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IOP PUBLISHING NANOTECHNOLOGY Nanotechnology 24 (2013) 405204 (9pp) doi:10.1088/0957-4484/24/40/405204 High field breakdown characteristics of carbon nanotube thin film transistors Man Prakash Gupta 1 , Ashkan Behnam 2 , Feifei Lian 2 ,4 , David Estrada 2 ,5 , Eric Pop 2 ,3,4 and Satish Kumar 1 1 G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA 2 Micro and Nanotechnology Laboratory, and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA 3 Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA E-mail: [email protected] Received 1 May 2013, in final form 15 July 2013 Published 12 September 2013 Online at stacks.iop.org/Nano/24/405204 Abstract The high field properties of carbon nanotube (CNT) network thin film transistors (CN-TFTs) are important for their practical operation, and for understanding their reliability. Using a combination of experimental and computational techniques we show how the channel geometry (length L C and width W C ) and network morphology (average CNT length L t and alignment angle distribution θ ) affect heat dissipation and high field breakdown in such devices. The results suggest that when W C L t , the breakdown voltage remains independent of W C but varies linearly with L C . The breakdown power varies almost linearly with both W C and L C when W C L t . We also find that the breakdown power is more susceptible to the variability in the network morphology compared to the breakdown voltage. The analysis offers new insight into the tunable heat dissipation and thermal reliability of CN-TFTs, which can be significantly improved through optimization of the network morphology and device geometry. S Online supplementary data available from stacks.iop.org/Nano/24/405204/mmedia (Some figures may appear in colour only in the online journal) 1. Introduction Carbon nanotubes (CNTs) are promising and useful materials for many applications due to their good thermal, electrical, optical and mechanical properties [1, 2]. Several studies have been performed in the past decade to explore and develop devices which could leverage the excellent properties of individual CNTs and their two- and three-dimensional (2D and 3D) networks [28]. In particular, CNT network thin film transistors (CN-TFTs) have been explored for a wide range of applications such as flexible displays, sensors, antennas, etc [2, 4, 713]. Significant efforts have been made in recent years aimed at overcoming fabrication challenges to improve 4 Present address: Department of Electrical Engineering, Stanford Univer- sity, Stanford CA 94305, USA. 5 Present address: Materials Science and Engineering Department, Boise State University, Boise ID 83725, USA. the performance of these devices [3, 1418, 11]. However, fewer studies have been focused on the heat dissipation in these devices, which is an important aspect of CN-TFT operation [19, 20]. CNT networks are typically supported on thermally insulating substrates such as glass or plastic, which have very low thermal conductivity and where the excessive self-heating in CN-TFTs under high field operation can lead to the breakdown of these devices [19, 20]. CN-TFTs with large aspect ratios ((channel length L C /channel width W C ) 1) have been investigated previ- ously to achieve higher ON/OFF current ratios. Narrow W C and large L C in CN-TFTs (figure 1) help in reducing the number of metallic percolating paths in unsorted CNT networks which typically have a 1:2 metallic (M) to semiconducting (S) ratio [3, 21]. However, such high aspect ratios can also lead to substantial variability and non-uniformity in the ON current [22]. In addition, a CNT network is comprised of individual single-walled CNTs of 1 0957-4484/13/405204+09$33.00 c 2013 IOP Publishing Ltd Printed in the UK & the USA

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Page 1: High field breakdown characteristics of carbon nanotube ...poplab.stanford.edu/pdfs/Gupta-CNTnetworkHiField-nano13.pdfNanotechnology 24 (2013) 405204 M P Gupta et al Here, ˘D.T T1/=.Q0dLt=kt/is

IOP PUBLISHING NANOTECHNOLOGY

Nanotechnology 24 (2013) 405204 (9pp) doi:10.1088/0957-4484/24/40/405204

High field breakdown characteristics ofcarbon nanotube thin film transistorsMan Prakash Gupta1, Ashkan Behnam2, Feifei Lian2,4, David Estrada2,5,Eric Pop2,3,4 and Satish Kumar1

1 G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta,GA 30332, USA2 Micro and Nanotechnology Laboratory, and Department of Electrical and Computer Engineering,University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA3 Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign,Urbana, IL 61801, USA

E-mail: [email protected]

Received 1 May 2013, in final form 15 July 2013Published 12 September 2013Online at stacks.iop.org/Nano/24/405204

AbstractThe high field properties of carbon nanotube (CNT) network thin film transistors (CN-TFTs)are important for their practical operation, and for understanding their reliability. Using acombination of experimental and computational techniques we show how the channelgeometry (length LC and width WC) and network morphology (average CNT length Lt andalignment angle distribution θ ) affect heat dissipation and high field breakdown in suchdevices. The results suggest that when WC ≥ Lt, the breakdown voltage remains independentof WC but varies linearly with LC. The breakdown power varies almost linearly with both WCand LC when WC � Lt. We also find that the breakdown power is more susceptible to thevariability in the network morphology compared to the breakdown voltage. The analysis offersnew insight into the tunable heat dissipation and thermal reliability of CN-TFTs, which can besignificantly improved through optimization of the network morphology and device geometry.

S Online supplementary data available from stacks.iop.org/Nano/24/405204/mmedia

(Some figures may appear in colour only in the online journal)

1. Introduction

Carbon nanotubes (CNTs) are promising and useful materialsfor many applications due to their good thermal, electrical,optical and mechanical properties [1, 2]. Several studies havebeen performed in the past decade to explore and developdevices which could leverage the excellent properties ofindividual CNTs and their two- and three-dimensional (2Dand 3D) networks [2–8]. In particular, CNT network thin filmtransistors (CN-TFTs) have been explored for a wide rangeof applications such as flexible displays, sensors, antennas,etc [2, 4, 7–13]. Significant efforts have been made in recentyears aimed at overcoming fabrication challenges to improve

4 Present address: Department of Electrical Engineering, Stanford Univer-sity, Stanford CA 94305, USA.5 Present address: Materials Science and Engineering Department,Boise State University, Boise ID 83725, USA.

the performance of these devices [3, 14–18, 11]. However,fewer studies have been focused on the heat dissipationin these devices, which is an important aspect of CN-TFToperation [19, 20]. CNT networks are typically supported onthermally insulating substrates such as glass or plastic, whichhave very low thermal conductivity and where the excessiveself-heating in CN-TFTs under high field operation can leadto the breakdown of these devices [19, 20].

CN-TFTs with large aspect ratios ((channel lengthLC/channel width WC) � 1) have been investigated previ-ously to achieve higher ON/OFF current ratios. NarrowWC and large LC in CN-TFTs (figure 1) help in reducingthe number of metallic percolating paths in unsortedCNT networks which typically have a 1:2 metallic (M)to semiconducting (S) ratio [3, 21]. However, such highaspect ratios can also lead to substantial variability andnon-uniformity in the ON current [22]. In addition, a CNTnetwork is comprised of individual single-walled CNTs of

10957-4484/13/405204+09$33.00 c© 2013 IOP Publishing Ltd Printed in the UK & the USA

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Nanotechnology 24 (2013) 405204 M P Gupta et al

Figure 1. (a) Schematic of a back-gated CN-TFT device with channel length (LC) and channel width (WC) similar to the devicesexperimentally tested. (b) A sample of a simulated random network of CNTs; blue color is used for semiconducting and red for metallicCNTs.

varying length (Lt) and alignment (θ) with respect to thesource and drain electrodes. Previous studies have shown thatthe variability in the CNT network morphology can signifi-cantly affect the channel resistance and device performance[23, 24]. Therefore these variations in the channel geometryand network morphology are very likely to influence thereliability and breakdown behavior of CN-TFTs as well. Thevariation in the breakdown behavior for a given TFT geometrycan lead to instability and/or unreliability during the operationof CN-TFTs. Thus, it is very important to understand howthe geometrical parameters affect the high field operationof the CN-TFT in order to optimize the device design forreliable and uniform behavior. While our previous work [25]has correlated the electronic properties of single-walled CNTswithin a CN-TFT channel to the device’s thermal reliability,the effects of channel geometry and network morphology onCN-TFT power and reliability have not been studied in detail.

In this work, we apply both experimental and compu-tational methods to understand the breakdown behavior andthermal reliability of CN-TFTs. We examine the breakdowncharacteristics such as peak power (or breakdown power,PBD) and the corresponding source-to-drain voltage referredto as the breakdown voltage (VBD) of CN-TFTs in orderto find their relation with the aforementioned geometricalparameters. We first analyze the breakdown characteristicsand their standard deviations for smaller and larger WC atvarious LC for random networks with constant CNT length,Lt. Next, we systematically vary the alignment of CNTs inthe network for a given LC,WC and Lt to study the effect ofnetwork alignment on the breakdown behavior. Subsequently,we consider a general case employing different log-normaldistributions of Lt in conjunction with several alignmentdistributions for a given LC and WC. The results suggestthat when WC is greater than the average Lt,VBD remainsindependent of WC and varies linearly with LC. The variationin the distribution of alignment and Lt does not significantlyaffect VBD. However, we find that PBD increases with bothLC and WC. In particular, for large WC,PBD varies linearlywith both WC and LC. Our results suggest that the thermalreliability of CN-TFTs can be improved by optimizingthe CNT length and alignment distribution. The analysispresented here provides new insight into optimization of thedevice parameters in order to engineer thermal reliability anduniformity in CN-TFT performance characteristics.

2. Methodology

CNTs synthesized by the arc discharge method are usedas starting materials for all the samples. The dilutedsolution containing single-walled CNTs and surfactant isvacuum filtered through a mixed cellulose ester membraneto form a CNT network. After the filtration through themembrane the film is washed with a copious amount ofwater to remove residual surfactants. The network is thentransferred to a supporting substrate of SiO2 (tox = 300 nm)on highly n-doped Si (tSi = 500 µm) with predefinedelectrical contacts and then the filter is dissolved [25].After the film transfer to the substrate, it is soaked inacetone overnight to remove residual cellulose and is furthercleaned by annealing at 230 ◦C for 1 h in ambient. Thedevice channels are patterned by photolithography and/orelectron-beam lithography (for submicron width dimensions).The Si substrate acts as a back-gate, and unless otherwisenoted we set the gate-to-source voltage (VGS = −40 V) suchthat both M and S type CNTs in the network are in the‘ON’ state (VGS is significantly below the threshold voltage)while the source-to-drain voltage (VSD) is increased untilnetwork breakdown. Device characterization and breakdownare conducted in air at room temperature (T0 = 25 ◦C).

For computational analysis, we employ a coupledelectro-thermal model to analyze the current, power, andtemperature distribution in the device [20, 21, 26, 27]. A briefdescription of the governing equations is provided below.

2.1. Thermal transport

The thermal transport in the device consisting of CNTnetwork, oxide layer and Si substrate is simulated using thediffusive energy transport equations, which can be written inthe following non-dimensional form [27]:

d2ξi

ds∗2+ GS(ξOX − ξi)+

∑intersecting

tubes j

GC(ξj − ξi)+dLt

q′iQ′= 0 (1)

∇∗2ξOX +

Ntubes∑i=1

GSγ (ξi − ξOX) = 0 (2)

∇∗2ξSi = 0. (3)

2

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Here, ξ = (T − T∞)/(Q′ dLt/kt) is the non-dimensional formof the temperature (T). T∞ denotes the ambient temperature,Q′ is a reference power per unit volume, d is the diameter ofthe CNT, and kt is the axial thermal conductivity of the CNT.ξi, ξOX and ξSi are the non-dimensionalized temperaturesof a section of the ith CNT, oxide, and Si, respectively.An asterisk symbol is used to refer to length variableswhich are non-dimensionalized by d. Equation (1) governsthe temperature of a CNT along its axial direction (lengthvariable s); the second and third terms in this equationrepresent thermal interactions at the CNT–oxide interface andat CNT–CNT junctions, respectively. q′i is the volumetricJoule heating term within the CNT which is obtained from thesolution of electrical transport equations (discussed below).GC and GS represent the non-dimensional thermal contactconductance at CNT–CNT junctions and the CNT–oxideinterface respectively. Their values (GC = 10−7 and GS = 2×10−4) are obtained by comparing the power–voltage curvesobtained from the experiments against the simulations [20].Equation (2) describes the temperature in the oxide layer andthe second term in this equation represents the CNT–oxidethermal interaction, which is summed over all the CNTs. Theparameter γ in this term characterizes the contact geometry.Equation (3) describes the temperature of the Si layer.

We use a constant temperature boundary condition (T =298 K) at the bottom surface of the Si substrate, while aconvective boundary condition [20, 27] is imposed at the topsurface of the oxide layer. The lateral boundaries have beenassumed to be thermally insulated. The boundary conditionshave been selected to simulate the experimental conditions.

2.2. Electrical transport

The electrical transport in the carbon nanotubes has beendescribed by Poisson and current continuity equations asfollows [13, 21, 27]:

d2ψi

ds2 +ρi

ε−(ψi − VG)

λ2 +

∑j6=i

(ψj − ψi)

λ2ij

= 0, (4)

∇ · Jpi +∑j6=i

Cpij(pj − pi) = 0, (5)

∇ · Jni +∑j6=i

Cnij(nj − ni) = 0. (6)

Here, ψ is the electrostatic potential, VG is the gate voltage,ρ is the net charge density, ε is the permittivity of the CNT.The third term in Poisson’s equation represents the gatingeffect [27] with screening length λ = (εCNTtOXd/εOX)

0.5.Here, εCNT and εOX are the dielectric constants for theCNT and gate oxide respectively and tOX is the oxidethickness. The fourth term in equation (4) describes theinter-tube electrostatic interaction at CNT–CNT junctionswith screening length λ ∼ d. Equations (5) and (6) are currentcontinuity equations for holes and electrons respectively,where J is the current density given by drift–diffusionequations. The hole and electron charge densities arerepresented by p and n, respectively. The second term,

Cnij(nj − ni) or Cp

ij(pj − pi), in the continuity equationsrepresents charge (electrons or holes) transfer across theCNT–CNT junctions. The charge transfer coefficient (Cn,p

ij )

is considered to be zero for M–S junctions to accountfor their very low contact conductance compared to theM–M and S–S junctions [28]. These assumptions have beenemployed in a previous study, where the developed modelhas successfully explained the experimental observations[5, 20, 22]. Experimental studies have also shown that theelectrical resistance at heterogeneous junctions (M–S) is twoorders of magnitude larger than at homogeneous junctions(M–M or S–S) [28]. The electrical conductivity of M-CNTsis considered to be five times higher than that of S-CNTsaccording to experimental measurements [25].

The numerical values of the major parameters inequations (1)–(6) are provided in a separate table in thesupplementary document (available at stacks.iop.org/Nano/24/405204/mmedia). These electro-thermal equations aresolved self-consistently to obtain the current, potential andtemperature distribution in the CN-TFTs. Heterogeneousnetworks of M and S type CNTs (1:2 ratio) are consideredin all simulations unless specified otherwise.

The model provides comprehensive details of thetemperature and power distribution within the CNT networkand thermal transport across the substrate (Si) and insulator(SiO2). Since these details are very difficult to obtain directlyfrom experiments, the model serves as an essential toolin analyzing the high field transport and breakdown ofCN-TFTs. The numerical model is validated by comparing thesimulation results with experimental data (see section 3.1).

Under high field conditions, Joule heating can lead tooxidation of the CNTs in air if the temperature exceedsthe breakdown temperature TBD ≈ 600 ◦C, resulting inbreakdown of the devices [19, 20, 29]. Thus, during thiselectrical breakdown process, the power dissipation in thedevice reaches a maximum value near TBD, and then dropsquickly to zero as the current paths within the networkreform and oxidize, reaching catastrophic device failure.A back-gated device configuration has been selected forthe experiments as it facilitates experimental measurements[19, 25]. All simulation results presented in this work areaveraged over a large number of devices (n ≈ 100) unlessspecified otherwise. Both the mean and the standard deviationof the breakdown characteristics are presented to understandthe variability in the breakdown behavior for different devicegeometry and network morphology parameters.

3. Results and discussion

3.1. Channel geometry

We first analyze the effect of LC and WC on the breakdowncharacteristics. From the perspective of the device breakdown,the two important metrics are PBD and VBD. Figure 2(a)shows the power dissipation in the device as a function ofVSD for three different cases of LC = 5, 10, 15 µm at anetwork density of ρ = 15 CNTs µm−2, WC = 100 µm,and Lt = 2 µm. We see a very close agreement of the

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Figure 2. (a) Measured and simulated power dissipation in a CNT network versus source-to-drain voltage (VSD) for three different channellengths (LC = 5, 10, 15 µm). Simulation results are presented for individual devices here. For a given LC, the power reaches a peak valueand then drops quickly to zero as the CNT network breaks down due to the excessive Joule heating and CNT oxidation in air. The value ofVSD corresponding to the peak power (PBD) is referred to as the breakdown voltage, VBD. (b) VBD versus LC, and (c) PBD versus LC. Theerror bar represents a 95% confidence interval. The device is in the ON state at gate voltage VGS = −40 V. Device width WC = 100 µm;CNT length Lt = 2 µm; network density ρ = 15 CNTs µm−2. Parts (b) and (c) contain simulation results which are averaged over 100devices.

Figure 3. Numerical results for (a) power versus VSD (the arrow indicates increasing channel width) and (b) power per unit width versusVSD for several channel widths (WC = 4, 10, 20, 30, 40 µm), channel length LC = 10 µm, and network density ρ = 30 CNTs µm−2. Notethat the power per unit width becomes invariant with respect to WC for sufficiently high WC. (c) The σnorm of breakdown voltage (VBD)versus LC and (d) the σnorm of peak power (PBD) versus LC. Here σnorm = standard deviation/mean.

simulation results with the experiments. It should be notedhere that the simulation curves shown in figure 2(a) havebeen specifically selected out of 100 sample simulations.CN-TFTs with smaller LC show less electrical resistancewhich in turn leads to higher current (i.e., higher powerdissipation) at a given VSD [5, 22]. This causes a device withsmaller LC to break earlier (i.e., at a lower VSD). We findthat both VBD and PBD scale linearly with LC (figures 2(b)and (c)). The error bars in these figures indicate the variationin breakdown characteristics of the random networks. Thesize of the error bar represents a 95% confidence interval forVBD (or PBD). The experimental values for both VBD andPBD fall well within the range of error bars estimated fromthe simulations. For a given network density, the number ofpercolating pathways decreases as LC increases. As previouslyreported [22], the ON current shows greater variation whenthe network density is decreased. Lowering the density isequivalent to reducing the number of percolating pathways,which also occurs when LC is increased, and therefore theerror bars increase as LC increases. These results suggestthat the variability in the breakdown for a given devicegeometry and network density can be substantial and requiredue consideration when predicting the device reliability [25].

Figure 3(a) shows the breakdown behavior of CN-TFTsfor WC = 4, 10, 20, 30, and 40 µm at LC = 10 µm,Lt =

2 µm, and ρ = 15 CNTs µm−2. The curves in figure 3(a)resemble a ‘bell’ shape due to the statistical averaging. Itcan be observed that the VBD does not change with WC.Further, we find PBD to be directly proportional to thewidth when WC/Lt > 2 (figure 3(b)). We also note that thenormalized standard deviations (σnorm) of VBD (figure 3(c))and PBD (figure 3(d)) increase when LC is increased orWC is decreased. For WC/Lt 6 2, we observe relativelylarge σnorm due to significant incremental change in thenumber of percolating pathways [30]. We find that for ρ =15 CNTs µm−2,LC = 10 µm, and WC/Lt = 2, less than 30%of the random networks out of 100 samples have a percolatingpath between source and drain. The probability of forminga percolating path further decreases as we increase LC forWC/Lt 6 2. Therefore, we employ a denser network to studythe breakdown behavior for WC/Lt 6 2.

Figure 4 shows the dependence of the breakdownbehavior on LC for narrow width devices (WC/Lt = 0.75, 1,1.5, 2) at ρ = 30 CNTs µm−2. We find that VBD is nearlyinvariant of the WC for WC/Lt > 1 (figure 4(a)). PBD followswidth-dependent scaling with LC such that higher width leadsto greater change in PBD per unit change in LC (figure 4(b)).

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Figure 4. Numerical results for (a) breakdown voltage (VBD) and (b) normalized peak power (with respect to WC) in the CNT networkversus channel length (LC) for smaller channel widths (WC). (c) The σnorm of VBD. (d) Peak power (PP) versus LC. Here, network densityρ = 30 CNTs µm−2.

Figure 5. Scanning electron microscopy (SEM) images of CN-TFTs after complete breakdown for different channel lengths (LC = 6.5,16.5, 21.8 µm) and widths (WC = 1.3, 2.4, 4.7 µm). The breakdown gap length (LBD) in the CN-TFT increases as LC is increased; however,LBD does not show much variation when the width is changed.

A similar trend is observed in the experiments, as shown in thesupplementary information (section S1 available at stacks.iop.org/Nano/24/405204/mmedia). We note that the σnorm of VBD(figure 4(c)) and PBD (figure 4(d)) remain nearly invariantof LC for WC/Lt > 1 and σnorm decreases as WC increasesat a given LC. Overall, we note that larger values of LCand WC correspond to better device reliability as they leadto larger VBD, greater PBD, and better uniformity in devicecharacteristics.

Previous studies [19, 20, 25, 31] on CN-TFT breakdownshow that the network breaks in a zigzag pattern across thechannel when WC is much greater than Lt. In the currentstudy, we examine this breakdown pattern in CN-TFTs whenWC is comparable to Lt. Scanning electron microscopy (SEM)images from the experiments show that the breakdown patternremains zigzag when LC is small (a few microns) for differentvalues of WC, as shown in figures 5(a), (d) and (g). Also,

the length (LBD) of the breakdown gap region (shown infigure 5(g)) is observed to be less than the average Lt, whichindicates a highly localized burning of CNTs. Further, LBD

increases as LC is increased for a given WC but does notchange much with respect to WC for a given LC (figure 5). Thistrend underlines the role of the temperature profile before thebreakdown and the electrostatic effects of the broken CNTsduring the breakdown process. For devices with larger LC, thetemperature profile is more flat away from the contacts, whichleads to larger LBD. In addition, a higher electrostatic effectfrom the broken tubes amounts to a greater induced electricfield in the unbroken neighboring CNTs. This electrostaticeffect is proportional to the applied voltage between thesource and the drain at the breakdown (i.e., VBD) [31]. As VBD

increases linearly with LC, the breakdown gap also followsnearly the same trend.

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Figure 6. (a) The schematic illustrates the alignment of a CNT. The average alignment (θavg) of the CNT network is defined such that for aspecific value of θavg, a CNT in the network is allowed to make any angle between −2θavg and 2θavg with equal probability. Hence, by thisdefinition, θavg = 45◦ corresponds to a random network, and θavg = 0◦ means perfectly aligned CNTs. Examples of heterogeneous CNTnetworks with θavg = 13◦ and θavg = 36◦ are given in (b) and (c) repectively. Metallic (M) CNTs are shown in brown, semiconducting (S)CNTs in blue; the M:S network density ratio is 1:2.

Figure 7. (a) Power dissipation versus source-to-drain voltage (VSD) for different alignments (θavg) of the CNTs in the network. (b), (c)VBD and PBD versus θavg respectively. Here, Lt = 2 µm,LC = 10 µm, WC = 10 µm, ρ = 15 CNTs µm−2. The metallic to semiconductingCNT ratio in the network is 1:2 and the electrical conductivity ratio is 5:1. It should be noted that very few (<10%) devices have connectedpathways at very low angle (θavg < 10◦). However, this number improves (e.g. >70% for θavg = 13◦) significantly for higher θavg.

3.2. Network morphology

3.2.1. Variable alignment angle with constant CNT length.In order to investigate the effect of CNT alignment onTFT breakdown behavior, we consider several alignmentdistributions of the CNTs in the network. We define theaverage alignment (θavg) such that for a specific value of θavg,a CNT in the network is allowed to make any angle between−2θavg and 2θavg with equal probability, as shown in figure 6.

Figure 7(a) shows a plot of power dissipation versus VSDfor different network alignments (from θavg = 9◦ to 45◦). It isobserved that for a highly aligned network (θavg < 10◦), thedevices show negligible current due to the reduced number ofpercolating pathways bridging the source and drain contacts.However, as we increase θavg, the current increases due tothe increasing number of percolating pathways. Previousstudies [21] have also suggested that the ON current dependson the alignment and reaches a maximum at θavg ∼ 30◦, whichis consistent with our results for VSD < 20 V, as shown infigure 7(a). For the breakdown behavior analysis, we analyzethe PBD and VBD dependence on θavg. We find that VBDfirst decreases sharply and then shows a zigzag pattern withincreasing θavg. Two local minima are observed at θavg = 22◦

and 36◦ (figure 7(b)). VBD lies in the small range of 26–29 Vfor θavg > 10◦, which suggests a weak dependence of VBD onalignment. PBD increases linearly as we increase θavg up to

27◦ and two ‘local’ maxima are observed at θavg = 27◦ and40◦ (figure 7(c)).

In order to explore the nature of this dependence,we examine the breakdown pattern of the CNT networks.It should be noted that we consider the network to becomposed of M and S type CNTs in 1:2 ratio. A Schottkybarrier has been assumed to be present between metallic andsemiconducting CNTs, and M–S junctions are consideredto be electrically insulating since M–M or S–S junctionconductance can be two orders of magnitude higher thanM–S junction conductance [28]. We also showed in ourprevious work [20] that in general heat transfer across theCNT junctions is negligible in comparison to heat transferacross the CNT–SiO2 interface. Therefore the poor thermalcontact conductance between CNTs makes crossed-CNTcontacts thermally insulating as well [20]. This impliesthat the network can be considered to be composed oftwo independent ‘parallel’ networks of different densitiesand conductivities. Therefore the breakdown behavior andcharacteristics discussed are due to the combined breakdownbehavior of pure metallic and semiconducting networks.Figure 8(a) shows a plot of power dissipation versus VSDfor different θavg at ρ = 15 CNTs µm−2 for a homogeneousnetwork (semiconducting CNTs only). We find that VBD andPBD exhibit only one minimum (θavg = 20◦) and maximum(θavg = 36◦) respectively (figures 8(b) and (c)). A similar

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Figure 8. (a) Plot of power dissipation in the device versus source-to-drain voltage (VSD) for different alignments (θavg) of CNTs in apurely semiconducting network. (b), (c) Breakdown voltage (VBD) and peak power (PBD) are plotted versus θavg. Here Lt = 2 µm,LC = 10 µm, WC = 10 µm, and ρ = 15 CNTs µm−2.

Figure 9. A bar plot of (a) breakdown voltage (VBD) and (b) peakpower dissipation (PBD) versus network alignment (θavg) formetallic (ρ = 7.5 CNTs µm−2) and semiconducting(ρ = 15 CNTs µm−2) networks. The letters ‘m’ and ‘M’ denote thelocations of minima and maxima respectively. The metallic tosemiconducting CNT density ratio is 1:2 which is same as that in atypical unsorted CNT network.

trend is observed for pure metallic CNT networks. It shouldbe noted, however, that the density of the metallic andsemiconducting networks is in a 1:2 ratio within the combinednetwork, and the location of maxima or minima of thebreakdown characteristics depends on ρ (figures 9(a) and (b)).This is responsible for the existence of the two local optimumpoints in the breakdown characteristics of the heterogeneousnetwork.

3.2.2. Variable alignment angle with log-normal distributionof CNT length. We previously discussed the dependenceof the breakdown behavior on the alignment of CNTswhere Lt was kept constant. In this section, we study the

Figure 10. Three different log-normal CNT length distributions ina network with average CNT length 〈Lt〉 = 1, 1.15 and 1.3 µm.

breakdown behavior for a more general case where both CNTlength and alignment are varied according to their respectivedistributions. Figure 10 illustrates the log-normal distributionof Lt in the network. Here, the device size is LC × WC =

5 µm × 5 µm, and ρ = 15 CNTs µm−2. All CNTs areconsidered to be semiconducting to analyze only the effectsof length and alignment distributions. We consider threedifferent cases of log-normal length distributions (averageLt, 〈Lt〉 = 1, 1.15 and 1.3 µm) and nine cases of alignmentdistributions (range of θavg = 9◦ (highly aligned network) to45◦ (random network)). The log-normal distribution is givenby the following equation:

f (Lt, µ, σ ) =1

Ltσ√

2πexp

[−(ln Lt − µ)

2

2σ 2

](7)

where f is the probability distribution function, Lt is theCNT length, µ is the mean and σ is the standard deviationof the CNT length. It should be noted that the log-normaldistribution of CNT length has a practical significance asthis distribution is typically observed in the experiments[25, 32]. We expect the log-normal distribution to affectthe reliability and breakdown characteristics of homogeneousCNT networks, as a previous study [24] reported that theresistivity of heterogeneous networks varies with change inthe parameters of the log-normal distribution.

7

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Nanotechnology 24 (2013) 405204 M P Gupta et al

Figure 11. A bar plot of (a) breakdown voltage (VBD), (b) normalized standard deviation (σnorm) of VBD, (c) peak power (PBD) and(d) normalized standard deviation (σnorm) of PBD for varied alignment and length distributions of the CNT network. VBD shows littlevariation as the alignment or length distribution is changed, whereas PBD shows a strong correlation with alignment; this correlationchanges significantly as the length distribution is changed.

The results (figure 11) suggest that the effect of thealignment on the breakdown behavior strongly depends onthe Lt distribution. We find that an Lt distribution with higher〈Lt〉 provides higher PBD. Also, the θavg corresponding to themaximum PBD decreases when 〈Lt〉 is increased. In otherwords, better thermal reliability can be obtained when 〈Lt〉

is higher and the network is partially aligned. Interestingly,VBD does not show much variation despite the fact that PBDchanges significantly. The trend of PBD can be explainedon the basis of the trade-off associated with the number ofpercolating paths and the resistance of these paths. At lowerθavg, the number of percolating paths in the channel will belower, but the resistance of these pathways will be also lowdue to the lower number of CNT junctions in these pathways.For higher values of θavg, the network tends toward a randomdistribution and the number of connections in the networkincreases, i.e., the number of effective percolative pathwaysincreases, but the CNT junction density per pathway alsoincreases. Therefore a maximum current (or power) shouldbe achieved for some intermediate θavg which offers optimalchannel resistance. As mentioned earlier, this optimal valueof θavg decreases as 〈Lt〉 increases. We also note that thestandard deviations in VBD and PBD show little variationwith change in 〈Lt〉 and θavg. However, their normalizedvalues (σnorm) change due to the variation in the meanvalues of the respective variables. More details about powervariation with VSD have been included in the supplementaryinformation (section S3 available at stacks.iop.org/Nano/24/405204/mmedia).

4. Conclusion

In summary, we have studied the effects of channel geometryand network morphology on the high field breakdown ofcarbon nanotube network thin film transistors (CN-TFTs). Weapplied both experimental and computational techniques toexamine the heat dissipation in the devices and provide anin-depth analysis of two important characteristics (PBD andVBD) relevant to the breakdown process in CN-TFTs. Weobserved that the breakdown characteristics vary significantlywith the channel length, but their dependence on the channelwidth is relatively very small. In a heterogeneous network,the breakdown characteristics and their relation with thenetwork morphology vary with the ratio of metallic andsemiconducting CNTs in the network. The analysis ofbreakdown behavior of CN-TFTs for various log-normalCNT length distributions and several alignment distributionssuggests that the heat dissipation and thermal reliability ofCN-TFTs can be significantly improved by optimizing thenetwork morphology parameters.

Acknowledgments

Work at the Georgia Institute of Technology was sponsoredby the National Science Foundation (NSF) grants ECCS-1028569 and CCF-1319935. Work at the University ofIllinois Urbana-Champaign was sponsored in part by theNSF CAREER grant ECCS 0954423 (EP), the NSF GraduateResearch Fellowship (DE), and the Office of Naval Research

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Nanotechnology 24 (2013) 405204 M P Gupta et al

(ONR) grant N00014-10-1-0853 (AB). The authors thankMark C Hersam, Vinod Sangwan and Deep Jariwala forproviding CNT networks and Edmond Chow for electron-beam (e-beam) lithography.

References

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[2] Cao Q and Rogers J A 2009 Ultrathin films of single-walledcarbon nanotubes for electronics and sensors: a review offundamental and applied aspects Adv. Mater. 21 29–53

[3] Ha M, Xia Y, Green A A, Zhang W, Renn M J, Kim C H,Hersam M C and Frisbie C D 2010 Printed, sub-3 V digitalcircuits on plastic from aqueous carbon nanotube inks ACSNano 4 4388–95

[4] Hu L, Hecht D S and Gruner G 2010 Carbon nanotube thinfilms: fabrication, properties, and applications Chem. Rev.110 5790–844

[5] Kocabas C, Pimparkar N, Yesilyurt O, Kang S J, Alam M Aand Rogers J A 2007 Experimental and theoretical studiesof transport through large scale, partially aligned arrays ofsingle-walled carbon nanotubes in thin film type transistorsNano Lett. 7 1195–202

[6] Schymura S, Kuhnast M, Lutz V, Jagiella S,Dettlaff-Weglikowska U, Roth S, Giesselmann F,Tschierske C, Scalia G and Lagerwall J 2010 Towardsefficient dispersion of carbon nanotubes in thermotropicliquid crystals Adv. Funct. Mater. 20 3350–7

[7] Wang C, Takei K, Takahashi T and Javey A 2013 Carbonnanotube electronics—moving forward Chem. Soc. Rev.42 2592–609

[8] Park S, Vosguerichian M and Bao Z 2013 A review offabrication and applications of carbon nanotube film-basedflexible electronics Nanoscale 5 1727–52

[9] Okuda S, Okamoto S, Ohno Y, Maehashi K, Inoue K andMatsumoto K 2012 Horizontally aligned carbon nanotubeson a quartz substrate for chemical and biological sensingJ. Phys. Chem. C 116 19490–5

[10] Alizadegan R, Liao A, Xiong F, Pop E and Hsia K 2012Effects of tip–nanotube interactions on atomic forcemicroscopy imaging of carbon nanotubes Nano Res.5 235–47

[11] Sun D-M, Timmermans M Y, Tian Y, Nasibulin A G,Kauppinen E I, Kishimoto S, Mizutani T and Ohno Y 2011Flexible high-performance carbon nanotube integratedcircuits Nature Nanotechnol. 6 156–61

[12] Kumar S, Murthy J Y and Alam M A 2005 Percolatingconduction in finite nanotube networks Phys. Rev. Lett.95 066802

[13] Kumar S, Pimparkar N, Murthy J Y and Alam M A 2006Theory of transfer characteristics of nanotube networktransistors Appl. Phys. Lett. 88 123505

[14] Cao Q, Hur S H, Zhu Z T, Sun Y G, Wang C J, Meitl M A,Shim M and Rogers J A 2006 Highly bendable, transparentthin-film transistors that use carbon-nanotube-basedconductors and semiconductors with elastomeric dielectricsAdv. Mater. 18 304–9

[15] Cao Q, Kim H-S, Pimparkar N, Kulkarni J P, Wang C,Shim M, Roy K, Alam M A and Rogers J A 2008

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[16] Wang C, Zhang J, Ryu K, Badmaev A, De Arco L G andZhou C 2009 Wafer-scale fabrication of separated carbonnanotube thin-film transistors for display applications NanoLett. 9 4285–91

[17] Arnold M S, Green A A, Hulvat J F, Stupp S I andHersam M C 2006 Sorting carbon nanotubes by electronicstructure using density differentiation Nature Nanotechnol.1 6

[18] Cao Q, Han S-J, Tulevski G S, Zhu Y, Lu D D and Haensch W2013 Arrays of single-walled carbon nanotubes with fullsurface coverage for high-performance electronics NatureNanotechnol. 8 180–6

[19] Estrada D and Pop E 2011 Imaging dissipation and hot spotsin carbon nanotube network transistors Appl. Phys. Lett.98 073102

[20] Gupta M P, Chen L, Estrada D, Behnam A, Pop E andKumar S 2012 Impact of thermal boundary conductanceson power dissipation and electrical breakdown of carbonnanotube network transistors J. Appl. Phys. 112 124506

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[24] Hicks J, Behnam A and Ural A 2009 Resistivity in percolationnetworks of one-dimensional elements with a lengthdistribution Phys. Rev. E 79 012102

[25] Behnam A et al 2013 High-field transport and thermalreliability of sorted carbon nanotube network devices ACSNano 7 482

[26] Kumar S, Alam M A and Murthy J Y 2007 Computationalmodel for transport in nanotube-based composites withapplications to flexible electronics J. Heat Transfer129 500–8

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[28] Fuhrer M S et al 2000 Crossed nanotube junctions Science288 494–7

[29] Hata K, Futaba D N, Mizuno K, Namai T, Yumura M andIijima S 2004 Water-assisted highly efficient synthesis ofimpurity-free single-walled carbon nanotubes Science306 1362–4

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1

Supplementary Information

High Field Breakdown Characteristics of Carbon Nanotube Thin Film

Transistors

Man Prakash Gupta1, Ashkan Behnam

2, Feifei Lian

2, David Estrada

2, Eric Pop

2, 3, and Satish

Kumar1

1G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta,

GA 30332, USA

2Micro & Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, IL 61801,

USA and

Dept. of Electrical & Computer Eng., University of Illinois, Urbana-Champaign, IL 61801, USA 3Beckman Institute, University of Illinois, Urbana-Champaign, IL 61801, USA

Email: [email protected]

S1. Characterization of Single-Walled Carbon Nanotube (SWCNT) Dispersions

and Networks

Results of Raman spectroscopy (at a wavelength of 632 nm) on CNT networks of different

fractions of semiconducting CNTs are shown in figure S-1a. [S1] The location and intensity of

the G+ peak at 1591 cm-1 is nearly constant. The relative intensity of the G

- peak at 1567 cm-1

depends on the fraction of SWCNTs in the CNT network which suggests that the G- peak can be

attributed to the semiconducting CNTs. The location of G- peak corresponds to the tubes with

average diameter of 1.6 nm. The quantitative information about the chirality of the CNT network

is obtained by the analysis of the optical spectra (Figure S-1b). We have also characterized the

diameter and average length of SWCNTs by atomic force microscopy (AFM) (Figure S-1c,d).

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Figure S-1 (a) G-band Raman spectra of CN-TFT devices with different proportions of

semiconducting SWCNTs suggesting diameters of about 1.5 nm, (b) Absorption spectra of

unsorted (as-purchased arc discharged) is compared with SWNTs having 67% semiconducting

CNTs. (c) Histogram of diameter distribution of 30 SWCNTs characterized by AFM with an

average diameter of approximately 1.5nm, (d) Histogram of length distribution of 334 SWCNTs

having an average length approximately 1.4 μm.

(a)

(c) (d)

(b)

(c)

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S2. Breakdown Characteristics from Experiments

Figure S-2 (a) Variation of the breakdown voltage VBD versus channel length (LC). Experimental

results are obtained for limited number of devices (total ~30 devices including all the cases).

Nevertheless, the general trend agrees well with the simulation results. (b) Variation of

normalized maximum current (normalized with respect to W) versus ON/OFF ratio of CN-TFTs.

For devices with higher ON/OFF ratio, the maximum current density before breakdown is

observed to be lower compared to the devices with lower ON/OFF ratio. We observed that for

semiconducting networks the maximum current is usually lower than the metallic network.

Therefore, narrow networks which have more semiconducting paths show lower current

capacity. It should be noted that such dependence is observed only when W is less than or

comparable to average CNT length and does not exist in case of larger W.

100

101

102

103

104

0

10

20

30

40

50

60

70

80

No

rm. M

ax. C

urr

en

t (

A/

m)

ON/OFF Ratio

0 5 10 15 20 25 30 35

20

40

60

80

100

120

Me

an

Bre

akd

ow

n V

olta

ge

(V

)

Channel Length ( m)

(a)(b)

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Table of Parameters used in Electro-Thermal ModelS1

Variable Name Nominal Value

= (T-T∞)/(Q’dLt/kt) Non-dimensional Temperature -

T Temperature (Kelvin)

T∞ Ambient Temperature 298 K

Q’ Reference Power 1 W

d Diameter 1.5 nm

Lt CNT length 2 µm

kt Thermal conductivity of CNT 1000 W/mK

tOX Oxide thickness 300 nm

tSi Si thickness 500 µm

g Non-dimensional thermal

conductance at CNT-oxide

interface

2x10-4

CG Non-dimensional thermal

conductance at CNT-CNT

junction

10-7

kOX Thermal conductivity of oxide 1 W/mK

Cij Charge transfer coefficient 50

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S3. Breakdown Behavior for Varied CNT Alingment and (lognormal) Length

Distribution

Figure S-3. Variation in power dissipation with source-to-drain voltage for several alignment

cases; CNT length distribution corresponds to μ = 0, σ = 1 and average CNT length = 1.3 μm.

Maximum power dissipation increases with θavg for θavg = 9° to 18°, however it decreases

significantly for further increase in θavg, i.e., the maximum power dissipation is highest for θavg =

18°. It can be noted that the random network (θavg = 45°) shows the poorest performance from

the point of breakdown behavior and thermal reliability. Interestingly, the voltage corresponding

to the peak power does not vary much as θavg is changed despite the fact that peak power can

change upto three times in the range of θavg considered.

0 10 20 30 40 500

0.02

0.04

0.06

VSD

(V)

Pow

er

(mW

)

9

13

18

22

27

32

36

40

45

avg

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Figure S-4. Variation in power dissipation with source-to-drain voltage for several

alignmentcases; CNT length distribution corresponds to μ = 0, σ = 0.5 and average CNT length =

1.15 μm. Maximum power dissipation is highest for θavg = 18°. It can be noted here that both

highly aligned (θavg = 9°) and random network (θavg = 45°) show the poorest performance from

the point of breakdown behavior and thermal reliability.

Figure S-5. Variation in power dissipation with source-to-drain voltage for several alignment

cases; CNT length distribution corresponds to μ = 0, σ = 0.25 and average CNT length = 1 μm.

Maximum power dissipation is highest for θavg = 22°. It can be noted here that the highly aligned

0 10 20 30 40 500

0.01

0.02

0.03

0.04

0.05

VSD

(V)

Pow

er

(mW

)

9

13

18

22

27

32

36

40

45

avg

0 10 20 30 40 500

0.01

0.02

0.03

0.04

VSD

(V)

Pow

er

(mW

)

9

13

18

22

27

32

36

40

45

avg

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network (θavg = 9°) shows the poorest performance from the point of breakdown behavior and

thermal reliability. Also, the difference in the highest maximum power dissipation (at θavg = 22°)

and maximum power dissipation of random network (θavg = 45°) is significantly less compared

to previous two cases (see Figs. S3 and S4). This trend is very similar to that obtained for

constant CNT length case since the lognormal CNT length distribtion for this case closely

resembles to constant CNT length case.

References

[S1] Behnam A, Sangwan V K, Zhong X, Lian F, Estrada D, Jariwala D, Hoag A J, Lauhon L J,

Marks T J, Hersam M C and Pop E (2013), “High-Field Transport and Thermal Reliability

of Sorted Carbon Nanotube Network Devices” ACS Nano 7, 482-490

[S2] Gupta M P, Chen L, Estrada D, Behnam A, Pop E and Kumar S (2012), “Impact of

Thermal Boundary Conductances on Power Dissipation and Electrical Breakdown of

Carbon Nanotube Network Transistors”, J. Appl. Phys. 112 124506