ESE 111 – Nanofabrication and Technology

$1000 buys...

1.E- 03

1.E+00

1.E+03

1.E+06

1.E+09

1.E+12

1940 1960 1980 2000 2020

Year

Add

itio

ns p

er s

econ

d

Vacuum tube

Discrete transistor

Integrated circuit

ENIAC

DEC PDP-8

IBM PC

Pentium 4 PC

Make this transition happen

… and the other applications that are enabled by nanoscale science and technology

Evolution of Electronics

Vacuum tubeENIAC = Electronic Numerical Integrator and Computer

First Transistor, 1947 Bell LabsDiscrete Transistor

Intel Core i7 Processor with 45 nm Transistors

The Fabrication Facility of Today

Intel

300 mm wafer Fabricationhttp://www.youtube.com/watch?v=inoOAOOMjHo

Moore’s Law

Other Electronic Applications = “More than Moore”Silicon and New Materials

Si

Rogers, UIUC

carbon nanotubesRogers, UIUC

Organic and nanocrystalline semiconductors

Kagan, Penn

carbon nanotubes

Si

graphenenanowires nanocrystals

organic materials

Alternative, Low-Cost Fabrication

Printable Electronics – Spin, Dip, Spray, Print, Imprint …. From Solution

Example: nanocrystalsIn general for solutions

Mesopotamian Templates 600 AD

25 nm holes

Imprinting

Printing

Krebs, Denmark

Spin-coating

Dip-coating

Examples of Some Electronic and Optoelectronic Applications

Printed Electronics

Samsung

Solar CellsKonarka

RFID Tags Poly IC

Sony OLED TV

E-PaperPlastic Logic

E-textilesPoly IC

Flexible Displayhttp://www.youtube.com/watch?v=-k6r2HQY9Ws

Flexible Electronics

-30 -15 0 15 30

0.5

0.6

0.7

Time (msec)

Vin = 0.1V f = 50 Hz

0.9

1.0

1.1

Outp

ut (V

)Input (V

)

Analog Electronics

Digital Electronics

0 5 10 15 20 250.2

0.4

0.6

0.8

1.0

1.2

1.4 VDD

= +2V, f ~ 165 Hz

Vout (

V)

Time (msec)

Scaling to allow faster operation

Kagan group

BioElectronics

Utah Electrode Array10 x 10 array of electrodes

¼” x ¼” in size

Litt, Penn and Rogers, UIUC

Light at the Nanoscale

Nanophotonics and Plasmonics

Metal Nanoparticle Assemblies as Building Blocks for Optical Metamaterials

Designing composite materials with electromagnetic properties not found in nature and not observed in the constituent materials

a<<l

Effective mediumDescription using

Maxwells equation

cloaking

superlensessensorslithography

metatronics =optical nanocircuits

Engheta, Penn

Designer Metamaterials

Wavelength (µm) Tra

nsm

ittan

ce (

a.u.

)

d

Scale bar = 1µm

Au NC dispersion

substrate

PDMS template Ligand exchange

Kagan group

New curriculum (class of 2018):

New ESE curriculum

15

ESE 218Electronic, Photonic, and Electromechanical

Devices (Prof. Kagan, Fall)

ESE 321Physics and Models of Semiconductor

Devices (Prof. Bassett, Fall)

ESE 310Electric and Magnetic

Fields I(Prof. Engheta, Spring)

ESE 521Physics of Solid State

Energy Devices

ESE 509Waves, Fibers and

Antennas for Communications

ESE 510Electromagnetic

and Optical Theory

ESE 525Nanoscale

Science and Engineering

ESE 460/574Semiconductor micro-fabrication

Sophomore

Junior

Senior

Nanodevices and Nanosystems Curriculum

ESE 218 Electronic, Photonic, and Electromechanical Devices

Electronics Photonics Electromechanics

Intel IBM

Samsung Galaxy