High Purity regulators & valvesProduct Selection guide

1Semiconductor application:Choosefromoneoftheninesemiconductorapplicationtablesthatfollow

onpages1-6.Specificapplications,e.g.,gastrays,gasjungles,andvalvemanifoldboxesarelistedattheverytopofeachtable.Asanexample,aregulatorthatislocatedattheprocesstoolandusedtodeliveraspecialtygasislikelya1/4"PointofUseRegulator.PointofUseDiaphragmValvesdeliverpurgegaseslikeArgonorNitrogentotheprocesstool.GasCabinetRegulatorsandBulkSpecialtyGasRegulatorsareusedtodelivercompressedorliquefiedcylindergases.

2Pressures & Flow rates:Narrowyoursearchbyreferencingyourrequiredsourcepressure,outlet

pressureandflowrate.Leakrateandbodymaterialsareprovidedinthetablesasafurtherreferencepoint.

3Features:Checkthebulletpointsundertheregulatororvalvemodelnameforashortlistofkeyfeatures.

4Poppet types:Freepoppetregulatorsarerecommendedforinertgasesandpointofuse

processgases.Tieddiaphragmregulatorsofferamechanicallyassistedshutofftopreventleakageacrosstheseat.Thetieddiaphragmregulatorsarerecommendedforhighpressuretoxic,corrosiveandflammablegases.

To place an order: Onceyouhaveselectedaproduct,youmaycallthenumberbelowforyourlocaldistributororgotowww.tescom.comandclickontheSALESCONTACTS.

Need assistance or further specifications?

A. Visitusonlineatwww.tescom.com.ClickonPRODUCTSanddownloadaPDFfileoftherelevantcatalogpageordrawing.

B. RefertoourprintedUltra-cleanPressureControlscatalogwithmatchingapplicationcategorytabs.

C. CallthenumberbelowforafactoryapplicationspecialistorthenumberofaTescomdistributornearyou:1-877-4teScoM or 877-483-7266.

key Feature considerations

Diaphragm seals (metal to metal)

Poppet style (free poppet or tied diaphragm)

Flow capacity (10 sccm to 42,000 slpm)

Internal design (threaded or internally threadless & springless)

Surface passivation (electropolish, internal electropolish or Precision Electro-Polish)

Internal surface finish (5, 10 or 25 Ra microinch)

Body material (brass, 316L stainless or 316L VAR stainless steel)

FourStepProductSelectionProcessThe simple four step process outlined below will help you use this guide to find the product that meets your specific application requirements.

Product SerieS & FeatureSSource

PreSSuredelivery PreSSure

certiFied inboard

leak rate*Flow

rangebody

Material

64-2600 Single Stage, ultra-High Purity

• 5Raor10Ramicroinchfinishes• Electropolishorinternalelectropolish• Freepoppetdesign• Hastelloy®trimavailable• Cv=.15

600PSIG 30,60,100,250PSIG

<1x10-9 0-100SLPM

316LSSTor316LSSTVAR

64-2800 Single Stage, ultra-High Purity, tied diaphragm

• Tieddiaphragmdesign• Electropolishorinternalelectropolish• 5Raor10Ramicroinchfinishes• Cv=.15

1000PSIG 30,60,100,150PSIG

<1x10-9 0-100SLPM

316LSSTor316LSSTVAR

64-3600 Single Stage, ultra-High Purity, low droop

• 10Ramicroinchfinishes• Electropolishorinternalelectropolish• Freepoppetdesign• Hastelloy®trimavailable• Cv=.15

600PSIG 30,60,100,150PSIG

<1x10-9 0-100SLPM

316LSST

64-5000 Single Stage, ultra-High Purity, absolute Pressure

• Subatmospherictopositivepressures• 5Raor10Ramicroinchfinishes• Electropolishorinternalelectropolish• Cv=.24

120PSIG 28"Hg-15,30,60,100PSIG

<1x10-9 0-5SLPM

316LSSTor316LSSTVAR

74-2400 Single Stage, ultra-High Purity

• Tieddiaphragmdesign• Internallyspringless&threadless• ElectropolishorPrecision

Electro-Polish• 5Raor10Ramicroinchfinishes• Cv=.15

600PSIG 30,60,100PSIG

<1x10-9 0-100SLPM

316LSSTVAR

Mr-2400 Single Stage, ultra-High Purity

• Tieddiaphragmdesign• Internallyspringless&threadless• 5Ramicroinchfinishes• PrecisionElectro-Polish• Cv=.15

600PSIG 30,60,100PSIG

<1x10-10 0-100SLPM

316LSSTVAR

12 Single Stage, ultra-High Purity, Miniature

• Tieddiaphragmdesign• 5Raor10Ramicroinchfinishes• Internallyspringless&threadless• ElectropolishorPrecision

Electro-Polish• 12FSeriesfeaturesintegratedfilter

150PSIG 28"Hg-15,30,60,100PSIG

<1x10-9 30SLPM&120SLPM

316LSSTVAR

12 Single Stage, ultra-High Purity, Miniature

• Freepoppetdesign• 5Raor10Ramicroinchfinishes• Internallythreadless• ElectropolishorPrecision

Electro-Polish

150PSIG 28"Hg-15,30,60,100PSIG

<1x10-9 30SLPM 316LSSTVAR

1/4" Point of use pressure regulatorsFor process tools, gas trays, gas jungles, valve manifold boxes & tool hook-ups

64-2600 Series

74-2400 Series

12 Series Miniature

Product selection guide contents 1

1/4"Pointofusepressureregulators. . . 1

1/2"Pointofusepressureregulators. . . 2

Pointofusediaphragmvalves . . . . . . . . 2

Bulkspecialtygassystems&gascabinet pressureregulators . . . . . . . . . . . . . . . 3Gascabinetdiaphragmvalves . . . . . . . . 4Facilitypressureregulators . . . . . . . . . . . 4

Bulkgasdiaphragmvalves . . . . . . . . . . . 5

Integratedgassystem components . . . . . . . . . 5 & back cover

*units are expressed in atm cc/sec. He

Product SerieS & FeatureSSource

PreSSuredelivery PreSSure

certiFied inboard

leak rate*Flow

rangebody

Material

44-3200 Single Stage, High Flow

• 10Ramicroinchfinishes• Cv=1.0or1.8

500PSIG 25,50,100,150,200PSIG

<2x10-8 0-550,900SLPM

(0-19,32SCFM)

316LSST

64-3200 Single Stage, ultra-High Purity, High Flow

• Tieddiaphragmdesign• 10Ramicroinchfinishes• Hastelloy®trimavailable• Cv=1.2

150PSIG 30,60,100,150PSIG

<1x10-9 0-900SLPM(0-32SCFM)

316LSST

64-5400 Single Stage, ultra-High Purity, High Flow

• Freepoppetdesign• ElectropolishorPrecisionElectro-Polish• 10Ramicroinchfinish• Cv=1.0

600PSIG 30,60,100,150PSIG

<1x10-9 550SLPM(0-19SCFM)

316LSST

74-3000 Single Stage, ultra-High Purity, High Flow

• Internallythreadless• ElectropolishorPrecisionElectro-Polish• 5Raor10Ramicroinchfinishes• Freepoppetdesign• Cv=.5

600,1000PSIG

30,60,100,150PSIG

<1x10-9 0-500SLPM(0-18SCFM)

316LSSTVAR

74-3800 Single Stage, ultra-High Purity, High Flow

• Internallyspringless&threadless• ElectropolishorPrecisionElectro-Polish• 5Raor10Ramicroinchfinishes• Tieddiaphragmdesign• Cv=.5

600PSIG 30,60,100PSIG

<1x10-9 0-500SLPM(0-18SCFM)

316LSSTVAR

23 Single Stage, ultra-High Purity, High Flow

• Internallyspringless&threadless• ElectropolishorPrecisionElectro-Polish• 5Raor10Ramicroinchfinishes• Freepoppetortieddiaphragm• Cv=1.8

250,150PSIG

30,60,100PSIG

<1x10-9 0-950SLPM(0-34SCFM)

316LSSTVAR

1/2" Point of use pressure regulatorsFor process tools, gas trays, gas jungles, valve manifold boxes & tool hook-ups

74-3800 Series

2

Point of use diaphragm valvesFor process tools, gas trays, gas jungles, valve manifold boxes & tool hook-ups

64-3200 Series

Product SerieS & FeatureSSource

PreSSurecertiFied inboard

leak rate* cvbody

Material

FeatureS(allmodels):ElectropolishorPrecisionElectro-Polish,10Ramicroinchfinishesandspringlessinternaldesign.

14 Series Manual• 14-111/4turn,knob

250PSIG <1x10-9 .35 316LSSTVAR

14 Series Manual• 14-131/4turn,knob,LOTO

125PSIG <1x10-9 .35 316LSSTVAR

14 Series Manual• 14-151/4turn,roundknob

3500PSIG <1x10-9 .17 316LSSTVAR

14 Series Manual• 14-171/4turn,lever

250PSIG <1x10-9 .35 316LSSTVAR

14 Series aoP• 14-21Normallyclosed• 14-31Normallyopen

125PSIG <1x10-9 .35 316LSSTVAR

31 Magnum Series, Manual• Multi-turn

250PSIG <1x10-9 2.5 316LSSTVAR

31 Magnum Series, aoP• Normallyopen• Normallyclosed

250PSIG <1x10-9 2.5 316LSSTVAR

14 Series LOTO

14 Series AOP*units are expressed in atm cc/sec. He

3

Product SerieS & FeatureSSource

PreSSuredelivery PreSSure

certiFied inboard

leak rate*Flow

rangebody

Material

64-2600 Single Stage, ultra-High Purity

• 5Raor10Ramicroinchfinishes• Freepoppetdesign• Electropolishorinternal

electropolish• Cv=.06

3500PSIG 30,60,100,250,500PSIG

<1x10-9 0-100SLPM 316LSSTor316LSSTVAR

64-2800 Single Stage, ultra-High Purity, tied diaphragm

• Tieddiaphragmdesign• 5Raor10Ramicroinchfinishes• Hastelloy®trimavailable• Cv=.06(3500PSIGmax.inlet)• Cv=.15(1000PSIGmax.inlet)

3500,1000PSIG

30,60,100,150PSIG

<1x10-9 0-100SLPM 316LSSTor316LSSTVAR

64-3200 Single Stage, ultra-High Purity, High Flow, bSgS

• Tieddiaphragmdesign• 10Ramicroinchfinishes• Hastelloy®trimavailable• Cv=1.2

1500,1000PSIG

30,60,100,150,200PSIG

<1x10-9 0-900SLPM 316LSST

64-3400 dual Stage, ultra-High Purity

• Dualstagepressurereduction• 10Ramicroinchfinishes• Freepoppetortieddiaphragm• Hastelloy®trimavailable• Cv=.06or.15

3500PSIG 30,60,100,150PSIG

<1x10-9 0-80SLPM 316LSST

64-3600 Single Stage, ultra-High Purity, low droop

• Highsensitivity• 10Ramicroinchfinishes• Freepoppetortieddiaphragm• Hastelloy®trimavailable• Cv=.06or.15

3500PSIG 30,60,100,150PSIG

<1x10-9 0-100SLPM 316LSST

64-5000 Single Stage, ultra-High Purity, absolute Pressure

• Subatmospherictopositivepressures

• 5Raor10Ramicroinchfinishes• Cv=.06(3500PSIGmax.inlet)• Cv=.15(600PSIGmax.inlet)• Cv=.24(120PSIGmax.inlet)

3500,600,120PSIG

28"Hg-15,30,60,100PSIG

<1x10-9 0-5SLPM 316LSSTor316LSSTVAR

74-300a Single Stage, ultra-High Purity, absolute Pressure

• Freepoppetdesign• Internallythreadless• 5Raor10Ramicroinchfinishes• Cv=.5

300PSIG 28"Hg-15PSIG <1x10-9 0-20SLPM 316LSSTVAR

Mr-2400 Single Stage, ultra-High Purity

• Tieddiaphragmdesign• Internallyspringless&threadless• 5Ramicroinchfinishes• PrecisionElectro-Polish• Cv=.06

3500PSIG 30,60,100PSIG

<1x10-10 0-100SLPM 316LSSTVAR

74-3800 Single Stage, ultra-High Purity, High Flow

• Tieddiaphragmdesign• Internallyspringless&threadless• 5Raor10Ramicroinchfinishes• PrecisionElectro-Polish• Cv=.5

3500,1000,600PSIG

30,60,100PSIG

<1x10-9 0-500SLPM 316LSSTVAR

449-254 Single Stage, High Pressure, bSgS

• Freepoppetdesign• 10Ramicroinchfinishes• Hastelloy®trim• Cv=1.0

1500PSIG 400PSIG <1x10-9 0-900SLPM 316LSSTVAR

bulk specialty gas systems & gas cabinet pressure regulators

64-2600 Series

64-5000 Series

449-254 Series

*units are expressed in atm cc/sec. He

4

gas cabinet diaphragm valves

Product SerieS & FeatureSSource

PreSSurecertiFied inboard

leak rate* cvbody

Material

FeatureS(allmodels):ElectropolishorPrecisionElectro-Polish,10Ramicroinchfinishesandspringlessinternaldesign.

14 Series Manual• 14-121/4turn,lever

3500PSIG <1x10-9 .17 316LSSTVAR

14 Series Manual• 14-141/4turn,knob,LOTO

3500PSIG <1x10-9 .17 316LSSTVAR

14 Series Manual• 14-151/4turn,roundknob

3500PSIG <1x10-9 .17 316LSSTVAR

14 Series aoP• 14-41Normallyclosed

3045PSIG <1x10-9 .17 316LSSTVAR

14 Series Lever

Facility pressure regulators

Product SerieS & FeatureSSource

PreSSuredelivery PreSSure

certiFied inboard

leak rate* Flow ratebody

Material

22-2200 ba grade

• Metaltometaldiaphragmseals• 25Ramicroinchfinishes• Cv=.24

250PSIG 30,60,100,150PSIG

<2x10-8 0-100SLPM 316SSTorBrass

22-5400 Single Stage, ba grade, High Flow

• Freepoppetdesign• 25Ramicroinchfinishes• Cv=1.0

600PSIG 30,60,100,150PSIG

<1x10-8 550SLPM 316LSST

44-3200 Single Stage, ultra-High Flow

• Metaltometaldiaphragmseals• NPTporting• Cv=1.0&1.8

500PSIG 25,50,100,150&200PSIG

<2x10-8 1000SLPM(35SCFM)

316SST

449-260 High Flow

• 10Ramicroinchfinishes• Cv=2.8

500PSIG 25,50,100,150&200PSIG

<2x10-8 1700SLPM(60SCFM)

316LSST

dH-16 ba grade, Single Stage, High Flow

• 25Ramicroinchfinishes• Cv=5.0

300PSIG 50,100,150PSIG

_ 7075SLPM(250SCFM)

316SST

15 Series High Purity, ultra-High Flow

• Internallythreadless• 10Ramicroinchfinishes• Springload:Cv=8• Bellowsdomeload:Cv=20

300PSIG 130PSIG <1x10-9 11,300SLPM(400SCFM)28,300SLPM(1000SCFM)

316LSST

22-2200 BA Grade

22-5400 BA Grade

15 Series

14 Series AOP

*units are expressed in atm cc/sec. He

5

Product SerieS & FeatureSSource

PreSSurecertiFied inboard

leak rate* cvbody

Material

31 Magnum Series, Manual, High Flow

• PrecisionElectro-Polish• 5Raor10Ramicroinchfinishes• Tieddiaphragmdesign

250PSIG <1x10-9 2.5 316LSSTVAR

31 Magnum Series, air actuated, High Flow

• PrecisionElectro-Polish• 5Raor10Ramicroinchfinishes• Tieddiaphragmdesign

250PSIG <1x10-9 2.5 316LSSTVAR

32-1 Magnum Series uniplex, 32-2 Magnum duplex

• PrecisionElectro-Polish• 10Ramicroinchfinishes• Tieddiaphragmdesign• 32-2Duplex:HorizontalCross,Vertical

TeeorHorizontalTeeConfigurations

250PSIG <1x10-9 2.5 316LSSTVAR

35 Magnum Series, ultra-High Flow

• PrecisionElectro-Polish• 10Ramicroinchfinishes• Tieddiaphragmdesign• Line&uniplexportingoptions

250PSIG <1x10-9 10.5 316LSST

cM1 Magnum Series, uniplex with integral Purge valve

• PrecisionElectro-Polish• 10Ramicroinchfinishes• Tieddiaphragmdesign• Integralpurgevalve

250PSIG <1x10-9 2.5 316LSSTVAR

bulk gas diaphragm valves

35 Series Ultra-High Flow

32-2 Duplex Series

integrated gas system components/µ-tekTM miniature pressure controls

12 Series MiniatureIGS Regulator

Product SerieS & FeatureSSource

PreSSurecertiFied inboard

leak rate* cvbody

Material

14 Series Manual• 14-111/4turnknob

250PSIG <1x10-9 .35 316LSSTVAR

14 Series Manual• 14-131/4turnknob,LOTO

125PSIG <1x10-9 .35 316LSSTVAR

14 Series aoP• 14-21Normallyclosed• 14-31Normallyclosed

125PSIG <1x10-9 .35 316LSSTVAR

IGS Pressure Reducing Regulators (available to meet SEMI Doc. PR3.1 & PR3.3-0699)

Product SerieS & FeatureSSource

PreSSuredelivery PreSSure

certiFied inboard

leak rate*Flow

rangebody

Material

12 Single Stage, utra-High Purity, Miniature

• 1-1/2",1-1/8"base• 5Raor10Ramicroinchfinishes• ElectropolishorPrecisionElectro-Polish• Tieddiaphragmdesign• Internallyspringless&threadless• 12FSeriesfeaturesintegratedfilter

150PSIG 28"Hg-15,30,60,100PSIG

<1x10-9 30or120SLPM

316LSSTVAR

12 Single Stage, utra-High Purity, Miniature

• Freepoppetdesign• 5Raor10Ramicroinchfinishes• Internallythreadless• ElectropolishorPrecision

Electro-Polish

150PSIG 28"Hg-15,30,60,100PSIG

<1x10-9 30SLPM 316LSSTVAR

IGS Diaphragm Valves (available to meet SEMI Doc. PR3.1 & PR3.3-0699)

*units are expressed in atm cc/sec. He14 Series AOPIGS Valve

14-11 ManualIGS Valve

µ-TekTM Miniature Pressure Controls on back cover.

µ-TekTM Miniature Pressure Controls

Product SerieS & FeatureSSource

PreSSuredelivery PreSSure

certiFied inboard

leak rate*Flow

rangebody

Material

M1 MicroStik regulator & valve Manifold

• 12Seriesregulator&14Seriesvalve• 10Ramicroinchfinishes• Internallyspringless&threadless• Internalfilteravailable-12F

150PSIG 28"Hg-15,30,60,100PSIG

<1x10-9 30or120SLPM

316LSSTVAR

M4 MicroStik regulator & valve Manifold with gauge tee assembly

• 12Seriesregulator&14Seriesvalve• 10Ramicroinchfinishes• Internallyspringless&threadless• Internalfilteravailable-12F

150PSIG 28"Hg-15,30,60,100PSIG

<1x10-9 30or120SLPM

316LSSTVAR

µ-tekTM miniature pressure controls

M4 MicroStik

M1 MicroStik

Additional Items:• Manifolds• Domeloadedregulators• Portingstylesandconfigurations• AutomatedpressureandflowcontrolwithTescom’sElectronicControlSystems• Specialtesting,leakratecertification,particlecounts• Materialsofconstruction

Need Technical Assistance?Calltoll-free877-4teScoM(877-483-7266)forfactoryapplicationassistance.

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teScoMHighPurityControls19111IndustrialBoulevardElkRiver,MN55330800-447-9650Toll-Free763-241-3222763-241-3209Faxorvisituson-line:www.tescom.com

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NOTE:Productavailabilityandspeci-ficationscontainedhereinaresubjecttochangewithoutnotice.Consultlocaldistributororfactoryforpotentialrevisions.