![Page 1: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/1.jpg)
Thin films(see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3)
Thin films(see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3)
Common epilayer defectsCommon epilayer defects
![Page 2: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/2.jpg)
Thin films(see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3)
Thin films(see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3)
Common epilayer defects
Investigate using rocking curves
Common epilayer defects
Investigate using rocking curves
![Page 3: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/3.jpg)
Thin films(see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3)
Thin films(see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3)
Common epilayer defects
Investigate using rocking curves
Layer & substrate peaks split
rotation invariant
Common epilayer defects
Investigate using rocking curves
Layer & substrate peaks split
rotation invariant
![Page 4: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/4.jpg)
Thin filmsThin films
Common epilayer defects
Investigate using rocking curves
Layer & substrate peaks split
varies w/rotation
Common epilayer defects
Investigate using rocking curves
Layer & substrate peaks split
varies w/rotation
![Page 5: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/5.jpg)
Thin filmsThin films
Common epilayer defects
Investigate using rocking curves
Broadens layer peakinvariant w/ beam sizepeak position invariant
w/ sample position
Common epilayer defects
Investigate using rocking curves
Broadens layer peakinvariant w/ beam sizepeak position invariant
w/ sample position
![Page 6: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/6.jpg)
Thin filmsThin films
Common epilayer defects
Investigate using rocking curves
Broadens layer peakmay increase w/ beam
sizepeak position invariant
w/ sample position
Common epilayer defects
Investigate using rocking curves
Broadens layer peakmay increase w/ beam
sizepeak position invariant
w/ sample position
![Page 7: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/7.jpg)
Thin filmsThin films
Common epilayer defects
Investigate using rocking curves
Broadens layer peakincreases w/ beam sizepeak position varies
w/ sample position
Common epilayer defects
Investigate using rocking curves
Broadens layer peakincreases w/ beam sizepeak position varies
w/ sample position
![Page 8: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/8.jpg)
Thin filmsThin films
Common epilayer defects
Investigate using rocking curves
Layer & substrate peaks split splitting different for
symmetric & asymmetric reflections
Common epilayer defects
Investigate using rocking curves
Layer & substrate peaks split splitting different for
symmetric & asymmetric reflections
![Page 9: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/9.jpg)
Thin filmsThin films
Common epilayer defects
Investigate using rocking curves
Various effects vary w/ sample position
Common epilayer defects
Investigate using rocking curves
Various effects vary w/ sample position
![Page 10: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/10.jpg)
Thin filmsThin films
Investigate using rocking curves
Film thickness
Integrated intensity changesincreases w/ thickness
Interference fringes
Investigate using rocking curves
Film thickness
Integrated intensity changesincreases w/ thickness
Interference fringes
![Page 11: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/11.jpg)
Thin filmsThin films
MismatchMismatch
constrained relaxed
![Page 12: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/12.jpg)
Thin filmsThin films
Mismatch
Layer & substrate peaks split – rotation invariant
Measure, say, (004) peak separation , from which
d/d = – cot = m* (mismatch)
Mismatch
Layer & substrate peaks split – rotation invariant
Measure, say, (004) peak separation , from which
d/d = – cot = m* (mismatch)
constrained relaxed
![Page 13: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/13.jpg)
Thin filmsThin films
Misorientation
First, determine orientation of substrate
rotate to bring plane normal into counter plane
do scans at this positionand at + 180°
orientation angle = 1/2difference in two angles
Misorientation
First, determine orientation of substrate
rotate to bring plane normal into counter plane
do scans at this positionand at + 180°
orientation angle = 1/2difference in two angles
= 90°
![Page 14: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/14.jpg)
Thin filmsThin films
Misorientation
First, determine orientation of substrate
Layer tilt (assume small)
layer peak shifts w/ in scans
Misorientation
First, determine orientation of substrate
Layer tilt (assume small)
layer peak shifts w/ in scans
= 90°
shift +
![Page 15: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/15.jpg)
Thin filmsThin films
Misorientation
First, determine orientation of substrate
Layer tilt (assume small)
layer peak shifts w/ in scans
Misorientation
First, determine orientation of substrate
Layer tilt (assume small)
layer peak shifts w/ in scans
= 90°
shift –
![Page 16: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/16.jpg)
Thin filmsThin films
Misorientation
First, determine orientation of substrate
Layer tilt (assume small)
layer peak shifts w/ in scans
Misorientation
First, determine orientation of substrate
Layer tilt (assume small)
layer peak shifts w/ in scans
= 90°
no shift
![Page 17: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/17.jpg)
Thin filmsThin films
Misorientation
First, determine orientation of substrate
Layer tilt (assume small)
layer peak shifts w/ in scans
Misorientation
First, determine orientation of substrate
Layer tilt (assume small)
layer peak shifts w/ in scans
= 90°
no shift
![Page 18: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/18.jpg)
Thin filmsThin films
Dislocations
From:high mismatch strain, locally relaxedlocal plastic deformation due to straingrowth dislocations
Dislocations
From:high mismatch strain, locally relaxedlocal plastic deformation due to straingrowth dislocations
![Page 19: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/19.jpg)
Thin filmsThin films
Dislocations
From:high mismatch strain, locally relaxedlocal plastic deformation due to straingrowth dislocations
Estimate dislocation density from broadening (radians)
& Burgers vector b (cm):
= 2/9b2
Dislocations
From:high mismatch strain, locally relaxedlocal plastic deformation due to straingrowth dislocations
Estimate dislocation density from broadening (radians)
& Burgers vector b (cm):
= 2/9b2
![Page 20: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/20.jpg)
Thin filmsThin films
Curvature
R = radius of curvature, s = beam diameter
angular broadening = s/R =
beam radius broadening
5 mm 100 m 10"
Curvature
R = radius of curvature, s = beam diameter
angular broadening = s/R =
beam radius broadening
5 mm 100 m 10"
![Page 21: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/21.jpg)
Thin filmsThin films
Relaxation
Need to measure misfit parallel to interface
Both mismatch &misorientation changeon relaxation
Interplanar spacings change with mismatch distortion & relaxation – changes splittings
Relaxation
Need to measure misfit parallel to interface
Both mismatch &misorientation changeon relaxation
Interplanar spacings change with mismatch distortion & relaxation – changes splittings
![Page 22: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/22.jpg)
Thin filmsThin films
Relaxation
Need to measure misfit parallel to interface
Both mismatch &misorientation changeon relaxation
So, also need misfit perpendicular to interface
Then, % relaxation is
Relaxation
Need to measure misfit parallel to interface
Both mismatch &misorientation changeon relaxation
So, also need misfit perpendicular to interface
Then, % relaxation is
![Page 23: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/23.jpg)
Thin filmsThin films
Relaxation
Grazing incidence Incidence angle usually
very low….~1-2°
Limits penetration ofspecimen
Relaxation
Grazing incidence Incidence angle usually
very low….~1-2°
Limits penetration ofspecimen
reflectingplane
![Page 24: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/24.jpg)
Thin filmsThin films
Relaxation
Grazing incidence Incidence angle usually
very low….~1-2°
Limits penetration ofspecimen
Penetration depth – G(x) = fraction of total diffracted intensity from layer x cm thick compared to infinitely thick specimen
Relaxation
Grazing incidence Incidence angle usually
very low….~1-2°
Limits penetration ofspecimen
Penetration depth – G(x) = fraction of total diffracted intensity from layer x cm thick compared to infinitely thick specimen
![Page 25: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/25.jpg)
Thin filmsThin films
Relaxation
Grazing incidence Incidence angle usually
very low….~1-2°
Limits penetration ofspecimen
Penetration depth – G(x) = fraction of total diffracted intensity from layer x cm thick compared to infinitely thick specimen
Relaxation
Grazing incidence Incidence angle usually
very low….~1-2°
Limits penetration ofspecimen
Penetration depth – G(x) = fraction of total diffracted intensity from layer x cm thick compared to infinitely thick specimen
![Page 26: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/26.jpg)
Thin filmsThin films
Relaxation
Grazing incidence Incidence angle usually
very low….~1-2°
Reflection not fromplanes parallel to specimen surface
Relaxation
Grazing incidence Incidence angle usually
very low….~1-2°
Reflection not fromplanes parallel to specimen surface
reflectingplane
![Page 27: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/27.jpg)
Thin filmsThin films
Relaxation
Grazing incidence If incidence angle ~0.1-5° & intensity measured in
symmetric geometry (incident angle = reflected angle),
get reflectivity curve
Relaxation
Grazing incidence If incidence angle ~0.1-5° & intensity measured in
symmetric geometry (incident angle = reflected angle),
get reflectivity curve
![Page 28: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/28.jpg)
Thin filmsThin films
Relaxation
Need to measure misfit parallel to interface
Use grazing incidencee.g., (224) or (113)
Relaxation
Need to measure misfit parallel to interface
Use grazing incidencee.g., (224) or (113)
![Page 29: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/29.jpg)
Thin filmsThin films
Relaxation
Use grazing incidencee.g., (224) or (113)
Need to separate tiltfrom true splitting
Tilt effect reversedon rotation of = 180°
Mismatch splittingunchanged on rotation
Relaxation
Use grazing incidencee.g., (224) or (113)
Need to separate tiltfrom true splitting
Tilt effect reversedon rotation of = 180°
Mismatch splittingunchanged on rotation
![Page 30: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/30.jpg)
Thin filmsThin films
Relaxation
Use grazing incidencee.g, (224) or (113)
For grazing incidence:
i = +
– splitting betwn substrate & layer
Relaxation
Use grazing incidencee.g, (224) or (113)
For grazing incidence:
i = +
– splitting betwn substrate & layer
![Page 31: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/31.jpg)
Thin filmsThin films
Relaxation
Use grazing incidencee.g, (224) or (113)
For grazing incidence:
i = +
e = –
Can thus get bothand
Relaxation
Use grazing incidencee.g, (224) or (113)
For grazing incidence:
i = +
e = –
Can thus get bothand
![Page 32: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/32.jpg)
Thin filmsThin films
Relaxation
Also,
And
Relaxation
Also,
And
![Page 33: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/33.jpg)
Thin filmsThin films
Relaxation
Also,
And
Finally
Relaxation
Also,
And
Finally
![Page 34: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/34.jpg)
Thin filmsThin films
Homogeneity
Measure any significant parameter over a grid on specimen
Ex: compositional variation
get composition using Vegards lawmeasure lattice parameter(s) – calculate relaxed
mismatch
Homogeneity
Measure any significant parameter over a grid on specimen
Ex: compositional variation
get composition using Vegards lawmeasure lattice parameter(s) – calculate relaxed
mismatch
![Page 35: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/35.jpg)
Thin filmsThin films
Homogeneity
Measure any significant parameter over a grid on specimen
Ex: variation of In content in InAlAs layer on GaAs
Homogeneity
Measure any significant parameter over a grid on specimen
Ex: variation of In content in InAlAs layer on GaAs
![Page 36: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/36.jpg)
Thin filmsThin films
Thickness
For simple structure layer, layer peak integrated intensity increases monotonically w/ thickness
Thickness
For simple structure layer, layer peak integrated intensity increases monotonically w/ thickness
calculated curvescalculated curves
![Page 37: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/37.jpg)
Thin filmsThin films
Thickness
For simple structure layer, layer peak integrated intensity increases monotonically w/ thickness
Note thickness fringes
Can use to estimatethickness
Thickness
For simple structure layer, layer peak integrated intensity increases monotonically w/ thickness
Note thickness fringes
Can use to estimatethickness
calculated curvescalculated curves
![Page 38: Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry and Topography, Chap. 3) Thin films (see Bowen & Tanner, High Resolution X-ray Diffractometry](https://reader036.vdocuments.us/reader036/viewer/2022062404/55166f3b5503461c658b4776/html5/thumbnails/38.jpg)
Thin filmsThin films
Thickness
For simple structure layer, layer peak integrated intensity increases monotonically w/ thickness
Thickness
For simple structure layer, layer peak integrated intensity increases monotonically w/ thickness
calculated curvescalculated curves