FE-SEM SU-8020 Operating manual （Preliminary version）

Seimitsu Bunseki sitsu lab. 2016/04/11

Starting up

2

１．Turn on the Display switch. Windows OS is starting up

２. Select the user “SU-8000”.

４. Press the Enter. SEM software will start.

３. Click the PC-SEM icon. Usually, PC-SEM software starts automatically.

3

1. If the “flashing” message is displayed, you operate the under procedure.

2. Click the HV display area. (Black area) 3. Click the “Flashing” bottom. 4. Check the Intensity is 2, Click the “Execute” bottom. 5. Applied about 30 uA current to electron gun. 6. About the 30 min waiting for stabilizing the electron

gun.

Flashing

Sample preparation

4

1. Mount the samples on the each stabs. 2. Set the stabs to the sample holder. 3. Adjust the stabs to the proper height. 4. Tighten the screw. 5. Adjust the sample holder to the proper height using the height gauge. Adjust

the height so that the highest point of the sample holder is the same as the bottom of the height gauge.

bottom

screw

Stab (brass)

Sample holder(Al)

Height gauge 15mmφ stab (brass) Sample holder (Al)

Height gauge

5

Sample loading 1 (Confirm the exchange position)

1. Confirm the accelerating voltage is off. 2. Confirm the the Home lamp indicator is green, X=0.0 mm, Y=0.0 mm and

Z=8.0 mm on the display. ( Exchange position ) 3. Press the Air switch on the Intro chamber control panel.

Intro chamber control panel.

6

Sample loading 2 1. If the buzzer sounded, pull the Intro chamber. 2. Push the specimen exchange rod slightly to unlock it. 3. Set the sample holder ahead of the rod and turn lock. 4. Pull the rod back and make sure it is locked. 5. Push the Intro chamber back and press the “EVAC” switch on the panel.

Intro

Specimen exchange rod

LOCK UNLOCK

7

Sample loading 3 1. Wait until vacuum in the intro chamber is improved enough. 2. The EVAC lamp is lit and the buzzer sounded. 3. Press the “OPEN” switch on the panel. 4. If the buzzer sounded, confirm the gate valve is opened. 5. Push in the rod and set the sample holder in to the stage by sliding it along the

guide rails. 6. Confirm the XC lamp is blue. 7. Turn the rod clockwise to UNLOCK. 8. Pull out the rod fully. 9. Press the “CLOSE” switch.

OPEN

CLOSE EVAC XC lamp

8

1. Click the HV display on the PC. 2. Select voltage and current in the pull-down

menu. 3. Press the ON.

Initial Conditions Vacc 15 kV Ie 10 µA Stage X=0.0, Y= 0.0, Z= 8.0 Probe Current Norm Cond. Lens 5.0 W.D. 8.0 mm Mode TV1

Setting of Accelerating Voltage and Emission Current

Accelerating Voltage

Emission Current

HV display

Operation for image observation 1 (positioning)

9

1. Click the H/L to select the low magnification mode. 2. Use the minimum magnification and make sure that you can see your samples. 3. Click the ABC (Auto Brightness Control) to adjust the image brightness. 4. Adjust the focus using the focus knob (Coarse) on the control panel. 5. Move the stage by trackball.

Magnification knob

Magnification display

Focus knob

Coarse

Control Panel

Operation for image observation 2 (Hi mag.)

10

1. Once you have identified the area of interest, switch to the high magnification mode by clicking on the “H/L button”.

2. Click the ABC (Auto Brightness Control) to adjust the image brightness. 3. Adjust the focus using the focus knob (fine) on the control panel.

Magnification knob

Magnification display

Focus knob

Fine

Control Panel

11

Beam alignment 1. Perform the following alignment when you change the accelerating voltage and

operation mode. 2. Click the “B Align” button and open the Alignment window. 3. A circular image will appear and make adjustments with alignment knobs on the

control panel so that the circular image appears in the center of the screen.

Beam alignment screen

Alignment menu

12

Aperture alignment

Alignment menu

1. Set the magnification over x20.0k and position a point of interest in the center of the display.

2. Focus the image. 3. Select the “Aperture Align.” button in the Alignment menu. 4. Make the adjustments using the X and Y knobs on the control panel so that the

wobbling motion of the image is minimized. 5. Select “Off” button.

X,Y Knobs

Stigma Alignment

13

Under-fucus Best Focus Over Focus

STIGMA/ALIGNMENT X Y

Stigma alignment is necessary to minimize the image drift. 1. Set the magnification over x20.0 k and position a point of interest in the

center of the display. 2. Focus the image. 3. Select the “Stigma Align. X” in the Alignment menu and make adjustments

by using stigma/alignment X or Y knobs so that the wobbling motion of the image is minimized. Repeat the same for the Y direction.

Stretching Stretching

14

Capture Setup 1. Click the black triangle above the capture button. Open the Capture Setup

window. 2. Select the Mode. ( TV, Fast and Slow/CS ) 3. Select Resolution (image size) and Speed (scan speed) by using pull-down

menu. 4. Click the “OK” button to set the conditions.

Initial conditions Mode Slow scan Resolution 1280 × 960 pixels Speed 20 sec

15

Capturing and saving images

Capture

1. Press the “Capture” button on the main window. The image stored in the “Capture Box” window. The image is not saved until you click the “Save” button on the Capture Box window.

2. Select the images (turn to yellow). All of the images are selected by clicking the “All” button.

3. Click the “Save” button, open the “Image save” window. 4. Select the folder and image type. And Enter the image name. 5. Press the “Save” button on the “Image save” window, images are saved.

Capture Box window

Sample exchange1

16

1. Decrease to minimum the magnification. 2. Click the “Home” button in the main window. The sample stage is moved to

the exchange position. 3. Confirm the Home lamp is green, X= 0.0, Y=0.0 and Z=8.0. 4. Turn the high voltage off. (click the “OFF” button) 5. Push the “OPEN” button on the Intro panel.

17

Sample exchange 2 1. If buzzer sounded, open the gate valves. 2. Confirm the gate valve is opened. Push the rod in the fully. 3. Confirm the XC lamp is blue. 4. Turn the rod counterclockwise to LOCK. 5. Pull out the rod fully. 6. Push the “CLOSE” switch to close the gate valve.

Intro chamber

exchange rod

LOCK UNLOCK

18

Sample exchange 3

1. If buzzer sounded, confirm the gate valve is closed. 2. Press the “AIR” switch. 3. If buzzer sounded, pull the intro chamber. 4. Wear gloves to handle the holder. 5. Push the specimen exchange rod slightly to unlock it. 6. Release the sample holder of the rod. 7. Pull the rod back and make sure it is locked. 8. Push the Intro chamber back and press the “EVAC” switch on the panel.

OPEN

CLOSE EVAC XC

AIR

Daily Shutdown

19

1. Confirm the EVAC lump is lit. 2. Delete the images in the Capture box. 3. Save the image files from SEM-PC to your mobile storage (USB

memory and HDD). 4. Reset the conditions to initial conditions. 5. Fill the log book with your entry (Labo name, your name, HV, Ie, and

sample name). Last user 1. Close the PC-SEM software 2. Close the Windows.