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1 ©2017 Philips Innovation Services | Confidential
May 8-9, 2017
Polymer Replication on Nanoscale conference, AachenRené Sanders
Manufacturing of shims for microfluidics
2 ©2017 Philips Innovation Services | Confidential
Structure
• Introduction– PInS– Eniac MFM project
• Process flow descrition– Laser ablation– Injection moulding
• Example uF
• Summary and conclusions
3 ©2017 Philips Innovation Services | Confidential
Philips Innovation Services: a short introduction
4 ©2017 Philips Innovation Services | Confidential
Our key areas of expertise
Medical devices & equipment
Connected digital products & systems
Manufacturing processes & systems
Industry consulting
High-precision equipment
MEMS devices & micro-assembly
Design for reliability solutions
Environment & safety
to accelerateyour innovation
5 ©2017 Philips Innovation Services | Confidential
ENIAC project: MFManufacturing
European initiative for the standardization and manufacturability of complex microfluidic (MF) devices
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Exemplary fluidic functions
Name Picture Description
Capillary pump Array of pillars increases capillary force. Channel width 450 µm, depth 50 µm. 40 µm pillars at 150 µm pitch.
Mixer Channel filled with small ribs enhances mixing. Total channel length 160 mm, channel depth = 170 µm, rib height 30 µm.
Standardization = 15x15x1 mm3, fixed in- and outlet dimensions and positions
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Process flow schematic
Polycarbonate master Nickel shim Injection moulded COP part
Dicing into individual partsLaser ablation of uF structures
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Accurate removal of large polymer surface area: 0.01 micron per pulse, mm’s area
Laser ablation with excimer laser
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Results capillairy pump: ablated structure in PC
design
0.80.6 mm
Height measurement
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Mixer
channel rib structure
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Microfluidic mixing channel: height measurement
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19 ©2017 Philips Innovation Services | Confidential
Injection moulding by Axxicon
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Results capillairy pump
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Functional test capillairy pumpTime laps series of capillairy pump working
• 2 seconds per image
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Functional test microfluidic mixing channel
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Summary and guidelines
Item Master excimer
Material Polycarbonate
Workpiece Flat sheet
Draft-angle ~10..15 degrees
Channel depth < 100 microns
Surface roughness 0.05 micron
XY accuracy ± 1 micron
Z-accuracy 0.03 micron
26 ©2017 Philips Innovation Services | Confidential
Acknowledgments
Philips• Thomas de Boer• Robbert van der Waal• Hans van der Schaft• Jo Cuppens• Ben Beerling• Leandra Vermeulen• Maartje van der Zalm• Maurice van der Beek• Peter Bouma
Axxicon• Dirk Verhoeven• Tim van Kampen
“This work was supported by ENIAC Joint Undertaking (JU) under the grant
agreement number 621275”.
27 ©2017 Philips Innovation Services | Confidential
More information?
• Direct contact
René Sanders Technologist, device assembly prototyping +31 6 20 44 92 14 [email protected]
• Visit our website to find out more about:
– Our Microfluidics applications
– Our Laser job shop prototyping services
28 ©2017 Philips Innovation Services | Confidential