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MAGLEV HYBRID TURBOMOLECULAR PUMPSATH-M SERIES
C13.02
MAGLEV HYBRID TURBOMOLECULAR PUMPS
ATH-M SERIES
The ATH-M series are hybrid magnetically levitated turbo pumps.
These very sophisticated high performance and extremely robust pumps arerecognized as the new reference in the world of large turbomolecular pumps.
ATH-M: 400 l/s to 2100 l/sMagnetically levitated turbo pumps
AND WHAT ABOUT PERFORMANCE ?
MY PROCESS REQUIRES A CLEAN, DRY TURBO PUMP
DO YOU OFFER MAINTENANCE FREE TURBO PUMPS ?
HOW RELIABLE ARE YOUR MAGLEV TURBO PUMPS ?
C13.03
These are some of the leading applications where our pumps are in use :
Maintenance-free, high-performance turbo pumps
THE ATH-M ARE CLEAN, DRY PUMPSThe ATH-M magnetically levitated turbomolecular pumps are clean, dry pumps. The magnetic bearing is frictionless and does not require any grease.
THE ATH-M ARE MAINTENANCE FREE ON CLEAN PROCESSESBecause the magnetic bearing of the ATH-M series is maintenance free, the pumps can run for years without any interruption on a clean process. This gives the ATH-M series a significant cost of ownership advantage over ball bearing turbo pumps.
THE ATH-M ARE THE MOST RELIABLE TURBOS ON THE MARKETThe pumping cells of the ATH-M pumps are designed for minimal stress on difficult applications. Furthermore, the pump can accept up to 5 landings at full speed on the emergency dry, back-up bearings.
THE ATH-M OFFERS THE BEST PERFORMANCE/SIZE RATIO ON THE MARKETSophisticated software tools help us develop the highest performing pumps for a given size. The pumps offer either high flow at high pressure or very low ultimate pressures.
• Glass coating
• Micro machining systems
• Ion beam rectification
• Electron microscopy
• Space simulation chambers
• Particle accelerators
• Semiconductor processes(etch, CVD, ion implant)
• Coating and thin films deposition
• Ion milling
• R&D experiments
C13.04
MAGLEV HYBRID TURBOMOLECULAR PUMPS
ATH-M SERIES
2
4
3
1
5
5-axis control A 5-axis magnetic bearing providescontrol of the rotor at high speed.
Automatic balancing systemThis device compensates in real timefor any imbalance of the rotor due toaccumulation of deposits.
Rotor control
Purge An inert gas purge is built into the pump. It may be used to preventcorrosive attack or deposition build-up inside the pumps.
Heating / Cooling The MT model features a temperature management system which controls anintegrated heater band. The heater band and water cooling maintain the pumpinternal surface at a constant temperature (up to 75°C) in order to minimize thecondensation of by-products inside the pump.
Pump protection
Inertial axis
Geometrical axis
Purge
Heater element
Cooling circuit
C13.05
Power failure In the event of a power failure, the ATH-M motor acts as a generator to transform the rotor energy into electrical power to supply the controller.Thus, the rotor remains levitated and slows down, until gently landing on the back-up bearings. No battery is required.
Venting valve The emergency venting valve opens in case of violent shocks or large air-inrushes. The valve brakes the rotor quickly and safely.
Landing The pump emergency back-up bearings can withstand up to 5 landings at fullspeed in the exceptional event of an accidental cable disconnection, or a massive air inrush. The controller monitors the status of the back-up bearing life.
Pump safety
ATH-M cross section
C13.06
MAGLEV HYBRID TURBOMOLECULAR PUMPS
ATH-M SERIES
High throughput at high inlet pressure
The ATH-M are designed for highpressure and high throughput, butalso provide a low ultimate pressure.
Adjustable rotational speed
The ATH-M series features adjustablerotational speed control, optimizing the pumping parameters. For instance, at high pressure, the throughput can be increased if the rotational speed is decreased.
Inlet pressure (Pa)Flow ratesccm
1000010
-110
-21 10
110
310
2
Flow rate versus inlet pressure
1
10
100
1000
10-4
Inlet pressure (mbar)10
-310
-2110
-110
1
Gas : N2
Upper limitsfor continuous operation
ATH 2300 M
ATH 1600 M
ATH 1300 M
ATH 400 M
Inlet pressure (Pa)Pumping speed (l/s)
10-4 10-3 10-2 10-1 1 101 103102
Pumping speed versus inlet pressure
2200
0
500
400
300
200
100
900
1000
1100
1200
1400
800
700
600
1300
1500
1600
1700
1800
1900
2000
2100
Upper limitsfor continuous operation
N2
H2
H2
N2
N2
N2
H2
H2
Inlet pressure (mbar)10-5 10-4 10-310-6 10-2 10-1 1011
ATH 2300 MATH 1600 MATH 1300 MATH 400 M
ISO-K/CF-F/ISO-F 75 °CAny orientation
C13.07
Technical data (measured specifications per PNEUROP standards)
920 1250
DN160 ISO-F DN200 ISO-F
320 410
DN100 ISO-K DN160 ISO-K
ATH 400 MATH 400 MT
ATH 1300 MATH 1300 MT
Rotational speed
Compression ratio
Ultimate pressure
Purging nitrogen flow rate
Maximum continuous exhaust pressure N2
Maximum throughput N2
Maximum heating temperature(MT version)
Vibration level
Recommended Alcatel backing pump
Cooling water flow rate
Cooling water temperature
Mounting orientation
Exhaust flange
N2 purge flange
Start-up time
Pump weight
Controller
Controller weight
Start-up power
Nominal power
Power supply
Pumping speed
Power supply required for the hea-ter band (MT version)
rpm 39000 34000
290 360
180 230
N2
mbar
mbar
sccm
°C
µm
l/min
°C
min
kg (lb)
kg (lb)
VA
W
N2 l/s
He l/s
H2 l/s
810 850
1x107 1x107
8x10-9 8x10-9
50 50
1 0.5
2 1.5
2000 3000
75 75
120 120
0.01 0.01
ADP/ADS ADP/ADS
<3 <5
19 (41.8)
ACT 600 M
8 (18) 8 (18)
650 650
300 300
490 550
H2 1x102 1x102
He 2x103 2x103
< 1
from 15 to 30
Any
DN40 ISO-KF
100-240 V - 50/60 HzSingle phase
200-240 V - 50/60Hz - Single phase
sccm
Inlet flange
Maximum continuous inlet pressure N2 mbar
Maximum Baking temperature °C
1400 1500
ATH 1600 MATH 1600 MT
ATH 2300 MATH 2300 MT
39000
1150 1150
6x107
6x10-9
50
0.2
1.5
2500
75
120
0.01
ADP/ADS
<6
8 (18)
650
300
750 750
3x102
8x103
100 to 120V - 50/60Hzor 200 to 240V - 50/60 Hz
ACT 1300 M ACT 1300 M
DN16 ISO-KF
34 (75.5) 35.5 (78.3)
<10
8 (18)
650
350
ACT 2300 M
46 (102)
2100
DN250 ISO-F
31000
2200
> 109
4x10-9
50
0.15
1.5
2500
75
120
0.01
ADP/ADS
1200
3x103
3x104
DN200 ISO-F DN250 ISO-F
C13.08
MAGLEV HYBRID TURBOMOLECULAR PUMPS
ATH-M SERIES
Especially designed for maglev turbopumps• Very compact: only 1/2 Rack• Very light: only 8 kg (18 lb)• All functions for monitoring
the ATH-M are integrated into the controllers
• Battery free: built-in generator• ACT 600 M compatible with
ATH 400 M• ACT 1300 M compatible with
ATH 1300 M and ATH 1600 M• ACT 2300 M compatible with
ATH 2300 M
Convenient interface• Handy keyboard• Convenient menu with back lit
display of: - rotational speed- pump current- pump and controller temperatures
Modern pump monitoring• Microprocessor controlled• Adjustable low speed mode• Pump and controller monitoring• Pump fault detection• Standard RS 232 / RS 485The RS 232 serial link is used to control and monitor the pumpusing a computer.
Inputs • remote start-stop• remote stand-by• remote interlock
Outputs• pump starting• pump at speed• stand-by on• venting valve on/off• selectable 0 - 10 volts output
for speed, pump current or temperature
Full interchangeability: no pumpto controller matchingAny controller may be used with any ALCATEL maglev pump, without the need for tuning or adjustment.
Built-in heating device to 75°CAll the ACT controllers are equippedwith heater band control output andpump temperature sensor inputs. A simple interconnection between the controller and the ATH 2300 MT, ATH 1600 MT, ATH 1300 MT or ATH 400 MT is necessary to monitorand control the heater band.
ACT 600 M, ACT 1300 M and ACT 2300 M: compact and highly effective electronic monitoring
C13.09
Ordering information
Interconnecting cables (pump to controller)
VOLTAGE/PART NUMBER
104627
103728
103730
103732
105202
1 m
3.5 m
5 m
10 m
15 m
105206
103729
103733
On request20 m On request105204
103731
Heater cables for ATH 400 MT(pump heater and water valve to controller)
Inlet screen for ATH 400 M
PART NUMBERInlet flange DN
056844100 ISO-K
056845100 CF-F
056942160 ISO-K
056928160 CF-F
1029336” ASA
ATH 400 M (unheated pump)
ATH 400 MT (heated pump)
ACT Controller (power supply 100-240 V / 50-60 Hz)
Model For pump PART NUMBER
ACT 600 M ATH 400 M/MT 102539
Inlet flange DNPART
NUMBER
D23121
D23221
D24121
D24221
D28321
D43121
D43221
D44121
D44221
D48321
PART NUMBER
Heater voltage (50/60 Hz)
D53121
D53221
D54121
D54221
D58321
100 ISO-K
100 CF-F
160 ISO-K
160 CF-F
6” ASA
Length PART NUMBER
104624
103719
103720
103721
104587
1 m
3.5 m
5 m
10 m
A21457420 m15 m
Optional cables for 12 VDC air inlet brakingvalve
Length PART NUMBER
105172
105173
105174
105175
A459362
3.5 m
5 m
10 m
15 m
20 m
Length200-240 V - 50/60 Hz
ATH 400 MTModel ATH 400 M
200-240 V100-120 V
110-120 V - 50/60 Hz
NoteIn order to operate the ATH 400 M/MT pumps, the following accessories have to be ordered: Inletscreen, Interconnecting cable, ACT controller and heatercable for MT models.
Note: Air inlet braking valve, 1 m. valve cable and purge flow restrictor included with the ATH 400 M/MT
Note: Power cord is included with ACT 600 M
C13.10
MAGLEV HYBRID TURBOMOLECULAR PUMPS
ATH-M SERIES
Ordering information
ATH 1300 M (unheated pump)
ATH 1300 MT (heated pump)
Inlet flange DN PART NUMBER
160 ISO-K
160 ISO-F
160 CF-F
200 ISO-K
200 ISO-F
200 CF-F
6” ASA
ATH 1300 MTATH 1300 M
6” ASA
200 ISO-K
200 ISO-F
200 CF-F
250 ISO-K
250 CF-F
250 ISO-F
Model
Inlet flange DN PART NUMBER
P2832100
P2512100
P2562100
P2522100
P2612100
P2662100
P2622100
P6832100
P6512100
P6562100
P6522100
P6612100
P6662100
P6622100
ATH 1600 MTATH 1600 MModel
ATH 1600 M (unheated pump)
ATH 1600 MT (heated pump)
250 ISO-K
M6412100
M6462100
M6422100
M6832100
M6512100
M6562100
M6522100
M6612100
M2412100
M2462100
M2422100
M2832100
M2512100
M2562100
M2522100
M2612100
PART NUMBER
Heater voltage100-240 V - 50/60 Hz
Single phase
PART NUMBER
Heater voltage100-240 V - 50/60 Hz
Single phase
ACT Controller and power cordsfor ATH 1300 M/MT and ATH 1600 M/MT(Order controller and power cord USA/EUROPE, separately)
Item
Controller ACT 1300 M 100-240 V
Power cord 2.5 m for EUROPE 100-240 V
Power cord 2.5 m for USA 100-240 V
112123
A328405
802366
PART NUMBER
Mounting Bolts for ATH 1300 M/MT and ATH 1600 M/MT DN 200 and DN 250 flanges**For safety reasons we recommend ordering the high strength bolts and washers specified below
Pump mounting configuration
ISO-F flange - Without Centering Ring
ISO-F flange - With Centering Ring
ISO-K - With Rotatable Flange
Item
Set of 12 ea. M10*30 Grade 12-9 bolts and washers
Set of 12 ea. M10*35 Grade 12-9 bolts and washers
Set of 12 ea. M10*50 Grade 12-9 bolts, nuts and washers
110675
110676
802415
PART NUMBER
Length PART NUMBER
104624
103719
103720
103721
1 m
3.5 m
5 m
10 m
A21457420 m
10458715 m
Interconnecting cables(pump to controller)
Note: Purge flow restrictor is included with the ATH 1300 M/MT and ATH 1600 M/MT pumps.
** For DN 160 ISO-K / ISO-F / CFF and DN 160 / DN 200 / DN 250 CFF flanges, consult factory
NoteIn order to operate the ATH 1300 M/MT and ATH 1600 M/MT pumps, the following accessories have to be ordered: Inlet screen, Interconnecting cable,ACT controller, optional air inlet braking valve and cable, and heater cable for MT models.
C13.11
Ordering information
Length110-120 V - 50/60 Hz
PART NUMBER
Heater cables for ATH 1300 MT and ATH 1600 MT
200-240 V - 50/60 Hz
A328698A
A328698B
A328698C
A328698D
A328698E
A328698F
A328697A
A328697B
A328697C
A328697D
A328697E
A328697F
1 m
3.5 m
5 m
10 m
15 m
20 m
106866Air inlet valve assembly 12 VDC/DN 16
Optional air inlet braking valve for ATH 1300 M/MT and ATH 1600 M/MT
Item PART NUMBER
Inlet screen for ATH 1300 M/MT and ATH 1600 M/MT
Length PART NUMBER
106052
105172
105173
105174
1 m
3.5 m
5 m
10 m
A45936220 m
10517515 m
Cables for 12 VDC air inlet braking valve
Inlet flange DNStainless Steel
PART NUMBER
Aluminium
107820
107747
108872
108762
–
–
109200
109199
6” ASA
160 ISO-K/ISO-F/CF-F
200 ISO-K/ISO-F/CF-F
250 ISO-K/ISO-F/CF-F
For the pumps built before Oct. 99, consult factory.
C13.12
MAGLEV HYBRID TURBOMOLECULAR PUMPS
ATH-M SERIES
Ordering information
ATH 2300 M (unheated pump)
ATH 2300 MT (heated pump)
Inlet flange DN PART NUMBER
200 CF-F
200 ISO-K
200 ISO-F
250 ISO-K
250 CF-F
250 ISO-F
ATH 2300 MTATH 2300 MModel
Q6522100
Q6512100
Q6562100
Q6622100
Q6612100
Q6662100
Q2522100
Q2512100
Q2562100
Q2622100
Q2612100
Q2662100
PART NUMBER
Heater voltage100-240 V - 50/60 Hz
Single phase
ACT Controller for ATH 2300 M/MT(Order controller and power cord, USA/EUROPE, separately)
Item
Controller ACT 2300 M 200-240V
Power cord 2.5 m for EUROPE 200-240 V
Power cord 2.5 m for USA 200-240 V
109015
A328405
802366
PART NUMBER Length PART NUMBER
104624
103719
103720
103721
1 m
3.5 m
5 m
10 m
A21457420 m
10458715 m
Interconnecting cables(pump to controller)
Length 110-120 V50/60 Hz
PART NUMBER
Heater cables for ATH 2300 MT
200-240 V50/60 Hz
A328698A
A328698B
A328698C
A328698D
A328698E
A328698F
A328697A
A328697B
A328697C
A328697D
A328697E
A328697F
1 m
3.5 m
5 m
10 m
15 m
20 m
NoteIn order to operate the ATH 2300 M/MT pumps, the following accessories have to be ordered: Inletscreen, Interconnecting cable, ACT controller, optional air inlet braking valve and cable, and heater cable forMT models.
C13.13
106866Air inlet valve assembly 12 VDC/DN 16
Optional air inlet braking valve for ATH 2300 M/MT
Item PART NUMBER Length PART NUMBER
106052
105172
105173
105174
A459362
1 m
3.5 m
5 m
10 m
20 m
10517515 m
Cables for 12 VDC air inlet braking valve
Mounting Bolts for ATH 2300 M/MT DN 250 flanges*For safety reasons we recommend ordering the high strength bolts and washers specified below
Pump mounting configuration
ISO-F flange - Without Centering Ring
ISO-F flange - With Centering Ring
ISO-K - With Rotatable Flange
Item
Set of 12 ea. M10*30 RDS Grade 12-9 bolts and washers
Set of 12 ea. M10*35 Grade 12-9 bolts and washers
Set of 12 ea. M10*50 Grade 12-9 bolts, nuts and washers
110034
110676
802415
PART NUMBER
* For DN 200 ISO-K / ISO-F / CFF and DN 250 CFF flanges: consult factory.
Ordering information
Inlet screen - Aluminum for ATH 2300 M/MT
Inlet flange DNAluminium
PART NUMBER
Stainless Steel
109200
109199
108872
108762
200 ISO-K/ISO-F/CF-F
250 ISO-K/ISO-F/CF-F
C13.14
MAGLEV HYBRID TURBOMOLECULAR PUMPS
ATH-M SERIES
Dimensions mm (inches)
ATH 1300 M/MT
81.3
(3.2
0)H
N2 Purge portDN16 ISO-KF
128
(5.0
4)
31.5
(1.2
4)
Ø 193.5 (7.62)
Heaterconnection
Water inletand outlet
1/4 NPT FEMALE
ExhaustDN 40 ISO-KF
45°
45°
ATH 400 M/MT
Inlet flange H
DN 100 ISO-K
DN 160 ISO-K
DN 100 CF-F
DN 160 CF-F
ASA - 6”
292.5 (11.52)
272.8 (10.74)
298.9 (11.77)
294.5 (11.59)
279.8 (11.02)
N2 Purge portDN16 ISO-KF
12 (0
.47)
107.
5 (4
.23)
Ø 242 (9.53)
H
Water inletand outlet
1/4 NPT FEMALE
ExhaustDN 40 ISO-KF
Electrical power supply
Inlet flange H
DN 200 ISO-K
DN 200 CF-F
ASA - 6”
DN 250 ISO-K
DN 200 ISO-F
306.9 (12.08)
316.9 (12.48)
346.9 (13.66)
309.9 (12.20)
306.9 (12.08)
DN 160 ISO-K
DN 160 ISO-F
352.7 (13.89)
DN 160 CF-F 365.1 (14.37)
342.7 (13.49)
C13.15
ACT Controllers
112.
5(4
.43)
150 (5.91)
R 50(R 1.97)
453 (17.83)408 (16.06)
54.75(2.16)
109.5 (4.31)219 (8.62)
M 4
132.
5 (5
.22)
122.
4 (4
.82)
5(0
.197
)
ACT 1300 M
PREVIOUS ENTER+
STAND BYSTATUSSTOP
FAULT
START
ATH 2300 M/MT
power supply
Water inletand outlet
1/4 NPT FEMALE
ExhaustDN 40 ISO-KF
Electrical
N2 Purge portDN16 ISO-KF
12 (0
.47)
117.
5 (4
.63)
Ø 256 (10.08)
H
ATH 1600 M/MT
Water inletand outlet
1/4 NPT FEMALE
ExhaustDN 40 ISO-KF
Electrical power supply
N2 Purge portDN16 ISO-KF
12 (0
.47)
126
(4.9
6)
Ø 310 (12.20)
H
Inlet flange H
ASA - 6”
DN 200 ISO-K
DN 200 ISO-F
DN 250 ISO-K
DN 200 CF-F
356.9 (14.05)
316.9 (12.48)
343.4 (13.52)
316.9 (12.48)
316.9 (12.48)
DN 250 CF-F 328.9 (12.95)
DN 250 ISO-F 316.9 (12.48)
Inlet flange H
DN 200 ISO-F
DN 200 ISO-K
DN 250 ISO-K
DN 250 CF-F
DN 250 ISO-F
402.5 (15.85)
402.5 (15.85)
358.5 (14.11)
358.5 (14.11)
402.5 (15.85)
Dimensions mm (inches)
CHINAAlcatel Vacuum Technology Shanghai Tel: (86) 21 5027 0628 Fax: (86) 21 3895 3815
FRANCEAlcatel Vacuum Technology France Tel: 33 (0) 4 50 65 77 77 Fax: 33 (0) 4 50 65 77 89
GERMANYAlcatel Hochvakuum Technik GmbH Tel: (49) 9342 96 10 0 Fax: (49) 9342 96 10 30
I TALYAlcatel Vacuum Systems S.p.a. Tel: (39) 039 686 3855 Fax: (39) 039 667 125
JAPANAlcatel Japan Tel: (81) 44 797 5920 Fax: (81) 44 797 5932
KOREAAlcatel Vacuum Technology KoreaTel: (82) 2 409 6277 Fax: (82) 2 409 6279
NETHERLANDSAlcatel Vacuum TechnologyNetherlandsTel: (31) 306 35 13 60Fax: (31) 306 35 12 21
SINGAPOREAlcatel Singapore Pte LtdTel: (65) 6254 0828Fax: (65) 6254 7018
TAIWANAlcatel Vacuum Technology TaiwanTel: (886) 3 5599 230Fax: (886) 3 5599 231
UNITED KINGDOMAlcatel Vacuum Technology (U.K.) Tel: (44) 1 506 418 000 Fax: (44) 1 506 418 002
USAAlcatel Vacuum Products Tel: (1) 781 331 4200 Fax: (1) 781 331 4230
Alcatel Vacuum Technology98 Avenue de Brogny - BP 2069 - 74009 Annecy Cedex - France - Tel.: 33 (0) 4 50 65 77 77 - Fax: 33 (0) 4 50 65 77 89
www.adixen.com
Part
Num
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584
- Apr
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