intro to mass spectrum analysis

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    Quadrupole Mass SpectrometryConcepts

    Mass Spectrometers for Residual

    Gas Analysis

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    Residual Gas Analysis

    Faraday:torr

    0

    1e-06

    2e-06

    3e-06

    4e-06

    5e-06

    6e-06

    7e-06

    8e-06

    9e-06

    1e-05

    1.1e-05

    0 5 10 15 20 25 30 35 40 45 50

    7x 10-6 torr

    1 !r"on

    What does Residual Gas Analysis allow us to do?

    RGA is the examination of the molecular components present in

    a vessel or evolved from a system.

    It allows us to analyse, ON-LIN

    and in RAL time!

    "ase #ressure $in%erprint

    Lea& 'etection

    (irtual Lea&s ) desorption

    Out%assin% ) "a&eout *ycles

    #ump #erformance

    *ham+er contaminants

    *haracterise your system and process for optimum results

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    ypical contaminant species present may +e readily identied!

    Air lea&! m)e / ) 0 1ca. 2.3!4 ratio5 conrm +y the presence of pea&sat m)e 42, 46

    7ater! m)e 4/ conrm +y m)e 48

    Residual Gas Analysis

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    #y$%cal contam%nant s$ec%es $resent may be read%ly %dent%&%ed:

    ' (ydrocarbons: c)aracter%st%c "rou$s o& $ea*s+ty$%cal $ea*s at m,e 57+ 55+ 45+ 43

    (%") mass $ea*s - bac*-stream%n" o& o%l or acuum rease

    /o mass $ea*s - Clean%n" &lu%d , solent res%due

    Residual Gas Analysis

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    !# lectron m$act on%sat%on 9

    Operation depends on the conversion of %as molecules into

    char%ed particles, typically positive ions ) fra%ments.

    Achieved +y electron impact ionisation via thermionic emission

    from a hot lament.

    A typical current is 4x49-2Amps.

    Ions extracted into the mass lter.

    Note: Ionisation depends on the nature of the species involved.

    If a species is readily ionised it produces a hi%her :; si%nal than one

    which is poorly ionised.

    4

    c.f. "en?ene > 3.@ and elium > 9.42.

    Residual Gas Analysis (o %t or*s

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    IONI;AION B lectron Impact Ionisation 1I5

    Extractor 90V

    Filament 70V

    Gas molecules

    Electron beam

    Quadrupole

    entranceaperture 0V

    Positive ions

    extracted into

    mass filter

    Source cage !V

    Residual Gas Analysis ow it wor&s

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    (o %t or*s : !#

    #)e c)o%ce o& &%lament mater%al %s %m$ortant:

    MaterialOperating

    Temperature Comments

    "ungsten #$00 %"oo &ot for 'G( use

    'eacts )it& ox*gen to give +,- +,#

    '&enium #!00 %"oo &ot for 'G( use

    Forms compounds )&ic& are insulators

    "&oria."&oria coated /ridium 1900 % Good general purpose'obust

    2a34 1!00 %5ot robust enoug& for 'G( use

    Ver* brittle

    2o)er o eratin tem erature 6 lo)er out assin

    Residual Gas Analysis

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    ow it wor&s ! IONI;AION

    It is also important to note that I yields several types of ions!

    ;ee crac&in% pattern section for further details.

    Note! $ra%ment ions are also &nown as #roduct or 'au%hter Ions

    /on 7escription

    8olecular "&e molecule )it& a positive c&arge b* loss of an electron

    3ase "&e most abundant ion in t&e spectrum

    Fragment Formed b* cleavage of one or more bonds in t&e molecule

    'earrangement Formed b* bond cleavage and atomic migration

    7oubl* +&arged # /ons from # electron loss steps appearing at 1# mass i:e: m#

    8etastable Fragmentation of ion into an ion of lo)er mass a neutral particle

    Residual Gas Analysis

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    ow it wor&s ! :A;; $ILR

    he mass lter diCerentiates the ions produced and selects speciesfor detection.

    he most common form of mass lter is the Duadrupole.

    A Duadrupole is pairs of parallel, eEuidistant metal rods 1poles5+iased at eEual, +ut opposite potentials

    hese twin potentials contain xed'* and alternatin% R$ components.

    "y varyin% the R$ component theresultant eld produced +y therods may +e varied.

    Residual Gas Analysis

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    ow it wor&s! :A;; $ILR

    Any ions enterin% the Euadrupole eld experience potential diCerencesdeFectin% them from their ori%inal traectory.

    he extent of deFection of any ion enterin% the eld is related to its

    mass ! char%e 1m)e or m)?5 ratio. At each interval on the R$ scan only one m)e ratio resonates with the

    eld allowin% the ion to pass alon% the ?-axis.

    All other species are deFected and neutralised +y impact upon

    the rods of the Euadrupole

    Residual Gas Analysis

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    ow it wor&s ! :A;; $ILR

    "#$dc" $rf cos t%

    & #$dc" $rfcos t%

    '

    y

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    0:141

    0:14#

    0:14!

    0:14$

    0:14;

    0:144

    0:147

    0:14?nstable @>?nstable

    ?

    V6

    $AV

    #mr0

    #

    6 #

    Residual Gas Analysis

    d l f d d i

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    ow it wor&s ! :A;; $ILR -:athieu ;ta+ility 'ia%rams

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    ()*)

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    Residual Gas Analysis

    Q d l M S f Ad d S i

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    ow it wor&s ! '*OR

    $iltered ions stri&e the detector to result in an ion current which ismeasured +y a sensitive amplier.

    wo main types of 'etector! a! "he #araday Cup B an earthed passive conductin% surface with a

    suppressor electrode to avoid false measurement.

    $ast movin% ions stri&e the cup cause a Hshower of Hsecondary electrons.he use of the Hcup rather than a plate, allows all electrons to +ecollected.

    ence, one ion arrivin% at the $araday needs one electron forneutralisation +ut causes several electrons to +e emittedJ this providesamplication B several electrons for each ion.

    Residual Gas Analysis

    Q d l M S f Ad d S i

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    ow it wor&s ! '*OR

    he $araday *up! 'etection limits

    Ion current for Nis 49-2amps ) orr

    At 49-/orr of N,

    49-/K 49-2> 49-4amps

    At 49-44orr of N> 49-43amps

    'etection limit for conventional analo%ue amplier

    (nal*ser exit

    ve ions Electrometer

    Farada* +up

    Electron suppressor

    Residual Gas Analysis

    Q d l M S t t f Ad d S i

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    ow it wor&s ! '*OR $! Secondary %lectron Multiplier ) ;in%le *hannel lectron

    :ultiplier 1;: ) ;*:5!

    A surface desi%ned to %enerate secondary electrons.

    he ion impacts the surface %eneratin% or 0 electrons each

    of which under%o further surface collisions %eneratin% moreelectrons, and so on in a cascade eCect.

    #ower for this cascade provided +y an applied volta%e.

    Gain is typically 490149for a channel plate5

    :inimum detecta+le pressure49-42orr to 49-40orr

    Residual Gas Analysis

    Q d l M S t t f Ad d S i

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    'etector #ros and *ons!

    $araday *up !

    Lower cost

    Indestructi+le

    Accurate

    "

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    ;: ) ;*: !

    'etection limit 49-42 - 49-40 orr withanalo%ue detection

    $aster measurement

    "

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    Resolution

    he a+ility to separate )resolve ions of diCerent m)e ratios

    All denitions directly ) indirectly relate pea& width to hei%ht

    For example:

    : ) :

    : at 49 pea& hei%ht where : M4 a.m.u.

    i.e. $or any %iven mass :, the pea& width at 49 of the pea& hei%ht,measured from the +aseline, is less than 4 amu

    his may +e complicated if the mass pea&s of trace species occur inthe pea& tail of a maor species e.%. the detection of m)e 8 or m)e@ in the presence of Nat m)e /.

    Residual Gas Analysis

    Quadrupole Mass Spectrometers for Advanced Science

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    Interpretation and *rac&in% #atterns!

    RGA data can +e presented as a prole of mass ) char%e pea&s. e.%.the RGA of Air :

    B(2 /V '+ 'G( #01 C109$0

    mass D amu

    0

    1e>04

    #e>04

    !e>04

    $e>04

    ;e>04

    4e>04

    10 1; #0 #; !0 !; $0 $; ;0

    Farada* D torr

    +*cle number 1

    Residual Gas Analysis

    Quadrupole Mass Spectrometers for Advanced Science

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    *rac&in% #atterns!

    *rac&in% arises durin% ionisation when the hi%h ener%y

    electrons used not only ionise species +ut fra%ment them. $or *O!4*46O e-&'(C')*! +onisationto %ive a pea& at m)e> /4*46O e-4*')*, Crac-into %ive a pea& at m)e >464*46 O e-'(C, 46O Crac-into %ive a pea& at m)e> 4

    his fra%mentation can +e used to diCerentiate iso+aric species! 4*46O from 42N for example.

    42Nhas pea&s at m)e / 142N

    5 and m)e 42 142N5 from!

    42 N e-&'/0(!,+onisationto %ive a pea& at m)e> /42N

    e-42 N'/0, Crac-into %ive a pea& at m)e >42

    142N5 e-&'/0(!

    ,, +onisationto %ive a pea& at m)e> 42

    Note: *O)Nare I;O"ARI* the same mass +ut diCerent composition

    Residual Gas Analysis

    Quadrupole Mass Spectrometers for Advanced Science

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    Interpretation and *rac&in% #atterns!

    04

    !e>04

    $e>04

    ;e>04

    4e>04

    10 1; #0 #; !0 !; $0 $; ;0

    Farada* D torr

    +*cle number 1

    2m,e 28+ 14

    (2

    m,e 18+17

    2m,e 32+ 16

    !r m,e 40

    C2m,e 44+ 28+ 16

    Residual Gas Analysis

    Quadrupole Mass Spectrometers for Advanced Science

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    Interpretation and *rac&in% #atterns!

    *rac&in% pattern example B Linear ydrocar+ons 'ecane 1*495 and "utane 1*2495 show similarities B why

    "oth compounds show

    *lusters of #ea&s at!

    m)? 38m)? 20m)? @

    Loss of unit of mass 42

    Residual Gas Analysis

    Quadrupole Mass Spectrometers for Advanced Science

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    Interpretation and *rac&in% #atterns!

    *rac&in% pattern example

    he mass 42 unit loss of al&yl-type species * i.e.

    *49 e-*494e-*0, *3, *08, *2@, *344etc.

    And

    *249 e-*2@

    e-*0, *3

    , *08

    $RAG:NAION B "ond cleava%e AN' Ionisation.

    Residual Gas Analysis

    Quadrupole Mass Spectrometers for Advanced Science

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    Interpretation!

    Isotopic A+undance.

    :any species exist as several naturally occurrin% isotopes:

    (tom /sotopes and relative abundances

    +arbon1#

    + 100-1!

    + 1:1

    5itrogen 1$5 100- 1;5 0:$

    ,x*gen14

    , > 100-1