ultra high purity - aesic

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Page 1: ultra high purity - AESIC
Page 2: ultra high purity - AESIC

the raw materialthe raw material

Although traditional tubing materials like copper are adequatefor some high purity applications,the material of choice in thesemiconductor andbiopharmaceutical markets is 316Lstainless steel.

Readily available, 316L is a lowcarbon steel alloy, attractivebecause of its good weldability andinherent corrosion resistance.However, commercially available316L may contain impurities in theform of trapped gases and non-metallic inclusions. To preventthis from becoming a problem forour customer, we select onlyspecific grades of 316L andpurchase materials to our ownspecifications.

Cardinal UHP produces ultra highpurity tubing from many materialsbesides 316L. For example, we alsouse 304SS, Hastelloy, Monel, andcopper. Prior to placing any materialin production we test representativesamples to determine their wallthickness, ovality, weldability andcompatibility with ourelectropolishing process and desiredRA finish.

ultra high purity

from concept to reality

from concept to reality

Cardinal UHP has been supplying avariety of industries with specialtypiping components and services forover 20 years. We introduced multiplebest practice methods that are nowrecognized as industry standards.

Cardinal continues to supply the finestin ultra high purity fittings and pipingcomponents to manufacturers andindustries requiring critically pureproduction systems. We also supply awide range of tubing and specialtyservices for other markets includingmedical, food processing,biotechnology, pharmaceutical,semiconductor, and telecommunication.

Our ISO 9001 quality system beginswith the specifications for raw materials and continues through topackaging, delivery and support of thefinished product.

Quality starts with a finished product specification. To meet customer needsCardinal UHP offers products to avariety of material and finish specifications with various levels ofdocumentation.

Raw material specifications are developed to provide the lowest costproduct that meets or exceeds the finish and elemental specification.Extensive inspection of the raw materialinsures a finished product that meetsthe specified requirements.

Mechanically polishing fittings afterbending and welding provides anexcellent base for the finalelectropolishing and passivation steps.

Controlled electropolishing andpassivation provide a smooth, cleanand chromium enriched corrosionresistant surface. The finished productis cleaned one last time in our ISOClass 4 clean room, tested andpackaged according to specificationbefore it is ready to ship.

It is our consistent attention to detail atall phases from commercial review tomanufacturing and sales support thatturn a concept of quality into reality.

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AK

It’s about reliability.

Page 3: ultra high purity - AESIC

u l t r a h i g h p u r i t y

electropolishingelectropolishing

Electropolishing creates a smoothclean surface that enhances corrosion resistance and reducesparticle entrapment in microscopiccrevices. With our innovative andproprietary ALC-300 process,Cardinal UHP greatly increases theability to deliver quality electropolished components fordependable performance in any critical distribution system.

The Cardinal UHP system creates aleveling action so effective that anelectropolished surface often hasonly one tenth the surface area of amechanically or chemically polished surface. During the electropolishing process the wall

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research & developmentresearch & development

As part of our extensive ongoingresearch and development programs Cardinal UHP has funded metallurgy research at theUniversity of Missouri’s Center forMaterials Research. Our surface treatment studies focused onincreased standardization in theelectropolishing process toachieve a predictable andconsistent finished product. Twoareas that have been targeted todate are the variables involved inthe process and the effect that rawmaterials have on the finalproduct.

The knowledge gained through ourresearch efforts led to the creationof the first ALC-300 digitally controlled electropolish processmonitoring equipment. The ALC-300 is capable of producingconsistent quality productswithout variance from operator tooperator.

Through our research efforts, wedemonstrated that manyinconsistencies in the final productare directly attributed to variationin microchemistry and grain sizeof the raw material. This is why wetake special care to procure onlymaterials providing optimalconditions for electropolishing.

Today we have improved on theindustry specifications for rawstainless steel alloy, establishingour own proprietary standards formaterial procurement. Our continuing investigation of theeffects of process variables allowsCardinal UHP to transform the artof electropolishing into a controlled science.

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ol.thickness is carefully monitored,ensuring excellent weldability withall automatic welding equipment.

Our ALC-300 controller uses statistical process control to bringthe electropolishing process into thetwenty-first century. Every vitalparameter is monitored and regulated with this innovative computer controlled system. Sinceprocess parameters are stored in adatabase, the ultimate in materialtracking is available.

Page 4: ultra high purity - AESIC

It’s about safety.

Because of the high degree of purityand low surface roughness, Cardinaltubing is widely used insemiconductor, pharmaceutical,medical, food processing,biotechnology, andtelecommunication industries. Weproduce tubing to eight differentspecifications providing economicsolutions for everything frommission critical applications toinstrumentation and bulk gasdelivery systems.

Standard sizes range from 1/8"through 6" (3mm - 150mm) singlewall tubing with electropolishedsurface roughness as low as Ra5µin / 0.13 µm in 316L SS andHastelloy C22. We produce tubingwith the full range of cleanlinessspecifications from T/C cleaning todouble bagging and capping tubingto SEMI specifications in our ISOClass 4 clean room.

tubingtubing

It’s about quality.

ultra high purity

Page 5: ultra high purity - AESIC

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electropolished heated tubing

ep pak

fittingsfittings

Cardinal fittings are formed frommaterial that meets the sameexacting standards as our processtubing. We begin the process with aheavier wall to offset the thinningthat occurs during manufacturing.Cardinal UHP fittings undergo athorough preparation process toinsure corrosion resistance as wellas stringent dimensionalspecifications for economicalinstallation.

Welds are mechanically polished,and when required, fittings areelectropolished and passivated. Allwelds are 100% visually inspectedand mass spectrometer helium leaktested. Finally, the fittings arecleaned, capped, and bagged tomeet the required specification.

ultra high purityu l t r a h i g h p u r i t y

coaxial/dualcontainment tubing

coaxial/dualcontainment tubing

electropolished coilsep coil

EP Pak uses the same UHP criticaltubing (including dual containmentconfigurations) Cardinal is knownfor in a pre-insulated andelectrically heated package. EP Pakis delivered in long continuouslengths to improve utilization andreduce scrap rates.

Our factory installed electric heattracing is applied under controlledconditions and provides heattransfer efficiency and consistencythat cannot be duplicated with fieldconstructed systems. There are nocold spots created by tubingsupport clamps or gappinginsulation.

It’s about innovation.

Cardinal UHP has developed aproprietary method ofelectropolishing tubing in longcontinuous coils. The finished10µin / 0.25µm Ra finish iscomparable to our electropolishedstick tubing. This new developmentmeans fewer welds, quickervalidation and reduced installationlabor for UHP piping systems. Theprocess validation for Cardinal EPCoil is identical to that used forstick tubing so you know you aregetting a reliable finished product.

Cardinal UHP can provide longcontinuous lengths ofelectropolished tubing in fractionalsizes from 1/8” through 1/2” and inmetric sizes from 3mm through12mm with continuous lengths upto 330’ or 100 meters.

EP Coil is also available in coaxialor dual containment configurationsfor hazardous and volatile serviceapplications.

Cardinal UHP coaxial dual containment tubing and fittings arespecified for the safe distributionof volatile or toxic gases. In theunlikely event of a leak in theprocess tube the hazardousgas/fluid is contained by the outertube and evacuated for safedisposal.

Cardinal UHP created a speciallydesigned spacer between theprocess and containment tube tomaintain a consistent annularspace and eliminate excess vibration and noise.

Process tubes have the samesurface finish and specifications asour single wall tube and fittings.Dual containment tube and fittingsare available in all configurationsand sizes.

Page 6: ultra high purity - AESIC

Cardinal UHP was the first company in the high purity tubingand fitting industry to adopt aninternationally recognized ISOquality management program. Ourunyielding commitment to quality isevident in every step of ourmanufacturing process. From thestart of procurement we specifystringent material standards. Whenraw materials arrive at our loadingdock they are quarantined until wallthickness, ovality, smoothness, surface morphology, and chemicalcomposition have been verified toinsure it will meet our rigorouselectropolishing procedures.

All measuring instruments and analytical equipment are calibratedand traceable to NIST standards.Finally, every employee is empowered to declare piping andfittings unfit for sale if deviationsfrom our standards are discovered.

Before packaging tubing andfittings are cleaned with 60°C

ultra high purity

It’s about inspection

quality assurancequality assurance

Page 7: ultra high purity - AESIC

urity

18 megohm-cm deionized water ––produced through a reverse osmosis deionized process, surpassing SEMI guidelines forpure water. Components are thenpurged with heated, high puritynitrogen filtered through a 0.005micron absolute filter. Finally,color-coded caps are placed over anon-permeable nylon film and thefinished product is sealed in singleor double poly bags. The final cleaning and packaging is done inour ISO Class 4 clean room.

Fittings and tubing are not onlyinspected visually, but stylus measurement devices and massspectrometer helium leak detectorsare utilized. Additionally, the following quality assurance optionsare available:

• Scanning Electron Microscope (SEM) photographs

• Auger Electron Spectroscopy (AES) tests

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• Electron Spectroscopy ChemicalAnalysis (ESCA) tests

• Testing for presence of moisture• Scanning Tunneling Microscope

(STM) surface analysis tests• Testing for presence of particles

down to 0.1 micron• Certification for oxygen and

medical gas service• Image processing (video probe

and/or boroscoping capabilities)

With Cardinal UHP tubing and fittings, you can be sure that youare installing cleaner componentsso your process can be brought online more quickly and efficiently.

u l t r a h i g h p u r i t y

It’s about purity.

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servicesservices

Cardinal UHP provides specializedservices such as electropolishing,passivation, and clean roompackaging of materials supplied byour customers. These services canbe provided on an as needed orcontract basis. If you need one pieceor thousands of pieces CardinalUHP can provide it.

ElectropolishingWith our carefully regulated andautomated electropolishing process,we can produce surface levels ofless than 5 Ra. Whenelectropolishing customer suppliedmaterial we often deliver a surfacetwice as smooth as received. Our in-house capabilities accommodate awide variety of products includingtanks, valve and regulator bodies,specialty fittings, filter housings,pipe and tubing, manifolds, heatexchangers and pump casings.

PassivationNitric and citric acid passivationprovides improved corrosionresistance, even if the part is notelectropolished. We control pH,temperature, flow, suspendedcontaminants, and time in ourpassivation process to maximize theeffectiveness of the passivatedfinished part. We can effectivelypassivate a wide variety of productsincluding long lengths of coiledtubing.

Cleaning and BaggingCardinal UHP offers a range ofcleaning services including cleaningfor oxygen service and specializedcleaning to customer specificationsrequiring solvent and heated deionized water processing. In addition to providing cleaning services we also provide packagingservices such as capping, bagging,double bagging and sealing in anISO Class 4 clean room environment

Fabrication/Machining/WeldingOur experienced craftsmen andengineers can design and fabricatecomponents to your specificationsincluding special fittings, gas manifolds, face seal fittings, containment systems, tube stubs,and pipe-to-tubing transitions. Withthe capability to work with mostmetals including stainless steel,Hastelloy, Monel, tantalum, titanium,aluminum, and copper, CardinalUHP can design and fabricate yourhigh purity system components.

Page 8: ultra high purity - AESIC

Member of Semiconductor Equipment andMaterials Institute, Inc.

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1910 Crystal Industrial Court • Saint Louis, Missouri 63114 • Ph: 314.473.2121 • Fax: 314.473.2120Mallekotstraat 65 • B 2500 Lier Belgium • Ph (+32) 3 491 9865 • Fax (+32) 3 491 9876

Cardinal UHP e-cert allows you to retrievecopies of MTRs for any shipment.

Select the button for TUBE or FITTING, input theheat number found on the product or thepackaging (This information must be exactly asshown). Then using the pull-down boxes for ODand wall thickness select the appropriate size.

ISO 9001:2000REGISTERED

• Surface roughness of 20µin / 0.50µm avg.• Produced from Hastelloy C-22 to resist

pitting and crevice corrosion.• Chemically passivated in a nitric acid bath

followed by a 60°C DI rinse.• Nitrogen purged, dried, capped and bagged

in an ISO Class 4 clean room.• Used for the distribution and transfer of

corrosive gases in high purity gas systems.

tech 100 • Electropolished to Ra 10µin / 0.25µm max

with 7µin / 0.18µm max option.• Produced from low manganese seamless

VAR materials meeting the most stringent ASTM requirements.

• Subject to numerous quality tests includingAuger, SEM and ESCA.

• Hot DI cleaned (60°C), purged with heated and filtered nitrogen, capped, and double bagged in an ISO Class 4 clean room.

tech 50 / tech 50CR• Electropolished to Ra 10µin /0.25µm max

with 7µin / 0.18µm max option.• Produced from high quality 316L seamless

and welded stainless steel.• Produced to meet current ASTM

standards.• Subject to numerous quality tests

including SEM, ESCA, and optional Auger.• Cleaned with 60°C DI water, purged with

heated and filtered nitrogen, capped, individually double bagged and then bulk bagged in an ISO Class 4 clean room.

TG-22

product specificationsproduct specifications

tech 25 / tech 25CR• Tech 25: Electropolished to Ra 10µin /

0.25µm max.Tech 25CR: Electropolished to Ra15µin / 0.38µm max.

• Produced from high quality 316L seamless and welded stainless steel.

• Produced to meet current ASTM standards.• Cleaned with 60°C DI water, purged with

heated and filtered nitrogen, capped, individually double bagged and then bulk bagged in an ISO Class 4 clean room.

tech 20• Surface roughness of 20µin / 0.50µm max.• Non-electropolished high quality 316L

seamless and welded stainless steel.• Chemically passivated. • Cleaned with 18 megohm-cm DI water and

purged with filtered nitrogen.• Used in general purity gas distribution

systems, such as compressed dry air, nitrogen lines, argon and other bulk inert gasservices.

tech 10• Surface roughness of 32µin / 0.80µm max.• Non-electropolished high quality 316L and

304L seamless and welded stainless steel.• Solvent cleaned, purged with nitrogen,

capped, and individually bagged.• Passivated and rinsed with DI water.• Used in analyzer sample lines, O2 piping

(CFOS), medical gas piping, and vent lines.

tech 5• Surface roughness of 40µin / 1.0µm max.• Non-electropolished high quality 316L and

304L seamless and welded stainless steel.• Solvent cleaned, purged with nitrogen,

capped, and individually bagged.• Used for instrumentation and non-critical

gasses.

Specifications subject to change without notice.

tech CM• High quality seamless and welded 316L

and 304L SS tubing.• Thermocouple cleaned and capped per

ASTM 632 supplement S3.• Purged with filtered nitrogen, capped and

bulk bagged in heat sealed polyethylene.• Used for instrumentation, clean dry air,

and other gas systems requiring cleaned high purity tubing.

e-cert: makes validation easiere-cert: makes validation easier

Click the button and the program will return alink to the document you are looking for. ThePDF document may be printed or saved to disk.If a document is not found the program willstart an e-mail message to Cardinal UHP for amanual search.

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