof, [1999]
Micro pressure sensor with submillimeter size by silicon bulk micromachining Lung Jieh Yang, Yih-Min Chang, [1999]
Polysilicon xylophone bar magnetometers Dennis Wickenden, John Champion, Robert Givens, Thomas Kistenmacher, James Lamb, Robert Osiander, [1999]
Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs Jong-Hyun Lee, Myung-Hyun Lee, Won-Ick Jang, Chang-Auck Choi, Jin Joo, [1999]
Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequency
Yoon Hong, Jong-Hyun Lee, Soo Hyun Kim, [1999]
Linear magnetic position sensor for automotive applications Zhixiang Liu, Li Tian, Jim Parham, A. Bruno Frazier, [1999]
Electronics and Structures for MEMS Plenary Session
Nonvolatile high-density high-performance phase-change memory Guy Wicker, [1999]
Advanced rf CMOS technology Hiroshi Iwai, Tatsuya Ohguro, Eiji Morifuji, Takashi Yoshitomi, Hideki Kimijima, Hisayo Momose, Kazumi Inoh, Hideaki Nii, Yasuhiro Katsumata, [1999]
Invited Paper Session
MEMS packaging and microassembly challenges Robert Mehalso, [1999]
Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes
Anthony Walton, David Vass, Ian Underwood, Georg Bodammer, David Calton, Kris Seunarine, J. Tom Stevenson, Alan Gundlach, [1999]
Integration of MEMS devices Patrick French, [1999]
High-efficiency silicon solar cells Martin Green, [1999]
Application domains for synchrotron radiation sources of various energies C. Khan Malek, V. Saile, [1999]
Nanometer x-ray lithography F. T. Hartley, C. Khan Malek, [1999]
Processors and Sensors
Wide-bandgap materials for novel electronic devices and MEMS Alex Hariz, [1999]
Silicon surface micromachining over active devices Ekalak Chaowicharat, Chee Kwok, Graham Rigby, [1999]
Sensor system for heart sound biomonitor Jarrad Maple, Leonard Hall, John Agzarian, Derek Abbott, [1999]
Accelerometers and Gyros
New sensor-on-chip technology for micromechanical acceleration-threshold switches Michael Wycisk, Josef Binder, Sven Michaelis, Hans-Joerg Timme, [1999]
Micromachined accelerometer based on electron tunneling Yongjun Yang, Lijie Li, Yongqing Xu, Yanjun Zhao, Chun-Guang Liang, Tongli Wei, [1999]
Electronics and Structures for MEMS (cont.)
Vertically sensitive accelerometer and its realization by deep-UV-lithography-supported electroplating
Wenmin Qu, Christian Wenzel, Norbert Urbansky, Andreas Jahn, [1999]
MEMS-IDT-based microaccelerometers and gyroscopes Vijay Varadan, Vasundara Varadan, [1999]
Flowmeters and Flow Control
Synthetic jet actuators for flow control Samuel Mallinson, John Reizes, Guang Hong, M. Buttini, [1999]
Characteristics of a monolithic microvalve with a large-displacement electrostatic actuator Jafar Haji-Babaei, Chee Kwok, [1999]
Analysis Structures: Micromotors
Microengineered open tubular columns for GC analysis Goib Wiranto, Malcolm Haskard, Dennis Mulcahy, David Davey, Ernest Dawes, [1999]
Huber effect and its application to micromotors Yullia Shen, Boon Tay, Benjamin Thompson, Wen Soong, Bruce Davis, Derek Abbott, [1999]
Detailed balance of the Feynman micromotor Derek Abbott, Bruce Davis, Juan Parrondo, [1999]
Microbearings
Versatile microsensor for micromachine applications Pei Lin Yu, Ronald Zmood, [1999]
Design of a micromagnetic bearing actuator LiJiang Qin, Ronald Zmood, [1999]
Micromagnetic bearing for friction minimization in micromachines Muralihar Ghantasala, Dinesh Sood, Ronald Zmood, [1999]
Imaging and Optics
Trade-offs for quenched avalanche photodiode (QAPD) sensors for imaging turbid media Scott Hill, Mark Perkins, Samuel Mickan, Derek Abbott, Jesper Munch, Timothy van Doorn, [1999]
Analysis of system trade-offs for terahertz imaging Samuel Mickan, Derek Abbott, Jesper Munch, Xi-Cheng Zhang, Timothy van Doorn, [1999]
Experimental and theoretical study of the single-beam optical fiber trap Kozo Taguchi, Kentaro Atsuta, Takeshi Nakata, Masahiro Ikeda, [1999]
Electronics and Structures for MEMS (cont.)
Optics and Lasers
3D packaging technology for vision CMOS VLSI: review and performance evaluation Amine Bermak, Abdesselam Bouzerdoum, Kamran Eshraghian, [1999]
Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate
TaeSun Lim, Yong-Kweon Kim, [1999]
RF Mems
Semiconductor-polymer-based rf MEMS Vijay Varadan, Vasundara Varadan, K. Jose, [1999]
Collision avoidance for nanosatellite clusters using millimeter-wave radiometric motion sensors
David Goodfellow, Derek Abbott, [1999]
Poster Session
Phase-locked loop-based microdisplacement/capacitance measurement and control system and its application to MEMS
Shi-Bin Chang, Bruce Chou, J. Chang, [1999]
CMOS low-noise capacitance measurement circuit for micromachined gyroscope Wen Yu, Yong Lim, Francis Tay, Yung Liang, [1999]
Self-biased transconductance amplifier Gilles Amendola, Yves Blanchard, Anne Exertier, Serge Spirkovitch, Guo Lu, George Alquie, [1999]
Micro tactile sensor with capacitive-inductive function for discrimination of object property Katsunori Shida, Ryo Sato, Katsuya Higa, Tanemasa Asano, [1999]
Four-channel readout integrated circuit for imaging laser radar systems Terence Yeow, Brian Craig, Rodney Watson, [1999]
Fabrication of TiNi shape memory actuator for micropump Eiji Makino, Takashi Mitsuya, Takayuki Shibata, [1999]
Design and fabrication of diamond probe for atomic force microscope Takayuki Shibata, Tae Nakatsuji, Kazuya Unno, Eiji Makino, [1999]
Stress analysis of a standard CMOS process Ulrich Munch, V. Ziebart, Henry Baltes, Oliver Paul, Elko Doering, [1999]
Fabrication of stator winding of electromagnetic micromotor with 1-mm diameter Xiaolin Zhao, Chunsheng Yang, Guifu Ding, Mingsheng Zhang, [1999]
Electronics and Structures for MEMS (cont.)
Biological applications of fiber optic trap Kozo Taguchi, Kentaro Atsuta, Takeshi Nakata, Masahiro Ikeda, [1999]
Novel micropump actuated by thin film shape memory alloy Dong Xu, Bingchu Cai, Guifu Ding, Yong Zhou, Aibin Yu, Li Wang, Xiaolin Zhao, [1999]
Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent
Silvana de Souza, Elisabete Galeazzo, Maria da Silva, Rogerio Furlan, Francisco Fernandez, [1999]
Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques
Nam Ngo, Michel Rosa, Denis Sweatman, Sima Dimitrijev, H. Barry Harrison, Andrew Titmarsh, [1999]
Surface-micromachined electrostatic diaphragm micropump Won-Ick Jang, Yong Lee, Chang-Auck Choi, Chi-Hoon Jun, Youn Tae Kim, [1999]
Micropump technology and applications Frank Hartley, [1999]
Development and terrestrial applications of a nano-g accelerometer Frank Hartley, [1999]
Flip-chip process development using recessed bonding pads for laser/MEMS integration Michel Rosa, Decai Sun, [1999]
Device and Process Technologies for MEMS and Microelectronics
Plenary Session
Nonvolatile high-density high-performance phase-change memory Guy Wicker, [1999]
Advanced rf CMOS technology Hiroshi Iwai, Tatsuya Ohguro, Eiji Morifuji, Takashi Yoshitomi, Hideki Kimijima, Hisayo Momose, Kazumi Inoh, Hideaki Nii, Yasuhiro Katsumata, [1999]
Invited Paper Session
MEMS packaging and microassembly challenges Robert Mehalso, [1999]
Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes
Anthony Walton, David Vass, Ian Underwood, Georg Bodammer, David Calton, Kris Seunarine, J. Tom Stevenson, Alan Gundlach, [1999]
Integration of MEMS devices Patrick French, [1999]
High-efficiency silicon solar cells Martin Green, [1999]
Application domains for synchrotron radiation sources of various energies C. Khan Malek, V. Saile, [1999]
Nanometer x-ray lithography F. T. Hartley, C. Khan Malek, [1999]
Microactuators
Multilayered piezoceramic microactuators formed by milling in the green state Urban Simu, Stefan Johansson, [1999]
Lithographic definition of channel and void structures in multilayer PZT microactuators Tobias Rosqvist, Stefan Johansson, [1999]
Fabrication of thin film metallic glass and its application to microactuators Seiichi Hata, Kaiji Sato, Akira Shimokohbe, [1999]
Integration of a microlens on a micro XY-stage Che-Heung Kim, Yong-Kweon Kim, [1999]
3D micromachined devices based on polyimide joint technology Thorbjoern Ebefors, Johan Ulfstedt-Mattsson, Edvard Kaelvesten, Goeran Stemme, [1999]
Device and Process Technologies for MEMS and Microelectronics (c o nt . )
Two-dimensional microscanner actuated by PZT thin film Wenmei Lin, Andreas Schroth, Sohei Matsumoto, Cheng-Kuo Lee, Ryutaro Maeda, [1999]
MEMS Technologies
Transferable silicon nitride microcavities Kevin Winchester, Sue Spaargaren, John Dell, [1999]
Ultralow-stress silicon-rich nitride films for microstructure fabrication MingCheng Cheng, Wei-Gei Ho, Chin Chang, Wen Huang, Ruey-Shing Huang, [1999]
Drop-by-drop deposition of ceramic slurry for fabrication of PZT microstructures Lena Klintberg, Greger Thornell, Stefan Johansson, [1999]
Direct writing of nickel by electrodeposition from various electrolytes Greger Thornell, Anders Jansson, Stefan Johansson, [1999]
Constructing biomolecular motor-powered hybrid NEMS devices George Bachand, Carlo Montemagno, [1999]
Sensors and Photodevices
Thick porous silicon layers as sacrificial material for low-power gas sensors Olaf Bartels, Alexandra Splinter, Uwe Storm, Josef Binder, [1999]
Design and fabrication of novel photodetector arrays Mary Li, Christine Allen, Shahid Aslam, Tina Chen, Fred Finkbeiner, Scott Gordon, Jonathan Kuhn, David Mott, Carl Stahle, Caroline Stahle, Nilesh Tralshawala, Liqin Wang, [1999]
Inertial sensing paradigm using an accelerometer array: XL-array Seo Kim, KukJin Chun, [1999]
Microfabrication and reliability study of sapphire-based Ti/Pt electrodes for thin film gas sensor applications
Wenmin Qu, Wojtek Wlodarski, Michael Austin, [1999]
Excess noise in MWIR photovoltaic detectors fabricated using a new junction formation technology
Muhammad Rais, Charles Musca, John Dell, Jarek Antoszewski, Brett Nener, Lorenzo Faraone, [1999]
Process technologies for high-resolution infrared detectors based on LiTaO3 Volkmar Norkus, Gerald Gerlach, Guenter Hofmann, [1999]
Photolithography
Limiting factors in the production of deep microstructures David Tolfree, William O'Neill, Leslie Tunna, Christopher Sutcliffe, [1999]
Device and Process Technologies for MEMS and Microelectronics (c o nt . )
Diffusion mechanisms in microlithographic thin polymeric films Dan Nicolau, Takahisa Taguchi, Susumu Yoshikawa, [1999]
Monitoring photoresist glass transition temperature versus processing parameters via NMR broad band spectroscopy
Dan Nicolau, Cristina Bercu, Simion Coca, Takahisa Taguchi, [1999]
Micro-optical structures for atom lithography studies Erol Harvey, Tracy Mackin, Brian Dempster, Robert Scholten, [1999]
Nonstandard bleaching behavior in DNQ systems: modeling and lithographic consequences Dan Nicolau, Susumu Yoshikawa, Mircea Dusa, [1999]
Lens FPD and LH effect on CD control of lithography process D. Huang, Chih-Chien Hung, [1999]
Local defect real-time monitor system in lithography Hung-Chih Chen, Tse-Yu Lin, Yao-Chang Chu, Chih-Chien Hung, [1999]
Other Process Issues
Physical and electrical properties of thin dielectrics prepared by photoassisted growth in an NO environment
Phillipe Jamet, H. Barry Harrison, Sima Dimitrijev, Philip Tanner, [1999]
Comparison of wet and dry gate oxides for SiC MOSFETs Philip Tanner, Sima Dimitrijev, H. Barry Harrison, [1999]
Method for manufacturing high-quality gravure plates for printing fine-line electrical circuits Juha Hagberg, Seppo Leppaevuori, [1999]
Self-alignment for microparts assembly using water surface tension Kaiji Sato, Seiichi Hata, Akira Shimokohbe, [1999]
Poster Session
Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope
Won-Ick Jang, Chang-Auck Choi, Yoon Hong, Chi-Hoon Jun, Youn Tae Kim, Jong-Hyun Lee, [1999]
Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant
Guifu Ding, Aibin Yu, Xiaolin Zhao, Dong Xu, Bingchu Cai, Tianhui Shen, [1999]
Fabrication of high-yield Si microdiaphragms using electrochemical etch stop in TMAH/IPA/pyrazine solution
Gwiy-Sang Chung, Chin-Sung Park, Byeong-Kwon Ju, [1999]
Device and Process Technologies for MEMS and Microelectronics (c o nt . )
Fabrication of an uncooled infrared sensor using pyroelectric thin film Yun-Kwon Park, Byeong-Kwon Ju, Heung-Woo Park, Young-Soo Yoon, Sang Yom, Young-Jei Oh, Jung-Ho Park, Sang-Hee Suh, Myung-Hwan Oh, Chul-Ju Kim, [1999]
Oxygen gas sensing and microstructure characterization of sol-gel-prepared MoO3-TiO2 thin films
Yongxiang Li, Muralihar Ghantasala, Kosmas Galatsis, Wojtek Wlodarski, [1999]
Lens temperature and performance correlation analysis Jian-Yuan Chiou, M. Chen, C. Liu, Chih-Chien Hung, [1999]
Stress effect on the via crack of IMD structure in scrubber processing D. Huang, R. Yeh, Tse-Yu Lin, Chih-Chien Hung, T. Lin, Chao-Hsin Chang, Chia-Hsiang Chen, [1999]
Additional Paper from Session 3 (Sensors and Photodevices)
Thin film thermal sensor fabrication and application Hamid Gualous, [1999]
Micromachiend Devices and Components IV Plenary Session
MEMS/MOEMS for lightwave networks: Can little machines make it big? David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, James Walker, [2000]
Bulk micromachining for sensors and actuators Masayoshi Esashi, [2000]
Microsystems for diverse applications using recently developed microfabrication techniques Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij, [2000]
Noninertial Mechanical Devices
Review of viscous damping in micromachined structures Gary Li, Henry Hughes, [2000]
High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution
Robert Zwijze, Remeo Wiegerink, G. Krijnen, J. Berenschot, Meint de Boer, Miko Elwenspoek, [2000]
Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity Xinxin Li, Rongming Lin, Huatsoon Kek, [2000]
Inertial Sensors
New fabrication techniques for high dynamic range tunneling sensors David Chang, Fred Stratton, Randall Kubena, Deborah Vickers-Kirby, Richard Joyce, Thomas Schimert, Roland Gooch, [2000]
Dual beam-mass structure gyroscope micromachined by deep RIE process Heng Yang, Minhang Bao, Hao Yin, Shaoqun Shen, [2000]
Magnetic Devices
Micromechanical detectors for ferromagnetic resonance spectroscopy John Moreland, Pavel Kabos, Albrecht Jander, Markus Loehndorf, Robert McMichael, Chan-Gyu Lee, [2000]
Microresonator modified as magnetic sensor S. Lokhre, Prakash Apte, R. Raajeev, R. Lal, [2000]
Actuators and Flow Sensors
Toward thermal flow-sensing with pL/s resolution Niels Tas, Theo Lammerink, Pele Leussink, J. Berenschot, H. de Bree, Miko Elwenspoek, [2000]
AirJet paper mover: an example of mesoscale MEMS David Biegelsen, Andrew Berlin, Patrick Cheung, Markus Fromherz, David Goldberg, Warren Jackson, Bryan Preas, James Reich, Lars Swartz, [2000]
Micromachined Devices and Components IV (cont.)
Spiral wound transducer Paul Elliott, Stephen Bobbio, Michael Pennington, Stephen Smith, Jason Zara, John Hudak, Jennifer Pagan, Buchanan Rouse, [2000]
Large deflection of out-of-plane magnetic actuators using surface micromachining J.-M. Huang, Kim Liew, Ai Qun Liu, [2000]
Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators
Peter Allen, Noah Boydston, Jeffrey Howard, Simon Ko, Edward Kolesar, Matthew Ruff, Josh Wilken, Richard Wilks, [2000]
CMOS Devices
From research to product: the CMOS MEMS case Henry Baltes, [2000]
Investigation of thermopile using CMOS compatible process and front-side Si bulk etching Chen-Hsun Du, Cheng-Kuo Lee, [2000]
Bio/Chemical Devices
MEMS device for mass market gas and chemical sensors Brian Kinkade, James Daly, Edward Johnson, [2000]
Rapid micro-PCR system for hepatitis C virus amplification Yu-Cheng Lin, Ming-Yuan Huang, Kung-Chia Young, Ting-Tsung Chang, Ching-Yi Wu, [2000]
High-Frequency Devices
Prospective applications of MEMS in wireless communications Hector De Los Santos, [2000]
Optimization of surface-micromachined patch antenna S. Wong, Ban Ooi, Pang Kooi, Tiong-Huat Ng, Ai Qun Liu, [2000]
High frequency of micromechanical resonator via structural modification Yee Loke, Q. Zou, Kim Liew, Ai Qun Liu, [2000]
Assembly and Packaging
Nano-spring arrays for high-density interconnect David Fork, Christopher Chua, Patrick Kim, Linda Romano, Rachel Lau, Lai Wong, Andrew Alimonda, Vicki Geluz, Mark Teepe, Joe Haemer, Mitul Modi, Qi Zhu, Dennis Ma, Suresh Sitaraman, Donald Smith, Sammy Mok, [2000]
Wafer-level surface-mountable chip size packaging for MEMS and ICs Stephane Renard, [2000]
Micromachined Devices and Components IV (cont.)
Poster Session
Development of silicon ultrasonic transducer using micromachining Giosue Caliano, Fabio Galanello, Vittorio Foglietti, Elena Cianci, Alessandro Caronti, [2000]
Low-power micromachined structures for gas sensors with improved robustness Isabel Gracia, Andreas Goetz, Jose Plaza, Carles Cane, Patrice Roetsch, Harald Boettner, Klaus Seibert, [2000]
Planar latch-up microactuator driven by thermoelastic force Jong-Hyun Lee, Myung-Lae Lee, Won-Ick Jang, Chang-Auck Choi, Youn Tae Kim, [2000]
Novel technique of thin photoresist micromachining for submillimeter wave circuits Wai Liu, A. Harkar, [2000]
Electronics and Structures for MEMS II
Plenary Paper
Biomimetic visual detection based on insect neurobiology David O'Carroll, [2001]
Surveying the Field
Nanoelectronic and nanomechanical systems J. Aldridge, Andrew Cleland, R. Knobel, D. Schmidt, C. Yung, [2001]
Australian national networked tele-test facility for integrated systems Kamran Eshraghian, Stefan Lachowicz, Sholeh Eshraghian, [2001]
Systems Issues for MEMS
MEMS- and NEMS-based smart devices and systems Vijay Varadan, [2001]
State of commercialization of MEMS: present and future prospects Alex Hariz, [2001]
Interfacing requirements for MEMS components in system-on-chip methodologies Neil Bergmann, [2001]
Quantum and Neural Computing
Quantum electromechanical systems Gerard Milburn, Rodney Polkinghorne, [2001]
Neural information transfer in a noisy environment Mark McDonnell, Charles Pearce, Derek Abbott, [2001]
Modeling of electrostatic gate operations in the Kane solid state quantum computer Chris Pakes, Cameron Wellard, David Jamieson, Lloyd Hollenberg, Steven Prawer, Andrew Dzurak, Alex Hamilton, Robert Clark, [2001]
Image and Audio Processing
Motion detection algorithms using template model Hung Nguyen, Sreeja Rajesh, Derek Abbott, [2001]
Morphological processor for image applications and its implementation using GaAs technology
Francisco Gonzalez, Oscar Tubio, Felix Tobajas, Valentin de Armas, Roberto Esper-Chain, Roberto Sarmiento, [2001]
Gallium arsenide processing elements for motion estimation full-search algorithm Jose Lopez, P. Cortes, S. Lopez, Roberto Sarmiento, [2001]
Electronics and Structures for MEMS II (cont.)
Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications
Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, Anthony Holland, Kosmas Galatsis, [2001]
Virtual Prototyping
Modeling MEMS manufacturability in virtual prototyping CAD tool Renate Sitte, [2001]
User interface for the virtual reality prototyping of micro-electro-mechanical systems software design tools
Owen Bourne, Renate Sitte, [2001]
Sensor modeling for virtual reality micro-electro-mechanical systems (MEMS) software design tools
Ken Udono, Renate Sitte, [2001]
Virtual reality modeling aid in MEMS design Zhaoyi Li, Renate Sitte, [2001]
Design and modeling of microactuators in MEMS virtual reality prototyping CAD tool Manisah Aumeerally, Renate Sitte, [2001]
RF and GaAs Applications
Terahertz imaging of biological tissue using a chirped probe pulse Bradley Ferguson, Shaohong Wang, Douglas Gray, Derek Abbott, Xi-Cheng Zhang, [2001]
Design of reconfigurable fractal antennas and rf MEMS for spaced-based communication systems
K. Vinoy, Vijay Varadan, [2001]
Thin film characterization using terahertz differential time-domain spectroscopy and double modulation
Samuel Mickan, Kwang-Su Lee, Toh-Ming Lu, Edward Barnat, Jesper Munch, Derek Abbott, Xi-Cheng Zhang, [2001]
Gallium nitride T-ray transmission characteristics Bradley Ferguson, Samuel Mickan, Seth Hubbard, Dimitris Pavlidis, Derek Abbott, [2001]
Differential current mode I/O pads for 2 Gb/s in gallium arsenide Roberto Esper-Chain, Felix Tobajas, Roberto Sarmiento, [2001]
New current-controlled very high value floating CMOS resistor Said Al-Sarawi, [2001]
Electronics and Structures for MEMS II (cont.)
Devices, Circuits, and Structures
ATM over SDH: design of a STM-16c transceiver using GaAs technology Oscar Tubio, Roberto Esper-Chain, Francisco Gonzalez, Felix Tobajas, Valentin de Armas, J. Montiel, Roberto Sarmiento, [2001]
Hybrid design of an application-specific integrated chip for frequency-to-digital conversion Neranjen Ramalingam, Vijay Varadan, [2001]
Low-power high-speed threshold logic and its application to the design of novel carry lookahead adders
Peter Celinski, Jose Lopez, Said Al-Sarawi, Derek Abbott, [2001]
Wireless navigation inertial sensors on a single chip with bluetooth technology Vijay Varadan, K.A. Jose, [2001]
Gallium arsenide multiplierless filter bank for two-dimensional discrete wavelet transform (2D-DWT) computation
Jose Lopez, S. Lalchand, Felix Tobajas, S. Lopez, A. Nunez, Roberto Sarmiento, [2001]
Design and test of a low-drift low-noise large-range micro-accelerometer Wei Su, Mei Li, Xiao-ping He, [2001]
High-performance MEMS bandpass filters for acoustic signal processing applications Shih-Hsorng Shen, Shuenn-Tsong Young, Weileun Fang, [2001]
Influence of initial curvature on micromachined thermal bimorph actuation Chengpeng Hsu, Wensyang Hsu, [2001]
Poster Session
Characterization of a CMOS humidity sensor using different polyimides as sensing films Yanyan Qiu, Carlos Azeredo-Leme, Luis Alcacer, Jose Franca, [2001]
Implementation of visual motion detection with contrast adaptation Patrick Shoemaker, David O'Carroll, Andrew Straw, [2001]
Integrated circuit for SAW and MEMS sensors Wolf-Joachim Fischer, Peter Koenig, Matthias Ploetner, Rudiger Hermann, Helmut Stab, [2001]
Experimental investigation of sensitivity dependence with respect to waveguide position on a micromachined diaphragm in a silicon-based integrated optic pressure sensor
Takeshi Goto, Atsushi Yamada, Masashi Ohkawa, Seishi Sekine, Takashi Sato, [2001]
Miniaturized design of the optical head used for three-dimensional photon storage Guoping Zhang, [2001]
Electronics and Structures for MEMS II (cont.)
Digital vision sensor with pixel level analog-to-digital converter Amine Bermak, Abdesselam Bouzerdoum, Kamran Eshraghian, [2001]
Time-frequency analysis of heart rate variability in elderly people Herbert Sager, Juergen Guntermann, [2001]
Role of interference and entanglement in quantum neural processing Alexandr Ezhov, Gennady Berman, [2001]
Real life: cellular automaton for investigating competition between pleiotropy and redundancy
Teck Hoo, Andrew Ting, Erin O'Neill, Andrew Allison, Derek Abbott, [2001]
Device and Process Technologies for MEMS and Microelectronics II Plenary Paper
Micro-nanosystems by bulk silicon micromachining Masayoshi Esashi, [2001]
Nanofabrication
Micro stereo lithography and fabrication of 3D MEMS and their applications Vijay Varadan, Vasundara Varadan, [2001]
Stereochemistry of carbon nanotubes for electronic applications Mick Wilson, Craig Marshall, Adam Moy, G.S. Kamali Kannangara, [2001]
Single-crystal silicon nanostructure fabrication by scanning probe lithography and anisotropic wet etching
Kow-Ming Chang, Kai-Shyang You, Chia Wu, Jeng Tzong Sheu, [2001]
Smart dielectrics of fluorinated silicon glass prepared by liquid phase deposition method Ching-Fa Yeh, Tien-Fu Chen, Yueh-Chuan Lee, Chien-Hung Liu, Shyue-Shyh Lin, [2001]
Materials
MEMS materials characterization necessary for smart design and fabrication Kazuo Sato, [2001]
III-V-semiconductor-based MOEMS devices for optical telecommunications Michel Garrigues, Jean Louis Leclercq, Pierre Viktorovitch, [2001]
MEMS applications of porous silicon Wolfgang Benecke, Alexandra Splinter, [2001]
Micromachining of TiNi shape memory alloy by excimer laser ablation Sam Davies, Erol Harvey, Hengyi Jin, Jason Hayes, Muralihar Ghantasala, [2001]
Fabrication of mechanical structures using macroporous silicon Hiroshi Ohji, Shinichi Izuo, Patrick French, Kazuhiko Tsutsumi, [2001]
Simple wet etching of GaN Giacinta Parish, Paul Scali, Sue Spaargaren, Brett Nener, [2001]
Shape memory alloy actuators and their reliability Osamu Tohyama, Shigeo Maeda, Kazuhiro Abe, Manabu Murayama, [2001]
Fabrication Techniques
Fabrication of high-aspect-ratio precision MEMS with LIGA using synchrotron radiation Chantal Khan Malek, [2001]
Device and Process Technologies for MEMS and Microelectronics II (cont.)
Development of a systematic recipe set for processing SU8-5 photoresist Deng-Huei Hwang, Yi-Chung Lo, Kanping Chin, [2001]
Fabrication of refractive and diffractive plastic micro-optical components using microcompression molding
Su-dong Moon, Suho Ahn, Shinill Kang, Doo-Sun Choi, Tae-Jin Je, [2001]
MEMS sensor packaging using LTCC substrate technology Harri Kopola, Jaakko Lenkkeri, Kari Kautio, Altti Torkkeli, Outi Rusanen, Tuomo Jaakola, [2001]
Surface micromachining of uncooled infrared imaging array using anisotropic conductive film
Weiguo Liu, Lingling Sun, Weiguang Zhu, Ooi Tan, [2001]
Laser LIGA for serpentine Ni microstructures Hengyi Jin, Erol Harvey, Jason Hayes, Muralihar Ghantasala, Andrew Dowling, Matthew Solomon, Sam Davies, [2001]
µEDM-produced mechanical grippers for handling and assembly in microtechnology Dragan Petrovic, Gordana Popovic, Elias Chatzitheodoridis, Oscar Del Medico, Ana Almansa, Franz Suemecz, Peter Herbst, Werner Brenner, Helmut Detter, Roland Duffait, [2001]
RF and Optical Applications
RFIC's challenges for third-generation wireless systems Olga Boric-Lubecke, Jenshan Lin, Penny Gould, Munawar Kermalli, [2001]
Improving interconnect characteristics of thin film MEMS processes Bruce Duewer, David Winick, Andrew Oberhofer, John Muth, Paul Franzon, [2001]
Electromagnetic remote control and downscaling advantages and examples for MOEMS Gilbert Reyne, Lionel Houlet, Yoshifumi Takahashi, Tarik Bourouina, Hiroyuki Fujita, [2001]
Intelligent star tracker Natalie Clark, [2001]
Micro displacement sensing system and its application to micro magnetic bearings LiJiang Qin, Ronald Zmood, Paul Jones, Dinesh Sood, [2001]
Multiparameter integrated sensor development involving alternate materials Slobodan Rajic, Panos Datskos, [2001]
Systems and Characterization
Microsystem tool for microsystem characterization profile measurement of high-aspect-ratio microstructures
Jean-Bernard Pourciel, Eric Lebrasseur, Tarik Bourouina, Takahisa Masuzawa, Hiroyuki Fujita, [2001]
Device and Process Technologies for MEMS and Microelectronics II (cont.)
Three-terminal test structure to measure stiction force using I-V data Enakshi Bhattacharya, Jinbo Kuang, Michael Judy, Jack Martin, [2001]
Enabling MEMS technologies for communications systems Victor Lubecke, Bradley Barber, Susanne Arney, [2001]
PZT stack etch for MEMS devices in a capacitively coupled high-density plasma reactor Paul Werbaneth, John Almerico, Leslie Jerde, Steve Marks, [2001]
Optical Applications
MEMS for optical networking: vast promises amid vaster promises Shi-sheng Lee, Sangtae Park, Patrick Chu, Chuan Pu, Lih-Yuan Lin, Evan Goldstein, [2001]
Si micromachining for optics: optical components and sensors Kazuhiro Hane, Minoru Sasaki, Jong Hyeong Song, [2001]
Integration of active materials with silicon micromachining: applications to optical MEMS Jean-Philippe Gouy, Yasuhiko Arakawa, Hiroyuki Fujita, [2001]
Antiresonant reflecting optical waveguide surface plasmon resonance sensors Yang-Tung Huang, Wei-Zung Chang, Shih-Hsin Hsu, Chun-Ho Chen, Jou-Chien Chen, [2001]
1D and 2D scanning mirrors using thermal buckle-beam actuation Michael Sinclair, [2001]
Poster Session
Submicron high-aspect-ratio silicon beam etch Gary O'Brien, David Monk, Khalil Najafi, [2001]
Materials and reliability issues in MEMS and microsystems Aristos Christou, [2001]
Thick resist for MEMS processing Joe Brown, Clifford Hamel, [2001]
Fabrication of integrated micromachined polymer magnet Olarn Rojanapornpun, Chee Kwok, [2001]
Anodic alumina as a material for MEMS Kirill Delendik, Olga Voitik, [2001]
Two-way shape memory NiTi sputter-deposited film fabrication Edi Wibowo, Chee Kwok, N. Lovell, [2001]
Processing compatibility of ZnO piezoelectric film with MEMS device Tao Xu, Guoying Wu, Guobing Zhang, Yilong Hao, [2001]
Device and Process Technologies for MEMS and Microelectronics II (cont.)
Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer
Jong-Yeon Park, Kuntae Kim, Sung Moon, Jong-Oh Park, Myung-Hwan Oh, James Jungho Pak, [2001]
Enhanced performance of microbolometer using coupled feed horn antenna Kuntae Kim, Jong-Yeon Park, HoKwan Kang, Jong-Oh Park, Sung Moon, Jung-Ho Park, [2001]
Porous silicon as a sacrificial layer used in rf MEMS Peng Cong, Li-Tian Liu, Yong Ding, [2001]
Micro-machined tunable (Mi-T) VCSEL around 1.3 µm Ali Benmoussa, Jun Tatebayashi, Jean-Philippe Gouy, Hiroyuki Fujita, Yasuhiko Arakawa, [2001]
LIGA fabrication of high-aspect-ratio lobster-eye optics Andrew Peele, Thomas Irving, Keith Nugent, Derrick Mancini, Nicolai Moldovan, Todd Christenson, [2001]
Optical switch array based on microforming process Yusuke Hashiura, Tsuyoshi Ikehara, Akiko Kitajima, Hiroshi Goto, Ryutaro Maeda, [2001]
Copper microcoil arrays for the actuation of optical matrix microswitches Lionel Houlet, Gilbert Reyne, Tetsuhiko Iizuka, Tarik Bourouina, Elizabeth-Dufour Gergam, Hiroyuki Fujita, [2001]
Bonding technologies for silicon scanning mirror having vertical comb fingers Jin-Ho Lee, Young-Chul Ko, Byoung-So Choi, Jong-Min Kim, Duk-Young Jeon, [2001]
Novel accelerometer on (111) substrate with differential electrode Hsin-Hwa Hu, Weileun Fang, [2001]
Single-crystal silicon MEMS microactuator for high-density hard disk drive Jianqiang Mou, Shixin Chen, Yi Lu, [2001]
MEMS-based precision motion control approach to high-throughput-rate electron beam lithography
J. Geoffrey Chase, Bram Smith, [2001]
Low-frequency process for silicon-on-insulator deep reactive ion etching Matthew Wasilik, Albert Pisano, [2001]
Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and vacuum metal casting
Yoichi Murakoshi, Kotaro Hanada, Yaomin Li, Kazuyoshi Uchino, Takaaki Suzuki, Ryutaro Maeda, [2001]
Excimer laser patterning of TiN film from metal sacrificial layers Andrew Dowling, Muralihar Ghantasala, Jason Hayes, Erol Harvey, Derry Doyle, [2001]
Device and Process Technologies for MEMS and Microelectronics II (cont.)
Influence of patterning geometry on the electrodeposition of microstructures fabricated by laser LIGA
Hengyi Jin, Sam Davies, Muralihar Ghantasala, Jason Hayes, Erol Harvey, [2001]
Design and fabrication of a movable O-shape microclamper Chien-Tai Wu, Wensyang Hsu, [2001]
Parameters study to improve sidewall roughness in advanced silicon etch process Hsiang-Chi Liu, Yu-Hsin Lin, Bruce Chou, Yung-Yu Hsu, Wensyang Hsu, [2001]
Microfabrication of hemispherical polysilicon shells standing on hemispherical cavities Cheng-Hsuan Lin, Yi-Chung Lo, Wensyang Hsu, [2001]
Microjoining research and development at CSIRO Simon Doe, [2001]