ILS SeriesH I G H - P E R F O R M A N C E M I D - R A N G E T R A V E L L I N E A R S T A G E S

The ILS Series linear stages are available from 50 to 300 mm travel and offer highperformance at low cost. Fast, sub-micron minimum incremental motion is provided in ahighly stiff and robust package. Features include: recirculating ball bearing slides toprovide excellent payload capabilities and long life; FEM-optimized extruded aluminumbody to avoid bending effects or deflection under load. The ILS series are available in ballscrew and linear motor drive versions. The preloaded, backlash-free ballscrew versionprovides rapid motion with fast step and settling times. For PP, CC and CCL models,position measurements are read with a 4000 pts/rev. encoder mounted directly on thescrew. The HA model features an integral linear scale providing 0.1 µm resolutionfeedback. The linear motor version ILS-LM series employs a centered, high efficiency 3-phase synchronous ironless, linear motor as driving element, providing high speed, highacceleration and high system responsiveness. The ILS series stages are ideal for manyprecision industrial applications such as semiconductor wafer inspection, micro-electronicstest and assembly, pick and place, DNA sequencing and laser machining.

F o r M o t i o n , T h i n k N e w p o r t ™

SpecificationsILS ILS-LM

Version PP, CC, CCL (1) HA

Travel Range (mm) 50, 100, 150, 200, 250 100, 200, 300

Minimum Incremental Motion (µm) 1.0 0.3 0.01

Uni-directional Repeatability (µm) PP: 1.5; CC,CCL: 1.0 0.4 0.4

Bi-directional Repeatability (2) (µm) 2.5 or ±1.25 0.7 or ±0.35 0.6 or ±0.3

On-Axis Accuracy (2) (µm) ILS50: 3 or ±1.5; ILS100: 4 or ±2 ILS50: 4 or ±2; ILS100: 3 or ±1.5 ILS100: 3 or ±1.5

ILS150: 5 or ±2.5; ILS200: 7.5 or ±3.75 ILS150: 4 or ±2; ILS200: 6 or ±3 ILS200: 4 or ±2

ILS250: 10 or ±5 ILS250: 7.5 or ±3.75 ILS300: 5 or ±2.5

Maximum Speed (mm/s) PP: 50; CCL & CC: 100 100 500 (4)

Pitch (2) (3) (µrad) ILS50: 50 or ±25; ILS100: 100 or ±50 300 or ±150

ILS150: 150 or ±75; ILS200: 200 or ±100

ILS250: 250 or ±125

Yaw (2) (3) (µrad) ILS50: 50 or ±25; ILS100: 75 or ±37.5 ILS100: 75 or ±37.5

ILS150: 100 or ±50; ILS200: 130 or ±65 ILS200: 130 or ±65

ILS250: 150 or ±75 ILS300: 200 or ±100

MTBF (h) 20,000

Weight (kg) ILS50CC: 4.2, ILS100CC: 4.5, ILS150CC: 4.8, ILS200CC: 5.1, ILS250CC: 5.4

1) ILSCCL used with the SMC100CC controller only.2) Shown are peak to peak, guaranteed specifications or ±half the value. For the definition of typicalspecifications which are about 2X better than the guaranteed values, visit newport.com in the MotionControl Metrology Primer.

3) To obtain arcsec units, divide mrad value by 4.8.4) With a 44 V driver (such as the XPS-DRV02 board of the XPS controller).

• High stiffness, FEM optimized extruded aluminum bodyavoids thermal bending effects

• Precision recirculating ball bearing slides provideaccurate linear motion without ball cage migration

• Ball screw drive version allows rapid movement withshort step and settling time

• LM version with 3-Phase synchronous ironless linearmotor with linear steel scale

GUA

RANTEED

SPECIFICATIO

NS

RoHSCompliant

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Design Details

ILS ILS-LM

Base Material Extruded Aluminum

Bearings Double-row recirculating ball bearings

Drive Mechanism Backlash-free 3-phase synchronous ironless linear motor

ball screw (without Hall effect sensors)

Drive Screw Pitch (mm) 2 –

Feedback CC, CCL, PP: Screw mounted rotary encoder, Linear steel scale,

4,000 pts/rev, index pulse 20 µm signal period, 1 Vpp

HA: Linear steel scale, 20 µm signal period

Limit Switches Optical

Origin Optical, at center of travel, including mechanical zero signal

Cable Length (m) 3 (included) 5 (included)

MTBF (h) 20,000

Dynamic Specifications (LM Models)

Maximum Acceleration, No Load (m/s2) 20

Max. Force [Cont.] (N) 15

Max Force [Peak] 4 s (N) 30

For the definition of specifications, visit newport.com in the Motion Basics and Standards.

Recommended Motion Controllers/Drivers

XPS

ESP301

SMC100 ILSCCL and ILSPP only

Motor cables are included.

ILS ILS-LMCz, Normal center load capacity on bearings 250 N+Cx; -Cx, Direct/Inverse load capacity

on X axis <40 N –kαx, Compliance in roll 15 µrad/N.mkαy, Compliance in pitch 10 µrad/N.mkαz, Compliance in yaw 10 µrad/N.mQ, Off-center load Q ≤Cz/(1 + D/60)D, Cantilever distance in mm

kαykαx

Z

QD

YCz

X

– Cx

+ Cx

Model Series Travel Drive (mm) 50

CC 100

CCL

M- ILS 150

HA 200

PP 250

LM (2)

300 (1)

1) Only for LM drive version.2) 100, 200 and 300 mm travels only.

M-: For metric versionCC: DC motorCCL: DC motor for SMC100CC controllerHA: DC motor with linear encoderPP: Stepper motorLM: Linear motor

Example:The ILS150HA is an ILS stage with 150 mm travel, a DC motor drive with linear encoder, in English version.

Z

kαx Y

QD

CzXkαy kαz

Load Characteristics

ILS Stages (PP, CC, CCL, HA)

ILS-LM Stages

Ordering Information

L3

3.94 (100)A

n1 x 2 CLEARANCE HOLESFOR M6 SCREWS

A

3.00(76.2)B B

4.33 (110)4.33 (110)

4.53 (115) L2 3.03 (77).63(16)

L1

2.36(60)

3.94(100)

2.24(57)

SUB-D25M CONNECTOR

4.00(101.6) n2 x 2 CLEARANCE HOLES

FOR 1/4-20 SCREWS

MODEL SHOWN: ILS200DIMENSIONS IN INCHES (AND MILLIMETERS)

VERSIONS CC, CCL AND PP VERSION CCHAMODEL (METRIC) A n1 B n2 L2 L1 L3 L1 L3 (M-)ILS50 – 2 – 2 8 (203) 14 (358) 4.8 (123) 15.5 (394) 6.3 (159)(M-)ILS100 – 2 – 2 10 (253) 16 (408) 4.8 (123) 17.5 (444) 6.3 (159)(M-)ILS150 – 2 3.0 (76.2) 4 12 (303) 18 (458) 4.8 (123) 19.4 (494) 6.3 (159)(M-)ILS200 3.94 (100) 4 3.0 (76.2) 4 14 (353) 20 (508) 4.8 (123) 21.4 (544) 6.3 (159)(M-)ILS250 3.94 (100) 4 3.0 (76.2) 4 16 (403) 22 (558) 4.8 (123) 23.4 (594) 6.3 (159)

ILS Stages (PP, CC, CCL, HA)

Dimensions

An RVS80 mounted in a vertical configurationwith an EQ120 bracket to an ILS stage.

Two IMS stages, one ILS stage, and one EQ120bracket in an XYZ configuration.

See our websitefor CAD filesCAD

Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.

Complete listings for all global office locations are available online at www.newport.com/contact

www.newport.comNewport Corporation, Global Headquarters1791 Deere Avenue, Irvine, CA 92606, USA

PHONE: 1-800-222-6440 1-949-863-3144 FAX: 1-949-253-1680 EMAIL: sales@newport.com

PHONE EMAILBelgium +32-(0)0800-11 257 belgium@newport.comChina +86-10-6267-0065 china@newport.comFrance +33-(0)1-60-91-68-68 france@newport.comJapan +81-3-3794-5511 spectra-physics@splasers.co.jpTaiwan +886 -(0)2-2508-4977 sales@newport.com.tw

PHONE EMAILIrvine, CA, USA +1-800-222-6440 sales@newport.comNetherlands +31-(0)30 6592111 netherlands@newport.comUnited Kingdom +44-1235-432-710 uk@newport.comGermany / Austria / Switzerland +49-(0)6151-708-0 germany@newport.com

Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.

Complete listings for all global office locations are available online at www.newport.com/contact

www.newport.comNewport Corporation, Global Headquarters1791 Deere Avenue, Irvine, CA 92606, USA

PHONE: 1-800-222-6440 1-949-863-3144 FAX: 1-949-253-1680 EMAIL: sales@newport.com

PHONE EMAILBelgium +32-(0)0800-11 257 belgium@newport.comChina +86-10-6267-0065 china@newport.comFrance +33-(0)1-60-91-68-68 france@newport.comJapan +81-3-3794-5511 spectra-physics@splasers.co.jpTaiwan +886 -(0)2-2508-4977 sales@newport.com.tw

PHONE EMAILIrvine, CA, USA +1-800-222-6440 sales@newport.comNetherlands +31-(0)30 6592111 netherlands@newport.comUnited Kingdom +44-1235-432-710 uk@newport.comGermany / Austria / Switzerland +49-(0)6151-708-0 germany@newport.com

ILS_

DSE (03/14)

MODEL SHOWN: ILS300LMDIMENSIONS IN INCHES (AND MILLIMETERS)

MODEL (METRIC) n1 n2 C TRAVEL L (M-)ILS100LM 2 2 1.08 (27.5) 3.94 (100) 11.22 (285)(M-)ILS200LM 4 4 2.76 (70) 7.87 (200) 15.16 (385)(M-)ILS300LM 4 4 3.54 (90) 11.8 (300) 19.09 (485)

4.33(110)

3.94(100)

4.72(120)

1.18(30)

2.36(60)

1.18(30)C

3.0(76.2)

3.0(76.2)

3.94(100)

3.94(100)

3.94(100)

3.0(76.2)

L

.47(12)

.41(10.5)

C

4.53(115)

2.58(65.5)

4.0(101.6)

3.94(100)

.77 (19.5)

4 HOLES M4 THD ON 2.95 x .31 (75 x 8)DEPTH: .31 (8)

EACH SIDE:2 HOLES M4 THD,DEPTH: .31 (8)

EACH SIDE:7 HOLES M4 THD,DEPTH: .31 (8)

n1 x 2 HOLES CLRFOR M6 SCREWS

n2 x 2 HOLES CLRFOR 1/4-20 SCREWS

ILS-LM Stages

See our websitefor CAD filesCAD