legex 300/500/700/900/1200 - mitutoyo · 2012-09-17 · drive axis x beam z spindle air bearing...

LEGEX300/500/700/900/1200

Legex - the ultimate coordinate measuring machine inthe world. Produced by combining Mitutoyo’s longexperience in the field of high-precision metrology andmachining with state-of-the-art technologies in design,electronics, computing, sensors and materials.

CATALOG No. E4172-356

Coordinate Measuring Machines

*Legex 500/700/900

2

Designed for Premium Performance andExceptionally Low Measuring Uncertainty.

High-speed traverse: 200mm/s (7.87"/s)

Wide operating temperature range:18°C to 22°C (64.4°F to 71.6°F)

XYZ measuring range:574: 510x710x460mm

XYZ measuring range:774: 710x710x460mm776: 710x710x610mm


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Ultimate accuracy: MPEE = (0.35+L/1000)µm*



*Legex322: (0.8+2L/1000)µm, Legex12128: (0.6+1.5L/1000)µm

Low measuring force: 0.03N**Using MPP-300Q

High-speed scanning: 120mm/s**Using MPP-300Q or SP80

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BASE DESIGN

FEM structural analysis simulation

Spheroidal graphite ductile cast ironRegular cast iron (gray iron) is a ferroalloy that includes carbon, silicon, manganese,phosphorus, and sulfur, in which the carbon is precipitated as flakes in the ferrite orpearlite material, whereas ductile cast iron is made by adding magnesium and otherelements which precipitates the carbon in spherical form instead and results in an idealmaterial for making castings free of cavities and pin holes (defects) of 0.1mm and larger.Ductile cast iron has high hardness, close to that of steel, as well as excellent ductility,toughness, and wear-resistance characteristics, making it the material of choice for criticalmachine components.

High rigidity

The base of the Legex is made from special spheroidalgraphite ductile cast iron to a sealed-structure designthat provides high rigidity and vibration attenuatingcharacteristics. Mitutoyo engineers used FEM analysisduring the design phase to optimize the finalconfiguration and ensure outstanding geometricaccuracy by minimizing deformations caused by normalmachine operation.

Technologies Incorporated

- Legex 500/700/900/1200 -

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Optional ceramic-coated worktable

Standard hand-flake finished worktable

Integrated Y-axis guide rail

The ceramic-plasma coated Y-axis guide rail is cast as anintegral part of the base to improve rigidity and thermalstability. This design feature practically eliminatesdistortion due to changing machine temperatures.

Attenuation characteristicsThe Legex quickly attenuatestraverse-induced vibrations and soreduces any adverse effect onmeasurements. This characteristicalso allows ultra-high scanningaccuracy to be realized.

Integrated Y-axis guide rail

ζ=0.028=0.028

0.6 0.7Time (s)

m/s

2

0.8 0.90.5-0.6

-0.4

-0.2

-0

0.2

0.40.08s

0.6

The standard worktable is hand-flake finished but aneasy maintenance, ceramic-coated worktable is availableas an option.

WORKTABLE- Legex 500/700/900/1200 -

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CONSTRUCTIONPitch and yaw errors eliminated

The Legex uses a fixed-bridge type structure. This is theideal CMM architecture and virtually eliminates pitch andyaw errors. Most other CMMs use a moving-bridgedesign with a single drive unit under the column, whichtends to cause yawing and pitching during slidemovements.

Fixed-bridge type structure

Moving-bridge type structure

DYNAMIC ACCURACYX- and Y-axis independence and a ‘center of gravity’type drive system

The fixed-bridge design of the Legex allows the axes tooperate totally independently. Movement of the X-axisslide does not change the loading on the Y-axis slide, andso does not cause deformation. Also, the ‘center ofgravity’ type drive system places the drive units near thecenter of gravity of each slide. This feature allows veryhigh speed, highly accurate measurements by reducinginertia-induced deflections during acceleration anddeceleration.

Drive axis

X beam

Z spindle

Air bearing

Drive axis

The centre of gravity of a moving bridgetype machine is moved according to theX-axis motion. This movement of thebridge CG changes the load distributionand therefore alters the consequentialdeformations.

Illustration: Legex 500/700/900/1200Legex 322 uses a special high accuracylinear guide.


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VIBRATION CONTROLIsolating floor vibration

The Legex is hardened against floor induced vibration byuse of ‘air-damped spring isolators’ with an auto-levelingfunction. This virtually eliminates factory floor vibrationsfrom the entire machine structure.

Special floating mechanism

Air-damped spring isolaters

Floating mechanism reduces internal vibration

To reduce the effects of internally generated vibration,the Legex uses a special floating mechanism to coupleeach ballscrew to its guide block. This isolates the slidefrom the servo motor as it turns the ballscrew and thusprevents transmission of motor vibrations, especiallyduring acceleration and deceleration.

Servo motor

Floating mechanism

Sliding nut

Ball screw

Guide block

Pulse generator

Installation positions

- Legex 500/700/900/1200 -

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8µm pitch

Detector

Photoreceptor IC

Index scale

Main scale

LED

0 100-2.00

-1.50

-1.00

-0.50

0.00

0.50

1.00

1.50

2.00

200 300 400 500 600 700 800Measured length (mm)

(0.35+L/1000)µm

Erro

r (µ

m)

-1.0-0.8-0.6-0.4-0.2

00.20.40.60.81.0

Erro

r (m

m)

0 100 200 300 400 500 600 700

0 100 200 300 400 500 600

Indication accuracy of X-axis

Position (mm)

forwardbackward

-1.0-0.8-0.6-0.4-0.2

00.20.40.60.81.0

Erro

r (m

m)

0 100 200 300 400 500 600 700

Indication accuracy of Y-axis

Position (mm)

Position (mm)

forwardbackward

-1.0-0.8-0.6-0.4-0.2

00.20.40.60.81.0

Erro

r (m

m)

Indication accuracy of Z-axisforwardbackward


TEMPERATURE COMPENSATIONEffective over the 18°C to 22°C (64.4°F to 71.6°F)temperature range

While conventional very high accuracy CMMs requirefairly strict temperature controlled environments, theLegex has been designed to improve the thermal stabilityof each component to minimize deformation. In addition,temperature sensors on each axis and for the workpieceitself detect temperature changes in real time and areused to compensate back to 20°C.

Inspection results of volumetric accuracy (MPEE) (ex.: Legex 774)

LENGTH STANDARDLinear glass scales with virtually zero thermalexpansion coefficient

The Legex is equipped with a new crystallized-glass scalewith a resolution of 0.01µm and an ultra-low linearexpansion coefficient of 0.01 x 10-6/K. This virtually zerothermal expansion coefficient means the Legex canmaintain its extreme accuracy in spite of thermalchanges. The scales are also mounted in a unique waythat reduces the hysteresis error to 1/5 that of previousmodels. The inspection chart right shows the hysteresiserror that results from this new mounting method.

Virtually zero thermalexpansion glass scale(4µm/4µm grid)

Standard glass scale

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CRYSTALLIZED-GLASS STANDARD- optional -

Minimizing external thermal influence atcalibration

Thermal insensitivity is also critical to the calibration ofhigh-end machines like a Legex. Mitutoyo offers aspecial calibration standard that uses crystallized-glassgauge blocks with a thermal expansion coefficient of0.08 x 10-6/K - the same material as used for the linearglass scales. Using this standard prevents calibrationerror caused by ambient temperature fluctuations. Allgauge blocks in the standard are measured byinterferometer to 0.00001mm resolution in Mitutoyo’sAccredited Calibration Laboratory (JCSS No. 0030).

TEMPERATURE STABILIZED- optional -

Temperature-stabilized air supply

Generally speaking, temperature compensation andthermally insensitive materials can widen the usablerange of ambient temperature and gradients. Toeliminate a common source of temperature variation, theLegex is also available with a special air-server. In additionto the standard air cleaning and drying functions, this airserver can stabilize the temperature of air drawn from thefactory air supply to 20°C±0.1°C. In combination withthe machine-enclosure design and thermally insensitiveglass scales, temperature-stabilized air supplied to the airbearings can produce the exceptional thermal isolationneeded for low measuring uncertainties. This air supply isalso used for the MPP-300 probe to provide stabilizedscanning.

- Legex 500/700/900/1200 -

- Legex 500/700/900/1200 -

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Application Software

MCOSMOS– Mitutoyo Controlled Open System forModular Operation Support –A wide variety of program modules for eachmanufacturing step, from design to production and toinspection, are available. Not to mention a qualityassurance module, they also include modules thatsupport various types of CAD data processing, in-linemeasurement, data feedback system, and processmanaging system.

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Geometric Measuring Module [GEOPAK]

Geometric Measuring Module [GEOPAK]CAD Based Prismatic Programming Module [CAT300]

Geometric Measuring Module [GEOPAK]CAD Based Prismatic Programming Module [CAT300]3D Scanning Module including Data Transfer Module [SCANPAK]CAD Based 3D Surface Analysis Module [3D-TOL]

MCOSMOS-3

MCOSMOS-2

MCOSMOS-1

Three levels of module configurationMCOSMOS has three choices of module configuration. From the simple MCOSMOS-1 to the advanced MCOSMOS-3,you can choose the best configuration for your measurement applications.

[SCANPAK]Compares measured data obtainedfrom GEOPAK to the nominal datagenerated by a CAD system by the'best-fit’ function.

[GEOPAK]This module is a fully geometricmeasuring program for CMMs.

[CAT300]Creates measurement routines basedon the CAD data for a part before theactual part is made.

[3D-TOL]Allows you to make an immediatecomparison of actual part 3D surfacedata obtained form GEOPAK to thenominal data generated by a CADsystem (VDAFS or IGES data).

Optional Measurement Modules

• Airfoil Analysis Module [MAFIS]• Pure DMIS Import and Export Module [Pure DIMISPAK]• Queue Measurement Module [Q-PAK]• Cylinder Gear Measurement Module [GEARPAK-

Cylinder]• Worm Gear Measurement Module [GEARPAK-Worm]• Bevel/Hypoid Gear Measurement Module [GEARPAK-

Bevel/Hypoid]• Correction Data Feedback Module [CORRECT Plus]• Pointcloud Data Collection Module [TRANSPAK]

• Statistical Process &Evaluation Module[MeasurLink]This module supports avariety of statisticalprocess functions based on the statistical methoddescribed in QS-9000 that is used to identify problemsin manufacturing processes, to analyze them efficientlyin order to improve the manufacturing process or toresolve problems. With MeasurLink, you can build ahighly capable measuring system to help establish anexcellent quality-assurance system on behalf of yourcustomers.

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Z-axis air bearing

X/Y-axis air bearing

Probes and accessories

MPP-300QMitutoyo's MPP-300Q probe can be used for point-to-point measuring and continuous scanning applications. Ifthe workpiece requires the maximum accuracy, the MPP-300Q can offer ‘zero-point’ data acquisition for statisticalmeasurement. In this mode the MPP-300Q obtains themeasurement data after all the CMM slides have come toa complete standstill. This statistical measurement isintended to eliminate dynamic effects on measurement.

The Legex can be used with the MRT320 rotary table asthe 4th axis. It is very efficient for gear, cylinder cam andimpeller measurements.

MRT320

Specifications:• Resolution: 0.01µm• Repeatability ( ): 0.1µm• Scanning accuracy (V2): 0.3µm (3mm/s scanning speed)• Measuring force: 0.03N min.

Point-to-point measurement

High-speed scanning

Specifications:• Table diameter: 320mm• Resolution: 1/10000 degree• Maximum workpiece load: 100kg

- Legex 500/700/900/1200 -

- Legex 500/700/900/1200 -

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PH10MQ

SP80Ultra-high accuracy

scanning probe

TP7MHigh accuracy

touch-trigger probe SP25MHigh accuracy

scanning probeQVP

Vision probe

MetrisLine laser probe

PH6MPH10MQ

Legex 500/700/900/1200 Legex 322Legex 500/700/900/1200

TP7MHigh accuracy

touch-trigger probe SP25MHigh accuracy

scanning probe

Probes

The Legex supports a wide range of probes to cover allyour measurement applications.

SP80 scanning probe120mm/s scanning speed and 500mm long stylus

QVP Vision probe

Scanning result of Metris laser probe

MTP-2000MTP-2000 is Mitutoyo’s original, ultra-high accuracytouch-trigger probe.

Specifications:• Repeatability: 2 <0.15µm• Range: ±X, ±Y, +Z• Probing error: 0.5µm

- Legex 500/700/900/1200 -

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ZI

GF

EE

A

X

H

D

C

B (Supporting point)(Supporting point)

Y

784 876

969.

5

408 (289)179224 224

237

Model X Y Z A B C D E F G H ILegex 574 510mm 710mm 455mm 2540mm 1390mm 1586mm 1436mm 445mm 647mm 745mm 2595mm 251mmLegex 774 710mm 710mm 455mm 2596mm 1410mm 1856mm 1686mm 560mm 600mm 745mm 2585mm 241mmLegex 776 710mm 710mm 605mm 2596mm 1410mm 1856mm 1686mm 560mm 600mm 895mm 2885mm 257mmLegex 9106 910mm 1010mm 605mm 3250mm 1780mm 2056mm 1886mm 660mm 732mm 905mm 3030mm 251mmLegex 12128 1210mm 1210mm 805mm 3622mm 1910mm 2356mm 2186mm 780mm 870mm 1081mm 3590.5mm 251mm

Technical Data

DimensionsLegex 500/700/900/1200

Legex 322

15

A

B600 600

600 800

700

FE

C

D

750

1000 600

1000

G 50

Main unit

Air hose

Front

Signal line

Unit: mm

PC

Supporting leg

Controller

Floor layout

Specifications

Model Legex 322 Legex 574 Legex 774 Legex 776 Legex 9106 Legex 12128

Measuring range X axis 300mm 510mm 710mm 710mm 910mm 1210mmY axis 200mm 710mm 710mm 710mm 1010mm 1210mmZ axis 200mm 455mm 455mm 610mm 610mm 805mm

Measurement standard Ultra-high precision linear encoderResolution 0.00001mmAccuracy MPEE (0.8+2L/1000)µm (0.35+L/1000)µm, L: measured length (mm) (0.6+1.5L/1000)µm

(ISO 10360-2)* MPEP 1.0µm 0.45µm 0.6µmMPETHP - 1.4µm 1.8µm

Guide method Linear hearing Air bearingsMaximum drive speed 200mm/sMaximum acceleration 600mm/s2 1000mm/s2

Worktable Material Cast iron (ceramic coating: optional)Working area 399x271mm 550x750mm 750x750mm 750x750mm 950x1050mm 1250x1250mmTapped inserts M8x1.25mm (for workpiece clamping)

Maximum workpiece height 210mm 706mm 696mm 876mm 861mm 1056mmMaximum worktable loading 15kgf 250kgf 500kgf 500kgf 800kgf 1000kgfAir pressure, consumption - 0.4MPa (4kgf/cm2), 120L/min (normal state) 0.5Mpa, 120L/min 0.4Mpa, 120L/minMass 260kg 3500kg 5000kg 5100kg 6500kg 10500kg*Probe used: TP7M (Legex 322), MPP-300Q probe (Legex 500/700/900/1200) Temperature limits: 18°C/64.4°F to 22°C/71.6°F (range), 0.5°K/hour (variation), 1°K/m (gradient)

Model A B C D E F G

Legex 574 4086mm 1436mm 4140mm 2540mm 368mm 1390mm 890mm





Mitutoyo Corporation20-1, Sakado 1-Chome,Takatsu-ku, Kawasaki-shi,Kanagawa 213-8533, JapanPhone (044) 813-8230Fax (044) 813-8231http://www.mitutoyo.co.jp

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Note:All our product details, in particular the illustrations, drawings,dimension and performance details and other technicalspecifications contained in this publication are to be consideredto be approximate average values. To this extent, we reservethe right to make changes in design, technical data, dimensionsand weight. Our specified standards, similar technical rulesand technical specifications, descriptions and illustrations of theproducts are correct at the time of printing. The current versionof our general terms and conditions also apply. Only offers whichwe have submitted can be considered to be definitive.

legex 300/500/700/900/1200 - mitutoyo · 2012-09-17 · drive axis x beam z spindle air bearing...

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