furnaces and wet bench area savitha p. wet bench - movement cmos wet bench moving to the new clean...
TRANSCRIPT
Furnaces and Wet bench area
Savitha P
wet bench
- of-fice
hrs:160
wet bench- non office hrs:16
0
Wet oxdn- office hours 160
Wet oxdn- non
office hrs 160
Boron diff of-
fice hrs: 160
Boron diff- non
office hrs: 160
Used 96 12 NaN 48 0 NaN 32 0
Not Used
64 140 NaN 112 160 NaN 128 160
Downtime
0 0 NaN 0 0 NaN 0 0
10
30
50
70
90
110
130
150
170Equipment Utilization Chart
Tota
l no
: of s
lots
/hrs
Wet bench - Movement
• CMOS wet bench moving to the new clean room
• Purchase orders for chemicals still not released
• MOS chemicals will take 3-4 months to ship after release of the purchase order
Furnaces - Movement• All except annealing furnaces moving to Equip.
dev. room• Maintenance need to be done for all– Change thermocouple (Euros 625-650)– Gas connections to suit clean room– New tubes/ clean old tubes
Dektak, 4-probe, Film thickness probe measurement and CPD
• Moving to new clean room– Document made regarding precautions while
moving• Stylus/ probe tip to be protected• Probe head to be cushioned
– CPD moving to Equp. dev. room