© 2014

75 Cours Emile Zola, F-69100 Lyon-Villeurbanne, France

Tel: +33 472 83 01 80 - Fax: +33 472 83 01 83

Web: http://www.yole.fr

Sensors for Cellphones and

Tablets

Huge MEMS for Cellphones and Tablets Market Reaching $6.4B by 2019.

Non-MEMS sensors are also exploding!

-SAMPLE-

FLIRInvenSense Freescale

Apple fingerprintHuawei

Samsung

AppleAtmel

© 2014• 2

About the Author

Wenbin Ding

– Wenbin is responsible for MEMS market research at Yole Développement. She

previously worked at research enter CEA, Grenoble France. She holds a

Microelectronics Engineering degree from the National Engineering School in

Caen, plus a Master of Business Administration from IAE Caen, France.

– Contact: ding@yole.fr

© 2014• 3

MEMS for Mobile

Table of Contents

• Introduction, Definitions & Methodology 5

• Executive Summary 13

1. Trends in the Mobile Phone and Tablet Market and Market

drivers 40

2. Sensor Fusion and Sensor Hub 52

– Status of Sensor Fusion in 2013

– Roadmap and Applications

– Sensor Fusion Impact and Value Creation

3. Competitive Landscape of MEMS players 88

4. MEMS in Mobile Phones / Tablets: 2013-2019 Market

Overview 99

– Overview

– 2013-2019 MEMS Market Synthesis

5. Inertial Sensors, Magnetometers 120

– Overview

– MEMS Accelerometers

– MEMS Gyroscopes

– Magnetometers

– 6-axis E-compass

– 6-axis IMU Combos

– 9-axis Combo Solutions

6. MEMS Microphones and Speakers 168

– Silicon Microphones

– Microspeakers

7. Pressure and Humidity Sensors 188

– Pressure Sensors

– Humidity / Temperature Sensors

8. BAW, RF-MEMS and Silicon Timing 208

– BAW Filters and Duplexers

– MEMS Switches and Variable Capacitors

– Silicon MEMS Oscillators / Resonators

© 2014• 4

MEMS for MobileTable of Contents

9. Optical MEMS: Mirrors, Display, AF, IR 263

– IR Sensors and Microbolometers

– Micromirrors for Pico Projectors

– Microdisplays

– MEMS Autofocus

10. Emerging MEMS for Mobile Devices 290

– Bio-Chemical Detectors & Gas Sensors

– MEMS Touchscreen

– Radiation Detectors

– MEMS Fuel Cells

– Energy Harvesting

– Others: UV, Ultrasonic…

11. Other Sensors in Mobile Phones (Non MEMS Technologies) 323

– CMOS Image Sensors

– ALS, Proximity, Color Sensors

– Fingerprint Sensors

• Conclusion and Perspectives 359

© 2014• 5

Objectives of the Report

• The scope of this report covers:

– Main sensors integrated in mobile phones => not only sensors but also actuators

• MEMS accelerometers, MEMS gyroscopes, Magnetometers, 6-axis E-compass, 6-axis IMUs, 9-axis combo solutions, Pressure sensors, MEMS

microphones, BAW filters and duplexers, MEMS switches and variable capacitors, Silicon MEMS oscillators / resonators, Micromirrors for pico

projectors, Microdisplays, MEMS autofocus, Infra-Red sensors, Humidity + Temperature sensors, Emerging MEMS, Image sensors, fingerprint sensors

– All types of mobile phones (smartphones, feature phones and voice phones) + media tablets

• Basic e-readers not taken into account

• Amazon Kindle Fire and B&N Nook Tablet are counted as tablets. They are based on Android OS and provide advanced multimedia functionalities and

possibility to install applications from an app store

• The objectives of this report are the following:

– To provide a global overview of market data for most sensors (MEMS and non-MEMS) used in cell phones and tablets, including key market

metrics & dynamics:

• Unit shipments and revenue by type of sensor

• Average selling price analysis and expected evolution

• Market share with detailed breakdown for each player and major OEM contracts

– To provide an analysis of major technology trends for each device type:

• Current technologies and new development for future generations of products

– To provide a deep analysis of the challenges and opportunities for MEMS sensors and actuators in handsets and tablets:

• Description of the different drivers for integration and historical data on penetration of MEMS

• Which drivers for new sensors, why will it start, what will market adoption be like?

• Different levels of software and trends for sensor fusion: strategies for integration in the system, major software specialists and end-applications

• Insight about architecture changes linked to the emergence of combo solutions and of MEMS data processing

– To provide a clear understanding of the MEMS for mobile phone and tablet market competitive landscape:

• Major players and their main products

• Market share and evolution

– To analyze sensor fusion developments and emerging major end-applications, including indoor navigation and context awareness

© 2014• 6

Who Should Be Interested in This Report?

• MEMS device manufacturers

– Evaluate market potential of future technologies and

products

– Understand the differentiated value of your

products and technologies in this market

– Build a roadmap for modules: which type of

modules? When?

– Identify new business opportunities

– Identify potential strategic partners or technology

providers

– Monitor and benchmark your competitor’s

advancements

• MEMS foundries, material and equipment suppliers,

packaging houses

– Understand what are the applications that will drive

the volumes in 2019

– Identify new business opportunities and prospects

• Specialists of microcontrollers, baseband/ transceiver,

application processor…

– Spot new opportunities and define diversification

strategies linked to sensor / data fusion

• Mobile phone and media tablet OEMs

– Evaluate market potential of future technologies and

products to differentiate your products

– Evaluate the benefits of using these new technologies

in your end system, design architectures for the next

generation of systems

– Screen potential new suppliers able to provide new

functionalities, or cost and size savings

• R&D centers

– Evaluate market potential of future technologies and

products for new applicative markets

– Identify the best candidates for technology transfer

• Financial & strategic investors

– Understand the structure and value chain of the

cellular handset and media tablet industry

– Estimate the potential of new devices such as RF

MEMS tuners, oscillators, autofocus, speakers…

– Get the list of the main key players and emerging start-

ups of this industry worldwide

© 2014• 7

Companies Cited in This Report

AAC Technologies, Analog Devices, Aichi MI, AKM, Alps Electric, Amazon, AMS, Apple,

Aptina Imaging, Asus, Atmel, Audiopixels, AuthenTec, Avago, BlackBerry, BodyMedia,

Boeing, Bosch Sensortec, Broadcom, Canon, Capella, Cavendish Kinetics, CSR, DelfMEMS,

Discera, EPCOS, Excelitas, Fairchild, Fingerprint Cards, Freescale, Fujitsu, Gettop, Goertek,

Google, Hillcrest Labs, HTC, Huawei, IDEX, IDT, Intel, Intersil, InvenSense, Jabra, Jawbone,

Kionix, Knowles Acoustics, Lemoptix, Lenovo, LG, Marvell, Maxim, mCube, Mediatek, MEMS

Vision, MEMSensing Microsystems, Memsic, Micello, Microvision, MiraMEMS, Mobiplex,

Mosoro, Motorola, Movea, Murata, Navisens, Netatmo, NEWCO, Nextinput, Nokia, Nvidia,

NXP, Omnivision, Omron, On Semiconductor, Panasonic, Peregrine, poLight, Pyreos,

Qualcomm, RFMD, Rohm, Samsung, Sand 9, Senodia, Sensirion, SensorPlatforms, Sharp,

Silicon Labs, SiTime, Sony, Spreadtrum, STMicroelectronics, Synkera, Tactus Technology,

TCL, Tessera, Texas Instrument, Toshiba, TreLab, TriQuint, Trusted Positioning, u-blox,

Variable Technologies, Validity Inc., Visioglobe, Wavelens, Wiko, WiSpry, Withings, Wolfson,

Xiaomi, Yamaha, YotaPhone, Yulong, ZTE and many more !

© 2014• 8

Major Changes from the 2013 Report

• MEMS for cell phone and tablet market has grew by more than $300M

– From $2.16B in 2011 to $2.57B in 2012

– Driven by:

• Organic growth of the smartphone / tablet market

• Adoption of more than 1 microphone and combo sensors

• Acceptance of new sensors (pressure sensors) and new types of integration (6-axis combos)

• Some non-MEMS sensors represent also huge opportunities

– Image sensor for mobile phone and tablet market is big and will keep growing fast in the coming years

– Fingerprint sensors are exploding after Apple’s integration

• Other new types of MEMS providing disruptive functions are being developed and will hit the market within a few years

– Biochemical sensors are very hot and rumors say that the new iPhone will integrate biosensors… Samsung already

integrated a biosensor for heart beat monitoring in the Galaxy S5!

– Gas sensors are also discussed a lot recently

• However some types of MEMS have been disappointing so far!

– Some MEMS products have been delayed:

• Humidity sensor is removed by Samsung in the Galaxy S5: market will drop in 2014 and may take off again after…

• Autofocus: still no products in 2013

• Microspeakers: no samples expected in 2013 as technical problems appeared for the first prototypes. Further development is

needed

– Some emerging sensors have just not found successful adoption so far

• Thermopiles, joysticks, RFID, micro fuel cells...: it is not clear that mobile device is the most suitable market for some devices

© 2014• 9

Smartphone OEM Ranking

• Samsung took over Apple for the number 1 spot in smartphone

units

– With a much larger product range

• Apple still very focused with the iPhone

– Successful although latest results were disappointing for many

– Rumors say that this product range could expand to grab more market

share: iPhone mini, model with larger screen, more colors etc.

• Chinese players Huawei and ZTE are increasingly successful with

low cost smartphones

– And increasingly targeting higher-end segments

• Chinese player Lenovo had a successful year because of the

acquisition of Motorola business!

• Nokia has a weak position but expects the Lumia models with the

new Windows Phone 8 platform to takeoff

• Blackberry, having limited success with its OS, has substantially

declined. The launch of Blackberry Z10 could be their last chance.

Samsung31%

Apple15%

Huawei5%

LG5%

Lenovo4%

ZTE4%

Sony4%

Coolpad4%

Nokia3%

HTC3%

Others22%

2013 Smart Phone Market Shares (in volume)- Total = 878M units -

Source Yole développement, IDC, Gartner , Strategy Analytics © May 2014

© 2014• 10

Global Trends and Impact on

MEMS Content(still valid in 2014)

Video / Music consumption

Global trends Impact for cell phones / tablets Impact on MEMS

Diversity of users and usages:

communication, entertainment,

business, fitness…

Multiplication of different platforms,

more differentiation in the form factor

and architectures

LTE

Increasing functionalities

Social networking

Sensor fusion

Stronger specifications for RF

components

Continuous pressure on cost and

size

More sensorsConnected devices: internet

access everywhere

Smartphone growth

Mobile advertisingLocation-based services

Casual AND Immersive gaming

experiences

Need for better performance (inertial,

acoustic…)

Integrated solutions, Combo sensors

Closer integration with processing

(MCUs, Application processor…)

© 2014• 11

Sensor Fusion Application Roadmap

Valuation

Detection

Measurement

Interpretation

Discrete

sensors

6-axis/9-axis +

Basic sensor

fusion:

calibrations…Gesture

monitoring

Context

awareness

Indoor

navigation

Sports

performance

monitoring

Highly

accurate

sensors

Time

Today

+ models + shopping

preferences…

© 2014• 12

Growth of MEMS and non-MEMS

sensors!

32%

68%

2011 MEMS VS. NON MEMS MARKET BREAKDOWN FOR CELL PHONES & TABLETS

(TOT ~US$5B)

MEMS non MEMSYole développement © May 2014

41%

59%

2018 MEMS VS. NON MEMS MARKET BREAKDOWN FOR CELL PHONES & TABLETS

(TOT ~US$13.7B)

MEMS non MEMSYole développement © May 2014

• The non-MEMS sensors market is growing fast!

– CMOS image sensors represent a big market for smartphones and tablets

– Light sensors, proximity sensors are also growing.

– Since Apple integrated a fingerprint sensor, Samsung, Pantech, HTC are also adopting a fingerprint sensor in their latest

smartphones. The market is promising.

• However the MEMS market is growing even faster: reaching more than 40% of the total market by 2018

© 2014• 13

The Cell Phone and Tablet Market Drives

Changes in MEMS Landscape13 of the Top 30 MEMS players already involved in this market

(Up from 11 last year!)

0

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Rev

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($

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Top 30 MEMS Players with focus on the cell phone / tablet revenue- 2013 Revenue ($M) -

Cell phones / tablets Other markets

Yole développement © May 2014

© 2014• 14

Available MEMS Reports

MEMS Cosim+

MEMS Manufacturing

Cost Simulation Tool

Ferro-Electric

Thin Films

Inertial MEMS

Manufacturing

Trends 2014

Thin Wafer

Handling

Technology Trends

for Inertials MEMS

RF Filters, PAs,

Antenna Switches &

Tunability for Cellular

Handsets

Trends in MEMS

Manufacturing &

Packaging

Ferro-Electric

Thin Films

Motion Sensors for

Consumer & Mobile

applications

Uncooled Infrared

Imaging Techology &

Market Trends

IMU & Gyro for

Defense, Aerospace

& Industrial

Status of the

CMOS Image

Sensors

New!New!

Sensor fusion of

acceleros, gyros &

magnetometers

Infrared Detectors

Technology &

Market Trends

New!

New!

MEMS Front-End

Manufacturing

Trends

MEMS for Cell

Phones and Tablets

MEMS Pressure

Sensor

Status of the

MEMS Industry

New!

New!

Emerging MEMS

New!

New!

© 2014• 15

Yole activities in MEMS

www.yolefinance.com

YOLE FINANCE M&A/ Due Diligence/ Fundraising/

Technology brokerage

PARTNERS

CONSULTINGMarket research/Technology

& Strategy/Patent Investigation/

Reverse costing

www.yole.fr

MEDIANews portal/Technology magazines/

Webcasts/Communication services

REPORTSMarket & technology/Patent

Investigation/Reverse costing

Status of the

MEMS Industry

© 2014• 16

Our Offices & Contact Information

Japan Office

• For custom research: Yutaka Katano, General Manager, Yole Japan & President, Yole K.K.

Phone: (81) 362 693 457 - Cell : (81) 80 3440 6466 - Fax: (81) 362 693 448 - Email: katano@yole.fr

• For reports business: Takashi Onozawa, Sales Asia & General Manager, Yole K.K.

Email: onozawa@yole,fr

European and North America Office

• Jean-Christophe Eloy, Email : eloy@yole.fr

• Yole Développement Headquarter, France: David Jourdan, Sales Coordination & Customer

Service, Tel: +33 472 83 01 90, Email: jourdan@yole.fr

Korea Office

• Hailey Yang, Business Development Manager, Phone : (82) 2 2010 883 - Cell: (82) 10 4097 5810

- Fax: (82) 2 2010 8899 – Email: yang@yole.fr

© 2014• 17

For More Information…

Take a look at our websites

www.yole.frYole Développement corporate website

www.i-micronews.comNews Portal - online free registration to our publications

www.systemplus.frSister company expert in teardown & reverse costing analysis

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Follow us on

STMicroelectronics remains the global leader for MEMS in cellphones and tablets, but Knowles, Bosch Sensortec and InvenSense all grew in 2013.

In 2012, Knowles lost market share in the MEMS microphone business due to strong competition from Analog Devices, AAC Technologies and Goertek. Still, it managed to regain market share in 2013 by supplying two microphones in the iPhone 5C and iPhone 5S. However, it is hard to predict what its market share in 2014 will be after recently losing its dispute against Goertek.

The top four players own more than 50% market share in different MEMS & sensors markets. Leading companies are trying to enlarge their MEMS products portfolio in order to supply a bundle

of products to their customers. STMicroelectronics provides inertial sensors, microphones and pressure sensors. Bosch Sensortec is also focused on these products. And in 2013, InvenSense joined in by acquiring Analog Devices’ MEMS microphone business line, and signed a collaboration agreement with Sonion. InvenSense also released a 7-axis combo that integrates pressure sensors inside of a 6-axis IMU.

In these competitive conditions, two questions are key: 1) What strategies will newcomers pursue? 2) What is happening amongst the MEMS players already involved in the mobile phone and tablet market? This report provides the answers. One thing is for certain: new technologies are undoubtedly needed.

The MEMS & sensors for mobile phones and tablets market is growing fast. In fact, the market will expand from $2.85B in 2013 to ~$6.4B in 2019, while shipments will increase from 5.8Bunits to 18.9Bunits!

Only a few devices are close to mature: BAW filters and MEMS accelerometers. Many MEMS, sensors and actuators represent the “milk cow” part of the industry: gyroscopes, duplexers, MEMS microphones, etc. Plus, we have identified 15+ other device categories that are just starting to hit the market or are still in development.

Motion sensors are the market’s largest segment. Stand-alone sensors will likely decline in the next few years - especially discrete accelerometers. Gyroscopes will find its new emerging function: OIS. Combo sensors such as 6-axis IMU and 9-axis combo will drive the future market. Price pressure is very high.

The microphone market is still growing, but should be somewhat limited. Except for Apple, no smartphone makers are integrating three microphones. Thus, in several years this market could be somewhat saturated.

MEMS & Sensors MEMS and Sensors for Mobile Phones and Tablets

COMPETITION BETWEEN MEMS & SENSORS PLAYERS IS FIERCE. HOW CAN NEW COMPANIES ENTER THE FRAY AND BECOME SUCCESSFUL?

A CONTINUOUSLY GROWING MEMS & SENSORS FOR CELLPHONES & TABLETS MARKET, & EVER-DECLINING AVERAGE SALES PRICES!

Market & Technology Report

REPORT OUTLINE• Title: MEMS and Sensors for Mobile Phones and Tablets • May 2014• Market & Technology Report• PDF file• €5,990 - Multi user license (380+ slides)• €3,990 - One user license (380+ slides)

KEY FEATURES OF THE REPORT• Strategy analysis of the mobile phone and tablet market• Sensor fusion and sensor hub status, roadmap and applications• Competitive landscape: market share, products split and evolution for each sensor• Overview and synthesis of the MEMS in mobile phones and tablets market• Detailed sensors applications, market metrics and dynamics, plus developments and future evolution: Inertial sensors, magnetometers and combos / Microphone and speakers / Pressure sensors and humidity sensors / BAW, RF-MEMS and silicon timing / Optical MEMS: micro mirrors, microdisplay, Autofocus, IR sensors / Emerging MEMS: Bio-chemical sensors, touchscreen, fuel cells, energy harvesting / Other sensors: CMOS image sensors, ALS, proximity sensors, fingerprint sensors

Find all our reports on www.i-micronews.com

WHAT’S NEW • Gives update of key market metrics and dynamics 2011-2019• Covers new sensors being adopted by smartphones and tablets• Provides updated information on each product and the competitive landscape in general• Gives a detailed status of sensor hub and sensor fusion in 2013, along with a roadmap and applications.• Predicts sensor fusion’s future impact and value creation

Top 30 MEMS & Sensors players, with a focus on cell phone & tablet revenue

(Yole Développement, May 2014)

The mobile phone and tablet market is growing, and price is decreasing. What’s the best plan for entering this market and building success?

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MEMS and Sensors for Mobile Phones and Tablets

SENSOR FUSION IS THE BUSINESS’S HOTTEST TOPIC!

CMOS IMAGE SENSORS, AMBIENT LIGHT SENSORS, PROXIMITY SENSORS, FINGERPRINT SENSORS AND BIOSENSORS: MORE SENSOR OPPORTUNITIES FOR THE MOBILE PHONES AND TABLETS MARKET!

MEMS & Sensors for cellphones and tablets market

Sensor fusion application roadmap

(Yole Développement, May 2014)

(Yole Développement, May 2014)

Pressure sensors are now used in high volume, but LBS service applications must still be developed. Humidity sensors have been removed from the Samsung Galaxy S5; consequently, we see this market declining significantly in 2014. However, it may take off again if a big smartphone maker decides to reignite it.

BAW duplexers are very popular for LTE RF modules (high frequency and difficult bands in particular). Antenna tuners are now skyrocketing and MEMS technology is positioned to participate in this market. Also, silicon MEMS timing devices should bring a high value proposition for diverse premium timing components such as 32kHz in smartphones, TCXO grade and MCUs.

Regarding optical MEMS, the use of uncooled thermal imagers in cell phones and tablets is still in an early stage for market acceptance. FLIR and Opgal are the two thermal imager solutions providers that have shown products, but other players are developing uncooled IR imagers for consumer applications as well. After pressure and humidity sensors, there could be a market opportunity for IR detectors to provide the spot thermometry function in mobile devices, since the detector measures the surface emissivity of a random external object.

In this report, you will discover more details about every MEMS & sensors device used in mobile phones and tablets.

Sensor hubs are now integrated in high volume: for example, Apple uses a sensor hub in the iPhone 5S. Sensor fusion valuation will increase in the next few years; Fairchild’s acquisition of Xsens for $60M is the first example of such increase. Moreover, it will not be limited to basic function - data interpretation is also possible.

Different elements are required for sensor fusion, including MEMS, sensor hub, software, and low-power RF communication for transmission in some systems.

Sensor fusion could occur at different levels: in individual sensors, in sensor modules, in the sensor hub or in the application process. Yole Développement provides an in-depth analysis of these different possibilities and their value partitioning.

Sensor fusion can enable numerous new applications in mobile phones and tablets: indoor navigation, augmented reality applications and context awareness, which may enable an “always-on” sensor.

This report provides detailed examples of these applications.

We observed very strong growth for non-MEMS sensors, i.e. fingerprint sensors and CMOS image sensors.

The mobile phone market is by far the largest CIS application. In 2013, it represented 66% of the entire CMOS image sensor market in volume and 53% of total revenue. The mobile phone market has been strongly driven by the race towards higher resolution, aiming at reaching a DSC-like image quality for high-end smartphones. Omnivision, Samsung and Sony

will continue to dominate this market due to their advanced technologies, large installed capacity and cost-optimized manufacturing machine.

Light sensors are also growing considerably at the moment. However, this market suffers from strong price erosion due to the low number of OEMs and a lack of innovative options. Combo sensors, long distance and gesture recognition are the three main ways to stabilize margins.

7

Mar

ket

($B

)

3,5

2011 2012 2013 2014 2015 2016 2017 2018 20190

Tablet Cell Phone

Valuation

Detection

Measurement

Interpretation

Discrete sensors

6-axis/9-axis + basic sensor

fusion: calibrations… Gesture

monitoring

Context awareness

Indoor navigation

Sports performance monitoring

Highly accurate sensors

Time

Today

+ models + shopping preferences…

Market & Technology Report

The objectives of the report are to provide:

• A global overview of market data for most sensors (MEMS and non-MEMS) used in cell phones and tablets, including key market metrics and dynamics.

• An overview of major technology trends for each device type.

• A deep analysis of the challenges and opportunities for MEMS, sensors and actuators in handsets and tablets.

• A clear understanding of the MEMS for mobile phones and tablets market’s competitive landscape.

• An analysis of sensor fusion developments and emerging major end-applications, including indoor navigation and context awareness

OBJECTIVES OF THE REPORT

Fingerprint sensors are and will be widely integrated into smartphones following their adoption in Samsung and Apple’s most recent offerings. Asian players have also announced new products with fingerprint scanners: Vivo’s Xplay 3S was unveiled in December 2013 with a 6” 2K display, a powerful audio amp and a fingerprint reader; and Pantech’s latest smartphones, the Vega Secret Up and the Vega Secret Note, both incorporate a fingerprint sensor. In October 2013

HTC launched its HTC One Max, which boasts a

huge 5.9” display and a fingerprint scanner. Yole

Développement believes that fingerprint sensors

for the mobile phones and tablets market will see

huge growth over the next few years.

Moreover, other sensors are expected to be

integrated as well, including gas sensors and

biosensors. This is truly an exciting time to be

part of this industry!

AUTHORS

Dr. Eric Mounier has a PhD in microelectronics from the INPg in grenoble. he previously worked at CEA LETI R&D lab in grenoble, France in marketing dept. Since 1998 he is a co-founder of Yole Developpement, a market research company based in France. At Yole Developpement, Dr. Eric Mounier is in charge of market analysis for MEMS, equipment & material.

Frédéric Breussin is responsible for the MEMS and Sensors activity. He has supported many companies in their innovation and product development strategy in making the bridge between micro systems technologies and their applications in consumer, automotive, industrial, Life sciences, diagnostics and medical device industries. He holds an Engineering diploma from INSA Rouen & a DEA in fluid mechanics from University of Rouen.

• Introduction, definitions & methodology 5

• Executive summary 13

• Trends in the mobile phone and tablet market, plus market drivers 38

• Sensor fusion and sensor hub 50

> Sensor fusion status in 2013 > Roadmap and applications > Sensor fusion impact and value creation

• MEMS players competitive landscape 86

• MEMS in mobile phones/tablets: 2013-2019 market overview 95

> Overview > 2013-2019 MEMS market synthesis

• Inertial sensors, magnetometers 116

> Overview > MEMS accelerometers > MEMS gyroscopes > Magnetometers > 6-axis E-compass > 6-axis IMU combos > 9-axis combo solutions

• MEMS microphones and speakers 164

> Silicon microphones > Microspeakers

• Pressure and humidity sensors 184

> Pressure sensors > Humidity/temperature sensors

• BAW, RF-MEMS and silicon timing 204

> BAW filters and duplexers > MEMS switches and variable capacitors > Silicon MEMS oscillators/resonators

• Optical MEMS: Mirrors, display, AF, IR 260

> IR Sensors and microbolometers > Micromirrors for pico projectors > Microdisplays > MEMS autofocus

• Emerging MEMS for mobile devices 287

> Bio-Chemical detectors and gas sensors > MEMS touchscreen > Radiation detectors > MEMS fuel cells > Energy harvesting > Others: UV, ultrasonic, etc.

• Other sensors in mobile phones (Non-MEMS technologies) 320

> CMOS image sensors > ALS, proximity, color sensors > Fingerprint sensors

• Conclusion and perspectives 382

TABLE OF CONTENTS

COMPANIES CITED IN THE REPORT (non-exhaustive list)AAC Technologies, Analog Devices, Aichi MI, AKM, Alps Electric, Amazon, AMS, Apple, Aptina Imaging, Asus, Atmel, Audiopixels, AuthenTec, Avago, BlackBerry, BodyMedia, Boeing, Bosch Sensortec, Broadcom, Canon, Capella, Cavendish Kinetics, CSR, DelfMEMS, Discera, EPCOS, Excelitas, Fairchild, Fingerprint Cards, Freescale, Fujitsu, Gettop, Goertek, Google, Hillcrest Labs, HTC, Huawei, IDEX, IDT, Intel, Intersil, InvenSense, Jabra, Jawbone, Kionix, Knowles Acoustics, Lemoptix, Lenovo, LG, Marvell, Maxim, mCube, Mediatek, MEMS Vision, MEMSensing Microsystems, Memsic, Micello, Microvision, MiraMEMS, Mobiplex, Mosoro, Motorola, Movea, Murata, Navisens, Netatmo, NEWCO, Nextinput, Nokia, Nvidia, NXP, Omnivision, Omron, On Semiconductor, Panasonic, Peregrine, poLight, Pyreos, Qualcomm, RFMD, Rohm, Samsung, Sand 9, Senodia, Sensirion, SensorPlatforms, Sharp, Silicon Labs, SiTime, Sony, Spreadtrum, STMicroelectronics, Synkera, Tactus Technology, TCL, Tessera, Texas Instruments, Toshiba, TreLab, TriQuint, Trusted Positioning, u-blox, Variable Technologies, Validity Inc., Visioglobe, Wavelens, Wiko, WiSpry, Withings, Wolfson, Xiaomi, Yamaha, YotaPhone, Yulong, ZTE and many more!

With the participation of Wenbin Ding, formerly Technology & Market Analyst, MEMS Devices & Technology at Yole Développement

RELATED REPORTS • Status of the MEMS Industry• MEMS Microphone• 6-9-Axis and other MEMS reverse costing analyses from System Plus Consulting• Emerging MEMS• Apple iPhone 5S Camera Module from Sony

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BY BANK TRANSFERBANK INFO: HSBC, 1 place de la Bourse, F-69002 Lyon, France, Bank code: 30056, Branch code : 00170Account No: 0170 200 1565 87, SWIFT or BIC code: CCFRFRPP, IBAN: FR76 3005 6001 7001 7020 0156 587

RETURN ORDER BY • FAX: +33 (0)472 83 01 83• MAIL: YOLE DÉVELOPPEMENT, Le Quartz,

75 Cours Emile Zola, 69100 Villeurbanne/Lyon - France

SALES CONTACTS • North America: David Jourdan - jourdan@yole.fr• Asia: Takashi Onozawa - onozawa@yole.fr • Europe & RoW: Jean-Christophe Eloy - eloy@yole.fr• Korea: Hailey Yang - yang@yole.fr • General: info@yole.fr

(1) Our Terms and Conditions of Sale are available at www.yole.fr/Terms_and_Conditions_of_Sale.aspx The present document is valid 24 months after its publishing date: May 28th, 2014

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ABOUT YOLE DEVELOPPEMENT

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PRODUCT ORDERPlease enter my order for above named report : One user license*: Euro 3,990 Multi user license: Euro 5,990For price in dollars, please use the day’s exchange rate. All reports are delivered electronically at payment reception. For French customers, add 20% for VAT I hereby accept Yole Développement’s Terms and Conditions of Sale(1)

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*One user license means only one person at the company can use the report. Please be aware that our publication will be watermarked on each page with the name of the recipient and of the organization (the name mentioned on the PO). This watermark will also mention that the report sharing is not allowed.

Founded in 1998, Yole Développement has grown to become a group of companies providing marketing, technology and strategy consulting, media in addition to corporate finance services. With a strong focus on emerging applications using silicon and/or micro manufacturing (technology or process), Yole Développement group has expanded to include more than 50 associates worldwide covering MEMS, Compound Semiconductors, LED, Image Sensors, Optoelectronics, Microfluidics & Medical, Photovoltaics, Advanced Packaging, Manufacturing, Nanomaterials and Power Electronics. The group supports industrial companies, investors and R&D organizations worldwide to help them understand markets and follow technology trends to develop their business.

MEDIA & EVENTS• i-Micronews.com, online disruptive technologies website• @Micronews, weekly e-newsletter• Technology Magazines dedicated to MEMS, Advanced Packaging, LED and Power Electronics• Communication & webcasts services• Events: Yole Seminars, Market Briefings…More information on www.i-micronews.com

CONTACTSFor more information about :• Consulting Services: Jean-Christophe Eloy (eloy@yole.fr)• Financial Services: Géraldine Andrieux-Gustin (andrieux@yole.fr)• Report Business: David Jourdan (jourdan@yole.fr)• Corporate Communication: Sandrine Leroy (leroy@yole.fr)

CONSULTING• Market data & research, marketing analysis• Technology analysis• Reverse engineering & costing services• Strategy consulting• Patent analysisMore information on www.yole.fr

REPORTS• Collection of technology & market reports• Manufacturing cost simulation tools• Component reverse engineering & costing analysis• Patent investigationMore information on www.i-micronews.com/reports

FINANCIAL SERVICES• Mergers & Acquisitions• Due diligence• Fundraising• Coaching of emerging companies• IP portfolio management & optimizationMore information on www.yolefinance.com

Definitions: “Acceptance”: Action by which the Buyer accepts the terms and conditions of sale in their entirety. It is done by signing the purchase order which mentions “I hereby accept Yole’s Terms and Conditions of Sale”.

“Buyer”: Any business user (i.e. any person acting in the course of its business activities, for its business needs) entering into the following general conditions to the exclusion of consumers acting in their personal interests.

“Contracting Parties” or “Parties”: The Seller on the one hand and the Buyer on the other hand.

“Intellectual Property Rights” (“IPR”) means any rights held by the Seller in its Products, including any patents, trademarks, registered models, designs, copyrights, inventions, commercial secrets and know-how, technical information, company or trading names and any other intellectual property rights or similar in any part of the world, notwithstanding the fact that they have been registered or not and including any pending registration of one of the above mentioned rights.

“License”: For the reports and databases, 3 different licenses are proposed. The buyer has to choose one license:• One user license: one person at the company can use the report.• Multi-user license: the report can be used by unlimited users

within the company. Subsidiaries and Joint-Ventures are not included.

• Corporate license: purchased under “Annual Subscription” program, the report can be used by unlimited users within the company. Joint-Ventures are not included.

“Products”: Depending on the purchase order, reports or database on MEMS, CSC, Optics/MOEMS, Nano, bio… to be bought either on a unit basis or as an annual subscription. (i.e. subscription for a period of 12 calendar months). The annual subscription to a package (i.e. a global discount based on the number of reports that the Buyer orders or accesses via the service, a global search service on line on I-micronews and a consulting approach), is defined in the order. Reports are established in PowerPoint and delivered on a PDF format and the database may include Excel files.

“Seller”: Based in Lyon (France headquarters), Yole Développement is a market research and business development consultancy company, facilitating market access for advanced technology industrial projects. With more than 20 market analysts, Yole works worldwide with the key industrial companies, R&D institutes and investors to help them understand the markets and technology trends.

1. SCOPE 1.1 The Contracting Parties undertake to observe the following

general conditions when agreed by the Buyer and the Seller. ANY ADDITIONAL, DIFFERENT, OR CONFLICTING TERMS AND CONDITIONS IN ANY OTHER DOCUMENTS ISSUED BY THE BUYER AT ANY TIME ARE HEREBY OBJECTED TO BY THE SELLER, SHALL BE WHOLLY INAPPLICABLE TO ANY SALE MADE HEREUNDER AND SHALL NOT BE BINDING IN ANY WAY ON THE SELLER.

1.2 This agreement becomes valid and enforceable between the Contracting Parties after clear and non-equivocal consent by any duly authorized person representing the Buyer. For these purposes, the Buyer accepts these conditions of sales when signing the purchase order which mentions “I hereby accept Yole’s Terms and Conditions of Sale”. This results in acceptance by the Buyer.

1.3 Orders are deemed to be accepted only upon written acceptance and confirmation by the Seller, within [7 days] from the date of order, to be sent either by email or to the Buyer’s address. In the absence of any confirmation in writing, orders shall be deemed to have been accepted.

2. MAILING OF THE PRODUCTS 2.1 Products are sent by email to the Buyer:

• within [1] month from the order for Products already released; or • within a reasonable time for Products ordered prior to their effective release. In this case, the Seller shall use its best endeavours to inform the Buyer of an indicative release date and the evolution of the work in progress.

2.2 Some weeks prior to the release date the Seller can propose a pre-release discount to the Buyer The Seller shall by no means be responsible for any delay in respect of article 2.2 above, and including incases where a new event or access to new contradictory information would require for the analyst extra time to compute or compare the data in order to enable the Seller to deliver a high quality Products.

2.3 The mailing of the Product will occur only upon payment by the Buyer, in accordance with the conditions contained in article 3.

2.4. The mailing is operated through electronic means either by email via the sales department or automatically online via an email/password. If the Product’s electronic delivery format is defective, the Seller undertakes to replace it at no charge to the Buyer provided that it is informed of the defective formatting within 90 days from the date of the original download or receipt of the Product.

2.5 The person receiving the Products on behalf of the Buyer shall immediately verify the quality of the Products and their conformity to the order. Any claim for apparent defects or for non-conformity shall be sent in writing to the Seller within 8 days of receipt of the Products. For this purpose, the Buyer agrees to produce sufficient evidence of such defects. .

2.6 No return of Products shall be accepted without prior information to the Seller, even in case of delayed delivery. Any Product returned to the Seller without providing prior information to the Seller as required under article 2.5 shall remain at the Buyer’s risk.

3. PRICE, INVOICING AND PAYMENT 3.1 Prices are given in the orders corresponding to each Product

sold on a unit basis or corresponding to annual subscriptions. They are expressed to be inclusive of all taxes. The prices may be reevaluated from time to time. The effective price is deemed to be the one applicable at the time of the order.

3.2 Yole may offer a pre release discount for the companies willing to acquire in the future the specific report and agreeing on the fact that the report may be release later than the anticipated release date. In exchange to this uncertainty, the company will get a discount that can vary from 15% to 10%.

3.3 Payments due by the Buyer shall be sent by cheque payable to Yole Développement, credit card or by electronic transfer to the following account: HSBC, 1 place de la Bourse 69002 Lyon France Bank code: 30056 Branch code: 00170 Account n°: 0170 200 1565 87BIC or SWIFT code: CCFRFRPP IBAN: FR76 3005 6001 7001 7020 0156 587

To ensure the payments, the Seller reserves the right to request down payments from the Buyer. In this case, the need of down payments will be mentioned on the order. 3.4 Payment is due by the Buyer to the Seller within 30 days

from invoice date, except in the case of a particular written agreement. If the Buyer fails to pay within this time and fails to contact the Seller, the latter shall be entitled to invoice interest in arrears based on the annual rate Refi of the «BCE» + 7 points, in accordance with article L. 441-6 of the French Commercial Code. Our publications (report, database, tool...) are delivered only after reception of the payment.

3.5 In the event of termination of the contract, or of misconduct, during the contract, the Seller will have the right to invoice at the stage in progress, and to take legal action for damages.

4. LIABILITIES 4.1 The Buyer or any other individual or legal person acting on

its behalf, being a business user buying the Products for its business activities, shall be solely responsible for choosing the Products and for the use and interpretations he makes of the documents it purchases, of the results he obtains, and of the advice and acts it deduces thereof.

4.2 The Seller shall only be liable for (i) direct and (ii) foreseeable pecuniary loss, caused by the Products or arising from a material breach of this agreement

4.3 In no event shall the Seller be liable for: a) damages of any kind, including without limitation, incidental or consequential damages (including, but not limited to, damages for loss of profits, business interruption and loss of programs or information) arising out of the use of or inability to use the Seller’s website or the Products, or any information provided on the website, or in the Products; b) any claim attributable to errors, omissions or other inaccuracies in the Product or interpretations thereof.

4.4 All the information contained in the Products has been obtained from sources believed to be reliable. The Seller does not warrant the accuracy, completeness adequacy or reliability of such information, which cannot be guaranteed to be free from errors.

4.5 All the Products that the Seller sells may, upon prior notice to the Buyer from time to time be modified by or substituted with similar Products meeting the needs of the Buyer. This modification shall not lead to the liability of the Seller, provided that the Seller ensures the substituted Product is similar to the Product initially ordered.

4.6 In the case where, after inspection, it is acknowledged that the Products contain defects, the Seller undertakes to replace the defective products as far as the supplies allow and without indemnities or compensation of any kind for labor costs, delays, loss caused or any other reason. The replacement is guaranteed for a maximum of two months starting from the delivery date. Any replacement is excluded for any event as set out in article 5 below.

4.7 The deadlines that the Seller is asked to state for the mailing of the Products are given for information only and are not guaranteed. If such deadlines are not met, it shall not lead to any damages or cancellation of the orders, except for non acceptable delays exceeding [4] months from the stated deadline, without information from the Seller. In such case only, the Buyer shall be entitled to ask for a reimbursement of its first down payment to the exclusion of any further damages.

4.8 The Seller does not make any warranties, express or implied, including, without limitation, those of sale ability and fitness for a particular purpose, with respect to the Products. Although the Seller shall take reasonable steps to screen Products for infection of viruses, worms, Trojan horses or other codes containing contaminating or destructive properties before making the Products available, the Seller cannot guarantee that any Product will be free from infection.

5. FORCE MAJEURE The Seller shall not be liable for any delay in performance directly or indirectly caused by or resulting from acts of nature, fire, flood, accident, riot, war, government intervention, embargoes, strikes, labor difficulties, equipment failure, late deliveries by suppliers or other difficulties which are beyond the control, and not the fault of the Seller.

6. PROTECTION OF THE SELLER’S IPR 6.1 All the IPR attached to the Products are and remain the

property of the Seller and are protected under French and international copyright law and conventions.

6.2 The Buyer agreed not to disclose, copy, reproduce, redistribute, resell or publish the Product, or any part of it to any other party other than employees of its company. The Buyer shall have the right to use the Products solely for its own internal information purposes. In particular, the Buyer shall therefore not use the Product for purposes such as: • Information storage and retrieval systems; • Recordings and re-transmittals over any network (including

any local area network); • Use in any timesharing, service bureau, bulletin board or

similar arrangement or public display; • Posting any Product to any other online service (including

bulletin boards or the Internet);• Licensing, leasing, selling, offering for sale or assigning the

Product. 6.3 The Buyer shall be solely responsible towards the Seller of

all infringements of this obligation, whether this infringement comes from its employees or any person to whom the Buyer has sent the Products and shall personally take care of any related proceedings, and the Buyer shall bear related financial consequences in their entirety.

6.4 The Buyer shall define within its company point of contact for the needs of the contract. This person will be the recipient of each new report in PDF format. This person shall also be responsible for respect of the copyrights and will guaranty that the Products are not disseminated out of the company.

6.5 In the context of annual subscriptions, the person of contact shall decide who within the Buyer, shall be entitled to access on line the reports on I-micronews.com. In this respect, the Seller will give the Buyer a maximum of 10 password, unless the multiple sites organization of the Buyer requires more passwords. The Seller reserves the right to check from time to time the correct use of this password.

6.6 In the case of a multisite, multi license, only the employee of the buyer can access the report or the employee of the companies in which the buyer have 100% shares. As a matter of fact the investor of a company, the joint venture done with a third party etc..cannot access the report and should pay a full license price.

7. TERMINATION 7.1 If the Buyer cancels the order in whole or in part or postpones

the date of mailing, the Buyer shall indemnify the Seller for the entire costs that have been incurred as at the date of notification by the Buyer of such delay or cancellation. This may also apply for any other direct or indirect consequential loss that may be borne by the Seller, following this decision.

7.2 In the event of breach by one Party under these conditions or the order, the non-breaching Party may send a notification to the other by recorded delivery letter upon which, after a period of thirty (30) days without solving the problem, the non-breaching Party shall be entitled to terminate all the pending orders, without being liable for any compensation.

8. MISCELLANEOUS All the provisions of these Terms and Conditions are for the benefit of the Seller itself, but also for its licensors, employees and agents. Each of them is entitled to assert and enforce those provisions against the Buyer. Any notices under these Terms and Conditions shall be given in writing. They shall be effective upon receipt by the other Party. The Seller may, from time to time, update these Terms and Conditions and the Buyer, is deemed to have accepted the latest version of these terms and conditions, provided they have been communicated to him in due time.

9. GOVERNING LAW AND JURISDICTION 9.1 Any dispute arising out or linked to these Terms and Conditions

or to any contract (orders) entered into in application of these Terms and Conditions shall be settled by the French Commercial Courts of Lyon, which shall have exclusive jurisdiction upon such issues.

9.2 French law shall govern the relation between the Buyer and the Seller, in accordance with these Terms and Conditions.

TERMS AND CONDITIONS OF SALES