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TRANSCRIPT
103/06/16 :
Outline
• Micro-fluidic chip
••••
3D Bio -MEMS : Microfabrication / PDMS Process
Silicon Wafer
Silicon Wafer
Silicon Wafer
Slide Glass
Slide Glass
SU-8 microstructure
PDMS curing
PDMS peeling off
PDMS bonding
O2 plasmatreatment
3D Bio -MEMS : Microfabrication Process
SU-8 Microstructure Process ( 25 um and 100 um in thickness )
Glass Substrate Cleaning using acetone and IPA with sonication for 10 min
SU-8 Spin Coating at 500 RPM for 10 sec, then at 1000 ~ 3000 RPM for 30 sec
Soft Bake at 65 oC for 5 ~ 60 min, then at 95 oC for 60 ~ 120 min
UV Exposure using ultra-high UV intensity for 40 ~ 45 sec
Post Exposure Bake at 65 oC for 1 ~ 5 min, then at 95 oC for 10 ~ 15 min
Development at room temperature for 4 ~ 12 min
Hard Bake at 150 oC for 30 ~ 60 min
PDMS Process
Mixing and Degassing in vacuum chamber for 60 min
Mold Curing at 90 ~ 95 oC for 20 min
Outline
• Micro-fluidic chip 簡介
••••
PDMS microchannel
PDMS microchannel
Cross section X > 90umY > 90um
X
Y
Oxide tip
Angle > 30 degreeLength > 300um
Angle
length
3D Bio -MEMS : Pattern Design
1st Layer (1) 1st Layer (2) 2nd Layer
3D Bio -MEMS : Mask Layout
Factor inlet
Mixing channel
Reaction chamber
Macroscopic alignment keys
Microscopic alignment keys
Chemicals recollection outlet
Outline
• M程cro-相lu程申程c ch程能 ••••
90um(outlet)
Top view Side view
SiO2 cantilever
PDMS
PDMS
Si
Electrospray chips (SEM)
Result -Triangular Cantilever Tip (~30 degree)-Channel profile alignment and size (channel size 90x90um)
3D Bio -MEMS : 2D Fluidic Mixing Test
Reaction chamber
Dye inlet
Dye recollection chamber
Mixing channel
3D Bio -MEMS : 3D Fluidic Visualization
Dye inlet
Reaction chamber /Interconnect chamberfor upper and bottomlayers
Opto-microfluidics Chip and its Applications
*Separation and concentration of particles
*Trapping and controlling single particles in real-time
Outline
• M程cro-相lu程申程c ch程能 ••••
SNDL Micro-fluidic chip 製作流程(Q&A)
Coordinator Assistant(Co-work) Question Answer
()
(/ )
1. ?
2. ?
1. NDL ,MES
(SE-series),
Micro-fluidic chip
2. Micro-fluidic chip
,( 8703) , E-
MASK ()
( ) 1. NDL?
2.?(Test key,
Mark…etc.)
1.( 20um),
NDL
2.,Mask design rule
SNDL Micro-fluidic chip 製作流程(Q&A)Coordinator Assistant(Co-work) Question Answer
Etching ()
()
? ,
,Si,SiO2,SiNx,poly-Si
Bonding ()
(/ )
1. Bonding ? 1. PDMS
2. (Al, Cr/Au..)PDMS
3. /SiO2/SiNxPDMS
SNDL Micro-fluidic chip 連續製程委託送件流程(Contact)
MES
( ,6632) ( ,6623) ( ,6624)
1.
2.
3.
1.
2.
1.
2.
3.
4.
3.
4.
SNDL Micro-fluidic chip 連續製程委託送件流程(Relation)
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SNDL Micro-fluidic chip
1. Micro-fluidic chip NDL, , ;
, ( ,8703)
2. NDL , ( ,8703)(.dwg) Email ( ,6624)
,
NDL Micro-fluidic Chip 標準連續製作流程標準連續製作流程標準連續製作流程標準連續製作流程(Micro-fluidic Chip Process Flow)
Substrate clean
Mold 1 Lithography-SU8
Metal 1 Pattern etching
Oxide deposition
Oxide etching
Oxide Lithography
• 35 , , 1 1
Mold 2 Pattern etching
Repeat Process 2 ~ 4 molds for 3D Micro-fluidic Chip
Mold 2 Lithography-AZP series
Mold 2 PR stripping
Replica Mold Substrate
Metal 2 Pattern etching
isotropic-Si etching
PDMS mixing and degassing
O2 plasma treatment
Bonding alignment
PDMS replica & bonding
PDMS de-molding & drilling
Bonding curing
Micro-fluidic Chip 標準連續製作流程標準連續製作流程標準連續製作流程標準連續製作流程光罩流程光罩流程光罩流程光罩流程 (範例範例範例範例)
(Micro-fluidic Chip for Biosensor)
Micro-fluidics
inlet & outlet●PDMS via-hole6
Oxide Tip●Oxide15
Au●Metal-24
Cr●Metal-13
PR-AZP4620●Mold-22
PR-SU8●Mold-11
DescribeClearDarkNameGDS NO.
Micro-fluidic Chip 標準連續製程標準連續製程標準連續製程標準連續製程 Base-Line條件條件條件條件(Micro-fluidic Chip for Biosensor)
0.15umM2 dep. (Au)Metal 2
0.02um~0.05umM1 dep. (Cr)Metal 1
30um/5cmChannel width/length
7,8,9umPR lith-AZP4620
Mold2
100um/5cmChannel width/length
50,75,100umPR lith-SU8
Mold1
1umPassivation (SiOx)Passivation
SpecProcess Step