LEGEX300/500/700/900/1200
Legex - the ultimate coordinate measuring machine inthe world. Produced by combining Mitutoyo’s longexperience in the field of high-precision metrology andmachining with state-of-the-art technologies in design,electronics, computing, sensors and materials.
CATALOG No. E4172-356
Coordinate Measuring Machines
*Legex 500/700/900
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Designed for Premium Performance andExceptionally Low Measuring Uncertainty.
High-speed traverse: 200mm/s (7.87"/s)
Wide operating temperature range:18°C to 22°C (64.4°F to 71.6°F)
XYZ measuring range:574: 510x710x460mm
XYZ measuring range:774: 710x710x460mm776: 710x710x610mm
XYZ measuring range:322: 300x200x200mm
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Ultimate accuracy: MPEE = (0.35+L/1000)µm*
XYZ measuring range:9106: 910x1010x610mm
XYZ measuring range:12128: 1210x1210x810mm
*Legex322: (0.8+2L/1000)µm, Legex12128: (0.6+1.5L/1000)µm
Low measuring force: 0.03N**Using MPP-300Q
High-speed scanning: 120mm/s**Using MPP-300Q or SP80
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BASE DESIGN
FEM structural analysis simulation
Spheroidal graphite ductile cast ironRegular cast iron (gray iron) is a ferroalloy that includes carbon, silicon, manganese,phosphorus, and sulfur, in which the carbon is precipitated as flakes in the ferrite orpearlite material, whereas ductile cast iron is made by adding magnesium and otherelements which precipitates the carbon in spherical form instead and results in an idealmaterial for making castings free of cavities and pin holes (defects) of 0.1mm and larger.Ductile cast iron has high hardness, close to that of steel, as well as excellent ductility,toughness, and wear-resistance characteristics, making it the material of choice for criticalmachine components.
High rigidity
The base of the Legex is made from special spheroidalgraphite ductile cast iron to a sealed-structure designthat provides high rigidity and vibration attenuatingcharacteristics. Mitutoyo engineers used FEM analysisduring the design phase to optimize the finalconfiguration and ensure outstanding geometricaccuracy by minimizing deformations caused by normalmachine operation.
Technologies Incorporated
- Legex 500/700/900/1200 -
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Optional ceramic-coated worktable
Standard hand-flake finished worktable
Integrated Y-axis guide rail
The ceramic-plasma coated Y-axis guide rail is cast as anintegral part of the base to improve rigidity and thermalstability. This design feature practically eliminatesdistortion due to changing machine temperatures.
Attenuation characteristicsThe Legex quickly attenuatestraverse-induced vibrations and soreduces any adverse effect onmeasurements. This characteristicalso allows ultra-high scanningaccuracy to be realized.
Integrated Y-axis guide rail
ζ=0.028=0.028
0.6 0.7Time (s)
m/s
2
0.8 0.90.5-0.6
-0.4
-0.2
-0
0.2
0.40.08s
0.6
The standard worktable is hand-flake finished but aneasy maintenance, ceramic-coated worktable is availableas an option.
WORKTABLE- Legex 500/700/900/1200 -
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CONSTRUCTIONPitch and yaw errors eliminated
The Legex uses a fixed-bridge type structure. This is theideal CMM architecture and virtually eliminates pitch andyaw errors. Most other CMMs use a moving-bridgedesign with a single drive unit under the column, whichtends to cause yawing and pitching during slidemovements.
Fixed-bridge type structure
Moving-bridge type structure
DYNAMIC ACCURACYX- and Y-axis independence and a ‘center of gravity’type drive system
The fixed-bridge design of the Legex allows the axes tooperate totally independently. Movement of the X-axisslide does not change the loading on the Y-axis slide, andso does not cause deformation. Also, the ‘center ofgravity’ type drive system places the drive units near thecenter of gravity of each slide. This feature allows veryhigh speed, highly accurate measurements by reducinginertia-induced deflections during acceleration anddeceleration.
Drive axis
X beam
Z spindle
Air bearing
Drive axis
The centre of gravity of a moving bridgetype machine is moved according to theX-axis motion. This movement of thebridge CG changes the load distributionand therefore alters the consequentialdeformations.
Illustration: Legex 500/700/900/1200Legex 322 uses a special high accuracylinear guide.
Technologies Incorporated
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VIBRATION CONTROLIsolating floor vibration
The Legex is hardened against floor induced vibration byuse of ‘air-damped spring isolators’ with an auto-levelingfunction. This virtually eliminates factory floor vibrationsfrom the entire machine structure.
Special floating mechanism
Air-damped spring isolaters
Floating mechanism reduces internal vibration
To reduce the effects of internally generated vibration,the Legex uses a special floating mechanism to coupleeach ballscrew to its guide block. This isolates the slidefrom the servo motor as it turns the ballscrew and thusprevents transmission of motor vibrations, especiallyduring acceleration and deceleration.
Servo motor
Floating mechanism
Sliding nut
Ball screw
Guide block
Pulse generator
Installation positions
- Legex 500/700/900/1200 -
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8µm pitch
Detector
Photoreceptor IC
Index scale
Main scale
LED
0 100-2.00
-1.50
-1.00
-0.50
0.00
0.50
1.00
1.50
2.00
200 300 400 500 600 700 800Measured length (mm)
(0.35+L/1000)µm
Erro
r (µ
m)
-1.0-0.8-0.6-0.4-0.2
00.20.40.60.81.0
Erro
r (m
m)
0 100 200 300 400 500 600 700
0 100 200 300 400 500 600
Indication accuracy of X-axis
Position (mm)
forwardbackward
-1.0-0.8-0.6-0.4-0.2
00.20.40.60.81.0
Erro
r (m
m)
0 100 200 300 400 500 600 700
Indication accuracy of Y-axis
Position (mm)
Position (mm)
forwardbackward
-1.0-0.8-0.6-0.4-0.2
00.20.40.60.81.0
Erro
r (m
m)
Indication accuracy of Z-axisforwardbackward
Technologies Incorporated
TEMPERATURE COMPENSATIONEffective over the 18°C to 22°C (64.4°F to 71.6°F)temperature range
While conventional very high accuracy CMMs requirefairly strict temperature controlled environments, theLegex has been designed to improve the thermal stabilityof each component to minimize deformation. In addition,temperature sensors on each axis and for the workpieceitself detect temperature changes in real time and areused to compensate back to 20°C.
Inspection results of volumetric accuracy (MPEE) (ex.: Legex 774)
LENGTH STANDARDLinear glass scales with virtually zero thermalexpansion coefficient
The Legex is equipped with a new crystallized-glass scalewith a resolution of 0.01µm and an ultra-low linearexpansion coefficient of 0.01 x 10-6/K. This virtually zerothermal expansion coefficient means the Legex canmaintain its extreme accuracy in spite of thermalchanges. The scales are also mounted in a unique waythat reduces the hysteresis error to 1/5 that of previousmodels. The inspection chart right shows the hysteresiserror that results from this new mounting method.
Virtually zero thermalexpansion glass scale(4µm/4µm grid)
Standard glass scale
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CRYSTALLIZED-GLASS STANDARD- optional -
Minimizing external thermal influence atcalibration
Thermal insensitivity is also critical to the calibration ofhigh-end machines like a Legex. Mitutoyo offers aspecial calibration standard that uses crystallized-glassgauge blocks with a thermal expansion coefficient of0.08 x 10-6/K - the same material as used for the linearglass scales. Using this standard prevents calibrationerror caused by ambient temperature fluctuations. Allgauge blocks in the standard are measured byinterferometer to 0.00001mm resolution in Mitutoyo’sAccredited Calibration Laboratory (JCSS No. 0030).
TEMPERATURE STABILIZED- optional -
Temperature-stabilized air supply
Generally speaking, temperature compensation andthermally insensitive materials can widen the usablerange of ambient temperature and gradients. Toeliminate a common source of temperature variation, theLegex is also available with a special air-server. In additionto the standard air cleaning and drying functions, this airserver can stabilize the temperature of air drawn from thefactory air supply to 20°C±0.1°C. In combination withthe machine-enclosure design and thermally insensitiveglass scales, temperature-stabilized air supplied to the airbearings can produce the exceptional thermal isolationneeded for low measuring uncertainties. This air supply isalso used for the MPP-300 probe to provide stabilizedscanning.
- Legex 500/700/900/1200 -
- Legex 500/700/900/1200 -
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Application Software
MCOSMOS– Mitutoyo Controlled Open System forModular Operation Support –A wide variety of program modules for eachmanufacturing step, from design to production and toinspection, are available. Not to mention a qualityassurance module, they also include modules thatsupport various types of CAD data processing, in-linemeasurement, data feedback system, and processmanaging system.
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Geometric Measuring Module [GEOPAK]
Geometric Measuring Module [GEOPAK]CAD Based Prismatic Programming Module [CAT300]
Geometric Measuring Module [GEOPAK]CAD Based Prismatic Programming Module [CAT300]3D Scanning Module including Data Transfer Module [SCANPAK]CAD Based 3D Surface Analysis Module [3D-TOL]
MCOSMOS-3
MCOSMOS-2
MCOSMOS-1
Three levels of module configurationMCOSMOS has three choices of module configuration. From the simple MCOSMOS-1 to the advanced MCOSMOS-3,you can choose the best configuration for your measurement applications.
[SCANPAK]Compares measured data obtainedfrom GEOPAK to the nominal datagenerated by a CAD system by the'best-fit’ function.
[GEOPAK]This module is a fully geometricmeasuring program for CMMs.
[CAT300]Creates measurement routines basedon the CAD data for a part before theactual part is made.
[3D-TOL]Allows you to make an immediatecomparison of actual part 3D surfacedata obtained form GEOPAK to thenominal data generated by a CADsystem (VDAFS or IGES data).
Optional Measurement Modules
• Airfoil Analysis Module [MAFIS]• Pure DMIS Import and Export Module [Pure DIMISPAK]• Queue Measurement Module [Q-PAK]• Cylinder Gear Measurement Module [GEARPAK-
Cylinder]• Worm Gear Measurement Module [GEARPAK-Worm]• Bevel/Hypoid Gear Measurement Module [GEARPAK-
Bevel/Hypoid]• Correction Data Feedback Module [CORRECT Plus]• Pointcloud Data Collection Module [TRANSPAK]
• Statistical Process &Evaluation Module[MeasurLink]This module supports avariety of statisticalprocess functions based on the statistical methoddescribed in QS-9000 that is used to identify problemsin manufacturing processes, to analyze them efficientlyin order to improve the manufacturing process or toresolve problems. With MeasurLink, you can build ahighly capable measuring system to help establish anexcellent quality-assurance system on behalf of yourcustomers.
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Z-axis air bearing
X/Y-axis air bearing
Probes and accessories
MPP-300QMitutoyo's MPP-300Q probe can be used for point-to-point measuring and continuous scanning applications. Ifthe workpiece requires the maximum accuracy, the MPP-300Q can offer ‘zero-point’ data acquisition for statisticalmeasurement. In this mode the MPP-300Q obtains themeasurement data after all the CMM slides have come toa complete standstill. This statistical measurement isintended to eliminate dynamic effects on measurement.
The Legex can be used with the MRT320 rotary table asthe 4th axis. It is very efficient for gear, cylinder cam andimpeller measurements.
MRT320
Specifications:• Resolution: 0.01µm• Repeatability ( ): 0.1µm• Scanning accuracy (V2): 0.3µm (3mm/s scanning speed)• Measuring force: 0.03N min.
Point-to-point measurement
High-speed scanning
Specifications:• Table diameter: 320mm• Resolution: 1/10000 degree• Maximum workpiece load: 100kg
- Legex 500/700/900/1200 -
- Legex 500/700/900/1200 -
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PH10MQ
SP80Ultra-high accuracy
scanning probe
TP7MHigh accuracy
touch-trigger probe SP25MHigh accuracy
scanning probeQVP
Vision probe
MetrisLine laser probe
PH6MPH10MQ
Legex 500/700/900/1200 Legex 322Legex 500/700/900/1200
TP7MHigh accuracy
touch-trigger probe SP25MHigh accuracy
scanning probe
Probes
The Legex supports a wide range of probes to cover allyour measurement applications.
SP80 scanning probe120mm/s scanning speed and 500mm long stylus
QVP Vision probe
Scanning result of Metris laser probe
MTP-2000MTP-2000 is Mitutoyo’s original, ultra-high accuracytouch-trigger probe.
Specifications:• Repeatability: 2 <0.15µm• Range: ±X, ±Y, +Z• Probing error: 0.5µm
- Legex 500/700/900/1200 -
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ZI
GF
EE
A
X
H
D
C
B (Supporting point)(Supporting point)
Y
784 876
969.
5
408 (289)179224 224
237
Model X Y Z A B C D E F G H ILegex 574 510mm 710mm 455mm 2540mm 1390mm 1586mm 1436mm 445mm 647mm 745mm 2595mm 251mmLegex 774 710mm 710mm 455mm 2596mm 1410mm 1856mm 1686mm 560mm 600mm 745mm 2585mm 241mmLegex 776 710mm 710mm 605mm 2596mm 1410mm 1856mm 1686mm 560mm 600mm 895mm 2885mm 257mmLegex 9106 910mm 1010mm 605mm 3250mm 1780mm 2056mm 1886mm 660mm 732mm 905mm 3030mm 251mmLegex 12128 1210mm 1210mm 805mm 3622mm 1910mm 2356mm 2186mm 780mm 870mm 1081mm 3590.5mm 251mm
Technical Data
DimensionsLegex 500/700/900/1200
Legex 322
15
A
B600 600
600 800
700
FE
C
D
750
1000 600
1000
G 50
Main unit
Air hose
Front
Signal line
Unit: mm
PC
Supporting leg
Controller
Floor layout
Specifications
Model Legex 322 Legex 574 Legex 774 Legex 776 Legex 9106 Legex 12128
Measuring range X axis 300mm 510mm 710mm 710mm 910mm 1210mmY axis 200mm 710mm 710mm 710mm 1010mm 1210mmZ axis 200mm 455mm 455mm 610mm 610mm 805mm
Measurement standard Ultra-high precision linear encoderResolution 0.00001mmAccuracy MPEE (0.8+2L/1000)µm (0.35+L/1000)µm, L: measured length (mm) (0.6+1.5L/1000)µm
(ISO 10360-2)* MPEP 1.0µm 0.45µm 0.6µmMPETHP - 1.4µm 1.8µm
Guide method Linear hearing Air bearingsMaximum drive speed 200mm/sMaximum acceleration 600mm/s2 1000mm/s2
Worktable Material Cast iron (ceramic coating: optional)Working area 399x271mm 550x750mm 750x750mm 750x750mm 950x1050mm 1250x1250mmTapped inserts M8x1.25mm (for workpiece clamping)
Maximum workpiece height 210mm 706mm 696mm 876mm 861mm 1056mmMaximum worktable loading 15kgf 250kgf 500kgf 500kgf 800kgf 1000kgfAir pressure, consumption - 0.4MPa (4kgf/cm2), 120L/min (normal state) 0.5Mpa, 120L/min 0.4Mpa, 120L/minMass 260kg 3500kg 5000kg 5100kg 6500kg 10500kg*Probe used: TP7M (Legex 322), MPP-300Q probe (Legex 500/700/900/1200) Temperature limits: 18°C/64.4°F to 22°C/71.6°F (range), 0.5°K/hour (variation), 1°K/m (gradient)
Model A B C D E F G
Legex 574 4086mm 1436mm 4140mm 2540mm 368mm 1390mm 890mm
Legex 774 4336mm 1686mm 4196mm 2596mm 378mm 1410mm 1120mm
Legex 776 4336mm 1686mm 4850mm 3250mm 378mm 1410mm 1120mm
Legex 9106 4536mm 1886mm 4850mm 3250mm 420mm 1780mm 1320mm
Legex 12128 4836mm 2186mm 5222mm 3622mm 435mm 1910mm 1560mm
Mitutoyo Corporation20-1, Sakado 1-Chome,Takatsu-ku, Kawasaki-shi,Kanagawa 213-8533, JapanPhone (044) 813-8230Fax (044) 813-8231http://www.mitutoyo.co.jp
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Note:All our product details, in particular the illustrations, drawings,dimension and performance details and other technicalspecifications contained in this publication are to be consideredto be approximate average values. To this extent, we reservethe right to make changes in design, technical data, dimensionsand weight. Our specified standards, similar technical rulesand technical specifications, descriptions and illustrations of theproducts are correct at the time of printing. The current versionof our general terms and conditions also apply. Only offers whichwe have submitted can be considered to be definitive.