facfac : ::: 964- 9,suwalam- ri, seotan- myun, pyungtak- si, … · 2011. 1. 19. · facfac : :::...

FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529

Home Page: http://www/precellinc.com


• Establish Date : APR. 20. 2005.

• Main Products ;

PRODUCTS

Process Equipment Description Type Status Remark

CVD Various 200mm /300mm AlN Heater Various Repair

CVD Various 300mm TEL Stage Heater Various Repair

CVD Various 200mm/300mm Speed ESC Various Repair

PVD Various Magnet Assembly A.B.G12 Repair

ETCH LAM 200mm ESC Ass’y Alliance Repair

ETCH LAM 2300 Series ESC Star-T

Exelan

Repair


• Address : 964-9, Suwaulam-Ri, Seotan-Myun, Pyungtak-Si, Kyungki-Do, Korea경기도경기도경기도경기도평택시평택시평택시평택시서탄면서탄면서탄면서탄면수월암리수월암리수월암리수월암리 964-9

T : 82-31-662-6521 F : 82-31-662-6529 E-Mail : [email protected]

ETCH TEL 300mm Tellius ESC 30444 SSS Poly

30555 SSS TE

Repair & New

ETCH TEL 300mm SCCM ESC Repair & New

Implanter Varian 200mm ESC Platen Ass’y E220/E500 Repair & New

Implanter Varian 300mm ESC Ass’y Viista80/Viista810 Repair & New

Implanter Nissin 200mm/300mm ESC Ass’y Repair & New

PVD Novellus 200mm/300mm Inova ESC Repair

PVD ULVAC 300mm ESC Ass’y Entron Repair & New


대표이사대표이사대표이사대표이사대표이사대표이사대표이사대표이사

관리관리관리관리관리관리관리관리//영업팀영업팀영업팀영업팀영업팀영업팀영업팀영업팀 기술개발팀기술개발팀기술개발팀기술개발팀기술개발팀기술개발팀기술개발팀기술개발팀 생산팀생산팀생산팀생산팀생산팀생산팀생산팀생산팀

Organization Chart

기술고문기술고문기술고문기술고문기술고문기술고문기술고문기술고문


관관관관리리리리및및및및총총총총무무무무국국국국내내내내및및및및해해해해외외외외영영영영업업업업 New

ProductsESC

M

Ceramic

Magnets

ESC

Q

C


세라믹히터와세라믹히터와세라믹히터와세라믹히터와Aluminum Cap분리분리분리분리

오염물질제거오염물질제거오염물질제거오염물질제거

표면표면표면표면평탄도평탄도평탄도평탄도작업작업작업작업

래핑및래핑및래핑및래핑및폴리싱작업폴리싱작업폴리싱작업폴리싱작업

딤플재생작업딤플재생작업딤플재생작업딤플재생작업(필요시필요시필요시필요시)

Rework of ALN Heater


전극및전극및전극및전극및Ground전극전극전극전극용접작업용접작업용접작업용접작업

세라믹히터와세라믹히터와세라믹히터와세라믹히터와CAP조립작업조립작업조립작업조립작업

리크측정및리크측정및리크측정및리크측정및온도온도온도온도측정측정측정측정

정밀세정정밀세정정밀세정정밀세정

진공포장및진공포장및진공포장및진공포장및납품납품납품납품


AlN 히터와히터와히터와히터와Aluminum Cap분리작업분리작업분리작업분리작업오염오염오염오염물질물질물질물질제거제거제거제거작업작업작업작업평탄도평탄도평탄도평탄도작업작업작업작업딤플재생작업딤플재생작업딤플재생작업딤플재생작업(필요시필요시필요시필요시)

손상된손상된손상된손상된부품교체부품교체부품교체부품교체 (O-Ring,

Rework of TEL 300mm Trias Heater CVD)

4전극전극전극전극및및및및 1Ground 전극전극전극전극재재재재용접용접용접용접


히터히터히터히터Body Cleaning

손상된손상된손상된손상된부품교체부품교체부품교체부품교체 (O-Ring,

Gasket,Feedthrough)

AlN히터와히터와히터와히터와Aluminum Cap조립작업조립작업조립작업조립작업

리크측정및리크측정및리크측정및리크측정및온도측정온도측정온도측정온도측정

진공포장및진공포장및진공포장및진공포장및납품납품납품납품

FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529Rework of Magnet (PVD)


손상된손상된손상된손상된 부품부품부품부품 교체교체교체교체Replacement Replacement


O.KO.K..

Data관리및 Incoming Report작성Data관리및 Incoming Report작성딤플딤플딤플딤플재생작업재생작업재생작업재생작업딤플딤플딤플딤플재생작업재생작업재생작업재생작업

육안검사-표면상태-평탄도확인-전극상태확인육안검사-표면상태-평탄도확인-전극상태확인 딤플제거작업

/CMP Process

딤플제거작업/CMP Process

래핑및폴리싱과정(0.2 ~0.3

micron)

래핑및폴리싱과정(0.2 ~0.3

micron)

포장및납품포장및납품

Rework of Novellus HDP ESC 02-121642-00

02-121643-00

02-283811-00

02-264836-00


세정 (Di) & Baking out (150

Degree at 30min)

세정 (Di) & Baking out (150

Degree at 30min)

AlN Plate와 Base 분리작업AlN Plate와 Base 분리작업Chucking TestChucking Test FailureFailure딤플상태확인 -2D

Measurement(High &Flatness)

딤플상태확인 -2D

Measurement(High &Flatness)손상된부품교체손상된부품교체

정밀세정정밀세정

AlN Plate와 Base 용접작업AlN Plate와 Base 용접작업


O.KO.K..

입고후입고후입고후입고후 Data Data Data Data 관리관리관리관리입고후입고후입고후입고후 Data Data Data Data 관리관리관리관리세정작업세정작업세정작업세정작업 (Di) &

Baking out (150

Degree at 1 Hours )

세정작업세정작업세정작업세정작업 (Di) &

Baking out (150

Degree at 1 Hours )

육안육안육안육안검사검사검사검사및및및및기초기초기초기초테스트테스트테스트테스트-ESC 표면상태표면상태표면상태표면상태-단단단단선선선선 유유유유. 무무무무- Chucking Test

육안육안육안육안검사검사검사검사및및및및기초기초기초기초테스트테스트테스트테스트-ESC 표면상태표면상태표면상태표면상태-단단단단선선선선 유유유유. 무무무무- Chucking Test

Silicon Rubber 제거제거제거제거작업작업작업작업(Silicon Rubber & ESC Film)

Silicon Rubber 제거제거제거제거작업작업작업작업(Silicon Rubber & ESC Film)

CustomersCustomers

Rework of ULVAC ESC (Silicon Rubber – AlN)

Base Plate 표면표면표면표면 폴리싱폴리싱폴리싱폴리싱Base Plate 표면표면표면표면 폴리싱폴리싱폴리싱폴리싱


AlN CoatingAlN Coating

CleaningCleaning

FailureFailure

Elastomer BondingElastomer Bonding

전극층전극층전극층전극층 코팅코팅코팅코팅전극층전극층전극층전극층 코팅코팅코팅코팅Chucking Testing at

300V

Temp. Test

at 300 degree

Chucking Testing at

300V

Temp. Test

at 300 degree

표면표면표면표면 폴리싱폴리싱폴리싱폴리싱표면표면표면표면 폴리싱폴리싱폴리싱폴리싱

FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529Rework of Novellus INOVA ESC

Alumina(Al2O3)

Preparation

Alumina(Al2O3)

Preparation

Flatness Control by

Lapping & Polishing

Flatness Control by

Lapping & Polishing

Electrode Terminal Welding to

Ceramic Plate

Electrode Terminal Welding to

Ceramic Plate

ESC Film CoatingESC Film Coating

Dielectric Dielectric

CustomersCustomers

19-150752-00

15-270165-00


Dielectric

Coating(Blue) (Front & Backside)

Dielectric

Coating(Blue) (Front & Backside)

Dimple Generation (Front

& Backside)

Dimple Generation (Front

& Backside)

Dimension Check-High of dimples

- Flatness

Dimension Check-High of dimples

- Flatness

Testing(Chucking/Dechucking)

Testing(Chucking/Dechucking)

Final CleaningFinal Cleaning

Surface PolishingSurface Polishing

FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529Rework of Varian E220/E500 ESC

Incoming Report

-Chucking Test

--Surface Condition

Incoming Report

-Chucking Test

--Surface Condition

Disassembly for ESC Plate

and Al Base

Disassembly for ESC Plate

and Al Base Machining

Aluminum Base

Machining

Aluminum Base

Machining of

Ceramic Pieces

Machining of

Ceramic Pieces CustomersCustomers

Final CleaningFinal Cleaning Machining of ESC Machining of ESC


Bonding(ESC Plate & Ceramic

Pate Bonding to

Aluminum Base)

Bonding(ESC Plate & Ceramic

Pate Bonding to

Aluminum Base)Surface Polishing and

Flatness Control

Surface Polishing and

Flatness Control

Cleaning & BakingCleaning & Baking

Chucking TestingChucking Testing

Final CleaningFinal Cleaning Machining of ESC

Plate (DLC)

Machining of ESC

Plate (DLC)


FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529Rework of Varian Viista ESC

Incoming Report

-Chucking Test

- Surface Condition

Incoming Report

-Chucking Test

- Surface Condition

Debonding ESC Plate & Al

base Plate

Debonding ESC Plate & Al

base Plate

Disassembly of Pin,

Strap

Disassembly of Pin,

Strap

Machining of Ceramic

Plate

Machining of Ceramic

Plate

CustomersCustomersMachining of ESC Machining of ESC


Rebonding(ESC Plate & Ceramic

Plate Bonding to

Aluminum Base)

Rebonding(ESC Plate & Ceramic

Plate Bonding to

Aluminum Base)Polishing and Flatness

Control

Polishing and Flatness

Control

Chucking Testing(Chucking Current)

Chucking Testing(Chucking Current)

CleaningCleaning

Machining of ESC

Plate(DLC)

Machining of ESC

Plate(DLC)



Data Logging and Incoming ReportData Logging and Incoming Report

Electrode CoatingElectrode Coating

Ceramic Plate

Bonding(Al2O3+SiO2)

Ceramic Plate

Bonding(Al2O3+SiO2)

Inspection

-Surface Condition

- Flatness Condition

-Electrical Condition

Inspection

-Surface Condition

- Flatness Condition

-Electrical Condition

Removal of Ceramic PlateRemoval of Ceramic Plate Lapping & Polishing of

Base Plate

Lapping & Polishing of

Base Plate

Rework of Varian PLAD ESC


Making of Embossing &

Groove

Making of Embossing &

Groove Chucking TestChucking Test

Dielectric Coating

(Al2O3+SiO2)

Dielectric Coating

(Al2O3+SiO2)

Dimension Check

- High of embossing

- Flatness

Dimension Check

- High of embossing

- Flatness

CleaningCleaning

CleaningCleaning

CustomersCustomers

FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529Rework of TEL SCCM ESC

Data Logging Data Logging Data Logging Data Logging Data Logging Data Logging Data Logging Data Logging Debonding Aluminum Base Debonding Aluminum Base Debonding Aluminum Base Debonding Aluminum Base and Ceramic Plateand Ceramic Plateand Ceramic Plateand Ceramic Plate

Debonding Aluminum Base Debonding Aluminum Base Debonding Aluminum Base Debonding Aluminum Base and Ceramic Plateand Ceramic Plateand Ceramic Plateand Ceramic Plate

Machining of Ceramic PlateMachining of Ceramic PlateMachining of Ceramic PlateMachining of Ceramic PlateMachining of Ceramic PlateMachining of Ceramic PlateMachining of Ceramic PlateMachining of Ceramic Plate Machining of Gas Hole Machining of Gas Hole Machining of Gas Hole Machining of Gas Hole and Lift Pin Holeand Lift Pin Holeand Lift Pin Holeand Lift Pin Hole

Machining of Gas Hole Machining of Gas Hole Machining of Gas Hole Machining of Gas Hole and Lift Pin Holeand Lift Pin Holeand Lift Pin Holeand Lift Pin Hole


Electrode CoatingElectrode CoatingElectrode CoatingElectrode CoatingElectrode CoatingElectrode CoatingElectrode CoatingElectrode CoatingCeramic Coating (100 micron)Ceramic Coating (100 micron)Ceramic Coating (100 micron)Ceramic Coating (100 micron)Ceramic Coating (100 micron)Ceramic Coating (100 micron)Ceramic Coating (100 micron)Ceramic Coating (100 micron)

Bonding of Aluminum Base & Bonding of Aluminum Base & Bonding of Aluminum Base & Bonding of Aluminum Base & Ceramic PlateCeramic PlateCeramic PlateCeramic Plate

Bonding of Aluminum Base & Bonding of Aluminum Base & Bonding of Aluminum Base & Bonding of Aluminum Base & Ceramic PlateCeramic PlateCeramic PlateCeramic Plate

Recoating on Flange SideRecoating on Flange SideRecoating on Flange SideRecoating on Flange SideRecoating on Flange SideRecoating on Flange SideRecoating on Flange SideRecoating on Flange Side

Testing (Chucking & Testing (Chucking & Testing (Chucking & Testing (Chucking & DechucingDechucingDechucingDechucing))))Testing (Chucking & Testing (Chucking & Testing (Chucking & Testing (Chucking & DechucingDechucingDechucingDechucing)))) CleaningCleaningCleaningCleaningCleaningCleaningCleaningCleaning CustomersCustomersCustomersCustomersCustomersCustomersCustomersCustomers


O.KO.KO.KO.KO.KO.KO.KO.K........

입고후입고후입고후입고후기초자료기초자료기초자료기초자료입력입력입력입력(Inspection)(Inspection)(Inspection)(Inspection)입고후입고후입고후입고후기초자료기초자료기초자료기초자료입력입력입력입력(Inspection)(Inspection)(Inspection)(Inspection)

세정세정세정세정(Di) & Baking(Di) & Baking(Di) & Baking(Di) & Baking (150(150(150(150도도도도에서에서에서에서 30303030분분분분))))

세정세정세정세정(Di) & Baking(Di) & Baking(Di) & Baking(Di) & Baking (150(150(150(150도도도도에서에서에서에서 30303030분분분분))))

육육육육 안검사안검사안검사안검사표면 상태 점검전극상태확인척킹력 확인육육육육 안검사안검사안검사안검사표면 상태 점검전극상태확인척킹력 확인 표면표면표면표면물질물질물질물질제거제거제거제거표면표면표면표면물질물질물질물질제거제거제거제거 평탄도평탄도평탄도평탄도작업작업작업작업(폴리싱 “ 0.2 ~ 0.3 micron)

평탄도평탄도평탄도평탄도작업작업작업작업(폴리싱 “ 0.2 ~ 0.3 micron)

고객에게고객에게고객에게고객에게전달전달전달전달고객에게고객에게고객에게고객에게전달전달전달전달

Rework of Nissin IMP ESC (Silicon Rubber – AlN)


씰리콘씰리콘씰리콘씰리콘절연층절연층절연층절연층 본딩본딩본딩본딩씰리콘씰리콘씰리콘씰리콘절연층절연층절연층절연층 본딩본딩본딩본딩

래핑과래핑과래핑과래핑과폴리싱폴리싱폴리싱폴리싱작업작업작업작업래핑과래핑과래핑과래핑과폴리싱폴리싱폴리싱폴리싱작업작업작업작업

세정세정세정세정작업작업작업작업세정세정세정세정작업작업작업작업FailureFailure

표면표면표면표면폴리싱폴리싱폴리싱폴리싱표면표면표면표면폴리싱폴리싱폴리싱폴리싱AlNAlNAlNAlN 코팅코팅코팅코팅(PVD)(PVD)(PVD)(PVD)AlNAlNAlNAlN 코팅코팅코팅코팅(PVD)(PVD)(PVD)(PVD)

척킹테스트척킹테스트척킹테스트척킹테스트표면전류표면전류표면전류표면전류척킹테스트척킹테스트척킹테스트척킹테스트표면전류표면전류표면전류표면전류전극층전극층전극층전극층코팅코팅코팅코팅전극층전극층전극층전극층코팅코팅코팅코팅O.KO.KO.KO.KO.KO.KO.KO.K........평탄도평탄도평탄도평탄도작업작업작업작업평탄도평탄도평탄도평탄도작업작업작업작업

FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529Rework of LAM ESC

AluminAluminAluminAluminum Baseum Baseum Baseum BaseMachiningMachiningMachiningMachining

AluminAluminAluminAluminum Baseum Baseum Baseum BaseMachiningMachiningMachiningMachining

Flatness ControlFlatness ControlFlatness ControlFlatness Controlby Lapping & Polishingby Lapping & Polishingby Lapping & Polishingby Lapping & Polishing

Flatness ControlFlatness ControlFlatness ControlFlatness Controlby Lapping & Polishingby Lapping & Polishingby Lapping & Polishingby Lapping & Polishing

Electrode Terminal Electrode Terminal Electrode Terminal Electrode Terminal ConnectionConnectionConnectionConnection

Electrode Terminal Electrode Terminal Electrode Terminal Electrode Terminal ConnectionConnectionConnectionConnection

ESC Film CoatingESC Film CoatingESC Film CoatingESC Film CoatingESC Film CoatingESC Film CoatingESC Film CoatingESC Film Coating

CustomersCustomersCustomersCustomersCustomersCustomersCustomersCustomers

839-019090-324

839-019090-328

839-800327-385

839-800327-412


Dielectric Dielectric Dielectric Dielectric CoatingCoatingCoatingCoating(Dark Gray(Dark Gray(Dark Gray(Dark Gray))))

Dielectric Dielectric Dielectric Dielectric CoatingCoatingCoatingCoating(Dark Gray(Dark Gray(Dark Gray(Dark Gray))))

Groove Remake Groove Remake Groove Remake Groove Remake Groove Remake Groove Remake Groove Remake Groove Remake

Dimension CheckDimension CheckDimension CheckDimension Check- High of GrooveHigh of GrooveHigh of GrooveHigh of Groove---- FlatnessFlatnessFlatnessFlatness

Dimension CheckDimension CheckDimension CheckDimension Check- High of GrooveHigh of GrooveHigh of GrooveHigh of Groove---- FlatnessFlatnessFlatnessFlatness

TestingTestingTestingTesting(Chucking/(Chucking/(Chucking/(Chucking/ DechuckingDechuckingDechuckingDechucking))))

TestingTestingTestingTesting(Chucking/(Chucking/(Chucking/(Chucking/ DechuckingDechuckingDechuckingDechucking))))

Final CleaningFinal CleaningFinal CleaningFinal CleaningFinal CleaningFinal CleaningFinal CleaningFinal Cleaning

Surface PolishingSurface PolishingSurface PolishingSurface PolishingSurface PolishingSurface PolishingSurface PolishingSurface Polishing

FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529Quality Control


FacFacFacFac :::: 964- 9,Suwalam- Ri, Seotan- Myun, Pyungtak- Si, Kyungki- Do, Korea경기도 평택시 서탄면 수월암리 964- 9 Tel: 82- 31- 662- 6521 Fax: 82- 31- 662- 6529Production Equipment

Description Purpos Q’ty Yr Maker Remark

Temp. Testing Chambers

& TC Wafer & Controller,

Heating Test 1

Vacuum Test Chamber Chucking/dechucking 1

Vacuum Packing Packing 1

2D Measurement Tool Dimple Measurement 1

Ultrasonic Cleanner Cleaning 1

CNC Machining 1 Machining 1

Lathe Machining 1

Milling Machining 1

Leak Detector Leak Checking 1


Lapping Machine 2

CNC Machining 2 2

Chiller 1

Welding (Ar) 1

Cutting & Air filtering 1

Polishing Machine

Materials ( Nickel Rods)

Materials (Nd Magnetrs)

Sending Machine 1

Vacuum Furance Heater Repair 1

Coating System & Accesarry ESC Repair 2

facfac : ::: 964- 9,suwalam- ri, seotan- myun, pyungtak- si, … · 2011. 1. 19. · facfac : :::...

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