advanced patterning nanofabrication for functionality ... · advanced patterning •...

NEM20

19w w w. m n e 2 0 1 9 . o r g

23-26 SeptemberRODOS PALACE HOTEL Rhodes

Greece

2019

Micro & Nano Engineering

Advanced Patterning •Nanofabrication for functionality •

Nanodevices-MEMS •Lab-on-a-chip •

Going Nano in Homer’s land

45th International Conference on

Final Program

Hom

er g

oes

nano

: e-b

eam

lith

ogra

phy

of t

he O

dys

sey

Micro & Nano EngineeringInternational Conference on 23-26 2019September

Rhodes, Greece

Tab

le o

f C

onte

nts

Welcome Address 4

Committees 5

General Information 9

Instructions to Presenters and Chairpersons 14

Plenary Speakers 15

Invited Speakers 18

Rodos Palace Floor Plan 19

Program at a Glance 20

Scientific Program (Oral presentations) 23

Monday 23 - 09 - 2019 24

Tuesday 24 - 09 - 2019 25

Wednesday 25 - 09 - 2019 35

Thursday 26 - 09 - 2019 45

Scientific Program (Poster Presentations) 55

Exhibition and Poster Area Plan 86

Exhibitors’ List 86

Exhibitors - Sponsors 87

Authors’ Index 90

33


Rhodes, GreeceW

elc

om

e A

dd

ress

We welcome you to the Micro and Nano Engineering (MNE) 2019 and in Rhodes, Greece! It will be the 45th Conference in a series that started in Cambridge in 1975, and was held most recently in Vienna (2016), Braga (2017) and Copenhagen (2018). MNE is the core international conference focusing on: a) micro/nanofabrication and manufacturing techniques, and b) application of the fabricated micro/nanostructures, devices and microsystems into electronics, photonics, energy, environment, chemistry and the life sciences.

This year we have chosen a 3-day conference format that includes 4 parallel sessions A, B, C, D, corresponding to the 4 thematic areas of MNE2019: One parallel session (Α) is dedicated to Nanopatterning, a second (B) is dedicated to Nanofabrication and Functional Nanostructured Surfaces, a third (C) is focusing on Nanoelectronic and other devices, Sensors, and Microsystems, and a forth (D) is focusing on Lab on a Chip with applications in Life Sciences, Chemistry, Food and Environmental safety.

The program features 10 outstanding Plenary talks including two presentations from the Award Winning MNE2019 fellow and Young Investigator, 13 presentations from world-leading Invited speakers, oral and poster presentations (evaluated by an exceptional International Program Committee), an ancient Greek Music artist and scholar, and a Nanotechnology artist. More specifically, the conference program comprises 174 oral and 367 poster presentations (including the plenary and invited presentations). The distribution among the MNE thematic areas reflects the main interests of our community and the long-term evolution of the field. The thematic area Advanced Nanopatterning represents 21% of all submissions, Nanofabrication for functionality 23%, Nanodevices-MEMS and applications 34%, and Nanofabrication for life science applications 22%.

MNE poster papers have equal weight to oral presentations. The MNE Committees encourage authors to submit papers (regular, accelerated publications, reviews or news and opinions) to 4 open thematically focused issues of Microelectronic Engineering (MEE by Elsevier) related to the conference topics.

The conference includes several awards, including the MNE fellow and the Young Investigator Award (Thursday morning), the micrograph contest, and the best poster awards per topic to be presented during the Gala dinner.

In addition, MNE 2019 offers exciting Tutorials on the fundamentals of Wetting, Nanogenerators, and Innovation Management, designed for scientists, professionals, company engineers, entrepreneurs and graduate students.

Finally, MNE 2019 hosts 34 exhibitors and is grateful to numerous sponsors which we sincerely acknowledge as the conference is made possible through their strong support.

Returning to Greece after 11 years, the conference takes place in a majestic island, Rhodes, one of the most popular destinations in Greece, with long multicultural history and rich natural environment. We have implemented a rich social program including welcome reception, visit and Homer singing performance in the Knights Palace on Monday, Beach Party on Tuesday, Gala dinner on Wednesday featuring art and nanotechnology, and Excursion to Lindos on Thursday.

We warmly thank the numerous authors, delegates, exhibitors and sponsors, program and session chairs, members of the international program committee, guest editors for the Microelectronic Engineering special issues, our students and staff participating, for promising to make this conference a memorable event.

We hope that you will enjoy the conference and have some time to spend with friends and enjoy yourself. We want to thank all of you for coming, and express our thanks and appreciation for the many exhibitors and sponsors that have helped make all this happen.

Καλώς ήλθατε!

On behalf of the MNE2019 Organizing Committee

Evangelos Gogolides

Conference Chair

Angeliki Tserepi

Program Chair4

NEM20

19International Conference on

MNE 2019 LOCAL ORGANIZING COMMITTEE

Evangelos GogolidesConference Chair

Angeliki TserepiProgram Chair

CONFERENCE CO-CHAIRS PER TOPIC

Lithography / Etching

Panagiotis Argitis Vassilios Constantoudis Nikos Kehagias George Kokkoris

Nanofabrication

Eleni Makarona Nikos Papanikolaou Vasilis Vamvakas Kosmas Ellinas

Nanodevices / MEMS

Panagiotis Dimitrakis Nikos Glezos Pascal Normand Christos Tsamis Dimitris Tsoukalas

Life Sciences Devices

Panagiota Petrou Kostas Misiakos Katerina Tsougeni

Exhibition Chairs

Ioannis Raptis Kosmas Ellinas

Educational Εvents

Konstantinos Giannakopoulos

Workshops

Nikos Vourdas

MNE INTERNATIONAL STEERING COMMITTEE

Jean-Francois de MarneffeIMEC BELGIUM

Michel DespontCSEM SWITZERLAND

Zahid DurraniImperial College UK

Massimo De VittorioUniversity of Salento / IIT ITALY

Evangelos GogolidesNCSR Demokritos GREECE

Gabi GrütznerMicroresist Technology GmbH GERMANY

Yoshihiko HiraiOsaka Prefecture University JAPAN

Alexander LiddleNIST USA

Michael MuehlbergerProfactor GmbH AUSTRIA

Francesc Pérez-MuranoCNM-IMB Barcelona SPAIN

Urs Staufer (Chair)Delft University of Technology NETHERLANDS

Stephan Sylvest KellerTechnical University of Denmark DENMARK

Christophe VieuLAAS-CNRS Toulouse FRANCE

MNE 2019 INTERNATIONAL ADVISORY COMMITTEE

Alexandropoulos Dimitris (UPatras)

Kiziroglou Michael (ATEIT)

Beltsios Konstantinos (UOI)

Konstantinidis George (UOC)

Boudouvis Andreas (NTUA)

Lee JaeJong (KIMM)

Bousnaina Ahmed (NEU)

Lidorikis Eleftherios (UOI)

Chaniotakis Nikolaos (UOC)

Logothetidis Stergios (AUTH)

Chatzichristidi Margarita (UOA)

Mataras Dimitrios (UPatras)

Chen Yifang (Fudan Un)

Nassiopoulou Androula (NCSRD)

Choi Jin-Woo (LSU)

Olziersky Antonis (IBM)

Christopoulos Theodore (UPatras)

Com

mitte

es

5


Rhodes, Greece

Panagiotou Kostas (AUTH)

Chronis Nikos (UMICH)

Papathanasiou Athanasios (NTUA)

Economou Anastasios (UOA)

Patsalas Panos (AUTH)

Erdmann Andreas (FhG)

Patsis George (WATU)

Farmakis Fillippos (DUTH)

Prodromakis Themis (SOTON)

Farsari Maria (FORTH)

Sarantopoulou Evangelia (NHRF)

Gizeli Electra (FORTH)

Sarris Theodore (DUTH)

Kakabakos Sotirios (NCSRD)

Skarlatos Dimitris (UPatras)

Kaltsas Grigoris (WATU)

Speliotis Athanasios (NCSRD)

Kandyla Maria (NHRF)

Stratakis Emmanuel (UOC)

Kazazis Dimitrios (PSI)

Tagmatarchis Nikos (NHRF)

Kilikoglou Vassilis (NCSRD)

Zergioti Ioanna (NTUA)

Kitsara Maria (UPMC)

Zuburtikudis Ioannis (TEIK & ADU)

MNE 2019 INTERNATIONAL PROGRAM COMMITTEE

Dimitrios Alexandropoulos, University of Patras - GreeceMaan Alkaisi, Institute of Nanoscience and Nanotechnology, University of Canterbury, New ZealandPanagiotis Argitis, NCSR Demokritos - GreeceNaoufal Bahlawane, Luxembourg Institute of Science and Technology (LIST) - LuxembourgJoan Bausells, IMB-CNM (CSIC) - SpainKonstantinos Beltsios, University of Ioannina,- GreeceGérard Benassayag, CEMES/CNRS - FranceAndre Bernard, NTB Buchs- SwitzerlandAndreas Boudouvis, National Technical University of Athens - GreeceMartin Brandl, Danube University Krems - Austria

Hubert Brueckl, Danube University Krems - AustriaAndrea Cattoni, Centre de Nanosciences et de Nanotechnologies (C2N), CNRS - FranceWen-Huei Chang, Department of Applied Chemistry, National Pingtung University - TaiwanMargarita Chatzichristidi, National and Kapodistrian University of Athens - GreeceHsuen-Li Chen, Department of Materials Science and Engineering National Taiwan University Taipei - TaiwanYong Chen, Ecole Normale Supérieure/CNRS - FranceLei Chen, National Institute of Standards and Technology (NIST) - USARebecca Cheung, University of Edinburgh - United KingdomTheodoros Christopoulos, University of Patras - GreeceJin-Woo Choi, Louisiana State University - USANikos Chronis, UMIC - USAVassilios Constantoudis, Institute of Nanoscience and Nanotechnology, NCSR Demokritos - GreeceMassimo De Vittorio, IIT - ItalyEmiliano Descrovi, Politecnico di Torino - ItalyPanagiotis Dimitrakis, Institute of Nanoscience and Nanotechnology , NCSR ‘Demokritos’ - GreeceZoran Djuric, Serbian Academy of Sciences and Arts - Institute of Technical Sciences - SerbiaDemetre Economou, University of Houston - USAAnastasios Economou, UOA- GreeceKosmas Ellinas, NCSR Demokritos -GreeceAndreas Erdmann, Fraunhofer Institute for Integrated Systems and Device Technology IISB - GermanyPedro Estrela, University of Bath - United KingdomFilippos Farmakis, Electrical and Computer Engineering Dept., Democritus University of Thrace - GreeceMaria Farsari, FORTH - GreeceMonika Fleischer, University of Tuebingen - Germany

Com

mitte

es

6

NEM20


Susana Freitas, INESC-MN and Instituto Superior Técnico - PortugalHiroshi Fukuda, Hitachi High-Technologies Corporation - JapanStefan Gendt, Imec / KULeuven - BelgiumAnnamari Gerardino, CNR-Institute for Photonics and Nanotechnologies - ItalyGerald Gerlach, Technische Universität Dresden - GermanyKonstantinos Giannakopoulos, Institute of Nanoscience and Nanotechnology, NCSR Demokritos - GreeceEvangelos Gogolides, Institute of Nanoscience and Nanotechnologyh, NCSR Demokritos - GreeceMarkus Graf, Sensirion AG - SwitzerlandCornelis Wouter Hagen, Delft University of Technology - NetherlandsLine Hagner, Technical University of Denmark - DenmarkAnpan Han, DTU Danchip / CEN Technical Unversity of Denmark, DTU - DenmarkHarry Heinzelmann, CSEM - SwitzerlandYoshihiko Hirai, Osaka Prefecture University - JapanJörg Hübner, DTU Danchip / CEN Technical Unversity of Denmark, DTU - DenmarkToshiro Itani, EIDEC, Inc. - JapanGrigoris Kaltsas, Technological Educational Institute (T.E.I) of Athens - GreeceMaria Kandyla, NHRF - GreeceJeroen Kan, Physics department National University Singapore - SingaporeSongphol Kanjanachuchai, Chulalongkorn University - ThailandNikolaos Kehagias, Catalan Institute of Nanoscience and Nanotechnology - SpainStephan Keller, DTU Nanotech - DenmarkBeomjoon Kim, The University of Tokyo - JapanRobert Kirchner, Technische Universität Dresden - GermanyMaria Kitsara, University Pierre and Marie CURIE -FranceMichael Kiziroglou, ATEIT - GreeceArmin Knoll, IBM Research - Zurich - Switzerland

Fu-Hsiang Ko, Institute Of Nanotechnology, National Chiao Tung University - TaiwanManfred Kohl, Institute of Nanoscience and Nanotechnology, Karlsruhe Institute of Technology - GermanyGeorge Kokkoris, NCSR Demokritos - GreeceMichael Kraft, University of Leuven - BelgiumJaejong Lee, Korea Institute of Machinery and Materials - KoreaThierry Leichle, LAAS-CNRS - FranceJames Liddle, Center for Nanoscale Science and Technology, NIST - USAEleftherios Lidorikis, University of Ioannina - GreeceChun-Hung Lin, National Cheng Kung University - TaiwanAndreu Llobera, Carl Zeiss Vision - SpainHans Loeschner, IMS Nanofabrication AG - AustriaRegina Luttge, Eindhoven University of Technology - NetherlandsEleni Makarona, Institute of Nanoscience nad Nanotechnology, NCSR Demokritos - GreeceJohn Maltabes, Rochester Institute of Technology - USAJean-Francois, imec vzw - BelgiumAdrian Martinez-Rivas, CIC-Instituto Politécnico Nacional (IPN)-Mexico - MexicoKonstantinos Megaridis, University of Illinois at Chicago - USASantos Merino, IK4-TEKNIKER - SpainAthanasios Millionis, ETH Zurich - SwitzerlandFaisal Mohd-Yasin, Queensland Micro- and Nanotechnology Center, Griffith University - AustraliaDespina Moschou, University of Bath - United KingdomXavier Munoz-Berbel, IMB-CNM-CSIC - SpainAndroula Nassiopoulou, NCSR Demokritos -GreecePascal Normand, NCSR Demokritos - GreeceJe Oh, Hanyang University - KoreaAntonis Olziersky, IBM - Switzerland

Com

mitte

es

7


Rhodes, Greece

Heidi Ottevaere, Vrije Universiteit Brussel - BelgiumLeonidas Palilis, University of Patras - GreeceNikos Papanikolaou, NCSR Demokritos - GreeceAthanasios Papathanasiou, NTUA - GreeceAntonio Pasquale, SNS - ItalyTung-Ming Pan, Chang Gung University - TaiwanInkyu Park, KAIST - KoreaFrancesc Perez-Murano, IMB-CNM (CSIC) - SpainPanagiota Petrou, NCSR Demokritos - GreeceDavid Peyrade, LTM - CNRS UGA c/o CEA - LETI - MINATEC - FranceFerruccio Pisanello, Istituto Italiano di Tecnologia - ItalyPhilip Prewett, Oxford Scientific Consultants Ltd - NetherlandsChristelle Prinz, Lund University - SwedenIris Prinz, Stratec Consumables GmbH - AustriaJose-Manuel Quero, University of Seville -SpainMuhammad Rafiq, Pakistan Institute of Engineering and Applied Sciences Islamabad Pakistan - PakistanJohn Randall, Zyvex Labs - USAIoannis Raptis, NCSR Demokritos - GreeceMoh’d Rezeq, Khalifa University of Science and Technology - Abu DhabiGemma Rius, IMB-CNM (CSIC) - SpainAlex Robinson, University of Birmingham - United KingdomKurt Ronse, Imec - BelgiumFrancois Rossi, European Commission - ItalyEvangelia Sarantopoulou, NHRF -GreeceSteven Schofield, University College London - United KingdomJian Shi, Ecole Normale Supérieure de Paris - FranceAlejandro Silhanek, Université de Liège - BelgiumUrs Staufer, Delft University of Technology - Netherlands

Andris Sternberg, Institute of Solid State Physics, University of Latvia - LatviaRafael Taboryski, DTU Nanotech - DenmarkNikos Tagmatarchis, NHRF -GreeceChristos Tsamis, NCSR Demokritos- Insti. of Nanoscience and Nanotechnology - GreeceAngeliki Tserepi, NCSR Demokritos - GreeceKaterina Tsougeni, NCSR Demokritos - GreeceDimitris Tsoukalas, National Technical University of Athens - GreeceYoshi Tsuchiya, University of Southampton - United KingdomVasilis Vamvakas, NCSR Demokritos - GreeceChristophe Vieu, Université de Toulouse, LAAS-CNRS - FranceNikos Vourdas, NCSR Demokritos - GreeceKatia Vutova, Professor, Dr.Sc., PhD, Institute of electronics, Bulgarian Academy of Sciences - BulgariaRemco Wiegerink, MESA+ Institute for Nanotechnology, University of Twente - NetherlandsSandra Wolff, TU Kaiserslautern, Nano Structuring Center - GermanyIoanna Zergioti, NTUA - GreeceCui Zheng, ChinaCezar Zota, IBM Research - SwitzerlandIoannis Zoubourtikoudis, TEIK - Greece

Com

mitte

es

8

NEM20


CONFERENCE INFORMATION

MNE 2019 is organized around 4 main topics. Topic A (Advanced Nanopatterning (lithgraphy & etching), Topic B (Nanofabrication / Manufacturing for Functional Structures / Surfaces), Topic C (Micro-Nano Devices and Systems (MEMS/NEMS) for physical applications, electronics, photonics and energy), and topic D (Micro & Nano Devices and Systems for Life Sciences, Chemistry, and Agrofood Sectors). MNE 2019 has attracted approximately 700 participants. The MNE Committees encourage authors to submit papers (regular, accelerated publications, reviews or news and opinions) to 4 open thematically focused issues of Microelectronic Engineering (MEE by Elsevier) related to the conference topics. MEE also sponsors the annual Young Investigator Award, which will be presented at the conference. MNE has two related conferences (EIPBN) in the USA, and (MNC) in Japan.

STRUCTURE

The MNE scientific program begins on Tuesday, September 24th, and ends in the afternoon of September 26th. Prior to the Scientific Program, on Monday, September 23rd, there will be three Tutorials for those registered, followed by the Welcome Reception and Opening of the Conference and Exhibition, as well as a visit to the Old Town of Rhodes. The Program features 4 parallel sessions, plenary talks, invited presentations, oral and poster presentations (evaluated by the International Program Committee), and a commercial exhibition. MNE poster papers have equal weight to oral presentations. Two Poster sessions (I, II) will be held respectively on the 24th and the 25th of September.

CONFERENCE VENUE

RODOS PALACE HOTEL Iraklidon Avenue (Trianton), Ixia, 85100 Rhodes, Greece, T: +30 22410 97222www.rodos-palace.gr

REGISTRATION & HOSPITALITY DESK - OPENING HOURS

The Registration and the Hospitality Desk will be open the following hours:

Monday, 23rd September 2019 12:00 - 17:00

Tuesday, 24th September 2019 08:00 - 19:00

Wednesday, 25th September 2019 08:00 - 18:00

Thursday, 26th September 2019 08:00 - 18.00

Confe

rence

Info

rmat

ion

9


Rhodes, Greece

ON SITE REGISTRATION FEES

Standard Attendees € 850

Student Attendees € 500

1 day registration * € 450

Accompanying persons € 285

Cost of 1 Ttutorial € 100

Cost of 2 Tutorials € 150

Registration Fees Include

Admission to all technical sessions, poster exhibition and industry exhibition

Conference Material

Lunch breaks during the conference

Coffee breaks during the conference

Welcome reception

Conference dinner

* 1 Day pass does not include Conference Dinner

Accompanying person’s registration fee includes all social events (Welcome reception, Conference dinner and Excursion to Lindos)

EXHIBITION

The MNE2019 Commercial Exhibition will commence on Monday, September 23rd, and will be open throughout all Conference days. The Commercial exhibition runs throughout the foyer of Jupiter Hall, Salon De Roses Hall and also the Atrium Lobby. The list of companies can be found in page 87. Detailed information about the companies can be found on the mne2019 conference website by clicking on the logo of each company.The list of companies can be found in page https://www.mne2019.org/confirmed-exhibitors Detailed information about the companies can be found on the mne2019 conference website by clicking on the logo of each company.

MICROGRAPH CONTEST

A micrograph contest is organized by the MNE Organizing Committee. Winners will be awarded During the gala dinner. Participants are kindly asked to submit their micrograph until Wednesday at the following web page https://www.zyvexlabs.com/contests/2019-3/. You can vote for the best micrograph using the mobile application. The awards are sponsored by the Micro&Nano Society of Greece (http://micro-nano.gr/)

POSTER PRESENTATIONS

There are two poster sessions on Tuesday 24th and Wednesday 25th.Each poster will be displayed during the whole conference from Tuesday 24th until morning of Thursday 26th.The posters are grouped according to the thematic areas A, B, C, and D in the program.Each poster board will have a poster identification number. Please leave them on display and do not block them in order to provide a means for orientation for visitors of the poster session.Posters will be placed on the panels with double sided tape to be supplied by the Congress Secretariat. It is the Presenter’s obligation to put up and also remove the poster from the panel. Posters left after the end of the congress will be destroyed. The Congress Secretariat bares no responsibility for posters left behind.

Confe

rence

Info

rmat

ion

10

NEM20


POSTER SESSION I Even Numbers

Please be at your Poster area, ready for a presentation on Tuesday, September 24th, 14:15 - 16:15

POSTER SESSION II Odd numbers

Please be at your Poster area, ready for a presentation on Wednesday, September 25th, 14:15 - 16:15

BEST POSTER AWARDS

The MNE conference gives much weight and importance to the poster session. Contributions selected for poster presentation do not have less scientific quality than contributions selected for oral presentation, but their contents are expected to be more suitable for communication in poster form. To highlight the importance of the poster session, awards are given to the best posters.The posters will be evaluated per topic and four Best Poster Awards will be given out, one for each topic:

Advanced Nanopatterning,

Nanofabrication for functionality,

Nanodevices - MEMS and their applications, and

Lab-on-a-chip /Nanofabrication for life science applications.

The evaluation will be based on the assessment of the abstract reviewers and by the poster examination from the jury during the conference.Winner announcement: The Best Poster Award Winners will be announced during the conference dinner on September 25th. Poster Awards are sponsored by Raith.

REHEARSAL AND PRESENTATION LOADING ROOM / TECHNICAL SECRETARIAT / SPEAKER’S READY ROOM

All speakers are advised to rehearse their presentations prior to presenting them so as to avoid technical difficulties. A Speaker’s Ready room will be available for you opposite to the Congress Secretariat, equipped with all necessary audiovisual aids. You are advised to present your material to the Technical Secretariat at least 2 hours prior to your presentation.

PUBLICATION OF THE MNE2019 SPECIAL ISSUES

The MNE2019 Organizing Committee invites MNE2019 participants to submit papers to four (4) OPEN to all and FOCUSED THEMATICALLY special issues of Micro and Nano Engineering Journal (Gold open access mirror journal of Microelectronic Engineering, Elsevier) entitled:

Nanopatterning 2019

Nanofabrication 2019

Devices-MEMS 2019

Lab-on-Chip 2019

Please refer to the specific special issue to see the thematic areas and select the issue appropriate for you. Each special issue call is an ‘open call’. This means that, while including selected papers presented at MNE2019, it is also open to other authors of the related scientific community.

Confe

rence

Info

rmat

ion

11


Rhodes, Greece

Manuscript submission deadline: October 21st 2019

Your paper and associated supplementary information should comprise a complete, novel and full description of your work. Manuscripts of the special issue will be submitted and reviewed via the online Elsevier Editorial System (EES). At submission, you are presented with a choice between the MEE and MNE journals. You will then receive a confirmation letter on the choice you have made. You will also have a chance to change your choice at revision. To be part of MNE2019 special issues you need to choose MNE journal. Articles will then be processed and published with the standard Elsevier publishing timeline for each individual manuscript following acceptance. Accepted papers will be freely available on ScienceDirect as OPEN ACCESS papers WITHOUT any article processing charges. This is a SPECIAL agreement between MNE2019 conference and MNE journal.

If you choose MEE instead of MNE journal at submission, your manuscript will be treated as a regular paper and will no longer be part of MNE special Issues, although it will still be handled by the same guest editors with the same procedure. Accepted papers in MEE will be published under subscription model only.

SOCIAL EVENTS PROGRAM

WELCOME RECEPTION The Conference Welcome Reception will take place on Monday, September 23rd, at 16:30 throughout all Exhibition Halls.

WELCOME VISIT TO THE OLD TOWN Following the Welcome Reception, a Welcome visit to the Old Town of Rhodes and to the Knight’s Palace, is a must. Within this medieval town you will be impressed by the Cultural welcome event: The sound of Homer’s singing.

BEACH PARTY ON TUESDAY, SEPTEMBER 24th The Organizing Committee will host a Beach Party on the Beach area in front of Rodos Palace. Please contact the Congress Secretariat for further information.

GALA DINNER ON WEDNESDAY, SEPTEMBER 25th The Conference Official Gala Dinner will be hosted at the SUPER DOME POOL BAR in Rodos Palace Hotel on Wednesday, September 25th, at 19:30. Dress: informal

EXCURSION TO LINDOS ON THURSDAY, SEPTEMBER 26th The buses will depart right after the end of the Scientific Program just outside the Reception Area of Rodos Palace Hotel. Lindos is an archaeological site, a fishing village and a former municipality on the island of Rhodes. It lies on the east coast of the island. It is about 50 km south of the town of Rhodes and its fine beaches make it a popular tourist and holiday destination. Lindos is situated in a large bay and faces the fishing village and small resort of Charaki. Be fast to be able to see the sunset at Lindos. Please declare your participation in the event at the registration desk in order to arrange for the number of buses.

OFFICIAL LANGUAGE

English will be the official language of the Conference and no simultaneous translation will be provided.

CERTIFICATE OF ATTENDANCE

Certificates will be provided after the completion of the Scientific Program.

Confe

rence

Info

rmat

ion

12

NEM20


BADGE

Please wear your name badge at all times. Entrance to the Conference area will only be permitted to guests wearing their name badge.

CURRENCY

Greece’s monetary unit is the Euro. No other currency is accepted and it is best to exchange dollars or other currency at a bank. The exchange rates are all the same throughout the country and you exchange money at a bank or official exchange shop where you will get the best running rates. Banks are open from 08:00 AM until 2:00 PM.

INSURANCE

We cannot accept responsibility for any personal loss, accidents or damages to participants and/or accompanying persons. Participants are strongly advised to obtain personal insurance to cover any eventuality that may occur during the Congress.

TRANSPORTATION

Rhodes is only a 40min flight from Athens International Airport. Rhodes International Airport, “Diagoras”, is located, 15 km away (20min by taxi from the town center and the convention center. Public transportation is very well organized with frequent bus service. There are regular international flights as well as charter flights from most major cities worldwide.

WEATHER

Rhodes in September is still very pleasant and warm, although the temperatures are starting to cool down a bit. The average daily temperature is 25°C. September enjoys an average of 11 hours of sunshine per day.

PASSPORTS - VISAS

You will need valid, up-to-date passport and a Schengen visa, depending on your nationality. Regarding Schengen visa requirements, please visit the website of the Hellenic Ministry of Foreign Affairs at the following link: https:// www.mfa.gr/en/visas/visas-for-foreignerstraveling-togreece/countries-requiring-or-notrequiring-visa.html in order to find out whether you need a Schengen visa to visit Greece.

Confe

rence

Info

rmat

ion

CONFERENCE SECRETARIAT

Valestra 2 Str., kallithea, Athens Greece

T: +30 210 3250260, F: +30 2310 247746

E: [email protected], W: www.globalevents.gr

13


Rhodes, Greece

OPENING HOURS SPEAKERS’ PREVIEW CENTER

Monday, 23rd September 2019 12:00 - 18:30

Tuesday, 24th September 2019 08:00 – 19:00

Wednesday, 25th September 2019 08:00 – 19:00

Thursday, 26th September 2019 08:00 - 17:00

IF YOU ARE A CHAIRPERSON

Please locate your session room in due time. Please be at your session room at least 15 minutes prior to the start of the session. We may remind you that speakers need to strictly observe the time schedule. Before the session starts, please check that all presenters are present. Before each presentation, please introduce the presenter by stating his/her name and affiliation.

INSTRUCTIONS FOR ORAL PRESENTATIONS

Plenary speakers have 35 minutes plus 5-10 minutes of questions

Iinvited speakers have 25 minutes plus 5 minutes of questions

Contributed talks have 15 minutes. This includes approximately 2-3 min for questions. Therefore, time your presentation to 12-13 minutes.

Please prepare your presentation with aspect ratio 16:9.

Computers ARE AVAILABLE at the conference rooms, with the following technical characteristics:Hardware: Processor: i3 or i5 4gen or 8gen, RAM 4-8 GB, Hard Disk: SSD 240GB TFT 15 -̈17¨PC Remote ControlMAC: Retina, early 2015, i5 2,7GHz, RAM 8GBF or those having a Macintosh, a technician will help you to connect and use your laptop.Software: Windows 10, Office 365

Bring your presentation in a memory stick. You do NOT need to bring a laptop. If you do, you should go in the conference room and with the help of the technician see how to connect your laptop. Try it the previous day if possible. Rehearsal and presentation loading room: You are advised to try your presentation and load it with the help of the technicians in the computer room located at the Convention Pre Function Area of the Rodos Palace Hotel. Presentations should be loaded until the previous session, or as early as possible. Please allow enough time before your session, especially if you have videos in your presentation.

INSTRUCTIONS FOR POSTER PRESENTATIONS

Recommended Poster Size is 120 cm high x 80 cm wide. (The poster board is 200 cm x 95 cm).Posters will be hanged using double sided tapes, to be supplied by the Congress Secretariat.Even Poster Numbers: Poster Session time: Tuesday September 24th at 14:15 - 16:15Odd Poster Numbers: Poster Session time: Wednesday September 25th at 14:15 - 16:15Set up time: Monday 23/09 from 16:00 to 18:30 or Tuesday September 25th, from 08:30 to 13:00 Take down time: Thursday 26/9 from 12:00 until 16:00Be in front of your poster session on the appropriate day based on your poster number shown in the conference program.*Posters left on the poster boards after the take down time, will be removed by the conference personnel.Inst

ruct

ions

to P

rese

nte

rs a

nd

Chai

rpers

ons

14

NEM20


Ple

nar

y S

pea

kers

Tuesday, 24th September 2019Dimos PoulikakosHead of Energy Science Center (ESC), ETH Zurich, Institut für Energietechnik, Switzerland

How to arrest and transport biological nano-objects one at a time: Nanovalving of individual Viruses and Macromolecules in liquids

09:30- 10:15 Jupiter Hall

Tuesday, 24th September 2019Shoji TakeuchiTokyo University, Japan

Emerging Technologies for Biohybrid Devices


Tuesday, 24th September 2019Fotis FilippopoulosCurious Inc. and International Hellenic Univ., Greece

Innovation Mindset: The top 10 critical insights every technology entrepreneur should know


Tuesday, 24th September 2019

Yan BorodovskyFormer Intel Senior Fellow, USA

Moore’s Law - Past, Present and Future

08:45-09:30 Jupiter Hall

15


Rhodes, GreecePle

nar

y S

pea

kers

Wednesday, 25th September 2019

Emmanuel DelamarcheIBM Research Zurich, Switzerland

Intelligent and precise flow control for next-generation microfluidic POC diagnostics



Michal LipsonEugene Higgins Professor, Columbia University, USA

The Revolution of Silicon Photonics



Zhong Lin WangHightower Chair, Georgia Tech, USA

Nanogenerators for self-powered systems and sensors


16

NEM20


Thursday, 26th September 2019

The MNE/MEE Elsevier Journal Young Investigator Award 2019Yuksel TemizΙΒΜ Research-Zurich

The Young Investigator Award is sponsored by Elsevier for the Journals MNE (open access) and MEE (subscription journal)


Ple

nar

y S

pea

kers


George MalliarasPrince Philip Professor of Technology, University of Cambridge, UK

New Materials and Devices for Interfacing with the Brain



MNE Fellow 2019Hella-Christin ScheerUniversity of Wuppertal, Germany

More than nanoimprint - replication and combination


17


Rhodes, GreeceIn

vite

d S

pea

kers

Tuesday, 24th September 2019 10:45- 11:15, Jupiter Hall

Thomas Anthopoulos, King Abdullah University of Science and Technology (KAUST) and KAUST Solar Centre, Saudi Arabia

Flexible nano-electronics via large-area manufacturing paradigms

Tuesday, 24th September 2019 11:15- 11:45, Athena Hall

Nicolas Voelcker, Monash University, Melbourne Center for Nanofabrication, Australia

Nanomedicine with Silicon Nanostructures

Tuesday, 24th September 2019 13:00- 13:30, Delphi Hall

Alidad Amirfazli, York University, Canada

What can and cannot be done with Superhydrophobic, or Omniphobic surfaces?

Tuesday, 24th September 2019 13:30- 14:00, Nefeli Hall

Michal Danek, Lam Research Corporation, USA

Applications of Atomic Layer Deposition (ALD) and Atomic Layer Etch (ALE) in Advanced Semiconductor Manufacturing

Tuesday, 24th September 2019 18:00- 18:30, Jupiter Hall

Zheng Cui, Suzhou Institute of Nanotechnology, Chinese Academy of Sciences, China

Printed flexible electronics for wearable applications Semiconductor Manufacturing

Wednesday, 25th September 2019 10:45- 11:15, Delphi Hall

Constantine Megaridis, University of Illinois, Chicago, United States

Wettability-Patterned Surfaces for Pumpless Handling of Fluid Microvolumes: Lab-on-Chip and Heat Transfer Applications

Monday, 23th September 2019

Chrēstos Terzēs, Ancient Music Artist

Reconstructing the sound of Homeric singing (Cultural welcome event to be presented at the Knight’s palace)

Wednesday, 25th September 2019 11:30- 12:00, Nefeli Hall

Maria Farsari, Foundation for Research & Technology Hellas, Greece

Laser-based 3D printing at the nanoscale

Wednesday, 25th September 2019 11:30- 12:00, Athena Hall

Thomas Laurell, Lund University, Sweden

Acoustofluidics - A sound approach to liquid biopsies

Wednesday, 25th September 2019 13:00- 13:30, Delphi Hall

Tekla Tammelin, VTT Technical Research Center, Finland

Patterned Structures and Nanolaminate Hybrid Architectures from Plant-sourced Nanocellulose for Optoelectronics

Wednesday, 25th September 2019 13:30- 14:00, Athena Hall

José Antonio Plaza, Instituto de Microelectrónica de Barcelona-CNM, Spain

From Cells-on-Chip to Chips-in-Cell: our fantastic “voyage”


Ioannis Michaloudis, Nanotechnology Artist

“ - Sky am”: mythologies & methodologies of a nanoartist (to be presented during the conference dinner)

Thursday, 26th September 2019 10:30- 11:00, Jupiter Hall

Thomas Ernst, CEA-LETI, Grenoble, France

Merging Computing and Sensing for Low power and Sustainable Edge Applications

Thursday, 26th September 2019 11:15- 11:45, Athena Hall

Sunggook Park, Louisiana State University, USA

Design and Fabrication of Plastic Nanofluidic Devices for Single Molecule Detection

Thursday, 26th September 2019 12:45- 13:15, Nefeli Hall

John Maltabes, Applied Materials, Germany

The path to Roll to Roll Imprint Technology, an Enabling Technology

Thursday, 26th September 2019 11:00- 11:30, Delphi Hall

Martin Lopez, International Iberian Nanotechnology Laboratory-INL, Portugal

Biomimetics of photosynthetic photonic structures. How natural light harvesting could become an inspiration for nanotechnology

18

NEM20


Rod

os

Pal

ace F

loor

Pla

n

19


Rhodes, GreeceP

rog

ram

at

a G

lance

Mo

nd

ay,

Sep

tem

ber

23

rd, 2

019

NE

FE

LI

HA

LL

AN

EF

EL

I

HA

LL

B08

:30-

08:4

5

09:

00

-10

:30

Tu

tori

al 1

Tu

tori

al 2

Na

no

ge

ne

rato

rsZ

ho

ng

Lin

Wan

g

Fu

nd

am

en

tals

of

We

ttin

g, D

rop

lets

an

d

rela

ted

Ap

plicati

on

s A

lidad

Am

irfa

zli

10:3

0-1

0:4

5C

off

ee

bre

ak

10:4

5-12

:30

Na

no

ge

ne

rato

rsZ

ho

ng

Lin

Wan

g

Fu

nd

am

en

tals

of

We

ttin

g,

Dro

ple

ts a

nd

re

late

d

Ap

plicati

on

s A

lidad

Am

irfa

zli

12:3

0-1

3:0

0

Re

gis

trati

on

Lig

ht

Lu

nch

Tu

tori

al 3

13:0

0-1

3:45

Inn

ovati

on

Ma

na

ge

me

nt

Ma

ste

rcla

ss

Fo

tis

Fili

pp

op

ou

los

13:4

5-14

:00

Co

ffe

e b

reak

14:0

0-1

6:0

0In

no

vati

on

Ma

na

ge

me

nt

Ma

ste

rcla

ss

Fo

tis

Fili

pp

op

ou

los

16:0

0-1

6:15

16:3

0-1

8:15

Op

en

ing

of

Co

nfe

ren

ce

& E

xh

ibit

ion

W

elc

om

e R

ece

pti

on

18:3

0-1

8:45

Tra

nsp

ort

to

th

e O

ld C

ity

19:0

0-1

9:30

Vis

it a

t th

e K

nig

hts

Pa

lace

19:3

0-2

0:3

0

20:4

5-21

:30

Cu

ltu

ral E

ve

nt:

T

he

so

un

d o

f H

om

eri

c S

ing

ing

22:0

0Tra

nsp

ort

ba

ck t

o t

he

Co

nfe

ren

ce

Ve

nu

e

Tuesd

ay, S

ep

tem

ber

24

th, 2

019

NE

FE

LI

HA

LL

D

EL

PH

IJU

PIT

ER

H

AL

LA

TH

EN

A

HA

LL

08:

30-0

8:45

Op

en

ing

Se

ssio

n

08:

45-0

9:30

Ple

na

ry 1

Mo

ore

's L

aw

- P

ast

, Pre

sen

t a

nd

Fu

ture

Yan

Bo

rod

ovs

ky

09:

30-1

0:15

Ple

na

ry 2

Ho

w t

o a

rre

st a

nd

tra

nsp

ort

bio

log

ica

l n

an

o-o

bje

cts

on

e a

t a t

ime

:

Na

no

va

lvin

g o

f in

div

idu

al V

iru

ses

an

d M

acro

mo

lecu

les

in liq

uid

s D

imo

s P

ou

likako

s

10:15

-10

:45

Co

ffe

e b

reak

10:4

5 -1

2:0

0S

ess

ion

A1:

E

UV

an

d T

alb

ot

Lit

ho

gra

ph

y

Se

ssio

n B

1:

Na

no

stru

ctu

red

S

urf

ace

s

Se

ssio

n C

1:

Se

nso

rs

& A

ctu

ato

rs I

Se

ssio

n D

1:

Na

no

me

dic

ine

&

Dru

g d

elive

ry

12:0

0-1

3:0

0L

un

ch

bre

ak

13:0

0-1

4:15

Se

ssio

n A

2:

Etc

hin

g

Se

ssio

n B

2:

We

ttin

g I

Se

ssio

n C

2:

Se

nso

rs &

A

ctu

ato

rs I

I

Se

ssio

n D

2:

Bio

sen

sors

I

14:15

-16:

15P

OS

TE

R S

ES

SIO

N I

(E

VE

N N

UM

BE

RS

)

16:15

-17:

00

Ple

na

ry 3

E

me

rgin

g T

ech

no

log

ies

for

Bio

hy

bri

d D

ev

ice

s Ta

keu

chi S

ho

ji

17:0

0-1

7:45

Key

-no

te o

n I

nn

ovati

on

Inn

ovati

on

Min

dse

t: t

he

to

p 1

0 c

riti

ca

l in

sig

hts

eve

ry t

ech

no

log

y

en

tre

pre

ne

ur

sho

uld

kn

ow

Fo

tis

Fili

pp

op

ou

los

17:4

5-18

:00

Sh

ort

Bre

ak

18:0

0-1

9:0

0S

ess

ion

A3

: M

od

eli

ng

&

Me

tro

log

y

Se

ssio

n B

3:

Na

no

fab

ricati

on

&

Na

no

dev

ice

s

Se

ssio

n C

3:

Fle

xib

le &

W

ea

rab

les

Se

ssio

n D

3:

Ce

ll &

Org

an

-o

n-c

hip

I

20

NEM20


Wed

nesd

ay, S

ep

tem

ber

25

th, 2

019

NE

FE

LI

HA

LL

D

EL

PH

IJU

PIT

ER

H

AL

LA

TH

EN

A

HA

LL

08:

30

08:

45-0

9:30

Ple

na

ry 4

In

tellig

en

t a

nd

pre

cis

e fl

ow

co

ntr

ol fo

r n

ex

t-g

en

era

tio

n

mic

rofl

uid

ic P

OC

dia

gn

ost

ics

Em

man

ue

l De

lam

arc

he

09:

30-1

0:15

Ple

na

ry 5

T

he

Revo

luti

on

of

Silic

on

Ph

oto

nic

s M

ich

al L

ipso

n

10:15

-10

:45

Co

ffe

e b

rea

k

10:4

5 -1

2:0

0S

ess

ion

A4

: E

UV

an

d Τ

alb

ot

Lit

ho

gra

ph

y

Se

ssio

n B

4:

We

ttin

g I

I

Se

ssio

n C

4:

Ph

ysi

ca

l S

en

sors

Se

ssio

n D

4:

La

b-o

n a

ch

ip

Te

ch

no

log

ies

12:0

0-1

2:15

Lu

nch

bre

ak

12:15

- 12

:30

12:3

0-1

2:45

12:4

5-13

:00

13:0

0-1

4:15

Se

ssio

n A

5:

Ind

ust

ria

l

Se

ssio

n B

5:

Ind

ust

ria

l

Se

ssio

n C

5:

En

erg

y

ha

rve

stin

g

Dev

ice

s

Se

ssio

n D

5:

Ce

lls

& O

rga

n-

on

-ch

ip I

I

14:15

-16:

15P

OS

TE

R S

ES

SIO

N I

I (O

DD

NU

MB

ER

S)

16:15

-17:

00

Ple

na

ry 6

N

an

og

en

era

tors

fo

r se

lf-p

ow

ere

d s

yst

em

s a

nd

se

nso

rs

Wan

g, Z

ho

ng

Lin

17:0

0-1

8:15

Se

ssio

n A

6:

NIL

& N

ove

l L

ith

og

rap

hie

s

Se

ssio

n B

6:

Na

no

fab

fo

r B

ioa

pp

licati

on

s

Se

ssio

n C

6:

Ph

oto

nic

S

tru

ctu

res

Se

ssio

n D

6:

Ind

ust

ria

l

18:15

-19:

30

19:3

0-2

2:0

0G

ala

din

ne

r

Th

urs

day

, Sep

tem

ber

26

th, 2

019

N

EF

EL

I H

AL

L

DE

LP

HI

JU

PIT

ER

H

AL

LA

TH

EN

A

HA

LL

08:

30

08:

45-0

9:30

Ple

na

ry 7

M

NE

Fe

llo

w A

wa

rd &

Le

ctu

re

He

lla-C

hri

stin

Sch

ee

r

09:

30-1

0:15

Yo

un

g I

nve

stig

ato

r A

wa

rd

Inv

ite

d L

ectu

re

Yu

kse

l Te

miz

/ A

wa

rd C

ere

mo

ny

10:15

-10

:45

Co

ffe

e b

reak

10:4

5 -1

2:0

0

Se

ssio

n A

7:

Ele

ctr

on

an

d

Ion

Be

am

L

ith

og

rap

hy

Se

ssio

n B

7:

Na

no

stru

ctu

res

for

Ph

oto

nic

s

Se

ssio

n C

7:

Mate

ria

ls &

D

ev

ice

s fo

r n

an

oe

lectr

on

ics

Se

ssio

n D

7:

Mic

ro &

Na

no

F

luid

ics

12:0

0-1

3:0

0L

un

ch

bre

ak

13:0

0-1

4:0

0S

ess

ion

A8

: In

du

stri

al I

Se

ssio

n B

8:

We

ttin

g I

II

Se

ssio

n C

8:

Mate

ria

ls f

or

Na

no

ele

ctr

on

ics

II

Se

ssio

n D

8:

Dev

ice

s fo

r D

NA

stu

die

s

14:0

0-1

4:15

Co

ffe

e b

rea

k

14:15

-15:

15S

ess

ion

A9

: In

du

stri

al II

S

ess

ion

B9

: N

an

ofa

bri

cati

on

Se

ssio

n C

9:

Mate

ria

ls f

or

ph

oto

nic

s

Se

ssio

n D

9:

La

b &

Org

an

o

n-c

hip

15:15

-15:

30S

ho

rt b

reak

15:3

0-1

6:30

Se

ssio

n A

10:

Re

sist

s S

ess

ion

B10

: M

icro

fab

ricati

on

Se

ssio

n C

10:

Se

nso

rs &

ME

MS

Se

ssio

n D

10:

Ch

em

. S

en

sors

&

Bio

sen

sors

II

16:3

0-1

6:35

Sh

ort

bre

ak

16:3

5-17

:20

Ple

na

ry 8

Ne

w M

ate

ria

ls a

nd

Dev

ice

s fo

r In

terf

acin

g w

ith

th

e B

rain

G

eo

rge M

alli

ara

s

17:2

0-1

7:30

An

no

un

ce

me

nts

& C

losi

ng

Re

ma

rks

17:3

0-2

1:00

Exc

urs

ion

to

Lin

do

s

Pro

gra

m a

t a

Gla

nce

21


Rhodes, Greece

22

EM

2019

International Conference on

N

ScientificProgram

Note: Papers are listed by Topic and by session.

Short abstracts are available on the mobile application of the conference.

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

NE

FE

LI

HA

LL

AN

EF

EL

I H

AL

L B

09

:00

-10

:30

Tu

tori

al

1N

an

og

en

era

tors

Zh

on

g L

in W

an

gG

eo

rgia

Tech

Tu

tori

al

2F

un

da

me

nta

ls o

f W

ett

ing

, D

rop

lets

an

d r

ela

ted

Ap

pli

ca

tio

ns

Alid

ad

Am

irfa

zli

Yo

rk U

niv

ers

ity

10:3

0-1

0:4

5C

OF

FE

E B

RE

AK

10:4

5-1

2:1

5T

uto

ria

l 1

Na

no

ge

ne

rato

rsZ

ho

ng

Lin

Wan

gG

eo

rgia

Tech

Tu

tori

al

2F

un

da

me

nta

ls o

f W

ett

ing

, D

rop

lets

an

d r

ela

ted

Ap

pli

ca

tio

ns

Alid

ad

Am

irfa

zli

Yo

rk U

niv

ers

ity

12:1

5-1

2:4

5L

IGH

T L

UN

CH

13:0

0-1

3:4

5T

uto

ria

l 3

Inn

ov

ati

on

Ma

na

ge

me

nt

Ma

ste

rcla

ssF

oti

s F

ilip

po

po

ulo

sC

uri

ou

s In

c. a

nd

Inte

rnati

on

al H

elle

nic

Un

iv.,

Gre

ece

13:4

5-1

4:0

0C

OF

FE

E B

RE

AK

14:0

0-1

6:0

0T

uto

ria

l 3

Inn

ov

ati

on

Ma

na

ge

me

nt

Ma

ste

rcla

ssF

oti

s F

ilip

po

po

ulo

sC

uri

ou

s In

c. a

nd

Inte

rnati

on

al H

elle

nic

Un

iv.,

Gre

ece

16:3

0-1

8:1

5O

PE

NIN

G O

F C

ON

FE

RE

NC

E A

ND

EX

HIB

ITIO

N

WE

LC

OM

E R

EC

EP

TIO

N

MO

ND

AY S

EPTEM

BER 2

3RD, 2019

24

Sci

entifi

c P

rog

ram

JU

PIT

ER

HA

LL

Op

en

ing

Se

ssio

nC

hair

s: V

. C

on

stan

tou

dis

, U

. S

tau

fer

08

:45

-09

:30

P

len

ary

1M

oo

re’s

La

w -

Pa

st,

Pre

sen

t a

nd

Fu

ture

Y

an

Bo

rod

ovsk

yF

orm

er

Inte

l S

en

ior

Fello

w, U

SA

09

:30

-10

:15

P

len

ary

2H

ow

to

arr

est

an

d t

ran

spo

rt b

iolo

gic

al

na

no

-ob

jec

ts o

ne

at

a t

ime

: N

an

ov

alv

ing

of

ind

ivid

ua

l V

iru

ses

an

d M

ac

rom

ole

cu

les

in l

iqu

ids

Dim

os

Po

ulik

ako

s E

TH

Zu

rich

, In

stit

ut

für

En

erg

iete

ch

nik

, Sw

itze

rlan

d

10:1

5-1

0:4

5C

OF

FE

E B

RE

AK

TUESD

AY S

EPTEM

BER 2

4th, 2019

25

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

1:

EU

V A

ND T

ALBO

T

LIT

HO

GR

APH

Y

Ch

air

s: J

. R

an

dal,

C. M

ack

SESSIO

N B

1:

NAN

OS

TRUC

TURED

SURFACES

Ch

air

s: E

. M

akaro

na

, G

. Io

rdach

e

SESSIO

N C

1:

SEN

SO

RS &

AC

TU

ATO

RS I

Ch

air

s: Z

. C

ui,

I. R

ap

tis

SESSIO

N D

1:

NAN

OM

ED

ICIN

E &

DRUG

D

ELIV

ER

YC

hair

s: A

. G

era

rdin

o, JA

Pla

za

10:4

5A

1-1

Ex

tre

me

u

ltra

vio

let

inte

rfe

ren

ce

lith

og

rap

hy

fo

r in

-la

b

ph

oto

re-

sist

d

ev

elo

pm

en

t a

nd

la

rge

-are

a

na

no

pa

tte

rnin

gS

asc

ha B

rose

1,2, S

erh

iy D

an

yly

uk

1,2,

Ch

rist

ian

Kais

er3

, Maik

Ge

rng

roß

3,

Jo

ch

en

Sto

llen

we

rk1,

2,4, M

att

hia

s S

ch

irm

er3

, Pete

r L

oo

sen

1,2

,4

1 RW

TH

Aach

en

Un

ivers

ity,

Aach

en

, Germ

an

y,

2JA

RA

–

Fu

nd

am

en

tals

o

f F

utu

re In

form

a-

tio

n T

ech

no

log

y, J

ülic

h,

Germ

an

y, 3

Allr

esi

st

Gm

bH

, S

trau

sberg

, G

erm

an

y,

4F

rau

nh

ofe

r In

stit

ute

fo

r L

ase

r Te

chn

olo

gy,

Aach

en

, G

er-

man

y

B1-

1U

V-s

en

sor

ma

de

by

ca

pil

lary

fill

-in

g

me

tal

ink

s o

n

pre

pa

tte

rne

d

sub

stra

tes

He

lmu

t S

ch

ift1 ,

Eth

ou

ba A

l Jass

in-A

l-H

ash

em

i1,2, B

arb

ara

Ho

rváth

1 , S

am

i B

ola

t3

1 Pau

l Sch

err

er

Inst

itu

t (p

si),

Vill

igen

Psi

, Sw

it-

zerl

an

d,

2U

niv

ers

ity

of

Base

l, B

ase

l, S

wit

-ze

rlan

d,

3S

wis

s F

ed

era

l L

ab

ora

tori

es

for

Mat

eri

als

Sci

en

ce a

nd

Te

chn

olo

gy

(EM

PA

),

Dü

ben

do

rf, S

wit

zerl

an

d

C1-

1_ I

NV

Fle

xib

le

na

no

-ele

ctr

on

ics

via

la

rge

-are

a

ma

nu

fac

turi

ng

p

ara

-d

igm

sT

ho

mas

An

tho

po

ulo

s K

ing

A

bd

ulla

h

Un

ivers

ity

of

Sci

en

ce

an

d

Tech

no

log

y (K

AU

ST

) an

d K

AU

ST

So

lar

Cen

-tr

e, S

au

di A

rab

ia

D1-

1U

ltra

sou

nd

-tri

gg

ere

d

PL

GA

-mi-

cro

Pla

tes

de

gra

da

tio

n f

or

on

-co

m-

ma

nd

dru

g d

eli

ve

ryE

lisa S

ciu

rti1,

2, R

osi

ta P

rim

ave

ra3,

Mart

ina D

i Fra

nce

sco

3, D

an

iele

D

i Masc

olo

3, A

less

an

dro

Riz

zo1,

2,

An

ton

io B

ale

na1,

2, S

an

osh

Ku

nja

lukkal

Pad

man

ab

han

2, F

ran

ce

sco

Riz

zi1 ,

Pao

lo

De

cu

zzi

3, M

ass

imo

De V

itto

rio

1,2

1 Cen

ter

for

Bio

-Mo

lecu

lar

Nan

ote

chn

olo

gie

s,

Isti

tuto

Italia

no

di T

ecn

olo

gia

, A

rnesa

no

, Ita

ly,

2D

ipart

imen

to d

i In

geg

neri

a d

ell’

Inn

ova

zio

ne

, U

niv

ers

ità

del

Sale

nto

, Le

cce

, It

aly

, 3L

ab

ora

-to

ry o

f N

an

ote

chn

olo

gy

for

Pre

cisi

on

Me

di-

cin

e,

Isti

tuto

Ita

lian

o d

i Te

cno

log

ia,

Gen

ova

, It

aly

11:0

0A

1-2

Fu

nd

am

en

tal

Re

sea

rch

A

cti

vit

ies

of

Ex

tre

me

U

ltra

vio

let

Lit

ho

gra

-p

hy

at

Ne

wS

UB

AR

U S

yn

chro

tro

n

faci

lity

Take

o W

ata

nab

e1 ,

Tets

uo

Hara

da1

1 Un

ive

rsit

y o

f H

yog

o, A

kou

-gu

n, J

ap

an

B1-

2D

ire

ct

Na

no

imp

rin

tin

g o

f C

oll

oid

al

Se

lf-O

rga

niz

ing

N

an

ow

ire

/-p

art

i-cl

e I

nk

s fo

r F

lex

ible

, T

ran

spa

ren

t E

lec

tro

de

sL

ukas

F. E

ng

el1 ,

Jo

han

ne

s H

. M. M

au

rer1 ,

Th

om

as

Kis

ter1 ,

Lo

la G

on

zále

z-G

arc

ía1 ,

To

bia

s K

rau

s1,2

1 INM

-

Leib

niz

In

stit

ute

fo

r N

ew

M

ateri

als

, S

aarb

rück

en

, G

erm

an

y,

2C

ollo

id

an

d

Inte

r-fa

ce

Ch

em

istr

y,

Saarl

an

d

Un

ivers

ity,

S

aar-

brü

cken

, Germ

an

y

D1-

2T

um

ou

r sp

he

roid

s fo

rme

d

in

a

ca

ge

d s

pa

ce f

or

dru

g a

nd

mic

ro-

flu

idic

ba

sed

ass

ay

s Y

on

g H

e1 ,

Bo

xin

Hu

an

g1 ,

Elr

ad

e

Ro

faan

i1 , Jie

Hu

1 , Y

uan

hu

i Liu

1 , G

ab

rie

le

Pit

ing

olo

1 , L

i Wan

g2, J

ian

Sh

i2, C

aro

le

Aim

e1 ,

Yo

ng

Ch

en

1

1 Éco

le

No

rmale

S

up

éri

eu

re-P

SL

Rese

arc

h

Un

ivers

ity,

S

orb

on

ne

Un

ivers

ités

- U

PM

C

Un

iv P

ari

s 0

6,

CN

RS

UM

R 8

64

0 P

AS

TE

UR

, P

ari

s, F

ran

ce, 2

Meso

Bio

Tech

, Pari

s, F

ran

ce

TUESD

AY S

EPTEM

BER 2

4TH, 2019

26

Sci

entifi

c P

rog

ram

TUESD

AY S

EPTEM

BER 2

4th, 2019

11:1

5A

1-3

La

rge

-are

a

resi

stle

ss

pa

tte

rnin

g

on

hy

dro

ge

n-t

erm

ina

ted

Si

usi

ng

E

UV

lit

ho

gra

ph

y

Li-

Tin

g T

sen

g1 ,

Dim

itri

os

Kazazi

s1 , P

roco

pio

s C

on

stan

tin

ou

2, T

aylo

r S

tock

3,

Ne

il C

urs

on

3, S

teve

n S

ch

ofi

eld

2, G

ab

rie

l A

ep

pli1,

4,5, Y

asi

n E

kin

ci1

1 Pau

l S

cherr

er

Inst

itu

t, V

illig

en

, S

wit

zerl

an

d,

2D

ep

art

men

t o

f P

hys

ics

an

d

Ast

ron

om

y,

Un

ive

rsit

y C

olle

ge L

on

do

n,

Lo

nd

on

, U

nit

ed

K

ing

do

m, 3

Lo

nd

on

Cen

tre f

or

Nan

ote

chn

olo

-g

y, U

niv

ers

ity

Co

lleg

e L

on

do

n, L

on

do

n, U

nit

-e

d K

ing

do

m,

4E

PF

L,

Lau

san

ne

, S

wit

zerl

an

d,

5E

TH

Zu

rich

, Zu

rich

, Sw

itze

rlan

d

B1-

3G

rap

he

ne

on

fu

nc

tio

na

l p

oly

me

rs

– e

va

lua

tio

n o

f st

ress

an

d d

op

ing

, a

nd

ap

pli

ca

tio

ns

Man

ue

l Mü

ller1 ,

Ru

kan

Nasr

i1,2,

Fe

resh

ta H

afi

zi1 ,

Jo

n P

ole

nsk

y1 ,

Carm

en

He

rrm

an

n2, M

irko

Lo

hse

3,

Man

ue

l Th

ese

n3, G

ab

i Grü

tzn

er3

, Ire

ne

Fe

rnan

dez-

Cu

est

a1

1 Un

ivers

ity

Of

Ham

bu

rg,

Inst

itu

te f

or

nan

o-

stru

ctu

re an

d so

lidst

ate p

hys

ics,

H

am

bu

rg,

Germ

an

y,

2U

niv

ers

ity

of

Ham

bu

rg,

De

part

-m

en

t o

f C

hem

istr

y, H

am

bu

rg, G

erm

an

y, 3

mi-

cro

resi

st t

ech

no

log

y G

mb

H, B

erl

in, G

erm

an

y

C1-

2O

pti

miz

ed

ma

gn

et

con

fig

ura

tio

ns

for

Lo

ren

tz a

ctu

ati

on

of

a μ

-Co

rio

-li

s m

ass

flo

w s

en

sor

Th

om

as

Sch

ut1 ,

Yan

nic

k K

lein

1 , R

em

co

W

ieg

eri

nk

1 , H

an

Gard

en

iers

1 , Jo

ost

L

ött

ers

1,2

1 Uiv

ers

ity

Of

Twen

te, E

nsc

he

de

, Neth

erl

an

ds,

2B

ron

kho

rst

Hig

h-t

ech

B

V,

Ru

url

o,

Neth

er-

lan

ds

D1-

3F

ab

ric

ati

on

an

d e

x v

ivo

re

ten

tio

n

stu

dy

of

bio

de

gra

da

ble

mic

roco

n-

tain

ers

fo

r o

ral d

rug

de

liv

ery

Z

arm

ee

na A

bid

1,2, M

ett

e M

osg

aard

1,3,

Gio

rgio

Man

fro

ni1,

2, R

itik

a S

ing

h

Pete

rse

n1,

2, L

ine H

ag

ne

r N

iels

en

1,3,

An

ett

e M

ülle

rtz1,

4, A

nja

Bo

ise

n1,

3,

Ste

ph

an

Sylv

est

Ke

ller1,

2

1 Th

e

Dan

ish

N

atio

nal

Rese

arc

h

Fo

un

dat

ion

an

d V

illu

m F

ou

nd

atio

n’s

Cen

ter

for

Inte

llig

en

t D

rug

Deliv

ery

an

d S

en

sin

g U

sin

g M

icro

con

-ta

iners

an

d

Nan

om

ech

an

ics

(ID

UN

),

Kg

s.

Lyn

gb

y, D

en

mark

, 2N

atio

nal

Cen

tre f

or

Nan

o

Fab

rica

tio

n a

nd

Ch

ara

cteri

zati

on

, DT

U N

an

o-

lab

, Te

chn

ical

Un

ivers

ity

of

Den

mark

, K

gs.

Ly

ng

by,

D

en

mark

, 3D

ep

art

men

t o

f H

ealt

h

Tech

no

log

y, D

TU

Healt

h T

ech

, Te

chn

ical U

ni -

vers

ity

of

Den

mark

, K

gs.

Lyn

gb

y, D

en

mark

, 4D

ep

art

men

t o

f P

harm

acy

, F

acu

lty

of

Healt

h

an

d M

ed

ical

Sci

en

ces,

Un

ivers

ity

of

Co

pen

-h

ag

en

, 210

0 C

op

en

hag

en

, Den

mark

27

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

TUESD

AY S

EPTEM

BER 2

4TH, 2019

11:3

0A

1-4

Sim

ula

tio

n a

nd

na

no

fab

ric

ati

on

of

com

ple

x

EU

V

ach

rom

ati

c T

alb

ot

lith

og

rap

hy

ma

sks

for

hig

h-r

eso

-lu

tio

n

an

d

hig

h-t

hro

ug

hp

ut

pa

t-te

rnin

gD

imit

rio

s K

azazi

s1 , L

i-T

ing

Tse

ng

1 , Y

asi

n

Ekin

ci1

1 Pau

l S

cherr

er

Inst

itu

te, V

illig

en

-PS

I, S

wit

zer-

lan

d

B1-

4F

ab

ric

ati

on

of

A L

ow

-No

ise

In

ter-

cha

ng

ea

ble

P

latf

orm

fo

r N

an

o-

stru

ctu

red

T

ran

spo

rt

Me

asu

re-

me

nts

in

Flu

idic

, Cry

og

en

ic, a

nd

In

S

itu

Ele

ctr

on

Mic

rosc

op

y E

nv

iro

n-

me

nts

Jaco

b S

wett

1 , Iv

an

I. K

ravch

en

ko2,

On

dre

j E. D

yck

2, S

tep

he

n J

ess

e2, J

an

A

. Mo

l1,3

1 Un

ivers

ity

of

Oxfo

rd,

Oxfo

rd,

Un

ite

d K

ing

-d

om

, 2O

ak

Rid

ge N

atio

nal

Lab

ora

tory

, O

ak

Rid

ge

, Un

ite

d S

tate

s, 3

Qu

een

Mary

Un

ivers

ity

of

Lo

nd

on

, Lo

nd

on

, Un

ite

d K

ing

do

m

C1-

3O

pti

ca

l W

av

eg

uid

e

Sw

itch

ing

B

ase

d o

n a

Co

-In

teg

rate

d S

MA

Bi-

mo

rph

Ac

tua

tor

San

az

Rast

joo

1 , R

an

dy F

ech

ne

r1 , M

irko

K

ötz

1 , M

an

fre

d K

oh

l1

1 Karl

sru

he I

nst

itu

te O

f Te

chn

olo

gy

(kit

) /

In-

stit

ute

Of

Mic

rost

ruct

ure

Te

chn

olo

gy

(im

t),

Eg

gen

stein

-Le

op

old

shaf

en

, Germ

an

y

D1-

4_

INV

Na

no

me

dic

ine

wit

h S

ilic

on

Na

no

-st

ruc

ture

sN

ico

las

Vo

elc

ker, B

eatr

iz P

rieto

-Sim

o

Mo

nash

U

niv

ers

ity,

M

elb

ou

rne

Cen

ter

for

Nan

ofa

bri

cati

on

, Au

stra

lia

11:4

5A

1-5

Dis

pla

cem

en

t T

alb

ot

Lit

ho

gra

ph

y

– a

n e

me

rgin

g t

ech

no

log

y f

or

rap

-id

na

no

pa

tte

rnin

g o

n 8

-in

ch s

ca

leK

on

stan

tin

s Je

fim

ovs1,

2, M

ati

as

Kag

ias1,

2, J

oan

Vila

-Co

mam

ala

1,2, Z

hit

ian

S

hi1,

2, C

hri

stia

n D

ais

3, H

aru

n S

ola

k3,

Lu

cia

Ro

man

o1,

2,4, S

ijia X

ie1 ,

He

lmu

t S

ch

ift1 ,

Marc

o S

tam

pan

on

i1,2

1 Pau

l S

cherr

er

Inst

itu

t, V

illig

en

, S

wit

zerl

an

d,

2In

stit

ute

fo

r B

iom

ed

ical

En

gin

ee

rin

g,

Un

i-ve

rsit

y an

d E

TH

Zü

rich

, Z

üri

ch,

Sw

itze

rlan

d,

3E

ulit

ha

AG

, K

irch

do

rf,

Sw

itze

rlan

d,

4D

ep

art

-m

en

t o

f P

hys

ics

an

d C

NR

-IM

M-

Un

ivers

ity

of

Cat

an

ia, C

atan

ia, I

taly

B1-

5S

tab

le

fab

ric

ati

on

o

f a

nti

-re

-fl

ec

tio

n

wit

h

na

no

-str

uc

ture

fo

r h

igh

-te

mp

era

ture

ap

pli

ca

tio

nK

azu

ma K

uri

hara

1 , R

yo

he

i Ho

kai1 ,

Ko

uji

Miy

ake

1

1 Nat

ion

al I

nst

itu

te o

f A

dva

nce

d In

du

stri

al S

ci-

en

ce a

nd

Te

chn

olo

gy

(AIS

T),

Tsu

kub

a, J

ap

an

C1-

4A

n o

pto

me

cha

nic

al r

eso

na

tor

wit

h

a p

lasm

on

ic h

alf

bu

ll’s

ey

e a

nte

n-

na

an

d a

n a

pe

rtu

re f

or

wa

ve

len

gth

d

ete

cti

on

Re

o K

om

eta

ni1 ,

Ko

dai T

an

aka

2, S

hin

’ich

i W

ari

saw

a1

1 Th

e U

niv

ers

ity

Of

Tokyo

, C

hib

a,

Jap

an

, 2T

he

Un

ivers

ity

Of

Tokyo

, To

kyo

, Jap

an

12:0

0-1

3:0

0L

UN

CH

BR

EA

K

28

Sci

entifi

c P

rog

ram

TUESD

AY S

EPTEM

BER 2

4th, 2019

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

2:

ETCH

ING

Ch

air

s: J

.A. L

idd

le, E

. G

og

olid

es

SESSIO

N B

2:

WETTIN

G I

Ch

air

s: K

. M

eg

ari

dis

, K

. E

llin

as

SESSIO

N C

2:

SEN

SO

RS &

AC

TU

ATO

RS II

Ch

air

s: R

. K

om

eta

ni,

J. G

asp

ar

SESSIO

N D

2:

BIO

SEN

SO

RS I

Chairs:

S. C

hatz

and

roulis

, H. B

rueck

l

13:0

0A

2-1

Etc

h c

ha

lle

ng

es

on

Sin

gle

an

d D

ua

l S

OI

fin

s p

att

ern

ing

fo

r C

FE

T

at

25

nm

fin

pit

chB

T C

han

, Ju

erg

en

Bo

em

me

ls, J

ulie

n

Ryckae

rt, L

ipin

g Z

han

g, Z

he

ng

Tao

, A

ltam

iran

o S

an

ch

ez, J

ean

-Fra

nço

is d

e

Marn

eff

eIm

ec, L

eu

ven

, Belg

ium

B2

-1_

INV

Wh

at

ca

n a

nd

ca

nn

ot

be

do

ne

wit

h

Su

pe

rhy

dro

ph

ob

ic,

or

Om

nip

ho

-b

ic s

urf

ace

s?

Alid

ad

Am

irfa

zli

Yo

rk U

niv

ers

ity,

Can

ad

a

C2

-1M

icro

fa

bri

ca

ted

ele

ctr

on

op

tic

al

syst

em

sC

.T.H

. He

erk

en

s, M

.A.R

. Kri

ela

art

, Ir. P

. K

ruit

1 TU

Delf

t fa

cult

y o

f ap

plie

d sc

ien

ces,

D

elf

t,

Neth

erl

an

ds

D2

-1A

pp

lica

tio

n o

f ju

nct

ion

less

na

no

w-

ire

tra

nsi

sto

rs a

s u

ltra

sen

siti

ve

bio

-se

nso

rsY

ord

an M

. Geo

rgie

v1,2, N

iko

lay P

etk

ov3

, R

an Y

u3, A

dri

an M

. Nig

hti

ng

ale

4,

Eliz

ab

eth

Bu

itra

go

5, O

lan L

ott

y3, J

oh

n C

. d

eM

ello

4, A

dri

an M

. Io

nesc

u5, J

ust

in D

. H

olm

es3

1 Inst

itute

οf

Ion B

eam

Phys

ics

An

d M

ateri

als

Rese

arch

, H

elm

ho

ltz-

Centr

um

D

resd

en

-ro

s -se

nd

orf

(H

ZD

R),

Dre

sden

, G

erm

any,

2In

stit

ute

o

f E

lect

ron

ics

at th

e B

ulg

aria

n A

cad

em

y o

f S

cien

ces,

S

ofi

a,

Bulg

aria

, 3M

ateri

als

Ch

em

is-

try

& A

nal

ysis

Gro

up

, Sch

oo

l of

Ch

em

istr

y an

d

Tyn

dal

l N

atio

nal

In

stit

ute

, U

niv

ers

ity

Co

lleg

e

Co

rk,

Co

rk,

Irel

and

, 4Im

peri

al C

olle

ge

Lon

do

n,

Lon

do

n,

Un

ited

K

ing

do

m,

5N

ano

elect

ron

ic

Dev

ices

Lab

ora

tory

(N

ano

lab),

Éco

le P

oly

tech

-n

iqu

e F

éd

éra

l d

e Lau

san

ne

(EP

FL)

, Lau

san

ne,

Sw

itze

rlan

d

13:1

5A

2-2

On

th

e f

orm

ati

on

of

Bla

ck S

ilic

on

in

SF

6-O

2 p

lasm

a: B

Si o

n D

em

an

dV

y T

hi H

oan

g N

gu

ye

n, F

lem

min

g

Je

nse

n, J

ørg

Hu

bn

er, H

en

ri J

an

sen

Tech

nic

al

Un

ivers

ity

of

Den

mark

, K

on

gen

s Ly

ng

by,

Den

mark

C2

-2S

ilic

on

-ba

sed

M

icro

O

scil

lati

ng

H

ea

t P

ipe

s fo

r H

igh

En

erg

y P

hy

sic

s a

nd

Sp

ace

Ap

pli

ca

tio

ns

Tim

oth

ée F

rei1,

2,3, D

ieg

o A

lvare

z F

eit

o1 ,

Gré

go

ire B

ou

rban

3, A

nd

rea C

ati

naccio

1 , M

ich

el D

esp

on

t2, V

olk

er

Gass

3, A

rno

H

oo

ge

rwe

rf2, E

lisa L

au

di1 ,

Ale

ssan

dro

M

ap

elli

1

1 CE

RN

, G

en

ève

, S

wit

zerl

an

d,

2C

SE

M,

Neu

-ch

âtel,

Sw

itze

rlan

d,

3E

PF

L,

Lau

san

ne

, S

wit

-ze

rlan

d

D2

-2N

an

op

lasm

on

ic m

id-I

R b

iose

nso

rs

for

ult

rase

nsi

tiv

e m

ole

cula

r sp

ec-

tro

sco

py

A

ure

lian

Jo

hn

-He

rpin

, An

dre

as

Tit

tl,

Mari

a S

ole

r, H

ati

ce A

ltu

gE

cole

Po

lyte

chn

iqu

e F

ed

era

le d

e L

au

san

ne

, L

au

san

ne

, Sw

itze

rlan

d

29

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

13:3

0A

2-3

_IN

VA

pp

lic

ati

on

s o

f A

tom

ic

La

ye

r D

ep

osi

tio

n (

AL

D)

an

d A

tom

ic L

ay

-e

r E

tch

(A

LE

) in

Ad

va

nce

d S

em

i-co

nd

uc

tor

Ma

nu

fac

turi

ng

M

ich

al D

an

ek

Lam

Rese

arc

h C

orp

ora

tio

n, U

SA

B2

-2F

ab

ric

ati

on

of

ela

stic

me

tall

ic s

u-

pe

rhy

dro

ph

ob

ic s

urf

ace

sS

eye

d M

eh

ran

Mir

mo

ham

mad

i1 , S

ash

a

Ho

shia

n1,

2, V

ille P

. Jo

kin

en

1 , S

am

i F

ran

ssila

1

1 Aalt

o U

niv

ers

ity,

Esp

oo

, F

inla

nd

, 2A

dva

cam

Ltd

, Esp

oo

, Fin

lan

d

C2

-3M

ult

i-p

ara

me

ter

pa

pe

r se

nso

r fa

bri

ca

ted

by

in

kje

t-p

rin

ted

sil

ve

r n

an

op

art

icle

an

d P

ED

OT

:PS

SD

imit

ris

Barm

pako

s1,2, C

hri

sto

s Tsa

mis

2,

Gri

go

ris

Kalt

sas1

1 mic

roS

EN

SE

S

Lab

ora

tory

, D

ep

art

men

t o

f E

lect

rica

l an

d E

lect

ron

ic E

ng

ine

eri

ng

, Un

iver -

sity

of

West

Att

ica

, 2In

stit

ute

of

Nan

osc

ien

ce

an

d N

an

ote

chn

olo

gy,

Nat

ion

al C

en

tre f

or

Sci

-en

tifi

c R

ese

arc

h “

Dem

okr

ito

s”

D2

-3N

on

-in

va

siv

e

bla

dd

er

ca

nce

r d

e-

tec

tio

n b

ase

d o

n l

oc

ali

zed

su

rfa

ce

pla

smo

n

reso

na

nce

se

nsi

ng

a

p-

pro

ach

Zi-

Yi Y

an

g1 ,

Yi-

Ch

un

Ch

iu2, W

en

-Hu

ei

Ch

an

g3, C

hu

n-h

un

g L

in1

1 Nat

ion

al C

hen

g K

un

g U

niv

ers

ity,

Tain

an

, Tai-

wan

, 2Ta

ipei C

ity

Ho

spit

al,

Taip

ei,

Taiw

an

, 3N

a-

tio

nal P

ing

tun

g U

niv

ers

ity,

Pin

gtu

ng

, Taiw

an

13:4

5B

2-3

Fu

lly

Org

an

ic a

nd

Bio

de

gra

da

ble

, C

ell

ulo

se-b

ase

d,

Su

pe

rhy

dro

ph

o-

bic

Ma

teri

als

Ath

an

asi

os

Mili

on

is1 ,

Ch

an

de

r S

he

kh

ar

Sh

arm

a1 , R

ao

ul H

op

f1 , M

ich

ae

l U

gg

ow

itze

r1 , Ilke

r S

. Bay

er2

, Dim

os

Po

ulik

ako

s1

1 ET

H Z

uri

ch, Z

uri

ch, Ε

λβε

τία

, 2Is

titu

to I

talia

no

d

i Te

cno

log

ia, G

en

ova

, Ita

ly

C2

-4S

pa

tia

lly

co

ntr

oll

ed

3

D

ori

ga

mi

ME

MS

a

ctu

ati

on

u

sin

g

focu

sed

e

lec

tro

n b

ea

m e

xp

osu

re a

nd

po

ly-

me

r d

en

sifi

ca

tio

nR

ob

ert

Kir

ch

ne

r1 , S

eb

ast

ian

Kill

ge

1 , K

aro

la R

ich

ter1 ,

Dim

itri

os

Kazazi

s2, R

an

Z

han

g1 ,

Jo

han

n W

olf

gan

g B

art

ha1

1 TU

Dre

sden

, Dre

sden

, Germ

an

y, 2

Pau

l Sch

er-

rer

Inst

itu

te, V

illig

en

PS

I, S

wit

zerl

an

d

D2

-4S

ilic

on

-ba

sed

Mo

no

lith

ic S

pe

ctr

o-

sco

pic

Cir

cuit

fo

r L

ab

el-

fre

e P

oin

t-o

f-N

ee

d D

iag

no

stic

sK

on

stanti

no

s M

isia

kos1 ,

Ele

ni M

aka

ron

a1 , M

arc

el H

oekm

an

2, R

om

an

os

Fyro

gen

is3,

Kari

Tu

kkin

iem

i4, G

erh

ard

Jo

bst

5,

Pan

ag

iota

S. P

etr

ou

6, S

oti

rio

s E

. K

aka

bako

s6, A

lexa

nd

ros

Sala

pat

as1 ,

Dim

itri

os

Go

ust

ou

rid

is3, M

ikko

Harj

an

ne

4,

Paiv

i Heim

ala

4, A

nd

rzej B

ud

kow

ski7 ,

Mic

hele

Lees8

, Io

an

nis

Rap

tis1

1 Inst

itute

Of

Nan

osc

ience

and

Nan

ote

chno

log

y,

NC

SR

Dem

okr

itos,

Ath

ens,

Gre

ece, 2

Lio

niX

BV

, E

nsc

hed

e, T

he

Net

her

land

s, 3

Thet

aMet

risi

s S

.A.,

Per

iste

ri,

Att

ikis

, G

reec

e,

4V

TT,

Esp

oo

, F

inla

nd

, 5Jo

bst

Tec

hno

log

ies

Gm

bH

, F

reib

urg

, G

erm

a-ny

, 6In

stitute

of

Nucl

ear

& R

adio

log

ical

Sci

enc-

es

and

Te

chno

log

y,

Ener

gy

&

Saf

ety,

N

CS

R

Dem

okr

itos,

A

ghia

P

aras

kevi

, A

ttik

i, G

reec

e,

7 Jag

ello

nia

n U

niv

ersi

ty, K

rako

w, P

ola

nd

, 8E

UR

O-

FIN

S, N

ante

s, F

rance

14:0

0A

2-4

Se

lf-l

imit

ing

Ato

mic

La

ye

r E

tch

ing

o

f S

iO2

u

sin

g

Lo

w

Te

mp

era

ture

C

ycl

ic A

r/C

HF

3 P

lasm

aS

tefa

no

Cab

rin

i1 , S

tefa

no

Dallo

rto

1,2

,3,

An

dy G

oo

dye

ar2

, Mik

e C

oo

ke2,

Sco

tt D

hu

ey

1 , Ju

lia S

zorn

el1 ,

Ad

am

S

ch

wart

zbe

rg1 ,

Ivo

Ran

ge

low

3

1 Law

ren

ce

Berk

ele

y N

atio

nal

Lab

ora

tory

, B

erk

ele

y, U

nit

ed

Sta

tes,

2O

xfo

rd I

nst

rum

en

ts

Pla

sma

Tech

no

log

y, B

rist

ol B

S4

9 4

AP

, Un

ite

d

Kin

gd

om

, 3Ilm

en

au

Un

ivers

ity

of

Tech

no

log

y,

Ilme

nau

D-9

86

84

, Germ

an

y

B2

-4F

ab

ric

ati

on

a

nd

C

ha

rac

teri

zati

on

o

f A

nti

-Fo

gg

ing

S

urf

ace

s T

em

-p

late

d

fro

m

Blo

ck-C

op

oly

me

r S

elf

-Ass

em

bly

Nik

ola

j Ko

foe

d M

an

dsb

erg

1 , A

gn

iesz

ka

Te

lecka

2, E

mil

Lu

dvig

sen

2, R

afa

el

Tab

ory

ski2

1 DT

U H

ealt

h T

ech

, Ko

ng

en

s Ly

ng

by,

Den

mark

, 2D

TU

Nan

ola

b, K

on

gen

s Ly

ng

by,

Den

mark

C2

-5F

ab

ric

ati

on

a

nd

ch

ara

cte

riza

tio

n

of

SM

A t

hic

k fi

lm a

ctu

ato

r a

rra

y

for

hig

h p

ow

er

tac

tile

dis

pla

yJia

le X

u1 ,

Yu

suke

Kim

ura

1 , K

azu

ki T

suji1 ,

Ko

no

mu

Ab

e2, T

om

om

i Sh

imiz

u2,

Hir

oyasu

Hase

gaw

a2, T

akash

i Min

eta

1

1 Yam

ag

ata

Un

ivers

ity,

Yo

neza

wa

, Ja

pan

, 2To

-ka

i Rik

a C

O. L

TD

, Niw

a, J

ap

an

D2

-5C

ost

-Eff

ec

tiv

e T

hre

e-D

ime

nsi

on

al

Pla

smo

nic

SE

RS

Pa

pe

rs f

or

Ra

pid

P

ara

qu

at

Po

iso

nin

g D

iag

no

sis

wit

h

Po

rta

ble

Ra

ma

n S

pe

ctr

om

ete

rY

u-H

suan

Ch

en

1 , S

ih-W

ei C

han

g2,

Aile

en

Y. S

un

1 , H

sue

n-L

i Ch

en

2, D

eh

ui

Wan

1

1 Nat

ion

al

Tsin

g H

ua

Un

ivers

ity,

Hsi

nch

u,

Tai-

wan

, 2N

atio

nal

Taiw

an

Un

ivers

ity,

Taip

ei,

Tai-

wan

TUESD

AY S

EPTEM

BER 2

4TH, 2019

30

Sci

entifi

c P

rog

ram

TUESD

AY S

EPTEM

BER 2

4th, 2019

14:1

5-1

6:1

5P

OS

TE

R S

ES

SIO

N I

(E

ve

n N

um

be

rs)

JU

PIT

ER

HA

LL

Ch

air

s: J

. G

asp

ar, N

. K

eh

ag

ias

16:1

5-1

7:0

0

Ple

na

ry 3

Em

erg

ing

Te

ch

no

log

ies

for

Bio

hy

bri

d D

ev

ice

sS

ho

ji Take

uch

i To

kyo

Un

ivers

ity,

Jap

an

17:0

0-1

7:4

5

Ke

yn

ote

Le

ctu

re o

n I

nn

ov

ati

on

Inn

ov

ati

on

Min

dse

t: t

he

to

p 1

0 c

riti

ca

l in

sig

hts

ev

ery

te

ch

no

log

y e

ntr

ep

ren

eu

r sh

ou

ld k

no

wF

oti

s F

ilip

po

po

ulo

s

Cu

rio

us

Inc. a

nd

Inte

rnati

on

al H

elle

nic

Un

iv.,

Gre

ece

17:4

5-1

8:0

0S

HO

RT

BR

EA

K

31

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

3:

MO

DELIN

G &

METRO

LO

GY

Ch

air

s: D

. M

aas,

A. V

ekin

is

SESSIO

N B

3:

NAN

OFABRIC

ATIO

N &

N

AN

OD

EVIC

ES

Ch

air

s: T

. E

rnst

, N

. V

ain

os

SESSIO

N C

3:

FLEXIB

LE &

WEAR

ABLES

Ch

air

s: J

.-W

. C

ho

i, E

. M

akaro

na

SESSIO

N D

3:

CELL &

ORG

AN

-O

N-C

HIP

IC

hair

s: S

. F

ran

ssila

, M

. K

itsa

ra

18:0

0A

3-1

De

ep

Le

arn

ing

Na

no

me

tro

log

y o

f L

ine

Ed

ge

Ro

ug

hn

ess

Eva G

ian

nato

u3

,5, V

ass

ilio

s C

on

stan

tou

dis

1,5, G

eo

rge P

ap

avie

ros1,

4,5,

Evan

ge

los

Go

go

lide

s1,5, H

arr

is

Pap

ag

eo

rgio

u3, G

ian

Lo

russ

o2, V

. R

uti

glia

ni2

, F. V

an

Ro

ey

2

1 Inst

itu

te

of

Nan

osc

ien

ce

an

d

Nan

ote

ch-

no

log

y (I

NN

),

N.C

.S.R

. D

em

okr

ito

s,

Ag

ia

Para

skevi

, G

ree

ce,

2IM

EC

, Leu

ven

, B

elg

ium

, 3In

stit

ute

fo

r L

an

gu

ag

e a

nd

Sp

ee

ch P

roce

ss-

ing

(I

LS

P),

A

then

a R

.C.,

Maro

uss

i, G

ree

ce,

4P

hys

ics

De

part

men

t, A

rist

otl

e U

niv

ers

ity

of

Th

ess

alo

nik

i, T

hess

alo

nik

i, G

ree

ce, 5

Nan

om

e-

tris

is P

.C.,

Ag

ia P

ara

skevi

, Gre

ece

e

B3

-1S

up

er-

reso

luti

on

fa

bri

ca

tio

n

of

surf

ace

re

lie

f st

ruc

ture

s b

y

con

-tr

ac

tiv

e

sca

lin

g

of

na

no

po

rou

s m

on

oli

ths

A. P

ap

ad

em

etr

iou

, Nik

ola

os

Vain

os,

K.

Pap

ach

rist

op

ou

lou

, V. K

aro

uts

os

Un

ivers

ity

Of

Pat

ras,

De

pt

Mat

eri

als

Sci

en

ce,

Pat

ras,

Gre

ece

C3

-1_

INV

Pri

nte

d

fle

xib

le

ele

ctr

on

ics

for

we

ara

ble

ap

pli

ca

tio

ns

Zh

en

g C

ui

Su

zho

u In

stit

ute

of

Nan

ote

chn

olo

gy,

Ch

inese

A

cad

em

y o

f S

cien

ces,

Ch

ina

D3

-1A

me

tho

d f

or

the

mu

ltip

le d

ire

ct

ima

gin

g b

y T

EM

, A

FM

, a

nd

SE

RS

o

f io

n c

ha

nn

els

on

pla

sma

me

m-

bra

ne

s su

spe

nd

ed

o

n

sup

er-

hy

-d

rop

ho

bic

su

rfa

ces

Man

ola

Mo

rett

i1 , Tan

ia L

imo

ng

i2, M

ari

a

Te

resa

De A

ng

elis

3, E

lvir

a Ι

. Parr

ott

a3,

Gia

nlu

ca S

an

tam

ari

a3, M

arc

o A

llio

ne

1 , S

erg

ei L

op

ati

n4, B

run

o T

orr

e1 ,

Pe

ng

Z

han

g1 ,

An

dre

a G

iug

ni1 ,

Mo

nic

a M

ari

ni2

, A

ng

elic

a B

igo

5, P

atr

izio

Can

de

loro

6,

Gio

van

ni C

ud

a3, E

nzo

Di F

ab

rizi

o1

1 Kin

g

Ab

du

llah

U

niv

ers

ity

of

Sci

en

ce

an

d

Tech

no

log

y,

SM

ILE

s L

ab

, Je

dd

ah

, S

au

di

Ara

bia

, 2D

ipart

imen

to d

i S

cien

za A

pp

licat

a e Te

cno

log

ia,

Po

lite

cnic

o d

i To

rin

o,

Tori

no

, It

aly

, 3L

ab

ora

tory

of

Ste

m C

ell

Bio

log

y, D

e-

part

men

t o

f E

xperi

men

tal

an

d C

linic

al

Me

d-

icin

e,

Un

ivers

ity

Mag

na

Gra

eci

a,

Cat

an

zaro

, It

aly

, 4K

ing

A

bd

ulla

h

Un

ivers

ity

of

Sci

en

ce

an

d T

ech

no

log

y, I

mag

ing

an

d C

hara

cteri

za-

tio

n C

ore

lab

, T

hu

wal-

Jed

dah

, S

au

di

Ara

bia

, 5D

ipart

imen

to

di

Sci

en

ze

Ag

roA

limen

tari

, A

mb

ien

tali

e

An

imali,

U

niv

ers

ità

di

Ud

ine

, U

din

e, I

taly

, 6B

ION

EM

lab

, De

part

men

t o

f E

x-p

eri

men

tal

an

d C

linic

al

Me

dic

ine

, U

niv

ers

ity

Mag

na

Gra

eci

a, C

atan

zaro

, Ita

ly

TUESD

AY S

EPTEM

BER 2

4TH, 2019

32

Sci

entifi

c P

rog

ram

TUESD

AY S

EPTEM

BER 2

4th, 2019

18:1

5A

3-2

Mo

de

lin

g

the

R

eso

luti

on

L

imit

s o

f S

ca

nn

ing

Ele

ctr

on

Mic

rosc

op

e

Ro

ug

hn

ess

Me

tro

log

yC

hri

s M

ack

Fra

ctili

a, L

LC, A

ust

in, U

nit

ed

Sta

tes

B3

-2S

ub

-15

n

m

mu

ltil

ay

er

na

no

pil

lar

pa

tte

rnin

g

for

hy

bri

d

SE

T/C

MO

S

inte

gra

tio

nM

ari

e-L

ine P

ou

rte

au

1 , A

hm

ed

Gh

arb

i1 , P

ierr

e B

rian

ce

au

1 , Jacq

ue

s-A

lexan

dre

D

alle

ry2, F

ab

ien

Lau

lag

net1 ,

Gu

ido

R

ad

em

ake

r1 , R

alu

ca T

iro

n1 ,

Jo

han

ne

s vo

n B

ora

ny3

, Karl

-He

inz

He

inig

3,

Han

s-Ju

erg

en

En

ge

lman

n3, M

ath

ias

Ro

mm

el4

, Le

an

de

r B

aie

r4, W

ilfri

ed

L

erc

h5, J

ürg

en

Nie

ss5

1 CE

A-L

ET

I, F

-38

05

4 G

ren

ob

le,

Fra

nce

, 2V

is-

tec

Ele

ctro

n

Beam

G

mb

H,

D-0

774

3

Jen

a,

Germ

an

y, 3

Helm

ho

ltz-

Zen

tru

m D

resd

en

-Ro

s-se

nd

orf

, D-0

132

8 D

resd

en

, Germ

an

y, 4

Fra

un

-h

ofe

r IIS

B, D

-910

58

Erl

an

gen

, G

erm

an

y, 5

HQ

D

iele

ctri

cs

Gm

bH

, D

-89

160

Do

rnst

ad

t, G

er -

man

y

D3

-2M

icro

wa

ve

ra

da

rs

in

un

lab

ell

ed

, n

on

-de

stru

cti

ve

Ce

ll d

ete

cti

on

Ard

a S

ecm

e1 ,

Dila

ra U

slu

1 , Tu

fan

E

rdo

gan

1 , H

ad

i Se

dag

hat

Pis

he

h1 ,

M.

Se

lim H

an

ay1,

2

1 De

part

men

t o

f M

ech

an

ical

En

gin

eeri

ng

, B

ilken

t U

niv

ers

ity,

AN

KA

RA

, Tu

rkey,

2N

atio

n-

al N

an

ote

chn

olo

gy

Rese

arc

h C

en

ter

(UN

AM

),

Bilk

en

t U

niv

ers

ity,

AN

KA

RA

, Tü

rkiy

e

18:3

0A

3-3

A V

ali

da

tio

n o

f U

V I

mp

rin

t P

roce

ss

Sim

ula

tio

n u

sin

g a

Th

erm

o-v

isco

-e

last

ic C

on

stit

uti

ve

Mo

de

lR

yu

no

suke

Yam

ash

ita1 ,

Yu

ki O

nis

hi1 ,

Ke

nji

Am

aya1 ,

Yo

shih

iko

Hir

ai2

1 To

kyo

Inst

itu

te O

f Te

chn

olo

gy,

To

kyo

, Jap

an

, 2O

saka

Pre

fect

ure

Un

ivers

ity,

Osa

ka, J

ap

an

B3

-3T

ime

-effi

cie

nt

fab

ric

ati

on

of

Sie

r-p

ińsk

i-fr

ac

tal

bo

w-t

ie

na

no

stru

c-tu

res

wit

h

a

focu

sed

h

eli

um

io

n

be

am

an

d t

he

ir s

pe

ctr

al c

ha

rac

ter-

iza

tio

nF

lori

an

Laib

le, L

isa S

eit

l, S

imo

n

Dic

kre

ute

r, D

iete

r P

. Ke

rn, M

on

ika

Fle

isch

er

Un

ivers

ity

of

Tü

bin

gen

In

stit

ute

fo

r A

pp

lied

P

hys

ics,

Tü

bin

gen

, Germ

an

y

C3

-2O

rmo

com

p-B

ase

d P

rin

ted

Cir

cuit

B

oa

rd

Te

chn

olo

gy

fo

r B

od

y-I

m-

pla

nta

ble

Ap

pli

ca

tio

ns

Gia

nm

ari

o S

co

tti,

Su

e-Y

uan

Fan

, Yi

Ch

iuN

atio

nal C

hia

o T

un

g U

niv

ers

ity,

Hsi

n C

hu

, Tai-

wan

D3

-3E

xtr

ace

llu

lar

ma

trix

pro

tein

mic

ro-

pa

tte

rnin

g

tech

no

log

y

for

wh

ole

ce

ll c

ryo

ge

nic

ele

ctr

on

mic

rosc

o-

py

stu

die

sL

eeya E

ng

el1 ,

Gu

ido

Gae

itta

2, L

iam

P.

Do

w1,

3, M

ark

F. S

wif

t2, G

asp

ard

Pard

on

1 , N

iels

Vo

lkm

an

n2, W

illia

m I

. We

is4, D

ori

t H

an

ein

2, B

eth

L. P

ruit

t1,3

1 De

part

men

t o

f B

ioen

gin

eeri

ng

, S

tan

ford

U

niv

ers

ity,

S

tan

ford

, U

SA

, 2Im

mu

nit

y an

d

Pat

ho

gen

esi

s P

rog

ram

, S

an

ford

B

urn

ham

P

reb

ys M

ed

ical

Dis

cove

ry I

nst

itu

te,

La

Jolla

, U

SA

, 3D

ep

art

men

ts o

f M

ech

an

ical

En

gin

eer-

ing

an

d M

ole

cula

r, C

ellu

lar, a

nd

Deve

lop

men

-ta

l B

iolo

gy,

U

niv

ers

ity

of

Calif

orn

ia,

San

ta

Barb

ara

, S

an

ta B

arb

ara

, U

SA

, 4D

ep

art

men

ts

of

Str

uct

ura

l B

iolo

gy

an

d M

ole

cula

r C

ellu

lar

Ph

ysio

log

y,

Sta

nfo

rd

Un

ivers

ity

Sch

oo

l o

f M

ed

icin

e, S

tan

ford

, US

A

33

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

TUESD

AY S

EPTEM

BER 2

4TH, 2019

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

3:

MO

DELIN

G &

METRO

LO

GY

Ch

air

s: D

. M

aas,

A. V

ekin

is

SESSIO

N B

3:

NAN

OFABRIC

ATIO

N &

N

AN

OD

EVIC

ES

Ch

air

s: T

. E

rnst

, N

. V

ain

os

SESSIO

N C

3:

FLEXIB

LE &

WEAR

ABLES

Ch

air

s: J

.-W

. C

ho

i, E

. M

akaro

na

SESSIO

N D

3:

CELL &

ORG

AN

-O

N-C

HIP

IC

hair

s: S

. F

ran

ssila

, M

. K

itsa

ra

18:4

5Α

3-4

Mo

de

lin

g,

mo

nit

ori

ng

a

nd

fu

ture

p

roje

cti

on

of

sto

cha

stic

de

fec

ts i

n

EU

V l

ith

og

rap

hy

Hir

osh

i Fu

ku

da

Hit

ach

i H

igh

-Te

chn

olo

gie

s C

orp

ora

tio

n,

To-

kyo

, Jap

an

B3

-4P

ath

wa

ys

to l

ase

r g

en

era

ted

na

no

p

att

ern

s fo

r fu

nc

tio

na

l su

rfa

ces

L. G

em

ini,

Rain

er

Klin

g, G

. Min

cu

zzi

, M.

Fau

ço

nA

lph

an

ov,

Tale

nce

, Fra

nce

C3

-3C

ell

co

mp

ati

bil

ity

st

ud

y

of

SU

-8

mic

ron

ee

dle

s b

ase

d w

ea

rab

le d

ry

ele

ctr

od

es

for

ele

ctr

oe

nce

ph

alo

-g

ram

G. K

akla

man

i1 , G

. Sta

vri

nid

is1 ,

K. M

ich

ela

kis

3, V

. Ko

nto

mit

rou

1 , K

. Tsa

gara

ki1 ,

N. K

orn

ilio

s2, G

. K

on

stan

tin

idis

1

1 Mic

roele

ctro

nic

s R

ese

arc

h

Gro

up

, IE

SL-

FO

RT

H,

Vass

ilika

Vu

ton

, H

era

klio

n,

Gre

ece

, 2G

ree

k M

ed

iterr

an

ean

Un

ivers

ity,

Est

avro

m-

en

os,

H

era

klio

n,

Gre

ece

, 3S

tew

art

B

luss

on

Q

uan

tum

Mat

ter

Inst

itu

te,

Th

e U

niv

ers

ity

of

Bri

tish

Co

lum

bia

, V

an

cou

ver

Cam

pu

s, V

an

-co

uve

r B

C, C

an

ad

a

D3

-4P

oly

me

r m

icro

flu

idic

ch

ip w

ith

in

-te

gra

ted

th

erm

ofo

rme

d m

icro

ca

v-

ity

arr

ay

fo

r e

xp

osu

re o

f 3

D c

ell

a

gg

reg

ate

s to

gra

die

nts

of

solu

ble

fa

cto

rsP

hili

pp

Mau

rer, M

ire

ille S

thijn

s, J

asi

a

Kin

g, T

imo

Rad

em

ake

rs, P

am

ela

H

ab

ibo

vić

, Cle

me

ns

van

Blit

ters

wijk

, V

an

ess

a L

aP

oin

te, S

tefa

n G

ise

lbre

ch

t,

Ro

man

Tru

cke

nm

ülle

rM

ER

LN

In

stit

ute

fo

r Te

chn

olo

gy-

Insp

ire

d R

e-

gen

era

tive

M

ed

icin

e,

Maast

rich

t U

niv

ers

ity,

M

aast

rich

t, N

eth

erl

an

ds

34

Sci

entifi

c P

rog

ram

WEDN

ESD

AY, SEPTEM

BER 2

5TH, 2019

JU

PIT

ER

HA

LL

Ch

air

s: E

. G

og

olid

es,

M d

e V

itto

rio

08

:45

-09

:30

P

len

ary

4In

tell

ige

nt

an

d p

rec

ise

flo

w c

on

tro

l fo

r n

ex

t-g

en

era

tio

n m

icro

flu

idic

PO

C d

iag

no

stic

sE

mm

an

ue

l D

ela

marc

he

IBM

Rese

arc

h Z

uri

ch

, Sw

itze

rlan

d

09

:30

-10

:15

P

len

ary

5T

he

Re

vo

luti

on

of

Sil

ico

n P

ho

ton

ics

Mic

hal L

ipso

nC

olu

mb

ia U

niv

ers

ity,

US

A

10:1

5-1

0:4

5C

OF

FE

E B

RE

AK

35

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

4:

3D L

ITH

OG

RAPH

IES

Ch

air

s: C

. V

ieu

, A

. O

lzie

rsky

SESSIO

N B

4:

WETTIN

G II

Ch

air

s: A

. Tse

rep

i, A

. M

ilio

nis

SESSIO

N C

4:

PH

YSIC

AL S

EN

SO

RS

Ch

air

s: F

. M

ura

no

, P. D

imit

rakis

SESSIO

N D

4:

LAB-O

N A

CH

IP T

ECH

NO

LO

GIE

SC

hair

s: S

. P

an

g, S

. P

ark

10:4

5A

4-1

Em

erg

en

t M

ag

ne

tic

Mo

no

po

les

in

a M

acr

osc

op

ica

lly

De

ge

ne

rate

3D

A

rtifi

cia

l Sp

in I

ceS

co

tt D

hu

ey

1 , A

lan

Farh

an

2,7, C

harl

ott

e

Pete

rse

n3, M

ich

ae

l Sacco

ne

4, N

oah

K

en

t4, R

aje

sh C

ho

pd

ekar2

, Ye

n-L

in

Hu

an

g5, Z

uh

uan

g C

he

n5, M

ikko

J.

Ala

va

3, T

ho

mas

Lip

pe

rt7,

8, A

nd

reas

Sch

oll2

, Se

bast

iaan

van

Dijk

en

6

1 Mo

lecu

lar

Fo

un

dry

, Law

ren

ce B

erke

ley

Nat

ional

La

bo

rato

ry, B

erke

ley,

Un

ited

Sta

tes,

2A

dva

nce

d

Lig

ht S

ou

rce,

Law

ren

ce B

erke

ley

Nat

ional

Lab

-o

rato

ry, B

erke

ley,

Un

ited

Sta

tes,

3C

OM

P C

entr

e o

f E

xcel

len

ce,

Dep

artm

ent

of

Ap

plie

d P

hysi

cs,

Aal

to

Un

iver

sity

, A

alto

, F

inla

nd

, 4P

hysi

cs

De-

par

tmen

t, U

niv

ersi

ty o

f C

alifo

rnia

- S

anta

Cru

z,

San

ta C

ruz,

US

A, 5

Dep

t o

f M

ater

ials

Sci

ence

an

d

Eng

inee

ring

, U

niv

ersi

ty o

f C

alifo

rnia

- B

erke

ley,

B

erke

ley,

Un

ited

Sta

tes,

6N

ano

spin

, Dep

t. o

f A

p-

plie

d P

hysi

cs,

Aal

to U

niv

ersi

ty,

Aal

to,

Fin

lan

d,

7 Lab

fo

r M

ult

isca

le M

ater

ials

Exp

erim

ents

, P

aul

Sch

erre

r In

stit

ute, V

illig

en, S

wit

zerl

and

, 8D

ept

of

Ch

emis

try

and

Ap

plie

d B

iosc

ien

ces,

Lab

of

Ino

r-g

anic

Ch

emis

try,

ET

H Z

uri

ch, Z

uri

ch, S

wit

zerl

and

B4

-1_

INV

We

tta

bil

ity

-Pa

tte

rne

d

Su

rfa

ces

for

Pu

mp

less

H

an

dli

ng

o

f F

luid

M

icro

vo

lum

es:

L

ab

-on

-Ch

ip

an

d

He

at

Tra

nsf

er

Ap

pli

ca

tio

ns

Co

nst

an

tin

e M

eg

ari

dis

Un

ivers

ity

of

Illin

ois

at

Ch

icag

o

C4

-1S

usp

en

de

d

intr

ace

llu

lar

pre

ssu

re

sen

sor

wit

h a

re

fere

nce

ca

vit

yM

arí

a I

sab

el A

rjo

na1,

2, A

na S

an

ch

ez1 ,

Mart

a D

uch

1 , R

od

rig

o G

óm

ez-

Mart

ínez1 ,

Te

resa

Su

áre

z3, J

ose

An

ton

io P

laza1

1 Inst

itu

to D

e M

icro

ele

ctró

nic

a D

e B

arc

elo

na

(IM

B-C

NM

CS

IC),

Cerd

an

yola

Del V

alle

s (B

ar -

celo

na)

, Sp

ain

, 2D

ep

art

am

en

to d

e E

lect

rón

ica

y Te

cno

log

ía d

e lo

s C

om

pu

tad

ore

s, F

acu

ltad

d

e C

ien

cias,

Un

ivers

idad

de G

ran

ad

a, G

ran

a-

da

, Sp

ain

, 3C

en

tro

de In

vest

igaci

on

es

Bio

lóg

i-ca

s (C

IB)

CS

IC, M

ad

rid

, Sp

ain

D4

-1A

No

ve

l M

icro

Fre

e-F

low

Ele

ctr

o-

ph

ore

sis

3D

pri

nte

d L

ab

on

a C

hip

fo

r e

xoso

me

s se

pa

rati

on

Fe

de

rica B

arb

are

sco

1 , M

att

eo

C

ocu

zza1,

2, F

ab

rizi

o C

an

did

o P

irri

1 , S

imo

ne L

uig

i Mara

sso

1,2

1 Po

lite

cnic

o

Di

Tori

no

, To

rin

o,

Italy

, 2C

NR

-IM

EM

, Parm

a, I

taly

WEDN

ESD

AY, SEPTEM

BER 2

5TH, 2019

36

Sci

entifi

c P

rog

ram

WEDN

ESD

AY S

EPTEM

BER 2

5th, 2019

11:0

0A

4-2

Fa

bri

ca

tio

n o

f 3

D s

ca

ffo

lds

rep

ro-

du

cin

g

inte

stin

al

ep

ith

eli

um

to

-p

og

rap

hy

b

y

hig

h-r

eso

luti

on

3

D

ste

reo

lith

og

rap

hy

Ju

stin

e C

reff

1,2, R

ém

i Co

urs

on

1 , T

ho

mas

Man

ge

at2

, Ju

lie F

on

cy

1 , S

an

dri

ne

So

ule

ille

1 , C

hri

sto

ph

e T

hib

au

lt1 ,

Arn

au

d

Be

sso

n2, L

au

ren

t M

ala

qu

in1

1 LA

AS

C

NR

S,

Tou

lou

se,

Fra

nce

, 2L

BC

MC

P,

Tou

lou

se, F

ran

ce

C4

-2M

icro

fab

ric

ati

on

of

a M

EM

S a

cce

l-e

rom

ete

r w

ith

tw

o-t

hic

k f

un

cti

on

-a

l la

ye

rsIn

ês

So

fia G

arc

ia1 ,

Eu

rico

E. M

ore

ira1,

2,

Ro

san

a A

. Dia

s1 , Jo

ão

Gasp

ar1 ,

Fili

pe S

. A

lve

s1 , L

uis

Ale

xan

dre

Ro

ch

a1,2

1 INL -

In

tern

atio

nal

Iberi

an

Nan

ote

chn

olo

gy

Lab

ora

tory

, B

rag

a,

Po

rtu

gal,

2C

ME

MS

-UM

in-

ho

, Gu

imarã

es,

Po

rtu

gal

D4

-2L

oa

din

g o

f b

iod

eg

rad

ab

le m

icro

-co

nta

ine

rs

wit

h

bu

de

son

ide

fo

r lo

ca

l tr

ea

tme

nt

of

infl

am

ma

tory

b

ow

el d

ise

ase

Z

arm

ee

na A

bid

1,2, F

ran

ce

sca

An

dre

oli1,

2, M

aja

Nø

rgaard

Kri

ste

nse

n1,

3,

Rit

ika S

ing

h P

ete

rse

n1,

2, A

nett

e

Mü

llert

z1,3, A

nja

Bo

ise

n1,

4, S

tep

han

S

ylv

est

Ke

ller1,

2

1 Th

e

Dan

ish

N

atio

nal

Rese

arc

h

Fo

un

dat

ion

an

d V

illu

m F

ou

nd

atio

n’s

Cen

ter

for

Inte

llig

en

t D

rug

Deliv

ery

an

d S

en

sin

g U

sin

g M

icro

con

-ta

iners

an

d

Nan

om

ech

an

ics

(ID

UN

),

Kg

s.

Lyn

gb

y, D

en

mark

, 2N

atio

nal

Cen

tre f

or

Nan

o

Fab

rica

tio

n a

nd

Ch

ara

cteri

zati

on

, DT

U N

an

o-

lab

, Te

chn

ical

Un

ivers

ity

of

Den

mark

, K

gs.

Ly

ng

by,

Den

mark

, 3D

ep

art

men

t o

f P

harm

acy

, F

acu

lty

of

Healt

h a

nd

Me

dic

al S

cien

ces,

Un

i -ve

rsit

y o

f C

op

en

hag

en

, 2

100

C

op

en

hag

en

, D

en

mark

, 4D

ep

art

men

t o

f H

ealt

h T

ech

no

lo-

gy,

DT

U H

ealt

h T

ech

, Te

chn

ical

Un

ivers

ity

of

Den

mark

, Kg

s. L

yng

by,

Den

mark

37

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

WEDN

ESD

AY S

EPTEM

BER 2

5TH, 2019

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

4:

3D L

ITH

OG

RAPH

IES

Ch

air

s: C

. V

ieu

, A

. O

lzie

rsky

SESSIO

N B

4:

WETTIN

G II

Ch

air

s: A

. Tse

rep

i, A

. M

ilio

nis

SESSIO

N C

4:

PH

YSIC

AL S

EN

SO

RS

Ch

air

s: F

. M

ura

no

, P. D

imit

rakis

SESSIO

N D

4:

LAB-O

N A

CH

IP T

ECH

NO

LO

GIE

SC

hair

s: S

. P

an

g, S

. P

ark

11:1

5A

4-3

No

ve

l a

nd

v

ers

ati

le

pro

toty

pin

g

rou

tes

for

po

lym

eri

c h

yb

rid

a

nd

b

ico

nv

ex

mic

ro-o

pti

cs

Jo

han

ne

s W

olf

1 , S

usa

nn

e G

rütz

ne

r1 , M

arg

it F

ers

tl2, M

ark

o V

og

ler1 ,

Jan

Jasp

er

Kle

in1 ,

An

ja V

oig

t1 , M

an

ue

l T

he

sen

1 , A

nett

Ko

lan

de

r1 , M

ark

us

Gu

ttm

an

n3, M

ad

ele

ine N

uck

2, A

rne

Sch

leu

nit

z1 , G

ab

i Grü

tzn

er1

1 Μic

ro r

esi

st t

ech

no

log

y G

mb

H,

Berl

in,

Ger-

man

y,

2F

rau

nh

ofe

r H

ein

rich

H

ert

z In

stit

ute

, H

HI,

Berl

in,

Germ

an

y, 3

Karl

sru

he I

nst

itu

te o

f Te

chn

olo

gy,

Karl

sru

he

, Germ

an

y

B4

-2T

ow

ard

s lo

ng

-la

stin

g u

nd

erw

ate

r su

pe

rhy

dro

ph

ob

icit

y o

f m

icro

-na

-n

o

tex

ture

d

surf

ace

s:

Pla

stro

n

thic

kn

ess

ob

serv

ati

on

usi

ng

wh

ite

li

gh

t re

fle

cta

nce

sp

ec

tro

sco

py

Ath

an

asi

os

Sm

yrn

akis

, Dim

ost

he

nis

Io

an

no

u, K

osm

as

Elli

nas,

Ag

ge

liki

Tse

rep

i, E

van

ge

los

Go

go

lide

sIn

stit

ute

of

Nan

osc

ien

ce a

nd

Nan

ote

chn

ol-

og

y,

NC

SR

“D

em

okr

ito

s”,

Ag

ia

Para

skevi

, G

ree

ce

C4

-3S

imp

le f

ab

ric

ati

on

of

hig

hly

se

n-

siti

ve

ca

pa

citi

ve

pre

ssu

re s

en

sors

u

sin

g

a

po

rou

s d

iele

ctr

ic

lay

er

wit

h c

on

e-s

ha

pe

d p

att

ern

sY

eo

ng

jun

Kim

, Ju

wo

n H

wan

g, J

e H

oo

n

Oh

De

part

men

t o

f M

ech

an

ical

En

gin

eeri

ng

, H

a-

nya

ng

Un

ivers

ity,

An

san

,So

uth

Ko

rea

D4

-3_

INV

Aco

ust

ofl

uid

ics

- A

so

un

d

ap

-p

roa

ch t

o l

iqu

id b

iop

sie

sT

ho

mas

Lau

rell

Lu

nd

Un

ivers

ity,

Sw

ed

en

11:3

0A

4-4

_IN

VL

ase

r-b

ase

d 3

D p

rin

tin

g a

t th

e n

a-

no

sca

leM

ari

a F

ars

ari

F

ou

nd

atio

n f

or

Rese

arc

h &

Te

chn

olo

gy

Hel-

las,

Gre

ece

B4

-3B

iom

ime

tic

arc

hit

ec

ture

s fo

r e

n-

tra

pp

ing

a

ir

un

de

rwa

ter

usi

ng

w

ett

ing

ma

teri

als

Ratu

l Das,

San

kara

Aru

nach

ala

m,

Zain

Ah

mad

, Jam

ilya N

au

ruzb

ayeva

, H

iman

shu

Mis

hra

Kin

g

Ab

du

llah

U

niv

ers

ity

of

Sci

en

ce

an

d

Tech

no

log

y (K

AU

ST

),

Wat

er

Desa

linat

ion

an

d R

eu

se C

en

ter

(WD

RC

), T

hu

wal,

Sau

di

Ara

bia

C4

-4T

he

e

ffe

ct

of

cra

cke

d

alu

min

a

sub

stra

te

on

h

igh

se

nsi

tiv

e

Pt

na

no

pa

rtic

les

stra

in s

en

sor

Evan

ge

los

Asl

an

idis

1 , L

am

pro

s P

ats

iou

ras1 ,

Evan

ge

los

Sko

tad

is1 ,

Ko

nst

an

tin

os

Gia

nn

ako

po

ulo

s2, D

imit

ris

Tso

ukala

s1

1 Nat

ion

al T

ech

nic

al U

niv

erc

ity

of

Ath

en

s, A

th-

en

s,

Gre

ece

, 2N

CS

R

Dem

okr

ito

s,

AT

HE

NS

, G

ree

ce

11:4

5B

4-4

En

gin

ee

rin

g

of

na

no

stru

ctu

red

p

oly

me

r su

rfa

ces

wit

h

en

ha

nce

d

we

ttin

g p

rop

ert

ies

Rafa

el T

ab

ory

ski,

Nik

ola

j Man

dsb

erg

, A

gn

iesz

ka T

ele

cka

, Nast

asi

a O

ku

lova

, E

mil

Lu

dvig

sen

Tech

nic

al U

niv

ers

ity

of

Den

mark

, Kg

s Ly

ng

by,

D

en

mark

C4

-5D

ev

elo

pm

en

t o

f M

icro

sca

le M

ag

-n

eti

c A

ctu

ato

rsJiz

hai C

ui1,

2, P

ao

lo T

est

a1,2, A

nja

W

eb

er1,

2, L

au

ra J

. Heyd

erm

an

1,2

1 Lab

ora

tory

fo

r M

eso

sco

pic

Sys

tem

s, D

ep

art

-m

en

t o

f M

ateri

als

, E

TH

Zu

rich

, Z

uri

ch,

Sw

it-

zerl

an

d,

2L

ab

ora

bo

ry f

or

Mu

ltis

cale

Mat

eri

als

E

xperi

men

ts, P

au

l Sch

err

er

Inst

itu

te, V

illig

en

, S

wit

zerl

an

d

D4

-4Im

pri

nte

d n

an

op

art

icle

s w

ith

ma

g-

ne

tic

an

d p

lasm

on

-op

tic

al p

rop

er-

tie

s fo

r b

iom

ole

cula

r d

iag

no

stic

sA

stri

t S

ho

shi1 ,

Mic

hae

l -J. H

asl

ing

er2

, T

ina M

itte

ram

sko

gle

r2, M

ich

ae

l M

üh

lbe

rge

r2, S

tefa

n S

ch

ritt

wie

ser3

, Jö

rg S

ch

ott

er3

, Hu

be

rt B

rückl1

1 De

part

men

t fo

r In

teg

rate

d S

en

sor

Sys

tem

s,

Dan

ub

e

Un

ivers

ity

Kre

ms,

2P

RO

FA

CT

OR

G

mb

H, 3

AIT

Au

stri

an

In

stit

ute

of

Tech

no

log

y

38

Sci

entifi

c P

rog

ram

WEDN

ESD

AY S

EPTEM

BER 2

5th, 2019

12:0

0-1

3:0

0L

UN

CH

BR

EA

K

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

5:

NO

VEL P

ATTERN

ING

APPLIC

ATIO

NS

Chai

rs: J

F d

e M

arnef

fe, V

. Const

anto

ud

is

SESSIO

N B

5:

IND

US

TRIA

LC

hair

s: R

. Tab

ory

ski,

A. M

ilio

nis

SESSIO

N C

5:

EN

ERG

Y H

AR

VES

TIN

G

DEVIC

ES

Ch

air

s: C

. Tsa

mis

, G

. M

uri

llo

SESSIO

N D

5:

CELLS &

ORG

AN

-ON

-CH

IP II

Ch

air

s: R

. L

utt

ge

, JM

. Q

ue

ro

13:0

0A

5-1

Fa

bri

ca

tio

n o

f 3

D a

nis

otr

op

ic d

ry

ad

he

siv

e

mic

rost

ruc

ture

s b

ase

d

on

2P

P f

or

ap

pli

ca

tio

n i

n s

pa

ceJan

F. B

usc

he

, Ge

reo

n S

tark

e, S

ask

ia

Kn

ickm

eie

r, A

nd

reas

Die

tze

Inst

itu

te o

f M

icro

tech

no

log

y, T

U B

rau

nsc

h-

weig

, Bra

un

sch

weig

, Germ

an

y

B5

-1_

INV

Pa

tte

rne

d

Str

uc

ture

s a

nd

N

an

ol-

am

ina

te

Hy

bri

d

Arc

hit

ec

ture

s fr

om

Pla

nt-

sou

rce

d N

an

oce

llu

lose

fo

r O

pto

ele

ctr

on

ics

Te

kla

Tam

me

lin

VT

T T

ech

nic

al R

ese

arc

h C

en

ter, F

inla

nd

C5

-1E

nh

an

ced

re

spo

nsi

vit

y o

f P

N j

un

c-ti

on

so

lar

cell

s th

rou

gh

gra

ph

en

e

mo

difi

ca

tio

n l

ay

er

Bo

Fe

ng

,Tia

ny

u W

an

g, J

ing

yu

an

Zh

u,

Yif

an

g C

he

nF

ud

an

Un

ivers

ity,

Sh

an

gh

ai,

Ch

ina

D5

-1In

flu

en

ce o

f 3

D m

icro

en

vir

on

me

nt

on

ca

nce

r ce

lls

gro

wth

an

d i

nv

a-

sio

nS

ara

Se

rgio

1,2, A

dd

olo

rata

Mari

a L

uce

Co

luccia

2, E

nri

co

Do

me

nic

o L

em

ma

3,

Barb

ara

Sp

ag

no

lo1 ,

Dan

iele

Ve

rgara

2,4,

Mic

he

le M

affi

a2

,4, M

ass

imo

De

Vit

tori

o1,

5, F

err

uccio

Pis

an

ello

1

1 Isti

tuto

Italia

no

di T

ecn

olo

gia

, Cen

ter

for

Bio

-m

ole

cula

r N

an

ote

chn

olo

gie

s, A

rnesa

no

, Ita

ly,

2D

ipart

imen

to d

i S

cien

ze e

Te

cno

log

ie B

io-

log

ich

e e

Am

bie

nta

li, U

niv

ers

ità

del

Sale

nto

, Le

cce

, Ita

ly, 3

Karl

sru

her

Inst

itu

t fü

r Te

chn

olo

-g

ie, Z

oo

log

isch

es

Inst

itu

t, A

bte

ilun

g Z

ell-

un

d

Neu

rob

iolo

gie

, K

arl

sru

he

, Germ

an

y, 4

Lab

ora

-to

ry o

f C

linic

al

Pro

teo

mic

, G

iova

nn

i P

ao

lo I

I H

osp

ital,

Le

cce

, Ita

ly, 5

Dip

art

imen

to d

i In

geg

-n

eri

a d

ell’

Inn

ova

zio

ne

, Un

ivers

ità

del S

ale

nto

, Le

cce

, Ita

ly

13:1

5A

5-2

Cle

an

roo

m i

n a

n S

EM

: in

-sit

u p

at-

tern

tra

nsf

er

Gau

dh

am

an

Je

evan

an

dam

, Ru

ud

van

To

l, Y

ou

p v

an

Go

oze

n, P

iete

r K

ruit

, C

orn

elis

W. H

ag

en

Ch

arg

ed

Part

icle

Op

tics

gro

up

, D

ep

t. I

mag

-in

g P

hys

ics,

Delf

t U

niv

ers

ity

of

Tech

no

log

y,

Delf

t, N

eth

erl

an

ds

C5

-2P

iezo

ele

ctr

ic A

lN-b

ase

d fi

be

r-o

p-

tic

de

vic

es

for

sen

sin

g a

nd

en

erg

y

ha

rve

stin

gM

ass

imo

Mari

ello

1,2, F

ran

ce

sco

Gu

ido

2,

Lu

cia

na A

lgie

ri3, V

ince

nzo

Mari

an

o

Mast

ron

ard

i2, F

ran

ce

sco

Riz

zi2, A

nto

nio

Q

ualt

ieri

2, F

err

uccio

Pis

an

ello

2,

Mass

imo

De V

itto

rio

1,2

1 Dip

art

imen

to d

i In

geg

neri

a d

ell’

Inn

ova

zio

ne

, U

niv

ers

ità

del

Sale

nto

, Le

cce

, It

aly

, 2C

en

ter

for

Bio

mo

lecu

lar

Nan

ote

chn

olo

gie

s, I

stit

uto

It

alia

no

di Te

cno

log

ia, A

rnesa

no

, Le

cce

, Ita

ly,

3P

iezo

skin

S.r

.l, A

rnesa

no

, Le

cce

, Ita

ly

D5

-2B

iom

ime

tic

ali

gn

ed

n

an

ofi

bro

us

PV

DF

sc

aff

old

s fo

r c

ard

iac

tiss

ue

e

ng

ine

eri

ng

Mari

a K

itsa

ra1 ,

Ch

au

Le

1 , A

lexan

dre

S

imo

n1 ,

On

nik

Ag

bu

lut1 ,

Vin

ce

nt

Hu

blo

t2, G

aë

lle R

evet1 ,

Th

ierr

y D

ufo

ur3

1 So

rbo

nn

e U

niv

ers

ité

, In

stit

ut

de B

iolo

gie

Par-

is-S

ein

e, P

ari

s, F

ran

ce, 2

So

rbo

nn

e U

niv

ers

ité

, L

ab

ora

toir

e d

e R

éact

ivit

é d

e S

urf

ace

U

MR

C

NR

S,

Pari

s, F

ran

ce,

3S

orb

on

ne U

niv

ers

ité

, L

ab

ora

toir

e d

e P

hys

iqu

e d

es

Pla

smas,

UM

R

CN

RS

, P

ari

s, F

ran

ce

39

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

WEDN

ESD

AY S

EPTEM

BER 2

5TH, 2019

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

5:

NO

VEL P

ATTERN

ING

APPLIC

ATIO

NS

Chai

rs: J

F d

e M

arnef

fe, V

. Const

anto

ud

is

SESSIO

N B

5:

IND

US

TRIA

LC

hair

s: R

. Tab

ory

ski,

A. M

ilio

nis

SESSIO

N C

5:

EN

ERG

Y H

AR

VES

TIN

G

DEVIC

ES

Ch

air

s: C

. Tsa

mis

, G

. M

uri

llo

SESSIO

N D

5:

CELLS &

ORG

AN

-ON

-CH

IP II

Ch

air

s: R

. L

utt

ge

, JM

. Q

ue

ro

13:3

0A

5-3

Pro

tein

A

my

loid

F

ibri

ls

Fo

rma

-ti

on

an

d G

row

th i

n D

rop

let

wit

h

Co

nfi

ne

d C

on

ve

cti

on

Flo

w o

n S

u-

pe

r-h

yd

rop

ho

bic

Su

rfa

ceP

en

g Z

han

g1 ,

Man

ola

Mo

rett

i1 , M

arc

o

Alli

on

e1 ,

Javie

r O

rdo

nezl

oza

2, M

an

i S

ara

thy

2, E

nzo

Di F

ab

rizi

o1

1 SM

ILE

s L

ab

, P

hys

ical

Sci

en

ce a

nd

En

gin

eer-

ing

(P

SE

) an

d B

iolo

gic

al

an

d E

nvi

ron

men

tal

Sci

en

ce an

d E

ng

ine

eri

ng

(B

ES

E)

Div

isio

ns,

K

ing

A

bd

ulla

h

Un

ivers

ity

Of

Sci

en

ce

An

d

Tech

no

log

y,

Th

uw

al,

Sau

di

Ara

bia

, 2C

lean

C

om

bu

stio

n R

ese

arc

h C

en

ter, P

hys

ical

Sci

-e

nce

an

d E

ng

ine

eri

ng

(P

SE

) D

ivis

ion

, K

ing

A

bd

ulla

h U

niv

ers

ity

of

Sci

en

ce a

nd

Te

chn

ol-

og

y, T

hu

wal,

Sau

di A

rab

ia

B5

-2D

ire

cte

d A

sse

mb

ly-b

ase

d P

rin

tin

g

of

Na

no

an

d M

icro

sca

le E

lec

tro

n-

ics

an

d S

en

sors

Ah

me

d B

usn

ain

aN

ort

heast

ern

U

niv

ers

ity,

B

ost

on

, U

nit

ed

S

tate

s

C5

-3M

eta

l O

xid

e

Inte

rla

ye

rs

for

Hig

h

Pe

rfo

rma

nce

In

ve

rte

d

Pe

rov

skit

e

So

lar

Ce

lls

Ste

lios

Ch

ou

lisC

ypru

s U

niv

ersi

ty o

f Te

chn

olo

gy,

Lim

asso

l, C

y-p

rus

D5

-3_

INV

Fro

m

Ce

lls-

on

-Ch

ip

to

Ch

ips-

in-

Ce

ll: o

ur

fan

tast

ic “

vo

ya

ge

” P

laza

, Jo

sé A

nto

nio

In

stit

uto

d

e M

icro

elec

tró

nic

a d

e B

arce

lo-

na-

CN

M, S

pai

n

13:4

5A

5-4

A

full

y

inte

gra

ted

ta

pe

red

fi

be

r o

ptr

od

e

for

sim

ult

an

eo

us

mu

lti-

po

int

op

tic

al c

on

tro

l an

d e

lec

tric

al

rea

do

ut

of

ne

ura

l ac

tiv

ity

An

ton

io B

ale

na1,

2, A

less

an

dro

Riz

zo1,

2,

Le

on

ard

o S

ileo

1 , B

arb

ara

Sp

ag

no

lo1 ,

Fili

pp

o P

isan

o1 ,

Marc

o P

isan

ello

1 , F

ran

ce

sco

De N

uccio

3, D

om

en

ico

L

ofr

um

en

to3, E

nri

co

Do

me

nic

o

Le

mm

a1,2, B

ern

ard

o L

uis

Sab

ati

ni4

, M

ass

imo

De V

itto

rio

1,2, F

err

uccio

P

isan

ello

1

1 Isti

tuto

Italia

no

Di T

ecn

olo

gia

, Cen

ter F

or B

io-

mo

lecu

lar

Nan

ote

chn

olo

gie

s, A

rnesa

no

, Ita

ly,

2D

ep

art

men

t o

f In

no

vati

on

En

gin

eeri

ng

, U

ni-

vers

ità

del

Sale

nto

, Le

cce

, It

aly

, 3L

ab

Hu

man

A

nat

om

y an

d N

eu

rosc

ien

ce,

De

part

men

t o

f B

iolo

gic

al

an

d

En

viro

nm

en

tal

Tech

no

log

ies

an

d S

cien

ces.

Un

ivers

ità

del

Sale

nto

, Le

cce

, It

aly

, 4D

ep

art

men

t o

f N

eu

rob

iolo

gy,

Ho

ward

H

ug

hes

Me

dic

al

Inst

itu

te,

Harv

ard

M

ed

ical

Sch

oo

l, B

ost

on

, Ita

ly

B5

-3P

roto

-MIP

– A

No

ve

l R

ou

te f

or

MIP

F

ab

ric

ati

on

San

dra

Haas,

Le

o S

ch

ran

zho

fer,

Bri

ttan

y R

ob

ert

sP

rofa

cto

r, S

teyr

-Gle

ink, A

ust

ria

C5

-4F

ab

ric

ati

on

o

f e

lec

tro

spu

n

po

ly-

imid

e n

an

ofi

be

rs a

nd

th

eir

ap

pli

-c

ati

on

in

tri

bo

ele

ctr

ic n

an

og

en

er-

ato

rsY

eo

ng

jun

Kim

, Xin

we

i Wu

, Je H

oo

n O

hD

ep

art

men

t o

f M

ech

an

ical

En

gin

eeri

ng

, H

a-

nya

ng

Un

ivers

ity,

An

san

, So

uth

Ko

rea

40

Sci

entifi

c P

rog

ram

WEDN

ESD

AY S

EPTEM

BER 2

5th, 2019

14:0

0A

5-5

Gra

ysc

ale

e-b

ea

m l

ith

og

rap

hy

fo

r th

e f

ab

ric

ati

on

of

3D

mic

rofl

uid

ic

de

vic

es

Th

om

as

Mo

rte

lman

s1,2

,3, D

imit

rio

s K

azazi

s1 , V

italiy

A. G

uze

nko

1 , C

ele

stin

o

Pad

est

e1 ,

Xia

od

an

Li1 ,

Th

om

as

Bra

un

2,

He

nn

ing

Sta

hlb

erg

2, Y

asi

n E

kin

ci1

1 Pau

l S

cherr

er

Inst

itu

te,

52

32 V

illig

en

, S

wit

-ze

rlan

d,

2C

en

ter

for

Cellu

lar

Imag

ing

an

d

Nan

oA

naly

tics

(C-C

INA

), 4

05

8 B

ase

l, S

wit

-ze

rlan

d,

3S

wis

s N

an

osc

ien

ce I

nst

itu

te,

40

56

B

ase

l, S

wit

zerl

an

d

B5

-4A

nti

refl

ec

tiv

e

Mo

th-E

ye

s S

tru

c-tu

res

on

Fre

efo

rm S

urf

ace

s fa

bri

-c

ate

d b

y N

an

oim

pri

nt

Lit

ho

gra

ph

yM

ich

ae

l J. H

asl

ing

er, A

miy

a R

an

jan

M

oh

ara

na

, Dan

iel F

ech

tig

, Mic

hae

l M

üh

lbe

rge

rP

rofa

cto

r G

mb

h.,

Ste

yr-G

lein

k, A

ust

ria

D5

-4C

om

bin

ati

on

of

a b

iop

oly

me

r a

nd

U

V-c

ast

ing

fo

r p

rod

uc

tio

n o

f a

pe

-ri

ph

era

l n

erv

e i

mp

lan

t co

nta

inin

g

an

in

tern

al

ali

gn

ed

mic

roch

an

ne

ls

arr

ay

San

tos

Me

rin

o1 ,

Ru

th D

iez

- A

he

do

1 , M

ari

a d

el C

arm

en

Marq

uez

- P

osa

das1 ,

Iban

Qu

inta

na1 ,

Fra

ncis

co

Javie

r R

od

ríg

uez

2, J

oh

n W

. Hay

co

ck

3, A

llan

G

len

3, B

eg

oñ

a C

ast

ro4, E

va G

on

zále

z4,

Patr

ick D

uff

y5, W

en

xin

Wan

g6

1 Ik4

-Te

knik

er, E

ibar, S

pain

, 2H

osp

ital N

aci

on

al

de P

ara

plé

jico

s, T

ole

do

, S

pain

, 3U

niv

ers

ity

of

Sh

effi

eld

, S

heffi

eld

, E

ng

lan

d,

4H

isto

cell

S.L

, D

eri

o,

Sp

ain

, 5A

shla

nd

S

pe

cialt

ies

Irela

nd

, S

ynerg

y C

en

tre

, D

ub

lin,

Irela

nd

, 6U

niv

ers

ity

Co

lleg

e D

ub

lin, C

harl

es

Inst

itu

te o

f D

erm

ato

l -o

gy,

Du

blin

, Ire

lan

d

14:1

5-1

6:1

5P

OS

TE

R S

ES

SIO

N I

I (O

dd

Nu

mb

ers

)

41

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

WEDN

ESD

AY S

EPTEM

BER 2

5th, 2019

JU

PIT

ER

HA

LL

Ch

air

: C

. Tsa

mis

16:1

5-1

7:0

0

Ple

na

ry 6

Na

no

ge

ne

rato

rs f

or

self

-po

we

red

sy

ste

ms

an

d s

en

sors

Z

ho

ng

Lin

Wan

g

Geo

rgia

Tech

, US

A

42

Sci

entifi

c P

rog

ram

WEDN

ESD

AY S

EPTEM

BER 2

5th, 2019

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

6:

NIL

& N

OVEL L

ITH

OGR

APH

IES

Ch

air

s: Y

. H

irai,

M. F

ars

ari

SESSIO

N B

6:

NANO

FAB F

OR B

IOAPPLIC

ATIO

NS

Ch

air

s: A

. M

aan

, S

. F

ran

ssila

SESSIO

N C

6:

PH

OTO

NIC

STRUC

TURES

Ch

air

s: S

. C

ho

ulis

, L

. B

usi

naro

SESSIO

N D

6:

IND

US

TRIA

LC

hair

s: A

. M

cM

illan

, A

. Tse

rep

i

17:0

0A

6-1

Hig

h t

hro

ug

hp

ut

dir

ec

t m

eta

l o

x-id

e

na

no

pa

tte

rnin

g

by

so

l-g

el

soft

-NIL

in c

on

tro

lle

d a

tmo

sph

ere

, a

nd

re

late

d a

pp

lic

ati

on

sD

avid

Gro

sso

1 , T

ho

mas

Bo

tte

in1 ,

Sim

on

a C

he

ccu

cci2

, Marc

o F

au

stin

i3,

Mari

o G

uri

oli2

, Lu

c F

avre

1 , M

arc

o

Ab

barc

hi1

1 Im2

np

/

Aix

M

ars

eill

e

Un

ivers

ity,

M

ars

eill

e

Ce

dex

20

, F

ran

ce,

2E

uro

pean

L

ab

ora

tory

fo

r N

on

linear

Sp

ect

rosc

op

y (L

EN

S),

S

est

o

Fio

ren

tin

o,

Italy

, 3L

ab

ora

toir

e d

e C

him

ie d

e

la M

atiè

re C

on

den

sée d

e P

ari

s -

LCM

CP

So

r -b

on

ne U

niv

ers

ité

, Pari

s, F

ran

ce

B6

-1D

ire

ct

Ph

oto

red

uc

tio

n

of

Go

ld

Na

no

pa

rtic

les

on

SU

-8 n

an

ost

ruc-

ture

sY

i-Ju

i Ch

en

1 , P

rof. W

en

-Hu

ei C

han

g2,

Ch

un

-hu

ng

Lin

1

1 Nat

ion

al C

he

ng

Ku

ng

Un

ivers

ity,

Tain

an

, Tai-

wan

, 2N

atio

nal P

ing

tun

g U

niv

ers

ity,

Pin

gtu

ng

, Ta

iwan

C6

-1S

tre

tch

ab

le

pla

smo

nic

ru

lers

: R

ev

ers

ibly

tu

nin

g

the

co

up

lin

g

stre

ng

th

of

ind

ivid

ua

l p

lasm

on

-ic

n

an

o-b

ow

tie

s o

n

fle

xib

le

sub

-st

rate

sF

lori

an

Laib

le1,

2, D

om

inik

A. G

ollm

er1,

2,

Sim

on

Dic

kre

ute

r1,2, D

iete

r P. K

ern

1,2,

Mo

nik

a F

leis

ch

er1,

2

1 Inst

itu

te f

or

Ap

plie

d P

hys

ics,

Un

ivers

ity

of

Tueb

ing

en

, Tu

eb

ing

en

, G

erm

an

y,

2C

en

ter

LIS

A+

, U

niv

ers

ity

of

Tueb

ing

en

, Tu

eb

ing

en

, G

erm

an

y

D6

-1L

ab

el-

fre

e

ima

gin

g

pla

tfo

rm

for

rap

id a

na

lysi

s o

f b

iom

ark

ers

Lu

c D

üm

pe

lman

n1 ,

Ro

lan

d A

. Te

rbo

rg1 ,

Jo

sse

lin P

ello

1 , Illa

ria M

an

ne

lli1 ,

Fili

z Y

esi

lko

y2, A

lexan

de

r B

elu

shkin

2,

Yasa

man

Jah

an

i2, N

uri

a F

ab

ri-F

aja

3,

Pri

yan

ka D

ey3

, Ola

llo C

alv

o-L

ozan

o3,

M.-

Carm

en

Est

evez

3, A

nn

a F

àb

reg

a4,

Ju

an

J. G

on

zále

z-L

óp

ez4

, Lau

ra M

. L

ech

ug

a3, H

ati

ce A

ltu

g2, V

ale

rio

P

run

eri

1

1 ICF

O -

In

stit

ut

de C

ièn

cies

Fo

tòn

iqu

es,

Cas-

telld

efe

ls, S

pain

, 2E

PF

L -

Éco

le P

oly

tech

niq

ue

Fé

déra

le

de

Lau

san

ne

, L

au

san

ne

, S

wit

zer -

lan

d,

3IC

N2 –

In

stit

ute

of

Nan

osc

ien

ce a

nd

N

an

ote

chn

olo

gy,

Barc

elo

na

, S

pain

, 4H

osp

ital

Un

ivers

itari

Vall

d’H

eb

ron

, Barc

elo

na

, Sp

ain

17:1

5A

6-2

Su

b-m

icro

n

silv

er

wir

es

on

n

on

-fl

at

po

lym

er

sub

stra

tes

fab

ric

ate

d

by

th

erm

al i

mp

rin

t a

nd

ba

ck i

nje

c-ti

on

mo

ldin

gH

elm

ut

Sch

ift1 ,

Siji

a X

ie1 ,

Barb

ara

H

orv

áth

1 , Je

rom

e W

erd

er2

1 Pau

l S

cherr

er

Inst

itu

t (P

SI)

, V

illig

en

P

SI,

Sw

itze

rlan

d,

2F

HN

W

Un

ivers

ity

of

Ap

plie

d

Sci

en

ces

an

d A

rts

No

rth

west

ern

Sw

itze

rlan

d,

Win

dis

ch, S

wit

zerl

an

d

B6

-2M

icro

-an

d

na

no

stru

ctu

res

for

ul-

tra

soft

ne

ura

l in

terf

ace

s B

ekim

Osm

an

i1 , T

ino

Tö

pp

er1 ,

He

lmu

t S

ch

ift2

, Rap

hae

l Gu

zman

3, M

ag

nu

s K

rist

ian

sen

4, R

ow

en

a C

rocke

tt5, B

ert

M

ülle

r1

1 Bio

mat

eri

als

S

cien

ce

Cen

ter,

De

part

men

t o

f B

iom

ed

ical

En

gin

eeri

ng

, U

niv

ers

ity

of

Ba-

sel,

Alls

chw

il,

Sw

itze

rlan

d,

2L

ab

ora

tory

fo

r M

icro

- an

d

Nan

ote

chn

olo

gy,

P

au

l S

cherr

er

Inst

itu

te,

Vill

igen

, S

wit

zerl

an

d,

3D

ep

art

men

t o

f N

eu

rosu

rgery

, U

niv

ers

ity

Ho

spit

al

Base

l, B

ase

l, S

wit

zerl

an

d, 4

Inst

itu

te o

f P

oly

mer

Nan

-o

tech

no

log

y,

FH

NW

U

niv

ers

ity

of

Ap

plie

d

Sci

en

ces

an

d A

rts

No

rth

west

ern

Sw

itze

rlan

d,

Win

dis

ch, S

wit

zerl

an

d, 5

Co

atin

g C

om

pete

nce

C

en

ter, E

mp

a, D

üb

en

do

rf, S

wit

zerl

an

d

C6

-2E

nh

an

cem

en

t o

f P

ho

tod

ete

cti

on

P

erf

orm

an

ce o

f G

rap

he

ne

by

Ph

o-

tore

cep

tor

Pro

tein

Jin

g T

on

g1,

2, Y

i Wan

g3

,4, Y

ue

lin W

an

g1 ,

Tie

Li1

1 SIM

IT, C

AS

, Sh

an

gh

ai,

Ch

ina

, 2U

CA

S, B

eiji

ng

, C

hin

a, 3

Beiji

ng

In

stit

ute

of

Lif

eo

mic

s, B

eiji

ng

, C

hin

a, 4

NE

RC

PD

, Beiji

ng

, Ch

ina

D6

-2A

se

nsi

tiv

e

La

b-o

n-a

-ch

ip

for

pa

tho

ge

n d

ete

cti

on

usi

ng

a s

imp

le

DN

A a

mp

lifi

ca

tio

n r

ea

cti

on

G

eo

rgia

Kap

rou

1 , K

ate

rin

a T

sou

ge

ni1,

2,

Ath

ina S

. Kast

an

ia2, C

hri

sto

s-M

ori

tz

Lo

ukas1 ,

Ath

an

asi

os

Sm

yrn

akis

1 , K

osm

as

Elli

nas1,

2, E

van

ge

los

Go

go

lide

s1,2, A

ng

elik

i Tse

rep

i1,2

1 NC

SR

Dem

okr

ito

s, A

then

s, G

ree

ce,

2N

an

o-

pla

smas

P.C

., A

then

s, G

ree

ce

43

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

WEDN

ESD

AY S

EPTEM

BER 2

5th, 2019

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

6:

NIL

& N

OVEL L

ITH

OGR

APH

IES

Ch

air

s: Y

. H

irai,

M. F

ars

ari

SESSIO

N B

6:

NANO

FAB F

OR B

IOAPPLIC

ATIO

NS

Ch

air

s: A

. M

aan

, S

. F

ran

ssila

SESSIO

N C

6:

PH

OTO

NIC

STRUC

TURES

Ch

air

s: S

. C

ho

ulis

, L

. B

usi

naro

SESSIO

N D

6:

IND

US

TRIA

LC

hair

s: S

. P

ark

, A

. M

cM

illan

17:3

0A

6-3

Hy

dro

ge

n D

ep

ass

iva

tio

n L

ith

og

ra-

ph

y E

xp

osu

re P

hy

sic

sJo

hn

Ran

dall,

Jam

es

H.G

. Ow

en

, Eh

ud

F

uch

s, M

ich

ae

l Sch

an

tz, R

ob

in S

an

tin

i, C

yn

di D

elg

ad

o, J

ose

ph

H. L

ake

Zy

vex

Lab

s, R

ich

ard

son

, Un

ite

d S

tate

s

B6

-3B

ioB

ots

: L

igh

t-co

ntr

oll

ed

m

icro

-to

ols

fo

r b

iolo

gic

al a

pp

lic

ati

on

sA

da-I

oan

a B

un

ea1 ,

Ein

sto

m E

ng

ay2,

Ale

xan

dre

Wetz

el1 ,

Rafa

el T

ab

ory

ski1

1 DT

U

Nan

ola

b,

Ko

ng

en

s Ly

ng

by,

D

en

mark

, 2D

TU

Fo

ton

ik, K

on

gen

s Ly

ng

by,

Den

mark

C6

-3M

icro

-le

ns

arr

ay

su

pe

rpo

siti

on

s fo

r le

ve

l-li

ne

mo

iré

sT

ho

mas

Walg

er1 ,

Ro

ge

r D

. He

rsch

2,

Ju

erg

en

Bru

gg

er1

1 Mic

rosy

stem

s L

ab

ora

tory

- E

pfl

, L

au

san

ne

, S

wit

zerl

an

d,

2S

cho

ol

of

Co

mp

ute

r an

d C

om

-m

un

icat

ion

Sci

en

ces

- E

PF

L, L

au

san

ne

, Sw

it-

zerl

an

d

D6

-3D

imp

le s

tru

ctu

re t

o e

na

ble

hig

hly

a

ccu

rate

m

icro

dro

ple

t m

an

ipu

la-

tio

nK

ats

uo

Mo

gi1 ,

Sh

un

go

Ad

ach

i1 , N

ao

ki

Takad

a2, T

om

oya I

no

ue

2, T

oh

ru

Nats

um

e1

1 Mo

lecu

lar

Pro

filin

g

Rese

arc

h

Cen

ter

Fo

r D

rug

D

isco

very

, N

atio

nal

Inst

itu

te

Of

Ad

-va

nce

d I

nd

ust

rial

Sci

en

ce A

nd

Te

chn

olo

gy,

To

kyo

, Ja

pan

, 2R

ese

arc

h C

en

ter

for

Ub

iqu

i-to

us

ME

MS

an

d M

icro

En

gin

eeri

ng

, N

atio

nal

Inst

itu

te o

f A

dva

nce

d I

nd

ust

rial

Sci

en

ce a

nd

Te

chn

olo

gy,

Ib

ara

ki, J

ap

an

17:4

5A

6-4

Ha

rd m

ask

na

no

pa

tte

rns

inte

gra

t-e

d

into

se

mic

on

du

cto

r m

an

ufa

c-tu

rin

g:

A

faci

le

blo

ck

cop

oly

me

r m

eth

od

olo

gy

Tan

dra

Gh

osh

al,

Mic

hae

l Mo

rris

Su

rface

A

nd

In

terf

ace

C

hem

istr

y,

De

part

-m

en

t O

f C

hem

istr

y,

AM

BE

R

An

d

CR

AN

N,

Trin

ity

Co

lleg

e D

ub

lin, D

ub

lin, I

rela

nd

, Du

blin

, Ir

ela

nd

B6

-4F

ab

ric

ati

on

M

eth

od

olo

gy

fo

r P

ers

on

ali

sed

B

iod

eg

rad

ab

le

Mi-

cro

ne

ed

le A

rra

yL

ibo

Wu

1 , N

ob

uy

uki T

akam

a1 , B

eo

mjo

on

Kim

1

1 Inst

itu

te o

f In

du

stri

al S

cien

ce, T

he U

niv

ers

ity

of

Tokyo

, To

kyo

, Jap

an

C6

-4N

on

pla

na

r n

an

ost

ruc

turi

ng

of

ta-

pe

red

op

tic

al

fib

ers

fo

r p

lasm

on

ic

ne

ura

l in

terf

ace

sF

ilip

po

Pis

an

o1 ,

An

ton

io B

ale

na1,

2,

Marc

o G

ran

de

3, M

arc

o P

isan

ello

1 , T

izia

na S

tom

eo

1 , A

nto

nio

Qu

alt

ieri

1 , M

arc

o B

ian

co

1,2, L

eo

nard

o S

ileo

1 , A

nto

ne

lla D

’Ora

zio

3, M

ass

imo

De

Vit

tori

o1,

2, F

err

uccio

Pis

an

ello

1

1 Fo

nd

azio

ne

Isti

tuto

It

alia

no

D

i Te

cno

lo-

gia

-CB

N,

Arn

esa

no

, It

aly

, 2D

ipart

imen

to

di

Ing

eg

neri

a d

ell’

Inn

ova

zio

ne

, U

niv

ers

ità

del

Sale

nto

, Le

cce

, Ita

ly, 3

Dip

art

imen

to d

i In

geg

-n

eri

a E

lett

rica

e d

ell’

Info

rmaz

ion

e,

Po

lite

cni-

co d

i Bari

, Bari

, Ita

ly

D6

-4P

latf

orm

fo

r H

igh

Th

rou

gh

pu

t m

an

-u

fact

uri

ng

of

Mic

rofl

uid

ic D

evic

es

Mart

in S

mo

lka1 ,

An

ja H

aase

1 , S

tep

han

R

utt

loff

1 , Jo

han

nes

Gö

tz1 ,

Pelin

Tö

ren

1 , M

ark

us

Ru

mp

ler2

, Barb

ara

Sta

dlo

ber1 ,

Jan H

ess

e1 , S

asc

ha

Geid

el2

, Jö

rg N

est

ler2

, In

go

Kat

zmay

r3, M

ax

So

nn

leit

ner3

, Su

hit

H

em

anth

4, J

an K

afka

4, I

sbaal R

am

os5

, M

irko

Lo

hse

6, M

an

uel T

hese

n6, G

eo

rgio

s K

okk

inis

7 , G

ünth

er

Kri

ech

ham

mer7 ,

Mart

in H

orn

8, W

ilfri

ed

Weig

el8

, Nere

a

Bri

z Ic

eta

9, G

ora

n B

ijelic

9

1 JO

AN

NE

UM

RE

SE

AR

CH

- M

AT

ER

IALS

Inst

i-tu

te,

Weiz

, A

ust

ria,

2JO

AN

NE

UM

RE

SE

AR

CH

-

HE

ALT

H I

nst

itute

, Gra

z, A

ust

ria, 3

Bifl

ow

Sys

-te

ms

Gm

bH

, Ch

em

nit

z, G

erm

any,

4G

EN

SP

EE

D

Bio

tech

G

mb

H,

Rai

nb

ach

, A

ust

ria,

5In

mo

ld

A/S

, H

ørs

ho

lm,

Den

mar

k,

6In

no

pro

t,

Deri

o,

Sp

ain

, 7 m

icro

re

sist

te

chn

olo

gy

Gm

bH

, B

er-

lin, G

erm

any,

8P

ess

l In

stru

ments

Gm

bH

, W

eiz

, A

ust

ria,

9S

cien

ion A

G,

Berl

in,

Germ

any,

10Te

c-nal

ia R

ese

arch

an

d I

nn

ova

tio

n, D

on

ost

ia -

San

S

eb

asti

an, S

pai

n

19:3

0-2

2:0

0G

AL

A D

INN

ER

Inclu

din

g b

est

po

ste

r aw

ard

s, m

icro

gra

ph

co

nte

st a

ward

s an

d le

ctu

re/p

erf

orm

an

ce o

n a

rt a

nd

nan

ote

ch

no

log

y “

-Sk

y a

m: M

yth

olo

gie

s &

meth

od

olo

gie

s o

f a

nan

oart

ist”

by P

rof. I

oan

nis

Mic

halo

ud

is

44

Sci

entifi

c P

rog

ram

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

JU

PIT

ER

HA

LL

Ch

air

s: G

. G

rütz

ne

r, D

. K

ern

08

:45

-09

:30

P

len

ary

7M

NE

Fe

llo

w A

wa

rd &

Le

ctu

reM

ore

th

an

na

me

pri

nt-

rep

lic

ati

on

an

d c

om

bin

ati

on

H

ella

-Ch

rist

in S

ch

ee

r U

niv

ers

ity o

f W

up

pert

al,

Germ

any

09

:30

-10

:00

Y

ou

ng

In

ve

stig

ato

r A

wa

rd

Ch

ips

an

d g

ad

ge

ts f

or

min

iatu

riz

ed

ass

ay

s Y

ukse

l Te

miz

Ib

m R

ese

arc

h, Z

uri

ch

, Sw

itze

rlan

d

10:0

0-1

0:1

5A

wa

rd C

ere

mo

ny

10:1

5-1

0:4

5C

OF

FE

E B

RE

AK

45

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

7:

ELECTRO

N A

ND IO

N B

EAM

LIT

HO

GR

APH

YC

hair

s: S

. C

ab

rin

i, A

. O

lzie

rsky

SESSIO

N B

7:

NANO

STRUCTURES F

OR

PH

OTO

NIC

SC

hair

s: M

. M

uh

lbe

rge

r, S

. D

hu

ey

SESSIO

N C

7:

MATERIA

LS &

DEVIC

ES F

OR

N

AN

OELEC

TRO

NIC

SC

hair

s: Z

. D

urr

an

i, D

. Tso

ukala

s

SESSIO

N D

7:

MIC

RO

& N

AN

O F

LUID

ICS

Ch

air

s: P

. P

etr

ou

, L

. M

ala

qu

in

10:4

5A

7-1

A

sin

gle

in

teg

rate

d

fib

ero

ptr

od

e

for

op

tog

en

eti

c st

imu

lati

on

a

nd

e

lec

tric

al

reco

rdin

g o

f n

eu

ral

ac-

tiv

ity

Barb

ara

Sp

ag

no

lo1 ,

Le

on

ard

o S

ileo

1 , R

ui P

eix

oto

2, M

arc

o P

isan

ello

1 , F

ilip

po

P

isan

o1 ,

Em

an

ue

la M

ag

lie1,

3, B

ern

ard

o

L. S

ab

ati

ni2

, Mass

imo

De V

itto

rio

1,3,

Fe

rru

ccio

Pis

an

ello

1

1 Isti

tuto

It

alia

no

d

i Te

con

olo

gia

, C

en

ter

for

Bio

mo

lecu

lar

Nan

ote

chn

olo

gie

s,

Arn

esa

no

, Le

cce

, It

aly

, 2D

ep

art

men

t o

f N

eu

rob

iolo

gy,

H

ow

ard

H

ug

hes

Me

dic

al

Inst

itu

te,

Harv

ard

M

ed

ical

Sch

oo

l, U

.S.A

., U

nit

ed

Sta

tes,

3U

ni-

vers

ità

del S

ale

nto

, Dip

art

imen

to d

i In

geg

ne

-ri

a d

ell’

Inn

ova

zio

ne

, Ita

ly, I

taly

B7

-1F

ab

ric

ati

on

o

f V

ivid

, W

ide

A

rea

T

ran

smis

sio

n H

olo

gra

ms

in P

last

ic

Su

bst

rate

s u

sin

g N

an

oim

pri

nt

Li-

tho

gra

ph

yK

eit

h M

ort

on

, Liv

iu C

lime

, Gaéta

n

Ve

ille

ux, L

uke

Lu

kic

, Matt

hew

Sh

iu,

Te

od

or

Ve

res

Nat

ion

al R

ese

arc

h C

ou

nci

l Can

ad

a, M

on

treal,

Can

ad

a

C7

-1_

INV

Me

rgin

g C

om

pu

tin

g a

nd

Se

nsi

ng

fo

r L

ow

p

ow

er

an

d

Su

sta

ina

ble

E

dg

e A

pp

lic

ati

on

sT

ho

mas

Ern

st

CE

A-L

ET

I, G

ren

ob

le, F

ran

ce

D7

-13

D c

oa

xia

l li

qu

id i

nje

cti

on

an

d e

x-tr

ac

tio

n s

yst

em

by

2-p

ho

ton

-po

-ly

me

riza

tio

nP

ee

r E

rfle

1,2, A

nd

reas

Die

tze

l1,2

1 Te

chn

isch

e

Un

ivers

ität

C

aro

lo-w

ilhelm

ina

Zu

B

rau

nsc

hw

eig

, B

rau

nsc

hw

eig

, G

erm

an

y,

2Te

chn

isch

e U

niv

ers

ität

Bra

un

sch

weig

, C

en

-te

r o

f P

harm

ace

uti

cal E

ng

ine

eri

ng

, Bra

un

sch

-w

eig

38

106

, Germ

an

y

11:0

0A

7-2

Cs

an

d R

b I

on

Co

ldb

ea

m S

uit

ab

ili-

ty f

or

Cir

cuit

Ed

itY

uval G

ree

nzw

eig

1 , R

ich

ard

L

ive

ng

oo

d2, R

oy H

alls

tein

2, Y

ari

v

Dre

zne

r1 , M

inh

Ly

2, S

hid

a T

an

2, A

mir

R

ave

h1

1 Inte

l Is

rael,

Haif

a,

Isra

el,

2In

tel

Co

rpo

rati

on

, S

an

ta C

lara

, US

A

B7

-2F

ab

ric

ati

on

of

Go

ld o

n g

lass

ph

o-

ton

ic n

an

ost

ruc

ture

s.R

ich

ard

B. C

ou

sin

s1 , S

hakila

Nazn

in2,

Ham

ed

Peze

shki2

, Matt

Cla

rk2,

Ch

rist

op

he

r M

ello

r3

1 nm

RC

, 2E

lect

rica

l an

d e

lect

ron

ic e

ng

ineri

ng

, 3P

hsy

ics

an

d A

stro

no

my

D7

-2F

ab

ric

ati

on

of

a µ

-flu

idic

de

vic

e b

y

two

-ph

oto

n

lith

og

rap

hy

u

sin

g

a

po

siti

ve

to

ne

re

sist

Gijs

Van

De

r V

eld

en

, Dan

iel F

an

, Urs

S

tau

fer

Delf

t U

niv

ers

ity

Of

Tech

no

log

y, D

elf

t, N

eth

-erl

an

ds

46

Sci

entifi

c P

rog

ram

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

11:1

5A

7-3

Th

e

Ma

rria

ge

o

f th

e

Ion

s a

nd

C

he

mis

try

to

Fu

lfill

Se

mic

on

du

c-to

r d

ev

ice

s P

rep

ara

tio

nG

reg

ory

Go

up

il1 , P

asc

al G

ou

net2

, C

hri

stia

n H

olle

rth

3, F

ran

k A

ltm

an

n4,

Se

bast

ian

Bra

nd

4, A

nn

e D

elo

bb

e1

1 Ors

ay P

hys

ics,

Fu

veau

, F

ran

ce,

2S

T M

icro

-ele

ctro

nic

s,

Gre

no

ble

, F

ran

ce,

3In

fin

eo

n

Tech

no

log

ies,

Neu

bib

erg

, G

erm

an

y, 4

Fra

un

-h

ofe

r IM

WS

, Halle

, Germ

an

y

B7

-3_

INV

Bio

mim

eti

cs

of

ph

oto

syn

the

tic

ph

oto

nic

str

uc

ture

s. H

ow

na

tura

l li

gh

t h

arv

est

ing

co

uld

be

com

e a

n

insp

ira

tio

n f

or

na

no

tech

no

log

y

Mart

in L

op

ez

Inte

rnat

ion

al

Iberi

an

Nan

ote

chn

olo

gy

Lab

o-

rato

ry-I

NL

, Po

rtu

gal

C7

-2V

ert

ica

l fi

eld

-eff

ec

t tr

an

sist

ors

b

ase

d

on

3

D

Ga

N

na

no

stru

ctu

re

arr

ay

sK

laas

Str

em

pe

l1,2, F

en

g Y

u1,

2, H

en

dri

k

Sp

en

de

1,2, J

an

a H

art

man

n1,

2, F

rie

dh

ard

R

öm

er3

, Be

rnd

Wit

zig

man

n3, A

nd

rey

Bakin

1,2, H

erg

o-H

ein

rich

We

hm

an

n1,

2,

Hu

tom

o S

ury

o W

asi

sto

1,2, A

nd

reas

Waag

1,2

1 Inst

itu

te

Of

Sem

ico

nd

uct

or

Tech

no

log

y (I

HT

), T

U B

rau

nsc

hw

eig

, Bra

un

sch

weig

, Ger -

man

y, 2

Lab

ora

tory

of

Em

erg

ing

Nan

om

etr

ol-

og

y (L

EN

A),

T

U

Bra

un

sch

weig

, B

rau

nsc

h-

weig

, G

erm

an

y,

3C

om

pu

tati

on

al

Ele

ctro

nic

s an

d P

ho

ton

ics

(CE

P),

Kass

el

Un

ivers

ity,

Kas -

sel,

Germ

an

y

D7

-3A

P

reci

se,

Lo

w-P

ow

er,

E

lec

tro

ki-

ne

tic

all

y A

ctu

ate

d M

icro

pu

mp

ing

M

ech

an

ism

Ale

xan

de

r E

de

n, F

arn

az

Lo

rest

an

i, S

ean

MacK

en

zie

, Ste

ph

en

Min

ne

, D

avid

Hu

be

r, C

arl

Me

inh

art

, Su

mit

a

Pe

nn

ath

ur

Un

ivers

ity

of

Calif

orn

ia, S

an

ta B

arb

ara

, San

ta

Barb

ara

, Un

ite

d S

tate

s

11:3

0A

7-4

Exc

ita

tio

n

po

we

r d

en

sity

d

ep

en

-d

en

ce o

f p

ho

tocu

rre

nt

fro

m I

nG

aN

p

ho

toc

ath

od

eD

aik

i Sato

1,2, T

om

oh

iro

Nis

hit

an

i2,3,

Ats

ush

i Ko

izm

i2, Y

osh

io H

on

da

3, H

iro

shi

Am

an

o3

1 De

part

men

t o

f E

lect

ron

ics,

Nag

oya

Un

ive

rsi-

ty, N

ag

oya

, Ja

pan

, 2P

ho

to e

lect

ron

So

ul

Inc.,

Nag

oya

, Ja

pan

, 3C

en

ter

for

Inte

gra

ted

R

e-

searc

h o

f F

utu

re E

lect

ron

ics,

In

stit

ute

of

Ma-

teri

als

an

d S

yste

ms

for

Su

stain

ab

ility

, Nag

oya

U

niv

ers

ity,

Nag

oya

, Jap

an

C7

-3D

esi

gn

a

nd

si

mu

lati

on

o

f p

lan

ar

na

no

va

cuu

m c

ha

nn

el

tra

nsi

sto

rs

(pN

VC

T)

Marc

o T

urc

hett

i, P

hill

ip D

. Ke

ath

ley,

Y

ujia

Yan

g, A

lbe

rto

Nard

i, L

uca D

an

iel,

Karl

K. B

erg

gre

nM

ass

ach

use

tts

Inst

itu

te o

f Te

chn

olo

gy,

Cam

-b

rid

ge

, Un

ite

d S

tate

s

D7

-4_

INV

De

sig

n

an

d

Fa

bri

ca

tio

n

of

Pla

s-ti

c N

an

ofl

uid

ic D

ev

ice

s fo

r S

ing

le

Mo

lecu

le D

ete

cti

on

Su

ng

go

ok P

ark

Lo

uis

ian

a S

tate

Un

ivers

ity,

US

A

11:4

5A

7-5

Na

no

fab

ric

ati

on

a

nd

im

ag

ing

ch

ara

cte

riza

tio

n o

f 3

0 n

m r

eso

lu-

tio

n c

ha

rts

wit

h v

ert

ica

l sid

ew

all

sJin

gy

uan

Zh

u1 ,

Sic

hao

Zh

an

g1 ,

Sh

an

shan

Xie

1 , Y

ifan

g C

he

n1 ,

Bia

o

De

ng

2, L

ijuan

Zh

an

g2

1 Nan

olit

ho

gra

ph

y an

d A

pp

licat

ion

Rese

arc

h

Gro

up

, S

tate

key

lab

of

AS

IC a

nd

, S

han

gh

ai,

Ch

ina

, 2S

han

gh

ai

Syn

chro

tro

n R

ad

iati

on

Fa-

cilit

y, S

han

gh

ai

Inst

itu

te o

f A

pp

lied

Ph

ysic

s,

Sh

an

gh

ai,

Ch

ina

B7

-4M

on

ola

ye

r g

rap

he

ne

dir

ec

t tr

an

s-fe

r o

n s

ilic

on

fo

r S

cho

ttk

y p

ho

to-

dio

de

fa

bri

ca

tio

nY

imin

g W

an

g1,

2, A

lbe

rto

Balle

sio

2,

Matt

eo

Parm

eg

gia

ni2

,3, A

less

io V

ern

a2,

Matt

eo

Co

cu

zza

2,4, C

an

did

o F

ab

rizi

o

Pir

ri2

,3, S

imo

ne L

uig

i Mara

sso

2,4,

Sh

um

ing

Yan

g1

1 Sta

te K

ey

Lab

ora

tory

fo

r M

an

ufa

ctu

rin

g S

ys-

tem

En

gin

eeri

ng

, X

i’an

Jia

oto

ng

Un

ivers

ity,

2C

hila

b -

Mat

eri

als

an

d M

icro

syst

em

s L

ab

o-

rato

ry,

DIS

AT,

Po

lite

cnic

o d

i To

rin

o,

3C

en

ter

for

Su

stain

ab

le F

utu

re T

ech

no

log

ies,

Ita

lian

In

stit

ute

of

Tech

no

log

y, 4

CN

R-I

ME

M

C7

-4In

teg

rati

on

o

f 2

D

Mo

S2

w

ith

In

-A

lAs/

InG

aA

s h

ete

roju

nc

tio

n

for

du

al c

olo

r d

ete

cti

on

in b

oth

vis

ible

a

nd

ne

ar-

infr

are

d b

an

dJia

nan

De

ng

, Min

gsa

i Zh

u, Y

uyin

g X

ie,

Lin

gyi Z

on

g, W

en

zho

ng

Bao

, Yif

an

g

Ch

en

Fu

dan

Un

ivers

ity,

Sh

an

gh

ai,

Ch

ina

47

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

12:0

0-1

3:0

0L

UN

CH

BR

EA

K

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

8:

INDUSTRIA

L I

Ch

air

s: I

. R

ap

tis,

M. C

hatz

ich

rist

idi

SESSIO

N B

8:

WETTIN

G III

Ch

air

s: K

. E

llin

as,

A. A

mir

fasl

i

SESSIO

N C

8:

MATERIA

LS F

OR

N

AN

OELEC

TRO

NIC

S II

Ch

air

s: A

. B

usn

ain

a, D

. Tso

ukala

s

SESSIO

N D

8:

DEVIC

ES F

OR D

NA S

TUD

IES

Ch

air

s: G

. K

alt

sas

13:0

0A

8-1

_IN

VT

he

p

ath

to

R

oll

to

R

oll

Im

pri

nt

Te

chn

olo

gy

, a

n E

na

bli

ng

Te

chn

ol-

og

yJo

hn

Malt

ab

es

Ap

plie

d M

ateri

als

, Germ

an

y

B8

-1A

sc

ala

ble

pro

cess

fo

r m

an

ufa

ctu

r-in

g h

iera

rch

ica

l su

pe

rhy

dro

ph

ob

ic

stru

ctu

res

on

alu

min

ium

: p

rom

o-

tio

n o

f st

ab

le d

rop

wis

e c

on

de

nsa

-ti

on

fo

r tr

op

ica

l air

co

nd

itio

nin

gK

rist

yn

Kad

ala

, So

och

an

Ch

un

g,

Hay

de

n T

aylo

rU

C B

erk

ele

y, B

ER

KE

LE

Y, U

nit

ed

Sta

tes

C8

-1S

uit

ab

ilit

y o

f H

SQ

as

fab

ric

ati

on

m

ate

ria

l fo

r v

ert

ica

l d

ev

ice

s a

t n

a-

no

-sc

ale

Est

eve A

mat1 ,

Alb

ert

o d

el M

ora

l1 , H

an

s-Jü

rge

n E

ng

elm

an

n2, A

hm

ed

G

harb

i3, G

uid

o R

ad

em

ake

r3, M

ari

e-L

ine

Po

rte

au

3, R

alu

ca T

iro

n3, J

oan

Bau

sells

1 , F

ran

ce

sc P

ere

z-M

ura

no

1

1 Inst

itu

te

of

Mic

roele

ctro

nic

s o

f B

arc

elo

-n

a,

Bella

terr

a,

Sp

ain

, 2H

elm

ho

ltz-

Zen

tru

m

Dre

sden

-Ro

ssen

do

rf,

Dre

sden

, G

erm

an

y,

3C

EA

-LE

TI,

Gre

no

ble

, Fra

nce

D8

-1U

ltra

fast

P

ha

ge

-Lo

ng

D

NA

S

ize

P

rofi

lin

g

Usi

ng

O

pto

na

no

flu

idic

D

ev

ice

Ch

ia F

u C

ho

u1 ,

Jia

We

i Ye

h1 ,

Yii

Lih

L

in1,

2, K

. K. S

rira

m1,

2

1 Inst

itu

te o

f P

hys

ics,

Aca

dem

ia S

inic

a, Ta

ipei,

Taiw

an

, 2C

hem

ical B

iolo

gy

Div

isio

n, C

halm

ers

U

niv

ers

ity

of

Tech

no

log

y, G

oth

en

bu

rg,

Sw

e-

den

13:1

5B

8-2

Su

pe

rhy

dro

ph

ob

ic a

nd

su

pe

role

o-

ph

ob

ic

pro

pe

rtie

s e

nh

an

cem

en

t o

n

PD

MS

m

icro

stru

ctu

re

usi

ng

si

mp

le fl

am

e t

rea

tme

nt

me

tho

d

Nit

hi A

tth

i1 , Tan

aw

at

Jan

sen

g2, A

pid

ech

M

an

ee

son

g2, N

att

hap

ol K

on

gto

2,

Wit

saro

ot

Sri

pu

mkh

ai1 ,

Patt

ara

luck

Patt

am

an

g1 ,

Ora

ph

an

Th

on

gso

ok

1 , S

ara

nya S

un

tale

lat1 ,

Jir

aw

at

Jan

taw

on

g1 ,

Ap

ich

art

Ro

dch

an

aro

wan

2,

Nip

ap

an

Klu

nn

gie

n1 ,

Wu

tth

inan

Je

am

saksi

ri1

1 Th

ai

Mic

roele

ctro

nic

s C

en

ter

(TM

EC

),

Na-

tio

nal

Ele

ctro

nic

s an

d C

om

pu

ter

Tech

no

log

y C

en

ter

(NE

CT

EC

), C

hach

oen

gsa

o,

Th

aila

nd

, 2D

ep

art

men

t o

f M

ateri

als

En

gin

eeri

ng

, Facu

l-ty

of

En

gin

eeri

ng

, Kase

tsart

Un

ivers

ity,

Ban

g-

kok, T

haila

nd

C8

-2M

em

rist

ive

be

ha

vio

ur

of

ele

ctr

o-

de

po

site

d t

he

rmo

ele

ctr

ic m

ate

ri-

als

Ian

Mih

ailo

vic

, Katr

ina K

löse

l, C

hri

sto

fer

Hie

rold

Mic

ro a

nd

Nan

osy

stem

s, E

TH

Zü

rich

, Z

üri

ch,

Sw

itze

rlan

d

D8

-2N

an

om

ech

an

ica

l D

NA

re

son

a-

tor

for

DN

A s

tru

ctu

ral

alt

era

tio

ns

stu

die

sM

on

ica M

ari

ni1,

2, S

tefa

no

Sta

ssi1 ,

Marc

o

Alli

on

e2, S

erg

ei L

op

ati

n3, D

om

en

ico

M

ars

on

4, E

rik L

au

rin

i4, S

ab

rin

a P

ricl4

, B

run

o T

orr

e2, A

nd

rea G

iug

ni2

, Man

ola

M

ore

tti2

, Pe

ng

Zh

an

g2, C

an

did

o

Fab

rizi

o P

irri

1 , C

arl

o R

iccia

rdi1 ,

En

zo D

i F

ab

rizi

o2

1 DIS

AT,

P

oly

tech

nic

o

f Tu

rin

, Tu

rin

, It

aly

, 2S

MIL

Es

Lab

, K

AU

ST,

T

hu

wal,

Kin

gd

om

o

f S

au

di

Ara

bia

, 3Im

ag

ing

an

d C

hara

cteri

zati

on

C

ore

Lab

, KA

US

T, T

hu

wal,

Kin

gd

om

of

Sau

di

Ara

bia

, 4D

EA

, U

niv

ers

ity

of

Trie

ste

, Tr

iest

e,

Italy

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

48

Sci

entifi

c P

rog

ram

13:3

0A

8-2

Fle

xp

ol:

De

ve

lop

ing

a b

ac

teri

cid

e

ad

he

siv

e fi

lmN

iko

s K

eh

ag

ias

Cat

ala

n I

nst

itu

te O

f N

an

osc

ien

ce A

nd

Nan

o-

tech

no

log

y, B

ella

terr

a, B

arc

elo

na

, Sp

ain

B8

-3D

esi

gn

, fa

bri

ca

tio

n a

nd

ch

ara

cte

r-is

ati

on

st

rate

gie

s fo

r la

rge

a

rea

b

ac

teri

cid

al p

oly

me

r fi

lms

Fra

nco

ne A

.1 , R

eto

laza A

.2, R

am

iro

J.2

, M

eri

no

S.2

, Vie

ira D

e C

ast

ro J

.3, N

eve

s N

.3, A

ran

a A

.4, M

ari

mo

n J

.4, S

oto

may

or

To

rre

s C

.1,5, K

eh

ag

ias

N.1

1 ICN

2 -

Cat

ala

n I

nst

itu

te o

f N

an

osc

ien

ce a

nd

N

an

ote

chn

olo

gy,

2IK

4-T

ekn

iker, 3

Rese

arc

h In

-st

itu

te o

f B

iom

ate

rials

, B

iod

eg

rad

ab

les

an

d

Bio

mim

eti

cs,

4U

niv

ers

ity

Ho

spit

al-

Bio

do

no

s-ti

a H

ealt

h R

ese

arc

h In

stit

ute

, 5In

stit

uci

o C

ata-

lan

a d

e R

ece

rca

i E

stu

dis

Ava

nca

ts (

ICR

EA

),

Sp

ain

C8

-3E

lec

tro

sta

tic

all

y-c

ou

ple

d

do

pa

nt

ato

m q

ua

ntu

m d

ot

tra

nsi

sto

r m

ea

-su

rem

en

t a

t ro

om

-te

mp

era

ture

Fari

s A

bu

aln

aja

1 , C

he

n W

an

g1 ,

Vla

d-

Petr

u V

eig

an

g-R

ad

ule

scu

1 , Jo

nath

an

G

riffi

ths2

, Ale

kse

y A

nd

reev3

, Me

rvyn

Jo

ne

s1 , Z

ah

id D

urr

an

i1

1 Imp

eri

al

Co

lleg

e

Lo

nd

on

, Lo

nd

on

, U

nit

ed

K

ing

do

m,

2U

niv

ers

ity

of

Cam

bri

dg

e,

Cam

-b

rid

ge

, Un

ite

d K

ing

do

m, 3

Hit

ach

i Cam

bri

dg

e,

Cam

bri

dg

e, U

nit

ed

Kin

gd

om

D8

-3C

on

tro

llin

g

DN

A

tra

nsl

oc

ati

on

in

n

an

ofl

uid

ic d

ev

ice

s u

sin

g t

op

og

-ra

ph

yF

ran

zisk

a E

sme

k, I

ren

e F

ern

an

dez-

Cu

est

aH

am

bu

rg U

niv

ers

ity,

Ham

bu

rg, G

erm

an

y

13:4

5A

8-3

Fu

ll-S

ca

le

Ma

nu

fac

turi

ng

o

f 2

00

mm

/30

0m

m W

afe

rs o

n a

Fu

lly

In

teg

rate

d N

an

oim

pri

nt

Lit

ho

gra

-p

hy

Sy

ste

m

Wie

sbau

er

H.1 ,

Ch

ou

iki M

.1 , T

han

ne

r C

.1 , B

erg

er

G.1 ,

Mart

en

s S

.2, T

reib

lmay

r D

.1 , H

art

bau

m J

.2, E

ibe

lhu

be

r M

.1

1 EV

Gro

up

, 2In

situ

t fü

r M

ikro

ele

ktr

on

ik S

tutt

-g

art

(IM

S C

HIP

S),

Germ

an

y

C8

-4S

pu

tte

red

Zn

O n

an

ost

ruc

ture

ho

-m

oju

nc

tio

ns

fab

ric

ate

d

on

ro

om

te

mp

era

ture

p

re-p

att

ern

ed

su

b-

stra

tes

De

lige

org

is G

.1 , K

am

pyla

fka V

.2,

Ko

sto

po

ulo

s A

.3, M

od

rean

u M

.4,

Sch

mid

t M

.5, G

ag

ao

ud

akis

E.6

, Tsa

gara

ki K

.7 , K

on

tom

itro

u V

.8,

Ko

nst

an

tin

idis

G.9

, Kir

iakid

is G

.10,

Ap

era

thit

is E

.11

1 Fo

rth

/iesl

, 2F

OR

TH

/IE

SL

, 3F

OR

TH

/IE

SL

, 4Ty

nd

all

Nat

ion

al

Inst

itu

te,

5Ty

nd

all

nat

ion

-al

Inst

itu

te,

Icela

nd

6F

OR

TH

/IE

SL

, 7F

OR

TH

/IE

SL

, 8F

OR

TH

/IE

SL

, 9F

OR

TH

/IE

SL

, 10F

OR

TH

/IE

SL

, 11F

OR

TH

/IE

SL

, Gre

ece

14:0

0-1

4:1

5C

OF

FE

E B

RE

AK

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

49

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

9:

INDUSTRIA

L II

Ch

air

s: T

. S

tom

eo

, Y

. G

eo

rgie

v

SESSIO

N B

9:

NAN

OFABRIC

ATIO

NC

hair

s: N

. V

ain

os,

JH

Oh

SESSIO

N C

9:

MATERIA

LS F

OR P

HO

TO

NIC

SC

hair

s: S

. M

eri

no

, M

. L

op

ez

SESSIO

N D

9:

LAB &

ORG

AN

ON

-CH

IPC

hair

s: K

. Tso

ug

en

i, S

. K

elle

r

14:1

5A

9-1

All

in

teg

rate

d

mix

&

m

atc

h

di-

rec

t-w

rite

na

no

- a

nd

mic

roli

tho

g-

rap

hy

pla

tfo

rm b

ase

d o

n lo

ca

l he

at

ind

uce

d s

ub

lim

ati

on

of

po

lyp

hth

a-

lald

eh

yd

e r

esi

stF

elix

Ho

lzn

er1 ,

Ach

im J

eh

le2, D

ieth

ard

P

ete

r2, S

am

ue

l Bis

ig1 ,

Sim

on

Bo

nan

ni1 ,

Ph

ilip

Pau

l2, U

rs D

ue

rig

1

1 Sw

issl

ith

o A

G,

Zu

rich

, S

wit

zerl

an

d,

2H

eid

el-

berg

In

stru

men

ts, H

eid

elb

erg

, Germ

an

y

B9

-1M

ate

ria

ls c

ha

rac

teri

zati

on

of

ga

s a

ssis

ted

etc

h a

nd

de

po

siti

on

of

fo-

cuse

d C

s+ i

on

be

am

Y

ari

v D

rezn

er1 ,

DY

uval G

ree

nzw

eig

1 , R

oy H

alls

tein

2, R

ick L

ive

ng

oo

d2,

Am

ir R

ave

h1 ,

Ad

am

Ste

ele

3, B

ren

ton

K

nu

ffm

an

3, A

nd

rew

Sch

warz

kop

f3

1 Inte

l Is

rael,

Haif

a,

Isra

el,

2In

tel

Co

rpo

rati

on

, S

an

ta C

lara

, Un

ite

d S

tate

s, 3

zero

K N

an

ote

ch,

Gait

hers

bu

rg, U

nit

ed

Sta

tes

C9

-1T

un

ing

F

luo

rop

ho

res

Co

nce

ntr

a-

tio

n a

nd

Th

eir

Re

sid

en

ce T

ime

in

Z

ero

-Mo

de

Wa

ve

gu

ide

sA

nd

rea B

arb

ag

lia1,

2, M

ich

ele

Dip

alo

1 , F

ran

ce

sco

Tan

tuss

i1 , A

nd

rea T

om

a1 , F

ran

ce

sco

De A

ng

elis

1

1 Isti

tuto

Ita

lian

o d

i Te

cno

log

ia,

Gen

ova

, It

aly

, 2D

ipart

imen

to d

i Fis

ica

, Un

ivers

ità

deg

li S

tud

i d

i Gen

ova

, Gen

ova

, Ita

ly

D9

-1L

en

sle

ss

ima

gin

g

stra

teg

ies

for

mic

ro-p

art

icle

s a

nd

ba

cte

ria

l co

lo-

nie

s co

un

tin

gA

lexis

Mair

e1,

3, T

on

a Y

esc

as

Go

nzale

z1 , O

livie

r L

ecarm

e2, M

arc

Ze

lsm

an

n1 ,

Em

man

ue

l Pic

ard

3, P

ierr

e M

arc

ou

x4,

David

Peyra

de

1

1 Un

iv.

Gre

no

ble

A

lpes,

C

NR

S,

LTM

, G

ren

o-

ble

, F

ran

ce,

2S

mart

Fo

rce T

ech

no

log

ies,

c/o

LT

M-C

NR

S

CE

A/L

ET

I, G

ren

ob

le,

Fra

nce

, 3U

niv

. Gre

no

ble

Alp

es,

CE

A, I

NA

C, P

HE

LIQ

S,

SIN

AP

S,

Gre

no

ble

, F

ran

ce,

4U

niv

. G

ren

ob

le

Alp

es,

CE

A, L

ET

I, D

TB

S, S

BS

C, LC

MI/

LB

AM

, G

ren

ob

le, F

ran

ce

14:3

0A

9-2

Ad

va

nce

d

FIB

P

att

ern

ing

S

tra

te-

gie

s fo

r P

ho

ton

ic D

ev

ice

sA

ch

im N

ad

zeyka

, To

rste

n R

ich

ter,

Mic

hae

l Kah

l, F

ran

k N

ou

ve

rtn

éR

ait

h G

mb

h, D

ort

mu

nd

, Germ

an

y

B9

-2L

ith

ium

-Do

pin

g o

f Z

nO

: is

it p

oss

i-b

le t

o c

he

mic

all

y p

rod

uce

p-t

yp

e

Zn

O?

Ge

org

e P

. Pap

ag

erg

iou

1 , V

ass

ileio

s P

sych

ari

s1 , M

ari

a K

ats

ikin

i2, F

an

i P

inakid

ou

2, E

len

i Palo

ura

2, E

len

i M

akaro

na1

1 Inst

itu

te

Of

Nan

osc

ien

ce

an

d

Nan

ote

ch-

no

log

y, N

CS

R D

em

okr

ito

s, A

then

s, G

ree

ce,

2S

cho

ol

of

Ph

ysic

s,

Ari

sto

tle

Un

ivers

ity

of

Th

ess

alo

nik

i, T

hess

alo

nik

i, G

ree

ce

C9

-2V

ery

Hig

h R

efr

ac

tiv

e I

nd

ex

Tra

nsi

-ti

on

Me

tal D

ich

alc

og

en

ide

Ph

oto

n-

ic C

on

form

al

Co

ati

ng

s b

y C

on

ve

r-si

on

of

AL

D M

eta

l Ox

ide

sA

dam

Sch

wart

zbe

rg, C

hri

sto

ph

er

Ch

en

, Jaco

po

Pe

dri

ni,

Ash

ley G

au

ldin

g,

Ch

rist

op

h K

ast

l, S

co

tt D

hu

ey,

Tev

ye

Ku

yke

nd

all,

Giu

sep

pe C

ala

fio

re,

Fra

nce

sca T

om

a, S

tefa

no

Cab

rin

i, S

hau

l Alo

ni

Th

e M

ole

cula

r F

ou

nd

ry,

Law

ren

ce B

erk

ele

y N

atio

nal L

ab

s, B

erk

ele

y, U

nit

ed

Sta

tes

D9

-2O

n c

hip

re

con

stit

uti

on

of

com

ple

x

bio

log

ica

l sy

ste

ms:

a

b

rid

ge

b

e-

twe

en

bio

log

y a

nd

ma

the

ma

tic

al

mo

de

lsA

de

le D

e N

inn

o1 ,

Fra

nce

sca R

om

an

a

Be

rtan

i1 , A

nn

am

ari

a G

era

rdin

o1 ,

Ro

be

rto

Nata

lini4

, Elis

han

C. B

rau

n4,

Gab

rie

lla B

rett

i4, G

iovan

na S

ch

iavo

ni2

, F

ab

rizi

o M

att

ei2

, Eu

ge

nio

Mart

ine

lli3,

Ari

an

na M

en

catt

ini3

, Lu

ca B

usi

naro

1

1 CN

R

- In

stit

ute

O

f P

ho

ton

ics

An

d

Nan

o-

tech

no

log

ies,

2Is

titu

to

Su

peri

ore

d

i sa

nit

à,

3U

niv

ers

ità

di

Tor

Verg

ata

, D

ep

art

men

t o

f E

lect

ron

ic E

ng

ine

eri

ng

, 4C

NR

-Ist

itu

to p

er

le

Ap

plic

azio

ni d

el C

alc

olo

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

50

Sci

entifi

c P

rog

ram

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

14:4

5A

9-3

Ne

w h

igh

etc

h r

esi

sta

nt

hig

h r

eso

-lu

tio

n s

ilse

squ

iox

an

e b

ase

d r

esi

st

for

DU

V/E

UV

an

d e

-be

am

lit

ho

g-

rap

hy

as

lon

g s

he

lf-l

ife

an

d m

ore

se

nsi

tiv

e a

lte

rna

tiv

e f

or

HS

QF

ran

zisk

a G

rün

eb

erg

er1 ,

Maik

G

ern

gro

ß1 ,

Matt

hia

s S

ch

irm

er1 ,

Fra

nk

Heyro

th2, G

eo

rg S

ch

mid

t2,3, N

ico

las

Pyka

4, L

oth

ar

Hah

n5

1 Allr

esi

st

Gm

bH

, S

trau

sberg

, G

erm

an

y,

2In

-st

itu

t fü

r P

hys

ik,

Mart

in-L

uth

er-

Un

ivers

ität

H

alle

-Wit

ten

berg

, H

alle

(S

aale

),

Germ

an

y,

3In

terd

iszi

plin

äre

s Z

en

tru

m

für

Mat

eri

alw

is-

sen

sch

afte

n,

Mart

in-L

uth

er-

Un

ivers

ität

H

al-

le-W

itte

nb

erg

, Halle

, G

erm

an

y, 4

Rait

h G

mb

H,

Do

rtm

un

d,

Germ

an

y,

5In

stit

ute

o

f M

icro

-st

ruct

ure

, K

arl

sru

he I

nst

itu

te o

f Te

chn

olo

gy,

E

gg

en

stein

-Le

op

old

shaf

en

, Germ

an

y

B9

-3D

ev

elo

pm

en

t o

f v

an

d

er

Wa

als

fo

rce

b

ase

d

mic

rosc

ale

jo

int

for

mic

rosc

ale

ass

em

bly

Ki-

hw

an

Jan

g1 ,

Min

-So

o K

im2, J

on

g

Hy

uk I

m1 ,

Su

ng

-Ho

on

Ah

n1,

3

1 De

part

men

t o

f M

ech

an

ical

an

d A

ero

space

E

ng

ine

eri

ng

, Se

ou

l Nat

ion

al U

niv

ers

ity,

Se

ou

l, S

ou

th K

ore

a, 2

So

ft R

ob

oti

cs

Rese

arc

h C

en

ter,

Se

ou

l Nat

ion

al U

niv

ers

ity,

Se

ou

l, S

ou

th K

ore

a,

3In

stit

ute

of

Ad

van

ced

Mach

ines

an

d D

esi

gn

, S

eo

ul N

atio

nal U

niv

ers

ity,

Se

ou

l, S

ou

th K

ore

a

C9

-3F

ab

ric

ati

on

an

d n

ov

el a

pp

lic

ati

on

s o

f G

aN

-ba

sed

mic

roL

ED

arr

ay

sJan

Gü

link

1,2, M

ich

ae

l Fah

rbach

1,2,

He

nd

rik S

pe

nd

e1,

2, K

laas

Str

em

pe

l1,2,

To

ny G

ran

z1,2, S

ye

d A

sad

Ali

Zaid

i1 , H

uto

mo

Su

ryo

Wasi

sto

1,2, A

nd

reas

Waag

1,2

1 Inst

itu

te

of

Sem

ico

nd

uct

or

Tech

no

log

y (I

HT

), T

U B

rau

nsc

hw

eig

, Bra

un

sch

weig

, Ger -

man

y,

2L

ab

ora

tory

fo

r E

merg

ing

N

an

om

e-

tro

log

y (L

EN

A),

TU

Bra

un

sch

weig

, Bra

un

sch

-w

eig

, Germ

an

y

D9

-33

D s

tru

ctu

rati

on

of

po

rou

s P

DM

S

by

e

mu

lsio

n

tem

pla

tin

g

for

the

fa

bri

ca

tio

n o

f ce

ll c

ult

ure

sc

aff

old

sR

ob

ert

o R

iesc

o1,

2, L

ou

isa B

oye

r1 , S

ara

h

Blo

sse

1,2, P

au

line L

efe

bvre

3, P

au

line

Ass

em

at3

, Th

ierr

y L

eic

hle

1 , A

ng

elo

A

ccard

o1 ,

Lau

ren

t M

ala

qu

in1

1 LA

AS

-CN

RS

, To

ulo

use

, F

ran

ce,

2IN

SA

, To

u-

lou

se, F

ran

ce, 3

IMF

T, T

ou

lou

se, F

ran

ce

15:0

0A

9-4

Mu

ltis

ca

le P

osi

tio

n C

orr

ec

tio

n f

or

Au

tom

ate

d

De

vic

e-s

ca

le

ST

M

Li-

tho

gra

ph

yJam

es

Ow

en

, Jo

sep

h L

ake

, Eh

ud

F

uch

s, R

ob

in S

an

tin

i, Jo

hn

Ran

dall

Zy

vex

Lab

s, R

ich

ard

son

, Un

ite

d S

tate

s

B9

-4E

lec

tric

all

y

con

tro

lle

d

mo

difi

ca

-ti

on

of

po

lym

er

film

str

uc

ture

of

sem

ico

nd

uc

tor

– in

sula

tor

com

-p

osi

tes

ca

ste

d b

y h

ori

zon

tal-

dip

-p

ing

Kam

il A

wsi

uk

1 , Jaku

b R

ysz

1 , M

ate

usz

M.

Marz

ec

2, P

aw

eł

Dąb

czyńs

ki1 ,

An

drz

ej

Bu

dko

wsk

i1

1 M.

Sm

olu

cho

wsk

i In

stit

ute

Of

Ph

ysic

s, J

ag

i-ello

nia

n U

niv

ers

ity,

Ł

oja

siew

icza

11

, 3

0-3

48

K

rakó

w,

Po

lan

d,

Kra

kow

, P

ola

nd

, 2A

cad

em

ic

Cen

tre

for

Mat

eri

als

an

d

Nan

ote

chn

olo

gy,

A

GH

Un

ivers

ity

of

Sci

en

ce a

nd

Te

chn

olo

gy,

K

rako

w, P

ola

nd

C9

-4M

ag

ne

tic

Dip

ole

R

eso

na

nce

In

-d

uce

d V

isib

le L

um

ine

sce

nce

fro

m

Hu

nd

red

N

an

om

ete

rs

of

Sil

ico

n

Pa

rtic

les

Sih

We

i Ch

an

g, Y

i-C

hu

an

Tse

ng

, Yan

g-

Ch

un

Le

e, H

sue

n-L

i Ch

en

Nat

ion

Taiw

an

Un

ivers

ity,

Taip

ei,

Taiw

an

15:1

5-1

5:3

0S

HO

RT

BR

EA

K

51

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

NE

FE

LI

HA

LL

DE

LP

HI

HA

LL

JU

PIT

ER

HA

LL

AT

HE

NA

HA

LL

SESSIO

N A

10:

RESIS

TS

Ch

air

s: T

. W

ata

nab

e, Y

. G

eo

rgie

v

SESSIO

N B

10:

MIC

RO

FABRIC

ATIO

NC

hair

: N

. K

eh

ag

ias,

V. V

am

vakas

SESSIO

N C

10:

SEN

SO

RS &

MEM

SC

hair

s: H

. N

ish

ikaw

a, P.D

imit

rakis

SESSIO

N D

10:

CH

EM

. SEN

SO

RS &

BIO

SEN

SO

RS II

Ch

air

s: K

. M

isia

ko

s, P

. P

etr

ou

15:3

0A

10-1

Ne

w P

DM

AE

MA

ba

sed

blo

ck c

op

o-

lym

ers

fo

r e

me

rgin

g n

an

ote

chn

ol-

og

ies

An

ast

asi

a N

ika1,

2, T

he

od

ore

Man

ou

ras3

, P

an

ag

ioti

s A

rgit

is2, M

ari

a V

am

vakaki3

,4,

Marg

ari

ta C

hatz

ich

rist

idi1

1 Nat

ion

al A

nd

Kap

od

istr

ian

Un

iver

sity

Of

Ath

-en

s, 2

Inst

itu

te o

f N

ano

scie

nce

an

d N

ano

tech

-n

olo

gy,

N

CS

R

“Dem

okr

ito

s”,

3D

epar

tmen

t o

f M

ater

ials

S

cien

ce

and

Te

chn

olo

gy,

U

niv

ersi

ty

of

Cre

te,

4In

stit

ute

of

Ele

ctro

nic

Str

uct

ure

an

d

Las

er,

Fo

un

dat

ion

fo

r R

esea

rch

and

Tec

hn

olo

-g

y -

Hel

las

B10

-1M

an

ufa

ctu

rin

g

of

loc

al

de

fin

ed

n

an

o-

an

d

mic

rost

ruc

ture

s fo

r se

mic

on

du

cto

r d

ev

ice

s b

y d

ew

et-

tin

g p

he

no

me

na

Ow

en

Ern

st1 ,

Kath

ari

na E

yle

rs1 ,

Fe

lix

Lan

ge

1,2, J

örn

Bo

nse

3, J

örg

Krü

ge

r3,

To

rste

n B

oe

ck

1

1 Leib

niz

-In

stit

ut

für

Kri

stallz

üch

tun

g

(IK

Z),

B

erl

in,

Germ

an

y,

2B

ran

den

bu

rgis

che

Tech

-n

isch

e

Un

ivers

ität

C

ott

bu

s-S

en

ften

berg

(B

TU

C

S),

S

en

ften

berg

, G

erm

an

y,

3B

un

de

-sa

nst

alt

fü

r M

ateri

alf

ors

chu

ng

un

d -

prü

fun

g

(BA

M),

Berl

in, G

erm

an

y

C10

-1H

igh

ly s

en

siti

ve

an

d s

ele

cti

ve

NO

2

ga

s se

nso

r u

sin

g

pa

tte

rne

d

FT

O

ele

ctr

od

es

Yo

ojo

ng

Kim

1 , S

o-Y

ou

ng

Bak

1 , Je

on

gse

ok L

ee

1 , S

e-H

ye

on

g L

ee

1 , K

yo

un

gw

an

Wo

o1 ,

San

gh

yu

n L

ee

2,

Mo

on

suk Y

i1

1 De

part

men

t O

f E

lect

ron

ics

En

gin

eeri

ng

, P

u-

san

Nat

ion

al

Un

ivers

ity,

Geu

mju

ng

gu

, S

ou

th

Ko

rea

, 2D

ep

art

men

t o

f S

mart

Hyb

rid

En

gi-

ne

eri

ng

, P

usa

n

Nat

ion

al

Un

ivers

ity,

G

eu

m-

jun

gg

u, S

ou

th K

ore

a

D10

-1E

ng

ine

eri

ng

li

gh

t co

lle

cti

on

v

ol-

um

es

wit

h

mic

rost

ruc

ture

d

ta-

pe

red

o

pti

ca

l fi

be

rs

for

op

tic

al

rea

do

ut

of

ne

ura

l a

cti

vit

y

mo

ni-

tori

ng

Em

an

ue

la M

ag

lie1,

2, M

arc

o P

isan

ello

1 , F

ilip

po

Pis

an

o1 ,

An

ton

io B

ale

na1,

2,

Marc

o B

ian

co

1,2, B

arb

ara

Sp

ag

no

lo1 ,

Be

rnard

o L

Sab

ati

ni3

, Mass

imo

De

Vit

tori

o1,

2, F

err

uccio

Pis

an

ello

1

1 Isti

tuto

Italia

no

di T

ecn

olo

gia

, Cen

ter

for

Bio

-m

ole

cula

r N

an

ote

chn

olo

gie

s, A

rnesa

no

, Ita

ly,

2D

ipart

imen

to d

i In

geg

neri

a d

ell’

Inn

ova

zio

ne

, U

niv

ers

ità

del

Sale

nto

, Le

cce

, It

aly

, 3D

ep

art

-m

en

t o

f N

eu

rob

iolo

gy,

Ho

ward

Hu

gh

es

Me

d-

ical I

nst

itu

te H

arv

ard

Me

dic

al S

cho

ol,

Bo

sto

n,

US

A

15:4

5A

10-2

Ev

alu

ati

on

o

f R

E-6

50

a

s a

p

osi

-ti

ve

to

ne

re

sist

fo

r e

lec

tro

n b

ea

m

lith

og

rap

hy

wit

h h

igh

pla

sma

etc

h

du

rab

ilit

yM

ing

sai Z

hu

1 , M

eic

ho

ng

Yu

2, J

ian

an

D

en

g1 ,

Yu

yin

g X

ie1 ,

Yif

an

g C

he

n1

1 Nan

olit

ho

gra

ph

y an

d

ap

plic

atio

n

rese

arc

h

gro

up

, S

cho

ol

of

Info

rmat

ion

S

cien

ce

an

d

Tech

no

log

y, F

UD

AN

, C

hin

a,

2H

an

-To

p P

ho

-to

-mat

eri

als

C

B10

-2T

em

pla

ted

de

we

ttin

g o

f u

ltra

-lo

ng

w

ire

s fo

r a

Si-

ba

sed

cir

cuit

M

on

ica B

olla

ni1 ,

Marc

o S

alv

ala

glio

2,

Ab

de

nn

ace

r B

en

ali3

, Mo

ham

me

d

Bo

uab

de

llao

ui3

,4, A

lexe

y F

ed

oro

v1 ,

Axe

l Vo

igt2

, Lu

c F

avre

3, J

ean

Be

no

it

Cla

ud

e3, D

avid

Gro

sso

2, A

nto

ine

Ro

nd

a3, I

sab

elle

Be

rbezi

er3

, Marc

o

Ab

barc

hi3

1 Inst

itu

te o

f P

ho

ton

ics

an

d N

an

ote

chn

olo

gie

s o

f C

NR

(IF

N -

CN

R),

Co

mo

, 2In

stit

ute

of

Sci

-en

tifi

c C

om

pu

tin

g,

Tech

nis

che

Un

ivers

itat

, D

resd

en

, 3IM

2N

P o

f C

NR

S,

Mars

eill

e,

4L

ab

o-

rato

ry o

f P

hys

ics

of

Co

nd

en

sed

Mat

ter

an

d

Ren

ew

ab

le

En

erg

y,

Hass

an

II

Un

ivers

ity

of

Casa

bla

nca

, Mo

ham

me

dia

, Mo

rocc

o

C10

-2S

ing

le-M

od

e P

oly

me

r R

idg

e W

av

e-

gu

ide

In

teg

rati

on

of

Org

an

ic T

hin

-F

ilm

La

ser

Mark

o C

eh

ovsk

i1,3, J

ing

Be

cke

r2, O

uacef

Ch

arfi

1,3, P

asc

al P

ort

en

1 , H

an

s-H

erm

an

n

Jo

han

ne

s1,3, C

laas

Mü

ller2

, Wo

lfg

an

g

Ko

wals

ky

1,3

1 TU

Bra

un

sch

weig

, IH

F,

Bra

un

sch

weig

, G

er-

man

y, 2

Un

ivers

ity

of

Fre

ibu

rg,

FIT

, F

reib

urg

, G

erm

an

y, 3

Clu

ster

of

Exc

elle

nce

Ph

oen

ixD

,

Han

no

ver, G

erm

an

y

D10

-2E

lec

tro

che

mic

al

Se

nsi

ng

Ba

sed

on

In

kje

t-P

rin

ted

Re

du

ced

Gra

ph

en

e

Ox

ide

on

a F

lex

ible

Su

bst

rate

Ham

ed

Sh

am

kh

alic

he

nar1 ,

Jin

-Wo

o

Ch

oi1,

2

1 Lo

uis

ian

a S

tate

U

niv

ers

ity,

B

ato

n

Ro

ug

e,

Un

ite

d S

tate

s, 2

Cen

ter

for

Ad

van

ced

Mic

ro-

stru

ctu

res

an

d D

evi

ces

Lo

uis

ian

a S

tate

Un

i-ve

rsit

y, U

nit

ed

Sta

tes

52

Sci

entifi

c P

rog

ram

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

16:0

0A

10-3

En

vir

on

me

nta

lly

fri

en

dly

na

no

fab

-ri

ca

tio

n w

ith

ce

llu

lose

an

d w

ate

rD

ore

C1 ,

Osm

on

d J

2, M

ihi A

1

1 ICF

O-T

he In

stit

ute

of

Ph

oto

nic

Sci

en

ces,

2In

-st

itu

t d

e C

ièn

cia

de M

ateri

als

de B

arc

elo

na

, S

pain

B10

-3D

ep

osi

tio

n

an

d

op

tim

iza

tio

n

of

Sch

ott

ky

ju

nc

tio

ns

by

A

tom

ic

La

ye

r D

ep

osi

tio

n

for

pie

zotr

on

ic

stra

in s

en

sors

Rao

ul J

oly

1,2, S

tép

han

ie G

iro

d1 ,

No

ure

dd

ine A

dje

rou

d1 ,

Tai N

gu

ye

n1,

2,

Kevin

Me

ng

ue

lti1 ,

Mo

ham

ed

El

Hach

em

i1 , P

atr

ick G

rysa

n1 ,

Sé

bast

ien

K

lein

1 , Jé

rôm

e P

ole

sel1

1 Lu

xem

bo

urg

In

stit

ute

of

Sci

en

ce a

nd

Te

ch-

no

log

y (L

IST

), B

elv

au

x,

Lu

xem

bo

urg

, 2U

ni-

vers

ity

of

Lu

xem

bo

urg

, L

imp

ert

sberg

Cam

-p

us,

Lu

xem

bo

urg

C10

-3A

ME

MS

ba

sed

ca

pa

citi

ve

re

son

a-

tor

de

sig

ne

d f

or

the

de

tec

tio

n o

f th

e t

arg

et

an

aly

te

Se

rdar

Tez

Pam

ukk

ale

U

niv

ers

ity,

E

ng

ine

eri

ng

F

acu

lty,

D

ep

art

men

t o

f E

lect

ric

An

d E

lect

ron

ics

En

gi -

ne

eri

ng

, Den

izli,

Tu

rkey

D10

-3M

icro

ele

ctr

od

e

Arr

ay

s w

ith

In

-te

gra

ted

P

ne

um

ati

c C

av

itie

s fo

r E

lec

tro

de

Po

siti

on

Co

ntr

ol

in R

et-

ina

l Pro

sth

esi

sY

uan

hao

Xu

, Ste

lla W

. Pan

gC

ity

Un

ivers

ity

of

Ho

ng

Ko

ng

, Ko

wlo

on

To

ng

, K

ow

loo

n, H

on

g K

on

g

16:1

5A

10-4

Sy

nth

esi

s a

nd

P

ho

toli

tho

gra

ph

-ic

C

ha

rac

teri

zati

on

o

f P

he

no

lic

Mo

lecu

lar

Re

sist

s u

nd

er

Ele

c-tr

on

-be

am

an

d E

xtr

em

e U

V I

rra

di-

ati

on

Jin

-Ky

un

Le

e1 ,

Je

on

g-S

eo

k M

un

1 , H

yu

n-

Tae

k O

h1 ,

Kan

gh

yu

n K

im2, S

an

gsu

l Le

e2

1 Inh

a U

niv

ers

ity,

In

che

on

, S

ou

th K

ore

a,

2P

o-

han

g A

ccele

rato

r L

ab

ora

tory

, P

ost

ech

, P

o-

han

g, S

ou

th K

ore

a

B10

-4P

att

ern

ing

P

lati

nu

m

usi

ng

C

MP

a

nd

p

lasm

a

etc

hin

g

ind

ust

ria

lly

co

mp

ati

ble

pro

cess

es

Ad

ham

Els

hae

r, R

om

ain

Str

ich

er,

Maxim

e D

arn

on

, Do

min

iqu

e D

rou

in,

Se

rge E

co

ffey

LN

2,

CN

RS

, U

niv

ers

ité d

e S

herb

roo

ke,

3IT

, S

herb

roo

ke, C

an

ad

a

C10

-4In

teg

rati

on

of

pie

zoe

lec

tric

na

no

-st

ruc

ture

s w

ith

M

EM

S

by

in

kje

t p

rin

tin

gM

arc

Go

mez, C

hri

stin

a M

art

inez,

Marc

os

Du

qu

e, A

na M

oya

, Go

nzalo

M

uri

lloM

icro

ele

ctro

nic

s In

stit

ute

of

Barc

elo

na

, B

el-

late

rra

, Sp

ain

D10

-4E

ffe

cts

of

the

Aci

d-b

ase

pro

pe

r-ty

of

the

Do

pa

nt

on

th

e S

nO

2 G

as

Se

nso

rZ

he

ny

u Y

uan

, Ru

i Li,

Lia

ng

yu

Fu

, W

en

hu

i Ch

uai,

Zh

on

gm

ing

Gu

o,

Zh

ao

yin

Tu

, Fan

bo

Ko

ng

No

rth

east

ern

U

niv

ers

ity,

C

hin

a,

Sh

en

yan

g,

Ch

ina

16:3

0-1

6:3

5S

HO

RT

BR

EA

K

53

Mic

ro &

Nan

o E

ngin

eerin

gIn

tern

ati

on

al

Co

nfe

ren

ce o

n23

-26

2019

Sep

tem

ber

Rhod

es, G

reec

e

Sci

entifi

c P

rog

ram

TH

URSD

AY S

EPTEM

BER 2

6th, 2019

JU

PIT

ER

HA

LL

Ch

air

s: P

. D

imit

rakis

, E

. G

og

olid

es

16:3

5-1

7:2

0

Ple

na

ry 8

Ne

w M

ate

ria

ls a

nd

De

vic

es

for

Inte

rfa

cin

g w

ith

th

e B

rain

G

eo

rge M

alli

ara

sU

niv

ers

ity o

f C

am

bri

dg

e, U

K

17:2

0-1

7:3

0

AN

NO

UN

CE

ME

NT

S A

ND

CL

OS

ING

RE

MA

RK

S

54

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)

55EM

2019


N

Poster Sessions


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PA – Nanopatterning

PA01Efficient Fabrication of Soft Polymer Microcantilevers from Dry Film Photoresist for Chemical Sensor ApplicationsMadeleine Nilsen1, Steffen Strehle2

1Ulm University, 2Ilmenau University of Technology

PA05Comparative study of theoretical contrast between extreme ultraviolet and electron beam lithographyKanghyun Kim1, Byeong-Gyu Park2, Hyun-Taek Oh3, Jin-Kyun Lee3, Geunbae Lim1, Sangsul Lee2

1Postech, 2Pohang Accelerator Laboratory(PAL), 3Inha University

PA07Machine learning based technique towards smart laser fabrication of CGHAggeliki Anastasiou1, Evangelia Zacharaki2, Dimitris Alexandropoulos1, Konstantinos Moustakas2, Nikolaos Vainos1

1Dept. of Material Science, University Of Patras, 2Dept. of Electrical and Computer Engineering, University Of Patras

PA09Fabrication of Holographic Optical Elements on Silver by Nanosecond IR Laser SourceDimitris Alexandropoulos1, Simone Mazzucato2, Vaggelis Karoutsos1, Christina (Tanya) Politi3, Nikos Vainos1

1Dept. of Material Science, University Of Patras, 2SISMA S.p.A., 3Dept. of Informatics and Telecommunications, University of Peloponnese

PA11Localized Laser Pyrolysis of SU-8 by Addition of AbsorberEmil Ludvigsen1, Nina Ritter Pedersen1, Xiaolong Zhu2, Rudolphe Marie2, David M. A. Mackenzie3, Dirch H. Pedersen3, Anders Kristensen2, Jenny Emnéus4, Stephan Sylvest Keller1

1DTU Nanolab, Technical University Of Denmark, 2DTU Health Tech, Technical University of Denmark, 3DTU Physics, Technical University of Denmark, 4DTU Bioengineering, Technical University of Denmark

PA13E-beam lithography (EBL) with conductive layer between resist and sapphire substrateSilvia Diewald, Gernot GollCenter for Functional Nanostructures – Nanostructure Service Laboratory (CFN-NSL), Karlsruhe Institute of Technology (KIT)

PA15Comparison of positive and negative high resolution e-beam processes for the fabrication of nanoconstrictionsMaik Gerngroß3, Franziska Grüneberger3, Stephanie Lake1, Philip Dürrenfeld1, Frank Heyroth2, Matthias Schirmer3, Georg Schmidt1,2

1Institut für Physik, Martin-Luther-Universität Halle-Wittenberg, 2Interdisziplinäres Zentrum für Materialwissenschaften, Martin-Luther-Universität Halle-Wittenberg, 3Allresist GmbH

PA – Nanopatterning

PA02 ΑquaSAVE™: Antistatic Agent for Electron Beam LithographyTakahiro Mori, Akira YamazakiMitsubishi Chemical Corporation

PA04 Novel Lift-off Process for DUV Displacement Talbot LithographyMariusz Graczyk, Victor J. Gómez, Maria Huffman, Ivan MaximovSolid State Physics, University of Lund

PA06SU-8 alternative - Atlas 46 and enhanced processing for electroplating applicationsFranziska Grüneberger1, Maik Gerngroß1, Matthias Schirmer1, Bozena Matuskova2, Martin Eibelhuber2, Tobias Zenger2, Thomas Uhrmann2, Martin Weinhart2

1Allresist GmbH, 2EV Group

PA08Laser printing of Cu electrical circuits on glass substratesKonstantina Tourlouki, Dimitris AlexandropoulosDept. of Material Science, University of Patras

PA10High-throughput DTL/optical-hybrid lithography for fabricating high-density silicon nanopillar arrays for field emissionDirk Jonker1, R. M. Tiggelaar3, J. W. Berenschot1, N. R. Tas1, A. van Houselt2, H. J. W. Zandvliet2, J. G. E. Gardeniers1

1Mesoscale Chemical Systems group, University of Twente, 2Physics of Interfaces and Nanomaterials group, University of Twente, 3NanoLab cleanroom, University of Twente

PA12Nanofabrication of thick zone plates for hard X-ray optics using SML resistWang Zhuangzhuang, Shanshan Xie, Jingyuan Zhu, Yifang ChenFudan University

PA14Recent advances in ice lithography for 3D nanofabricationDing Zhao1, Anna Elsukovaa1, Marietta Batzer2, Brendan Shields2, Patrick Maletinsky2, Marco Beleggia1, Anpan Han3

1DTU Nanolab, Technical University of Denmark, 2Department of Physics, University of Basel, 3Department of Mechanical Engineering, Technical University of Denmark

PA16HSQ alternative Medusa 82 for gray-scale lithographyMaik Gerngroß1, Franziska Grüneberger1, Matthias Schirmer1, Paul Voigt2, Uwe Hübner2

1Allresist GmbH, 2Leibniz-Institute of Photonic Technology

56

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PA17An optimal dosage test in electron beam lithography for GaN nanoLEDs fabrication Syed Asad Ali Zaidi1, Tony Granz1,2, Jan Gulink1,2, Klaas Strempel1,2, Hutomo Suryo Wasisto1,2, Andreas Waag1,2

1Institute Of Semiconductor & Technology, 2 Laboratory for Emerging Nanometrology

PA19High throughput Mix and Match nano lithography based on Scanning Laser Beam -, Field-Emission Scanning Probe-, and Nano Imprint LithographyMartin Hofmann1, Laura Weidenfeller2, Shraddha Supreeti3, Johannes Kirchner2, Mathias Holz4, Christoph Reuter4, Stephan Mechold1, Eberhard Manske2, Ivo W. Rangelow1

1Ilmenau University of Technology, Department of Micro- and Nanoelectronic Systems, Gustav-Kirchhoff-Str. 1, 98693 Ilmenau, Germany, 2Ilmenau University of Technology, Institute for Process Measurement and Sensor Technology, Gustav-Kirchhoff_-Str. 1, 98693 Ilmenau, Germany, 3Ilmenau University of Technology, Department of Microsystems Technology, Max-Plack-Ring 12, 98693 Ilmenau, Germany, 4Nanoanalytik GmbH, Ehrenbergstr. 1, 98693 Ilmenau, Germany

PA21Power-law short-range point-spread function in electron-beam lithographyMarcus Albrechtsen1, Søren Stobbe1,2

1Department of Photonics Engineering, DTU Fotonik, Technical University Of Denmark, 2Beamfox Technologies ApS

PA23Sub40 nm planar Al nanowires using two-layer resis stacksFotis Kalaitzakis1, George Papageorgiou1, V. Ryazanov2, K. Arutunov3, Pascal Normand1, Panagiotis Dimitrakis1

1Institute of Nanoscience & Nanotechnology, NCSR “Demokritos”, 2Institute of Solid State Physics, Russian Academy of Sciences, 3Institute for Electronics and Mathematics, High School of Economics

PA25Fluorescent ionic liquid structures fabricated by e-beam lithographyDominik Kowal1, Krzysztof Rola1, Joanna Cybinska1,2, Marcin Skorenski1, Adrian Zajac3, Marcin Smiglak3, Slawomir Drobczynski4, Katarzyna Komorowska1,4

1Lukasiewicz Research Network - PORT Polish Center For Technology Development, 2Faculty of Chemistry, University of Wroclaw, 3Poznan Science and Technology Park, 4Faculty of Fundamental Problems of Technology, Wroclaw University of Science and Technology

PA27Impact of plasma treatment on the pattern fidelity of nanostructured polymer surfacesMartin Eibelhuber1, Anna Dudus1, Jacek Gasiorowski1, Ruxandra-Aida Barb1, Christine Thanner1, Stephan Martens2, Julian Hartbaum2

1Evgroup, 2Insitut für Mikroelektronik Stuttgart (IMS CHIPS)

PA18Magnetic skyrmions in thin Co/Pt/Au multilayer nanodots inspected by a tailored magnetic probeJan Soltys, Iuliia Vetrova, Tomas Scepka, Michal Mruczkiewicz, Jan Derer, Stefan Gazi, Vladimir CambelInstitute of Electrical Engineering

PA20Preparation of Micro- and Nanostructures by Ion or Electron Beam Lithography and Following Selective Wet EtchingTomáš Šamořil1, T. Šikola2

1Central European Institute of Technology, 2Institute of Physical Engineering, Brno University of Technology

PA22Resistless SixN patterns fabrication by e-beam lithography Kornelia Indykiewicz, Bogdan Paszkiewicz, Regina PaszkiewiczWroclaw University of Science and Technology

PA26Fabrication and application of high-performance flexible transparent nanomesh electrodesSung-il Chung1, Pan Kyeom Kim1, Tae-gyu Ha1, Eung Sug Lee2, Kwang Young Kim2

1Korea Electrotechnology Research Institute, 2Korea Institute of Machinery & Materials

PA28Transfer durability of line-patterned replica mould made of high hardness UV-curable resinTetsuma Marumo, Jun TaniguchiTokyo University of Science

PA30Fabrication of composite-electrode for SOFC via ultra violet nanoimprint lithographyRyota Akama1, Takao Okabe1, Kazuyoshi Sato2, Naoki Shikazono3, Jun Taniguchi11Tokyo University of Science, 2Gunma University, 3Institute of Industrial Science, The University of Tokyo

PA32Blue light nanoimprint lithography for patterning a positive-tone EB resistTakao Okabe, Haruki Matsumoto, Jun TaniguchiTokyo University of Science

PA34Hot punching: A versatile tool to fabricate microparticlesRitika Petersen1,2, Stephan Keller1,2, Anja Boisen2

1DTU Nanolab, Technical University of Denmark, 2DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, DTU Health Tech

57


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PA36Imprint-induced grain growth in perovskite layersAndre Mayer, Neda Pourdavoud, Tobias Haeger, Ralf Heiderhoff, Miriam Leifels, Johannes Rond, Johannes Staabs, Patrik Görrn, Thomas Riedl, Hella-Christin ScheerUniversity of Wuppertal

PA38Shear force measurement of actuated, gecko-inspired adhesion elements with hierarchical PDMS pattern Joachim Zajadacz1, Klaus Zimmer1, Pierre Lorenz1, Andre Mayer2, Marc Papenheim2, Hella-Christin Scheer2

1Leibniz-Institute of Surface Engineering, 2School of Electrical, Information and Media Engineering, University of Wuppertal,

PA40Combining Multilayer Multimaterial Nanoimprinting and Inkjet PrintingMichael Mühlberger, Amiya Ranjan Moharana, Helene Außerhuber, Sonja Kopp, Tina Mitteramskogler, Daniel FechtigPROFACTOR GmbH

PA42Molecular simulation study of demolding process in UV nanoimprintMasanori Koyama, Keisuke Nakajima, Masamitsu Shirai, Hiroaki Kawata, Yoshihiko Hirai, Masaaki YasudaOsaka Prefecture University

PA44Nanoimprint Lithography as New Route towards 3-dimensionally structured substrates for in-vitro cell culturesPatrick Schuller1, M. Rothbauer1, Peter Ertl1, A. Moharana2, Michael Muehlberger2, E. Bertagnolli1, Heinz Wanzenboeck1

1TU Wien - Vienna University of Technology, 2Profactor GmbH

PA46Flexible Fabrication Method of Waveguide Integrated Laser Source by CNP Process Jing Becker1,4, Marko Čehovski2,3, Reinhard Caspary2,3, Hans-Hermann Johannes2,3, Wolfgang Kowalsky2,3, Claas Mueller1,4

1Freiburger Zentrum für interaktive Werkstoffe und bioinspirierte Technologien (FIT), Albert-Ludwigs-Universität Freiburg, 2Institut für Hochfrequenztechnik, Technische Universität Braunschweig, 3Cluster of Excellence PhoenixD (Photonics, Optics, and Engineering – Innovation Across Disciplines), 4Servicecenter Mechanische Mikrofertigung, IMTEK, Albert-Ludwigs-Universität Freiburg

PA48Towards faster self-assembly in block copolymer films: the use of plasma treatmentElsa Giraud1,2, Tandra Ghoshal1,2, M.A. Morris1

1Department of Chemistry, University College Cork, 2School Of Chemistry, AMBER, Trinity College Dublin

PA29Fabrication of microchannel via UV-NIL and EBL using UV curable positive-tone EB resistHaruki Matsumoto, Takao Okabe, Professor Jun TaniguchiTokyo University of Science

PA31Moth-eye structured mould using sputtered glassy carbon layer for large scale applicationTomoya Yano1, Hiroyuki Sugawara2, Jun Taniguchi11Tokyo University of Science, 2GEOMATEC Co., Ltd.

PA33Analysis of surface cracks in VUV-hardened PDMS by means of video evaluationMiriam Leifels, Andre Mayer, Patrick Görrn, Hella-Christin Scheer

University Of Wuppertal

PA39Magnetic- plasmonic nanoparticles fabricated with high throughput step and repeat nanoimprint lithography Michael Haslinger1, Tina Mitteramskogler1, Astrit Shoshi2, Stefan Schrittwieser3, Joerg Schotter3, Hubert Brueckl2, Michael Muehlberger1

1Profactor Gmbh., 2Danube University Krems, Department for Integrated Sensor Systems, 3AIT Austrian Institute of Technology, Molecular Diagnostics

PA41Computational study on molecular size dependence on pressing and de-molding process in nanoimprint lithographReo Sakata1, Masaaki Yasuda1, Yuya Miyashita1, Kazuhiro Tada2, Masamitsu Shirai1, Hiroaki Kawata1, Yoshihiko Hirai1

1Osaka Prefecture University, 2National Institute of Technology, Toyama College

PA43Displacement Talbot Lithography for Fabrication of Large Area Nanoimprint StampsMariusz Graczyk, Muhammad Asif, Ivan MaximovLund University

PA45A novel process to realize 4H-SiC nanowire arraysMaria Androulidaki2, Maximilien Cottat1, Antonios Stavrinidis2, Cecile Gourgon1, Camille Petit-Etienne1, Edwige Bano3, George Konstantinidis2, Jumana Boussey1, Konstantinos Zekentes2,3

1Laboratoire des Technologies de la Microélectronique, 2MRG-IESL/ FORTH, Vassilika Vouton, PO Box 1385 Heraklion, Greece, 3Grenoble-INP, IMEP-LAHC

PA49STM imaging enhancements for better features identificationEhud Fuchs, Joseph Lake, James Owen, John RandallZyvex Labs

58

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PA52Process optimization of Medusa 82 resist by electron beam lithographyTh. Mpatzaka1, Grigorios Konstantinos Zisis1,2, Vasilis Vamvakas2, Ioannis Raptis1,2, George Papageorgiou2, C. Kaiser3, T. Mai3, Mr. Matthias Schirmer3, Maik Gerngroß3

1ThetaMetrisis SA, 2NCSR “Demokritos”, 3Allresist GmbH

PA54Time- and cost-effective fabrication of micro-structured sample holders for serial crystallography experimentsMiriam Barthelmess1, Ville Nissinen2, Petri Karvinen2, Pontus Fischer1, Tim Pakendorf1, Karol Bustos1, Gisel Peña1, Henry N. Chapman1, Alke Meents1,2

1Center for Free-Electron Laser Science, Deutsches Elektronen Synchrotron DESY, 2Institute of Photonics, University of Eastern Finland

PA56A new specifically tailored resist for UV-NIL using gas permeable soft stamp and a study of its etching behaviour on fused silica substratesShuhao Si1, Martin Messerschmidt2, Manuel Thesen2, Arne Schleunitz2, Gabi Grützner2, Stefan Sinzinger1

1Technische Universität Ilmenau, 2micro resist technology GmbH

PA60Deep reactive ion etching of grass-free widely spaced periodic 2D structureChantal Myrielle Silvestre, Henri Jansen, Ole HansenTechnical University of Denmark, DTU Nanolab

PA62Fabrication of decorated nanopillar arrays for silicon light trapping enhancement in solar cell applicationsJordi Llobet1, Carlos Calaza1, Mariana Antunes1, Helder Fonseca1, Sofia Martins1, Yevgeny Faingold2, Shay Fadida2, Ashish Prajapati2, Gil Shalev2, João Gaspar1

1International Iberian Nanotechnology Laboratory, 2Ben-Gurion University of the Negev

PA64Cryogenic etching for large area pattern transfer into silicon of Mix-and-Match structured resist layersLaura Weidenfeller1, Martin Hofmann2, Johannes Kirchner1, Mathias Holz3, Christoph Reuter3, Stephan Mechold2, Eberhard Manske1, Ivo W. Rangelow2

1Ilmenau University of Technology, Institute for Process Measurement and Sensor Technology, 2Ilmenau University of Technology, Department of Micro- and Nanoelectronic Systems, 3Nanoanalytik GmbH

PA66Low-temperature etching of porous low-k dielectrics in C2F4Br2 plasmaAndrey Miakonkikh1,2, Askar Rezvanov2,3, Alexey Vishnevskiy4, Konstantin Rudenko1,2

1Valiev Institute For Physics And Techology of Russian Academy of Sciences, 2Moscow Institute of Physics and Technology (MIPT), 3Molecular Electronics Research Institute (JSC MERI), 4MIREA – Russian Technological University (RTU MIREA)

PA53Modified fluorous developer solutions with additives for Orthogonal Photolithography of organic light emitting diode displaysJongchan Son1, Han Young Shin2, Yu Min Choi2, Jin-Kyun Lee1, Byung Jun Jung2

1Inha University, 2University of Seoul

PA55Brilliant Fluorescent Resists for E-beam and Photolithographic ApplicationsFranziska Grüneberger1, Maik Gerngroß1, Matthias Schirmer1, Thomas Steglich2, Philipp Bastian3, Marita Steffen3, Michael Kumke3

1Allresist GmbH, 2Präzisionsoptik Gera GmbH, 3Physical Chemistry, Institute of Chemistry, University of Potsdam

PA57In-situ monitoring of development step of high-resolution e-beam resistsTheodora Mpatzaka1, Grigoris Zisis1,2, George Papageorgiou2, Dimitrios Goustouridis1,3, Ioannis Raptis1,2

1ThetaMetrisis SA, Athens, Greece, 2INN, NCSR ‘Demokritos’, Athens, Greece, 3Dept. Electrical & Electronics Eng., University of West Attica, Athens, Greece

PA59Electron beam direct writing of polymer microstructures using a solvent-free ionic liquid as a resistKrzysztof Rola1, Adrian Zajac2, Andrea Szpecht2,3, Joanna Cybinska1,4, Marcin Smiglak2, Katarzyna Komorowska1,5

1LUKASIEWICZ Research Network – PORT Polish Center For Technology Development, 2Poznan Science and Technology Park, 3Faculty of Chemistry, Adam Mickiewicz University, 4Faculty of Chemistry, University of Wroclaw, 5Faculty of Fundamental Problems of Technology, Wroclaw University of Science and Technology

PA61Vertical High Aspect Ratio Silicon Via Etching for TSV Applications Stokeley K1, Ren Z1

1Oxford Instruments, Bristol, United Kingdom

PA63Surface functionalization by patterning and etching of metals using chlorine plasmasGuillaume Le Dain1, Feriel Laourine2, Ahmed Rhallabi1, Aurelie Girard1, Christophe Cardinaud1, Thierry Czerwiec2, Stephane Guilet3, Daniel Turover4, Gregory Marcos2

1Institut Des Materiaux Jean Rouxel, Cnrs, 2Institut Jean Lamour, 3Centre de Nanosciences et Nanotechnologies, 4SILSEF

59


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PA68Anisotropic plasma etching of Silicon in gas chopping process by alternating steps of oxidation and etchingAndrey Miakonkikh, Sergey Averkin, Konstantin Rudenko, Vladimir LukichevValiev Institute for Physics and Techology of Russian Academy of Sciences

PA70Optimum design of a 740 mm-long lens mount for fast line-beam proximity exposure process producing fine patterns with 5 μm widthChangKyu Lee1, Hyeondong Yang1, Sang Gil Ryu2, Je Hoon Oh1

1Hanyang University, 2Philoptics Co. Ltd

PA72High throughput AFM wafer inspection with parallel active cantileversMathias Holz2, Christoph Reuter2, Ahmad Ahmad2, Martin Hofmann1, Alexander Reum2, Tzvetan Ivanov1, Stephan Mechold1, Ivo W. Rangelow1

1Department of Micro- and Nanoelectronic Systems, 2Nanoanalytik GmbH

PA74Improving the accuracy of Line Edge Roughness measurement using Hidden Markov ModelsGeorge Papavieros1,2,4, Vassilios Constantoudis1,2, Ioannis Kontoyiannis3, Eva Giannatou2, Evangelos Gogolides1,2

1NCSR Demokritos/ Institute of Nanoscience and Nanotechnology, 2Nanometrisis P.C., 3University of Cambridge, 4Aristotle University of Thessaloniki, Thessaloniki

PA76SEM Inspection of Nanowire Devices: Contact Inspection, Resistance and Capacitance Measurement and Buckling EvaluationTakeyoshi Ohashi1, Kazuhisa Hasumi2, Masami Ikota2, Gian Lorusso3, Hans Mertens3, Liesbeth Witters3, Naoto Horiguchi31Hitachi, Ltd., 2Hitachi High-Technologies Corporation, 3imec

PA78Titanium Nitride Plasmonic Surfaces via Nanosphere LithographySpyros Kassavetis1, S. Panos2, D. Tselekidou1, A. Theodosiou1, P. Patsalas2

1Nanotechnology Lab LTFN, Physics Department, Aristotle University of Thessaloniki, Thessaloniki, 2Physics Department, Aristotle University of Thessaloniki, Thessaloniki

PA65A short post-processing method for high aspect ratio trenches after Bosch etchingHenk-Willem Veltkamp1, Yiyuan Zhao1, Meint de Boer1, Remco Wiegerink1, Joost Lötters1,2

1University of Twente, 2Bronkhorst High-Tech BV

PA67Cobalt subtractive etch for advanced interconnectsAlexander Rogozhin, Andrey Miakonkikh, Andrey Tatarintsev, Konstantin RudenkoValiev Institute of Physics and Technology Of Russian Academy of Sciences

PA69A study of the effect of bilayer resist sensitivity difference on the T shape gate profilesYuying Xie, Zhiqiang Chen, Jianan Deng, Mingsai Zhu, Yifang ChenNanolithography and Application Research Group, Fudan University

PA71Direct Monte-Carlo simulation of dry e-beam etching of resistAlexander Rogozhin1, Fedor Sidorov1,2, Mark Bruk1, Eugene Zhikharev1

1Valiev Institute of Physics and Technology of Russian Academy of Sciences, 2Moscow Institute of Physics and Technology

PA73AFM integrated with a SEM for correlative imaging, 3D-metrology and nanofabricationMartin Hofmann1, Mathias Holz2, Alexander Reum2, Laura Weidenfeller3, Stephan Mechold1, Eberhard Manske3, Tzvetan Ivanov1, Ivo W. Rangelow1

1Department of Micro- and Nanoelectronic Systems, 2Nanoanalytik GmbH, 3Institute for Process Measurement and Sensor Technology

PA75AFM tip shape characterization and measurement correction through the use of e-beam nanopillar standards with optimized sharpnessGeorge Papageorgiou1, V. Constantoudis1,2, R. Koops3, P. Dimitrakis1

1NCSR “Demokritos”, 2Nanometrisis p.c., 3VSL

PA77A hybrid modeling framework for the investigation of roughness formation during plasma etching of polymeric surfacesGeorge Memos1,2, Elefterios Lidorikis2, George Kokkoris1

1Institute of Nanoscience and Nanotechnology NCSR “Demokritos”, 2Department of Materials Science and Engineering, University of Ioannina

60

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PB – Nanofabrication

PB02Nanostructure fill with conductive transparent oxide with supercritical CO2 intending to applying to porous Si-based light emitting devicesEiichi Kondoh1, Akemi Shioda1, Lianhua Jin1, Bernard Gelloz2

1University of Yamanashi, 2Nagoya University

PB04Towards Faster EBID Growth Using MeCpPtMe3 in a Desktop SEMAya Mahgoub, C.W HagenTu Delft

PB08Silicon Oxide Compatible Etching Process For Oxynitride And Silicon NitrideIrina Kiryushina, Andrey Islyaykin, Yury OzerinMERI JSC

PB10Study on X-ray radiolysis-induced-chemical reaction at interface between liquid and substrate for additive manufacturing processAkinobu Yamaguchi1, Ikuya Sakurai2, Ikuo Okada2, Mari Ishihara3, Takao Fukuoka1, Kelvin Elphick4, Edward Jackson4, Atsufumi Hirohata4, Yuichi Utsumi11University of Hyogo, 2Nagoya University, 3Hyogo Prefectural Institute of Technology, 4University of York

PB12Surface Effect on the Operation of a NEMS SwitchSepeedeh Shahbeigi Roudposhti1, Sertac Guneri Yazgi1, Martin Hofmann2, Mahmut Bicer1, Mohammad Nasr Esfahani3, Ivo W. Rangelow2, B. Erdem Alaca1,4

1Dept. of Mechanical Engineering, Koc University, 2Dept. Micro- and Nanoelectronics Systems, Ilmenau University of Technology, 3WMG, University of Warwick, 4KUYTAM, Surface Science and Technology Center, Koc University

PB16Metallic ink composed of nickel-silver core-shell nanoparticles for preparation of conductive coating Anna Pajor-świerzy1, Robert Socha1, Radosław Pawłowski2, Piotr Warszyński1, Krzysztof Szczepanowicz1

1Jerzy Haber Institute of Catalysis and Surface Chemistry Polish Academy of Sciences, 2Abraxas Jeremiasz Olgierd

PB18Optimal fabrication and characterization of YAG:Ce nanopowders for LED lighting Ya-Wei Lee1, Tien-Li Chang2, Su-Hsen Wu1

1National Defense University, 2National Taiwan Normal University, 3National Defense University

PB20Hybrid Plasmonic Nanostructures via Block Copolymer NanopatterningAndrew Selkirk1, Cian Cummins2, Niall McEvoy1, Mick Morris1, Parvaneh Mokarian-Tabari11Trinity College, The University of Dublin, 2Université de Bordeaux

PB – Nanofabrication

PB01Selective Area Deposition via Polymer Brush FilmsRoss Lundy, Pravind Yadav, Michael A. MorrisSchool of Chemistry, AMBER@CRANN, Trinity College Dublin

PB03Novel Fabrication Method for Diamond-Shaped Silicon Nanowires on (100)-Oriented Single Crystal SiliconYunqian He1,2, Yi Yang1,2, Yuelin Wang1, Tie Li11SIMIT, CAS, 2UCAS

PB05Design and fabrication of hierarchical multi-scale structures on curved surfaceNa Eun Yeo1, Doo-in Kim2, Young-Ho Ha3, Myung Yung Jeong1,4

1Department of Cogno-mechatronics Engineering, Pusan National University, 2Opto-mechatronics Engineering Research Institute, Pusan National University, 3Nano Convergence Center, Gyeongnam Technopark, 4Department of Opto-mechatronics Engineering, Pusan National University

PB07Engineering the Oxide/Metal interface through the insertion of a buffer layer: self-organized formation of CoO nanostructures on Fe(001)Alberto Brambilla, Andrea Picone, Dario Giannotti, Marco Finazzi, Lamberto Duò, Franco CiccacciDipartimento Di Fisica, Politecnico Di Milano

PB09Fabrication of metal-nanopillar nanostructures for plasmomechanical applications Zubair Buch, Pedram Sadeghi, Silvan SchmidTU Wien

PB11Selective electrochemical wet etching for 3D Ni/Cu electrodeSeon-Yong Hwang, Hyeong-Ho Park, Ji Hwang Lee, Chang-Hwan Kim, Keun-Woo Lee, Ho Kwan KangKorea Advanced Nanofab Center

PB13Evaluation of etching characteristics on titanium-assisted chemical vapor etching of silicon dioxideHironobu Nishida, Warisawa Shinichi , Kometani ReoGraduate School Of Frontier Sciences, The University OfTokyo

PB15Emerging ultrafast-laser-assisted and conductive nanofiber fabrication on flexible graphene-based substrate for gas detectionTien-li Chang1, Cheng-Ying Chou1, Ya-Wei Lee2, Jing-Yi Yang1

1Department of Mechatronic Engineering, National Taiwan Normal University, 2Department of Mechanical and Aerospace Engineering, Chung Cheng Institute of Technology, National Defense University

61


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PB22Investigation of morphological and structural properties of hot-wire deposited molybdenum sulphide thin filmsGiorgos Papadimitropoulos, A. Balliou, Dimitris Davazoglou, Dimitris N. KouvatsosNCSR Demokritos

PB24Subtractive Plasma Nano-Assembly: A New Method for Precision Control of Surface NanotopographyAngelos Zeniou1,2, Evangelos Gogolides1, Vassilios Constantoudis1

1INN, NCSR Demokritos, 2Department of Physics, University of Patras

PB26Ion beam implanted Germanium nanowires Ahmad Echresh1,2, Yufang Xie1, Slawomir Prucnal1, Lars Rebohle1, Yordan M. Georgiev1,3

1Institute of Ion Beam Physics and Materials Research, HZDR, 2International Helmholtz Research School for Nanoelectronic Network, HZDR, 3Institute of Electronics at Bulgarian Academy of Sciences

PB28HD-DVD Based Microscale 3D PrinterTien-Jen Chang, Lukas Vaut, Martin Voss, Line Hagner Nielsen, En-Te Hwu, Anja BoisenThe Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Department of Health Technology, Technical University of Denmark

PB30FIB-induced Origami Assembling Diverse 3D Micro/nanostructuresJunjie Li1,2, Changzhi Gu1,2, Ruhao Pan1,2

1Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, 2School of Physical Sciences, CAS Key Laboratory of Vacuum Physics, University of Chinese Academy of Sciences

PB323D-microfabrication of pyrolytic carbon electrodes combining additive manufacturing and UV lithographyJesper Yue Pan1, Babak Rezaei1, Thomas Aarøe Anhøj1, Niels Bent Larsen2, Stephan Sylvest Keller1

1Technical University of Denmark, 2DTU Healthtech, Department of Health Technology

PB34The high sensitive sensor of refractive index based on 3D metamaterials fabricated by ion beam irradiationChangzhi Gu, Haifang Yang, Junjie LiChinese Academy of Sciences

PB17Transparent Super Water-Repellent Surface using ZnO NanorodHwa-Min Kim1, Changhyun Lee1, Jiseon Kwon1, Sunyoung Sohn2, Jongjae Kim1, Chanseob Cho3, Bonghwan Kim1

1Daegu Catholic University, 2Pohang University of Science and Technology, 3Kyungpook National University

PB19Effective Growth of Pure Long-straight Boron Nitride Nanowires strain and application as humidity sensorDr Ling Li, Cuicui Zhuang, Xiangqian JiangHarbin Institute of technology

PB21The Path to Molecularly Precise Self-AssemblyMichael Zwolak, Jacob Majikes, James Alexander LiddleNIST

PB23Study of the fabrication of vertical GaN nanowire transistorsGeorge Doundoulakis1,2, Adam Adikimenakis1,2, Antonios Stavrinidis2, Katerina Tsagaraki2, Maria Androulidaki2, Fabrice Iacovella2, George Deligeorgis2, George Konstantinidis2, Alexandros Georgakilas1,2

1Department of Physics, University of Crete, P.O. Box 2208, 70013 Heraklion-Crete, Greece, 2Institute of Electronic Structure and Laser (IESL), Foundation for Research and Technology-Hellas (FORTH), P.O. Box 1385, 71110, Heraklion-Crete, Greece

PB25Substrate effects in selective area growth of GaN nanowires by plasma-assisted molecular beam epitaxyAdam Adikimenakis1,2, George Doundoulakis1,2, Savvas Eftychis1,2, Katerina Tsagaraki1, Maria Androulidaki1, Alexandros Georgakilas1,2

1FORTH, 2University of Crete

PB27Complicated micro-, nanostructure of fine crystalline spots in thin amorphous films formed by e-beam Vladimir KolosovUral Federal University

PB293D greyscale e-beam lithography for the template of a round shape Kinoform lens in X-rayZhiqiang Chen1, Jingyuan Zhu1, Xudi Wang2, Yifang Chen1

1220 Handan Rd., Yangpu District, 2School of Mechanical and Automobile Engineering, Hefei University of Technology

62

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PB38Patterning and Pattern Transfer of Antireflective Nanostructures for Optical Glasses based on self-organized block copolymer masksFlorian Schlachter1, Jens Bolten1, Gaulthier Rydzek2, Parvaneh Mokarian2, Max Christian Lemme1,3

1Amo Gmbh, 2AMBER and School of Chemistry, CRANN Institute, Trinity College Dublin, 3Electronic Devices, RWTH Aachen University

PB40Pedestal-Shaped Microfluidic Nozzles to facilitate Contact Line Pinning during Electrohydrodynamic processing of LiquidsBjorn T.H. Borgelink, Erwin J.W. Berenschot, Cristian S. Deenen, Remco G.P. Sanders, Niels R. Tas, Han J.G.E. GardeniersMesoscale Chemical Systems, University of Twente

PB42High Fidelity and Sustainable Anti-Reflective Moth-eye Nanostructures and Large Area Sub-Wavelength ApplicationsShuhao Si1, Martin Hoffmann2

1Technische Universität Ilmenau, 2Ruhr-Universität Bochum

PB44Silicon surface modification for covalent attachment of molecules via strain-promoted azide-alkyne click chemistry reactionFotini Vrettou1,2, Panagiota Petrou2, Sotirios Kakabakos2, Panagiotis Argitis3, Margarita Chatzichristidi11National And Kapodistrian University Of Athens, 2Immunoassay/Immunosensors Lab, INRΑSTES, NCSR Demokritos, 3Institute of Nanoscience and Nanotechnology, NCSR Demokritos

PB46Surface modification and microfabrication of piezoelectric fluorinated polymers by proton beam writingYoshitaka Nojiri1, Yoshikazu Koike1, Yasuyuki Ishii2, Hiroyuki Nishikawa1

1Shibaura Insititute of Technology, 2Institutes for Quantum and Radiological Science and Technology

PB48Iodine - based etching solution for mercury cadmium telluride materialOlga Markowska1, Jarosław Rutkowski1, Jerzy Ciosek2

1Institute of Applied Physics, Military University of Technology, 2Institute of Optoelectronics, Military University of Technology

PB50Polyelectrolyte multilayer nanosystems for biomedical application Krzysztof Szczepanowicz1, Tomasz Kruk1, Wiktoria Tomal1, Aud Bouzga2, Christian Simon2, Piotr Warszyński11Jerzy Haber Institute Of Catalysis And Surface Chemistry, Polish Academy Of Sciences, 2SINTEF Material and Chemistry

PB31Combination of two-photon 3D printing and inkjet printing for steroid coating drug-eluting implantJongmoon Jang1, Christopher Tse1, Jeong Hun Jang2, Hongsoo Choi3,4, Jürgen Brugger1

1Microsystem Laboratory, École Polytechnique Fédérale De Lausanne (EPFL), 2Dep’t of Otolaryngology, Ajou University School of Medicine, 3Dep’t of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), 4DGIST-ETH Microrobot Research Center, DGIST

PB35Large-scale 3D plasmonic sub-10 nm-gap arrays based on stress-induced nanocrack Ruhao Pan1,2, Junjie Li1,2, Changzhi Gu1,2

1Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, 2School of Physical Sciences, CAS Key Laboratory of Vacuum Physics, University of Chinese Academy of Sciences

PB37Growth of porous nanofiber structure via layer-by-layer self-assembly under ionic effects for antireflective and antifogging coatingsKengo Manabe1,2, Seimei Shiratori21Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, 2Center for Material Design Science, School of Integrated Design Engineering, Keio University

PB39Fabrication of robust PDMS microstructure with hydrophobic properties Nithi Atthi, Witsaroot Sripumkhai, Pattaraluck Pattamang, Oraphan Thongsook, Saranya Suntalelat, Jirawat Jantawong, Rattanawan Meananeatra, Jakrapong Supadech, Nipapan Klunngien, Wutthinan JeamsaksiriThai Microelectronics Center (TMEC), National Electronics and Computer Technology Center (NECTEC)

PB41Fabrication of metamaterial structure with morpho butterfly effect using standing wave effectTomoki Nishino1, Hiroshi Tanigawa2, Atsushi Sekiguchi2, Hiroyuki Mayama3

1Ritsumeikan University, 2The Research Organization of Science and Technology, Ritsumeikan University, 3Department of Chemistry, Asahikawa Medical University

PB43Nanoporous Ag Films for Surface-Enhanced Raman Scattering for BiosensorsSungho Yun1,2, HyeongJu Kim1, Dongin Lee3, Bonghwan Kim4, Chanseob Cho1

1Kyungpook National University, 2Kwang-Lim Precision, 3Yeungnam University, 4Daegu Catholic University

PB45Putting Cassie under Pressure Sankara Narayana Moorthi Arunachalam, Ratul Das, Zain Ahmad, Jamilya Nauruzbayeva, Himanshu MishraKing Abdullah University Of Science & Technology

63


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PB52Dew water harvesting from micro-nanotectured surfacesDimitris Nioras, Giannis Thomopoulos, Maria Tzianou, Nikos Vourdas, Kosmas Ellinas, Evangelos GogolidesInstitute of Nanoscience and Nanotechnology, NCSR Demokritos

PB54Ultra-low friction droplet motion on micro-nanostructured superhydrophobic surfacesPanagiotis Sarkiris1, Kosmas Ellinas1, Dimitris Gkiolas2, Dimitrios Mathioulakis2,3, Evangelos Gogolides1

1Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”, 2School of Mechanical Engineering, Section of Fluids, Aerodynamics Laboratory, National Technical University of Athens, 3Institute for Clean and Renewable Energy, Huazhong University of Science and Technology

PB58A novel bio-inspired Triple hierarchical Superhydrophobic Surface (TriSS) Soochan Chung, Cameron Riley, Hayden TaylorUniversity of California, Berkeley

PB60Cyclic deformation behaviour of Ti alloys by using micro-sized specimens Takashi Nagoshi, Hajime Kishimoto, Akihisa HaradaNational Institute of Advanced Industrial Science and Technology

PB62First-principles study on different types of 2D-MoS2-based nanocatalysts for the oxygen reduction reactionJiamu Cao1,2, Junyu Chen1, Jing Zhou1, Shaoxuan Zhong1,2, Luwen Zhang1, Junfeng Liu1

1Harbin Institude of Technology, 2Key Laboratory of Micro-systems and Micro-Structures Manufacturing, Ministry of Education

PB64Dominating role of Rapid Heating rate on the Pt/rGO Nanocatalysts Synthesised by microwave assistant for Highly Enhanced Catalytic PropertiesJing Zhou1, Jiamu Cao1,2, Junyu Chen1, Junfeng Liu1, Yufeng Zhang1,2

1MEMS Center, Harbin Institute of Technology, 2School of electronics and information engineering, Harbin Institute of Technology

PB66Combining bottom-up and top-down approaches with micro X-ray fluorescence spectroscopy for controllable fabrication of periodic ZnO nanostructuresGeorge P. Papageorgiou1,2, Andreas Karydas3, Vassiliki Kantarelou3, George Papageorgiou1, Eleni Makarona1

1Institute Of Nanoscience and Nanotechnology, NCSR Demokritos, 2Physics Department, University of Patras, 3Institute of Nuclear and Particle Physics, NCSR Demokritos

PB47Scalable Perfluorocarbon-free Gas Entrapping Surfaces/Membranes Zain Ahmad, Ratul Das, Sankara Arunachalam, Ulrich Buttner, Himanshu MishraKaust

PB49Nanostructured surfaces for improvement of Laser Transfer processJavier Bravo, Javier ClementeNaitec

PB51Nanoporous activated carbon cloth for H2 adsorption, selective CO2/CH4 separation and supercapacitor energy storageNikolaos Kostoglou1, Christian Koczwara1, Christian Prehal2, Biljana Babic3, Christos Tampaxis4, Georgia Charalambopoulou4, Theodore Steriotis4, Kyriaki Polychronopoulou5, Georgios Constantinides6, Oskar Paris1, Claus Rebholz7, Christian Mitterer1

1Montanuniversität Leoben, 2Graz University of Technology, 3University of Belgrade, 4National Center for Scientific Research Demokritos, 5Khalifa University of Science and Technology, 6Cyprus University of Technology, 7University of Cyprus

PB53Atmospheric plasma etching of nanocomposite materials for fabrication of superhydrophobic, antireflective and antibacterial surfacesPanagiotis Dimitrakellis1, Georgia Kaprou1, Dimitrios Mastellos2, Angeliki Tserepi1, Evangelos Gogolides1

1Institute of Nanoscience And Nanotechnology, NCSR ‘Demokritos’, 2Institute of Nuclear & Radiological Sciences & Technology, Energy & Safety, NCSR ‘Demokritos’

PB55Antifogging and optically switching, micro-nano structured surfacesMaria-Martha Tzianou, Giannis Thomopoulos, Dimitris Nioras, Kosmas Ellinas, Nikos Vourdas, Evaggelos GogolidesInstitute of Nanoscience and Nanotechnology NCSR Demokritos

PB57Fabrication of functional separator via graphene oxide induced surface modification for lithium ion batteryJu Young Kim, Dong Ok Shin, Kwang Man Kim, Jimin Oh, Jumi Kim, Seok Hun Kang, Myeong Ju Lee, Young-Gi LeeElectronics and Telecommunications Research Institute

PB59Impedance spectroscopy of diamond based nanomaterials and nanostructuresRuoying Zhang1, Aude Cumont1, Dongyu Li1, Nikolaos Kehagias2, Haitao Ye1

1University of Leicester, 2Catalan Institute of Nanoscience and Nanotechnology

64

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PB68Engineered bottom-up fabrication of Tin Selenide Nanostructures: ranging from 2D to 1DSubhajit Biswas1,2, Fionan Davitt1,2, Gillian Reid3, Justin D. Holmes1,2

1School of Chemistry, University College Cork (ucc), 2AMBER@CRANN, Trinity College Dublin, 3School of Chemistry, University of Southampton

PB70Single layer reduced graphene oxide transferred by Langmuir–Blodgett and patterned by Electron Beam Lithography at wafer scale Adrian Martinez-Rivas1, Aldo Armando Rosales Hernández2, Narcizo Muñoz-Aguirre3, Donato Valdez-Pérez2

1CIC-Instituto Politécnico Nacional, 2ESIME-Zacatenco, Instituto Politécnico Nacional, 3ESIME-Azcapotzalco, Instituto Politécnico Nacional

PB76Study of laparoscopic scope camera lens with antifouling function using metamaterial structureTomoki Nishino1, Hiroshi Tanigawa2, Atsushi Sekiguchi2, Hiroyuki Mayama3, Akinari Hinoki4, Hiroo Uchida4

1Ritsumeikan University, 2The Research Organization of Science and Technology, Ritsumeikan University, 3Department of Chemistry, Asahikawa Medical University, 4 Department of Pediatric Surgery, Nagoya University Graduate School of Medicine

PB78Optical properties of aluminum nanosquare structuresGrigoris Zisis1,2, Evangelos Almpanis1, Emmanouil Panagiotidis1, Ioannis Raptis1,2, Nikos Papanikolaou1

1Institute of Nanoscience and Nanotechnology, NCSR ‘Demokritos’, 2ThetaMetrisis SA

PB80Optical characterization of printed silver nanocluster wiresRyohei Hokari, Kazuma Kurihara, Eiji HigurashiNational Institute of Advanced Industrial Science And Technology (AIST)

PB82Measuring the complexity of nanostructured surfacesAthanasios Arapis1,3, Vassilios Constantoudis1,2

1Institute of Nanoscience and Nanotechnology, NCSR Demokritos, 2Nanometrisis, 3School of Applied Mathematical and Physical Sciences, NTUA

PB84The Structure and Micro-mechanical Properties of Cobalt Electrodeposited by Micro-compression TestXun Luo1,2, Tso-Fu Mark Chang3, Masato Sone3

1College of Materials and Metallurgy, Guizhou University, 2Key Laboratory of Light Metal Materials Processing Technology of Guizhou Province, Guizhou Institute of Technology, 3Institute of Innovative Research, Tokyo Institute of Technology

PB63Sensing of Hydrogen by two-dimensional doped-2H MoS2 and pristine-1T MoS2: A first-principles studyJunyu Chen1, Jing Zhou1, Jiamu Cao1,2, Shaoxuan Zhong1,2, Luwen Zhang1, Junfeng Liu1, Yufeng Zhang1,2

1MEMS Center, Harbin Institute of Technology, 2Key Laboratory of Micro-systems and Micro-Structures Manufacturing, Ministry of Education

PB65Formation of MoS2 nanostructure arrays using anodic aluminium oxide template Takaki Okamoto1, Tomohiro Shimizu1, Takeshi Ito1, Koichi Takase2, Shoso Shingubara1

1Kansai University, 2Nihon University

PB67Temperature Dependent (83-533 K) Raman Spectroscopy Analysis of MoS2 Monolayers on Si/SiO2 and Glass SubstratesMerve Öper, Hüseyin Şar, Feridun Ay, Nihan Kosku PerkgozEskisehir Technical University

PB69Mapping of charge distribution by Kelvin probe force microscopy on graphene field effect transistor at controlled relative humidityVojtěch Švarc1,2, Miroslav Bartošík1,2, Martin Konečný1,2, Jakub Sadílek1, Tomáš Šikola1,2

1Central European Institute of Technology – Brno University of Technology (CEITEC BUT), 2Institute of Physical Engineering, Brno University of Technology

PB71Stacked electrophoretic deposited graphene supercapacitorsLaigui Hu, Muhammad Zaheer, Ran LiuFudan University

PB73Growth and characterization of nanocrystalline and nanoparticle Hafnium filmsMenelaos Tsigkourakos1, Athanasios Housiadas1, Thomas Kehagias2, Philomela Komninou2, Dimitris Tsoukalas1

1National Technical University of Athens, 2Aristotle University of Thessaloniki

PB77Study on nanoimprint technology of plant structure with super water repellent structureAtsushi Sekiguchi1,2, Tomoki Nishino1, Hitoshi Tanigawa1, Hiroko Minami2, Japan Yoko Matsumoto2

1Ritsumeikan University, 2Litho Tech Japan Corporation

PB79Subwavelength transmissive surface-relief gratings for spiral phase-contrast microscopyEinstom Engay1, Larissa Vertchenko1, Dewang Huo1,2, Alexandre Wetzel3, Ada-Ioana Bunea3, Andrei Lavrinenko1

1Technical University of Denmark, DTU Fotonik, 2Harbin Institute of Technology, Department of Physics, Institute of Modern Optics, 3Technical University of Denmark, DTU Nanolab

65


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PB86When should we consider the effect of tip size and shape in AFM measurements?Andrew A. Vekinis, Vassilis ConstantoudisInstitute of Nanoscience and Nanotechnology, NCSR Demokritos

PB88Nanometrological Characterization of CuO and NiO Nanostructures of Non-conventional Morphologies: A symmetry-based approachVassilios Constantoudis1,4, Ioannis Ioannou-Sougleridis1,3, A. Dimou1,2, A Ninou1,2, M. Chatzichristidi2, E. Makarona1

1Institute of Nanoscience and Nanotechnology, NCSR Demokritos, 2Department of Chemistry, University of Athens, 3Department of Physics, University of Athens, 4Nanometrisis p.c.

PB81Controlling light wavefronts with dielectric meta-surfacesEmmanouil Panagiotidis1,2, Evangelos Almpanis1,2, Nikolaos Papanikolaou1, Grigorios Konstantinos Zisis1

1Institute of Nanoscience and Nanotechnology, NCSR ‘Demokritos’, 2Department of Solid State Physics, National and Kapodistrian University of Athens

PB83Dip-in and measure: An alternative approach for the fabrication of metal-coated AFM probes for Tip-Enhanced Raman SpectroscopyDiana DavilaIBM Research - Zurich Lab

PB85Ultra-sensitive interferometric microscope for material analysis and defect detectionLuc Dümpelmann, Roland A. Terborg, Josselin Pello, Illaria Mannelli, Valerio PruneriIcfo

PB87Investigation of Pt/C freestanding nanowires fabricated in focused electron beam deposition technologyPiotr Kunicki1, Krzysztof Kwoka1, Tomasz Piasecki1, Sebastian Eberle2, Cosmin Roman2, Christofer Hierold2, Teodor Gotszalk1

1Wroclaw University of Technology, 2Swiss Federal Institute of Technology in Zurich

PB89Three-dimensional silicon nanostructures for photonic applications Bingdong Chang, Flemming Jensen, Jörg Hübner, Henri JansenTechnical University of Denmark, Kongens Lyngby, Denmark

66

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC – Devices & MEMS

PC02Impact of Roughness of TiN bottom electrode on the forming voltage of HfO2 based Resistive MemoriesChristelle Charpin-Nicolle1, Marceline Bonvalot2, Romain Sommer1, Alain Persico1, Maryline Cordeau1, Samia Belahcen2, Brice Eychenne2, Philippe Blaise1, Sébastien Martinie1, Sophie Bernasconi1, Eric Jalaguier1, Etienne Nowak1

1CEA-LETI, 2CNRS-LTMI

PC04Effects of Negative Bias Stress on Electrical Characteristics of 4H-SiC MOSFETsHojun Lee1, Taeeun Kim1, Ogyun Seok2, Jeong Hyun Moon2, Wook Bahng2, Dong-Won Kang3, Yong-Sang Kim4, Min-Woo Ha1

1Department of Electrical Engineering, Myongji University, 2Korea Electrotechnology Research Institute, 3Department of Energy Systems Engineering Chungang University, 4Department of Electrical and Computer Engineering, Sungkyunkwan University

PC08Wet Etching of ZnO thin films for Transparent Electronic NetworkBen Daniel Rowlinson1, Nor Azlin Ghazali2, Joshua Akrofi1, Wira Sinuraya1, Martin Ebert1, Jamie Dean Reynolds1, Harold M H Chong1

1University of Southampton, 2Universiti Sains Malaysia

PC10Metallization technique for drain/ source electrodes for complementary organic and ZnO nanoparticle inverter circuitsJulia Reker1, Thorsten Meyers1, Fábio F. Vidor2, Ulrich Hilleringmann1

1Paderborn University, 2Universidade Federal do Rio Grande do Sul

PC12Improved NBIS of IGZO TFTs by Novel Fluorine Doping TechniqueKyung-Mo Jung, Jongsu Oh, Kyung Rae Kim, Yong-Sang KimDepartment Of Electrical And Computer Engineering, Sungkyunkwan University

PC14Synaptic properties of HfOx and TaOy-based resistive switching multilayer devicesDionisis Sakellaropoulos, Panagiotis Bousoulas, Georgios Nikas, Dimitris TsoukalasDepartment of Applied Physics, National Technical University of Athens

PC16Defect incorporation techniques for oxide-based memristive devicesAlexander Rogozhin1, Andrey Miakonkikh1, Olga Permyakova1,2, Konstantin Rudenko1

1Valiev Institute of Physics and Technology of Russian Academy of Sciences, 2Moscow Institute of Physics and Technology

PC – Devices & MEMS

PC01Analysis on the Effect of Flake thickness on Photocurrent Efficiency and Photoresponsivity of ReS2 Field-effect TransistorsJi-Hoon Shon, Young-Sun Moon, Soo-Jin Kim, Gyu-Tae KimKorea University

PC03Design of multi-layer single-electron circuit mimicking behavior of bubble film for solving Steiner tree problem Nobuhiko Kurata, Takahide OyaGraduate School Of Engineering Science, Yokohama National University

PC05Suppression of E-field crowding in gate oxide of 1.2 kV SiC trench MOSFETs using double p-base structureOgyun Seok1, Min-Woo Ha2, In Ho Kang1, Hyoung Woo Kim1, Wook Bahng1

1Korea Electrotechnology Research Institute, 2Department of Electrical Engineering, Myongji University

PC07Performance Improvement of Ge pFinFETs by Post-Fin-Fabrication AnnealingWataru Mizubayashi1, Hiroshi Oka1, Takahiro Mori1, Yuki Ishikawa1, Seiiji Samukawa2, Kazuhiko Endo1

1AIST, 2Tohoku Univ.

PC09Electrical characterisation of Sm-, Nb-co-doped TiO2 thin films Mariko Murayama1,2, Iain Crowe2, Simon Hammersley2, Vladimir Markevich2, Matthew Halsall2, Anthony Peaker2, Kenji Sato1, Shogo Iwana1, Keita Shiraishi1, Shuji Komuro3, Masashi Ishii4, Xinwei Zhao1

1Tokyo University Of Science, 2Photon Science Institute and School of Electrical and Electronic Engineering, University of Manchester, 3Faculty of Science and Engineering, Toyo University, Saitama, 4National Institute for Materials Science (NIMS)

PC13Ferromagnetic/Ferroelectric heterojunction-induced modulation of magnetic properties of artificial magnetsAkinobu Yamaguchi1, Ryo Nakamura1, Shunya Saegusa1, Keisuke Yamada2, Tsunemasa Saiki3, Aiko Nakao1, Yuichi Utsumi1, Takeshi Ogasawara4, Masaki Oura5, Takuo Ohkouchi61University Of Hyogo, 2Gifu University, 3Hyogo Prefectural Institute of Technology, 4 National Institute of Advanced Industrial Science and Technology, 5RIKEN, 6Japan Synchrotron Radiation Research Institute

PC15Fabrication and Characterization of Reconfigurable Field Effect TransistorsBilal Khan1,2, Slawomir Prucnal1, René Hübner1, Artur Erbe1, Yordan M. Georgiev1,3

1Institute Of Ion Beam Physics And Materials Research, HZDR, 2International Helmholtz Research School for Nanoelectronic Network, HZDR, 3Institute of Electronics at Bulgarian Academy of Sciences, 72, Tsarigradsko chausse blvd.

67


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC18Experimental and modeling study of FinHEMT transistors based on AlN/GaN/AlN heterostructureGeorge Doundoulakis1,2, Adam Adikimenakis1,2, Antonios Stavrinidis2, Katerina Tsagaraki2, Maria Androulidaki2, George Deligeorgis2, George Konstantinidis2, Alexandros Georgakilas1,2

1Department of Physics, University of Crete, 2Institute of Electronic Structure and Laser (IESL), Foundation for Research and Technology-Hellas (FORTH)

PC20Improving Stability of Zinc Oxide Nanowire Field Effect Transistors Operating in High Ionic Phosphate Buffered SolutionJoshua Akrofi, Martin Ebert, Jamie Reynolds, Kai Sun, Ruoyo Hu, Maurits de Planque, Harold Chong1University of Southampton

PC24Electromigration for memristive devicesJoseph Lombardo1, Simon Collienne1, Adrien Petrillo1, Emile Fourneau2, Ngoc Duy Nguyen2, Alejandro V. Silhanek1

1Experimental Physics of Nanostructured Materials, Q-MAT, CESAM, University de Liège, 2Solid State Physics - Interfaces and Nanostructures, Q-MAT, CESAM, Université de Liège

PC26Hot Electron Nanoscopy and spectroscopy (HENs): from probe design to real applications Bruno Torre, Andrea Giugni, Marco Allione, Xinyu Zhang, Enzo Di FabrizioKing Abdullah University Of Science and Technology

PC28Grating integration technologies for edge emitting AlGaAs diode lasersOlaf Brox, Jörg Fricke, Hans Wenzel, Pietro Della Casa, Andre Maaßdorf, Markus Weyers, Mathias Matalla, Andrea KniggeFerdinand-Braun-Institut, Leibniz-institut für Höchstfrequenztechnik

PC30Experimental and numerical investigation of biosensors plasmonic substrates induced by different fabrication techniques, e-beam, soft and hard UV-NILJean-Francois Bryche1,2,3, Frédéric Hamouda2, Mondher Besbes3, Philippe Gogol2, Julien Moreau3, Marc Lamy de la Chapelle4, Michael Canva1, Bernard Bartenlian2

1Laboratoire Nanotechnologies Nanosystèmes; CNRS, Université de Sherbrooke, 2Centre de Nanosciences et de Nanotechnologies; CNRS, Université Paris-Sud, Université Paris-Saclay, 3Laboratoire Charles Fabry, IOGS, CNRS, Université Paris-Sud, Université Paris-Saclay, 4Institut des Molécules et Matériaux du Mans; CNRS, Université Le Mans

PC17Hydrothermally-developed ZnO pn-homojunctions on Si for optoelectronic applicationsEleni Makarona, George PapageorgiouInstitute Of Nanoscience And Nanotechnology, Ncsr “demokritos”

PC19Photogating-based position-sensitive detectors with organic semiconductors Wei Jin, Zhi-Jun Qiu, Chunxiao Cong, Ran Liu, Laigui HuFudan University

PC21Red colored electrochromic device Juhee Song, Hojun Ryu, JiSu Han, Tae-Youb Kim, Chihun Sung, Seong M. Cho, Sujung Kim, Chi-Sun Hwang, Chil Seong AhElectronics and Telecommunications Research Institute

PC23Electrochemical Deposition as a Tool for Fabrication of Organic and Hybrid PhotovoltaicsOuacef Charfi1,3, Markus Frericks2,4, Marko Cehovski1,3, Hans-Hermann Johannes1,3, Wolfgang Kowalsky1,3,4

1Technische Universität Braunschweig, Institut für Hochfrequenztechnik, 2Technische Universität Darmstadt, Materials Science Department, Surface Science Division, 3Cluster of Excellence PhoenixD (Photonics, Optics, and Engineering – Innovation Across Disciplines), 4InnovationLab GmbH

PC25Fabrication and evaluation of synaptic device with 2-D array of MnO2 nanoparticlesTakahiko Ban1, Yukiharu Uraoka2, Shin-ichi Yamamoto1

1Ryukokou University, 2Nara Institute of Science and Technology

PC27Fabrication of plasmonic circuits comprising waveguides, multiplexer, demultiplexer, and detector-integrated MOSFETsMitsuo Fukuda, Yuta Tonooka, Tomohiro Hirano, Masashi Ota, Yasuhiko IshikawaToyohashi University Of Technology

PC29A long-range plasmonic waveguide with integrated reflector for perpendicular optical interconnect applicationsLaurent Markey, Christian Vernoux, Jean-Claude Weeber, Kamal Hammani, Juan Arocas, Alain DereuxLaboratoire Interdisciplinaire Carnot de Bourgogne

PC31Fabrication of Void-free Ternary Chalcogenide Microlens Arrays Using PDMS StampsHoa Xiong, Yunfan Shi, Qian Wang, Dong Wu, Liyang Pan, Zheyao WangTsinghua University/institute Of Microelectronics

68

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC32Generalized Two-Temperature Fitting Algorithm for Ultrashort Laser Heating of Metal Film and Nanoparticles to spatially and temporally study heat propagationPaul Bresson1,2,3, Jean-françois Bryche1,2, Julien Moreau3, Mondher Besbes3, Paul-Ludovic Karsenti1,2, Denis Morris1,2, Paul Charette1,2, Michael Canva1,2

1Laboratoire Nanotechnologies Nanosystèmes; CNRS, Université de Sherbrooke, 2Institut Interdisciplinaire d’Innovations Technologiques 3IT, 3Laboratoire Charles Fabry, IOGS, CNRS, Université Paris-Sud, Université Paris-Saclay

PC34Refractometric Sensing Using Gradient Plasmonic Nanostructures: Mapping Spectral Information to Spatial PatternsSiyi Min1,2, Shijie Li1, Zhouyang Zhu1, Chuwei Liang1, Jingxuan Cai1, Xing Cheng2, Wen-Di Li11Department of Mechanical Engineering, The University of Hong Kong, 2Department of Materials Science and Engineering, Southern University of Science and Technology

PC36Filament-doped thin film electrodes for high-efficiency light-emitting and detecting devices Tae Geun Kim, Tae Ho Lee, Yong Woon KimKorea University

PC38Silicon nitride nanoantennas for wireless on-chip optical networksTiziana Stomeo1, Andrea Toma2, Antonio Qualtieri1, Giovanna Calò3, Badrul Alam3, Vincenzo Petruzzelli3, Gaetano Bellanca4, Ali Emre Kaplan4, Massimo De Vittorio1,5

1CBN - Istituto Italiano Di Tecnologia, 2Istituto Italiano di Tecnologia, 3Politecnico di Bari, 4Dipartimento di Ingegneria, Università di Ferrara, 5Dipartimento Ingegneria dell’Innovazione, Università del Salento

PC42Reversed electrochromic device with blue color in neutral states Chil Seong Ah, Juhee Song, Hojun Ryu, Tae-Youb Kim, Seong M. Cho, Sujung Kim, Sanghoon Cheon, Joo Yeon Kim, Chi-Sun Hwang1Electronics And Telecommunications Research Institute (ETRI)

PC44Structured light with angular momentum for excitation of near field hot spotsMarco Allione, Andrea Giugni, Bruno Torre, Enzo Di FabrizioPhysical Science and Engineering Division, KAUST

PC46Principles for selecting quantum dots with high intrinsic quantum efficiencySøren StobbeDepartment Of Photonics Engineering, Technical University Of Denmark

PC33Nanofabrication of fan-shaped photonic crystal spectrometers with ultrahigh resolution in SOI for the infrared rangeBo Feng, Xunya Jiang, Yifang ChenFudan University

PC37Fabrication of metallo-dielectric metamaterials integrating nano-imprinted PMMA pillarsTiziana Stomeo1, Armando Casolino2, Francesco Guido1, Antonio Qualtieri1, Michael Scalora3, Antonella D’Orazio2, Marco Grande2, Massimo De Vittorio1,4

1CBN - Istituto Italiano Di Tecnologia, 2Politecnico Di Bari, 3Charles M. Bowden Research Center, REDCOM, 4Università del Salento

PC39An 1800 nm microcavity semiconductor laserFangyuan Meng1,2,3, Hongyan Yu1,2,3, Xuliang Zhou1,2,3, Yajie Li1,2,3, Pengfei Wang1,2,3, Wenyu Yang1,2,3, Guangzhen Luo1,2,3, Weixi Chen1, Jiaoqing Pan1,2,3

1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Science, 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, 3Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices

PC41Fabrication of SU-8 thick microstructures and integrated optics fabrication by e-beam lithographyLuca Businaro, Francesca Romana Bertani, Adele De Ninno, Giorgio Pettinari, Francesco Martini, Annamaria GerardinoCNR-IFN, Institute for Photonics and Nanotechnologies

PC43Electrochromic window based on the polymer substrate with long term stability for smart auto-vehicle applicationHojun Ryu, Chi-Seong Ah, Ju-Hee Song, Sang-Hoon CheonETRI

PC45Highly efficient surface micromachined infrared absorber with dual-band characteristic for thermoelectric radiation sensors A. Ihring, G. Zieger, P. Lorenz, S. Stanca, F. Haenschke, D. Blaschke, H. SchmidtLeibniz Institute of Photonic Technology

PC47Photothermal analysis of direct-write gold nanostructures – How purity and conductivity affect the plasmonic properties?Mostafa Moonir Shawrav1, Miao-Hsuan Chien1, Zubair Buch1, Philipp Taus, Heinz D. Wanzenboeck2, Silvan Schmid1

1Micro and Nanostensors, Institute of Sensors & Actuatr Systems, TU Wien, 2Institute of Solid State Electronics, TU Wien

69


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC48Ultrashort-pulse laser dicing of Glass-Phosphor-glass sheetsSandra Stroj1, Giovanni Piredda1, Wolfgang Plank2, Martin Muendlein2, Matthias Domke1

1Vorarlberg University of Applied Sciences / Research Center for Microtechnology, 2ESCATEC Switzerland AG

PC50Ce:Y3Al5O12 phosphor / polymer nanocomposite coatings on microstructures and micromachines by pulsed laser depositionE. Bagiokis1, K. Papachristopoulou1, V. Karoutsos1, A. Lorusso2, Yongzheng Fang3, Jingshan Hou3, Yufeng Liu3, A. Perrone2, Nikolaos Vainos1

1University Of Patras, Dept Materials Science, 2Dipartimento di Matematica e Fisica “E. De Giorgi”, Università del Salento & Istituto Nazionale di Fisica Nucleare, 3School of Materials Science and Engineering, Shanghai Institute of Technology

PC52Computer generated plasmonic holographic structures for toxin sensingNikolaos Vainos1, E. Bagiokis1, K. Papachristopoulou1, J. Jermann1, E. Smyrnioti1, C. Stathopoulos2, D. Papaioannou3

1University Of Patras, Dept Materials Science, 2University of Patras, Department of Medicine, 3University of Patras, Department of Chemistry

PC54Nano-photonic structures for a silicon optical phased array capable of wide-angle and highly-efficient beam-forming operationJong-Bum You1, Dong-Eun Yoo1, Dong-Wook Lee1, Young Su Kim1, Kyoungsik Yu2, Hyo-Hoon Park2

1National NanoFab Center, 2KAIST

PC56Ultra miniaturized InterDigitated Electrodes as a platform for sensing applicationsZ. Wang1, A. Syed1, S. Bhattacharya1, X. Chen1, U. Buttner1, G. Ioardache1, K. Salama2, E. Valamontes2, P. Oikonomou3, I. Raptis1,3, A. Botsialas3, M. Sanopoulou3

1Nanofabrication Core Labs, KAUST, 2Dept. Electrical & Electronics Eng., University of West Attica, 3Institute of Nanoscience & Nanotechnology, NCSR ‘Demokritos’

PC58Flow sensor and stent integration for evaluating in-situ breathing property at airway in experimental animalHayato Noma1, Yoshihiro Hasegawa1, Kazuhiro Taniguchi1, Miyoko Matsushima2, Tsutomu Kawabe2, Mitsuhiro Shikida1

1Hiroshima City University, 2Nagoya University

PC60Integration of carbon nanotube-based sensors to a flip-chip package for micro-strain detection in microelectronic packageJulien Pezard1, Yosri Ayadi1, Adham Elshaer1, Eric Duchesne2, Hélène Frémont3, Dominique Drouin1

13IT, Universite de Sherbrooke, Sherbrooke, J1K 2R1, QC, Canada, 2IBM Canada Ltd, 23 boul. de l’Aéroport, Bromont, J2L 1A3, QC, Canada, 3IMS, Université Bordeaux, 351, cours de La Libération 33405 Talence cedex, FRANCE

PC49Rapid and precise wavelength determination approach based on visually patterned integrated narrow bandpass filtersZhiyi Xuan1,2,3, Ying Zhi1,3, Yi Zhang1,3, Shaowei Wang1, Wei Lu1,2,3

1State Key Laboratory Of Infrared Physics, Shanghai Institute Of Technical Physics, Chinese Academy Of Sciences, 2School of Physical Science and Technology, ShanghaiTech University, 3Shanghai Engineering Research Center of Energy-Saving Coatings

PC51Performance of white-light Ce:Y3Al5O12 composite emitters for visible light optical communicationsTh. Kamalakis1, D. Alexandropoulos2, Yongzheng Fang3, Yufeng Liu3, S. Couris4, Jingshan Hou3, Nikolaos Vainos1

1Harokopio University of Athens,Department of Informatics and Telematics, 2University Of Patras, Dept Materials Science, 3School of Materials Science and Engineering, Shanghai Institute of Technology, 4University of Patras, Department of Physics

PC53Transferrable dielectric DBR membranes for versatile GaN-based polariton and VCSEL technologyEmmanouil Amargianitakis1,2, Stelios Kazazis2,3, George Doundoulakis2,3, George Stavrinidis2, George Konstantinidis2, Eric Delamadeleine4, Eva Monroy4, Nikolaos Pelekanos1,2

1Department of Materials Science and Technology, University Of Crete, 2Microelectronics Research Group, IESL-FORTH, 3Department of Physics, University of Crete, 4Université Grenoble-Alpes, CEA, INAC-PHELIQS

PC55Transition metal-based 2D MXenes thin films for plasmonic photodetectionDhinesh Babu Velusamy, Jehad K. El-Demellawi, Ahmed M. El-Zohry, Andrea Giugni, Sergei Lopatin, Mohamed N. Hedhili, Ahmed E. Mansour, Enzo Di Fabrizio, Omar F. Mohammed, Husam N. AlshareefKaust - King Abdullah University Of Science and Technology

PC57A novel contact-enhanced low-g inertial switch with low-stiffness fixed electrodeKe Zhai, Liqun Du, Min Han, Weitai Wang, Ming ZhaoDalian University of Technology

PC59Processing of piezotronic microstrain sensors on flexible substratesStéphanie Girod1, Raoul Joly1,2, Noureddine Adjeroud1, Kevin Menguelti1, Mohamed El Hachemi1, Patrick Grysan1, Sébastien Klein1, Jérôme Polesel11Luxembourg Institute of Science and Technology, 2University of Luxembourg

PC61Ultra-high sensitive humidity detection using surface enhanced microcantileversS. Balasubramanian, K. Prabakar, S. R. PolakiIndira Gandhi Centre for Atomic Research

70

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC62A thermal flow sensor and its signal processing circuit integration onto flexible copper on polyimide substrateAyami Kato1, Iori Fujitsuna1, Yoshihiro Hasegawa1, Kazuhiro Taniguchi1, Miyoko Matsushima2, Tsutomu Kawabe2, Mitsuhiro Shikida1


PC64Design and performance analysis of a microgravity accelerometer with quasi-zero stiffness characteristic Yuxing Duan1, Xueyong Wei1,2, Minghui Zhao1, Ziming Ren1, Huiying Zhao1, Juan Ren2

1Xi’an Jiaotong University, 2Chang’an University

PC66Piezoresistive strain sensors based on aqueous dispersion of graphene nanoplatelets Vasiliki Tsouti, Vasiliki Kekou, Meropi Sanopoulou, Stavros ChatzandroulisNCSR Demokritos

PC68Ceramic membrane based integrated systems for power generation and sensingNerea Alayo1, Marco Bianchini1, Francesco Chiabrera1, Iñigo Garbayo1, Marc Salleras3, Luis Fonseca3, Albert Tarancón1,2

1Irec, 2ICREA, 3IMB-CNM (CSIC)

PC70A 3D Printed Thermal Flow Sensor for Spirometry ApplicationsTzoulian Koutsis, Alexios Psyrris, Grigoris KaltsasmicroSENSES Laboratory, Department of Electrical and Electronic Engineering, University of West Attica

PC72Transparent Piezoelectric Ultrasonic Transducer for Optical Registered Photoacoustic ImagingYa-Han Liu, Fu-Sung Lin, Li-Xiang Chen, Yeong-Her Wang, Chih-Hsien HuangNational Cheng Kung University

PC74An approach for nanostructuring of piezoelectric materials by template-assisted growth in porous aluminium oxideTsvetozar Tsanev1, Maryia Aleksandrova1, Boriana Tzaneva2, Valentin Videkov1

1Technical University of Sofia, Department Of Microelectronics, 2Technical University of Sofia, Department of Chemistry

PC76Ionic insulating polymer embedded light harvester for morphological control of perovskite solar cellsSeojun Lee1, Saemon Yoon1, Jun Ryu1, Min-Woo Ha2, Yong-Sang Kim3, Dong-Won Kang1

1Chung-Ang University, 2Myongji University, 3Sungkyunkwan University

PC63Nanomaterial based Flow-sensor for easy microfluidic chip integration Evangelos Skotadis1, Lampros Patsiouras1, Emmanouil Kousoulas Artouro Vargkas1, Evangelos Aslanidis1, Georgia Kaprou2, Angeliki Tserepi2, Dimitris Tsoukalas1

1National Technical University of Athens, 2Institute of Nanoscience and Nanotechnology, NCSR Demokritos

PC65Thermal flow sensor operated under 40 degrees Celsius for controlling small dosing rate in drip infusion systemChihiro Shimohira1, Yoshihiro Hasegawa1, Kazuhiro Taniguchi1, Miyoko Matsushima2, Tsutomu Kawabe2, Mitsuhiro Shikida1


PC67Mode-Matched Single-Crystal Lithium Niobate Disk Resonator for High-Performance GyroscopeKazutaka Obitani1, Toshiyuki Tsuchiya1, Kazutaka Araya2, Masanori Yachi31Department of Microengineering, Kyoto University, 2TAMAGAWA SEIKI Co., Ltd., 3TAMAGAWA MOBILE EQUIPMENT Co., Ltd.

PC69A Highly Sensitive Pressure Sensor Based on Carbon Nanotubes and Polymer CompositeTallis H. da Costa, Jin-Woo ChoiLouisiana State University

PC71Electrochemical hydrogen sensors with wide detection ranges for hydrogen fuel cell vehicle applicationSoon-Won Jung, Yoon-Ee Jo, Ms Hye Ryun Yoon, Seung-Yun LeeHanbat National University

PC73Polymeric seed layer as a simple approach for nanostructuring of Ga-doped ZnO films for flexible piezoelectric energy harvesting Mariya AleksandrovaTechnical University Of Sofia, Department Of Microelectronics

PC75A novel polymer super capacitor with high aspect ratio 3D printed sub-millimetres structuresGiorgio Scordo1, Valentina Bertana1, Pietro Zaccagnini1,2, Alberto Scalia1, Andrea Lamberti1,2, Stefano Romano1, Luigi Simone Marasso1,3, Carmelo Nicosia1, Luciano Scaltrito1, Sergio Ferrero1, Fabrizio Pirri1,2, Matteo Cocuzza1,3

1Politecnico di Torino, 2Istituto Italiano di Tecnologia, 3CNR-IMEM

PC77Fabrication of CIGS micro-concentrator solar cell devices Pedro Anacleto1, D. Siopa2, P.J. Dale2, S. Sadewasser1

1INL - Iberian International Nanotecnology Laboratory, 2 Physics and Materials Science Research Unit, Belvaux

71


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC78Nanoimprint Lithography for the Creation of Solar Thermal AbsorbersTina Mitteramskogler1, Michael J Haslinger1, Ambiörn Wennberg2, Iván F Martínez2, Michael Muehlberger1, Matthias Krause3, Elena Guillén1

1Profactor GmbH, 2Nano4Energy SL, 3Helmholtz-Zentrum Dresden-Rossendorf e.V.

PC80Nanostructured passivation layers for improved efficiency of CIGS solar cellsPedro Anacleto1, E. Edoff2, W-C. Chen2, P.J. Bolt3, W. van Boekel3, J. van Deelen3, Y. Zhou4, S. Sadewasser1

1INL - Iberian International Nanotecnology Laboratory, 2Uppsala University, dep. Engineering Sciences, Uppsala , 3TNO, 4 Obducat AB

PC82Demonstration of high temperature solid oxide fuel cell element based on nanohomogeneous yttria-stabilized zirconia microtubesAndreas Nõlvak1, Alexander Vanetsev1,2, Gunnar Nurk3, Aile Tamm1, Glen Kelp1, Tanel Tätte1

1Institute of Physics, University οf Tartu, 2Prokhorov General Physics Institute, 3Institute of Chemistry, University of Tartu

PC84Surface modification of triboelectric nanogenerators with ZnO nanoparticlesVasiliki Prifti, Achilleas Bardakas, Ariadni P. Kerasidou, Christos TsamisInst. of Nanoscience and Nanotechnology, NCSR “Demokritos”

PC86A micro-structured micro capacitor on Si substrate having large capacitance for an integrated energy harvesterHiroki Kuwano, V. Krikscikas, A. Sekiguchi, H. OguchiTohoku University

PC88Tuning of imprinting stamps for the fabrication of nano-electrodes for electrochemical CO2 reductionMatthias Golibrzuch, Thomas Maier, Katharina Krischer, Markus BechererTechnical University of Munich

PC90One-Day Fast-Prototyping Process for Functionalized Membrane Array on Flexible SubstrateThibault P. Delhaye1, Chang Ge2, Laurent A. Francis1, Edmond Cretu2, Denis Flandre1

1ICTEAM, 2ECE

PC92Beat-to-beat pulse wave velocity estimation by soft and flexible Aluminium Nitride based piezoelectric sensorLara Natta1, Vincenzo Mariano Mastronardi1, Prospero Lombardi3, Francesco Guido1,4, Luciana Algieri1,4, Francesco Ciccirillo5, Giuseppe Colonna5, Marco Di Rienzo3, Antonio Qualtieri1, Massimo De Vittorio1,2

1Istituto Italiano Di Tecnologia, 2Università del Salento, 3IRCCS Fondazione Don Carlo Gnocchi, 4Piezoskin S.r.l., 5Department of interventional cardiology and hemodynamics, “V. Fazzi” hospital

PC81Development of a novel low frequency magnetic eccentric pendulum vibration energy harvester for wireless oceanic nodesShaoxuan Zhong1,2, Jiamu Cao1,2, Junyu Chen1, Jing Zhou1, Luwen Zhang1, Junfeng Liu1

1MEMS Center, Harbin Institute of Technology, Harbin 150001, China, 2Key Laboratory of Micro-systems and Micro-Structures Manufacturing, Ministry of Education, Harbin 150001, China

PC83Influence of bi-functional catalyst nanostructures morphology on performances for rechargeable zinc-air batteryChun-I Lee1, Wen Sheng Chang2

1National Kaohsiung University of Science And Technology, 2Industrial Technology Research Institute

PC87Analysis on vertically aligned ZnO Nanorods as composite mechanical springs for an elastic and steady piezoelectric behavior at multiple frequenciesOscar Gilberto Súchil Pérez, Selene Capula Colindres, Adrian Martinez Rivas, Marco Antonio Ramírez SalinasComputing Research Center CIC-IPN

PC89Shunt resistance effects in GaAs/InGaAs core-shell nanowire solar cellsMaria Androulidaki1, Emmanouil Manidakis1,2, Eleftheria Darivianaki2, Zacharias Hatzopoulos2, Siew-Li Tan3,4, Nikos Pelekanos1,2

1FORTH/IESL, 2University of Crete, 3Universite Grenoble-Alpes, 4National University of Singapore

PC91Development of novel hydrogels using single-walled carbon nanotubes and phthalocyanine derivativesRyota Arakaki, Takahide OyaGraduate School of Engineering Science, Yokohama National University

PC93Investigation of laser-ablated flexible graphene film forming temperature sensorsZhao-Chi Chen, Tien-li Chang, Pin-Chun Lin, Jing-Yi YangDepartment of Mechatronic Engineering, National Taiwan Normal University

PC95Polyester Textile Based Graphene Pressure SensorXiaoming Wu1,2, Yifang Yang1, Tianling Ren1,2

1Tsinghua University, 2Beijing National Research Center for Information Science and Technology

72

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC94Accumulated fluence methodology for selective metallic thin-film ablation from susceptible polymer substrate using femtosecond laser pulsesChresten von der Heide, Andreas DietzelTU Braunschweig - Institute Of Microtechnology

PC96Fabrication of stretchable supercapacitor using MnO2 nanoparticles and carbon nanotube on textileTae Gwang Yun, Seungmin Hyun, Chang Soo WooKorea Institute Of Machinery and Materials

PC98Flash reduction of graphene oxide as cost effective fabrication technique for flexible micro-supercapacitors Seok Hun KangElectronics and Telecommunications Research Institute

PC100Aiming to improve gate controllability of paper transistors using carbon-nanotube-composite papers by using ionic liquidRyuji Iijima, Takahide OyaGraduate School of Engineering Sciense, Yokohama National University

PC104Fabrication of Nanopatterned PVDF-HFP Film Based Flexible Pressure SensorsJueun Kim, Hyungjun Lim, Jaejong LeeKorea Institute of Machinery & Materials (KIMM)

PC108Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable ComponentsKyotaro Nitta1, Haochun Tang1, Chun-Yi Chen1, Tso-Fu Mark Chang1, Daisuke Yamane1, Shinichi Iida2, Katsuyuki Machida1, Hiroyuki Ito1, Kazuya Masu1, Masato Sone1

1Tokyo Institute of Technology, 2 NTT Advanced Technology Corporation

PC110Polyimide foils with Au conductor traces for subretinal implants with long-term stability comparable to LCPRalf Rudorf2, Anna Drzyzga2, Martin Kokelmann2, Claus J. Burkhardt1, Alfred Stett2

1NMI Reutlingen, 2Retina Implant AG

PC112Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS ApplicationHitomi Watanabe1, Masato Sone1, Tso-Fu Mark Chang1, Chun-yi Chen1, Shinichi Iida2, Daisuke Yamane1, Hiroyuki Ito1, Katsuyuki Machida1, Kazuya Masu1

1Tokyo Institute of Technology, 2NTT Advanced Technology Corporation

PC97Fabrication of a Flexible Meander Antenna for Saw Remote Sensing ApplicationsLeonardo Lamanna1,2, Luigi Piro1,2, Ilaria Marasco3, Giovanni Niro3, Francesco Guido1, Luciana Algieri1, Vincenzo M. Mastronardi1, Antonio Qualtieri1, Francesco Rizzi1, Massimo De Vittorio1,2, Antonella D’Orazio3, Marco Grande3

1Center for Bio-Molecular Nanotechnologies, Istituto Italiano di Tecnologia, 2Dipartimento di Ingegneria dell’Innovazione, Università del Salento, 3Dipartimento di Ingegneria Elettrica e dell’Informazione, Politecnico di Bari

PC99Ni-P/PET Fiber Prepared by Supercritical CO2 Catalyzation for Wearable Device ApplicationsKenichi Tokuoka1, Wan-Ting Chiu3, Chun-Yi Chen1, Tso-Fu Mark Chang1, Akiko Saji2, Hiromichi Kurosu2, Masato Sone1

1Tokyo Institute Of Technology, 2Nara Women’s University, 3The University of Tokyo

PC101Copper micro-electrode fabrication using laser printing and laser sintering processes for on-chip antennas on flexible integrated circuitsO. Koritsoglou1, I. Theodorakos1, F. Zacharatos1, M. Makrygianni1, D. Kariyapperuma2, R. Price2, B. Cobb2, S. Melamed3, A. Kabla3, F. de la Vega3, I. Zergioti11National Technical University of Athens, Physics Department, 2PragmatIC, 3PV Nano Cell Ltd

PC103The Flexible/Stretchable Interconnection and TFT for AM Micro LED DisplayJae Bon Koo, Chan Woo Park, Jong-Heon Yang, Sung-Haeng ChoElectronics and Telecommunications Research Institute (ETRI)

PC107Ultrafast Laser Ablation of Flexible Graphene Micro-Heater for Wearable ApplicationChien-ping Wang1, Ming-Hong Xiao1, Tien-Li Chang2

1Department of Mechanical Engineering, National Taipei University of Technology, 2Department of Mechatronic Engineering, National Taiwan Normal University

PC111An integrated fabrication method of micro RF coaxial transmitter on metal substrate combining positive and negative photoresist processesLiqun Du1, Min Han2, Ming Zhao1, Chengquan Du1

1School of Mechanical Engineering, Dalian University of Technology, 2Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology

73


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC114High Efficient and Cost Effective Hybrid Aluminium Nitride Substrates for Power LED ModulesChien-ping Wang1, Yuan-Chun Huang2, Hao-Qi Liu1

1Department of Mechanical Engineering, National Taipei University of Technology, 2Department of Mechanical Engineering, Chung Yuan Christian University

PC116A Novel High-performance RF-MEMS Resonator with Multiple Mode GenerationsZeji Chen1,2,3, Xiao Kan1,2,3, Tianyun Wang1,2,3, Quan Yuan1,2, Jinling Yang1,2,3, Fuhua Yang1,2,3

1Institute of Semiconductors, Chinese Academy of Sciences, 2University of Chinese Academy of Sciences, 3State Key Laboratory of Transducer Technology

PC1183D tactile microprobe with isotropic kinematics for industrial micro metrologyDavid Metz1, Stephan Jantzen2, Karin Kniel2, Martin Stein2, Andreas Dietzel11Technische Universität Braunschweig, Intitute of Microtechnology, 2Physikalisch-Technische Bundesanstalt (PTB), Department of Coordinate Metrology

PC120Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS ApplicationsYu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato SoneInstitute of Innovative Research, Tokyo Institute Of Technology

PC122Self-Aligned, High Resolution Conductive Lines for Micro Heaters FabricationVito Matteo Di Pietro, H. M. Außerhuber, T. Mitteramskogler, P. Kulha, F. R. Tessarollo, M. MühlbergerProfactor Gmbh

PC124Dynamic performance of symmetric and asymmetric anti-spring structuresYang Gao, Hongcai Zhang, Zhuangde Jiang, Xueyong WeiXi’an Jiaotong University

PC126Fabrication and characterization of arrayed micro-structure with Ni film springs and photolithographed SU-8 micro-pins for Tactile Display DeviceKazuki Tuji1, Jiale Xu1, Konomu Abe2, Tomomi Shimizu2, Hiroyasu Hasegawa2, Takashi Mineta1

1Yamagata University, 2TokaiRika CO. LTD

PC113Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending TestKosuke Suzuki1, Masato Sone1, Ken Hashigata1, Chun-Yi Chen1, Takashi Nagoshi2, Tso-Fu Mark Chang1, Daisuke Yamane1, Hiroyuki Ito1, Katsuyuki Machida1, Kazuya Masu1, Keisuke Asano1

1Tokyo Institute of Technology, 2National Institute of Advanced Industrial Science and Technology

PC115Ultra-smooth Chip Scale Sensors for Adaptive Airfoil ControlJan Niklas Haus, Martin Schwerter, Marcel Gäding, Monika Leester-Schädel, Andreas DietzelTU Braunschweig, Institut für Mikrotechnik

PC117A facile method of direct stiffness measurement for AFM cantileversLukas Avilovas, J.M.R Weaver, P.S. DobsonThe University Of Glasgow

PC119In-situ TEM fatigue testing system for nanomaterials using an electrostatic actuatorYan Cui1, Yang Yang1,2, Meng Liu1, Tie Li1, Yuelin Wang1

1Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 2University of Chinese Academy of Sciences

PC121Design, Fabrication and Characterization of Piezoelectric Cantilever MEMS for Underwater ApplicationBasit Abdul1,2, Vincenzo Mariano Mastronardi1, Antonio Qualtieri1, Francesco Guido1, Luciana Algieri1, Francesco Rizzi1, Massimo De Vittorio1,2

1Center For Bio Molecular Nanotechnologies Lecce (Istituto Italiano di Tecnologia), 2University of Salento

PC123Frequency control of bifurcation in the electrically coupled micromechanical resonator Tian L2, Wei X1, Pu D1, Jiang Z1, Ren J3

1Xi’an Jiaotong University, Xi’an, China, 2Chongqing Technology and Business University, Chongqing, China, 3Chang’an University, Xi’an, China

PC125Adjustment method of MEMS dual-cantilever deflection using plastic deformation of metal thin film by thermal annealingMasaru Tanaka1,2, Y. Iijima1, Y. Masuda1, T. Sato1, T. Mineta1

1Graduate School of Science and Engineering, Yamagata University, 2National Institute Of Technology, Tsuruoka College

74

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC128Nonlinear Nanomechanical Mass Spectrometry at the Single-Nanoparticle LevelMert Yuksel1, Ezgi Orhan1, Cenk Yanik2, Atakan B. Ari1, Alper Demir4, Ahmet Hakan Karakurt1, Ramazan Tufan Erdogan1, M. Selim Hanay1,3

1Department of Mechanical Engineering, Bilkent University, 2Sabanci University SUNUM Nanotechnology Research Center, 3National Nanotechnology Research Center (UNAM), Bilkent University, 4Department of Electrical Engineering, Koc University

PC132Towards Fabrication of Functionalised Polymer membranesNadezda Prochukhan, Abbie Keegan, Michael A. MorrisTrinity College Dublin, University Of Dublin

PC134Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channelsYiyuan Zhao1, H.-W. Veltkamp1, T.V.P. Schut1, J. Groenesteijn2, M. J. de Boer1, R.J. Wiegerink1, J.C. Lotters1,2

1MESA+ Institute for Nanotechnology, University of Twente, 2Bronkhorst High-Tech BV

PC136Impedance spectroscopy of electrostatically driven MEMS resonatorsKrzysztof Kwoka1, Tomasz Piasecki1, Karolina Orłowska1, Paulina Szymanowska1, Andrzej Sierakowski2, Teodor Gotszalk1

1Wroclaw University of Technology, 2Insititute of Electron Technology

PC138New method of monitoring the intrinsic strain during electrochemical deposition process using rosette gaugeDjaffar Belharet1, Xavier Gabrion2, Anthony Courtot1, Laurent Robert1, Samuel Queste1, Gwenn Ulliac1

1MIMENTO, FEMTO-ST, 2DMA , FEMTO-ST

PC140INNOVATION-EL: The National Nanotechnology Infrastructure Network of GreeceVasisileios Kilikoglou1, Philomela Komninou3, Spyridon H. Anastasiadis2, Efstratios I. Kamitsos4, Dimitrios Tsoukalas5, Vassileios Bourganos6, Michail Karakasidis7, Eleni Makarona1, Mirto Holiastou8

1Institute of Nanoscience and Nanotechnology, NCSR Demokritos, 2Institute of Electronic Structure and Laser, Foundation for Research and Technology Hellas, 3Electron Microscopy Laboratory, School of Physics, Aristotle University of Thessaloniki, 4Theoretical and Physical Chemistry Institute, National Hellenic Research Foundation, 5School of Applied Mathematical and Physical Sciences, National Technical University of Athens, 6Institute of Chemical Engineering Sciences, Foundation for Research and Technology Hellas, 7Department of Materials Science & Engineering, School of Engineering, University of Ioannina, 8Hellenic Institute of Metrology

PC127Large scanning range optical phased array with a compact and simple optical antennaPengfei Wang1,2,3, Guangzhen Luo1,2,3, Yajie Li1,2,3, Wenyu Yang1,2,3, Hongyan Yu1,2,3, Xuliang Zhou1,2,3, Yejin Zhang1,2,3, Jiaoqing Pan1,2,3

1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, 3Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices

PC129Full Electrostatic Control of Nanomechanical BucklingSelcuk Oguz Erbil1, Utku Hatipoglu1, Cenk Yanık2, Mahyar Ghavami1, Atakan B. Arı1, Mert Yuksel1, Berke Demiralp1, Mehmet Selim Hanay1,3

1Bilkent University, Department of Mechanical Engineering, 2Sabanci University SUNUM Nanotechnology Research Center, 3Bilkent University National Nanotechnology Research Center (UNAM)

PC131Electromagnetical cantilevers for force spectroscopy Metrology-study of elecrothermal and electromagnectic actuation efficiencyBartosz Pruchnik1, Tomasz Piasecki1, Karolina Orłowska1, Wojciech Majstrzyk1, Andrzej Sierakowski2, Teodor Gotszalk1

1Faculty of Microsystem Electronics and Fotonics, Wrocław University Of Science And Technology, 2Institute of Electron Technology

PC133Parallel Tensile-mode Testing Of Single Crystal Silicon By Specimen Integrating Shear Strain Gauge Yuki Yamazaki, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu TabataKyoto University

PC135Novel Hybrid Silicon Microprobes for High-density Neural Activity RecordingAshley Novais, Carlos Calaza, João GasparInternational Nanotechnology Laboratory

PC137Fire smoke detection with quartz crystal microbalance (QCM) oscillation sensorSumi Yoon, Dong-ki Hong, Hye-Lim Kang, Won-Hyo Kim, Woo Kyeong Seong, Kook-Nyung LeeKorea Electronics Technology Institute(KETI)

PC139Thermally Activated Discharging Mechanisms in SiNx Films with Embedded CNTs for RF MEMS Capacitive SwitchesMatroni Koutsoureli1, George Stavrinidis2, Dimitrios Birmpiliotis1, George Konstantinidis2, George Papaioannou1

1Physics Department, University of Athens, 2IESL – FORTH

PC141Towards a Lab-on-Chip micro-calorimeter based on a fully-integrated CMOS-MEMS oscillatorRafel Perelló-Roig, Jaume Verd, Dr. Jaume SeguraGSE-UIB / Universitat de les Illes Balears

75


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PC142Large area Silicon-energy filters for ion implantationTamas Steinbach1, Constantin Csato2, Florian Krippendorf2, Florian Letzkus1, Michael Rüb2,3, Joachim Burghartz1

1Institut Für Mikroelektronik Stuttgart (IMS-CHIPS), 2mi2-factory GmbH, 3Ernst-Abbe-Hochschule Jena

PC144Improvement in IR absorption and thermal properties of a-Si based μ-bolometers by adopting the resistive hall-array patternTae Hyun Kim1, Jaeseob Oh1, Jongcheol Park1, Joo-Yun Jung2, Daewon Hong1, Hee Yeoun Kim1, Jong-Kwon Lee1

1National Nanofab Center, 2Korea Institute of Machinery and Materials

PC146micro-Coriolis mass flow sensor with improved flow sensitivity through modelling of the sensorThomas V. P. Schut1, Remco J. Wiegerink1, Joost C. Lötters1,2

1University of Twente, 2Bronkhorst High-tech BV

PC148A stochastic model with IoT gas detector based on AI-enabled technique for predicting particulate matters of 2.5 μm and 10 μmYa-Wei Lee1, Tien-Li Chang2

1National Defense University, 2National Taiwan Normal University

PC150Optimization of solder paste laser printing parameters for the assembly of electronic devicesMarina Makrygianni1, Elena Margariti1, Nikos Oikonomidis2, Christos Spandonidis2, Ioanna Zergioti11National Technical University of Athens, Physics Department, 2Prisma Electronics SA

PC152Electrical connection enhancement of conductive 3D printed parts based on PEDOT:PSS by metal platingValentina Bertana1, Giorgio Scordo1, Stefano Romano1, Carmelo Nicosia1, Simone Luigi Marasso1,2, Matteo Cocuzza1,2, Sergio Ferrero1, Candido Fabrizio Pirri1,3, Luciano Scaltrito1

1Chilab Laboratory, Department of Applied Science and Technology, Polito, 2CNR-IMEM, 3CSFT-IIT

PC154On-chip beta spectrometry with absorber-embedded radionuclidesPatryk Krzysteczko1, Michael Paulsen1, Lina Bockhorn2, Cornelia Aßmann1, Erik Bork1, Jörn Beyer1

1PTB, 2PTB

PC156Room-temperature direct bonding of LiTaO3 and SiC wafers for future SAW filterRyo Takigawa1, Jun Utsumi21Kyushu University, 2Mitsubishi Heavy Industries Machine Tool Co., Ltd

PC143Influence of the features deformation caused by cutting forces in micro end milling process for thin-walled copper electrode partsSeok Jae Ha1, Jeong Yeon Park1, Gil Sang Yoon1, Tae Sung Jung2

1Korea Institute of Industrial Technology, 2Inha Technical College

PC145Spectrum decomposition analysis of light-emitting diode with designed electrode and InGaN/GaN quantum wells as an active regionYohei Nishidate1, Irina Khmyrova1, Yulia Kholopova2, Anatoly Kovalchuk2, Valery Zemlyakov3, Ivan Maximov4, Sergei Shapoval21University οf Aizu, 2IMT RAS, 3NRUET, 4Lund University

PC147FEM simulation for 3D self-folding using thermoplastic reflow of polymer actuatorsRan Zhang, Andreas Richter, Robert KirchnerTechnische Universität Dresden

PC149A Novel Method for Depositing Patterned BCB using Spotter for Low Temperature Wafer Level BondingShruti Jain, Michal M. Mielnik, Sigurd T. MoeSINTEF Digital

PC151Au/Ti double-layered films for bonding and residual gas gettering in MEMS encapsulationYuichi Kurashima1, Takashi Matsumae1, Eiji Higurashi1, Shinya Yanagimachi1, Hideki Takagi1, Mr. Sudiyarmanto2, Eiichi Kondoh2

1National Institute of Advanced Industrial Science and Technology, 2University of Yamanashi

PC153Reactive Bonding by Integrated Nanostructured Al/Pd Multilayer Thin Film Systems for MEMS Packaging ApplicationsEl-mostafa Bourim, Il-Suk Kang, Hee Yeoun KimNational NanoFab Center, Department of Nanostructure Technology

PC155Basic study of position measurement system at tip of surgical forceps which is sensor fusion typeTomoki Nishino1, Hiroshi Tanigawa2, Yakichi Higo2, Takashi Furutsuka2, Kyoichi Deie3, Tetsuya Ishimaru4, Tadashi Iwanaka4

1Ritsumeikan University, 2The Research Organization of Science and Technology, Ritsumeikan University, 3Kitasato University Children’s Surgery, 4Saitama Children’s Medical Center Surgery

PC157Evidence of Cation Selective Nano-Sized Conducting Filament Formation in Resistive Switching Memories Dip Das, P. Johari, A. KanjilalShiv Nadar University

76

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PD – Lab-on-a-chip

PD02A nanofluidic concentrator integrating long vertical nanotrenchetched with an optimized ICP-RIE processSokhna Mery Ngom1, François-Damien Delapierre2, Stephane Guilet1, Edmond Cambril1, Fatima Florès-Galicia1, Jean Gamby1, Antoine Pallandre3, Isabelle Le Potier1, Anne-Marie Haghiri-Gosnet1

1C2N - CNRS - U-Psud, 2SPEC - CEA, 3LCP - CNRS-Université Paris-Sud

PD04Porous polymer coatings on SS microneedles (MNs) for glucose-responsive insulin deliveryAsad Ullah, Hye Jin Choi, Haroon Khan, Jin Ho Choi, Gyu Man KimKyungpook National University

PD06Investigation of Squeeze Flow Problem on a Nano-ScaleSandrien Verloy1,2, Han Gardeniers1, Gert Desmet2

1University of Twente, 2Vrije Universiteit Brussel

PD08Biomimetic membranes manipulation in microfluidics: towards on-chip micropipetteMarianne Elias1,2, Adrien Dutoya1, Adrian Laborde1, Aurelie Lecestre1, Costanza Montis2, Debora Berti2, Barbara Lonetti3, Clément Roux3, Pierre Joseph1

1LAAS-CNRS, Université de Toulouse, CNRS, UPS, 2CSGI and Department of Chemistry, University of Florence, 3IMRCP, Université de Toulouse, CNRS, UPS

PD10PID temperature control system based Microfluidic PCR chip for genetic analysisHyo Eun Kim1, Hang-Beum Shin2, Yong-Sang Kim1

1Department of Electrical and Computer Engineering, Sungkyunkwan University, 2Corporate R&D, LG Chem

PD12Rapid prototyping of a MEMS-based droplet dispenser using 3D printingAli Maziz1, Remi Courson1, Fabien Mesnilgrente1, Elodie Bidal2, Loic Leroy2, Neso Sojic3, Laurent Malaquin1, Thierry Leichle1

1LAAS-CNRS, 2INAC-SyMMES, 3ISM

PD14Open Microchannels filled with Nanoparticle InksTina Mitteramskogler, Vito Matteo Di Pietro, Helene Ausserhuber, Michael MuehlbergerProfactor Gmbh

PD16Parallel Ejection of pL-Droplets with Pneumatic Valve Integrated Micronozzle ArrayGaurav Pandey, Rohit Bhardwaj, Kentaro Tanagi, Azusa Kage, Takayuki Shibata, Moeto NagaiToyohashi University of Technology

PD – Lab-on-a-chip

PD01Fabrication of free-hanging tubes for a high flow micro Coriolis mass flow meterJarno Groenesteijn1, Meint de Boer2, Jack van Putten1, Wouter Sparreboom1, Joost Lotters1,2, Remco Wiegerink2

1Bronkhorst High-Tech BV, 2MESA+ Institute or Nanotechnology, University of Twente

PD03Performance of the electrochemical microactuator with a millisecond response timeIlia V. Uvarov1, Artem E. Melenev1, Mikhail V. Lokhanin2, Victor V. Naumov1, Vitaly V. Svetovoy3,4

1Valiev Institute Of Physics And Technology Of Russian Academy Of Sciences, Yaroslavl Branch, 2P.G. Demidov Yaroslavl State University, 3Zernike Institute for Advanced Materials, University of Groningen, 4A.N. Frumkin Institute of Physical Chemistry and Electrochemistry RAS

PD07Membrane integration for glass Organ-on-a-Chip systems using a reversible sealing techniqueEugen V. Koch, Andreas DietzelInstitute of Microtechnology, Tu Braunschweig

PD09Polymer supports for serial protein crystallography at X-ray free electron lasersCelestino Padeste1, Isabelle Martiel1, Agnieszka Karpik1,2, Per Magnus Kristiansen2,1

1Paul Scherrer Institut, 2FHNW University of Applied Sciences and Arts Northwestern Switzerland

PD11UV lithography based fabrication of SU-8 microneedles for drug delivery applicationsAjay Ap, Amitava DasGupta, Dhiman ChatterjeeIndian Institute of Technology Madras

PD13Femtosecond Laser structuring with online control of polarization for advanced and buried microfluidic structuresSven Meinen1,2, Jonathan Kottmeier1,2, Steffen Brinkmann1,2, Andreas Dietzel1,21Institute of Microtechnology, Technische Universität Braunschweig, 2Center of Pharmaceutical Engineering (PVZ), Technische Universität Braunschweig

PD15Soft X-Ray Compatible Liquid CellsAlokik Kanwal1, B. Robert Ilic1, Subhrangsu Mukherjee1, Eliot H. Gann1, Cheng Wang2, Isvar A. Cordova2, Dean DeLongchamp1, James Alexander Liddle1

1National Institute of Standards and Technology, 2 Lawrence Berkeley National Laboratory

PD19Compact platform for automated cell culture and stem cell differentiationGabriele Pitingolo1, Yong He1, Boxin Huang1, Li Wang2, Jian Shi2, Yong Chen1

1École Normale Supérieure-PSL Research University, Sorbonne Universités - UPMC Univ Paris 06, CNRS UMR 8640 PASTEUR, 2MesoBioTech

77


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PD18Open and Closed Microfluidic Wall Modifications and in-situ Reactions via a new Atmospheric Plasma ApparatusAngelos Zeniou1,2, Dionysia Kefallinou1, Nikos Vourdas1, Angeliki Tserepi1, Evangelos Gogolides1

1Institute of Nanoscience and Nanotechnology, National Center for Scientific Research Demokritos, 2Department of Physics, University of Patras

PD22Novel Thermoplastic Fluoroelastomer for Rapid Fabrication of Chemically Compatible Microdevices Alexander H. McMillan1,2, Maarten B.J. Roeffaers2, Sasha Cai Lesher-Perez1

1Elvesys Microfluidic Innovation Center, 2Department of Microbial and Molecular Systems, Centre for Surface Chemistry and Catalysis (COK), KU Leuven

PD26Fast and label-free procalcitonin determination with a White Light Reflectance Spectroscopy sensorDimitra Tsounidi1, Georgios Koukouvinos1, Dimitrios Goustouridis2, Ioannis Raptis2, Vassilios Tsaousis3, Chrysanthos Mitropoulos3, Sotirios Kakabakos1, Panagiota Petrou1

1NCSR Demokritos, 2ThetaMetrisis S.A., 3Medicon Hellas S.A.

PD28Magnetic design of multi-component nanoprobes for biomolecular diagnosticsHubert Brueckl1, Astrit Shoshi1, Michael J. Haslinger2, Tina Mitteramskogler2, Michael Muehlberger2, Joerg Schotter3, Stefan Schrittwieser3

1Department for Integrated Sensor Systems, Danube University Krems, 2PROFACTOR GmbH, 3AIT Austrian Institute of Technology

PD30Individually addressable two-electrode electrochemical cell array sharing a single reference/counter electrode for enzyme activity measurementsManuel Gutiérrez-Capitán, Ángel Merlos, Antoni Baldi, César Fernández-SánchezInstituto de Microelectrónica de Barcelona (IMB-CNM), CSIC

PD32Fast and Accurate Detection of Hydrogen PeroxideLisa-Marie Wagner1, Matthias Pilecky2, Karlheinz Kellner1, Thomas Posnicek1, Giulia Mazza1, Martin Brandl11Department for Integrated Sensor Systems, Danube University Krems, 2Department for Health Sciences and Biomedicine, Danube University Krems

PD21Design of microfluidic platforms for super resolution imaging of liver sinusoidal endothelial cell dynamicsAlessandra Dellaquila1,2, Aurélie Vigne1, Thomas Huser2, Sasha Cai Lesher-Perez1

1Elvesys, 2University of Bielefeld

PD23Vapor Chamber / Heat Spreader with Wettability – Patterned CondenserTheodoros P. Koukoravas, Georgios Damoulakis, Constantine MegaridisUniversity Of Illinois At Chicago

PD27An amphiphilic copolymer-based chemocapacitor array for selective and sensitive sensing of volatile organic compoundsAnastasia Nika1, Petros Oikonomou2, Theodore Manouras3, Panagiotis Argitis2, Maria Vamvakaki3,4, Merope Sanopoulou2, Ioannis Raptis2, Margarita Chatzichristidi11Department of Chemistry, National And Kapodistrian University Of Athens, 2Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”, 3Department of Materials Science and Technology, University of Crete, 4Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas

PD29Microscale Modelling and Simulation of Gas Sensor Based on MoS2 Hollow Spheres Zhenyu Yuan, Kaiyuan Zuo, Tong Wu, Junfeng Li, Xin Lin, Yichi TongNortheastern University, China

PD31Atomic Gold Clusters Modified Polyaniline toward Highly Selective and Sensitive Electrochemical SensorYu-An Chien1, Parthojit Chakraborty1, Wan-Ting Chiu2, Chun-Yi Chen1, Tso-Fu Mark Chang1, Takamichi Nakamoto1, Masato Sone1

1Institute of Innovative Research, Tokyo Institute of Technology, 2Institute of Industrial Science, The University of Tokyo

PD33Point-of-care test based on an asymmetric optofluidic grating for buruli ulcer detectionFoelke Purr1,2, Matthias Stehr3, Mahavir Singh3, Thomas P. Burg2,4, Andreas Dietzel11Technische Universität Braunschweig, Institute of Microtechnology, 2Max Planck Institute for Biophysical Chemistry, 3Lionex Diagnostics & Therapeutics GmbH, 4Technische Universität Darmstadt, Department of Electrical Engineering and Information Technology

PD35Carbon nanogap electrode arrays for electrochemical sensors and biosensorsStefan Partel, Volha MatylitskayaVorarlberg University of Applied Sciences

78

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PD34NFC Antenna and Biosensor Electrode Fabrication on Intraocular LensJunhyoung Ahn1, Kangho Lee2, Daekyung Jung1,3, Soongeun Kwon1, Geehong Kim1, Keebong Choi1, Hyungjun Lim1,3, JaeJong Lee1,3

1Department of Nano Manufacturing Technology, Nano-Convergence Mechanical Systems Research Division, Korea Institute Of Machinery & Materials, 2Department of Rehabilitation Engineering, Daegu Research Center for Medical Devices & Rehab. Engineering, Materials Science & Engineering, Korea Institute Of Machinery & Materials, 3Department of Nano Mechatronics, University of Science & Technology

PD36In vitro detection of pathogenic bacteria by phospholipase A activity for an integrated biosensor in domestic water systemsSylvia Schneider, Jörg Ettenauer, Lisa Brandl, Martin BrandlDepartment for Integrated Sensor Systems, Danube University Krems

PD38Evaluation of various cancer cells lines by four-point probe measurementsGeorgia Paivana1,2, Dimitris Barmpakos2, Sophie Mavrikou1, Charalampos Karavasilis2, Odysseus Tsakiridis2, Grigoris Kaltsas2, Spyridon Kintzios1

1Laboratory of Cell Technology, Department of Biotechnology, Agricultural University of Athens, 2microSENSES Laboratory, Department of Electrical and Electronic Engineering, University of West Attica

PD40Rapid detection of Salmonella typhimurium in drinking water samples by a White Light Reflectance Spectroscopy immunosensor Michailia Angelopoulou1, Panagiota Petrou1, Konstantinos Misiakos2, Ioannis Raptis3, Sotirios Kakabakos1

1Ncsr “demokritos”, INRASTES, Aghia Paraskevi , Greece, 2NCSR ”Demokritos” INN, Aghia Paraskevi, Greece, 3ThetaMetrisis , Athens, Greece

PD42Synthesis of polymer-based nanoparticles for bio-nano applicationMarta Szczęch, Krzysztof Szczepanowicz, Piotr WarszyńskiJerzy Haber Institute of Catalysis And Surface Chemistry, Polish Academy Of Sciences

PD44Dielectrophoretically enhanced detection of E. coli cells by an integrated optical biosensor systemDániel Petrovszki1, Sándor Valkai1, Evelin Gora1, Martin Tanner1, Anita Bányai2, Péter Fürjes2, András Dér1

1Institute of Biophysics, Biological Research Centre, Hungarian Academy of Sciences, 2Institute of Technical Physics and Materials Science, Centre for Energy Research, Hungarian Academy of Sciences

PD37Label-free detection of biomolecules and cells by Localized Surface Plasmon ResonanceSantos Merino1, Deitze Otaduy1, Aritz Retolaza1, Aritz Juarros1, Angela I. Barreda2, Francisco González2, Fernando Moreno2, Alfredo Franco3, Jose Luis Fernández-Luna3

1Ik4-tekniker, 2University of Cantabria, 3Hospital Universitario Marqués de Valdecilla

PD39Particle-based immunoassay: analysis of non-specific allergen-IgE interactionsLacey Chunilal1, Tonatiuh Yescas González1, Victor Gaude1, Annick Barre2, Pierre Rougé2, Lorna Garnier3, Françoise Bienvenu3, Jacques Bienvenu3, Emmanuel Picard4, David Peyrade1

1Laboratoire des Technologies de la Microélectronique LTM-CNRS-UGA, 2Pharmacochimie et Biologie pour le Développement, Université Toulouse III - Paul Sabatier, 3Laboratoire d’Immunologie, Centre Hospitalier Lyon-Sud, 4Laboratoire Silicium Nanoélectronique Photonique et Structures, INAC/SP2M/SiNaPS

PD41pH sensitivity evaluation of nanoFET sensor to extended sensing gate materialHye-Lim Kang, Sumi Yoon, Dong-Ki Hong, Young Joo Kim, Sunga Song, Won-Hyo Kim, WooKyeong Seong, Kook-Nyung LeeKorea Electronics Technology Institute (KETI)

PD45Bridge type micro-platforms with sizes of membrane and bridge-width for low-powered micro gas sensor using MEMS techniquesJoon-shik Park1, Kwang-Bum Park1, Tae-Ho Hwang1, Hyunsung Jung2, Myoungpyo Chun2

1Korea Electronics Technology Institute, 2Korea Institute of Ceramic Engineering & Technology

PD47The improvement of solid-state pH sensor for a case study on neonatal urine monitoringLan Zhang, Jian Lu, Ryutaro MaedaNational Institute of Advanced Industrial Science and Technology

PD49Towards integrated multi-sensor platform for monitoring of cell nutrient, metabolite, pH, viable cell mass, dissolved oxygen and temperature in bioreactorsNurul Izni Rusli1,2, Irene Pia Vincentini3, Michael Kraft1

1Department of Electrical Engineering (ESAT-MICAS), University of Leuven (KU Leuven), 2Department of Electrical Engineering Technology, Faculty of Engineering Technology, Universiti Malaysia Perlis (UniMAP), 3DEIB, Politecnico di Milano

79


Rhodes, GreeceP

ost

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PD46Patterning of Carbon Quantum Dots based thin films for electronic devices and sensorsApostolos Segkos1,2, Charalampia Kalogirou2, Elias Sakellis1, Nikolaos Boukos1, Konstantinos Kordatos2, Christos Tsamis1

1NCSR Demokritos, 2NTUA - School of Chemical Engineering

PD50Authentication of bilberries by Surface Enhanced Raman SpectroscopyLina Traksele1, Ceslovas Bobinas2, Gitana Alencikiene1, Alvija Salaseviciene1, Valentinas Snitka1

1Kaunas University of Technology, Food Institute, 2Lithuanian Research Centre for Agriculture and Forestry Institute of Horticulture

PD52A plasmonic array of standing wires in the trigonal symmetric arrangement for broadband, polarization insensitive molecular sensingAndrea Giugni, Marco Allione, Bruno Torre, Giovanni Marinaro, Jurgen Kosel, Enzo Di FabrizioKaust - King Abdullah University Of Science and Technology

PD54Evaporation-induced biosensing on superhydrophobic surface Rokon Uddin, Ville Jokinen, Mehran Mohammadi, Sami FranssilaAalto University

PD56Controlled Dispensing and Mixing in Microfluidic Devices for Multiplex Genetic DiagnosisDaigo Natsuhara1, Keisuke Takishita1, Kisuke Tanaka1, Azusa Kage1, Moeto Nagai1, Yuko Mizukami2, Norikuni Saka2, Takayuki Shibata1

1Toyohashi University of Technology, 2Aichi Agricultural Research Center

PD58Droplet-based fluid central processing platform and applicationsYaru Xing1, Xianming Liu2, Yu Liu1, Rifei Chen1, Xing Cheng1

1Southern University of Science and Technology, 2Dalian Institute of Chemical Physics, Chinese Academy of Sciences

PD60Fabrication of a drug delivery tool via Laser-Induced Forward TransferAgamemnon Kalaitzis1, Christina Kryou1, Chrysoula Chandrinou1, Nikolaos Adamopoulos2, Ioanna Zergioti11National Technical University of Athens, 2Galenica S.A.

PD62Reflow Process for Fabricating Curved Shaping Molds of PDMS Microchannels and ChambersShunya Okamoto1,2, Yoshiaki Ukita1

1University of Yamanashi, 2JSPS Research Fellow

PD53A silicon membrane-silver nanoparticles SERS chip for trace molecules detectionKestutis Nemciauskas1, Lina Traksele2, Alvija Salaseviciene2, Valentinas Snitka1

1Kaunas University of Technology, Research Center for Microsystems and Nanotechnology, 2Kaunas University of Technology, Food Institute

PD55Storage of protein coated beads on point-of-care microfluidic cartridges for immunoassay applicationsBenita Johannsen1, Lena Karkossa1, Desirée Baumgartner1, Lara Müller1, Roland Zengerle1,2, Konstantinos Mitsakakis1,2

1Hahn-Schickard, 2Department of Microsystems Engineering – IMTEK

PD57Thermal design of LoC-on-PCBFrancisco Perdigones, Miguel Cabello, Jose M. QueroEscuela Superior de Ingeniería. Universidad de Sevilla

PD59Versatile fabrication technology for microfluidic systemsPatrícia Sousa1, Jordi Llobet1, José Fernandes1, Sara Vidal2, Tamara Delgado2, Perea Otero2, Pablo Romero2, João Gaspar1

1International Iberian Nanotechnology Laboratory, 2AIMEN Technology Centre

PD61Effect of oxygen plasma micro/nanostructured PMMA plates on the adhesion and proliferation of normal and cancer cellsAnastasia Kanioura1, Panagiota Petrou1, Vassilios Constantoudis2, Dimitris Kletsas3, Angeliki Tserepi2, Evangelos Gogolides2, Margarita Chatzichristidi4, Sotirios Kakabakos1

1Institute of Nuclear & Radiological Sciences & Technology, Energy & Safety, NCSR “Demokritos”, 2Institute of Nanoscience & Nanotechnology, NCSR “Demokritos”, 3Institute of Biosciences and Applications, NCSR “Demokritos”, 4Department of Chemistry, University of Athens

PD63A microfluidic device for live cells capturing and phenotyping using dielectrophoresis and metasurface-enhanced infrared reflection spectroscopyGlen Kelp1,2,3, Joy Li3, Junlan Lu3, Nicholas DiNapoli3, Robert Delgado3, Shourya Dutta-Gupta3,4, Gennady Shvets3

1Institute Of Physics, University Of Tartu, 2Department of Physics, University of Texas at Austin, 3School of Applied and Engineering Physics, Cornell University, 4Department of Materials Science and Metallurgical Engineering, Indian Institute of Technology Hyderabad

PD65Circular continuous flow PCR on a PCB microchipPanagiotis Skaltsounis, Georgia Kaprou, Angeliki Tserepi, George KokkorisInstitute Of Nanoscience And Nanotechnology Ncsr “Demokritos”

80

NEM20


Post

er

Sess

ion

Wednesday, 25th, 2019 (Odd Numbers) Tuesday, 24th, 2019 (Even Numbers)PD64Impulsion system for DNA amplification microdevice integrated on PCBDimitra Kouvara1, Georgia Kaprou1, Francisco Perdigones2, José Manuel Quero2, George Kokkoris1, Angeliki Tserepi11NCSR Demokritos, Institute of Nanoscience & Nanotechnology, 2University of Seville, School of Engineering

PD66The Investigation of Water Disinfection by Deep Ultraviolet Light-Emitting Diodes ArrayProf Chien-ping Wang1, Zong-Ru Yeb2

1National Taipei University of Technology, 2Department of Mechanical Engineering, Chung-Yuan Christian University

PD68Automated and versatile platform for cell culture and cardiac differentiation on engineered microsystemsGabriele Pitingolo1, Yong He1, Boxin Huang1, Li Wang2, Yong Chen1


PD72Photocatalytic Nanofabrication and Intracellular Imaging of Living Cells Using Functionalized AFM ProbeTakayuki Shibata1, Kazutaka Uchida1, Junya Araki1, Miho Ishii-Teshima1, Terutake Hayashi2, Moeto Nagai11Toyohashi University of Technology, 2Kyushu University

PD74Microfluidic channel with embedded monolayer nanofibers for cell culture and co-culture Boxin Huang1, Yong He1, Li Wang2, Jian Shi2, Jie Hu1, Elrade Rofaani1, Ayako Yamata1, Yong Chen1


PD78Cryo-FIB preparation of neuron cell interfaceGregory Panaitov1, Elmar Neumann2, Andreas Offenhaeusser1

1Institute for Bioelectronics, Research Center Jülich, 2Helmholtz Nano Facility, Research Center Jülich

PD82Development of organ-on-chip barrier devices in new soft thermoplasticsEmma Thomée1,2, Alexander McMillan1,3, Alessandra Dellaquila1,4, Alba Calatayud5, Enrique Azuaje Hualde5, Lourdes Basabe-Desmonts5, Sasha Cai Lesher-Pérez1

1Elvesys Microfluidics Innovation Center, 2 University of Strasbourg, CNRS ISIS UMR 7006, 3Department of Microbial and Molecular Systems, Centre for Surface Chemistry and Catalysis (COK), KU Leuven, 4Biomolecular Photonics, Department of Physics, University of Bielefeld, 5BIOMICs Microfluidics Research Group, Microfluidic Cluster UPV/EHU

PD67On-chip synthesis of ruthenium complex in a microchannel by microwave heatingMasaya Takeuchi1, Mitsuyoshi Kishihara2, Toshiro Kobayashi3, Akinobu Yamaguchi1, Takeko Matsumoto-inoue4, Yuichi Utsumi11University of Hyogo, 2Okayama Prefectural University, 3National Institute of Technology, Tsuyama College, 4Minerva Light Lab. Inc.

PD69Development of an automated system for obstructive sleep apnea treatment based on machine learning and breath effort monitoring A-I Kanaris1, K. Tsoutis2, K-N Kanellopoulou1, S. Chatziandroulis1, Vasiliki Tsouti11Institute of Nanoscience and Nanotechnology, NCSR Demokritos, Ag. Paraskevi, 15310, Greece, 2Athens Dental Sleep Medicine, Athens, 11528, Greece

PD713D Scaffolds by soft lithography for retinal tissue reconstructionFrédéric Hamouda1, Stéphane Guilet1, Etienne Herth1, Elise Herardot2, Lise Morizur2, Karim Ben M’Barek2, Christelle Monville2

1C2N/CNRS UMR 9001, 2I-Stem, AFM, INSERM/UEVE 861

PD73Internalization and viability studies of suspended nanowires silicon chips in HeLa cellsSara Duran1, Marta Duch1, Rodrigo Gómez1, Marta Fernández1, Manuel Reina2, Claudia Müller2, Álvaro San Paulo3, Jaume Esteve1, Susana Castel2, José Antonio Plaza1

1Institute of Microelectronics of Barcelona IMB-CNM, (CSIC), 2Departament de Biologia Cel•lular, Universitat de Barcelona, 3Instituto de Microelectrónica de Madrid, IMM-CNM (CSIC)

PD77Nanosecond Laser Irradiation on Cells Using Titanium Thin Film for Massively Parallel Cell Intranuclear DeliveryShin Sawai1, Harsh Gupta1, Tuhin Santra2, Azusa Kage1, Takayuki Shibata1, Moeto Nagai11Toyohashi University of Technology, 2Indian Institute of Technology Madras

PD79In vitro bone marrow tissue development in 3D microfluidic cell culture chambers towards bone marrow-on-a-chip Dionysia Kefallinou1, Maria Grigoriou2, Angelos Zeniou1, Dimitrios T. Boumpas2,3, Evangelos Gogolides1, Angeliki Tserepi11Institute of Nanoscience and Nanotechnology, National Center For Scientific Research “Demokritos”, 2Biomedical Research Foundation Academy of Athens, 34th Department of Medicine, Attikon University Hospital

PD83Sensitive and rapid PCB-based microfluidic platform for monitoring urinary tract infectionsMyrto Filippidou1, Georgia Kaprou1, Sotiris Ntouskas1, George Kokkoris1, Panagiota Petrou2, Dimitris Mastellos2, Stavros Chatzandroulis1, Angeliki Tserepi11Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”, 2Institute of Nuclear & Radiological Sciences & Technology, Energy & Safety, NCSR “Demokritos”

81


Rhodes, Greece

82

NEM20


83


Rhodes, Greece

84

NEM20


85EM

2019


N

Sponsors & Exhibitors


Rhodes, Greece

Note: The floor plan in this brochure is correct at the time of printing. Exhibitors are welcome to modify any spaces to their specific requirements. Exhibition management will be pleased to discuss custom stands. A revised floor plan will be included in the Congress final program

The Commercial / technical exhibition will be held in Rodos Palace Hotel.

The conference program will be structured to maximize the opportunity for participants to visit the commercial exhibition.

Index

2 x 2 = 4 sq. meters



Exh

ibiti

on a

nd

Post

er

Are

a Pla

n

86

NEM20


Exh

ibito

rs’ L

ist

Booth 13

Platinum Sponsors - Exhibitors

Booth 38 Booth 6 Booth 12

Gold Sponsors - Exhibitors

Premium Exhibitors

Standard Exhibitors

Homer and Nanotechnology Art

Corner87

Booth 9Booth 3 Booth 1

Booth 2 Booths 4-5Booth 7 Booth 8

Booth 35 Booth 21Booths 40-41 Booth 46

Booth 45 Booth 29 Booth 22Α Booth 22Β

Booth 37 Booth 43 Booth 23

Booth 25 Booth 42α Booth 36 Booth 28

Booth 42β

Booth 34Booth 30 Booth 27 Booth 26

project FLEXPOL EUROPE


Rhodes, GreeceE

xhib

itors

- S

ponso

rs

88

Platinum Sponsors - Exhibitors

Gold Sponsors - Exhibitors

Premium Exhibitors

NEM20


Exh

ibito

rs -

Sp

onso

rs

89

Standard Exhibitors


Rhodes, Greece

90

NEM20


91EM

2019


N

Authors’ Index


Rhodes, GreeceA

uth

ors

’ Ind

exAAbbarchi M. ............A6-1, B10-2 Abdul B. .............................. PC121Abe K. ..................... C2-5, PC126 Abid Z. ........................D1-3, D4-2 Abualnaja F. ........................C8-3Accardo A. ...........................D9-3Adachi S. ..............................D6-3Adamopoulos N. .............PD60Adikimenakis A. ..PB23, PB25, ..................................................PC18 Adjeroud N. ..........B10-3, PC59 Aeppli G. ................................A1-3Agbulut O. ...........................D5-2Ah C. ........... PC21, PC42, PC43Ahmad A. ............................ PA72Ahmad Z. ... B4-3, PB45, PB47Ahn J. ....................................PD34Ahn S. ....................................B9-3Aime C. ..................................D1-2Akama R. ............................ PA30Akrofi J. ..................PC08, PC20Al Jassin-Al-Hashemi E. ... B1-1Alaca B. .................................PB12Alam B. .................................PC38Alava M. .................................A4-1Alayo N. ...............................PC68Albrechtsen M. ...................PA21Aleksandrova M. ..PC73, PC74Alencikiene G. .................. PD50Alexandropoulos D. ....... PA07, .......................PA08, PA09, PC51Algieri L. ....C5-2, PC92, PC97, ................................................ PC121Allione M...... A5-3, D3-1, D8-2, .......................PC26 PC44, PD52 Almpanis E. ............PB78, PB81Aloni S. ..................................C9-2Alshareef H. ........................PC55Altamirano Sanchez E. ....A2-1Altmann F. ............................ A7-3Altug H. ......................D2-2, D6-1Alvarez Feito D. ................. C2-2Alves F. ..................................C4-2Amano H. .............................A7-4Amargianitakis E. .............PC53Amat E. ..................................C8-1Amaya K. ..............................A3-3Anacleto P. .............PC77, PC80Anastasiadis S. ................PC140Anastasiou A. ....................PA07Andreev A............................C8-3Andreoli F. ...........................D4-2Androulidaki M. ...PA45, PB23, ......................PB25, PC18, PC89 Angelopoulou M. .............PD40

Anhøj T. ................................PB32Antunes M. ..........................PA62Ap A. .......................................PD11Aperathitis E. ..................... C8-4Arakaki R. .............................PC91Araki J. .................................PD72Arana A. ................................B8-3Arapis A. ..............................PB82Araya K. ...............................PC67Argitis P. ... A10-1, PB44, PD27Ari A. .................... PC128, PC129Arjona M. ...............................C4-1Arocas J. ..............................PC29Arunachalam S. .. B4-3, PB45, .................................................PB47Arutunov K. ........................PA23Asano K. ............................. PC113Asif M. ...................................PA43Aslanidis E. ............C4-4, PC63Assemat P. ...........................D9-3Aßmann C. ........................PC154Atthi N. .....................B8-2, PB39Außerhuber H. ...PA40, PC122, ..................................................PD14Averkin S. ............................PA68Avilovas L. .......................... PC117Awsiuk K. ............................. B9-4Ay F. ......................................PB67Ayadi Y. ............................... PC60Azuaje Hualde E. ..............PD82

BBabic B. .................................PB51Bagiokis E. ............ PC50, PC52Bahng W. ...............PC04, PC05Baier L. .................................. B3-2Bak S. ....................................C10-1Bakin A. ................................. C7-2Balasubramanian S. .........PC61Baldi A. ................................ PD30Balena A. .......A5-4,C6-4, D1-1, .................................................D10-1Ballesio A. ............................PB61Balliou A. .............................PB22Ban T. ....................................PC25Bano E. .................................PA45Bányai A. ............................ PD44Bao W. ...................................C7-4Barb R. .................................PA27Barbaglia A. .........................C9-1Barbaresco F. ......................D4-2Bardakas A. ....................... PC84Barmpakos D. .... PC105, PD38Barre A. ................................PD39Barreda A. ...........................PD37Bartenlian B. ..................... PC30

Bartha J. ...............................C2-4Barthelmess M. .................PA54Bartošík M. ..........................PB69Basabe-Desmonts L. ......PD82Bastian P. .............................PA55Batzer M. ..............................PA14Baumgartner D. ................PD55Bausells J. .............................C8-1Bayer I. .................................. B2-3Becherer M. ........................PC88Becker J. ..............................PA46Belahcen S. .........................PC02Beleggia M. ..........................PA14Belharet D. ........................ PC138Bellanca G. ..........................PC38Belushkin A. .........................D6-1Ben M’Barek K. ..................PD71Benali A. ............................. B10-2Berbezier I. ........................ B10-2Berenschot E. ................... PB40Berenschot J. ......................PA10Berger G. ..............................A8-3Berggren K. ......................... C7-3Bernasconi S. .....................PC02Bertagnolli E. .................... PA44Bertana V. ............ PC75, PC152Bertani F. ......C2-3, PC41, D9-2 Berti D. ................................ PD08Besbes M. .............. PC30, PC32Besson A. .............................A4-2Beyer J. ..............................PC154Bhardwaj R. .........................PD16Bhattacharya S. ................PC56Bianchini M. ........................PC68Bianco M. ................ C6-4, D10-1Bicer M. .................................PB12Bidal E. ..................................PD12Bienvenu F. .........................PD39Bienvenu J. .........................PD39Bigo A. ...................................D3-1Bijelic G. ............................... D6-4Birmpiliotis D. .................. PC139Bisig S. ....................................A9-1Biswas S. ..............................PB68Blaise P. ................................PC02Blaschke D. .........................PC45Blosse S. ...............................D9-3Bobinas C. .......................... PD50Bockhorn L. ......................PC154Boeck T. ...............................B10-1Boemmels J. ........................A2-1Boisen A. .... D1-3, D4-2, PA34, .................................................PB28Bolat S. .................................... B1-1Bollani M. ............................ B10-2

92

NEM20


Auth

ors

Ind

ex

Bolt P.................................... PC80Bolten J. ...............................PB38Bonanni S. .............................A9-1Bonse J. ...............................B10-1Bonvalot M. ........................PC02Borgelink B. ....................... PB40Bork E. ................................PC154Botsialas A. .........................PC56Bottein T. ...............................A6-1Bouabdellaoui M. ............ B10-2Boukos N. ........................... PD46Boumpas D. ........................PD79Bourban G. .......................... C2-2Bourganos V. ...................PC140Bourim E. ........................... PC153Bousoulas P. ........................PC14Boussey J. ...........................PA45Bouzga A. .......................... PB50Boyer L. .................................D9-3Brambilla A. ........................PB07Brand S. ................................ A7-3Brandl L. ..............................PD36Brandl M. ................PD32, PD36Braun E. ................................D9-2Braun T. .................................A5-5Bravo J. ................................PB49Bresson P.............................PC32Bretti G..................................D9-2Brianceau P. ........................ B3-2Brinkmann S........................PD13Briz Iceta N. ........................ D6-4Brose S. ...................................A1-1Brox O. .................................PC28Brückl H. ...............................PD51Brueckl H. ...............PA39, PD28Brugger J. ................C6-3, PB31Bruk M. ..................................PA71Bryche J. ................ PC30, PC32Buch Z. ................... PB09, PC47Budkowski A. ......... B9-4, D2-4Buitrago E. ............................ D2-1Bunea A. ..................B6-3, PB79Burg T. ..................................PD33Burghartz J. ..................... PC142Burkhardt C. ......................PC110Busche J. ...............................A5-1Businaro L. ..C2-3, PC41, PD75Busnaina A. ......................... B5-2Bustos K. .............................PA54Buttner U. ...............PB47, PC56

CCabello M. ...........................PD57Cabrini S. ................. A2-4, C9-2Cai J. .................................... PC34

Calafiore G. ..........................C9-2Calatayud A. ......................PD82Calaza C................ PA62, PC135Calò G. ..................................PC38Calvo-Lozano O. .................D6-1Cambel V. .............................PA18Cambril E. .......................... PD02Candeloro P. .........................D3-1Canva M. ................ PC30, PC32Cao J. ........PB62, PB63, PB64, ..................................................PC81Capula Colindres S. .........PC87Cardinaud C. ......................PA63Casolino A. .........................PC37Caspary R. ..........................PA46Castel S. ...............................PD73Catinaccio A. ...................... C2-2Čehovski M. .......... PA46, PC23Ceylan H. ..............................C5-5Chakraborty P. ...................PD31Chan B. ...................................A2-1Chandrinou C. ..................PD60Chang B. ..............................PB89Chang S. .................. C9-4, D2-5Chang T. ...................PB15, PB18, ........PB28, PB84, PC93, PC99, ... PC107, PC108, PC112, PC113, ....................PC120, PC148, PD31Chang W. ......B6-1, D2-3, PC83Chapman H.........................PA54Charalambopoulou G. .....PB51Charette P. ..........................PC32Charfi O...............................PC23,Charpin-Nicolle C. ...........PC02Chatterjee D. ........................PD11Chatzandroulis S. ........... PC66, ...................................PD69, PD83Chatzichristidi M..............A10-1, ..........PB44, PB88, PD27, PD61Checcucci S. .........................A6-1Chen C. ..................................C9-2Chen C.Y. PC99, PC108, PC112, .....................PC113, PC120, PD31Chen H...................... C9-4, D2-5Chen J. .....PB62, PB63, PB64, ..................................................PC81Chen L. .................................PC72Chen R. .................................PD58Chen W. .................PC39, PC80Chen X. .................................PC56Chen Y. ........A7-5, A10-2, B6-1, C5-1, ................................................ C7-4, D1-2, D2-5, PA12, .........PA69, PB29, PC33, PD19, ................................... PD68, PD74Chen Z. ....... A4-1, PA69, PB29, ...................................PC93, PC116Cheng X. ...............PC34 , PD58

Cheon S. ................ PC42, PC43Chiabrera F. ........................PC68Chien M. ...............................PC47Chien Y. ..................PC120, PD31 Chiu W. .................... PC99, PD31Chiu Y.....................................C3-2Cho C. ....................... PB17, PB43Cho S. ....... PC21, PC42, PC103Choi H. .....................PB31, PD04Choi J. .......D10-2, PC69, PD04Choi K. ..................................PD34Choi Y. ..................................PA53Chong H. ................PC08, PC20Chopdekar R. .......................A4-1Chou C. ......................D8-1, PB15Chouiki M. ............................A8-3Choulis S. ..............................C5-3Chuai W. .............................D10-4Chun M. ............................... PD45Chung S. ..... B8-1, PA26, PB58Chunilal L. ...........................PD39Ciccacci F. ...........................PB07Ciccirillo F............................PC92Ciosek J. ............................. PB48Clark M. ..................................B7-2Claude J. ............................. B10-2Clemente J..........................PB49Clime L. ...................................B7-1Cobb B. ...............................PC101Cocuzza M. .............B7-4, D4-2, .................................. PC75, PC152 Collienne S. .........................PC24Colonna G. ..........................PC92Coluccia A. ...........................D5-1Cong C. .................................PC19Constantinides G. ..............PB51Constantinou P. ...................A1-3Constantoudis V. ...............A3-1, .........PA74, PA75, PB24, PB82, .......................PB86, PB88, PD61Cooke M. ...............................A2-4Cordeau M. .........................PC02Cordova I. .............................PD15Cottat M. ..............................PA45Couris S. ................................PC51Courson R. ...............A4-2, PD12Courtot A. ......................... PC138Cousins R. .............................B7-2Creff J. ...................................A4-2Cretu E. ............................... PC90Crockett R. ...........................B6-2Crowe I. ............................... PC09Csato C. ............................. PC142Cuda G. ..................................D3-1Cui J. ......................................C4-5Cui Y. ....................................PC119

93


Rhodes, GreeceA

uth

ors

’ Ind

exCummins C. ........................PB20Cumont A. ...........................PB59Curson N. ..............................A1-3Cybinska J..............PA25, PA59Czerwiec T. .........................PA63

DDa Costa T. .........................PC69Dąbczyński P...................... B9-4Dais C. ....................................A1-5Dale P. ...................................PC77Dallery J. ............................... B3-2Dallorto S. ............................A2-4Damoulakis G. ...................PD23Daniel L. ................................ C7-3Danylyuk S. ............................A1-1Darivianaki E. .....................PC89Darnon M. ...........................B10-4Das D................................... PC157Das R. .......... B4-3, PB45, PB47DasGupta A. .........................PD11Davazoglou D. ...................PB22Davila D. ...............................PB83Davitt F. ................................PB68De Angelis F. ........................C9-1De Angelis M. .......................D3-1de Boer M. .........................PA65, .................................. PC134, PD01 De la Vega F. .....................PC101De Marneffe J.-F. ................A2-1De Ninno A. .............C2-3, PC41De Nuccio F. ....................... A5-4De Planque M. .................. PC20De Vittorio M. ........ A5-4, A7-1, ............... C5-2, C6-4, D1-1, D5-1, ......................D10-1, PC37, PC38, ...................... PC92, PC97, PC121Decuzzi P. ...............................D1-1Deenen C. .......................... PB40Deie K. ................................ PC155Del Moral A...........................C8-1Delamadeleine E. .............PC53Delapierre F. ...................... PD02Delgado C. ...........................A6-3Delgado R. ......................... PD63Delgado T. ...........................PD59Delhaye T. ........................... PC90Deligeorgis G. ...... C8-4, PB23, ..................................................PC18 Della Casa P........................PC28Dellaquila A. .......... PD21, PD82Delobbe A. ........................... A7-3DeLongchamp D. ..............PD15DeMello J. ............................. D2-1Demir A. ............................. PC128Demiralp B. ....................... PC129

Deng B. .................................A7-5Deng J. .......A10-2, C7-4, PA69Dér A. ................................... PD44Derer J. ..................................PA18Dereux A. ............................PC29Desmet G. ..........................PD06Despont M. .......................... C2-2Dey P. ......................................D6-1Dhuey S. .......A4-1, A2-4, C9-2Di Fabrizio E. ...........A5-3, D3-1, ........ D8-2, PC26, PC44, PC55, .................................................PD52 Di Francesco M. ...................D1-1Di Mascolo D. ........................D1-1Di Pietro V. ............PC122, PD14Di Rienzo M. .......................PC92Dias R.....................................C4-2Dickreuter S. ............C6-1, B3-3Dietzel A. ..... A5-1, D7-1, PC94, .......PC115, PC118, PD07, PD13, .................................................PD33 Diewald S. ............................ PA13Dimitrakellis P. ...................PB53Dimitrakis P. ..........PA23, PA75Dimou A. .............................PB88DiNapoli N. ........................ PD63Dipalo M. ...............................C9-1Dobson P. ........................... PC117Domke M. ........................... PC48Dong L...................................C5-5D’Orazio A. C6-4, PC37, PC97Dore C. ................................A10-3Doundoulakis G. ..PB23,PB25, .................................... PC18, PC53 Dow L. ...................................D3-3Drezner Y................... A7-2, B9-1Drobczynski S. ..................PA25Drouin D. ..............B10-4, PC60Drzyzga A. .........................PC110Du L. ..........................PC57, PC111Duan Y. ................................ PC64Duch M. .....................C4-1, PD73 Duchesne E. ...................... PC60Dudus A. ..............................PA27Duerig U. ...............................A9-1Dufour T. ...............................D5-2Dümpelmann L. .... D6-1, PB85 Duò L. ...................................PB07Duque M. ........................... C10-4Duran S. ...............................PD73Durrani Z. .............................C8-3Dürrenfeld P. .......................PA15Dutoya A. ........................... PD08Dutta-Gupta S. ................. PD63Dyck O. ...................................B1-4

EEberle S. ..............................PB87Ebert M. .................PC08, PC20Echresh A. ...........................PB26Ecoffey S. ...........................B10-4Eden A................................... D7-3Edoff E. ............................... PC80Eftychis S. ...........................PB25Eibelhuber M. .......A8-3, PA06, .................................................PA27Ekinci Y. .......... A1-3, A1-4, A5-5 El Hachemi M. .....B10-3, PC59, El-Demellawi J. .................PC55Elias M. ................................ PD08Ellinas K. .....B4-2, D6-2, PB52, ................................... PB54, PB55Elphick K. .............................PB10Elshaer A. .............B10-4, PC60Elsukovaa A. ........................PA14El-Zohry A. .........................PC55Emnéus J. .............................. PA11Endo K. .................................PC07Engay E. ...................B6-3, PB79Engel L. ...................... B1-2, D3-3Engelmann H. ..........B3-2, C8-1Erbe A. ..................................PC15Erbil S. ................................ PC129Erdogan R. ........................ PC128Erdogan T.............................D3-2Erfle P. .................................... D7-1Ernst O. ................................B10-1Ertl P. .................................... PA44Esmek F. ...............................D8-3Esteve J. ..............................PD73Estevez M. .............................D6-1Ettenauer J. ........................PD36Eychenne B. .......................PC02Eylers K. ...............................B10-1

FFàbrega A. ............................D6-1Fabri-Faja N. ........................D6-1Fadida S. ..............................PA62Fahrbach M. ........................C9-3Faingold Y. ..........................PA62Fan D. ......................................D7-2Fan S. .....................................C3-2Fang Y...................... PC50, PC51Farhan A. ...............................A4-1Fauçon M. .............................B3-4Faustini M. .............................A6-1Favre L. ....................A6-1, B10-2Fechner R. .............................C1-3Fechtig D. ...............B5-4, PA40Fedorov A. ......................... B10-2

94

NEM20


Auth

ors

Ind

ex

Felici M. ................................PC35Feng B. ......................C5-1, PC33Fernandes J. ......................PD59Fernández M. .....................PD73Fernandez-Cuesta I. .........D8-3Fernández-Luna J. ...........PD37Fernández-Sánchez C. .. PD30Ferrero S. ............. PC75, PC152Ferstl M. ................................A4-3Filippidou M. ......................PD83Finazzi M. ............................PB07Fischer P. .............................PA54Flandre D. ........................... PC90Fleischer M. ..............B3-3, C6-1Florès-Galicia F. ............... PD02Foncy J. ................................A4-2Fonseca H. ..........................PA62Fonseca L. ...........................PC68Fourneau E. ........................PC24Francis L. ............................ PC90Franco A. .............................PD37Francone A. .........................B8-3Franssila S. ..............B2-2, PD54Frei T. ..................................... C2-2Fremont H. ......................... PC60Frericks M............................PC23Fricke J. ................................PC28Fu L. ......................................D10-4Fuchs E. ......A6-3, A9-4, PA49Fujitsuna I. ...........................PC62Fukuda H. ............................ A3-4Fukuda M. ...........................PC27Fukuoka T. ............................PB10Fürjes P................................ PD44Furutsuka T. ...................... PC155Fyrogenis R. ........................D2-4

GGabrion X. ......................... PC138Gäding M. ........................... PC115Gaeitta G. .............................D3-3Gagaoudakis E. ................. C8-4Gamby J. ............................ PD02Gann E. ..................................PD15Gao Y. ................................. PC124Garbayo I. ............................PC68Garcia I. .................................C4-2Gardeniers H. ........ C1-2, PB40, ................................................PD06Gardeniers J. .......................PA10Garnier L. .............................PD39Gasiorowski J. ...................PA27Gaspar J. ................C4-2, PA62, ..................................PC135, PD59Gass V. ................................... C2-2

Gaude V. ..............................PD39Gaulding A. ..........................C9-2Gazi S. ....................................PA18Ge C. .................................... PC90Geidel S. .............................. D6-4Gelloz B. ...............................PB02Gemini L. ..............................B3-4Georgakilas A. .....PB23, PB25, ..................................................PC18Georgiev Y. ..D2-1, PB26, PC15Gerardino A. ..........C2-3, D9-2, .....................................PC41, PD75Gerngroß M. ............ A1-1, A9-3, ....................... PA06, PA15, PA16, ....................................PA52, PA55Gharbi A. ...................B3-2, C8-1Ghavami M. ....................... PC129Ghazali N. ........................... PC08Ghoshal T. ..............A6-4, PA48Giannakopoulos K. .......... C4-4Giannatou E.............A3-1, PA74Giannitelli S. ........................ C2-3Giannotti D. ........................PB07Girard A. ..............................PA63Giraud E. ..............................PA48Girod S. ..................B10-3, PC59Giselbrecht S. .....................D3-4Giugni A. ..... D3-1, D8-2, PC26, ......................PC44, PC55, PD52Gkiolas D. ............................PB54Gogol P. .............................. PC30Gogolides E. ............A3-1, B4-2, ..................... D6-2, PA74, PB24, ........ PB52, PB53, PB54, PB55, ........................PD18, PD61, PD79Golibrzuch M. ....................PC88Goll G. .................................... PA13Gollmer D. .............................C6-1Gomez M. .......................... C10-4Gómez R. .............................PD73Gómez V. ............................ PA04Gómez-Martínez R. ...........C4-1González F. .........................PD37González-García L. ............ B1-2González-López J. .............D6-1Goodyear A. ........................A2-4Gora E.................................. PD44Görrn P. ...................PA33, PA36Gotszalk T. ........... PB87, PC131, ............................................... PC136Götz J. .................................. D6-4Gounet P. .............................. A7-3Goupil G. ............................... A7-3Gourgon C. .........................PA45Goustouridis D. ....D2-4, PB57, .................................................PD26 Graczyk M. ............PA04, PA43

Grande M. ...C6-4, PC37, PC97Granz T. .....................C9-3, PA17Greenzweig Y. ......... A7-2, B9-1Grenci G. ..............................PA35Griffiths J. .............................C8-3Grigoriou M. .......................PD79Groenesteijn J. ... PC134, PD01Grosso D. .................A6-1, B10-2Grüneberger F. ....A9-3, PA06, .........................PA15, PA16, PA55Grützner G. ............ A4-3, PA56Grützner S............................A4-3Grysan P. ...............B10-3, PC59Gu C. ..........PB30, PB34, PB35Guido F. ......C5-2, PC37, PC92, ....................................PC97, PC121 Guilet S. ......PA63, PD02, PD71Guillén E. .............................PC78Gülink J. ....................C9-3, PA17Guneri Yazgi S. ...................PB12Guo Z. ..................................D10-4Gupta H. ...............................PD77Gurioli M. ...............................A6-1Gutiérrez-Capitán M. ..... PD30Guttmann M. .......................A4-3Guzenko V. ...........................A5-5Guzman R. ...........................B6-2

HHa M. ........ PC04, PC05 , PC76Ha S. ....................................PC143Ha T. ......................................PA26Ha Y. ..................................... PB05Haas S. ...................................B5-3Haase A................................ D6-4Habibović P. .........................D3-4Haeger T. .............................PA36Haenschke F. ......................PC45Hagen C. .................A5-2, PB04Haghiri-Gosnet A. ........... PD02Hahn L. ..................................A9-3Hallstein R. ................ A7-2, B9-1 Halsall M. ............................ PC09Hammani K. ........................PC29Hammersley S. ................. PC09Hamouda F. ........... PC30, PD71Han A. ....................................PA14Han J. .....................................PC21Han M. ...................................PC57Hanay M. . D3-2, PC128, PC129Hanein D. ..............................D3-3Hansen O. ........................... PA60Harada A. ........................... PB60Harada T. ...............................A1-2Harjanne M. .........................D2-4

95


Rhodes, GreeceA

uth

ors

’ Ind

exHartbaum J. ...........A8-3, C7-2, .................................................PA27Hasegawa H. ........ C2-5, PC126Hasegawa Y. ........ PC58, PC62, .................................................PC65 Hashigata K. ...................... PC113Haslinger M. ......... B5-4, PA39, ......................PC78, PD28, PD51Hasumi K. ............................PA76Hatipoglu U. ..................... PC129Hatzopoulos Z. ..................PC89Haus J. ................................. PC115Hayashi T. ............................PD72He Y. ............. D1-2, PB03, PD19, ................................... PD68, PD74Hedhili M..............................PC55Heerkens C. .......................... C2-1Heiderhoff R. .....................PA36Heimala P. ............................D2-4Heinig K. ............................... B3-2Hemanth S. ......................... D6-4Herardot E. ..........................PD71Hersch R. ..............................C6-3Herth E. .................................PD71Hesse J. ................................ D6-4Heyderman L. .....................C4-5Heyroth F. .................A9-3, PA15 Hierold C. ................C8-2, PB87Higo Y. ................................ PC155Higurashi E. ..........PB80, PC151Hilleringmann U. ............... PC10Hinoki A. ..............................PB76Hirai Y. ........ A3-3, PA41, PA42, ............................................... PC133Hirano T. ..............................PC27Hirohata A. ..........................PB10Hoekman M. ........................D2-4Hofmann M. PA19, PA64, PA72, ........................PA73, PB12, PB42Hokai R. ..................................B1-5Hokari R. ............................. PB80Holiastou M. .....................PC140Hollerth C. ............................ A7-3Holmes J. ..................D2-1, PB68Holz M.........PA19, PA64, PA72, .................................................PA73 Holzner F. ..............................A9-1Honda Y. ...............................A7-4Hong D. ...PC137, PC144, PD41Hoogerwerf A. ................... C2-2Hopf R. .................................. B2-3Horiguchi N. .......................PA76Horn M. ................................. D6-4Horváth B. ..................A6-2, B1-1 Hoshian S. ............................ B2-2Hou J. ....................... PC50, PC51Housiadas A. ...................... PB73

Hu J. ........................... D1-2, PD74Hu L. ...........................PB71, PC19Hu R. ..................................... PC20Huang B. .....D1-2, PD19, PD68, .................................................PD74 Huang C. ..............................PC72Huang Y. ..................A4-1, PC114 Huber D. ................................ D7-3Hublot V. ...............................D5-2Hubner J. .................A2-2, PB89Hübner R. .............................PC15Hübner U. .............................PA16Huffman M. ........................ PA04Huo D. ...................................PB79Huser T. .................................PD21Hwang C. .................PC21, PC42Hwang J. ...............................C4-3Hwang S. ...............................PB11Hwang T. ............................. PD45Hwu E. ..................................PB28Hyun S. ................................ PC96

IIacovella F. ..........................PB23Ihring A. ...............................PC45Iida S. ....................PC108, PC112 Iijima R............................... PC100Iijima Y. ............................... PC125Ikota M..................................PA76Ilic B. .......................................PD15Im J. ........................................B9-3Indykiewicz K. ...................PA22Inoue T...................................D6-3Ioannou D. ............................B4-2Ioannou-Sougleridis I. ....PB88Ioardache G. .......................PC56Ionescu A. ............................. D2-1Ishihara M. ............................PB10Ishii M. .................................. PC09Ishii Y. ................................... PB46Ishii-Teshima M. .................PD72Ishikawa Y. .............PC07, PC27Ishimaru T.......................... PC155Islyaykin A. ......................... PB08Ito H. .....................PC108, PC112, .................................. PC113,PC120Ito T........................................PB65Ivanov T. ................. PA72, PA73Iwana S. ............................... PC09Iwanaka T. ......................... PC155

JJackson E. ............................PB10Jahani Y. ................................D6-1Jain S. .................................PC149

Jalaguier E. .........................PC02Jang J. ...................................PB31Jang K. ..................................B9-3Jansen H. ............... A2-2, PA60, .................................................PB89Janseng T. ............................B8-2Jantawong J. .........B8-2, PB39Jantzen S............................ PC118Jeamsaksiri W. ......B8-2, PB39 Jeevanandam G.................A5-2Jefimovs K. ...........................A1-5Jehle A. ..................................A9-1Jensen F. ..................A2-2, PB89Jeong M. ............................. PB05Jermann J. ..........................PC52Jesse S. ..................................B1-4Jiang X. ....................PB19, PC33Jiang Z. ............... PC123, PC124Jin L. ......................................PB02Jin W. .....................................PC19Jo Y. ........................................PC71Jobst G. .................................D2-4Johannes H. .......... PA46, PC23Johannsen B. .....................PD55Johari P. ............................. PC157John-Herpin A. .................. D2-2Jokinen V. ................B2-2, PD54Joly R. .....................B10-3, PC59 Jones M. ................................C8-3Jonker D. ..............................PA10Joseph P. ............................ PD08Juarros A. ............................PD37Jung B. .................................PA53Jung D. .................................PD34Jung H. ................................ PD45Jung J. ................................PC144Jung K. ..................................PC12Jung S. ..................................PC71Jung T. ................................PC143

KKabla A. ..............................PC101Kadala K. ...............................B8-1Kafka J. ................................ D6-4Kage A. ...... PD16, PD56, PD77Kagias M. ...............................A1-5Kahl M. ...................................A9-2Kaiser C. .....................A1-1, PA52Kakabakos S. .......D2-4, PB44, ...................... PD26, PD40, PD61Kaklamani G. .......................C3-3Kalaitzakis F. ......................PA23Kalaitzis A. .........................PD60Kalogirou C. ...................... PD46Kaltsas G. ........... PC70, PC105, .................................................PD38

96

NEM20


Auth

ors

Ind

ex

Kamalakis T. ........................PC51Kamitsos E. .......................PC140Kampylafka V. .................... C8-4Kan X. ..................................PC116Kanaris A. ........................... PD69Kanellopoulou K. ............. PD69Kang D. ...................PC04, PC76Kang H. ....... PB11, PC137, PD41Kang I. ...................PC05, PC153Kang S. ....................PB57, PC98 Kanioura A. ..........................PD61Kanjilal A. .......................... PC157Kantarelou V. .....................PB66Kanwal A. .............................PD15Kaplan A. .............................PC38Kaprou G. ...............D6-2, PB53, ........PC63, PD64, PD65, PD83Karakasidis M. ..................PC140Karakurt A. ....................... PC128Karavasilis C. ......................PD38Kariyapperuma D. ...........PC101Karkossa L. .........................PD55Karoutsos V. .......... B3-1, PA09, ................................................ PC50Karpik A. .............................PD09Karsenti P. ...........................PC32Karvinen P. ..........................PA54Karydas A. ..........................PB66Kassavetis S. ......................PA78Kastania A. ..........................D6-2Kastl C. ..................................C9-2Kato A. .................................PC62Katsikini M. ..........................B9-2Katzmayr I........................... D6-4Kawabe T. .PC58, PC62, PC65 Kawata H. ................PA41, PA42Kazazis D. .....A1-3, A1-4, A5-5, ..................................................C2-4Kazazis S. ............................PC53Keathley P. ........................... C7-3Keegan A. ......................... PC132 Kefallinou D. ...........PD18, PD79Kehagias N. ............A8-2, B8-3, .................................................PB59Kehagias T. ......................... PB73Kekou V. ...............................PC66Keller S. ..........D1-3, D4-2, PA11, ....................................PA34, PB32 Kellner K. .............................PD32Kelp G. .................... PC82, PD63 Kent N.....................................A4-1Kerasidou A....................... PC84Kern D. ........................B3-3, C6-1 Khan B. ..................................PC15Khan H. ................................PD04Khmyrova I. ......................PC145

Kholopova Y. ....................PC145Kilikoglou V. .....................PC140Killge S. .................................C2-4Kim B. ...........B6-4, PB17, PB43Kim C. .....................................PB11Kim D. .................................. PB05Kim G. ........PC01, PD04, PD34Kim H. ........ PB17, PB43, PC05, ................... PC144, PC153, PD10Kim J. ...........PB17, PB57, PC42, .............................................. PC104Kim K. ......A10-4, PA05, PA26, ..................................... PB57, PC12Kim M. ....................................B9-3Kim P. ....................................PA26Kim S. ...........PC01, PC21, PC42 Kim T. ........ PC04,P C21, PC36, ................................. PC42, PC144Kim W. .................... PC137, PD41Kim Y. ........... C2-5, C4-3, C5-4, ........ C10-1, PC04, PC12, PC36, .......... PC54, PC76, PD10, PD41Kimura Y. ..............................C2-5King J. ....................................D3-4Kintzios S. ...........................PD38Kirchner J. ...............PA19, PA64Kirchner R. ............C2-4, PC147 Kiriakidis G.......................... C8-4Kiryushina I. ....................... PB08Kishihara M. ........................PD67Kishimoto H. ...................... PB60Kister T. .................................. B1-2Kitsara M. .............................D5-2Klein J. ...................................A4-3Klein S. ...................B10-3, PC59 Klein Y. ....................................C1-2Kletsas D. .............................PD61Kling R. ..................................B3-4Klösel K. ................................C8-2Klunngien N. ..........B8-2, PB39Knickmeier S. .......................A5-1Kniel K. ................................ PC118Knigge A. ............................PC28Knuffman B. .........................B9-1Kobayashi T. .......................PD67Koch E. ................................ PD07Koczwara C. ........................PB51Kohl M.....................................C1-3Koike Y. ............................... PB46Koizmi A. ..............................A7-4Kokelmann M. ...................PC110Kokkinis G. .......................... D6-4Kokkoris G. ...........PA77, PD64, ...................................PD65, PD83 Kolander A...........................A4-3Kolosov V. ........................... PB27Kometani R. ..............C1-4, PB13

Komninou P. ........PB73, PC140 Komorowska K. ....PA25, PA59 Komuro S. .......................... PC09Kondoh E. .............PB02, PC151 Konečný M. .........................PB69Kong F. ................................D10-4Kongto N. .............................B8-2Konstantinidis G. ..............C3-3, ..........C8-4, PA45, PB23, PC18, ..................................PC53, PC139 Kontomitrou V. ...... C3-3, C8-4Kontoyiannis I. ................... PA74Koo J. ..................................PC103Koops R. .............................. PA75Kopp S. ................................ PA40Kordatos K. ........................ PD46Koritsoglou O. ..................PC101Kornilios N. ..........................C3-3Kosel J. .................................PD52Kosku Perkgoz N. .............PB67Kostoglou N. .......................PB51Kostopoulos A. ................. C8-4Kottmeier J. .........................PD13Kötz M. ...................................C1-3Koukoravas T. ....................PD23Koukouvinos G. .................PD26Koutsis T. .............................PC70Koutsoureli M. ................. PC139Kouvara D. ......................... PD64Kouvatsos D. ......................PB22Kovalchuk A. ....................PC145Kowal D. ...............................PA25Kowalsky W. ......... PA46, PC23Koyama M. ..........................PA42Kraft M. ............................... PD49Kraus T. .................................. B1-2Krause M. .............................PC78Kravchenko I. .......................B1-4Kriechhammer G. ............. D6-4Krielaart M. ........................... C2-1Krikscikas V. ...................... PC86Krippendorf F. ................. PC142Krischer K. ..........................PC88Kristensen A......................... PA11Kristensen M. ......................D4-2Kristiansen M. .....................B6-2Kristiansen P. ....................PD09Krüger J. ..............................B10-1Kruit P. ........................A5-2, C2-1Kruk T. ................................. PB50Kryou C. ..............................PD60Krzysteczko P. .................PC154Kulha P................................ PC122Kumke M. .............................PA55Kunicki P. .............................PB87Kurashima Y. ..................... PC151

97


Rhodes, GreeceA

uth

ors

’ Ind

exKurata N.............................. PC03Kurihara K. .............. B1-5, PB80Kurosu H. .............................PC99Kuwano H. .......................... PC86Kuykendall T. .......................C9-2Kwoka K. ............... PB87, PC136 Kwon J. .................................. PB17Kwon S. ................................PD34

LLabbate L. ...........................PC35Laborde A. ......................... PD08Laible F. ......................B3-3, C6-1 Lake J. .........A6-3, A9-4, PA49 Lake S. ...................................PA15Lamanna L. .........................PC97Lamberti A. ........................PC75Lamy de la Chapelle M. PC30Lange F. ...............................B10-1Laourine F. ..........................PA63LaPointe V............................D3-4Larsen N. .............................PB32Laudi E. ................................. C2-2Laulagnet F.......................... B3-2Laurell Th. ............................D4-3Laurini E. ...............................D8-2Lavrinenko A. ....................PB79Le C. .......................................D5-2Le Dain G. ............................PA63Le Potier I. .......................... PD02Lecarme O. ...........................D9-1Lecestre A. ........................ PD08Lechuga L. ............................D6-1Lee C. ...........PA70, PB17, PC83Lee D. ......................PB43, PC54Lee E. ....................................PA26Lee H. ................................... PC04Lee J. ........A10-4, C10-1, PA05, ......PA53, PB11, PC104, PC144, .................................................PD34Lee K. PB11, PC137, PD34, PD41Lee M. ...................................PB57Lee S. .......A10-4, C10-1, PA05, .....................................PC71, PC76Lee T. .....................................PC36Lee Y. ...........C9-4, PB15, PB18, .................................. PB57, PC148 Lees M. ..................................D2-4Leester-Schädel M. ......... PC115Lefebvre P. ...........................D9-3Leichle T................... D9-3, PD12Leifels M. .................PA33, PA36 Lemma E. ................. A5-4, D5-1Lemme M. ...........................PB38Lerch W. ................................ B3-2Leroy L. .................................PD12

Lesher-Perez S. ....PD21, PD22, .................................................PD82Letzkus F. .......................... PC142Li D. ........................................PB59Li J. ............PB30, PB34, PB35, ................................... PD29, PD63Li L. .........................................PB19Li R. .......................................D10-4Li S. ....................................... PC34Li T. ..............C6-2, PB03, PC119Li W. ..................................... PC34Li X. .........................................A5-5Li Y. ......................... PC39, PC127Liang C. ............................... PC34Liddle J. ....................PB21, PD15Lidorikis E. ..........................PA77Lim G. ...................................PA05Lim H. ....................PC104, PD34Limongi T. .............................D3-1Lin C. ...........................B6-1, D2-3Lin F. ......................................PC72Lin P. ......................................PC93Lin X. .....................................PD29Lin Y. ........................................D8-1Lippert T. ...............................A4-1Liu H. ....................................PC114Liu J. PB62, PB63, PB64, PC81Liu M.....................................PC119Liu R. ..........................PB71, PC19Liu X. .....................................PD58Liu Y. .............D1-2, PC50, PC51, ....................................PC72, PD58Livengood R............. A7-2, B9-1Llobet J. ..................PD59, PA62Lofrumento D. ................... A5-4Lohse M. .............................. D6-4Lokhanin M. ....................... PD03Lombardi P. ........................PC92Lombardo J. .......................PC24Lonetti B. ............................ PD08Loosen P. ................................A1-1Lopatin S. .....D3-1, D8-2, PC55Lorenz P. ................ PA38, PC45Lorestani F. .......................... D7-3Lorusso A. .......................... PC50Lorusso G. ................A3-1, PA76Lotters J.C. .......................PC134Lötters J. .................C1-2, PA65, .................................. PC146, PD01Lotty O. .................................. D2-1Loukas C. ..............................D6-2Low H....................................PA35Lu J. ..........................PD47, PD63Lu W. .................................... PC49Ludvigsen E. ...........PA11, B2-4, ................................................. B4-4

Lukic L. ....................................B7-1Lukichev V. .........................PA68Lundy R. ...............................PB01Luo G. .................... PC39, PC127Luo X.................................... PB84Ly M. ....................................... A7-2

MMaaßdorf A. .......................PC28Machida K. .........PC108, PC112, ................................. PC113, PC120Mack C. .................................A3-2Mackenzie D. ........................ PA11MacKenzie S. ....................... D7-3Maeda R. ..............................PD47Maffia M. ................................D5-1Maglie E. ...................A7-1, D10-1Mahgoub A. ....................... PB04Mai T. .....................................PA52Maier T. .................................PC88Maire A. ..................................D9-1Majikes J. ..............................PB21Majstrzyk W. ..................... PC131Makarona E. ............B9-2, D2-4, ........PB66, PB88, PC17, PC140Makrygianni M. ..PC101, PC150Malaquin L. ............ A4-2, D9-3, ..................................................PD12Maletinsky P. .......................PA14Manabe K. ...........................PB37Mandsberg N. ........ B2-4, B4-4Maneesong A. ....................B8-2Manfroni G. ...........................D1-3Mangeat T. ...........................A4-2Manidakis E. .......................PC89Mannelli I. ................ D6-1, PB85Manouras T. ...........A10-1, PD27Manske E. ...PA19, PA64, PA73Mansour A. .........................PC55Mapelli A. ............................. C2-2Marasco I. ............................PC97Marasso L. ...........................PC75Marasso S. .B7-4, D4-2, PC152Marcos G. ............................PA63Marcoux P. ............................D9-1Margariti E. .......................PC150Marie R. .................................. PA11Mariello M. ............................C5-2Marimon J. ...........................B8-3Marinaro G. .........................PD52Marini M. ....................D3-1, D8-2Markevich V. ...................... PC09Markey L. .............................PC29Markowska O. ................... PB48Marson D. .............................D8-2Martens S. ...............A8-3, PA27

98

NEM20


Auth

ors

Ind

ex

Martiel I. ..............................PD09Martinelli E. ..........................D9-2Martinez C. ....................... C10-4Martínez I. ...........................PC78Martinez-Rivas A. ............PB70, .................................................PC87Martini F. ...............................PC41Martinie S. ...........................PC02Martins S..............................PA62Marumo T. ...........................PA28Marzec M. ............................ B9-4Mastellos D. .......... PB53, PD83Mastronardi V. ......C5-2, PC92, ....................................PC97, PC121 Masu K. ................PC108, PC112, ................................. PC113, PC120Masuda Y. .......................... PC125Matalla M. ............................PC28Mathioulakis D. ..................PB54Matsumae T. ...................... PC151Matsumoto H. .......PA29, PA32Matsumoto Y. ..................... PB77Matsumoto-inoue T. ........PD67Matsushima M. ................ PC58, ....................................PC62, PC65Mattei F. ................................D9-2Matuskova B...................... PA06Matylitskaya V. ..................PD35Maurer J. ................................ B1-2Maurer P. ...............................D3-4Mavrikou S. .........................PD38Maximov I. ............PA04, PA43, ...............................................PC145 Mayama H. ..............PB41, PB76Mayer A. ................ PA33, PA36, .................................................PA38Maziz A. ................................PD12Mazza G. ..............................PD32Mazzucato S. ..................... PA09McEvoy N. ...........................PB20McMillan A. ............PD22, PD82Meananeatra R. .................PB39Mechold S. ............ PA19, PA64, .................................... PA72, PA73Meents A. ............................PA54Megaridis C. .......................PD23Meinen S. ..............................PD13Meinhart C. .......................... D7-3Melamed S. ........................PC101Melenev A. ......................... PD03Mellor C. .................................B7-2Memos G. ............................PA77Mencattini A........................D9-2Meng F. .................................PC39Menguelti K. .........B10-3, PC59Merino S. ..................B8-3, PD37 Merlos A. ............................ PD30

Mertens H. ...........................PA76Mesnilgrente F. ...................PD12Messerschmidt M. ............PA56Metz D. ................................ PC118Meyers T. ............................. PC10Miakonkikh A. ......PA66, PA67, .................................... PA68, PC16 Michelakis K. .......................C3-3Mielnik M. ..........................PC149Mihailovic I. ..........................C8-2Mihi A. ..................................A10-3Milionis A. ............................. B2-3Min S. ................................... PC34Minami H. ............................ PB77Mincuzzi G. ..........................B3-4Mineta T. ............... C2-5, PC125, ............................................... PC126Minne S. ................................ D7-3Miranda A............................ PB72Mirmohammadi S. ............. B2-2Mishra H. .... B4-3, PB45, PB47Misiakos K. .............D2-4, PD40Mitropoulos C. ...................PD26Mitsakakis K. ......................PD55Mitteramskogler T. ..........D4-4, ...... PA39, PA40, PC78, PC122, .................................... PD14, PD28 Mitterer C. ............................PB51Miyake K. ...............................B1-5Miyashita Y. ..........................PA41Mizubayashi W. .................PC07Mizukami Y. .........................PD56Modreanu M. ...................... C8-4Moe S. .................................PC149Mogi K. ..................................D6-3Mohammadi M. ................ PD54Mohammed O. ...................PC55Moharana A. .........B5-4, PA40, ................................................ PA44Mokarian P. .........................PB38Mokarian-Tabari P. ...........PB20Mol J. .......................................B1-4Monroy E. ............................PC53Montis C. ............................. PD08Monville C. ...........................PD71Moon J................................. PC04Moon Y. .................................PC01Moreau J. ............... PC30, PC32Moreira E. .............................C4-2Moreno F. ............................PD37Moretti M. ......A5-3, D3-1, D8-2Mori T. ..................... PA02, PC07Morizur L. .............................PD71Morris D. ..............................PC32Morris M. ... A6-4, PA48, PB01, ..................................PB20, PC132

Mortelmans T. .....................A5-5Morton K. ...............................B7-1Mosgaard M..........................D1-3Moustakas K.......................PA07Moya A. .............................. C10-4Mpatzaka T. ...........PA52, PB57Mruczkiewicz M. ................PA18Muehlberger M. .. PA39, PA44, ....................... PC78, PD14, PD28Mueller C. ............................PA46Muendlein M. ..................... PC48Mühlberger M. ......B5-4, D4-4, ..................................PA40, PC122Mukherjee S. .......................PD15Müller B. ................................B6-2Müller C. ...............................PD73Müller L. ...............................PD55Müllertz A. ................D1-3, D4-2Mun J. ..................................A10-4Muñoz-Aguirre N. .............PB70Murayama M. .................... PC09Murillo G. ........................... C10-4

NNadzeyka A. ........................A9-2Nagai M. .................PD16, PD56, .................................... PD72, PD77Nagoshi T. .............PB60, PC113Nakajima K. ........................PA42Nakamoto T. ........................PD31Nakamura R. .......................PC13Nakao A. ...............................PC13Nardi A. ................................. C7-3Nasr Esfahani M. ................PB12Natalini R. .............................D9-2Natsuhara D. ......................PD56Natsume T. ...........................D6-3Natta L. ................................PC92Naumov V. ......................... PD03Nauruzbayeva J. .. B4-3, PB45Naznin S. ................................B7-2Nemciauskas K. ................PD53Nestler J. ............................. D6-4Neumann E. ........................PD78Neves N.................................B8-3Ngom S. .............................. PD02Nguyen N. ...........................PC24Nguyen T. ...........................B10-3Nguyen V. .............................A2-2Nicosia C. ............. PC75, PC152Nielsen L. ..................D1-3, PB28 Niess J. .................................. B3-2Nightingale A. ..................... D2-1Nika A. .....................A10-1, PD27Nikas G. .................................PC14Nilsen M. ...............................PA01

99


Rhodes, GreeceA

uth

ors

’ Ind

exNinou A. ...............................PB88Nioras D. .................PB52, PB55Niro G. ..................................PC97Nishida H. .............................PB13Nishidate Y. .......................PC145Nishikawa H. ...................... PB46Nishino T. ................PB41, PB76, ...................................PB77, PC155Nishitani T. ...........................A7-4Nissinen V. ..........................PA54Nitta K. ...............................PC108Nojiri Y. ................................ PB46Nõlvak A. .............................PC82Noma H. ...............................PC58Normand P. .........................PA23Nouvertné F. .......................A9-2Novais A. ........................... PC135Nowak E. .............................PC02Ntouskas S. .........................PD83Nuck M. .................................A4-3Nurk G. .................................PC82

OObitani K. ............................PC67Offenhaeusser A. .............PD78Ogasawara T. ......................PC13Oguchi H. ........................... PC86Oh H. ......................A10-4, PA05Oh J. ..........C4-3, C5-4, PC144, .......................PA70, PB57, PC12Ohashi T. ..............................PA76Ohkouchi T. .........................PC13Oikonomidis N. ...............PC150Oikonomou P. .......PC56, PD27Oka H. ...................................PC07Okabe T..... PA29, PA30, PA32Okada I. .................................PB10Okamoto S. .........................PD62Okamoto T. .........................PB65Okulova N. .......................... B4-4Onishi Y. ................................A3-3Öper M. ................................PB67Ordonezloza J. ...................A5-3Ören S. ..................................C5-5Orhan E. ............................. PC128Orłowska K. ........ PC131, PC136Osmani B. .............................B6-2Osmond J. ..........................A10-3Ota M. ...................................PC27Otaduy D. ............................PD37Otero N. ...............................PD59Oura M. ..................................PC13Owen J. ..... A6-3, A9-4, PA49, Oya T. ....... PC03, PC91, PC100Ozerin Y. ............................. PB08

PPadeste C. ..............A5-5, PD09Padmanabhan S. .................D1-1Paivana G. ...........................PD38Pajor-świerzy A. ................PB16Pakendorf T. .......................PA54Pallandre A. ....................... PD02Paloura E. .............................B9-2Pan J. ........ PB32, PC39, PC127Pan L. .....................................PC31Pan R. ...................... PB30, PB35Panagiotidis E. ......PB78, PB81Panaitov G. .........................PD78Pandey G. .............................PD16Pang S. ................................D10-3Panos S. ...............................PA78Papachristopoulou K. ..... B3-1, ................................... PC50, PC52Papademetriou A...............B3-1Papadimitropoulos G. ....PB22Papageorgiou G. ..............B9-2, ......................PA23, PA52, PA75, ....................................PB57, PB66Papageorgiou G.P. ............PC17Papageorgiou H. ................A3-1Papaioannou D. ................PC52Papaioannou G. .............. PC139Papanikolaou N. ...PB78, PB81Papavieros G. ..........A3-1, PA74Papenheim M. ....................PA38Pardon G. .............................D3-3Paris O. ..................................PB51Park B. ..................................PA05Park C. ................................PC103Park H. ...................... PB11, PC54Park J. .... PC143, PC144, PD45Park K. ................................. PD45Parmeggiani M. ..................B7-4Parrotta E. .............................D3-1Partel S. ................................PD35Paszkiewicz B. ...................PA22Paszkiewicz R. ...................PA22Patsalas P. ...........................PA78Patsiouras L. .........C4-4, PC63Pattamang P. .........B8-2, PB39Paul P. .....................................A9-1Paulsen M. .........................PC154Pawłowski R. .......................PB16Peaker A. ............................ PC09Pedersen D. .......................... PA11Pedersen N. .......................... PA11Pedrini J. ...............................C9-2Peixoto R. .............................. A7-1Pelekanos N. ........ PC53, PC89Pello J. ...................... D6-1, PB85

Peña G. .................................PA54Pennathur S......................... D7-3Perdigones F. ....... PD57, PD64Perelló-Roig R. ...................PC14Perez-Murano F. .................C8-1Permyakova O. ...................PC16Perrone A. .......................... PC50Persico A. ............................PC02Peter D. ..................................A9-1Petersen C. ...........................A4-1Petersen R. . D1-3, D4-2, PA34 Petit-Etienne C. .................PA45Petkov N. ............................... D2-1Petrillo A. .............................PC24Petrou P. ...............PB44, PD26, ....................... PD40, PD83 PD61Petrovszki D. ..................... PD44Petruzzelli V. ......................PC38Pettinari G. ............ PC35 , PC41Peyrade D. .............. D9-1, PD39Pezard J. ............................. PC60Pezeshki H. ...........................B7-2Piasecki T. ............ PB87, PC131, ...............................................PC136 Picard E.................... D9-1, PD39 Picone A. .............................PB07Pilecky M. ............................PD32Pinakidou F. .........................B9-2Piredda G. .......................... PC48Piro L. ....................................PC97Pirri C. ......... B7-4, D8-2, PC152 Pirri F. ........................D4-2, PC75Pisanello F. .............. A5-4, A7-1, ............C5-2, C6-4, D5-1, D10-1Pisanello M. ............. A5-4, A7-1, .................................... C6-4, D10-1Pisano F. .................. A5-4, A7-1, .................................... C6-4, D10-1Pitingolo G. ..............D1-2, PD19, ................................................ PD68Plank W. .............................. PC48Plaza J. ......................C4-1, PD73Polaki S. ................................PC61Polesel J.................B10-3, PC59Polimeni A. .........................PC35Politi C. ................................ PA09Polychronopoulou K. .......PB51Posnicek T. ..........................PD32Poulikakos D. ...................... B2-3Pourdavoud N. ..................PA36Pourteau M. ......................... B3-2Prabakar K. ..........................PC61Prajapati A. .........................PA62Prehal C. ...............................PB51Price R. ................................PC101Pricl S. ....................................D8-2

100

NEM20


Auth

ors

Ind

ex

Prifti V. ................................. PC84Primavera R. ..........................D1-1Prochukhan N. ................. PC132 Pruchnik B. ........................ PC131Prucnal S. ................PB26, PC15Pruitt B. .................................D3-3Pruneri V. ................. D6-1, PB85Psycharis V. .........................B9-2Psyrris A. .............................PC70Pu D. .................................... PC123Purr F. ...................................PD33Pyka N. ..................................A9-3

QQiu Z. .....................................PC19Qualtieri A. ............ C5-2, C6-4, .........PC37, PC38, PC92, PC97, ................................................ PC121 Quero J. ................. PD57, PD64Queste S. ........................... PC138

RRademaker G. ..........B3-2, C8-1Rademakers T. ....................D3-4Rainer A. ............................... C2-3Ramírez Salinas M. ...........PC87Ramiro J. ..............................B8-3Ramos I. ............................... D6-4Randall J. ....A6-3, A9-4, PA49Rangelow I. ............ A2-4, PA19, ...........PA64, PA72, PA73, PB12Raptis I. .....D2-4, PD40, PA52, ......................PB57, PB78, PC56, ....................................PD26, PD27 Rastjoo S. ..............................C1-3Raveh A. .................... A7-2, B9-1Rebholz C. ...........................PB51Rebohle L. ...........................PB26Reid G. ..................................PB68Reina M. ...............................PD73Reker J. ................................ PC10Ren J. .....................PC64, PC123Ren T. ....................................PC95Ren Z. ...................... PA61, PC64Retozala A. .............B8-3, PD37Reum A. .................. PA72, PA73Reuter C......PA19, PA64, PA72 Revet G. ................................D5-2Reynolds J. ...........PC08, PC20Rezaei B. ..............................PB32Rezvanov A. .......................PA66Rhallabi A. ...........................PA63Ricciardi C............................D8-2Richter A. .......................... PC147Richter K. ..............................C2-4Richter T. ..............................A9-2

Riedl T. ..................................PA36Riesco R. ...............................D9-3Riley C. .................................PB58Rizzi F. ........... D1-1, C5-2, PC97, ................................................ PC121 Rizzo A. ...................... A5-4, D1-1Robert L. ........................... PC138Roberts B. ............................B5-3Rocha L. ................................C4-2Rodchanarowan A. ...........B8-2Roeffaers M. .......................PD22Rofaani E. ................. D1-2, PD74Rogozhin A. ........... PA67, PA71, ..................................................PC16 Rola K. .....................PA25, PA59Roman C. .............................PB87Romano L..............................A1-5Romano S. ........... PC75, PC152Römer F. ............................... C7-2Romero P. ............................PD59Rommel M. ........................... B3-2Rond J. .................................PA36Ronda A. ............................. B10-2Rosales Hernández A. ....PB70Rothbauer M. .................... PA44Rougé P. ...............................PD39Roux C. ................................ PD08Rowlinson B. ..................... PC08Rüb M. ................................ PC142Rubini S. ...............................PC35Rudenko K. ...........PA66, PA67, .................................... PA68, PC16Rudorf R. ............................PC110Rumpler M. ......................... D6-4Rusli N. ................................ PD49Rutigliani V. ..........................A3-1Rutkowski J. ...................... PB48Ruttloff S. ............................ D6-4Ryazanov V. ........................PA23Ryckaert J. ............................A2-1Rydzek G. ............................PB38Rysz J. .................................. B9-4Ryu H. ......... PC21, PC42, PC43Ryu J. ....................................PC76Ryu S. ....................................PA70

SSabatini B. ... A5-4, A7-1, D10-1Saccone M. ...........................A4-1Sadeghi P. .......................... PB09Sadewasser S. ......PC77, PC80 Sadílek J. .............................PB69Saegusa S. ...........................PC13Saiki T. ...................................PC13Saji A. ....................................PC99Saka N. .................................PD56

Sakata R. ..............................PA41Sakellaropoulos D. ............PC14Sakellis E. ........................... PD46Sakurai I. ...............................PB10Salama K. ............................PC56Salapatas A. ........................D2-4Salaseviciene A. ..PD50, PD53Salleras M. ...........................PC68Salvalaglio M. .................... B10-2Šamořil T. ............................ PA20Samukawa S. ......................PC07San Paulo A. .......................PD73Sanchez A. ............................C4-1Sanders R. .......................... PB40Sanopoulou M. ...PC56, PC66, .................................................PD27Santamaria G. ......................D3-1Santini R. .................A6-3, A9-4Santra T. ...............................PD77Şar H. ....................................PB67Sarathy M. ............................A5-3Sarkiris P. .............................PB54Sato D. ...................................A7-4Sato K. ....................PA30, PC09Sato T. ................................. PC125Sawai S. ................................PD77Scalia A. ...............................PC75Scalora M. ...........................PC37Scaltrito L. ............ PC75, PC152Scepka T. ..............................PA18Schantz M. ...........................A6-3Scheer H. .............. PA33, PA36, .................................................PA38Schiavoni G. ........................D9-2Schift H. ..........A1-5, A6-2, B1-1, ..................................................B6-2 Schirmer M. ............. A1-1, A9-3, ........... PA06, PA15,PA16, PA52, .................................................PA55 Schlachter F. ......................PB38Schleunitz A. ......... A4-3, PA56Schmid S. .............. PB09, PC47Schmidt G. ...............A9-3, PA15 Schmidt H. ..........................PC45Schmidt M. .......................... C8-4Schneider S. .......................PD36Schofield S. ..........................A1-3Scholl A. .................................A4-1Schotter J. ............D4-4, PA39, .................................................PD28Schranzhofer L...................B5-3Schrittwieser S. ...D4-4, PA39, .................................................PD28Schuller P............................ PA44Schut T. ...................C1-2, PC146Schut T.V.P. .......................PC134Schwartzberg A. .. A2-4, C9-2

101


Rhodes, GreeceA

uth

ors

’ Ind

exSchwarzkopf A. ..................B9-1Schwerter M. ..................... PC115Sciurti E. .................................D1-1Scordo G. ............. PC75, PC152 Scotti G. ................................C3-2Secme A. ..............................D3-2Sedaghat Pisheh H. ..........D3-2Segkos A. ........................... PD46Segura J. ...............................PC14Seitl L. ....................................B3-3Sekiguchi A. ..........PB41, PB76, ....................................PB77, PC86Selkirk A. .............................PB20Seok O. ...................PC04, PC05Seong W. ............... PC137, PD41Sergio S. ................................D5-1Shahbeigi Roudposhti S. PB12Shalev G. ..............................PA62Shamkhalichenar H. .......D10-2Shapoval S. .......................PC145Sharma C. ............................. B2-3Sharma M. ...........................PC35Shawrav M. .........................PC47Sheen G. ............................. PC06Shi J. ...............D1-2, PD19, PD74Shi Y. ......................................PC31Shi Z. .......................................A1-5Shibata T................PD16, PD56, .................................... PD72, PD77 Shields B. ..............................PA14Shikazono N. ..................... PA30Shikida M. ............. PC58, PC62, .................................................PC65 Shimizu T. ...............C2-5, PB65, ............................................... PC126 Shimohira C. .......................PC65Shin D. ..................................PB57Shin H. ..................... PA53, PD10Shingubara S. ....................PB65Shioda A. .............................PB02Shirai M. ...................PA41, PA42Shiraishi K. ......................... PC09Shiratori S. ..........................PB37Shiu M. .....................................B7-1Shon J. ...................................PC01Shoshi A. ...D4-4, PA39, PD28Shvets G. ............................ PD63Si S. .......................... PA56, PB42Sidorov F. .............................PA71Sierakowski A. ... PC131, PC136Šikola T. .................. PA20, PB69Sileo L. ...........A5-4, A7-1, C6-4Silhanek A. ..........................PC24Silvestre C. ......................... PA60Simon A. ...............................D5-2Simon C. ............................. PB50

Singh M. ...............................PD33Sinuraya W. ....................... PC08Sinzinger S. .........................PA56Siopa D. ................................PC77Skaltsounis P. .....................PD65Skorenski M. .......................PA25Skotadis E. .............C4-4, PC63Smiglak M. .............PA25, PA59Smolka M. ............................ D6-4Smyrnakis A. ...........B4-2, D6-2Smyrnioti E. ........................PC52Snitka V. .................PD50, PD53Socha R. ................................PB16Sohn S. .................................. PB17Sojic N. ..................................PD12Solak H. ..................................A1-5Soler M. ................................. D2-2Soltys J. ................................PA18Sommer R. ..........................PC02Son J. ....................................PA53Sone M. .............PB84, PC99, P ......C108, PC112 , PC113,PC120, ..................................................PD31Song J. ....... PC21, PC42, PC43Song S. ..................................PD41Sonnleitner M. ................... D6-4Sotomayor Torres C. ........B8-3Souleille S.............................A4-2Sousa P. ................................PD59Spagnolo B. ............ A5-4, A7-1, ......................................D5-1, D10-1Spandonidis C. ................PC150Sparreboom W. ................ PD01Spende H.................. C7-2, C9-3 Sripumkhai W. .......B8-2, PB39Sriram K. ................................D8-1Staabs J. ..............................PA36Stadlober B. ....................... D6-4Stahlberg H. ........................A5-5Stampanoni M. ....................A1-5Stanca S. ..............................PC45Starke G. ................................A5-1Stassi S. .................................D8-2Stathopoulos C. ................PC52Staufer U. ..............................D7-2Stavrinidis A. ........PA45, PB23, ..................................................PC18 Stavrinidis G. .........C3-3, PC53, ............................................... PC139 Steele A. ................................B9-1Steffen M. ............................PA55Steglich T. ............................PA55Stehr M. ................................PD33Stein M. ............................... PC118Steinbach T. ...................... PC142Steriotis T. ............................PB51

Stett A. ................................PC110Sthijns M. ..............................D3-4Stobbe S. ................ PA21, PC46Stock T. ..................................A1-3Stokeley K. ...........................PA61Stollenwerk J. .......................A1-1Stomeo T. .. C6-4, PC37, PC38Strehle S. ..............................PA01Strempel K. ............. C7-2, C9-3, .................................................. PA17Stricher R. ..........................B10-4Stroj S. ................................. PC48Suárez T. ................................C4-1Súchil Pérez O. ..................PC87Sudiyarmanto .................. PC151Sugawara H. ........................PA31Sun A. ....................................D2-5Sun K.................................... PC20Sung C. ..................................PC21Suntalelat S. ...........B8-2, PB39Supadech J. ........................PB39Supreeti S. ...........................PA19Suzuki K. ............................. PC113Švarc V. ................................PB69Svetovoy V. ........................ PD03Swett J. ..................................B1-4Swift M. .................................D3-3Syed A. .................................PC56Szczęch M. ..........................PD42Szczepanowicz K. ............PB16, ................................... PB50, PD42Szornel J. ..............................A2-4Szpecht A. ..........................PA59Szymanowska P. ............. PC136

TTabata O. ........................... PC133Taboryski R............ B2-4, B4-4, ..................................................B6-3Tada K. ..................................PA41Takada N. .............................D6-3Takagi H. ............................. PC151Takama N. ........................... B6-4Takase K. .............................PB65Takeuchi M. .........................PD67Takigawa R. ......................PC156Takishita K. .........................PD56Tamm A. ..............................PC82Tampaxis C. .........................PB51Tan S. ........................A7-2, PC89Tanagi K. ...............................PD16Tanaka K. .................C1-4, PD56Tanaka M. .......................... PC125Tang H. ...............................PC108Tanigawa H. ...........PB41, PB76, ...................................PB77, PC155

102

NEM20


Auth

ors

Ind

ex

Taniguchi J. ......... PA28, PA29, ....................... PA30, PA31, PA32Taniguchi K. ......... PC58, PC62, .................................................PC65 Tanner M. ............................ PD44Tantussi F. .............................C9-1Tao Z. ......................................A2-1Tarancón A. ........................PC68Tas N. .......................PA10, PB40Tatarintsev A. ....................PA67Tätte T. .................................PC82Taus P. ...................................PC47Taylor H. ....................B8-1, PB58Telecka A. ................ B2-4, B4-4Terborg R. ............... D6-1, PB85Tessarollo F. ...................... PC122Testa P. ..................................C4-5Tez S. ....................................C10-3Thanner C. ..............A8-3, PA27Theodorakos I. .................PC101Theodosiou A. ...................PA78Thesen M. ...............A4-3, D6-4, .................................................PA56Thibault C. ...........................A4-2Thomée E. ...........................PD82Thomopoulos G. ..PB52, PB55Thongsook O. ........B8-2, PB39 Tian l.................................... PC123Tiggelaar R. .........................PA10Tiron R. .......................B3-2, C8-1Tittl A. .................................... D2-2Tokuoka K. ..........................PC99Toma A. .................... C9-1, PC38Toma F. ..................................C9-2Tomal W. ............................. PB50Tong J. ...................................C6-2Tong Y. .................................PD29Tonooka Y. ..........................PC27Töpper T. ..............................B6-2Tören P. ................................ D6-4Torre B. ........ D3-1, D8-2, PC26, ...................................PC44, PD52Tourlouki K. ....................... PA08Traksele L. .............PD50, PD53Treiblmayr D. .......................A8-3Truckenmüller R. ...............D3-4Tsagaraki K. ........... C3-3, C8-4, ........................PB23, PB25, PC18 Tsakiridis O. ........................PD38Tsamis C. ............PC84, PC105, ................................................ PD46 Tsanev T. ..............................PC74Tsaousis V. ..........................PD26Tse C. .....................................PB31Tselekidou D. .....................PA78Tseng L. .......................A1-3, A1-4

Tseng Y. ................................ C9-4Tserepi A. ...B4-2, D6-2, PB53, .........PC63, PD18, PD61, PD64, ......................PD65, PD79, PD83 Tsigkourakos M. ................ PB73Tsougeni K. ..........................D6-2Tsoukalas D. ......... C4-4, PB73, .....................PC14, PC63, PC140Tsounidi D. ..........................PD26Tsouti V. .................PC66, PD69 Tsoutis K. ............................ PD69Tsuchiya T. ........... PC67, PC133Tsuji K. ...................................C2-5Tu Z. ......................................D10-4Tuji K. .................................. PC126Tukkiniemi K........................D2-4Turchetti M. ......................... C7-3Turover D. ............................PA63Tzaneva B. ...........................PC74Tzianou M. ..............PB52, PB55

UUchida H. .............................PB76Uchida K. .............................PD72Uddin R. .............................. PD54Uggowitzer M. .................... B2-3Uhrmann T. ........................ PA06Ukita Y. .................................PD62Ullah A. ................................PD04Ulliac G. .............................. PC138Uraoka Y. .............................PC25Uslu D. ...................................D3-2Utsumi J. ............................PC156Utsumi Y. ....PB10, PC13, PD67Uvarov I. .............................. PD03

VVainos N. ....B3-1, PA07, PA09, .......................PC50, PC51, PC52 Valamontes E.....................PC56Valdez-Pérez D. ................PB70Valkai S. .............................. PD44Vamvakaki M. ........A10-1, PD27Vamvakas V. .......................PA52Van Blitterswijk C. ............D3-4Van Boekel W. .................. PC80Van Deelen J. .................... PC80Van Der Velden G. .............D7-2Van Dijken S. ........................A4-1Van Goozen Y. ....................A5-2Van Houselt A. ...................PA10Van Putten J. ..................... PD01Van Roey F. ..........................A3-1Van Tol R. .............................A5-2Vanetsev A. ........................PC82Vargkas E. ...........................PC63

Vaut L. ..................................PB28Veigang-Radulescu V. .....C8-3Veilleux G. ..............................B7-1Vekinis A..............................PB86Veres T.....................................B7-1Verna A. ................................B7-4Vernoux C. ..........................PC29Vertchenko L. ....................PB79Vetrova I. ..............................PA18Viasnoff V. ...........................PA35Vidal S. .................................PD59Videkov V. ...........................PC74Vidor F. ................................. PC10Vieira De Castro J. ............B8-3Vigne A. ................................PD21Vila-Comamala J. ...............A1-5Vincentini I. ........................ PD49Vishnevskiy A. ...................PA66Vogler M. ..............................A4-3Voigt A. ...................A4-3, B10-2Voigt P. ..................................PA16Volkmann N. ........................D3-3Von Borany J. ..................... B3-2Von der Heide C. ............. PC94Vona G................................... C2-3Voss M. .................................PB28Vourdas N. ............PB52, PB55, ..................................................PD18Vrettou F. ........................... PB44

WWaag A. ........ C7-2, C9-3, PA17Wagner L. ...........................PD32Walger T. ..............................C6-3Wan D. ...................................D2-5Wang C. ................C8-3, PC107, ...................... PC114, PD15, PD66Wang L. .......D1-2, PD19, PD68, .................................................PD74 Wang P. ................. PC39, PC127Wang Q. ................................PC31Wang S................................ PC49Wang T. ....................C5-1, PC116Wang W. ..............................PC57Wang X. ...............................PB29Wang Y. ........B7-4, C6-2, PC72Wang Y. ......C6-2, PB03, PC119 Wang Z. .................. PC31, PC56Wanzenboeck H. ............ PA44, .................................................PC47Warisawa S. ..............C1-4, PB13Warszyński P. ....... PB16, PB50, .................................................PD42Wasisto H. .... C7-2, C9-3, PA17Watanabe H. ..................... PC112Watanabe T. .........................A1-2

103


Rhodes, GreeceA

uth

ors

’ Ind

exWeaver J. ........................... PC117Weber A. ..............................C4-5Weeber J. ............................PC29Wehmann H. ....................... C7-2Wei X. .....PC64, PC123, PC124Weidenfeller L. .... PA19, PA64, .................................................PA73Weigel W. ............................ D6-4Weinhart M. ....................... PA06Weis W. .................................D3-3Wennberg A. .....................PC78Wenzel H. ............................PC28Werder J. ..............................A6-2Wetzel A. .................B6-3, PB79Weyers M. ...........................PC28Wiegerink R. ..........C1-2, PA65, ..................PC134, PC146, PD01Wiesbauer H. ......................A8-3Witters L. .............................PA76Witzigmann B..................... C7-2Wolf J. ...................................A4-3Wong H. ...............................PA35Woo C. ................................ PC96Woo K...................................C10-1Wu D. .....................................PC31Wu L. ..................................... B6-4Wu S. ......................................PB18Wu T. .....................................PD29Wu X. .......................C5-4, PC95

XXiao M. ................................PC107Xie S. ..............A1-5, A6-2, A7-5, .................................................. PA12Xie Y. ..........C7-4, A10-2, PA69, ................................... PB26, PD58Xiong H. ................................PC31Xu J. ......................... C2-5, PC126 Xu Y. .....................................D10-3Xuan Z. ................................ PC49

YYachi M. ................................PC67Yadav P. ................................PB01Yamada K. ............................PC13Yamaguchi A. ...... PB10, PC13, .................................................PD67Yamamoto S. .....................PC25Yamane D. .........PC108, PC112 , ................................. PC113, PC120Yamashita R. .......................A3-3Yamata A.............................PD74Yamazaki A. .......................PA02Yamazaki Y. ...................... PC133Yanagimachi S. ................ PC151Yang F. .................................PC116

Yang H. ................... PA70, PB34Yang J. .....................PB15, PC93, .................................PC103, PC116Yang S. ..................................B7-4Yang W. ................. PC39, PC127Yang Y. ....................C7-3, PB03, ...................................PC95, PC119Yang Z. ..................................D2-3Yanik C. ............... PC128, PC129 Yano T. ...................................PA31Yasuda M. ................PA41, PA42Ye H. ......................................PB59Yeb Z. ................................... PD66Yeh J. ......................................D8-1Yeo N. .................................. PB05Yescas Gonzalez T. ...........D9-1, .................................................PD39Yesilkoy F. .............................D6-1Yi M. .......................................C10-1Yoo D. .................................. PC54Yoon G................................PC143Yoon H. ..................................PC71Yoon S. ...... PC76, PC137, PD41You J. ................................... PC54Yu F. ........................................ C7-2Yu H. ....................... PC39, PC127Yu K. ..................................... PC54Yu M. ....................................A10-2Yu R. ........................................ D2-1Yuan Q. ...............................PC116Yuan Z. .................. D10-4, PD29Yuksel M. ............ PC128, PC129 Yun S. ....................................PB43Yun T. ................................... PC96

ZZaccagnini P. ......................PC75Zacharaki E. .......................PA07Zacharatos F. ....................PC101Zaheer M. .............................PB71Zaidi S. ......................C9-3, PA17Zajac A. ...................PA25, PA59Zajadacz J. .........................PA38Zandvliet H. .........................PA10Zekentes K. .........................PA45Zelsmann M. .........................D9-1Zemlyakov V. ...................PC145Zenger T. ............................ PA06Zengerle R. .........................PD55Zeniou A. ... PB24, PD18, PD79 Zergioti I. ............PC101, PC150, ................................................PD60Zhai K. ..................................PC57Zhang H. ............................ PC124Zhang L. .......A2-1, A7-5, PB62, .......................PB63, PC81, PD47

Zhang P. .........A5-3, D3-1, D8-2Zhang R. ...C2-4, PB59, PC147 Zhang S. ................................A7-5Zhang X. ..............................PC26Zhang Y. ................PB63, PB64, ..................................PC49, PC127Zhao D. ..................................PA14Zhao H. ................................ PC64Zhao M. ......PC57, PC64, PC111Zhao X. ................................ PC09Zhao Y. ..................PA65, PC134Zhi Y. .................................... PC49Zhikharev E. ........................PA71Zhong S. .... PB62, PB63, PC81Zhou J. .....PB62, PB63, PB64, ..................................................PC81Zhou X. .................. PC39, PC127Zhou Y. ................................ PC80Zhu J. .A7-5, C5-1, PA12, PB29Zhu M. ..........A10-1, C7-4, PA69Zhu X. ..................................... PA11Zhu Z.................................... PC34Zhuang C. .............................PB19Zhuangzhuang W. ............ PA12Zieger G. ..............................PC45Zimmer K. ...........................PA38Zisis G. ......PA52, PA-57, PB78, ..................................................PB81 Zong L. ..................................C7-4Zuo K. ...................................PD29Zwolak M. .............................PB21

104

NEM20


Note

s

105


Rhodes, GreeceN

ote

s

106

advanced patterning nanofabrication for functionality ... · advanced patterning •...

Documents