furnaces and wet bench area savitha p. wet bench july and august month was very busy cense usage...

Furnaces and Wet bench area Savitha P

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Furnaces and Wet bench area

Savitha P

Wet bench • July and August month was very busy

% Usage (Wet bench)

Cense

Physics

ISU

ECE

MRC

INUP

Mecheng

CeNSE usage includes •lab course,•INUP hands-on•electroplating slots

Need to have purple-nitrile gloves for all processes?

Page 3: Furnaces and Wet bench area Savitha P. Wet bench July and August month was very busy CeNSE usage includes lab course, INUP hands-on electroplating slots

Wet bench - Maintenance

• Process run sheets for monthly monitoring of– Silicon etches – TMAH & KOH – oxide etching– Electrodeposition

Electrodeposition Cu - August

Furnaces% Usage (Dry oxidation)

Cense

INUP

ECE

Unused % Usage (Phosphorus diffusion)

Cense

ISU

INUP

Unused

The exhaust problem for the Phosphorus diffusion has been solved

Furnace

% Usage (Wet oxdn)

Cense

MRC

ECE

Mech

isu

INUP

Unused

Furnace-Monthly chart

Page 6: Furnaces and Wet bench area Savitha P. Wet bench July and August month was very busy CeNSE usage includes lab course, INUP hands-on electroplating slots

Issues• All furnaces have temperature control

problems, especially Boron/wet diffusion– Problem with the temperature control board?– Maintenance engineer expected in Sept

Page 7: Furnaces and Wet bench area Savitha P. Wet bench July and August month was very busy CeNSE usage includes lab course, INUP hands-on electroplating slots

ALD installation• Installation engineer expected on 12th Sept• Needed for installation

– 8 inch wafers for process (6-7)?– 100mm Silicon wafers for test runs (atleast 10 Nos. for process demonstration)– Process gas N2 purity 5.0 (3-6 Bar) – Instrument gas N2 purity 2.5 (5-6 Bar)– Cooling liquid for Huber-chiller (e.g. glycol, -25 deg C) – For process gases: 6mm Stainless Steel tube or thick wall Teflon tube outer diameter

6mm, inner diameter 3mm with ¼” VCR connection– For instrument gas flexible tube 4-10mm– Precursors e.g. TMA, DEZn, DI-water…– N2 (purity 2.5) for Dry pump min. 20SLM!!! 6mm tube. – Cooling system for dry pump (This should be a separate cooling unit apart from

Unichiller shipped along with ALD tool)– Helium leak detector available– In Addition to that all the necessary Electrical inputs, N2 Generator for both

instrument and process gas supplies as specified earlier.

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