stru
ctio
ns
Oxford Instruments Plasma Technology
Plasmalab® System100
System Diagrams
Works Order No.: 94-220025
Orig
inal
In
Customer: University of Notre Dame
www.oxford-instruments.com
Issue 01
November 2010System DiagramsPlasmalab® System100
Orig
inal
Inst
ruct
ions
List of System DiagramsIn the list of drawings below, the page numbers in blue are hyperlinks. Click on a page number to find the corresponding drawing.
Drawing No. Title Revision Date Page
ES30701 LN2 CHANGEOVER OVER UNIT 02 05/08/10 3
SE00A26865 PC2003 INTERFACE SCHEMATIC 08 10/09/09 4
SE00B26162 100/80 SUBCON POWER BOX LOOM 08 30/06/05 5
SE00B26874 AMU CONTROL PCB 03 14/04/09 6
SE00B28100 AMU WIRING PLC 2003 02 22/03/05 7
SE00C31741 LN2 CHANGEOVER UNIT 02 12/03/10 8
SE00D26871 AMU SENSE PCB 02 17/10/07 9
SE00D27872 ANALOGUE CARD INTERFACE SCHEMATIC 01 21/01/05 10
SE81B26657 PC2003 GASPOD LOOM - SHEET 1 07 21/11/08 11
PC2003 GASPOD LOOM - SHEET 2 12
SE91A19752 100 PLUS POWER BOX - SHEET 1 22 19/04/05 13
100 PLUS POWER BOX - SHEET 2 14
SE91A27512 PC2003 100 SYSTEM INTERFACE WIRING - SHEET 1 18 19/02/10 15
PC2003 100 SYSTEM INTERFACE WIRING - SHEET 2 16
SE91C20974 CRYO HEATER TABLE WITH FILTERS EUROTHERM 2404 05 01/07/99 17
SE91C27460 100 SYSTEM LOADLOCK CAN PCB SCHEMATIC 02 30/10/05 18
SE91C28357 VAT VALVE AND TABLE HEIGHT WIRING 07 04/02/10 19
SE91D27463 100/133 SYSTEM LOADLOCK - SHEET 1 10 04/02/10 20
100/133 SYSTEM LOADLOCK - SHEET 2 21
SE91D27997 TC HEATER CONTROLLER 100 SYSTEM 04 30/10/09 22
SE91D28346 VARIABLE TABLE AND VAT CAN SCHEMATIC 02 30/10/05 23
SP91C28022 SERVICE FLOW DIAGRAM BLUE PLC SERIES 180 380 ICP 07 10/02/10 24
SP91C28023 SERVICE FLOW DIAGRAM BLUE PLC 100 & 133 SERIES RIE 04 10/02/10 25
SP91C28024 SERVICE FLOW DIAGRAM BLUE PLC 100 SERIES DP 03 09/04/10 26
Issue 01Page 2
©2010.
OIPT
November 2010Oxford Instruments Plasma Technology. All rights reserved.
94-220025
5
5
4
4
3
3
2
2
1
1
D D
C C
B B
A A
PUMP CURRENT OK>
HEATER SNAP SWITCH BYPASS
+ 24 V DC TO RL2 COM 2
<PUMP
CURRENT SW
+ 24 V DC TO RL6 COM 2+ 24 V DC TO RL6 COM 1
+ 24 V DC TO RL7 COM 2+ 24 V DC TO RL7 COM 1
SPARE INT/LOCK 1 BYPASS
SPARE INT/LOCK 2 BYPASS
A/BLK21A=PURGE SW NOT FITTED.
HOIST
RL4:
CONTROL RF SWITCHING
TOP/LOWER/RF COAX RELAYS
RL5:
DC BIAS SWITCHED
RIE MODE/AMU ONE I/P TO PLC
PE MODE/AMU TWO I/P TO PLC
CM GAUGE I/P +VCM GAUGE 0V
+5v
PUMP CURRENT SW
WATER THREE
SYSTEM SELECTION
< MASTER / SLAVE
LED12 RL10 (HOIST CONTROL)
SPARE INTERLOCK 1
0v
SPARE INTERLOCK 2
RL14 (MASTER/SLAVE) ACTIVE SLAVE
PENNING 0VPENNING I/P +V
TEMPERATURE I/P +VTEMPERATURE 0V
CHILLER 0VCHILLER I/P +V
0v
100 SYSTEM
100 SYSTEM
MASTER / SLAVE SELECT (+24v)+ 12v VIA RL8
100 SYSTEM
100 SYSTEM
AMU TWO C1 POS I/P +VAMU TWO C1 POS 0V
AMU TWO C2 POS 0VAMU TWO C2 POS I/P +V
SYSTEM SELECTION+ 12v
PUMP ONE PURGE SW>
HOIST OK>
VAC STAT OK>
<PUMP ONE PURGE SW
SPARE INTERLOCK 2 OK>
<PUMP ONE PURGE VALVE0v
BUZZER
BUZZER
DRY PUMP ROTATION START
0v
DRY PUMP ROTATION START
DRY PUMP READY>
AMU ONE P TO P +VAMU ONE P TO P 0V
AMU ONE/TWO DC BIAS 0VAMU ONE/TWO DC BIAS +V
RF ONE FWD I/P 0VRF ONE REF I/P +VRF ONE REF I/P 0V
RF ONE FWD I/P +V
LASER E/POINT I/P +VLASER E/POINT 0V
OIPT & VERITY E/POINT 0V
0v
OIPT & VERITY E/POINT I/P +V
24V TRIP
20V MIN
21.1V MAX
AMU ONE C1 POS I/P +VAMU ONE C1 POS 0V
AMU ONE C2 POS 0VAMU ONE C2 POS I/P +V
AMU TWO C2 POS 0V
AMU TWO C1 POS S/P +V
ATMOSPHERE I/P
DIG IN TO PLC
AMU TWO C1 POS 0VAMU TWO C2 POS S/P +V
CHILLER READY
< CM IN
PUMP ONE PURGE SW.
LK21A=SW NOT FITTED.
LK21B=SW FITTED.
ON/OFFBUTTONS/LEDS
AMU TWO/P TO P/RF ON/DC BIASREF:RL5 DC BIAS/RL3 RF ON
CM IN >
CM COMP OK>
OPTICAL E/POINT I/P +VOPTICAL E/POINT 0V
LASER E/POINT 0VLASER E/POINT I/P +V
HO
IST
& V
AC
ST
AT
OK
>
LN2
OVERTEMP ALARM
NAME COLOUR MONITORING
GREEN + 24 V DCRED + 15 V DC
YELLOW - 15 V DCGREEN + 5 V DC
AMU TWO C1 POS 0VAMU TWO C1 POS S/P +V
AMU TWO C2 POS 0VAMU TWO C2 POS S/P +V
AMU TWO C2 POS I/P +VAMU TWO C2 POS 0V
AMU TWO C1 POS 0V
Ov
AMU TWO C1 POS I/P +V
N2 PRESS SWITCH>
REDREDREDREDREDRED
N2 PRESSURE SWITCH
WATER ONEWATER TWO
HOIST
PUMP PURGE SWITCH
VAC STAT
02/02/2004
N/U
N/UN/U
N/U
0v
-15v
L/LOCK PIRANI 0VL/LOCK PIRANI I/P +V
+24V TO GASPOD
+15v
0v
SPARE INTER LOCK 2
+24v
SPARE INTER LOCK 1
PUMP ONE RUNNING
RL5 COM
L/LOCK PUMP CONT
PUMP ONE FAIL
PUMP ONE CURRENT SW
PUMP ONE PURGE SW
PUMP TWO RUNNING
PUMP TWO FAIL
DRY PUMP SIGNAL 2
DRY PUMP SIGNAL 3
WATER FLOW THREE
+ 15v
+ 24v
DRY PUMP SIGNAL 4
+ 24v
0v
0v
- 15v
RF ONE/TWO ON TO AMU TWO
PUMP 3 AND L/L TURBO FROM LL CAN
AMU TWO DC BIAS +VAMU TWO DC BIAS 0V
PRIMARY +24V
START OF INTERLOCK CHAIN
SECONDARY +24V
START OF INTERLOCK CHAIN
RL5 NC
Ov
RL5 NO
TURBO AT SPEED>
TURBO BRAKING
DRY PUMP ROTATION START
HOIST
VAC STAT
WATER FLOW ONE
L/L TURBO ON>
WATER FLOW TWO
N2 PRESS SWITCH
TURBO AT SPEED
- 15 VOLTS OK
+ 15 VOLTS OK
+ 24 VOLTS OK
EMO BUTTON OUTEMO BUTTON RET
PWR BOX RETPWR BOX OUT
SYSTEM ON0V
CM COMPARATOR
CHILLER READY TEMP
WATER FLOW THREE
POWER ON0VOFF SWOFF SWON SWON SWSYS ON LAMPSYS ON LAMP
EMO IN0VCONTACTOR ONMAIN ON LAMPMAIN ON LAMP
LK3 NON - CONTROLLER CRYO ENABLE
NON - CONTROLLER HEATER ALARM
PUMP ONE ON
PUMP TWO ON
PUMP ONE PURGE VALVE
SOFT VENT
VENT
PENNING ENABLE
TEMPERATURE I/P +V>TEMPERATURE 0V>
TURBO GATE VALVE
TURBO BACKING VALVE
TURBO PURGE VALVE
TURBO START/ON
SOFT ROUGH VALVE
ROUGH VALVE
L/LOCK GAUGE ENABLE
0v
L/LOCK PENNING I/P +VL/LOCK PENNING 0V
ANALOGUE 0v TO CHASSIC
<TEMP CONT S/P +V<TEMP CONT 0V
DIGITAL 0v TO ANALOGUE 0v
FIT IF NO OEM CONTROLLER
+ 24 V DC TO RL2 COM 1
PENNING ENABLE
PUMP THREE FAIL>
SPARE DIG I/P
DRY PUMP READY>
PUMP THREE RUNING><PUMP THREE ON
+ 24v0v
RL7 COM 1 / + 24v (LK12 FITTED)
RL7 COM 2 / + 24v (LK13 FITTED)
CM GAUGE 0VCM GAUGE I/P +V
RL7 NC 2RL7 NO 2
RL7 NO 1
CM GAUGE 0VCM GAUGE I/P +V
RL7 NC 1
APC
CM GAUGE
PENNING I/P +V
PENNING 0V
RL2 & 6>
ATMOSPHERE
HOIST OK>
PENNING
L/LOCKPENNING
CHILLER
TEMP I/P
TEMP CONT
<RF ONE ON FROM PLC
RF ONE ON TO AMU ONE>
RF ONE/TWO ON
TO AMU TWO
<RF TWO ON FROM PLC
RIE/PE +24V NCRIE/PE +24V NO
<HEATER ENABLE
AMU ONE P TO P 0VAMU ONE P TO P +V
AMU ONE/TWO
DC BIAS +V
BUZZER
+ 24v
AMU TWO DC BIAS +V
FROM AMU TWO
AMU ONE DC BIAS +V
FROM AMU ONE
AMU ONE DC BIAS 0V
FROM AMU 0NE
AMU TWO P TO P 0VAMU TWO P TO P +V
FLOW METER / MAG LEV I/P +VFLOW METER / MAG LEV 0V
He COOLING FLOW 0VHe COOLING FLOW I/P +V
He COOLING PRESSURE I/P +V
CM GAUGE ISO VLV
PENNING ISO VLV
He COOLING PRESSURE 0V
0v
0v
He COOLING PRESSURE S/P +VHe COOLING PRESSURE 0V
L/L PENNING ENABLE
VALVES ISO
RL2 NO 2
HFV 8000 ENABLE/+12V CONNECTED
HFV 8000 ENABLE/+12V CONNECTED
HOISTINTERLOCK(S)
RL9 COM 1
GUARDMASTER+ 24vHOIST1><VAC STAT OKHOIST>
GUARDMASTER:
SWITCH FUCTION REPLACES RL10.
SWITCH DOUBLE POLE SINGLE THROW.
LASER ENDPOINT
SPARE INTERLOCK 1 I/P
RL13 O/P TO SPARE INTERLOCK TWO
INTERLOCKS OK>
+ 24vVIA VAC STAT
SPARE INTERLOCK 2 I/P
0v
PUMP CURRENT
+ 24V VIA INTERLOCK CHAIN
+ 15v
+ 15v
+ 15v
+ 15v
CM COMPARATOR
HOIST INTERLOCK(S)
+ 15v
+ 15v
- 15v
- 15v
- 15v
- 15v
SPARE INTERLOCK 1 O/P
- 15v
- 15v
SPARE INTERLOCK 1
0v
0v
0v
0v
0v
0v
0v
0v
0v
0v
0v
0v
0v
0v+ 24v
0v
CM ISO VLV
PENNING ISO VLV
L/LOCKPIRANI
L/L PIRANI GAUGE I/P +V
L/L/ PIRANI GAUGE 0V
0v+ 24v
<COMP OUT
<COMP OUT
<TURBO AT SPEED
AMU ONE / P TO P/RF ON / DC BIASREF:RL5 DC BIAS/RL3 RF ON
SENSOR SUPPLY
He PRESS
TEMP SIGN
TEMPERATURE 0VTEMPERATURE I/P +V
PUMP THREE ON><PUMP THREE RUNNING<PUMP THREE FAIL
FLOW METER MAG
LK21
RL9 NC 1
RL9 NO 2
RL9 COM 2
RL9 NO 1
RL9 NC 2
HOIST CONTROL
CHILLER I/P +VCHILLER 0V
RF ONE
RF TWO
RL6 NC 2
AUX GAUGE I/P +V
DC BIAS
CH TURBO CONT
AUX GAUGE 0V
WATER SW
HOIST
GASPOD PWR
VALVES SMC
ROUHING VLV I/P
TURBO VLV I/P
AMU ONE
PUMP ONE
AIR PRESS I/P
RL2 COM 2 / + 24v (LK9 FITTED)RL2 NC 2
CHILLER S/P +V
TEMP CONT S/P +VTEMP CONT 0V
CHILLER 0V
AMU TWO DC BIAS 0V
FROM AMU TWO
AMU ONE C2 0VAMU ONE C2 S/P +V
AMU ONE C1 S/P +VAMU ONE C1 0V
AMU ONE C2 POS I/P +VAMU ONE C2 POS 0V
AMU ONE C1 POS 0VAMU ONE C1 POS I/P +V
<CRYO ENABLE
He FLOW
ENDPOINT(S)
DRY PUMPS
0vSOFT ROUGH VALVE0v
TURBO ON/START
<PUMP TWO ON - K3PUMP TWO RUNNING>
PUMP ONE CURRENT SW>
PUMP ONE RUNNING>PUMP ONE FAIL>
PUMP TWO FAIL>
RIE/PE & DC BIAS SW
AMU TWO AUTO/MANUAL
AMU TWO PARK/FREEZE
CLOSE <OPEN <0v-ANA
<LN2 VLV CONT +V<LN2 VLV CONT 0V
RF TWO ON
AMU ONE AUTO/MANUAL
AMU ONE PARK/FREEZE
APC S/P +VAPC 0V
RF ONE ON
+ 24v
+ 24v
+ 24vDRY PUMP SIGNAL 4
DRY PUMP SIGNAL 3
DRY PUMP SIGNAL 2
+ 24vVAC STAT I/P
A
TURBO PURGE VALVE0vTURBO BACKING VALVE0v
TURBO GATE VALVE
0vVENT
0vSOFT VENT
0v
RF ONE ON
AMU ONE PARK/FREEZEOv
Ov
LK1LK2
LK4LK5
LK8LK9LK10LK11LK12LK13
LK17LK18LK19
LK20
RF ONE REF I/P +VRF ONE FWD 0V
0v
RF ONE FWD I/P +VRF ONE 0VRF ONE S/P +V
TURBO BRAKING>
B
POWER IN
Ov
AMU ONE AUTO/MANUAL
VAC STAT
R62 = 12K SWITCHES 11.5V ~ 12.2V
R62 = 15K SWITCHES 12.0V ~ 12.6V
RF TWO ON
AMU TWOAMU TWO PARK/FREEZE0v
0v
0v
AMU TWO AUTO/MANUAL
RL6 NO 1
DRY PUMP ROTATION START
DRY PUMP READY
He COOLING PRESSURE 0VHe COOLING PRESSURE I/P +V
0v
He COOLING FLOW 0VHe COOLING FLOW I/P +V
He COOLING PRESSURE 0VHe COOLING PRESSURE S/P +V
TEMP CONT S/P +V
+ 24v
RIE/PE +12V NCRIE/PE +12V NO
He COOL VALVE
0vN2 CONDEN' VALVE
0v
0v
ROUGH VALVE/GATE
ROUGH VALVE/GATE
K5 OK>
RL6 COM 1 / + 24v (LK10 FITTED)
RF ONE REF 0V
<CRYO ENABLECRYO ENABLE>
NAME FUNCTION
0v
RL3:
SYSTEM FITTED WITH 2 AMU AND 1 RF
RF ONE/RF ON SIGNAL SWITCHED TO
AMU 0NE RIE MODE/AMU TWO PE MODE
01 ---- FIRST ISSUE
HOIST>
POWER OUT
+ 24v
ATMOSPHERE SW
+ 24v
RL6 NC 1
HOIST VLV A
HOIST VLV B0V
0VR/HAND SW NOR/HAND SW COM
L/HAND SW COML/HAND SW NO
UP/DOWN SW COMUP/DOWN SW NOUP/DOWN SW NC
RIE/PE &
DC BIAS SW
+ 24v
RF ONE ON TO AMU ONE
LED4
LED10
LED6
+ 24v
+ 24v
LED7
LED9
PRESS SW
LED8
WATER FLOW ONE
WATER FLOW TWO
+ 24v
RF TWO REF 0VRF TWO REF I/P +V
+ 24v
<N2 PRESS SWITCH
TURBO AT SPEED>
RF TWO FWD 0VRF TWO FWD I/P +VRF TWO 0V
LED2LED3
LED1
RF TWO S/P +V
ALARM O/PHEAT ON -
SNAP SW COMSNAP SW NC
- 15V OK+ 15V OK+ 24V OK
RF TWO FWD I/P +VRF TWO FWD 0VRF TWO REF I/P +VRF TWO REF 0VRF TWO P TO P I/P +VRF TWO P TO P 0V
FLOW METER MAG LEV 0VFLOW METER MAG LEV I/P +V
RL2 COM 1 / + 24v (LK8 FITTED)
RL6 NO 2
ALARM O/PHEAT ON +
PWR BOX SKT13 A - 0vPWR BOX SKT13 B - ALARM +PWR BOX SKT13 C - HEAT +
CHILLER S/P +VCHILLER 0V
TEMP CONT 0VTEMP CONT S/P +V
RF TWO S/P +VRF TWO 0V
RF ONE S/P +VRF ONE 0V
SNAP SW
APC 0VAPC S/P +V
AMU ONE C1 S/P +V
AMU ONE C2 S/P +V
PURGE FLOW OK
PURGE FLOW OK
AMU ONE C2 0V
AMU ONE C1 0V
RIE/PE +24V NCRIE/PE +24V NO
RIE/PE
LED11
PUMP TWO
PUMP THREE
PUMP THREE DP - 100 SYSTEM ONLY
L/L/ PENNING ENABLE
PENNING ENABLE
L/L/ PENNING GAUGE 0V
L/L PENNING GAUGE I/P +V
AMU ONE/TWO
DC BIAS 0V
LED13LED14LED15LED16
RL2 NC 1
LED17
RL2 NO 1
REDREDREDREDREDRED
+24v
+24v
+24v
+24v
+24v
0v
0v
0v
0v
0v
N2 CONDEN' VALVE
+15v
+15v
He COOL VALVE
MASTER / SLAVE SELECT
-15v
-15v
N/UN/U
0v0v
CRYO ENABLE
N/UN/UN/U
0v0v
HEATER ENABLE
N/UN/UN/U
0v+12v
0v
REF:
PUMP ONE PURGE SWITCH & VALVE REF:
INTERLOCK CIRCUIT.
N/UN/UN/UN/U
+ 24v
PUMP ONE CURRENT SW +24V
N/UN/UN/UN/U
RL6 COM 2 / + 24v (LK11 FITTED)
0v
0v
AMU ONE DC BIAS 0VAMU ONE DC BIAS +V
0v
+12V
CONNECTED
+12V
CONNECTED
INTERLOCKS
AUX GAUGE
SPARE
<PUMP ONE ON - K2
02
A
B
0v0v+ 24v+ 24v
+ 24v
0v0v+ 24v + 24v
0v0v+ 24v
+ 24v
0v0v+ 24v
HOIST
VAC STAT
WATER FLOW ONE
WATER FLOW TWO
N2 PRESS SWITCH
- 15 VOLTS OK
+ 15 VOLTS OK
WATER FLOW THREE
PUMP ONE ON
PUMP TWO ON
PUMP ONE PURGE VALVE
TURBO BACKING VALVE
TURBO PURGE VALVE
TURBO START/ON
SOFT ROUGH VALVE
ROUGH VALVE
TURBO BRAKING
TURBO AT SPEED
+ 24 VOLTS OK
CM COMPARATOR
CHILLER READY TEMP
SOFT VENT
VENT
PENNING ENABLE
TURBO GATE VALVE
L/LOCK GAUGE ENABLE
RIE/PE & DC BIAS SW
AMU TWO AUTO/MANUAL
AMU TWO PARK/FREEZE
RF TWO ON
AMU ONE AUTO/MANUAL
AMU ONE PARK/FREEZE
RF ONE ON
DRY PUMP READY
PUMP ONE RUNNING
PUMP ONE FAIL
PUMP ONE CURRENT SW
PUMP ONE PURGE SW
PUMP TWO RUNNING
PUMP TWO FAIL
DRY PUMP SIGNAL 2HEATER ENABLE
DRY PUMP ROTATION START
SPARE INTER LOCK 2
SPARE INTER LOCK 1
DRY PUMP SIGNAL 3
DRY PUMP SIGNAL 4N2 CONDEN' VALVE
He COOL VALVE
MASTER / SLAVE SELECT
CRYO ENABLE
ATMOSPHEREBUZZER
CM ISO VLV
PENNING ISO VLV
PM140 E/POINT 0VPM140 E/POINT I/P +V
+ 15v
- 15v0v
0v
0v
0v
+ 24v
+ 24v
PM140ENDPOINT
REMOTE H/VOLT 2-10VDC0v
A
A
B
B
FIT LK6B AND LK7B FIT LK6A AND LK7A
LK14
LK15LK16
LK6
LK7A/B
A/B
LK6A = NON PM140 ENDPOINT
LK7A = NON PM140 ENDPOINTLK6B = PM140 ENDPOINT
LK7B = PM140 ENDPOINT
SEE LK7
SEE LK6A/B
A/B
NOTES
LK14A = NON DRY PUMP FITTEDA/B
NON - CONTROLLER HEATER ENABLE
+ 24 V DC TO RL8 COM 2
CM COMP OKREDLED5
PUMP CURRENT BYPASS
SYSTEM LINK CONFIGURATION TABLE SYSTEM LED MONITORING TABLE
CM GAUGE I/P +VPENNING I/P +VTEMPERATURE I/P +VCHILLER I/P +V0V
APC S/P +VCHILLER S/P +VRF ONE S/P +VTEMP CONT S/P +V0V
N/U
N/UN/U
N/U0V
RF ONE FWD I/P +VRF ONE REF I/P +VAMU ONE P TO P +VAMU ONE/TWO DC BIAS +V0V
AMU ONE C1 POS I/P +VAMU ONE C2 POS I/P +VAMU TWO C1 POS I/P +VAMU TWO C2 POS I/P +V
RF TWO FWD I/P +VRF TWO REF I/P +VRF TWO P TO P I/P +V
0V
AMU ONE C1 S/P +VAMU ONE C2 S/P +VN/UN/U0V
0V
RF TWO S/P +VHe COOLING PRESSURE S/P +VAMU TWO C1 POS S/P +VAMU TWO C2 POS S/P +V
OPTICAL E/POINT I/P +VLASER E/POINT I/P +VL/LOCK PENNING I/P +VL/LOCK PIRANI I/P +V0V
0V0V
He COOLING PRESSURE I/P +VHe COOLING FLOW I/P +VFLOW METER MAG LEV I/P +V
FIT TO BYPASS SNAP SWITCH
ANALOGUE TO CHASSIC
DIGITAL TO ANALOGUE
PUMP ONE
CURRENT
SWITCH BYPASS
OVERTEMP ALARM
O/TEMP ALARM +24VO/TEMP ALARM O/P OVERTEMP ALARM >
CONTROLLER
OVERTEMP ALARM >
OIPT CONTROL
SYSTEM 100/133
LOADLOCK INTERLOCK CHAIN
N/UN/U
AMU1 PWR
AMU2 PWR
AMU1 PWR (+24V/RL17)
AMU2 PWR (+24V/RL17)
0vFORELINE VENT
TURBO VLV I/P
ROUHING VLV I/P
AIR PRESS I/P
TURBO VLV I/P
ROUHING VLV I/P
AIR PRESS I/P
APC OPEN
APC CLOSE
I/P DIG - OIPT APC DATA IN
OIPT APC DATA OUT
OIPT APC CLK
SPARE I/P DIG
25/005/05 15793 REF. ECO15793
LK22 100 SYSTEM ON LED/BULB BYPASSLK23 DRY PUMP SIGNAL 4LK24 700 DegC TEMPERATURE RANGE ENABLE
100 SYSTEM ON LED/BULB BYPASS
DRY PUMP
SIGNAL 4 BYPASS
700 DegC TEMPERATURE
RANGE ENABLE
CONTROL MODE APC <
0v-DIG
CONTROL MODE APC
VAT 612 DIG 0V >
VAT 612 DIG 0V
+24v0v
VAT 612 VLV POSISTION +V
VAT 612 VLV POSISTION +V
VAT 612 VLV POSISTION 0V
VAT 612 VLV POSISTION 0V
AUX GAUGE I/P +VAUX GAUGE 0V
AUX GAUGE I/P +V
CONTROL MODE APC
VAT 612 VLV POSISTION +V
APC OPEN
APC CLOSE
CONTROL MODE APC
>
>
>
>
>
>
>
03 28/08/07 REF:ECO22349 & DR178
GEN INTER
+ 24v VIA INT' CHAIN COMP
+ 24v VIA INT' CHAIN COMP0v
0v
A
B
LK25 LK25A = LOADLOCK WET PUMP
NOT FITTED 100/133
LK21B=PURGE SW FITTED.
LK25B = LOADLOCK DRY PUMP
LK14B = DRY PUMP FITTED
VAT 612
RL18, RL19, RL20, D17, D20 & D21
FITTED AS STANDARD
REMOVED FOR OIPT APC
APC OPENAPC CLOSE
APC S/P +V
+ 24v
CM GAUGE I/P +V
OIPT APC
+ 15v
- 15v0v
0v
0v0v
0v0v
+ 24v
100 SYSTEM
EMO BUTTON OUTEMO BUTTON RET
PRIMARY
SECONDARY
PUMP THREE FAIL>PUMP THREE RUNING>
PUMP THREE RL22 NO
+ 24v
PUMP THREE RL22 COM
PUMP THREE WP - 100 SYSTEM ONLY
SPARE I/P DIG
OPTION OF USE INCLUDE:
700 Deg ELECTRODE - WATER FLOW FOUR
LK25A = STANDARD PUMP FITTED
LK25B = DRY PUMP FITTED
REDLED18 SPARE DIG I/P - WATERFLOW 4
I/P DIG - OIPT APC DATA IN
LK14A = NON DRY PUMP FITTEDLK14B = DRY PUMP FITTED
DILUTE N2 FLOW ALARM
NOTE:
SYSTEMS FITTED WITH EBARA DRY PUMP
LK20 - SPARE INTERLOCK 2
NOT FITTED ON EBARA DRY PUMPSRL23
LK26
LK27
FITTED FOR DRY PUMPSNOT FITTED FOR EBARA
FITTED FOR EBARANOT FITTED FOR DRY PUMPS
LK27
<0v SUPPLY
<+ 24v SUPPLY
+ 24v
+ 24v
+ 24v
+ 24v
0v
DIG 0v
ANA 0v-15v
+15v
Ov
LK29 AIR PRESS I/P BYPASS
LK30A : POWER BOX K2 CONTROLLEDLK30B : POWER BOX K2 ENABLEA
B
LK30LK30B : POWER BOX K2 ENABLELK30A : POWER BOX K2 CONTROLLED
A/B
SECONDARY EMO - BLK27A - BYPASSED USING WIRE LINK - REF:M.J.COOKE
22349
04 REF:ECO23479
PWR BOX SKT13 D - K5 OK>
K5 OK
K5 OK
A & C
A & B
A
B
LK27BA & C
LK26 A & BLK27 B
2347907/01/08
05 22/04/08 REF:ECO2399023990
06
LK31
I/P DIG - OIPT APC DATA IN
NOT FITTED WHEN GUARDMASTER/BLK19
IS INSTALLED-NOT SYSTEM DEPENDENT
22/08/08 REF:DS252/CHANGES TO RL23 CONTACT AND TRACK/ADD LK31 - GUARDMASTER25241
KLW
REF:
A.COCKRAM
ECO23906
07 12/08/09 REF:ECO23906:R10 WAS 470R CHANGED TO 560R:A.COCKRAM23906
08 10/09/09 27866 REF:ECO27866 - TO MATCH BOM - F1GOES FROM 2 AMP TO 3.15 AMP
SIGN3
SIGN5
SIGN124
SIGN7
SIGN1
SIGN144
SIGN137
SIGN122
SIGN142
SIGN124
SIGN143
SIGN128
SIGN115
SIGN125
SIGN139
SIGN121
SIGN132
SIGN145
SIGN119
SIGN126
SIGN138
SIGN141
SIGN117
SIGN118
SIGN127
SIGN140
SIGN134
SIGN116
SIGN156
SIGN123
SIGN95
SIGN141
SIGN150SIGN149
SIGN90
SIGN140
SIGN102
SIGN9
SIGN11
SIGN99SIGN117SIGN118
SIGN93
SIGN33
SIGN123
SIGN144
SIGN35
SIGN19
SIGN21
SIGN23
SIGN1
SIGN17
SIGN156
SIGN83
SIGN84
SIGN63
SIGN151SIGN152SIGN158
SIGN25SIGN26SIGN27SIGN28
SIGN96
SIGN120
SIGN121
SIGN29
SIGN27
SIGN31
SIGN25
SIGN147
SIGN146
SIGN45
SIGN48
SIGN55
SIGN46
SIGN49
SIGN42
SIGN57
SIGN67
SIGN41
SIGN45
SIGN51
SIGN43
SIGN47
SIGN53
SIGN44
SIGN143
SIGN142
SIGN3
SIGN126
SIGN4
SIGN127
SIGN113
SIGN53
SIGN130
SIGN54
SIGN55
SIGN42
SIGN44SIGN43
SIGN56
SIGN41
SIGN18
SIGN73
SIGN116
SIGN74SIGN67SIGN68
SIGN75SIGN76
SIGN77SIGN78
SIGN17SIGN18SIGN19SIGN20SIGN21
SIGN131
SIGN22SIGN23SIGN24
SIGN132
SIGN57
SIGN59
SIGN157
SIGN33
SIGN62
SIG
N8
9
SIG
N8
7
SIGN146
SIGN37
SIGN40SIGN39
SIGN137
SIGN29SIGN30
SIGN154SIGN153
SIGN130
SIGN157
SIGN47SIGN48
SIGN5
SIGN106
SIGN110
SIGN145
SIGN11SIGN12SIGN94
SIGN49
SIGN129
SIGN13SIGN14
SIG
N8
8
SIGN101
SIGN104
SIGN103
SIGN82
SIGN111
SIGN81
SIGN112
SIGN129
SIGN82
SIGN154
SIGN[1..162]
SIGN153
SIGN105
SIGN66SIGN65
SIGN113SIGN114
SIGN130
SIGN157
SIGN73
SIGN75
SIGN100
SIGN77
SIGN79SIGN80
SIGN135
SIGN35
SIGN86
SIGN155
SIGN149
SIGN98
SIGN107
SIGN138
SIGN147
SIGN89
SIGN91
SIGN105
SIGN112
SIGN108
SIGN150
SIGN139
SIGN148
SIGN95
SIGN107
SIGN96
SIGN111SIGN94
SIGN93
SIGN136
SIGN133
SIGN109
SIGN15
SIGN90
SIGN110
SIGN64
SIGN106
SIGN92
SIGN39
SIGN71
SIGN37
SIGN69
SIGN134
SIGN16SIGN15SIGN6
SIGN85
SIGN31
SIGN32
SIGN1
SIGN8SIGN7
SIGN144
SIGN50
SIGN99
SIGN103
SIGN81
SIGN82
SIGN102
SIGN87
SIGN101
SIGN88
SIGN85
SIGN100SIGN83
SIGN104
SIGN86
SIGN97
SIGN84
SIGN98
SIGN133
SIGN114
SIGN120
SIGN135
SIGN129
SIGN131
SIGN136
SIGN52
SIGN51
SIGN155
SIGN65SIGN65
SIGN6
SIGN4
SIGN2
SIGN13SIGN14SIGN15SIGN16
SIGN12
SIGN10
SIGN24
SIGN22
SIGN20
SIGN32
SIGN30
SIGN28
SIGN26
SIGN59
SIGN61SIGN60
SIGN58
SIGN69SIGN70SIGN71
SIGN66
SIGN68
SIGN56
SIGN54
SIGN52
SIGN50
SIGN38
SIGN36
SIGN34
SIGN78
SIGN76
SIGN74
SIGN70
SIGN72
SIGN38
SIGN40
SIGN36
SIGN34
SIGN60
SIGN58
SIGN8
SIGN72
SIGN62
SIGN64
SIGN148
SIGN46
SIGN2
SIGN159
SIGN10SIGN9
SIGN108
SIGN109
SIGN160
SIGN159
SIGN79SIGN80
SIGN160
SIGN91
SIGN96
SIGN122
SIGN151
SIGN152SIGN151
SIGN109SIGN110SIGN91
SIGN158
SIGN161
SIGN119
SIGN128
SIGN97
SIGN115
SIGN92
SIGN162
SIGN161
SIGN125
SIGN162DIG 0v
+12v
DIG 0v
+24v
+24v
+12v
+5v
DIG 0v
-15v
+24v
+15v
+15v
-15v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
+24v
DIG 0v
-15v DIG 0v +24v+15v
DIG 0v
+5v
DIG 0v
+15v-15v
+24v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
+24v
+12v
+24v
+24v
+24v
DIG 0v
+24v
+24v
+24v
+24v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
+24v
+15v
DIG 0v
-15v
+24v
DIG 0v
+24v
+24v
+24v
+24v
+24v
+24v
DIG 0v
DIG 0v
DIG 0v
+24v
-15v
+15v
+24v
+5v
+24v
+15v
DIG 0v
+24v
+24v
DIG 0v
+15vDIG 0v
+24v
+15v-15v
+24v
DIG 0v
+24v
+15v
+15v
+15v
-15v
+24v
-15v
-15v
-15v
DIG 0v
+24v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
+24v
DIG 0v
-15v
DIG 0vDIG 0v
+15v
DIG 0v
DIG 0v
+5v
DIG 0v
+24v
+24v
DIG 0v
+24v
DIG 0v +24v-15v +15v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
+15v-15v
DIG 0v
+24v
DIG 0v
DIG 0v
DIG 0v +24v
+15v
+24v
DIG 0v
+24v
DIG 0v
DIG 0v
+15v
-15v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0vDIG 0v
DIG 0v
DIG 0v
+24v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
DIG 0v
+24v
DIG 0v
DIG 0v+24v
+24v DIG 0v
+24v DIG 0v
+24v DIG 0v
+24v
+24v
+15v
+24v
DIG 0v
DIG 0v
+24v+24v
+24vDIG 0v
+24v
DIG 0v
+24v
DIG 0v
+24v
DIG 0v
DIG 0v
+15v
-15v
+24v
DIG 0v
DIG 0v+24v
DIG 0v
DIG 0v
DIG 0v
+24v
Size DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
08SE00A26865 Wednesday, September 09, 2009
1 1
A0
PC2003 INTERFACE SCHEMATIC
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\BLUE 80\INTERFACE PCB\PCB INTERFACE REV08\DESIGN4.DSN
Tuesday, January 11, 2005 JBWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
08SE00A26865 Wednesday, September 09, 2009
1 1
A0
PC2003 INTERFACE SCHEMATIC
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\BLUE 80\INTERFACE PCB\PCB INTERFACE REV08\DESIGN4.DSN
Tuesday, January 11, 2005 JBWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
08SE00A26865 Wednesday, September 09, 2009
1 1
A0
PC2003 INTERFACE SCHEMATIC
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\BLUE 80\INTERFACE PCB\PCB INTERFACE REV08\DESIGN4.DSN
Tuesday, January 11, 2005 JBW
JP64
DRY PUMP ONE
JP64
DRY PUMP ONE
123456
RL16
ESR2450
RL16
ESR2450
51
1029
6
-+
RL7
ESR0034
-+
RL7
ESR0034
13567 8 10
12
BLK26
M/S SW
BLK26
M/S SW
123456
Q2
ZTX450/TO
Q2
ZTX450/TO
R15
82K
R15
82K
SKT9
ANA I/P
SKT9
ANA I/P
12345678
910
R53
4K7/0.25W
R53
4K7/0.25W
JP57
GAUGE ISO VLV
JP57
GAUGE ISO VLV
1234
LK26BLK26B
D4
1N4004
D4
1N4004
D241N4004D241N4004
LK25LK25
LED4
+5V GRN
LED4
+5V GRN
C10.1uF/63C10.1uF/63
BLK29
N2 VLV OUT
BLK29
N2 VLV OUT
12
D22
1N4004
D22
1N4004
R37
10K/0.25W
R37
10K/0.25W
R38
1K0/0.25W
R38
1K0/0.25W
SKT13
ANA O/P
SKT13
ANA O/P
12345678
910
R704K7/0.25WR704K7/0.25W
LED9
RED
LED9
RED
LED3
-15V YEL
LED3
-15V YEL
JP38
AMU 2 BIAS
JP38
AMU 2 BIAS
123456
TP9
ANA O/P
TP9
ANA O/P
12345
C18
.1uF/63V
C18
.1uF/63V
TP14
I/P & O/P
TP14
I/P & O/P
123456789
10111213141516
R8
10K/0.25W
R8
10K/0.25W
LK24LK24
R61
3K3/0.25W
R61
3K3/0.25W
R19
47K/0.25W
R19
47K/0.25W
D17
1N4004
D17
1N4004
RL15
ESR2450
RL15
ESR2450
51
1029
6
Q10BC182Q10BC182
BLK27
EMO F/P
BLK27
EMO F/P
12
JP60
AUX GAUGE
JP60
AUX GAUGE
1234567
JP4
I/P & O/P
JP4
I/P & O/P
123456789
1011121314151617181920
R111K0R111K0
LK26ALK26A
R64
100K/0.25W
R64
100K/0.25W
SKT10
ANA I/P
SKT10
ANA I/P
12345678
910
JP61
SP DIG I/P
JP61
SP DIG I/P
1234
JP19
PWR BOX
JP19
PWR BOX
1234
R78 2K4/0.25WR78 2K4/0.25W
JP42
CAN LL
JP42
CAN LL
12345678
JP50
WATER SW
JP50
WATER SW
123456789
TP6
ANA I/P
TP6
ANA I/P
12345
JP48
SPARE I/P DIG
JP48
SPARE I/P DIG
12
LED5
RED
LED5
RED
LED7
RED
LED7
RED
- +
RL3
ESR0034
- +
RL3
ESR0034
1
3
56 7
8
10
12
JP25
RF ONE AUX
JP25
RF ONE AUX
123
TP15
I/P & O/P
TP15
I/P & O/P
123456789
10111213141516
+ C1722uF/35V
+ C1722uF/35V
JP28
UPPER SW
JP28
UPPER SW
123
R10560R/0.25WR10560R/0.25W
C5
.1uF/63V
C5
.1uF/63V
R2
270R/0.25W
R2
270R/0.25W
F1
3.15 AMP
F1
3.15 AMP
Q1
ZTX450/TO
Q1
ZTX450/TO
JP55
PURGE SW
JP55
PURGE SW
1234
D7
1N4004
D7
1N4004
D3
1N4004
D3
1N4004
D9
1N4004
D9
1N4004
R47
4K7/0.25W
R47
4K7/0.25W
- +
RL9
ESR0034
- +
RL9
ESR0034
1
3
56 7
8
10
12
TP7
ANA I/P
TP7
ANA I/P
12345
LED17
RED
LED17
RED
R544K7/0.25W
R544K7/0.25W
JP44
PUMP ONE
JP44
PUMP ONE
12345678910
R59
620R/0.25W
R59
620R/0.25W
JP21
HOIST VLV
JP21
HOIST VLV
1234
JP29
LOWER SW
JP29
LOWER SW
123
JP54
PURGE VLV
JP54
PURGE VLV
12
BLK3BLK312
R714K7/0.25WR714K7/0.25W
BLK5
HOOD/ICP FAN
BLK5
HOOD/ICP FAN
12
JP24
RF ONE
JP24
RF ONE
123456789101112
LK2LK2
BLK11BLK1112
C21
.1uF/63V
C21
.1uF/63V
LED12
RED
LED12
RED
BLK6
RSP FANS
BLK6
RSP FANS
12
JP53
SPARE INT LOCK 2
JP53
SPARE INT LOCK 2
1234
JP52
SPARE INT LOCK 1
JP52
SPARE INT LOCK 1
1234
LK10LK10
BLK23
ROUGH GATE
BLK23
ROUGH GATE
12
LED11
RED
LED11
RED
LK20LK20
LK8LK8
RL22
ESR2450
RL22
ESR2450
51
1029
6
LK1LK1
RL23
ESR2450
RL23
ESR2450
51
1029
6
R49
4K7/0.25W
R49
4K7/0.25W
Q5BC182Q5BC182
LK6LK6
R29
470K/0.25W
R29
470K/0.25W
D6
1N4004
D6
1N4004
JP32
He COOL PRESS
JP32
He COOL PRESS
12345
-+
RL8
ESR0034
-+
RL8
ESR0034
13567 8 10
12
C2
.1uF/63V
C2
.1uF/63V
R7
10K/0.25W
R7
10K/0.25W
RL18
ESR2450
RL18
ESR2450
51
1029
6
SKT2
PENNING
SKT2
PENNING
12345678
LED8
RED
LED8
RED
BLK17
VAC STAT
BLK17
VAC STAT
12
SKT12
ANA I/P
SKT12
ANA I/P
12345678
910
BLK18
HOIST
BLK18
HOIST
12
TP4
ANA I/P
TP4
ANA I/P
12345
BLK30
VAT 612 PWR
BLK30
VAT 612 PWR
12
SKT3
L/LOCK PENNING
SKT3
L/LOCK PENNING
12345678
BLK14
CAN V PWR
BLK14
CAN V PWR
123456
R6310K/0.25WR6310K/0.25W
SKT5
ANA I/P
SKT5
ANA I/P
12345678
910
R3
1K2/0.25W
R3
1K2/0.25W
JP16
CM GAUGE
JP16
CM GAUGE
12345
Q3
ZTX450/TO
Q3
ZTX450/TO
C4
.1uF/63V
C4
.1uF/63V
Q7BC182Q7BC182
LK9LK9
LK14LK14
R39
1K0/0.25W
R39
1K0/0.25W
TP1
ANA I/P
TP1
ANA I/P
12345
R743K0/0.25WR743K0/0.25W
R13
47K/0.25W
R13
47K/0.25W
C19
.1uF/63V
C19
.1uF/63V
-+
RL2
ESR0034
-+
RL2
ESR0034
13567 8 10
12
R16
1K5/0.5W
R16
1K5/0.5W
D5
1N4004
D5
1N4004
R62
12K/0.25W
R62
12K/0.25W
LED1
+24V GRN
LED1
+24V GRN
U2
MAX8216
U2
MAX8216
GN
D2
+5V3
-5V4
DOUT9
OUT410OUT311OUT212OUT113
GN
D8
+15V5
-15V6
DIN7
VREF1
VDD14
BLK22
GEN INTER
BLK22
GEN INTER
12
JP17
CHILLER
JP17
CHILLER
12345
U4
LM7812
U4
LM7812
VI1
GN
D2
VO3
JP1
I/P & O/P
JP1
I/P & O/P
123456789
1011121314151617181920
R66
4K7/0.25W
R66
4K7/0.25W
JP47
DRY PUMPS I/P
JP47
DRY PUMPS I/P
12345678910
SKT15
ANA O/P
SKT15
ANA O/P
12345678
910
R5
5K1/0.25W
R5
5K1/0.25W
R554K7/0.25W
R554K7/0.25W
SKT1
OIPT APC
SKT1
OIPT APC
815714613512411310291
16
17
JP15
APC-CONT
JP15
APC-CONT
12345678910
Q6BC182Q6BC182
Q9BC182Q9BC182
LK19LK19
SKT4
L/LOCK PIRANI
SKT4
L/LOCK PIRANI
12345678
LK21LK21
JP35
ATOM SW
JP35
ATOM SW
1234567
D12
1N4004
D12
1N4004
R9
10K/0.25W
R9
10K/0.25W
D11
1N4004
D11
1N4004
D25 1N4004D25 1N4004
LK22LK22
BLK20
GASPOD
BLK20
GASPOD
123456
F2
1 AMP
F2
1 AMP
R14
100R
R14
100R
R604K7/0.25WR604K7/0.25W LK15LK15
D19 1N4004D19 1N4004
+ C6
22uF/35V
+ C6
22uF/35V
JP43
TURBO LL
JP43
TURBO LL
123456
R76 2K4/0.25WR76 2K4/0.25W
LK11LK11
BLK25
TURBO GATE
BLK25
TURBO GATE
12
LED16
RED
LED16
RED
LED10
RED
LED10
RED
Q4
ZTX450/TO
Q4
ZTX450/TO
JP15A
APC-CM
JP15A
APC-CM
12
R6
1K5/0.25W
R6
1K5/0.25W
BLK10BLK1012
BLK7
LF FAN
BLK7
LF FAN
12
TP3
SPARE
TP3
SPARE
12345
JP66
FORELINE VENT
JP66
FORELINE VENT
12
BLK28
EMO PWR BOX
BLK28
EMO PWR BOX
12
D8
1N4004
D8
1N4004
LED14
RED
LED14
RED
TP10
ANA O/P
TP10
ANA O/P
12345
R31
1K0/0.25W
R31
1K0/0.25W
VR2
10K0
VR2
10K0
- +
RL11
ESR0034
- +
RL11
ESR0034
1
3
56 7
8
10
12
JP62
SP DIG I/P
JP62
SP DIG I/P
123
JP36
RF TWO
JP36
RF TWO
123456789101112
LED15
RED
LED15
RED
R17
1K5/0.5W
R17
1K5/0.5W
R58
620R/0.25W
R58
620R/0.25W
R73
470R
R73
470R
BLK2
+/-15V
BLK2
+/-15V
1234
R50
4K7/0.25W
R50
4K7/0.25W
R35
4K7/0.25W
R35
4K7/0.25W
JP2
I/P & O/P
JP2
I/P & O/P
123456789
1011121314151617181920
RL20
ESR2450
RL20
ESR2450
51
1029
6
TP12
I/P & O/P
TP12
I/P & O/P
123456789
10111213141516
JP26
AMU 1 BIAS
JP26
AMU 1 BIAS
123456
- +
RL1
ESR0034
- +
RL1
ESR0034
1
3
56 7
8
10
12
LK30LK30
SKT16
ANA I/P
SKT16
ANA I/P
12345678
910
LK29LK29
LK18LK18
D18
DIODE ZENER1
D18
DIODE ZENER1
SKT7
ANA O/P
SKT7
ANA O/P
12345678
910
- +
RL12
- +
RL12
1
3
56 7
8
10
12
BLK8BLK81234
JP39
AMU TWO
JP39
AMU TWO
1234567891011121314
JP3
I/P & O/P
JP3
I/P & O/P
123456789
1011121314151617181920
D23
1N4004
D23
1N4004
R32
10K/0.25W
R32
10K/0.25W
U1
LM7805
U1
LM7805
VI1
GN
D2
VO3
- +
RL10
ESR0034
- +
RL10
ESR0034
1
3
56 7
8
10
12
SKT6
ANA O/P
SKT6
ANA O/P
12345678
910
LK23LK23
C7
.1uF/63V
C7
.1uF/63V
JP46
PUMP THREE WP
JP46
PUMP THREE WP
12345
R524K7/0.25WR524K7/0.25W
LK3LK3
BLK16
SNAP SW
BLK16
SNAP SW
12
JP59
EXP
JP59
EXP
12345678
R18
1K5/0.5W
R18
1K5/0.5W
C15.1uF/63VC15.1uF/63V
JP63
PUMP THREE DP
JP63
PUMP THREE DP
12345
-+
RL5
ESR0034
-+
RL5
ESR0034
13567 8 10
12
R4
1K2/0.25W
R4
1K2/0.25W
D21
1N4004
D21
1N4004
R56
4K7/0.25W
R56
4K7/0.25W
- +
RL13
- +
RL13
1
3
56 7
8
10
12
LK5LK5
R36
4K7/0.25W
R36
4K7/0.25W
R574K7/0.25W
R574K7/0.25W
JP33
N2 FLOW METER
JP33
N2 FLOW METER
12345
R72 2K4/0.25WR72 2K4/0.25W
SKT11
ANA I/P
SKT11
ANA I/P
12345678
910
R1
2K0/0.25W
R1
2K0/0.25W
D10
1N4004
D10
1N4004
RL19
ESR2450
RL19
ESR2450
51
1029
6
R40
10K/0.25W
R40
10K/0.25W
JP45
PUMP TWO
JP45
PUMP TWO
12345
D16
1N4004
D16
1N4004
BLK9BLK91234
TP2
ANA O/P
TP2
ANA O/P
12345
BLK4
DIG PLC
BLK4
DIG PLC
12
LED18
RED
LED18
RED
LK7LK7
RL21
ESR2450
RL21
ESR2450
51
1029
6
R33
1K0/0.25W
R33
1K0/0.25W
-+
RL4
ESR0034
-+
RL4
ESR0034
13567 8 10
12
JP30
COAX SW
JP30
COAX SW
123
LED2
+15V RED
LED2
+15V RED
BLK21
GEN INTER
BLK21
GEN INTER
12
- +
RL14
ESR0034
- +
RL14
ESR0034
1
3
56 7
8
10
12
R48
4K7/0.25W
R48
4K7/0.25W
LK12LK12
C20
470pF/100V
C20
470pF/100V
JP37
RF TWO AUX
JP37
RF TWO AUX
123
LK17LK17
R30
10K/0.25W
R30
10K/0.25W
SKT14
ANA O/P
SKT14
ANA O/P
12345678
910
JP51
HOIST CONT INTER
JP51
HOIST CONT INTER
123456
R77 2K4/0.25WR77 2K4/0.25W
JP18
TEMP CONT
JP18
TEMP CONT
12345678910
R125K6R125K6
R654K7/0.25W
R654K7/0.25W
TP13
I/P & O/P
TP13
I/P & O/P
123456789
10111213141516
R694K7/0.25WR694K7/0.25W
BLK1
+24V
BLK1
+24V
12
SKT8
SPARE
SKT8
SPARE
12345678
910
TP11
ANA I/P
TP11
ANA I/P
12345
LK4LK4
D20
1N4004
D20
1N4004
+ C1
22uF/35V
+ C1
22uF/35V
TP5
ANA I/P
TP5
ANA I/P
12345
LK27CLK27C
R20
47K/0.25W
R20
47K/0.25W
JP56
BUZZER
JP56
BUZZER
12
BLK15
TEMP PROBE
BLK15
TEMP PROBE
12
JP22
ON/OFF/LEDS
JP22
ON/OFF/LEDS
12345678910
JP34
ENDPOINT
JP34
ENDPOINT
12345678910
R751K0R751K0
R45
100R/0.25W
R45
100R/0.25W
C3
.1uF/63V
C3
.1uF/63V
LK16LK16
BLK24
ISO VLV
BLK24
ISO VLV
12
JP40
CH TURBO
JP40
CH TURBO
12345678910
D15
1N4004
D15
1N4004
LK31LK31
F3
1 AMP
F3
1 AMP
LED6
RED
LED6
RED
-
+
U5
LM311
-
+
U5
LM311
2
3
756 4
1
8
C12
470pF/100V
C12
470pF/100V
BLK19
GUARDMASTER
BLK19
GUARDMASTER
1234
JP27
AMU ONE
JP27
AMU ONE
1234567891011121314
JP20
HOIST BUTTONS
JP20
HOIST BUTTONS
12345678
D14
1N4004
D14
1N4004
C11
.1uF/63V
C11
.1uF/63V
LK13LK13
-
+
U3
LM311
-
+
U3
LM311
2
3
75 64
1
8
BLK12
CAN A PWR
BLK12
CAN A PWR
123456
LK27LK27
C13
.1uF/63V
C13
.1uF/63V
BLK13
CAN LL PWR
BLK13
CAN LL PWR
123456
BLK27A
EMO F/P
BLK27A
EMO F/P
12
-+
RL6
ESR0034
-+
RL6
ESR0034
13567 8 10
12
JP31
He COOL CONT
JP31
He COOL CONT
12345678
+ -
RL17
ESR0034
+ -
RL17
ESR0034
1
3
56 7
8
10
12
+ C8
22uF/35V
+ C8
22uF/35V
+ C9.1uF/63V
+ C9.1uF/63V
Q8BC182Q8BC182
JP23
EMO I/P
JP23
EMO I/P
123456
JP49
PRESS SW
JP49
PRESS SW
123
C16.1uF/63VC16.1uF/63V
JP58
VALVES
JP58
VALVES
12345678910111213141516
LED13
RED
LED13
RED
R514K7/0.25WR514K7/0.25W
D13
1N4004
D13
1N4004
5
5
4
4
3
3
2
2
1
1
D D
C C
B B
A A
0.1V
EXTERNAL
All unmarked diodes are IN4148's.
(Typ. -2V=MAN
*
Fine adjustment of MAX & MIN limits.10V equates to VH=3.3V, VL=2.7V.
High=Disable, Low=Park.
C1 max. interlock
(RF ON)
C1 EXT POS.
+24v=MANUAL, NC=AUTO.
(max -Ve current -140mA)
+2.5V
Assembly number:
POS. B: PARK DISABLED
10K
FARNELL 657-177 OR 323-159
C2 decrease
POS. B: MED. GAIN
POS. A: PARK ENABLED
C2 EXT POS.
POS. A: LOW GAIN
C1 MOTOR CONTROL
*
+1.4V=AUTO )
High=Disable, Low=Park.
MA00Z26876 AMU CONTROL PCB
POS. A: DISABLE PARK IN MANUAL
+
0.1V
If RF ON=OFF & AUTO=TRUE
Park Pot.
POS. B: AIR CAP.PARK GAIN
6V REF
C2 max. interlock
Note: pin 7 is high if VIN < +2.5v.
POS. A: LOW GAIN
C2 min. interlock
-2.28V
+
(Typ. Vout= -13 to -14.5V)
FOR ANALOGUE SWITCHES
C2 MOTOR CONTROL
9.9V
+2.5V
*
(Typ. -2V=MAN
PARK POTS
Note: pin 7 is high if VIN < +2.5v.
-4.67V
(note DC bias O/P will be +Ve)
SILICONIX DG211
12V REF
Fine adjustment of MAX & MIN limits.
ADJ. TO GIVE 1KV=10V
9.9V
POS. A: VAC CAP.PARK GAIN
POS. A: DISABLE PARK IN MANUAL
POS. B: MED. GAIN
94- EIA0001
C1 decrease
POS. C: HIGH GAIN
PINS 1,3,5,7,8 NO CONNECTION
C1 min. interlock
0.4A (0.8A TRIP)
,8PIN DIL
Note. Logic threshold is set by the
12V REF
C2 increase
RF ON (+5 to +15v equals ON, float or OV equals OFF)
C1 increase
Then CAPS go to park.
POS. C: HIGH GAIN
POS. A: VAC CAP.PARK GAIN
10K
LOW CURRENT LED (2mA)
Symbol used to denote analogue switch
6V REF
POS. B: AIR CAP.PARK GAIN
POS. B: DISABLE PARK Controlled by PLC
4.8v
2.28V
*
+1.4V=AUTO )
PC00S26875 AMU CONTROL PCB
POS. B: DISABLE PARK Controlled by PLC
POWER SUPPLY DETAILS
SYSTEM +24V
1.2v
1A
+
01 First issue----
A
B
B
A
A
B
B
A
B
A
A
B
B
A
A
B
B
A
A
B
A
B
B
C
A
A
C
B
B
A
A
B
(Auto/Manual)
Park/Freeze
*
*
Volt p-p
Volt DC bias
0 Volt
PHASE
MAGNITUDE
Fine GAIN Ajust
Fine GAIN Ajust
28-07-04
LK107
b
LK 1
a
b
a
b
LIN
K
a
LK105
PANEL/PLC CONTR.
b
Full range of the Vaccum cap
LK 2
LK104
a
a
Full range of the Vaccum cap
LK 5
b
a
a
b
b POS. IS USED FOR AMU
a
a
a
LK102
a
VA
C C
AP
LO
W P
WR
a
a
a
AIR
CA
P
a
LK106
INCR.GIAN SIGNAL
a
LK 8
INCR.GIAN SIGNAL
DIFF.TUNE GAIN
a
a
b
c
b
a
CONTROLLED BY PLC
LK108
a
LK101
c
b POS. FOR TESTING ONLY
a
HI P
WR
LK 3
CONTROLLED BY PLC
a
b
b
a
a
a
PANEL/PLC CONTR.
LK 7
RF ON SIGNAL
a
a
b POS. IS USED FOR AMU
LK 4
a
a
VA
C C
AP
a
LK 6
DIFF.TUNE GAIN a
a
a
LK 9 off off off P-P Gain
02 26-11-08 26028 Up issued to remove confusion over multiple rev01’s - No change to the physical rev01 PCB or circuit
03 14-04-09 27155 FS1 and FS101 changed to higher current re-settable fuses (0.8A trip) BOM change only, PCB not changed
0.4A (0.8A TRIP)
JBW
CAP2
CAP2
CAP1
CAP1
C1 decrease
C2 decrease
C1 increase
C2 increase
C2 decrease
C1 decrease
C1 increase
C2 increase
DC Bias
DC Bias
DC Bias
C1c
C1b
C1a
C2c
C2b
C2a
C2a
C2b
C2c
C1b
C1c
C1a
Volt P-P
Volt P-P
+24V
0V
+15V
-15V
0V 0V
+15V
0V
0V
+10V REF
+24V
0V
-15V
+10V REF
-15V
0V
0V
-15V
0V
+10V REF
-15V
+24V
+24V
-15V
-15V
+15V
+10V REF
+10V REF
-15V
-15V
+15V
+15V+15V
0V
0V
+15V
0V
-15V
-15V
+15V
0V
+15V
-15V
-15V
+15V
-15V
-15V
0V
+10V REF
+15V
0V
-15V
0V
+10V REF
0V
0V
-15V
-15V
+15V
+15V
+15V
+15V
+15V
+15V
+15V
+15V
+15V
+15V
+15V
+15V
+15V
-15V
-15V
0V 0V
0V
0V
0V
0V
-15V
0V0V
+15V
0V
0V0V
Size DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
03SE00B26874 Thursday, April 16, 2009
1 1
A1
AMU control PCB
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\PCBS\AMU CONTROL PCB REV03\MAINAMU_PC
Wednesday, September 03, 2003 JRMSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
03SE00B26874 Thursday, April 16, 2009
1 1
A1
AMU control PCB
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\PCBS\AMU CONTROL PCB REV03\MAINAMU_PC
Wednesday, September 03, 2003 JRMSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
03SE00B26874 Thursday, April 16, 2009
1 1
A1
AMU control PCB
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\PCBS\AMU CONTROL PCB REV03\MAINAMU_PC
Wednesday, September 03, 2003 JRM
R36
10K
R36
10K
R11310KR11310K
R6110KR6110K
R62
62K
R62
62K
R21
100k
R21
100k
R94
20K
R94
20K
R45270KR45270K
LED2LED2
R92
470R
R92
470R
C10110nC10110n
U9D
ADG211A
U9D
ADG211A
D7
IN8S
6
TP4TP4
1
TP101TP101
1
R48
560K
R48
560K
R3510KR3510K
+
-
U1
LM311
+
-
U1
LM311
2
37
84 1
6 5
U14REF01U14REF01
OUT6
V+2
V-4
AD
J5
U9C
ADG211A
U9C
ADG211A
D10
IN9S
11
R1310KR1310K
JP6JP6
123456789101112
JP3JP3
123456
R51
100K
R51
100K
R22
10K
R22
10K
R93
10K
R93
10K
C6610uFC6610uF
D5IN4001D5IN4001
D105IN4001D105IN4001
RV2
10K
RV2
10K
R3410KR3410K
R60560RR60560R
R108
10k
R108
10k
R4639KR4639K
D1110VD1110V
C133100nFC133100nF
C116100nFC116100nF
C137100nC137100n
R67
9K1
R67
9K1
R131
47K
R131
47K
R157
1K
R157
1K
R17
560k
R17
560k
R84
100K
R84
100K
LK107LK107
R82
470R
R82
470R
R63100KR63100K
D106IN4001D106IN4001
C123100nFC123100nF
C110100nC110100n
R159100KR159100K
R166100RR166100R
C13210OnFC13210OnF
C131470nC131470n
R66100RR66100R
Q102
ZTX450
Q102
ZTX450
R424K7R424K7
C32100nFC32100nF
R203
?
R203
?
R152
100K
R152
100K
R124
100R
R124
100R
C34100nFC34100nF
LED4LEDLED4LED
C117100nFC117100nF
R123
56K
R123
56K
R14639KR14639K
C37100nC37100n
R16100KR16100K
C6110uFC6110uF
R65100RR65100R
R64180KR64180K
R97
10K
R97
10K
C59100nF
C59100nF
R98
20K
R98
20K
C30100nFC30
100nF
+
-
U106B
TL082
+
-
U106B
TL082
5
67
84
C113100nC113100n
R200
?
R200
?
R140
56K
R140
56K
R691K
R691K
R87100KR87100K
C27100nC27100n
C42.22uF
C42.22uF
C40470nF C40470nF
R116100KR116100K
C68200pFC68200pF
C41
470nF
C41
470nF
R40
56K
R40
56K
R59100KR59100K
R165100RR165100R
R1501KR1501K
U109B
ADG211A
U109B
ADG211A
D15IN16
S14
C129100nC129100n
LK104LK104
C26
100p
C26
100p
C2510nC2510n
+
-
U11B
TL082
+
-
U11B
TL0825
67
84
Q2ZTX450
Q2ZTX450
R10939KR10939K
R2
1M
R2
1M
+
-
U3
LM311
+
-
U3
LM311
2
37
84 1
6 5
C119100nFC119100nF
LK4LK4
+
-
U11A
TL082
+
-
U11A
TL082
3
21
84
R53560RR53560R
C72
200nF
C72
200nF
C1151nFC1151nF
R164180KR164180K
R117
560k
R117
560k
+
-
U101
LM311
+
-
U101
LM311
2
37
84 1
6 5
JP8_2JP8_2
12
C28
10uF
C28
10uF
R18
SOT
R18
SOT
C135
100nF
C135
100nF
+
-
U10B
TL082
+
-
U10B
TL0825
67
84
C124100nFC124100nF
C111
100p
C111
100p
LK9LK9
R38
47K
R38
47K
R100
10K
R100
10K
TP102TP102
1
R91
43K
R91
43K
C52200pFC52200pF
R11182kR11182k
C43.22uF
C43.22uF
+
-
U110B
TL082
+
-
U110B
TL0825
67
84
U9B
ADG211A
U9B
ADG211A
D15IN16
S14
C102100nFC102100nF
Q103
ZTX450
Q103
ZTX450
R23
56K
R23
56K
R89
20K
R89
20K
R144
100K
R144
100K
R30
270K
R30
270K
C8100nC8100n
C151nFC151nF
C125
10n
C125
10n
LK108LK108
R147
100K
R147
100K
R3982kR3982k
R160560RR160560R
JP4JP4
12345678910
R1554K7R1554K7
C120470nC120470n
TP8TP8
1
R561KR561K
R11910K
R11910K
R11010KR11010K
C29100nC29100n
R102
1M
R102
1M
C22100nFC22100nF
C7100nC7100n
JP101JP101
1 2
D10210VD10210V
+
-
U8
L165
+
-
U8
L165
1
24
35
R8
10k
R8
10k
LK102LK102
R80
470R
R80
470R
TP11TP11
1
D8IN4001D8IN4001
R154
10K
R154
10K
+
-
U5B
TL082
+
-
U5B
TL0825
67
84
JP5JP5
1234
R121
100k
R121
100k
R1533KR1533K
R128SOTR128SOT
LK101LK101
R104
51K
R104
51K
R204
?
R204
?
R148
560K
R148
560K
D107D107
R12082KR12082K
R57
1K
R57
1K
R13210K
R13210K
RV1
10K
RV1
10KQ1ZTX450Q1ZTX450
C6710uFC6710uF
R1424K7R1424K7
C6410uFC6410uF
TP30TP30
1
R10
10K
R10
10K
R118SOTR118SOT
C35100nC35
100n
R153560RR153560R
U9A
ADG211A
U9A
ADG211A
D2IN1
S3
R125
10K
R125
10K
U109C
ADG211A
U109C
ADG211A
D10
IN9S
11
R554K7R554K7
+
-
U16D
LM324
+
-
U16D
LM324
12
1314
411
R3320KR3320K
C65100nFC65100nF
RV101
10K
RV101
10K
R158
100K
R158
100K
C36
100n
C36
100n
FS2FS2
C118100nFC118
100nF
TP10TP10
1
JP102JP102
1234
JP8_3JP8_3
12
R25
10K
R25
10K
+
-
U4
L165
+
-
U4
L165
1
24
35
D9IN4001D9IN4001
D11110VD11110V
JP8_4JP8_4
12
TP6TP6
1
R906K8R906K8
U13
Si7661
U13
Si7661
1
2
3
4 5
6
7
8
R201
?
R201
?
R126
470K
R126
470K
R1182kR1182k
C19100nFC19
100nF
LED3LED3
+
-
U16B
LM324
+
-
U16B
LM324
5
67
411
C56
200nF
C56
200nF
C62100nF
C62100nF
C114100nC114100n
R13982kR13982k
R105100KR105100K
R81
470R
R81
470R
R151
100K
R151
100K
+
-
U7B
TL082
+
-
U7B
TL082
5
67
84 R20
82KR2082K
R26
470K
R26
470K
LK8LK8
JP7JP7
12
C70100nFC70100nF
R13320KR13320K
R43
270K
R43
270K
D110vD110vLED5
LED
LED5
LED
+
-
U103
LM311
+
-
U103
LM311
2
37
84 1
6 5
LK7LK7
C14100nC14100n
+
-
U110A
TL082
+
-
U110A
TL0823
21
84
LK105LK105
R44
100K
R44
100K
C127100nC127100n
JP8_1JP8_1
12
LED102LED102
C106100nC106100n
R19
10K
R19
10K
C50
200pF
C50
200pF
U15
Si7661
U15
Si7661
1
2
3
4 5
6
7
8
C20470nC20470n
R122
10K
R122
10K
R13410KR13410K
C130100nFC130
100nF
R101
10K
R101
10K
R610KR610K
C2100nC2100n
TP5TP5
1
R141100RR141100R
R127
10K
R127
10K
R3210KR3210K
C6100nC6100n
+
-
U106A
TL082
+
-
U106A
TL082
3
21
84
LK2LK2
C23100nC23100n
C69200nFC69200nF
R4
51K
R4
51K
C11
100p
C11
100p
R114
51K
R114
51K
C16100nC16100n
C54100nFC54100nF
R701K
R701K
C107100nFC107100nF
C110nC110n
C12270pC12270p
D104D104
C55100nFC55100nF
JP2JP2
1234
D4D4
R88
2K2
R88
2K2
U109A
ADG211A
U109A
ADG211A
D2IN1
S3
C53200nFC53200nF
C143.22uFC143.22uF
LK106LK106
R143
270K
R143
270K
C31
470n
C31
470n
R3
27K
R3
27K
+
-
U107B
TL082
+
-
U107B
TL082
5
67
84
+
-
U108
L165
+
-
U108
L165
1
24
35
C6310uFC6310uF
RV102
10K
RV102
10K
R99
2K2
R99
2K2
C71100nFC71100nF
+
-
U16A
LM324
+
-
U16A
LM3243
21
411
R24
100R
R24
100R
R163100KR163100K
R1679K1R1679K1
Q101ZTX450
Q101ZTX450
C3100nC3100n
R85
10K
R85
10K
TP20TP20
1
R49
62K
R49
62K
C112270pC112270p
R16110KR16110K
R191
51K
R191
51K
C134100nFC134100nF
D108IN4001D108IN4001
R145270KR145270K
C13100nC13100n
LK6LK6
JP1JP1
1 2
C33100nFC33100nF
+
-
U16C
LM324
+
-
U16C
LM32410
98
411
LK1LK1
+
-
U104
L165
+
-
U104
L165
1
24
35
LED1LED1
D109IN4001D109IN4001
C24100nFC24100nF
TP110TP110
1
Q3ZTX450Q3ZTX450
C18100nFC18
100nF
R47
100K
R47
100K
R83
10K
R83
10K
R138
47K
R138
47K
R41100RR41100R
U109D
ADG211A
U109D
ADG211A
D7
IN8S
6
+
-
U5A
TL082
+
-
U5A
TL082
3
21
84
R96
10K
R96
10K
TP7TP7
1
R10610KR10610K
+
-
U6A
TL082
+
-
U6A
TL082
3
21
84
TP3TP3
1
C10100nC10100n
R149
62K
R149
62K
R739KR739K
C13810nC13810n
D10D10
R5100KR5100K
C51200pFC51200pF
R127.4KR127.4K
+
-
U105B
TL082
+
-
U105B
TL0825
67
84
R136
10K
R136
10K
+
-
U107A
TL082
+
-
U107A
TL0823
21
84
C6010nFC6010nF
REG1LM7815REG1LM7815
VI1
GN
D2
VO3
R11533KR11533K
C126100pC126100p
+
-
U105A
TL082
+
-
U105A
TL0823
21
84
R13510KR13510K
+
-
U7A
TL082
+
-
U7A
TL0823
21
84
R52
100K
R52
100K
LED101LED101
R28SOTR28SOT
FS101EFF0108
FS101EFF0108
R9510KR9510K
R31
47K
R31
47K
D6IN4001D6IN4001
R103
27K
R103
27K
R54
10K
R54
10K
C122100nFC122
100nF
R27
10K
R27
10K
C136C136
+
-
U6B
TL082
+
-
U6B
TL082
5
67
84
C58100nFC58100nF
R97.4KR97.4K
LK3LK3
R129
100R
R129
100R
R1451KR1451K
+
-
U10A
TL082
+
-
U10A
TL0823
21
84
C17100nC17
100n
R58
100K
R58
100K
C3810nC3810n
U12
Si7661
U12
Si7661
1
2
3
4 5
6
7
8
TP103TP103
1
C12810uF
+ C12810uF
+
C103100nFC103100nF
R501KR501K
FS1EFF0108FS1EFF0108
R29
100R
R29
100R
R1561KR1561K
R86
10K
R86
10K
TP1TP1
1
R162
62K
R162
62K
LK5LK5
C108100nC108100n
TP2TP2
1
R130
270K
R130
270K C142.22uF
C142.22uF
C5710uFC5710uF
5
5
4
4
3
3
2
2
1
1
D D
C C
B B
A A
Size DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE00B28100 Thursday, June 14, 2007
1 1
A1
AMU Wiring PLC 2003
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\AMU WIRING 2005\DESIGN1.DSN
Thursday, August 18, 2005 J.R.MSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE00B28100 Thursday, June 14, 2007
1 1
A1
AMU Wiring PLC 2003
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\AMU WIRING 2005\DESIGN1.DSN
Thursday, August 18, 2005 J.R.MSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE00B28100 Thursday, June 14, 2007
1 1
A1
AMU Wiring PLC 2003
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\AMU WIRING 2005\DESIGN1.DSN
Thursday, August 18, 2005 J.R.M
C1 POSITION POT.
LK104
CONTROLLED BY PLC
a
ECC0056
GN
TWO FANS FITTED ON SENSE PCB COVERICP 380
ONE AIR FLOW IN, ONE AIR FLOW OUT
CCW
JP2
WH
EWB0027
THROUGH THE QUAZT TUNE
a
PC00S26875SE00B26874
RD
RD
SWAP RED AND GREEN
BU
2
FOR AIR CAPS WIREGN
WIRES AROUND.
SWAP RED AND GREEN
EWC0075
C1 PARK
JP6
RF ON SIGNAL
AS ABOVE.
RD
BU
RD
BU
NUMBERS ON
MOTOR +
MOTOR +
RD
INCR.GIAN SIGNAL
b
MANUAL
CW
MOTOR -
FOR AIR CAPS WIRE
BU
POSITION POT.RD
1
LK 6
PHASE & MAGNETUDE ERROR SIGNALS
RD
BU
MOTOR -
3
GN
RDBU
2GN
BU
WIRES AROUND.
RD
BU
NUMBERS ON
AS ABOVE.
POSITION POT.
FOR THE VACUUM CAPS
FOR THE VACUUM CAPS
USE EWB0027
a
1
BU
3
GN
PADDING CAPACITORS
OG
JP4
BU
BK
OG
CCW
MOTOR 1 CONNECTIONBN
EWB0027
AIR
CA
P
EXTERNAL PARK POTS.
a
VT
a
cDIFF.TUNE GAIN
CCW
BU
b
a
FAN 1 NOT FITTED ON ICP380
YE
JP7
GNC2 POSITION POT.
DC BIASvolt
BU
VTJP6 BK
FIRST ISSUE----
VA
C C
AP
GN
10
GN
ALL AIR VANE AMU'S TO BE FITTED WITH 2 X 180pF ACROSS C1
8
SEE MD00D21243
7
FAN1 +BUFAN1 -
LK 1
EXTERNAL INTERFACE
PK
RD
USE EWB0027
75m
m
CU TUBE 1/4"
RD
a
18 TURNS
LK 2
RF IN, 'N' TYPE
18 TURNS
BASIC CABLE LAYOUT.
C1 POSITION
6
10
BLUE PLCSW1 NOT REQUIREDENSURE LK1 FITTED
RF OUT TO AMU
CW
LOAD COIL
EWM0002
YE
VT
EWM0002
EWC0075
C1 POSITION POT.
BU
9
EWM0002
EWM0004
EWM0004
RD
b
b POS. IS USED FOR AMU
11
BU
PHASE COIL
10
JP102
SEE MD00D21242
BN
OG
LK 3
PANEL/PLC CONTR.
a
EWM0108
GN
RD
ALL VAC CAP AMU'S NO PADDING CAPS FITTED
EWM0108
BU MA00Z26876
CONNECT TO
FEED THROUGH CAPS
YE
VT
RD
VT
JP4 ON 2ND AMU
BU
RD
VAC CAP SET UP POSISTIONS (AMU TEST)
RIE/DP - C1 & C2, 1 TURN FROM MAXIMUMICP 180/65 AND ION BEAM - C1&2, 1 TURN FROM MINIMUM,
FAN 2 ONLY FOR ICP180/65
SECURE CABLE TO SUPPORT PILLARS WITH 'P' CLIPS
YE
GN
JP101
ECC0834
AUTOOG
MOTOR 2 CONNECTION
GN
PK
a
CW
LO
W P
WR
THROUGH THE QUAZT TUNE
CW
RD
BN
JP1
BN
ICP380 - C1, 1 TURN FROM MAXIMUM, C2, 7 TURN FROM MINIMUM
TO PIN 5A MA00Z26873
PLASMA AMU LAYOUT FOR ICP SYSTEM
PEAK TO PEAK volt
RF TO ELECTRODE
DO NOT FIT DC COIL
FOR DP SYSTEMa
a
WH
b
SE00D26871
PC00S26872
MA00Z26873
a
BN
MOTOR 2 CONNECTION
EWM0112
CONNECT TOCONNECT TO
PKCCW
a
GNBU
TO PIN 10 MA00Z26873
BK
LK105
INCR.GIAN SIGNAL
+24V SUPPLY
VA
C C
AP
LK 4
WH
a
b
VT
2ND AMU
b
14
RD
EWM0108
BU
JP4
LK 7
a
SCREEN
C2 PARK
VT
b
a
MOTOR 1 CONNECTION
PK
a
a
ONLY FIT FOR
DIFF.TUNE GAIN
JP1
(10 way header)
BU
WH
a
RD
a
b
RD
a
b
LK106
RD
ASSY. MA00Z26876
BLACK PLC
PLASMA AMU LAYOUT FOR DP/RIE SYSTEM
SE00C20154
CONTROLLED BY PLC
BK
RF IN
GN
a
SW1 REQUIRED
BK
a
YE
BLACK PLC WIRED AS BELOW
a
AUTOMATCH CONTROL PANEL.
LK102
ENSURE LK1 IS NOT FITTED
1
2
3
BLUE PLC, AMU CONTROL PANEL NOT REQUIRED
4
SEE MA00D23007
EWM0112
TIGHTLY WOUND WITH MAXIMUM No TURNS OFENAMELLED WIRE EWB0027 BETWEEN ENTRANCEAND EXIT HOLES
WITH A SOLDER TAG
RF TO ION SOURCE
VT
a
CONNECT TO THE RF COIL
TP5 TP15
a
LK107
JP5
RD
a
PANEL MOUNT
BU
JP3
C2 POSITION
YE
RD
2
3
1
1
2
3
YE
SEE SYSTEMWIRINGDIAGRAMS
PANEL MOUNT
CORE
RD
15CM ION SOURCE AMU LAYOUT
RD
BU
a
K.L.W
BU
PANEL/PLC CONTR.
a
JP6 ON 2ND AMU
GN
FAN 2 FITTEDIF ICP180/65
C2 PARK
01 22/03/05
EWM0002 RDBU FAN 2-
FAN 2+
RDBU
GN
b POS. FOR TESTING ONLY
ICP
380
FAN 3 & 4 ONLY FITTEDWITH BLACK PLC AND OLDENCLOSURES
FAN 3
FAN 4
LIN
K
SCREEN
RDYE
YE
BU
RF IN
BU
RD
YE
JP2
YE
1: DC BIAS VOLT
GN
2: DC PEAK TO PEAK VOLT
b POS. IS USED FOR AMU
C2 POSITION POT.
a
aa
RD
C1 PARK
BK
YE
c
YE
YERDGN
b
LK 8
BN
a
BU
TWIST ANDSLEEVE
TO PIN 5B MA00Z26873
BK
(12 way header)
RF ON SIGNAL
LK101
BK
CONNECT TO
RD
+24V SUPPLY
BU
BN
GN
RF IN
LK108
BN
LK 5
LK 9 P-P GAIN OFF OFF OFF
02
SW1
EST3503
SW1
EST3503
123456789101112
C5C5
JP101JP101
12
C2C2
JP8B3JP8B3
12
12345678
RV3
100K
RV3
100K
PADDING C1PADDING C1
C6C6
C1 PADDERS1C1 PADDERS1
JP8DJP8D
1 2
123456789
101112
JP1JP1
123
DC BIAS COILDC BIAS COIL
C2 PADDERSC2 PADDERS
123456789
10
JP8AJP8A
1 2
JP9JP9
1234
123456789101112
EE
5pF5
4KV
5pF5
4KV JP102JP102
1234
JP5JP5
123
C3C3
JP8A3JP8A3
JP6JP6
123
JP10JP10
12
JP14JP14
1234
C4C4
JP16JP16
123456789101112
C2 PADDERS1C2 PADDERS1
JP3JP3123456
JP2JP2
12345678
COIL1COIL1
COILCOIL
RV2
100K
RV2
100K
C1C1
ORSCREEN CABLE USING P CLIPOR TO CABLE SHELL
EWT2120C - 3.0mm TO 3.5mmEWT2122C - 5.0mm TO 5.5mmEWT2123C - 8.0mm TO 8.5mm
IF A PLASTIC P CLIP IS USED COPPER TAPEIS REQUIRED TO LINE INSIDE OF CLIP
EMC1
ORSCREEN CABLE USING P CLIPOR TO CABLE SHELL
EWT2120C - 3.0mm TO 3.5mmEWT2122C - 5.0mm TO 5.5mmEWT2123C - 8.0mm TO 8.5mm
IF A PLASTIC P CLIP IS USED COPPER TAPEIS REQUIRED TO LINE INSIDE OF CLIP
EMC1
C1 PADDERSC1 PADDERS
DD
JP7JP712
JP4JP4
12345678
JP8CJP8C
12
BK
BU
GN
GY
OG
RD
VT
WH
YE
VIOLET
WHITE
YELLOW
ORANGE
GREEN
BROWN
BLACK
BLUE
GREY
RED
BN
COLOUR CHART
BK
BU
GN
GY
OG
RD
VT
WH
YE
VIOLET
WHITE
YELLOW
ORANGE
GREEN
BROWN
BLACK
BLUE
GREY
RED
BN
COLOUR CHART
JP12JP12
123
JP6JP6
123
5pF
4KV
5pF
4KV
JP8C4JP8C4
5pF4
4KV
5pF4
4KV
12345678
PK
TQ TURQUOISE
PINKPK
TQ TURQUOISE
PINK
JP13JP13
123
COIL2COIL2
JP8A4JP8A4
JP11JP11
123456789101112
JP15JP15
12345678910
12345678
JP8JP8
123456789
101112
123456789
101112
PADDING CPADDING C
5pF3
4KV
5pF3
4KV
JP8B4JP8B4
5
5
4
4
3
3
2
2
1
1
D D
C C
B B
A A
Size DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE00D26871 Wednesday, October 17, 2007
1 1
A3
AMU SENSE PCB
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\PCBS\AMU_PCB_DEV\SENSE_PCB_REV02\SENSE_
Tuesday, September 02, 2003 KLWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE00D26871 Wednesday, October 17, 2007
1 1
A3
AMU SENSE PCB
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\PCBS\AMU_PCB_DEV\SENSE_PCB_REV02\SENSE_
Tuesday, September 02, 2003 KLWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE00D26871 Wednesday, October 17, 2007
1 1
A3
AMU SENSE PCB
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\PCBS\AMU_PCB_DEV\SENSE_PCB_REV02\SENSE_
Tuesday, September 02, 2003 KLW
PCB No: PC00S26872
1mm TERMINAL PINS
clearance for this pin (2 KV)
39R 2W
PCB ASSY: MA00Z26873
1KV=4.67V
PHASE & MAGNITUDE PCB.
SEE PIN OUT PCB
NOTE:ALL TRIANGLE GND=GROUND PLANE
SEE PIN OUT
1mm TERMINAL PINS
PCB
LOAD
PHASE
C10:100pF (RS495-745)
01 28-07-04 ---- FIRST ISSUE
DEB
02 REF ECO - CIRCUIT UNCHANGED-PAD CLEARENCE EARTH PLAIN-JUNCTION R18 TO TP5 INCREASED
REV02
TP1TPTP1TP
R20
10K
R20
10K
R19
82K
R19
82K
R6
10K
R6
10K
D2
1N5711
D2
1N5711
R9 47RR9 47R
R1147R2W
R1147R2W
R7 47RR7 47R
TP3TPTP3TP
R1
10K
R1
10K
TP5TPTP5TP
R1747R2W
R1747R2W
JP3JP3
123
TP11TPTP11TP
C810nFC810nF
R10
10K
R10
10K
C11nFC11nF
R4 47RR4 47R
LK1
LINK
LK1
LINK
R3 47RR3 47R
C310nFC310nF
R5R5
R14
10K
R14
10K
D1
1N5711
D1
1N5711
TP9TPTP9TP
TP2TPTP2TP
C6
100nF
C6
100nF
C410nFC410nF
D5
1N5711
D5
1N5711
R1347R2W
R1347R2W
C5100nF
C5100nF
C?100pF
C?100pF
TP4TPTP4TP
R1247R2W
R1247R2W
TP15TPTP15TP
C9
2000nF
C9
2000nF
R2 47RR2 47R
JP2JP2
123
JP1JP1
123
R15
4K7
R15
4K7
D3
1N5711
D3
1N5711
C11470nFC11470nF
C710nFC710nF
TP7TPTP7TP
TP10TPTP10TP
C21nFC21nF
R18
820K2W
R18
820K2W
R8 47RR8 47R
D4
1N5711
D4
1N5711
R16
180K
R16
180K
TP6TPTP6TP
C10100pFC10100pF
TP14TPTP14TP
TP8TPTP8TP
D6
1N5711
D6
1N5711
5
5
4
4
3
3
2
2
1
1
D D
C C
B B
A A
SIGN8
SIGN1SIGN2SIGN3SIGN4SIGN5SIGN6SIGN7
SIGN1SIGN2
SIGN3SIGN4
SIGN5SIGN6
SIGN7SIGN8
SIGN[1..8]
Size DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
01SE00D27872 Friday, May 20, 2005
1 1
A3
ANALOGUE CARD INTERFACE SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\BLUE 80\ANALOGUE INTERFACE\DESIGN2.DSN
Tuesday, February 15, 2005 KLWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
01SE00D27872 Friday, May 20, 2005
1 1
A3
ANALOGUE CARD INTERFACE SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\BLUE 80\ANALOGUE INTERFACE\DESIGN2.DSN
Tuesday, February 15, 2005 KLWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
01SE00D27872 Friday, May 20, 2005
1 1
A3
ANALOGUE CARD INTERFACE SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\BLUE 80\ANALOGUE INTERFACE\DESIGN2.DSN
Tuesday, February 15, 2005 KLW
01 21/02/05 ---- FIRST ISSUE
80mm
18mm
J1
SK
T1
PCB = 94-PC00S27873ASSY = 94-MA00Z27874
94-PC00S27873
JRM
Weidmuller Part # 4286340000
Farnell Part # 430-0801
1
SKT1SKT1
123456789
101112
J1J1
12345678
0
PL16
CB14
SKT17
EPS0114
1
2
GND
CB7
J27/PC91S21083
1
2
RELAY 2
12
34
CB11
CB2
CB13
SK11B
1
2
3
4
5
6
7
CB5
CB6
SKT
1
2
3
4
5
6
J12
1
2
3
4
5
6
7
8
RL3
1
3
5
6 7
8
10
12- +
J15
ON/OFF
1
2
3
4
5
6
L3'
SKT16
1
2
E
SK14/RSP
5
9
4
8
3
7
2
6
1
00
K1
CONTACTOR 3+1
1 2
3
5
13
81 82
14
6
4
SK15/RSP
A
B
C
D
E
F
G
H
J
K
L
M
CB12
F2
CB15
J16
EMO IN
1
2
3
4
PL10A
EPP0013
1
2
3
GND
F3
CB1
1
2
CB3
F3
CB16
L3
K4
12
3
5
13
A1A2
14
6
4
N
CB9
F1
N1
PL
1
2
3
4
5
6
SKT10A
EPS0013
1
2
3
GND
1
2
PLG12/RSP
A
B
C
D
SKT9
EPS0016
1
2
3
4
5
6
GND
CB10
PL9
EPP0016
1
2
3
4
5
6
GND
POWER BOX
5
9
4
8
3
7
2
6
1
00
PL10
CB8 / 15
PLG13
A
B
C
D
K4
12
3
5
13
A1A2
14
6
4
CB8
SKT10
1
2
J13
1
2
3
4
SK7/FSP
A
B
C
D
PL17
EPP0114
1
2
GND
F2
L2'
SK8/FSP
A
B
C
D
CB4
L2
J14
1
2
3
4
5
6
Spare #
J17
PUMPS
1
2
3
4
5
6
7
8
1
2
L1'
D6
F1
L1
DK.BU/0.5/35
DK.BU/0.5/17
DK.BU/0.5/18
DK.BU/0.5/20
24v
DK.BU/0.5/34,16
24vDK.BU/0.5/35
24vDK.BU/0.5/18DK.BU/0.5/13,16
24v
DK.BU/0.5/34,19
DK.BU/0.5/17DK.BU/0.5/19,32
DK.BU/0.5/24
DK.BU/0.5/20 DK.BU/0.5/23
WH/BU/0.5/15,14DK.BU/0.5/22
DK.BU/0.5/21
WH/BU/0.5/15,39
DK.BU/0.5/24
DK.BU/0.5/22
YE/0.5/5
RD/0.5/1 RD/0.5/2
WH/BU/0.5/3 WH/BU/0.5/3
YE/0.5/4
DK.BU/1.0/9
DK.BU/0.5/11
DK.BU/1.0/129
DK.BU/0.5/13
24v24v 24v
WH/BU/1.0/10
WH/BU/0.5/12-26
WH/BU/1.0/100
BK/2.5/83
BU/G9
BROWN
DK.BU/0.5/33-32
BLUE
DK.BU/1.0/28
RD/0.5/20
WH/BU/0.5/3
YE/0.5/40
DK.BU/0.5/30
DK.BU/0.5/29
DK.BU/0.5/37
RD/0.5/20
WH/BU/0.5/3
DK.BU/0.5/6
YE/0.5/40
WH/BU/0.5/3 WH/BU/0.5/3
DK.BU/0.5/7
24v
YE/0.5/5
RD/0.5/1
DK.BU/0.5/8
YE/0.5/4
RD/0.5/2
53 DK.BU/1/28-38
DK.BU/1.0/9
24v
DK.BU/0.5/11
DK.BU/0.5/27DK.BU/1.0/129 54
WH/BU/1.0/10
DK.BU/0.5/13
WH/BU/1.0/100
WH/BU/0.5/12-26
DK.BU/0.5/30
DK.BU/0.5/29
63 DK.BU/0.5/3164
BN/G9 BK/2.5/82
24v
RD/0.5/2
WH/BU/1.0/10
DK.BU/0.5/33 DK.BU/0.5/7
74 73 RD/0.5/20
WH/BU/0.5/85
DK.BU/0.5/87
DK.BU/0.5/86
24v 84 83 YE/0.5/40YE/0.5/4 DK.BU/0.5/31
WH/BU/1.0/100
DK.BU/1.0/38
DK.BU/0.5/8
DK.BU/0.5/36
24vDK.BU/0.5/6
DK.BU/0.5/11WH/BU/0.5/39
DK.BU/0.5/36
GN-YE/1.0
BU/1.0/54
DK.BU/0.5/27-25WH/BU/0.5/12-14
WH/BU/0.5/32
DK.BU/0.5/333
WH/BU/0.5/26
DK.BU/0.5/25
DK.BU/0.5/37
DK.BU/0.5/23
DK.BU/0.5/21
24v
BK2
BK3
2W Q/M
15+
PHASE 1
BK1
PHASE 3
T2
97
BK2
GN/YE
VAT VALVE APC
STUD REAR
14
K7
4 METERS EWM2404
RF GENERATOR - RIE/PECVD
K
CB 13
2A mp
DK.BU/.5/41
PHASE 2
V
BU/.75
1.5mm
EARTH
HEATER TABLE
2
TO EARTH
BUS BAR
1
4
BN
3
TURBO
GN/YE/2.5/G3
a
BK2
24 V CH B
ALARM
BU
BU/00/G1
BK/10/1
TO K4 PIN A1
CB 5
95
GN
K8:EGB3022
BK2
PIN 1 (E)
4A
3
VT
SEE NOTE 7.
GN/YE/10/42
EWM1503
4
0v
EPP7003
4C
A1
N
N/O
BU
AUXILLARY CONTACTOR
13
CB
3
RD
TO NEUTRAL BUSBAR
96
EWM0603
GN/YE/G6
1
OVERLOAD 2
BK/10/52
5
PHASE 2
1.5mm
BN/00/G6
A2
a
97
BK 1
TEMPERATURE CONTROLLER
SEE CB 15 CHILLER &
HEATED TURBO BK VALVE
SERVICE PANEL
PUMPDOWN HEATER / TURBO
COLLAR
BU
MOUNT K8 NEXT TO K4
BK3
GREEN/YELLOW
CONTACTOR
PHASE 2
PHASE 2
400V
6
EARTH BUS BAR
EWM1805
GN/YE/2.5SUPPLY
4 METERS EWM2404
5
F
K3
A
GN/YE/10
BU/00/G2
BK/1.5/93
LAMBDA
MODEL No:PU200-37-1C
PIN4
BK1
CHAMBER HEAT
1A
CB 15
NOTE:
IF SYSTEM FITTED WITH ICP F3 = 5 AMP
IF SYSTEM FITTED WITH CRYO TABLE F3 = 5 AMP
IF SYSTEM FITTED WITH 2 AMU
(2nd AMU VACUUM CAP) F3 = 5 AMP
1
CHILLER /
HEATED TURBO BK VALVE
WHEN CB 8 USED
95
N/O
N/C
BK/2.5/79
96
4
A2
BK/1.5/90
L
2
230V AC
(LABEL)
A1
6
3
BK/10/2
GN
95
NEUTRAL
EGT0059
13
EMO O/P
K1
BU
RD
GLAND ON THE
2
VT
SEE NOTE 5.
BK/1.5/94
DK.BU/0.5/110
PHASE 1
98
PUMP 3
WH/BU/0.5/32
TEMPERATURE CONT'
4
24V
BK/2.5/96
K2
2
GN-YE/.75
97
BK/10/47
PC91S21083
WH
WH/BU/1.0
LINK
B
BK
RD
98
WH/BU/0.5/103
RD DK.BU/.5/41
208V
BK/1.0/70
TURBO
USE WHITE
SPIRAL WRAP
PL
4
2W Q/M
BK
SKT
FAN MOUNTED ON THE BACK PANEL
FAN MOUNTED TO SUPPLY AIR
YE
4.
A
K3
DK.BU/0.5/07
SYSTEM OFF
5Amp
NEUTRAL
2A mp
1A2 Amp
A1
EQUIPMENT
SWITCH
A1
SEE CONTROL WIRING1C
1B
N/C
SYSTEM ON
HEATER
TABLE
T1
+15V
0V
0V
0V
-15V
+24
PUMP OIL/FILTER
BK/2.5/62
24v
13
WH/BU/0.5
EXP1524
0v
PL
WH
0v FAN
PIN7
RD
WH/BU/0.5/111
N/O
EWM0008
3 WAY AMP
L1
YE
FREE SKT & SHELLCIRCUIT
BK
PUMP 1
A2
PHASE 1
BK 3
EMO 24v
OVERLOAD 3
14
FIT FOR ALL HEATED VALVE SYSTEMS
-15v
N/C
A1
EMO I/P
8.
VACUUM SW IS MADE
6
14
PHASE 1
50B
CB 11
GN-YE/1.5/176
DYRVAC 50P 415V 50HZ 5.5A
UNIT
GREEN/YELLOW
TO MATCH MAINS
SEE NOTE # 8
SEE NOTE # 8
A1
(BLOWER)
GN/YE/2.5/G5
A
3
0v
PIN 3 (N)
2
1
PHASE 2
96
3
97
98
EGB0054
HEATER/CHILLER
BLACK
BK4
GN/YE 1.0mm
EGT0058
WH
b
13
ISOLATE UNUSED CORES
96
ISOLATE UNUSED CORES
BU
A1A2
BK/10/45
IEC SOCKET
MD81C19435
BK/1.5/74
6
BK/2.5/201
2
NEUTRAL
A1
1C
4
BK/2.5/76
BU/00/G6
E
BREAKER
3 PHASE LINE FILTER
MAKE : PROTEK
PIN6
A1
CHAMBER PUMP 2 /
LOADLOCK PUMP
14
EPS7003
BN/00/G3
BK1/00/G2
PUMP FAIL
5
2
BN
BK1
TO EARTH
BUS BAR.
PHASE 3
98
5
95
PHASE 1
WH/BU/0.5/103
6
13
4
BU
BU
TYPE OF PUMP
NEUTRAL
BK
SEE CONTROL WIRING
4
A2
DYRVAC 25P 415V 50HZ 5.5A
GN-YE/2.5/102
4 METERS EWM1304
PL14
4
SWITCH
3
13
5
RATING
BN
CONNECTION
HEAT
FORELINE TRAP
HEATER
BK2/G2
TO EARTH BUS
BAR
N
PHASE 3
1
BU
PUMP ON
EXP2415
6
RD
4
EGB2032 FOR STANDARD SYSTEM
PSU
96
14
EWM0008
K8
6
A1
EMO 2
4C
b
BK/10/49
PUMP 3 START
SUPPLIED WITH UNIT
6
3
ELS0043for 3000W Generator
3
MAIN IN
2
L
+24V DC WHEN THE
4 METERS EWM1007
5
0v
FOR DRYVAC 25B
1
EWK2532
GREEN/YELLOW
GN/YE
400V
PHASE 1
* DEPENDANT ON TYPE OF PUMP SUPPLIED, SEE OEM MANUAL
FREE PLG & SHELL
PHASE 1
PHASE 2
GN
EARTH
N
BK3
GN/YE
2
BK/2.5/062
400V
PHASE 1
EFM1610
PHASE 2
N
BK3
6
PHASE 2
BK1
5
14
208V
WIRE TO NEUTRAL
BUS BAR
BU
PHASE 3
BK3/G2
E
EFI1050
BN/1.5/178
IF PUMP3 REQUIRED
0v
BK2
SUPPLIED WITH UNIT
1A
BK2
6
BK3
A1
BK/1.5/73
YELLOW RING CRIMPS
6.
PHASE 1
BK1
BK3
N
GREEN/YELLOW
98
GREEN/YELLOW
BK/10/3
PHASE 3
BK2
WH
BN/00/G4
GN/YE
BK3
4
1
BK/2.5/80
4
EGB3022
PHASE 2
6
A2
4
GN/YE/2.5
BK1
208V
PHASE 2
L
BU/00/G2
4A
98
PHASE 3
ELS0043 for 3000W Generator
YELLOW RING CRIMPS
2
GN
EWK1825
OPTION FOR EDWARDS DRYSTAR IQDP 80
AND ALCATEL ADS602 DRY PUMP
A2
1
0v
PIN9
CB 10
ELS0040 for 3000W Generator
FOR OPTIONAL
IEC SOCKET
B
CB 4
97
CB 1
CB 3
BK2
K2 Pin 2
AUX/LF GEN
GN/YE/6.0/105
ON O/P
CHAMBER TURBO
SUPPLIED WITH UNIT
A2
13
BU
BK3
PHASE 1
K1
PHASE 3
BK1
PHASE 3
O/LOAD
RF GENERATOR
WH/BU/0.5mm
SKT
K2 Pin 4
OPTION FOR
BK2
GN/YE
A1
TO NEUTRAL
BUS BAR
GN/YE/2.5/G2
SEE NOTE 7.
GREEN/YELLOW
BU
SUPPLIED WITH UNIT
YE
YE
5
95
13
2
2
MAIN IN
5
2
BU/2.5/84
YE-GN
STUD TOP COVER
D.C. VOLTS WIRING
PHASE 1
BK2
BK/2.5/81
BU/00/G10
GN/YE
BK
1
95
4B
24V FAN
BK1
PUMP 1 FAULT
YE
EFM1606
ICP RF GEN
4
BK
K6:EGT0058
5
ELS0033 for 1250W Generator
PUMP 1
BK/10/44
RF GEN 2 / LF GEN 1
EGB3022
3
2
BLACK 1
EARTH CONNECTED
TO VALVE BODY
GN/YE/1.0mm
SPARE / LOADLOCK or TRANSFER
TURBO / FORELINE HEATER
SEE NOTE 7.
C
EARTH BUS BAR
1
BROWN
13
PSU
SYSTEM ON/OFF
4
RD
BN/00/G5
EGB3022
6
CONTROL WIRING
2
BK/10/51
YE-GN
EARTH BUS BAR
GN/YE
LAMP
BK/00/G10
CB 6
2 Amp
2
WH
A1
OVERLOAD 1
K2
PHASE 3
95
13
BK
BK/10/48
96
HF GEN
BLACK
14
13
6
BK2/00/G2
EARTH BUS BAR
PHASE 2
400V
PHASE 3
RD
BN/.75
BK/10/43
A2
BK/1.5/72
BU/00/G4
CB 14
E.C.R.
13
OG
CB 2
CB 7
3
C
CONTACTOR WITH FITTED OVERLOAD
DYRVAC 100P 415V 50HZ 7.5A
OPTION FOR
B
A1
GN-YE/2.5/100
BK/1.0/71
14
2.
CB 12
A1
EWK2532
3
LAMP
K4
PUMP 2 COIL 24v
A2
CRYO TABLE 200 C
TEMPERTARE
15-
PUMP 2 ON
K3
RD
3
EGB2052 FOR 180 ICP SYS (EXCEPT HFV8000)
L/LOCK TURBO/FORELINE HEATER
PANEL
BK/2.5/77
HEATER CONTROL
2
PHASE 1
PHASE 3
TO NEUTRAL
BUS BAR.
K2 Pin 6
OV
BK/10/53
6
CHAMBER PUMP 1 (*ROTARY)
OR I.C.P.
3
A
1
BLACK
DK.BU/0.5mm
PHASE 1
CB 9
3.
EARTH
ICP 180 SYS
GN/YE/2.5/G1
BK/2.5/200BK/10/46
CHAMBERS HEATERS
BK/2.5/162
BLACK 4
CRYO TABLE 400 C
2
14
A2
5
PIN5
98
2
6
(NOTE 5)
BK 2
97 1
EWM1805
2.5 METERS EWM5205
PIN 2 (L)
GN-YE/1.0/169
OG
NOTES.
K6
2
NOTE:
IF SYSTEM FITTED WITH
ALCATEL ADS602 FIT
EFM1620 = CB12
EGB2032 = K2
REF. DRG. No.SE00D23969 2/3
RD
PUMP 2
PHASE 3
6
(NOTE3)
BU
LAMP
5
BK/1.0/50
A1
PUMP 2 FAULT
N
6
6
EFM1606
RF GENERATOR - ICP
OPTION FOR
RF GEN 1
BU
BLACK
2
TO K4 PIN A2
BK/1.5/92
EWM0603
1B
RD
PSU:24V:+/-15V
PHASE 3
BLACK 3
FAN MOUNTED ON THE BACK PANEL
FAN MOUNTED TO SUPPLY AIR
A2
7.
CB 8
EARTH
4
NEUTRAL BUS BAR
+/-15V
BU/10/4
LEYBOLD DRYPUMP
6
1.5mm
RD
1
1
A2
BU/1.0/168
BK
WIRE O
DK.BU/0.5/110
5.
2
GN-YE/1.5/102
EARTH BUS BAR
14
3.5Amp
5
496
PHASE 2
GN/YE/00/G7
K6
A2
LAMP
A2
EARTH
EARTH
6 W Q/M
A2
BK/1.5/95
N/C E
BK/2.5/62
97
PUMP 1 ON
N
5 METERS EWM5205
BK/1.0/69
DK.BU/.5/41
BK
SERVICES PANEL
BK/2.5/202
APC/VAT
WIRE TO EARTH
BUS BAR
A.P.C.
VAT
PROTECTIVE COVER
0v
4
BN/00/G7
BK/2.5/162
BK1/G2
BK/1.5/91
PHASE 1
ON I/P
DK.BU/0.5/333
PIN4
ON SWITCH 24v N/O
EWM0012
BK1
BK3
ELS0033 for 1250W Generator
BU/00/G5
N/O
USE WHITE
SPIRAL
WRAP
TABLE HEATER ELEMENT - 400 C
GN-YE/1.5/101
1.
EGT0058
EARTH BUS BAR
GN/YE/2.5/G4
YE
BLACK 2
RD
GN/YE/6.0/106
BU/1.5/177
PUMPDOWN HEAT
BK/2.5/97
6
LOADLOCK
4
FIT MAINS WIRING
4
ICP OPTION
BLUE (HEATSHRINK BOTH ENDS BLACK)
H
PHASE 3
1
EMO 1
+15v
3
WH
14
BU/10/41
CONTROLLER
K2:EGT0058
1B
GN/YE
ELS0040for 3000W Generator
400V
PHASE 1
PHASE 2
N
FROM SW 1
14
PUMP 1 COIL 24v
BK3
BN
BK
4
GN
4
4-6A
PHASE 2
BK1
208V
GN
BU/00/G7
NEUTRAL BUS BAR
PHASE 3
PHASE 2
BU/00/G3
BK3/00/G2
BK/00/G1
K5
G/VAC/VLV/840 (NW40)
IDENT LIVE AND NEUTRAL WIRES
WITH HEAT SHRINK IDENTS (L&N)
HEATED BACKING VALVE
TO BE WIRED IN PARALLEL
RD
RD
RD
RD
K5-MONITOR
DK.BU/0.5/89
WH/BU/0.5/107
DK.BU/0.5/88
TABLE HEATER ELEMENT - 700 C
1A0
PLASMA TECHNOLOGYANGLE
X.XX
X.X
X
Issue Date ECN Modification DrawnZone
2345
A
B
C
D
JRM KW 19.04.2005
100 PLUS POWER BOX
3 PHASE 400V SUPPLY
SE91A19752
1 OF 222
1:1
mm
20 19.08.09 26114 K5 WIRING AMENDED AS WIRE 89 WAS SHOWN IN TWO PLACES J.R.M P.J.M
21 06.01.10 28862 REFORMATED TO AUTOCAD. K4 CONTACT ADDED IN SERIES WITH K5 COIL J.B.W. J.R.M.
95
6 5
BK/1.5/90
13
2
96
97
98
4
1
IF PUMP3 REQUIRED
2
A1
SEE NOTE 7.
3
K6
6
A2
BK/1.5/92
FIT MAINS WIRING
14
4
PL10A
EPP0013
1
2
3
GND
SKT10A
EPS0013
1
2
3
GND
BK/1.5/93
BK/1.5/94
EARTH BUS BAR
GN-YE/1.5/101
CB13
TO NEUTRAL
BUS BAR
MAIN BUS BAR
4.0 METERS 94-EWM0603
BLUE
GREEN/YELLOW
BROWN
PUMP3 - LOADLOCK (SINGLE PHASE 230V)
GN-YE/1.5/101
BU/00/095
EGT0031 = OL2
SKT16
BN/2.5/96
GN-YE/2.5/100
BU/2.5/99
CB8 / 15
3
PL16
1
2
E
2
YE-GN
1
33
1ph 230VAC SUPPLY
3ph 400VAC SUPPLY
3ph 400VAC SUPPLY
1ph 230VAC SUPPLY
CHILLER REQUIRES
CHILLER REQUIRES
CHILLER REQUIRES
MACHINE SUPPLY
BK/2.5/98
NEUTRAL BUSBAR
CONNECT TO
TO MAINS
CONNECT
BUSBAR
TO MAINS
CONNECT
BUSBAR
FOR COMPONENT RATINGS
REFER TO POWER BOX CRIB
SHEET STORED ON EDMS
SYSTEM DOC NO. ED33975
NEUTRAL BUS BAR
44 4
BK/2.5/99
NEUTRAL BUSBAR
CONNECT TO
SEE NOTE # 8
AND WIRE PLG/SKT
PLEASE SELECT
POWER SUPPLY
PIN TO PIN5 TO ENSURE
PLEASE ADD CODING
CHILLER IS CONNECTED
TO CORRECT OUTLET
3 P
HA
SE
BU
S B
AR
TO NEUTRAL
BUS BAR.
TO NEUTRAL
BUS BAR.
TO NEUTRAL
BUS BAR.
TO NEUTRAL
BUS BAR.
TO NEUTRAL
BUS BAR.
TO NEUTRAL
BUS BAR.
TO NEUTRAL
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
GN/YE/2.5/G10TO EARTH
BUS BAR.
TO NEUTRAL
BUS BAR.
TO EARTH
BUS BAR.
GN-YE/2.5/G2
MAIN MACHINE BREAKER
SW1
Current Switch
+1
-2
Over
Current
Sw itch
2A 2 0A
TO PL12
TWICE THRU
B
RD
EWM0002
BK/2.5/78
MIN.
SETTING
BU
SET POT TO
TO BE COILED
BK/2.5/78
SW1
IF LOADLOCK PUMP
SINGLE PHASE REFER
TO WIRING CHANGE
ON LEFT OF PAGE
FIT EZB0011 TO UN-INSULATED PINS
USE A SECOND 6W BUSBAR TOBRIDGE THE 2 FITTEDBUSBAR(S)
WHICH REQUIRES
3 PHASE 208V
RF GENERATOR
OPTION FOR
WHICH REQUIRES
3 PHASE 208V
FORLINE
TRAP
HEATER
FEMALE INSERT - EPS0306
CODING PIN (CP) - EPT3040
2.5mmsq FEMALE PIN - EPT0240
EMC CHASSIS MOUNT - EPS1306
IF FORELINE HEATER
SYSTEM BK H/SHRINK
NEUTRAL CONNECT
TO TWIN CB VIA K7
CONTROL DETAILED ON
DRG # SE91A27512
BK/2.5/162
K7
12
3
5
13
A1A2
14
6
4
BN/00/G8
BU/00/G8
GN/YE/2.5/G8
TO NEUTRAL
BUS BAR.
TO EARTH
BUS BAR.
LINE LOAD
EARTH EARTH
1
2
E
3
1
2
E
3
1
E
1
E
4 4
BLACK 1
BLACK 2
GREEN/YELLOW
BLACK 4
BLACK 3
RIE / PECVD
HF
GENERATOR
GENERATOR
AUX.
LF GEN.
RF GENERATOR
RIE/PECVD
RF GENERATOR
RIE/PECVD
RF GENERATOR
ICP
RF GENERATOR
ICP
BK-4/103
GN-YE/104
WH/BU/0.5/111 5A
DO NOT FIT 2 POLE CIRCUIT BREAKERS IN 400V SYSTEM.
SOME EXTERNAL UNITS SUPPLIED MAYBE COMPATIABLE
TO SYSTEMS SINGLE PHASE VOLTAGE.
CHECK BEFORE INSTALLATION.
FOR DRY PUMP OPTIONS (TAIKO / EBRA), REF. DRG SE00D23979/1.
FOR 110/208v SLEEVE BLUE NEUTRAL WIRES WITH WHITE HEATSHRINK.
SUPPLY CONNECTION CABLES SHALL BE AT LEAST 10mm.
REMOVE THESE 2 PINS PRIOR TO ASSEMBLY ON CONTACTOR K2, K3
& K6 AS SHOWN BELOW.
WHEN HEATER/CHILLER OPTION IS INSTALLED G5 TEMPERATURE
CONTROLLER CABLE IS NOT USED.
ALL WIRE TRI-RATED, EXCEPT CONTROL WIRING.
5CP
5CP
4CP
G9
G8
G10
G7
G11
G4
G3
G5
G1
G6
G2
5
WH/BU/0.5/100FE 14 - 13
DWG REF 2C
DK.BU/0.5/87DK.BU/0.5/112
DK.BU/0.5/87
K4
CB17
PL13
A
B
C
D
BN
WH/BU/0.5/85
GN/YE
4
K5
6 5
3
A1
TE1OS
EWM1303
A2
+ 5
2
- 6
EUROTHERM WIRING
GN/YE
CB9 IN POWER BOX
1
BU
BN
10AMP EFM1410
DK.BU/0.5/86
4
1
BU
3
13
2
BUS BAR
14
EGB3022
MA00A23554
REF DRG
SE91B23358 2/3 - BLACK PLC
SE91A27512 1/2 - BLUE PLC
CB8/2A
NEUTRAL
FU1038/16ADK.BU/0.5/87
EWM1303
BU/2.5/84
BK/2.5/82 BK/2.5/182
BU/2.5/184
BK/2.5/182
BU/2.5/184
FE 14 - 13
DWG REF 2C
DK.BU/0.5/87DK.BU/0.5/112
DK.BU/0.5/87
K4
E FDK.BU/0.5/87DK.BU/0.5/112
E FDK.BU/0.5/87DK.BU/0.5/112
* IF IN DOUBT ASK *
WIRING IF TABLE IS CONNECTED TO EARTH
WIRING IF TABLE IS NOT CONNECTED TO EARTH
* IF IN DOUBT ASK *
WIRING IF TABLE IS CONNECTED TO EARTH
WIRING IF TABLE IS NOT CONNECTED TO EARTH
K4 13/14 IS ONLY WIRED IF
HEATED AND NOT
CONNECTED TO EARTH
* IF IN DOUBT ASK *
THE TABLE IS ELECTRICALLY
K4 13/14 IS ONLY WIRED IF
HEATED AND NOT
CONNECTED TO EARTH
* IF IN DOUBT ASK *
THE TABLE IS ELECTRICALLY
22 13.01.10 25737 REFORMATED & CHANGE FILTER WIRING & DRAWING MODS J.J J.B.W.
0V
0V
0V
0V
0V
0V
0V
0V 0V 0V
0V 0V 0V
EXP2415/EXP1524
OPTION FOR RFX II 1250
0V
0V
WH/BU/0.5/100
PL16
CB14
SKT17
EPS0114
1
2
GND
CB7
J27/PC91S21083
1
2
RELAY 2
12
34
CB11
CB2
CB13
SK11B
1
2
3
4
5
6
7
CB5
CB6
SKT
1
2
3
4
5
6
J12
1
2
3
4
5
6
7
8
RL3
1
3
5
6 7
8
10
12- +
J15
ON/OFF
1
2
3
4
5
6
L3'
SKT16
SK14/RSP
5
9
4
8
3
7
2
6
1
00
SW1
Current Switch
+1
-2
Over
Current
Sw itch
2A 2 0A
K1
CONTACTOR 3+1
1 2
3
5
13
81 82
14
6
4
SK15/RSP
A
B
C
D
E
F
G
H
J
K
L
M
CB12
F2
CB15
J16
EMO IN
1
2
3
4
PL10A
EPP0013
1
2
3
GND
F3
CB1
1
2
CB3
F3
CB16
L3
K4
12
3
5
13
A1A2
14
6
4
N
CB9
F1
N1
PL
1
2
3
4
5
6
SKT10A
EPS0013
1
2
3
GND
1
2
PLG12/RSP
A
B
C
D
SKT9
EPS0016
1
2
3
4
5
6
GND
CB10
PL9
EPP0016
1
2
3
4
5
6
GND
POWER BOX
5
9
4
8
3
7
2
6
1
00
PL10
CB8 / 15
PLG13
A
B
C
D
K4
12
3
5
13
A1A2
14
6
4
CB8
SKT10
1
2
J13
1
2
3
4
SK7/FSP
A
B
C
D
PL17
EPP0114
1
2
GND
F2
L2'
SK8/FSP
A
B
C
D
CB4
L2
J14
1
2
3
4
5
6
Spare #
J17
PUMPS
1
2
3
4
5
6
7
8
1
2
L1'
D6
F1
L1
DK.BU/0.5/35
DK.BU/0.5/17
DK.BU/0.5/18
DK.BU/0.5/2024v
DK.BU/0.5/34,1624v
DK.BU/0.5/35
24vDK.BU/0.5/18DK.BU/0.5/13,16
24v
DK.BU/0.5/34,19
DK.BU/0.5/17DK.BU/0.5/19,32
DK.BU/0.5/24
DK.BU/0.5/20 DK.BU/0.5/23
WH/BU/0.5/15,14DK.BU/0.5/22
DK.BU/0.5/21
WH/BU/0.5/15,39
DK.BU/0.5/24
DK.BU/0.5/22
YE/0.5/5
RD/0.5/1 RD/0.5/2
WH/BU/0.5/3 WH/BU/0.5/3
YE/0.5/4
DK.BU/1.0/9
DK.BU/0.5/11
DK.BU/1.0/129
DK.BU/0.5/13
24v24v 24v
WH/BU/1.0/10
WH/BU/0.5/12-26
WH/BU/1.0/100
BK/2.5/83
BU/G9
BROWN
DK.BU/0.5/33-32
BLUE
DK.BU/1.0/28
RD/0.5/20
WH/BU/0.5/3
YE/0.5/40
DK.BU/0.5/30
DK.BU/0.5/29
DK.BU/0.5/37
RD/0.5/20
WH/BU/0.5/3
DK.BU/0.5/6
YE/0.5/40
WH/BU/0.5/3 WH/BU/0.5/3
DK.BU/0.5/724v
YE/0.5/5
RD/0.5/1
DK.BU/0.5/8
YE/0.5/424v
RD/0.5/2
53 DK.BU/1/28-38
DK.BU/1.0/9
24v24v
DK.BU/0.5/11
DK.BU/1.0/129
DK.BU/0.5/27DK.BU/1.0/129 54
WH/BU/1.0/10
DK.BU/0.5/13
WH/BU/1.0/100
WH/BU/0.5/12-26
DK.BU/0.5/30
DK.BU/0.5/29
63 DK.BU/0.5/3164
BN/G9 BK/2.5/82
24v
RD/0.5/2
WH/BU/1.0/10
DK.BU/0.5/33 DK.BU/0.5/7
74 73 RD/0.5/20
WH/BU/0.5/85
DK.BU/0.5/87
DK.BU/0.5/86
24v 84 83 YE/0.5/40YE/0.5/4 DK.BU/0.5/31
WH/BU/1.0/100
DK.BU/1.0/38
DK.BU/0.5/8
DK.BU/0.5/3624vDK.BU/0.5/6
DK.BU/0.5/11WH/BU/0.5/39
DK.BU/0.5/36
GN-YE/1.0/55
BU/1.0/54
DK.BU/0.5/27-25WH/BU/0.5/12-14
WH/BU/0.5/32
DK.BU/0.5/333
WH/BU/0.5/26
DK.BU/0.5/25
DK.BU/0.5/37
DK.BU/0.5/23
DK.BU/0.5/21
24v
2W Q/M
15+
T2
97
VAT VALVE APC
STUD REAR
14
K7
4 METERS EWM2404
RF GENERATOR - RIE/PECVD
K
CB 13
2A mp
DK.BU/.5/41
PHASE 2
V
BU/.75
EARTH
HEATER TABLE
2
TO EARTH
BUS BAR
TO PL12
1
4
BN
3
TURBO
GN/YE/00/G3
a
BK2
24 V CH B
ALARM
BU
SEE CB 15
BK/10/1
TO K4 PIN A1
CB 5
95
GN
K8:EGB3022
PIN 1 (E)
TWICE THRU
4A
3
VT
SEE NOTE 7.
RIE / PECVD
EWM1503
EGT0021
4
0v
EPP7003
4C
A1
N
N/O
AUXILLARY CONTACTOR
13
CB
3
RD
96
EWM0603
GN/YE/00/G6
1
OVERLOAD 2
BK/10/52
5
PHASE 2
BN/00/G6
REF POINT A
A2
a
97
BK 1
TEMPERATURE CONTROLLER
SEE CB 15 CHILLER &
HEATED TURBO BK VALVE
SERVICE PANEL
PUMPDOWN HEATER / TURBO
COLLAR
BU
MOUNT K8 NEXT TO K4
GREEN/YELLOW
CONTACTOR
6
SUPPLY
4 METERS EWM2404
5
F
K3
A
GN/YE
WH/00/G2
BK/1.5/93
LAMBDA
MODEL No:PU200-37-1C
PIN4
CHAMBER HEAT
1A
CB 15
NOTE:
IF SYSTEM FITTED WITH ICP F3 = 5 AMP
IF SYSTEM FITTED WITH CRYO TABLE F3 = 5 AMP
IF SYSTEM FITTED WITH 2 AMU
(2nd AMU VACUUM CAP) F3 = 5 AMP
1
CHILLER /
HEATED TURBO BK VALVE
WHEN CB 8 USED
95
N/O
N/C
BK/2.5/79
96
4
A2
BK/1.5/90
L
2
220V AC
(LABEL)
EGB3022
A1
6
3
BK/10/2
GN
95
NEUTRAL
13
EMO O/P
K1
BU
RD
GLAND ON THE
2
VT
SEE NOTE 5.
BK/1.5/94
DK.BU/0.5/110
PHASE 1
98
PUMP 3
WH/BU/0.5/32
TEMPERATURE CONT'
4
24V
BK/2.5/96
K2
2
GN-YE/.75
97
BK/10/47
PC91S21083
WH
B
WH/BU/1.0
LINK
B
BK
RD
98
WH/BU/0.5/103
RD DK.BU/.5/41
BK/1.0/70
TURBO
USE WHITE
SPIRAL WRAP
PL
4
2W Q/M
BK
SKT
FAN MOUNTED ON THE BACK PANEL
FAN MOUNTED TO SUPPLY AIR
YE
A
K3
DK.BU/0.5/07
SYSTEM OFF
5Amp
NEUTRAL
2A mp
1A2 Amp
EFM1613
A1
EQUIPMENT
A
SWITCH
A1
SEE CONTROL WIRING1C
1B
N/C
SYSTEM ON
HEATER
TABLE
T1
2.5mm
+15V
0V
0V
0V
-15V
+24
PUMP OIL/FILTER
BK/2.5/62
24v
13
WH/BU/0.5
EXP1524
0v
PL
WH
0v FAN
PIN7
RD
EGB2022
WH/BU/0.5/111
N/O
EWM0008
DYRVAC 50P 208V 60HZ 11A
FOR LOADLOCK TURBO
WIRE DIRECT TO CB3
3 WAY AMP
L1
YE
FREE SKT & SHELLCIRCUIT
BK
PUMP 1
A2
BK 3
EMO 24v
OVERLOAD 3
14
FIT FOR ALL HEATED VALVE SYSTEMS
-15v
N/C
FOR SYSTEM FITTED WITH
HEATED BACKING VALVE
WIRE TO TWIN CB SLEEVE
WITH BK HEATSHRINK
A1
EMO I/P
VACUUM SW IS MADE
6
14
50B
FIT EZB0011 TO UN-INSULATED PINS
CB 11
GN-YE/1.5/176
UNIT
GREEN/YELLOW
TO MATCH CHILLER
SEE NOTE # 8
208V SYS BK H/SHRINK
NEUTRAL CONNECT
TO TWIN CB
SEE NOTE # 8
A1
SEE NOTE # 8
(BLOWER)
GN/YE/00/G5
A
3
0v
PIN 3 (N)
2
1
PHASE 2
96
3
97
98
EGB0054
EGT0059
HEATER/CHILLER
BLACK
BK4
GN/YE 1.0mm
WH
b
13
96
BU
A1A2
BK/10/45
IEC SOCKET
BK/1.5/74
EFM1613
6
BK/2.5/201
2
A1
1C
4
BK/2.5/76
BU/00/G6
E
BREAKER
3 PHASE LINE FILTER
MAKE : PROTEK
RD
PIN6
A1
CHAMBER PUMP 2 /
LOADLOCK PUMP
14
EPS7003
BN/00/G3
BK1/00/G2
PUMP FAIL
5
2
BN
TO EARTH
BUS BAR.
98
5
95
PHASE 1
WH/BU/0.5/103
6
13
4
BU
BU
TYPE OF PUMP
NEUTRAL
BK
SEE CONTROL WIRING
4
A2
GN-YE/2.5/102
4 METERS EWM1304
PL14
4
SWITCH
3
13
5
BN
CONNECTION
HEAT
FORELINE TRAP
HEATER
BK2/G2
TO EARTH BUS
BAR
N
1
BU
PUMP ON
EXP2415
6
RD
4
EGB2032 FOR STANDARD SYSTEM
PSU
96
14
EWM0008
K8
6
A1
EMO 2
4C
b
BK/10/49
PUMP 3 START
SUPPLIED WITH UNIT
6
3
3
MAIN IN
2
L
USE A SECOND 6W BUSBAR TOBRIDGE THE 2 FITTEDBUSBAR(S)
+24V DC WHEN THE
A
4 METERS EWM1007
5
0v
FOR DRYVAC 25B
1
EWK2532
GREEN/YELLOW
PHASE 1
* DEPENDANT ON TYPE OF PUMP SUPPLIED, SEE OEM MANUAL
FREE PLG & SHELL
GN
EARTH
2
BK/2.5/062
HF
6
5
14
BU
BK3/G2
E
EFI1050
BN/1.5/178
IF PUMP3 REQUIRED
0v
EGB3022
SUPPLIED WITH UNIT
1A
6
A1
BK/1.5/73
YELLOW RING CRIMPS
BK3
L2
GREEN/YELLOW
98
GREEN/YELLOW
BK/10/3
WH
BN/00/G4
BK/2.5/062
BK3
4
1
BK/2.5/80
4
6
A2
4
PHASE 2
L
WH/00/G2
4A
98
YELLOW RING CRIMPS
2
GN
EWK1825
OPTION FOR EDWARDS DRYSTAR IQDP 80
AND ALCATEL ADS602 DRY PUMP
A2
1
0v
PIN9
CB 10
FOR OPTIONAL
IEC SOCKET
B
CB 4
97
CB 1
CB 3
K2 Pin 2
AUX/LF GEN
GN/YE/6.0/105
ON O/P
CHAMBER TURBO
SUPPLIED WITH UNIT
A2
13
GENERATOR
K1
O/LOAD
WH/BU/0.5mm
SKT
K2 Pin 4
GENERATOR
A1
GN/YE/00/G2
SEE NOTE 7.
GREEN/YELLOW
BU
SUPPLIED WITH UNIT
YE
YE
5
95
13
2
2
MAIN IN
5
2
YE-GN
STUD TOP COVER
D.C. VOLTS WIRING
PHASE 1
BK2
BK/2.5/81
BK
1
95
1C
24V FAN
BK1
PUMP 1 FAULT
YE
ICP RF GEN
L/GEN/RF/102
4
BK
K6:- EGT0058
5
PUMP 1
BK/10/44
RF GEN 2 / LF GEN 1
3
2
SEM-S2 SYSTEM
BLACK 1
EARTH CONNECTED
TO VALVE BODY
GN/YE/1.0mm
SPARE / LOADLOCK or TRANSFER
TURBO / FORELINE HEATER
SEE NOTE 7.
C
1
1.5mm
BROWN
13
PSU
SYSTEM ON/OFF
4
RD
BN/00/G5
6
CONTROL WIRING
2
BK/10/51
YE-GN
EARTH BUS BAR
LAMP
BK00/G1
CB 6
EWM0002
2 Amp
2
AUX.
WH
A1
OVERLOAD 1
K2
PHASE 3
95
13
BK
BK/10/48
96
HF GEN
BLACK
14
13
6
BK2/00/G2
EARTH BUS BAR
PHASE 2
PHASE 3
RD
BN/.75
BK/10/43
A2
BK/1.5/72
BU/00/G4
CB 14
E.C.R.
DYRVAC 100P 208V 60HZ 15A
13
OG
CB 2
CB 7
3
C
CONTACTOR WITH FITTED OVERLOAD
OPTION FOR
B
A1
GN-YE/2.5/100
208V SYS BK H/SHRINK
NEUTRAL CONNECT
TO TWIN CB
EXP2415/EXP1524
BK/1.0/71
14
CB 12
A1
EWK2532
3
LAMP
K4
PUMP 2 COIL 24v
A2
CRYO TABLE 200 C
TEMPERTARE
15-
PUMP 2 ON
K3
RD
3
EGB2052 FOR 180 ICP SYS (EXCEPT HFV8000)
L/LOCK TURBO/FORELINE HEATER
PANEL
BK/2.5/77
HEATER CONTROL
2
FORLINE
PHASE 3
TO NEUTRAL
BUS BAR.
K2 Pin 6
OV
BK/10/53
6
CHAMBER PUMP 1 (*ROTARY)
OR I.C.P.
3
A
1
BLACK
DK.BU/0.5mm
PHASE 1
CB 9
EARTH
ICP 180 SYS
GN/YE/00/G1
BK/2.5/200BK/10/46
CHAMBERS HEATERS
BK/2.5/162
BLACK 4
CRYO TABLE 400 C
EGT0059
2
14
A2
5
PIN5
98
2
6
BK/2.5/78
BK 2
97 1
2.5 METERS EWM5205
PIN 2 (L)
GN-YE/1.0/169
OG
DYRVAC 25P 208V 60HZ 11A
NOTES.
K6
2
NOTE:
IF SYSTEM FITTED WITH
ALCATEL ADS602 FIT
EFM1620 = CB12
EGB2032 = K2
REF. DRG. No.SE00D23969 2/3
RD
PUMP 2
PHASE 3
6
(NOTE3)
BU
LAMP
5
BK/1.0/50
208V
A1
PUMP 2 FAULT
N
6
6
RF GENERATOR - ICP
OPTION FOR
RF GEN 1
BU
BLACK
2
TO K4 PIN A2
BK/1.5/92
EWM0603
1B
RD
PSU:24V:+/-15V
PHASE 3
BLACK 3
FAN MOUNTED ON THE BACK PANEL
FAN MOUNTED TO SUPPLY AIR
A2
CB 8
4
+/-15V
BU/10/4
LEYBOLD DRYPUMP
6
RD
1
1
A2
BU/1.0/168
MIN.
SETTING
BK
WIRE O
DK.BU/0.5/110
2
GN-YE/1.5/102
EARTH BUS BAR
14
3.5Amp
5
496
GN/YE/00/G7
K6
A2
RATING
LAMP
A2
LF GEN.
EARTH
EARTH
6 W Q/M
A2
BK/1.5/95
N/C E
BK/2.5/62
97
PUMP 1 ON
RIE/PECVD OPTION
5 METERS EWM5205
BK/1.0/69
DK.BU/.5/41
BK
SERVICES PANEL
BK/2.5/202
APC/VAT A.P.C.
VAT
0v
4
BN/00/G7
BK/2.5/162
BK1/G2
BK/1.5/91
PHASE 1
ON I/P
DK.BU/0.5/333
PIN4
ON SWITCH 24v N/O
EWM0012
BK1
1.5mm
N/O
USE WHITE
SPIRAL
WRAP
TABLE HEATER ELEMENT - 400 C
GN-YE/1.5/101
EARTH BUS BAR
GN/YE/00/G4
YE
BLACK 2
RD
GN/YE/6.0/106
BK/1.5/077
PUMPDOWN HEAT
BK/2.5/97
6
LOADLOCK
4
FIT MAINS WIRING
EFM1620
4
ICP OPTION
BLUE (HEATSHRINK BOTH ENDS BLACK)
H
PHASE 3
1
EMO 1
+15v
3
WH
14
BU/10/41
CONTROLLER
K2:EGT0059
BU
1B
FROM SW 1
14
PUMP 1 COIL 24v
BN
BK
4
GN
4
4-6A
GN
BU/00/G7
NEUTRAL BUS BAR
PHASE 2
BU/00/G3
BK3/00/G2
BK/00/G1
K5
G/VAC/VLV/840 (NW40)
IDENT LIVE AND NEUTRAL WIRES
WITH HEAT SHRINK IDENTS (L&N)
HEATED BACKING VALVE
TO BE WIRED IN PARALLEL
RD
RD
RD
RD
K5-MONITOR
DK.BU/0.5/89
WH/BU/0.5/107
DK.BU/0.5/88
TABLE HEATER ELEMENT - 700 C
1A0
PLASMA TECHNOLOGYANGLE
X.XX
X.X
X
Issue Date ECN Modification DrawnZone
2345
A
B
C
D
J.R.M KW 19.04.2005
100 PLUS POWER BOX
3 PHASE 208V SYSTEM
SE91A19752
2 OF 222
1:1
mm
95
6 5
BK/1.5/90
13
2
96
97
98
4
1
IF PUMP3 REQUIRED
2
A1
SEE NOTE 7.
3
K6
6
A2
BK/1.5/092
FIT MAINS WIRING
14
4
PL10A
EPP0013
1
2
3
GND
SKT10A
EPS0013
1
2
3
GND
BK/1.5/93
BK/1.5/94
EARTH BUS BAR
GN-YE/1.5/101
CB13
FROM
MAIN BUS BAR
4.0 METERS 94-EWM0603
BLUE
GREEN/YELLOW
BROWN
PUMP3 - LOADLOCK (TWO PHASE 208V)
GN-YE/1.5/101
FROM
MAIN BUS BAR
BK/1.5/91
EGT0031 = OL2
SKT16
CB8 / 15
BK/2.5/96
GN-YE/2.5/100
BK/2.5/99
PL16
2
YE-GN
1
3
208VAC SUPPLY
3ph 208VAC SUPPLY
3ph 208VAC SUPPLY
208VAC SUPPLY
CHILLER REQUIRES
CHILLER REQUIRES
CHILLER REQUIRES
CHILLER REQUIRES
BK/2.5/98
TO MAINS
CONNECT
BUSBAR
TO MAINS
CONNECT
BUSBAR
FOR COMPONENT RATINGS
REFER TO POWER BOX CRIB
SHEET STORED ON EDMS
SYSTEM DOC NO. ED33975
4 BK/2.5/99
NEUTRAL BUSBAR
CONNECT TO
SEE NOTE # 8
AND WIRE PLG/SKT
PLEASE SELECT
POWER SUPPLY
3 P
HA
SE
BU
S B
AR
TO NEUTRAL
BUS BAR.
TO NEUTRAL
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO EARTH
BUS BAR.
TO NEUTRAL
BUS BAR.
TO EARTH
BUS BAR.
GN-YE/00/G2
BK/00/G5
BK/2.5/84BK/2.5/84
TO NEUTRAL
BUS BAR.
TO EARTH
BUS BAR.
TO NEUTRAL BUS BAR.
BK-4/103
TO EARTH BUS BAR.
GN-YE/104
TO NEUTRAL
BUS BAR.
TO EARTH
BUS BAR.
SET POT TO
TO BE COILED
BK/2.5/78
SW1
K8
12
3
5
13
A1A2
14
6
4
TO EARTH
BUS BAR.
BK00/G10
BK/00/G10
BK/2.5/0162
MAIN MACHINE BREAKER
IF LOADLOCK PUMP
SINGLE PHASE REFER
TO WIRING CHANGE
ON LEFT OF PAGE
NEUTRAL BUSBAR
CONNECT TO
BK/2.5/97
RF GENERATOR
RF GENERATOR
RIE/PECVD
ICP
TRAP
HEATER
IF FORELINE HEATER
SYSTEM BK H/SHRINK
NEUTRAL CONNECT
TO TWIN CB VIA K7
CONTROL DETAILED ON
DRG # SE91A27512
BK/2.5/162
K7
12
3
5
13
A1A2
14
6
4
TO EARTH
BUS BAR.
BK/00/G8
BN/00/G8
BK/2.5/0162
GN/YE/00/G8
GN/YE/10.0/42
MD81C19435PROTECTIVE COVER
LINE LOAD
EARTH EARTH
FEMALE INSERT - EPS0306
CODING PIN (CP) - EPT3040
2.5mmsq FEMALE PIN - EPT0240
EMC CHASSIS MOUNT - EPS1306
FEMALE INSERT - EPS0306
CODING PIN - EPT3040
2.5mmsq FEMALE PIN - EPT0240
STD CHASSIS MOUNT - EPS1206
1
2
E
3
1
2
E
3
4 4
1
2
E
1
2
E
4
1
2
E
3
1
2
E
3
BLACK 1
BLACK 2
GREEN/YELLOW
BLACK 4
BLACK 3PHASE 2
PHASE 1
NEUTRAL
PHASE 3
EARTH
WH/BU/0.5/111 5A
GN/YE/00/G10
4.
8.
6.
2.
3.
7.
5.
1.
DO NOT FIT 2 POLE CIRCUIT BREAKERS IN 400V SYSTEM.
SOME EXTERNAL UNITS SUPPLIED MAYBE COMPATIABLE
TO SYSTEMS SINGLE PHASE VOLTAGE.
CHECK BEFORE INSTALLATION.
FOR DRY PUMP OPTIONS (TAIKO / EBRA), REF. DRG SE00D23979/1.
FOR 110/208v SLEEVE BLUE NEUTRAL WIRES WITH WHITE HEATSHRINK.
SUPPLY CONNECTION CABLES SHALL BE AT LEAST 10mm.
REMOVE THESE 2 PINS PRIOR TO ASSEMBLY ON CONTACTOR K2, K3
& K6 AS SHOWN BELOW.
WHEN HEATER/CHILLER OPTION IS INSTALLED G5 TEMPERATURE
CONTROLLER CABLE IS NOT USED.
ALL WIRE TRI-RATED, EXCEPT CONTROL WIRING.
4CP
5CP
5CP
5
4
WH/BU/0.5/100
CB17
PL13
A
B
C
D
BN
WH/BU/0.5/85
GN/YE
4
K5
6 5
3
A1
TE1OS
EWM1303
A2
+ 5
2
- 6
EUROTHERM WIRING
GN/YE
CB9 IN POWER BOX
1
BU
BN
10AMP EFM1410
DK.BU/0.5/86
4
1
BU
3
13
2
SLEEVE BLUE
WIRE WITH
BLACK
HEATSHRINK14
EGB3022
MA00A23554
REF DRG
SE91B23358 2/3 - BLACK PLC
SE91A27512 1/2 - BLUE PLC
CB8/2A
FU1038/16ADK.BU/0.5/87
EWM1303
BU/2.5/84
BK/2.5/82 BK/2.5/182
BU/2.5/184
BK/2.5/182
BU/2.5/184
FE
* IF IN DOUBT ASK *
14 - 13
DWG REF 2C
DK.BU/0.5/87DK.BU/0.5/112
DK.BU/0.5/87
K4
E F
K4 13/14 IS ONLY WIRED IF
HEATED AND NOT
CONNECTED TO EARTH
* IF IN DOUBT ASK *
DK.BU/0.5/87DK.BU/0.5/112
E FDK.BU/0.5/87DK.BU/0.5/112
WIRING IF TABLE IS CONNECTED TO EARTH
THE TABLE IS ELECTRICALLY
WIRING IF TABLE IS NOT CONNECTED TO EARTH
K4 13/14 IS ONLY WIRED IF
HEATED AND NOT
CONNECTED TO EARTH
* IF IN DOUBT ASK *
THE TABLE IS ELECTRICALLY
FE 14 - 13
DWG REF 2C
DK.BU/0.5/87DK.BU/0.5/112
DK.BU/0.5/87
K4
* IF IN DOUBT ASK *
WIRING IF TABLE IS CONNECTED TO EARTH
WIRING IF TABLE IS NOT CONNECTED TO EARTH
20 19.08.09 26114 K5 WIRING AMENDED AS WIRE 89 WAS SHOWN IN TWO PLACES J.R.M P.J.M
21 06.01.10 28862 REFORMATED TO AUTOCAD. K4 CONTACT ADDED IN SERIES WITH K5 COIL J.B.W. J.R.M.
22 13.01.10 25737 REFORMATED & CHANGE FILTER WIRING & DRAWING MODS J.J J.B.W.
0V
0V
0V
0V
0V
0V
0V
0V 0V 0V
0V 0V 0V
0V
0V
G9
G8
G10
G7
G11
G4
G3
G5
G1
G6
G2
WH/BU/0.5/100
D4 94-EDA4004C
D1
1N4004
JP16
CM GAUGE
1
2
3
4
5BLK16
SNAP SW
1
2
JP4
CON10
1
2
3
4
5
6
7
8
9
10
PLG
3W Q/M
1
2
3
OFF SW RED
ESZ0026
JP5
CON4
1
2
3
4
62SM
C
1
2
BLK19
GUARDMASTER
1
2
3
4
SKT12/POWER BOX
PWR BOX
A
B
C
D
HFV8001
PLG 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
ON SW GREEN LAMP
EDL0006
UPPER AMU CONTROL
SKT25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
TEMP PROBE1
3W Q/M PL
1
2
3
JP5
CON4
1
2
3
4
POWER
9W D SKT
5
9
4
8
3
7
2
6
1
TEMP FILTER
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
EMO2
EMO_SW
1 2
SKT-V1
94-EPM3102C
1
2
JP57
GAUGE ISO VLV
1
2
3
4
CHAMBER LID
SW SPDT
VAC STAT
CONECTOR SUPPLIED
N2 METER
SKT 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
COMDEL CX601
PLG 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
BLK27
EMO F/P
1
2
3
5
4
1
2
JP23
EMO I/P
1
2
3
4
5
6
SKT-V2
94-EPM3102C
1
2
SKT-V3
94-EPM3102C
1
2
HOIST
GUARDMASTER
MKS PIRMARY CM
SKT 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
BLK28
EMO
1
2
JP58
VALVES
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
EMC1
OR
SCREEN CABLE USING P CLIP
OR TO CABLE SHELL
EWT2120C - 3.0mm TO 3.5mm
EWT2122C - 5.0mm TO 5.5mm
EWT2123C - 8.0mm TO 8.5mm
IF A PLASTIC P CLIP IS USED COPPER TAPE
IS REQUIRED TO LINE INSIDE OF CLIP
JP38
AMU 2 BIAS
1
2
3
4
5
6
SKT
3W Q/M
1
2
3
REMOTE CONTROL
SKT 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
UPPER AMU CONTROL
SKT25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
MKS SECONDARY CM
SKT 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
3
5
4
1
2
K-RF
94-EGB2052
2
4
6
A1+A2-
5
3
1
BLK17
VAC STAT
1
2
UPPER AMU CONTROL
PLG 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
HFV8000
PLG 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
BLK26
1
2
3
4
5
6
LF INDUCTOR
2W Q/M SKT
1
2
JP49
PRESS SW N2
1
2
3
PLG 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
JP18
TEMP CONT
1
2
3
4
5
6
7
8
9
10
JP15A
1
2
BLK18
HOIST
1
2
PL-V3
94-EPM3202C
1
2
ORANGE/MAINS ON
EDL0007
REMOTE
1
2
3
4
5
6
7
8
9
10
JP61
RLOCK 8W
A
B
C
D
E
F
G
H
TEMP PROBE
3W Q/M SKT
1
2
3
23SM
C
1
2
PL15/POWER BOX
PWR BOX
A
B
C
D
E
F
G
H
J
K
L
M
BLK22
GEN INTER
1
2
JP36
RF TWO
1
2
3
4
5
6
7
8
9
10
11
12
JP16
CM GAUGE
1
2
3
4
5
BLK27A
EMO F/P
1
2
ICP FAN
94-EPM0813
5
9
4
8
3
7
2
6
1
00
3
5
4
1
2
BLK30
1
2
SKT13/POWER BOX
PWR BOX
A
B
C
D
22SM
C
1
2
21SM
C
1
2
He PRESS CONT
SKT 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
5SM
C1
2
MKS 100mTorr/1 & 2 Torr
SKT 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
COLOUR CHART
BK
BU
GN
GY
OG
RD
VT
WH
YE
VIOLET
WHITE
YELLOW
ORANGE
GREEN
BROWN
BLACK
BLUE
GREY
RED
BN
LF INDUCTOR
2W Q/M PL
1
2
ICP FAN
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
ON SW GREEN
ESZ0025
94-ERB0310C
1K0/1W
BLK2
+/-15V
1
2
3
4
N2 PRESS SW
3W Q/M PL
1
2
3
AE LF5
PLG 37W DG
19
37
18
36
17
35
16
34
15
33
14
32
13
31
12
30
11
29
10
28
9
27
8
26
7
25
6
24
5
23
4
22
3
21
2
20
1
00
PLG 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
SKT
3W Q/M
1
2
3
JP19
PWR BOX
1
2
3
4
4SM
C
1
2
3
5
4
1
2
2SM
C
1
2
AE RFX600
PLG 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
TEMP FILTER
94-EPM0813C
5
9
4
8
3
7
2
6
1
00
JP31
He PRESS CONT
1
2
3
4
5
6
7
8
SENSOR
15W D PL
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
6SM
C
1
2
SKT
3W Q/M
1
2
3
JP27
AMU ONE
1
2
3
4
5
6
7
8
9
10
11
12
13
14
EMO1
EMO_SW
1 2
JP7
CON2
1
2
JP60
AUX GAUGE
1
2
3
4
5
6
7
COMDEL CX601
PLG 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
PLG
3W Q/M
1
2
3
ENI 300/500W
PLG 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
He METER
SKT 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
SYS ON/OFF
12W Q/M/ PL
1
2
3
4
5
6
7
8
9
10
11
12
ENI 600
PLG 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
JP8B-FAN3
ICP FAN
1
2
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
BLK21
GEN INTER
1
2
P1
15W D PL
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
JP33
He METER CONT
1
2
3
4
5
N2 PRESS
SUPPLIED
1
2
3
PL14/POWER BOX
PLG 9W DG
5
9
4
8
3
7
2
6
1
00
JP43
TURBO LL
1
2
3
4
5
6
D2
1N4004
JP32
He METER CONT
1
2
3
4
5
JP15
APC
1
2
3
4
5
6
7
8
9
10
JP58
VALVES
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
SYS ON/OFF
12W Q/M SKT
1
2
3
4
5
6
7
8
9
10
11
12
JP46
PUMP 3
1
2
3
4
5
AE RFX601
PLG 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
20SM
C
1
2
BLK23
ROUGH GATE VLV
1
2
ENI 300/500W
PLG 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
BLK1
+24V
1
2
JP40
CH TURBO
1
2
3
4
5
6
7
8
9
10
JP50
WATER I/L
1
2
3
4
5
6
7
8
9
100 mtorr
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
BLK27A
EMO F/P
1
2
JP44
PUMP 1
1
2
3
4
5
6
7
8
9
10
BLK6 or BLK7
94-PC00S26866
1
2
JP7
CON2
1
2
PL-V1
94-EPM3202C
1
2
BLK 7
LF FAN
1
2
JP8-PC91S28347
1
2
3
4
5
6
7
8
9
10
11
12
JP6
CON12
1
2
3
4
5
6
7
8
9
10
11
12
D3 94-EDA4004C
PL-V2
94-EPM3202C
1
2
BLK25
TURBO GATE VLV
1
2PK
TQ TURQUOISE
PINK
INTERFACE
25W D PL
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
JP39
AMU TWO
1
2
3
4
5
6
7
8
9
10
11
12
13
14
JP45
PUMP 2
1
2
3
4
5
1SM
C
1
2
JP4
CON10
1
2
3
4
5
6
7
8
9
10
PLG
3W Q/M
1
2
3
19SM
C
1
2
PRESS SW
3W Q/M SKT
1
2
3
UPPER AMU CONTROL
PLG 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
JP24
RF ONE
1
2
3
4
5
6
7
8
9
10
11
12
JP26
AMU 1 BIAS
1
2
3
4
5
6
JP9-PC91S28347
1
2
3
4
5
6
7
8
9
10
JP6
CON12
1
2
3
4
5
6
7
8
9
10
11
12
JP22
ON/OFF/LEDS
1
2
3
4
5
6
7
8
9
10
SKT2
SKT4
BU
PENNING
PIRANI
PENNING - CHAMBER
BU
LOADLOCK PIRANI
CHAMBER PENNING
RD
RF ONE FWD I/P +V
RF ONE FWD 0V
RF ONE REF I/P +V
PIRANI - LOADLOCK
94-EWM9307
RL2 NO 1
RL2 NC 1
94-EWM9307
LINK
YE
RD
BU
T.SPEED
GN
YE
BU
94-EWM0112
SKT3
PENNING LOADLOCK PENNING
94-EWM9307
GN
10/151/361
TU.SPEED
PK
ROUGHING GATE VALVE
TURBO GATE VALVE
GN
BN
YE
94-EWM8002
RD
WH
RF ONE S/P +V
RF ONE 0V
RD
BU
RF ONE 0V
RF ONE REF I/P +V
BU
RF ONE FWD I/P +V
94-EWM8002
RD
RD
BU
BU
RF ONE/HF/UPPER OR LOWER ELECTRODE
RF TWO/HF/UPPER ELECTRODE OR ICP
PIN E
PIN B
PIN C
PIN I
CONNECTOR SUPPLIED
BY OEM
GN
RL5 COM
RL5 NC
RL2 COM 1
RL2 NO 1
RL5 NO
PIN1
PIN1
GN
PIN2
PIN2
D1 FITTED INSIDE CONNECTOR
100/1500
RD
D1 FITTED INSIDE CONNECTOR
CONNECTOR SUPPLIED
CONNECTOR SUPPLIED
YE
+24V
+24V
0V
0V
94-EWM0002
RD
BU
RD
BU
BU
BU
GN
WH
+24v
VT
OG
LID/HOIST
VT
COM
N/O
N/C
OG
CHAMBER LID
RF TWO 0V
RF TWO S/P +V
RF TWO 0V
RD
BU
GN
YE
RF TWO REF I/P +V
WH
BK
BN
VT
OG
PK
94-EWM0112
RF TWO FWD I/P +V
OG
ENSURE OPERATION
USE EFB2011 TO COVER
THERMAL SNAP SWITCH
WHGN
TQ
PK
OG
VT
AMU TWO
BN
BK
WH
RD/BN
YE
RD/BK
ALCATEL
GN
WH/RD
BU
YE/RD
RD
AMU ONE
GN/RD
RD
ACT200T / 600T
RD/BU
GY
AMU TWO
YE/BU
WH/BU
FIT LK13
+ 24v
Ov
BN
DRY CONTACTS
NOTE:
ALCATEL ACT600M & ACT1300M REQUIRES FITTING OF MECHANICAL AND ELECTRONIC COMPONENTS FOR N2 METER MAGLEV TURBO
VT
OG
PK
TQ
GY
+ 24VRD
TURBO AT SPEED
RD/BU
GN/RD
YE/RD
STARTBU
BU
WH/RD
RD/BK
RD/BN
GN
YE
YE/BU
WH/BU
COMM
N/O
FIT LK13
AMU ONE DC BIAS +V
AMU ONE DC BIAS 0V
AMU TWO C1 POS I/P +V
FIT LK13 FIT LK13
RD
AMU TWO PARK/FREEZE
AMU TWO C2 S/P +V
AMU TWO DC BIAS 0V
GN
GN
AMU TWO C1 S/P +V
Ov
BU
YE
AMU TWO C1 0V
Ov
AMU TWO DC BIAS +V
RD
WH
RD
AMU TWO C2 POS I/P +V
+ 24v
RF ONE ON TO AMU TWO
YE
BU
GN
AMU TWO C2 POS 0V
AMU TWO P TO P 0V
Ov
AMU TWO C1 POS 0V
Ov
AMU TWO P TO P +V
AMU TWO AUTO/MANUAL
AMU TOW C2 0V
RF ONE ON TO AMU ONE
Ov
PIN 3
PIN 4
SUPPLIED
TURBO BRAKE VALVE
ALCATEL SUPPLIED VALVE IS NORM OPEN
OEM PART # 6-221-103-20
PIN 1
AMU ONE AUTO/MANUAL
PIN 2
PIN 3
PIN 5
PIN 6
BU
BU
GN
RD
YE
ALCATEL
RD
BU
ACT600M
FIT LK13
GN
YE
WH
LEYBOLD NT20
PIN 1
BK
BN
PIN 2
PIN 3
PIN 4
VT
OG
PK
PIN 5
PIN 6
TQ
GY
RD/BU
PIN 7
PIN 8
GN/RD
YE/RD
PIN 9
PIN 10
WH/RD
RD/BK
RD/BN
PIN 18
YE/BU
WH/BU
PIN 19
AMU ONE PARK/FREEZE
DRY N2 PURGE VLV
WH/BU
AMU ONE C2 0V
BU
GN
AMU ONE C1 0V
RD
YE
GY
PK
BU
YE
OG
RD
WH/RD
GN
BU
GN
YE
RD/BN
WH
BK
BN
WH
TQ
94-EWM0008
YE/BU
LEYBOLD TURBO PFEIFFER TURBO
BK
RD/BK
BN
VT
GN/RD
YE/RD
RD
RD/BU
REF:DGR # SG91C25068
1 2
3
EWM0120
4
BK
EWM0120
YE
BN
80 PLUS STYLE ON/OFF 100 PLUS STYLE ON/OFF
+24V
GN YE
VENT RELEASE
MOTOR PUMP
PUMP STATION
T AT SPEED
SET TURBO CONTROLLER TO
REM ON THE DISPLAY
VT
NOTE:
IF ALACTEL TURBO USED,
DO NOT USE 3 ROW / 44 PIN CONNECTOR
PROVIDED WITH PUMP CONTROLLER.
ATTACH PROVIDED CONNECTOR TO LOOM,
USING TIE WRAP.
TURBO CONTROLLER INTERFACE
USE PART # 94-EPM0944C
0V
RD
GN
YE
VT
RD
START/STOP
94-EWM8002
MODE I/P CONT'
BU
GN
WH
a
b
PIN 1
PIN 2
1
2
3
27
PIN 3
4
TURBO
PURGE
VALVE
PIN 5
PIN 6
RD
TURBO AT SPEED
YE
BU
WH
LIN
K
BK
BN
39
18
VT
94-EWM0008
31
TU
41
BRAKE+24V
7
GROUND
RD
42
RD
BU
GN
SET TURBO CONTROLLER TO
REM ON THE DISPLAY
BU
YE
WH
BK
TURBO AT SPEED
30
INHIBIT
6
36
AMU TWO C2 POS I/P +V
LEYBOLD 10/151/361
RD
GN
MODE I/P CONT'
PENNING - LOADLOCK
BU
15
32
WH
GROUND
38
AMU TWO C1 POS I/P +V
GROUND
PL (44 W 3 ROW)
EXT. FAULT
40
AMU TWO DC BIAS 0V
BK
BN
8
24
BK
AMU TWO DC BIAS +V
5
ACT 1300
CABLE & VALVE SUPPLIED
16
WH
Ov
+ 24v
RD
FIT LK13
ALCATEL ACT1300M
AMU TWO C1 0V
AMU TWO PARK/FREEZE
BK
CHAMBER TURBO
BK
YE
Ov
a
GN
b
1
2
PIN 3
RD
3
RD
4
PIN 1
PIN 5
PIN 6
AMU ONE C1 POS I/P +V
PIN 2
GN
AMU ONE C2 POS I/P +V
AMU ONE C2 S/P +V
AMU TWO C2 0V
94-EWM0008
AMU ONE C1 S/P +V
SYSTEM POWER ON/OFF SWITCH + LAMP
LEYBOLD 1000/1500
AMU TWO C1 S/P +V
AMU TWO AUTO/MANUAL
AMU TWO C2 S/P +V
SWITCH PART # 94-ESM0200C
SWITCH PART # 94-ESM0200C
LEYBOLD NT10
BU
TMH071P / TMU071P / TPH261
Ov
LEAVE &
SLEEVE
LEAVE &
SLEEVE
REPLACE SUPPLIED CONNECTOR
TRANSFER PREVIOUS WIRES
CONNECT BN & GN / LINK 3 TO 11
GN
BN
WH
PIN 7
PIN 8
PIN 9
PIN 10
SYSTEM OFF (RED)
YE
WH
BK
N/O
BN
VT
OG
TURBO BRAKING
N/C
0v
TURBO AT SPEED
94-EWM0002
RL7 NC 1
RL7 NO 1
SYSTEM ON (GREEN)
PIN 13
RL7 NO 2
RL7 NC 2
RL7 COM 2
94-EWM8002
PIN 14
RL7 COM 1
PIN 31
LAMP
PIN 32
PIN 33
PIN 34
PIN 36
PIN 37
94-EWM0012
PIN 38
PIN 39
PIN 40
PIN 41
PIN 42
94-EWM0004
0V
N/C
94-EWM8002
N/O
94-EWM0208
RD
BU
GN
LAMP
YE
WH
BK
RD
RD
BU
EWM0120
RD
RD
RD
BU
RD
RD
N/C
RD
GN
YE
RD
WH
BU
LAMP
BK
LAMP
+24V
0V
0V
0V
+15V
-15V
N/O
N/C
RD RD
0V
-15V
RD
BU
+15V
0V
+24V
BU
BU
RD
GN
WH
N/O
RD
BU
BU
V1
V2
YE
RD
V3
BU
EMO OUT
RD
BU
EMO IN
GN
AMU ONE P TO P +V
94-E
WM
0002
0V
ALARM +
YE
WH
AMU TWO P TO P +V
94-E
WM
0002
HEAT +
BK
EWM0120
RD
HEAT +
0V
ALARM +
BU
RD
RD
BU
GN
BU
RD
BU
BU
RD
CURRENT SW +24V
CURRENT SW
BN
VT
OG
PK
RD
BU
TQ
GY
RD
RD/BU
GN/RD
CONTACTOR ON
YE/RD
WH/RD
RD/BK
BU
RD/BN
YE/BU
GN
WH/BU
BN
VT
OG
PK
RD
TQ
GY
BU
RD/BU
GN/RD
GN
YE
YE/RD
WH/RD
RD/BK
WH
RD/BN
YE/BU
RD
BU
MAIN ON LAMP
WH/BU
MAIN ON LAMP
CONTACTOR ON
0V
EMO IN
+ 24v(INTERLOCK CHAIN)
0v
JP4
VT
AMU ONE DC BIAS +V
Ov
AMU ONE DC BIAS 0V
AMU ONE PARK/FREEZE
AMU ONE C1 POS I/P +V
AMU ONE P TO P +V
AMU ONE C1 POS 0V
AMU ONE P TO P 0V
AMU ONE C2 POS 0V
+ 24v
TP
12
LINK 14 DETAIL
AMU ONE C2 POS I/P +V
AMU ONE C1 0V
AMU ONE C1 S/P +V
WH
0v
AMU ONE C2 S/P +V
BN
AMU ONE
0v
AMU ONE C2 0V
VT
+ 24v(INTERLOCK CHAIN)
OG
PK
AMU ONE AUTO/MANUAL
A
LOWER OR UPPER AMU
TQ
GY
B
Ov
Ov
BU
0v
PUMP ONE ON
UPPER AMU
RD/BU
GN/RD
LK 14
YE/RD
WH/RD
PUMP TWO ON
PUMP ONE RUNNING
+ 15v
0v
RD/BK
RD/BN
PUMP ONE FAIL
PUMP TWO RUNNING
PUMP TWO FAIL
0v
- 15v - 15v
YE/BU
WH/BU
VT
RD
He COOLING PRESSURE 0V
He COOLING PRESSURE S/P +V
He COOLING PRESSURE 0V
GN
TQ
WH
YE
BU
GN
He COOLING PRESSURE I/P +V
He COOLING FLOW I/P +V
GY
BK
WH
BK
He COOLING FLOW 0V
He PRESS & He METER
ASSISTED COOLING
+ 15v
YE
VT
RD/BN
BN EMO IN
BU
YE/BU
RD/BU
OG
RD
BN
YE/RD
RD
BU
OG
GN/RD
ONLY REQUIRED FOR AMU FITTED
TO UPPER ELECTRODE
ELSE WIRED DIRECT
+ 24v
+ 24v
BU
YE YE
PK
RD
WH/RD
0v
0v
PUMP TWO FAIL
GN
GN
WH
WH/BU
PUMP ONE FAIL
PUMP ONE RUNNING
PUMP ONE ON
WH
BK
RD/BK
PUMP ONE CURRENT SW
PUMP TWO RUNNING
BN
94-EWM0108 94-EWM0108
PUMP TWO ON
PUMP ONE CURRENT SW +24V
+ 24v
0v
RD
RD
BU
GN
WH
YE
WH
PUMP THREE ON >
< PUMP THREE FAIL
< PUMP THREE RUNNING
BK
BN
RD
RD
VT
BU
BU
GN
GN
OG
PK
TEMPERATURE CONTROLLERS
TEMP I/P +V
TEMP 0V
TEMP CONT S/P +V
POWER BOX WIRING
TEMP CONT 0V
ALARM +24V
ALARM O/P
NOTE:
100 PLUS STYLE ON/OFF
FIT LK22
V +
V -
94-EWM0004
HEAT ON O/P +
HEAT ON O/P -
BU
GN
SOFT VENT VLV
1D
2A
AB COM
TEMP CONT S/P +V
TEMP I/P +V
HEAT ON O/P +
2B
AA ALARM
TEMP 0V
HEAT ON O/P -
ALARM O/P
1A O/P1
1B
3A
GN
GN
YE
RD
BU
BU
94-EWM0104
RD
1C CRYO ENABLE>
<CRYO ENABLE
WH
BK
RD
BU
BN
VT
OG
ALARM +24V
PK
3D
GN
YE
L
N
AC SUPPLY
80 - 250 VAC
G5 CB8 2AMP
SEE DIAGRAM
94-SE91A19752
FOR AC WIRING
EARTH STUD
SEE DETAIL BELOW
94-MA00A23554
94-EWM0112
MAINS WIRING
FOR CONTROLLER(S) AND ELECTRODE
REF DRG. No.SE81A19439 V i
GN/YEL
BU
BN
NOTE:
REPLACE F1 ON 94-PC00S26866 WITH
94-EFF2150 = 5 AMP 20mm FUSE
TEMPERATURE PROBE WIRING DETAIL
RD
RD
RD
RD
RD
RD
WH WH WH
94-EWS0902
94-EWS0902
94-EWS0909
KEEP AS SHORT AS POSSIBLE, ALLOW FOR ONE REPAIR ON TEMPERATURE PROBE
TEMPERATURE PROBE
94-E
WM
0603
CRYO ENABLE>
<CRYO ENABLE
TEMP CONT 0V
ITEM 112
EUROTHERM
700 DEG C & 400 DEG C TEMPERATURE SNAP SWITCH ON PECVD SYSTEMS
BN
94-EWM0108
+ 15v
- 15v
N2 FLOW METER 0V WH
0v
N2 METER
ALL TURBOS
RD
N2 FLOW METER I/P +V GN
YE
BU
S/P +V
- 15v
0v
+ 15v
I/P +V
I/P 0V
RD
BU
YE
GN
WH
BK
EMC BOND
TOTAL CABLE LENGTH
TERMINATION LENGTH
CABLE PART #
025
OIPT CABLE# FITTED ONCE AT
MID-POINT OF CABLE
TERMINATION LENGTH
OIPT CABLE #
NOTE:
1. USE OPT/WI/4 AND OPT/WI/23.
2. WIRES TERMINATED AT PC00S26866 TO BE SLEEVED
AT EQUIPMENT IF NOT USED, ALL UNUSED WIRES TO BE REMOVED.
3. = CABLE FITTED AT ALL TIMES.
4. = CABLE FITTED OPTION.
5. = CABLE / ASSEMBLY WIRED TO W/O OPTION
6. UNLESS STATED ALL CONNECTIONS ARE TO PC00S26866
7. ETHERNET WIRING AND CANBUS REF DRG # SE81A26868 SHEET 3
8.
94-EWM0108
EMC BOND
I/P 0V
+ 15v
I/P +V
94-EST0006
FIT LINK IN 10V POSITION
INSIDE He PRESSURE UNIT
0v
- 15v
I/P 0V
0v
- 15v
+ 15v
SYSTEM FIT OPTION
I/P +VGN
WH
RD
BU
YE
GN
WH
RD
BU
YE
VT
0V
94-EWM8002
RD
RD
BU BU
BK
94-EWM8002
SNAP SW COM
SNAP SW NC
94-EWM0012
PIN 1 PIN 3
BU
RD RD
BU BU
24V>
24V<
24V>
24V>
24V>
FLOW 1 OK
FLOW 2 OK
FLOW 3 OK
RD
BU
GN
YE
SYSTEM INTERLOCKS
YE
+15V
-15V
0V
CM GAUGE 0V
CM GAUGE +V
CM GAUGE 0V
-15V
0V
CM GAUGE +V
+15V -15V
CM GAUGE 0V
CM GAUGE +V
0V
+15V
WH
GN
BU
RD
BU
YE
GN
WH
YE
BU
RD
CM GAUGE
YE
RD
GN
WH
94-EWM0108
RF 2/HEAT 2
RD
BK
170 DEG
WH
REF DRG # SE00C25489
OG
WH
OV
BU
BU
CONTROL VALVE WIRING
0 -400 DEG C RF BIAS TABLE
BLOW INTO ICP
OV
OV
RD
RD
RD
BLOW INTO LF INDUCTOR
VT
GN
AIR FLOW
BK
RL6 COM 1
RL6 NO 1
RD
BK
RDRD
BU
BU
N2 PRESSURE SWITCH
LF INDUCTOR
BU
SCREEN TO RF GEN
94-EWM0102
94-EWM0102
RF 1
RD
BK
BK
WH
YE
RD = +24V
BK = 0V
WH = PULSED OUTPUT
BLO
W IN
TO
UN
IT
WH
BK
RD
BU
LF INDUCTOR
BN
RD
RD
VT
VT
BU
OG
OG
AIR FLOW
BN
94-EWM0112
RL2 NO 1
RL2 NO 1
RL2 NO 1
RF ONE S/P +V
RD
RD
RF ONE REF I/P +V
RF ONE FWD I/P +V
RF ONE 0V
BK
BK
RL2 COM 1
BU
ICP 65
OG
RD
WH
BU
GN
VT
RD
BU
GN
VT
VT
94-EWM0102
RD
RL6 COM 1
RF TWO FWD I/P +V
BK
BK
RF TWO S/P +V
RF TWO 0V
RL6 NO 1
LINK
CHASSIS GROUND
MOTOR INTERLOCK
RL6 NO 1
RF TWO REF I/P +V
MOTOR INTERLOCK
+24V
RL6 NO 1
VT
SENSOR 1 +
SENSOR 1 -
DC SUPPLY
VT
RD
OG
WH
VT
RD
BU
GN
BU
94-EWM0102
RF ONE REF I/P +V
RF ONE REF 0V
RF ONE FWD I/P +V
RF ONE FWD 0V
RL2 NO 1
RF ONE S/P +V
RF ONE 0V
0 VOLT
0 VOLT
RL2 COM 1
INTERLOCK
INTERLOCK
RL2 NO 1
0 VOLT
RF TWO FWD 0V
RF TWO REF 0V
RF TWO REF I/P +V
RF TWO S/P +V
INTERLOCK
RL2 COM 1
INTERLOCK
0 VOLT
RF TWO 0V
RF TWO FWD I/P +V
OPEN VLV
CLOSE VLV
DIGITAL OV
ANALOG COMMON
WH
BK
BK
CONTROL MODE
BNBN
RF ONE FWD I/P +V
BU
OUT
0 VOLT
WH
VT
BK
INTERLOCK
INTERLOCK
GN
BU
RF ONE S/P +V
DC(-)
DC(+)
RF ONE REF I/P +V
RL2 NO 1
RL2 COM 1
BU
BK
SMC PART # ISE30-01-25
OIPT PART # 94-GVV0300
RD
OG
RL6 NO 1
YE
0 VOLT
RF ONE FWD I/P +V
0 VOLT
INTERLOCK
0 VOLT
VAT 612 ISO 63/100 APC
INTERLOCK
RF ONE S/P +V
RD
RF ONE REF I/P +V
RL2 NO 1
BU
YE
RL2 COM 1
BU
0 VOLT
RD
RF TWO S/P +V
YE
RF TWO 0V/LOAD -
1.2 MTR
BU
VT
OG
RD
BU
GN
WH
YE
CABLE SUPPLIED
GN
HFV 8000 ENABLE/+12V CONNECTED
RL2 COM 1
RF ONE REF 0V
RF ONE S/P +V
RF TWO S/P +V
RF TWO 0V
RF TWO FWD I/P +V
RF TWO FWD 0V
RL6 NO 1
RF TWO REF I/P +V
94-EWM0004
RL6 NC 1
HFV 8000 ENABLE/+12V CONNECTED
RF TWO REF 0V
RL6 COM 1
RL6 COM 1
INTERLOCK
INTERLOCK
RF TWO 0V/LOAD -
RD
BU
BU
VT
OG
RF TWO FWD I/P +V/LOAD +GN RL6 NO 1
RF TWO FWD I/P +V/LOAD +
RF TWO 0V/LOAD -
RF TWO S/P +V
RL6 COM 1
VT
RD
BU
GN
OG
TURBO BACKING VLV
DRY N2 PURGE VLV
TURBO PURGE VLV
SOFT ROUGH VLV
RF ONE FWD I/P +V
CABLE TO BE IDENTIFIED WITH VALVE NUMBER
CABLE IS NOT TO BE TWISTED
RD
BU 0 VOLT
GN
INTERLOCK
INTERLOCK
10 WAY SMC
OG
0V
WH
RF ONE S/P +V
VT
RF ONE REF I/P +V
0V
YE
YE
CM ISOVLV
PENNING ISOVLV
RL2 NO 1
RF TWO S/P +V
RL2 COM 1
RF TWO 0V
RF TWO FWD I/P +V/LOAD +
RF TWO REF I/P +V
BK
RL6 COM 1
RL6 NO 1
INTERLOCK
INTERLOCK
RD
BK
BK
RD
BK
RD
BK
RD
BK
BK
BU
GN
RD
RD
WH
OG
VT
RD
RD
RD
BK
VT
BU
PCB MOUNTED SMC(S)
He VLV
0V
ROUGHING VLV
VENT VLV
0V
SOFT VENT VLV
0V
0V
0V
0V
0V
0V
OG
VT
BN
GN
BK
GN
BU
WH
YE
PIN F
RF ONE FWD I/P +V
YE
YE
GN
RD
RD
ACT 1000
RD
GN
BU
OG
RD
BU
GN
0 VOLT
GN
INTERLOCK
INTERLOCK
WH
RF ONE S/P +V
VT
RF ONE REF I/P +V
YE
START/
STOP
ACT200T/600T
REMOTE
MODE
EXT
SAFETY
TER' BLK
BU
WH
GN
RD
YE
RL2 NO 1
ALCATEL
BU
YE
RL2 COM 1
YE
LINK PIN 5
TO PIN 6
RD
SPEED
TURBO
AT
BU
+24v
LOADLOCK TURBO LEYBOLD
94-EWM0008
RD
ENI 800
BU
RF ONE 0V
RD
YE
FOR NT20
LINK
PRESSURE SETPOINT +VE
VALVE POSISTION OUTPUT +VEWH
BK
BN
RD
BU
GN
YE
LINK BK
BK 0V
0V
0V
2
3
5
6
13
14
1 2 3 4 5 6 7 8 9 10
11 12 13 14 15 16 17 18 19 20
16
15
4
3
42
41
40
39
38
37
36
34
33
32
31
13
START
N/O
COMM
+24V
6
5
3
2
1
1
2
3
4
5
6
7
8
RD
94-EWM8002
BK
RD
BK
RD/0.5mm
SECONDARY EMO
AT CUSTOMER REQUEST
LINK
OR
NOTE:
LINK BLK27A WHEN SYSTEM NOT FITTED
WITH SECONDARY EMOREF:MJC
HEAT 1
RD
BK
WH
YE
WH
BK
RF GENERATOR POWER
CONNECTION PANEL
P1-BK/10mm
P2-BK/10mm
P3-BK/10mm
+24VDC
0VDC
94-L/GEN/RFG/200=208VAC 3 PHASE
94-L/GEN/RFG/201=400VAC 3 PHASEHFV8000
RD
RD
BU
BU
1-BK
2-BK
3-BK
E-GN/YE/10mm
E-GN/YE
SUPPLIED
94-EWM0102
1
2
3
4
BLUE
94-EPS2080
PL COMPONENT OF PART
NOTE:
TO BE USED IN CONJUNCTION WITH DIAGRAM # SE91C24202
ICP380 RF GENERATOR EMO
PIRANI - AUX
94-EWM9307
PIRANI - AUXILLIARY
GN
BK
BU
YE
BU
GN
YE
PFEIFFER
TMH071P/TMU071P/TMH262P
remote
MASS (GROUND)
SWITCH OUTPUT 1
+24 VDC
INPUT STANDBY/RESET
INPUT REMOTE/LOCAL
=
NC
X2 X1
POWER SUPPLY/
POWER UNIT
90-132/
185-265
VAC
PE
CABLE SUPPLIED WITH UNIT
YE
BN
BU
PUMPING STATION
0V WH
WH
CONTROL MODE APC >
0v-DIG
CLOSE >
OPEN >
0v-ANA
APC S/P +V
APC 0V
VAT 612 VLV POS' 0V
VAT 612 DIG 0V <
CM GAUGE 0V
CM GAUGE I/P +V
VAT 612 VLV POS' +V
0v
+24v
VT
GN
YE
BU
RD
WH
BK
BN
VT
PK
PK
94-EWM0112
AUX GAUGE I/P +V
AUX GAUGE 0V
+ 24v
DIG 0v
ANA 0v
-15v
+15v
BU
BK
OG
GN
BU
WH
AE RFX600A/1250/1251/3000/3001
DRESSLER 133/136
JF 300
CEASER 0230
AE RFX600A/1250/1251/3000/3001
DRESSLER 133/136
JF 300
CEASER 0230
RD
BK
RD
BK
BK
RD
USED ON
ALD SYSTEMS
ALL REMAINING CONNECTIONS
AS SHOWN ABOVE FOR SMC CONTROL
NOT REQUIRED FOR
ALD SYSTEMS
NOT REQUIRED FOR
ALD SYSTEMS
NOT REQUIRED FOR
ALD SYSTEMS
K5 OK
K5 OK
YE
YE
PK
GN
YE
BU
RD
WH
BK
BN
VT
ALD SYSTEM
STD SYSTEM
ALL SYSTEMS
94-MA91Z28348
CLEANROOM INTERFACE
REF:DRG # SE91D27448
OR
NT10
PIN 2
PIN 3
PIN 4
PIN 5
PENNING - CHAMBER
PFEIFFER PKR 251
SKT2
PENNING
94-EWM9307
BU (+24VDC)
OG (+0VDC)
BLK (+V SIGNAL)
GN (0V SIGNAL)
22
12
21
11GN
GN
YE
YE94-EWK2533C FITTED
TO CLAMP CABLE
ENSURE THAT CABLE ALLOWS FOR HOIST TRAVEL
94-EWM0104
RD
RD
BU
BU
+24v
HOIST OK
VACSTAT>
HOIST
GUARDMASTER
NOTE:
STANDARD 100/133 AND ALL ICP W/O'S
CHAMBER LID SWITCH REMAINS AS BOM.
ALD W/O'S CHAMBER LID IS CHANGED TO
94-ESZ6320
94-EWM0108
WH
WH
94-E
WM
0108
94-EGE0201 x 3
94-EGE0222 x 2
94-EWM0002
+15V
-15V
CM GAUGE 0V
CM GAUGE +V
BU
YE
RD
GN
WH
BU
YE
RD
GN
WH
94-E
WM
0108
BU
YE
RD
# 94-ESR2454
GN
YE
RD
BU
RD
GN
5
6
7
8
9
10
11
12
13
14
15
16
COM
1
2
3
4
RD
BU
RLB - 1
BU
BU
BU
BU
-15V
CM GAUGE 0V
CM GAUGE +V
0V
+15V
GN
WH
YE
BU
RD
ITEMS:94-ESR2454 / 94-EGE0201 / 94-EGE0222 ON DIN RAIL
0V
-15V
CM GAUGE 0V
CM GAUGE +V
0V
+15V
GN
WH
YE
BU
RD
CM GAUGE - TWIN SWITCHING
TPH521
PRIMARY GAUGE = LOW VACUUM
SECONDARY GAUGE = HIGH VACUUM
E.G.
2 TORR WITH 100mTORR
2 TORR = PRIMARY
100 mTORR = SECONDARY
10 TORR WITH 1 TORR
10 TORR = PRIMARY
1 TORR = SECONDARY
CHASSIS GROUND
RD
BU
PC00S26875
RF TWO S/P +V
RF TWO FWD I/P +V/LOAD +
RF TWO REF I/P +V
RL6 COM 1
RL6 NO 1
INTERLOCK
INTERLOCK
RD
RF TWO 0VBU
WH
GN
VT
AE LF5
CONNECTOR SUPPLIED
BY OEM
PIN E
PIN V
PIN H
PIN J
PIN F
PIN L
PIN K
PIN W
GREEN ECCO
OG
1A0
PLASMA TECHNOLOGYANGLE
X.XX
X.X
X
Issue Date ECN Modification DrawnZone
2345
A
B
C
D
KLW DEB 23/05/05
PC2003 100 SYSTEM
INTERFACE WIRING
ES27512
1 OF 218
1:1
mm
16 13/01/10 28409 N2 PURGE ADDED TO ALCATEL PUMPS. 122P & A300H CTL UNIFIED 2 - 3A P.J.M J.B.W
17 02/02/10 29413 LF5 GEN PIN F EDWARDS PUMPS SIGNALS JULABO FCW2500 ADDED JRM JBW
330R/0.25W
94-ERB0233
330R/0.25W
94-ERB0233
330R/0.25W
94-ERB0233
18 19/02/10 29544 PAGE 1 - ADD 330 OHM RESISTORS TO WATER FLOW SWITCH 2B JRM JBW
PLC CAN
7AC911.9
5
9
4
8
3
7
2
6
1
00
Spare #
ENDPOINT
PLG 9W DG
5
9
4
8
3
7
2
6
1
00
12T/C-
V out
BNC
1
2
X3
EXP2712
1
2
3
4
5
6
7
8
9
10
11
12
X3
1
2
3
4
5
6
7
8
9
10
11
12
PARALLEL INTERFACE
SKT 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
25W D SKT1
SKT 1/GASPOD
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
9W D PL
PL SLIT VLV
5
9
4
8
3
7
2
6
1
PUMP I/O
SKT 37W DG
19
37
18
36
17
35
16
34
15
33
14
32
13
31
12
30
11
29
10
28
9
27
8
26
7
25
6
24
5
23
4
22
3
21
2
20
1
00
BLK13
CAN LL PWR
1
2
3
4
5
6
PLC 2 CAN
7AC911.9
5
9
4
8
3
7
2
6
1
00
LN2 VLV
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
X3
EXP2712
1
2
3
4
5
6
7
8
9
10
11
12
CB11/4A
JP64
DRY PUMP ONE
1
2
3
4
5
6
CAN
1
2
3
4
JP52
1
2
3
4
LASER E/POINT CAMERA
SUPPLIED WITH UNIT
1
2
3
VERITY
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
X3
1
2
3
4
5
6
7
8
9
10
11
12
1L
13SM
C
1
2
LASER E/POINT CAMERA
SUPPLIED WITH UNIT
1
2
3
PL
94-EPP7003
1
2
GDN
LN2 VLV
PLG 9W DG
5
9
4
8
3
7
2
6
1
00
F/LINE
2W Q/M PL
1
2
CB10/6A = CHAMBER
JP55
PURGE SW
1
2
3
4
1L
X3
1
2
3
4
5
6
7
8
9
10
11
12
ESR1732
Solid State Relay
1
23
4
+
-
ac
ac
COLOUR CHART
BK
BU
GN
GY
OG
RD
VT
WH
YE
VIOLET
WHITE
YELLOW
ORANGE
GREEN
BROWN
BLACK
BLUE
GREY
RED
BN
X3
EXP2712
1
2
3
4
5
6
7
8
9
10
11
12
V out
BNC
1
2
CB11/4A
JP51
HOIST CONT INTER
1
2
3
4
5
6
EQT0002
BU
BN
5+
90 deg C
EST0001C
1
2
PK
TQ TURQUOISE
PINK
BLK15
TEMP PROBE
1
2
BLK20
GASPOD PWR
1
2
3
4
5
6
JP34
ENDPOINT
1
2
3
4
5
6
7
8
9
10
CHILLER
PLG 9W DG
5
9
4
8
3
7
2
6
1
00
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
TURBO VALVE
CONNECTOR SUPPLIED
2
3
1
GASPOD
SKT 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
6-
5+
X5
94-EPP0206
1
2
3
4
5
6
11T/C+
EMC1
OR
SCREEN CABLE USING P CLIP
OR TO CABLE SHELL
EWT2120C - 3.0mm TO 3.5mm
EWT2122C - 5.0mm TO 5.5mm
EWT2123C - 8.0mm TO 8.5mm
IF A PLASTIC P CLIP IS USED COPPER TAPE
IS REQUIRED TO LINE INSIDE OF CLIP
JP47
DRY PUMPS I/P
1
2
3
4
5
6
7
8
9
10
BLK26
1
2
3
4
5
6
FIREROD2/FRONT CHAMBER
G/SUN/HET/010
1
2250 W
NESLAB-RTE-7
PLG 15W DG
8
15
7
14
6
13
5
12
4
11
3
10
2
9
1
00
JP34
ENDPOINT
1
2
3
4
5
6
7
8
9
10
JP17
CHILLER
1
2
3
4
5
JP15A
1
2
HOIST CONT INTERLOCK
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
2N
TEMP PROBE
1
2
ENDPOINT
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
PUMP I/O
PLG 37W DG
19
37
18
36
17
35
16
34
15
33
14
32
13
31
12
30
11
29
10
28
9
27
8
26
7
25
6
24
5
23
4
22
3
21
2
20
1
00
94-ECC0512C
100n/50V
JP42
1
2
3
4
5
6
7
8
9W D SKT
SKT - SLIT VLV
5
9
4
8
3
7
2
6
1
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
EXD3604
4W terrm
HARTING SKT
CON16
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
REMOTE PUMP CONN'
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
PL-CHP
MAINS
A
B
C
D
JP8
PUMP CONTROL
1
2
3
4
5
6
7
ESR1732
Solid State Relay
1
23
4
+
-
ac
ac
FIREROD1/FRONT CHAMBER
G/SUN/HET/010
1
2250 W
BLK14
SUPPLY
1
2
3
4
5
6
PUMP PURGE SW & VLV
9W D PL
5
9
4
8
3
7
2
6
1
90 deg C
EST0001C
1
2
BLK1
SUPPLY IN
1
2
3
4
5
6
11T/C+
EBARA DRY PUMP CH
SUPPLIED
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
PUMP PURGE SW & VLV
9W D SKT
5
9
4
8
3
7
2
6
1
REG+E+PROG
CIRDIN_6-P SOLDER VIEW
1
2
3
5
6
4
V out
BNC
1
2
6-
FIREROD4/REAR CHAMBER
G/SUN/HET/010
1
2250 W
12T/C-
JP54
PURGE VLV
1
2
JP7
F/TRAP
1
2
PL-CHP
MAINS
A
B
C
D
JP47
DRY PUMPS I/P
1
2
3
4
5
6
7
8
9
10
12
SM
C1
2
CB11
2 AMP
D1
1N4004
F/LINE
2W Q/M SKT
1
2
BETTATECH-CU500
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
ENDPOINT
PLG 9W DG
5
9
4
8
3
7
2
6
1
00
HOIST CONT INTERLOCK
PLG 9W DG
5
9
4
8
3
7
2
6
1
00
CM SIGNAL
1
2
CHILLER
SKT 9W DG
5
9
4
8
3
7
2
6
1
00
JP10
INTERLOCK
1
2
GASPOD
PLG 25W DG
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
00
SKT
94-EPS7003
1
2
GDN
1 2 3
X3
EXP2712
1
2
3
4
5
6
7
8
9
10
11
12
X3
1
2
3
4
5
6
7
8
9
10
11
12
BLK1
SUPPLY
1
2
3
4
FIREROD3/REAR CHAMBER
G/SUN/HET/010
1
2250 W
JP66
F/LINE VENT
1
2
X3
1
2
3
4
5
6
7
8
9
10
11
12
ROUGH VALVE
CONNECTOR SUPPLIED
2
3
1
2N
BLK29
LN2 VLV OUT
1
2
JP61
CON4
1
2
3
4
PUMP PURGE SW & VLV
9W D PL
5
9
4
8
3
7
2
6
1
X3
EXP2712
1
2
3
4
5
6
7
8
9
10
11
12
CAN G
CAN L
VT/0.5mm
BU
CAN A - TRAFFIC LIGHTS / IDAC & SD1024 / EP MOTOR CONT
X3 PIN 1 LINKED TO PIN 2
OF HIGHEST NUMBERED
CAN FITTED TO SYSTEM
PK
GN/YE 0.5mm
GN/YE 0.5mm
94-EWM8022
CHAMBER PUMPDOWN
FITS INTO
BASE
2/CPU
COMMS - ALD
TERM
PC91S27461
415V SYS
NEUTRAL BUS BAR
TERM
CAN G
CAN L
CAN H
INSIDE POWER BOX
LD-250 SOFIE ENDPOINT
CAMERA INTERLOCK
shield
CAN H
BU/0.5mm
shield
RD
1 POLE CB/415V SYS
2 POLE CB/208V SYS +
SLEEVE BLUE WIRE
BLACK HEATSHRINK
BU
[LK19 NOT FITTED]
PC00S26866 JP52 (+24v)
BN
94-EWM0002
SPARE INTERLOCK 1 I/P
EARTH BUS BAR
EARTH BUS BAR EXZ0060/EXZ0062
IF REQUIRED USE T/C PL & SKT TO EXTEND
COVER : ESR1731
MOUNTED TO PANEL ON THE REAR OF SYSTEM
USE EFB2011 TO COVER
THERMAL SNAP SWITCH
BU
94-EWM0008
BN
PC91S28347
REF:94-SE91C28357
94-EPR0106
94-EPR010494-EPR0202
JOIN AND SLEEVE WITH
IN CONNECTOR SHELL
FITTED BEWTEEN
R.S.P. FANS
ETHERNET
CABLE HAS NO ROUTING
RD
VARIABLE TABLE/VAT CAN
R.S.P.
RD/BU
PK
X2
C1
GN
BU
RD
YE
X1
RD
GN
0
BU
2
BASE 2
CPU
YE
GY
4
6
RD
GN
RD/BU
OG
8A
C
BU
PK
JOIN AND SLEEVE WITH
IN CONNECTOR SHELL
E
NOT
USED
.
INNER CORE
BASE 6
DIGITALIN/OUTPUT
.
OUTER/SCREEN LD-250 SOFIE ENDPOINT
EXTERNALLY MOUNTED
BU
EXAMPLE
YE
94-EPR0106
YE
GN
GN
WH
WH
C
A
R
D
0 2
4
68
+12V
A
C
E
E
T
H
E
R
N
E
T
C3
.
0 VOLTS
BASE 1
X5
.
.
RD
C2
X4
FIT:94-ERB0310C - R69, R70, R71
PUMP RUN
Supply:
+24VDC
PUMP RUN
PUMP ALARM
X3
PUMP ALARM
PUMP WARNING
PUMP WARNING
NOTE:
FIT BATTERY INTO BASE 2 CPU - INSTRUCTIONS SUPPLIED WITH UNIT FROM O.E.M.
SET NODE SWITCHES ON BASE 2.
BOTH SET TO POSITION 2
SET NODE SWITCHES ON ETHERNET CARD.
UPPER SW TO 0.
LOWER SW TO 1.
PUMP START
PUMP START
0
TAKIO
DRY PUMP(S) CONTROL
2
4
68A
C
PUMP START
E
0
PUMP START
PUMP ALARM
2
4
PUMP ALARM
PUMP WARNING
PUMP WARNING
68A
PUMP RUN
PUMP RUN
C
E
EXAMPLE
BU
CAN
SYSTEM / USER
PC
EWM0108
PUMP START
PUMP RUN
ALARM COLLECTIVE
TRIP COLLECTIVE
94-EWM0002
N2 VLV
PUMP START
0 VOLTS
RD
VAT VLV SWITCH DETAIL
N2 VALVE LINK TO PUMP ON
PUMP START
COM
PUMP RUN
PUMP RUN
NC
NO
PUMP ALARM
PUMP ALARM
VARIABLE TABLE/VAT CAN PCB
RD
PUMP START
PUMP START
RD BU
BU
EWM0102
JP7
JOIN AND SLEEVE WITH
IN CONNECTOR SHELL
ROUGH VALVE SWITCH INPUT
RD
PUMP RUN
PUMP RUN
BK
BN
BU
PUMP ALARM
PUMP ALARM
ALCATEL DRY PUMPS
10
94-EWM0002
RD
11
BU
BU
14
15
21
20
22
RD
35
BU
36
47
48
49
50
RD
BU
GN
YE
RD
BU
GN
YE
0V
O/P
I/P
SIGN98R.S.P.
22
14
20
10
21
1
8
9
EMC BOND
TOTAL CABLE LENGTH
TERMINATION LENGTH
EDWARDS iM / iQ CONT
BK
CABLE PART #
025
OIPT CABLE# FITTED ONCE AT
MID-POINT OF CABLE
TERMINATION LENGTH
OIPT CABLE #
NOTE:
1. USE OPT/WI/4 AND OPT/WI/23.
2. WIRES TERMINATED AT PC00S26866 TO BE SLEEVED
AT EQUIPMENT IF NOT USED, ALL UNUSED WIRES TO BE REMOVED.
3. = CABLE FITTED AT ALL TIMES.
4. = CABLE FITTED OPTION.
5. = CABLE / ASSEMBLY WIRED TO W/O OPTION
6. UNLESS STATED ALL CONNECTIONS ARE TO PC00S26866
7. ETHERNET WIRING AND CANBUS REF DRG # SE81A26868 SHEET 3
8.
94-EWM0108
EMC BOND
SYSTEM FIT OPTION
EDWARDS iQ CONT
EDWARDS IL70/IH80/IH600EDWARDS QDP
40/80 Q SERIES 2
RD
94-EWM0008
R.S.P.
RD
RD
BU
BU
GN
YE
YEWH
YE/RD
BK
BK
COM 1
COM 2
NC 2
JP4
NC 1
NO 1
NO 2
GN
WH
CHAMBER FORELINE VENT CABLE & CONNECTOR TO REMAIN
WITHIN CONFINES OF MOUNTING PLATE
RD N/C
BK
N/ORD
GY
94-EWM8002
HOIST CONTROLLED
INTERLOCKS - ENDPOINT(S)
LN2 C/O
JOIN AND SLEEVE WITH
IN CONNECTOR SHELL
GLAND
IDAC
SPARE
BU
0V
POWER BOX
PUMPDOWN
HEATER
CONT'
REAR SERVICE PANEL
CONNECTOR POSITIONNOT SUBJECT TO
CHANGE
24V>
BU
415 VAC USE EFM1402
208 VAC USE EFM1502
IF USED WITH PUMPDOWN
HEATER CONT' CB11 = 4AMP
BU
RD
BK
94-EWM0603
RD
TURBO HEATER COLLAR
BN
415 VAC NEUTRAL BUSBAR
208 VAC TWIN CB
BN
GN/YE
BU
BU
*
CHILLER
*
BU
*
LN2 VALVE
HOIST CONT' I/L
ENDPOINT
BN
BU
GASPOD
PUMPI/O
TP
12
LINK 14 DETAIL
CABLE SUPPLIED
GN/YE
TURBO HEATER
COLLAR
EARTH BUSBAR
RD
REF:DIAGRAM SE91A19752 FOR AC VOLTAGE WIRING
ACT 600
BN
BU
AB
LK 14
94-EWM0002
BN
FORLINE TRAP HEATER
BU
RD
BU
R.S.P.
FOR OPTIONAL
AUXILLARY CONTACTOR
2
RD
RD
BU
RD
94-EWM8002
SERVICE PANEL
BU
5
94-EWM8002
94-EWM0120
A1
LN2 VALVE
NOTE:
EBARA DRY PUMP
CHAMBER OR LOADLOCK
REF:DRG # 94-SE91D29072
LN2 VALVE
GLAND ON THE
BU
RD
3
14
CONNECTOR SUPPLIED
K2 TO SUPPLY MAINS TO PUMP.
THE PUMP CONTROL "START" BUTTON
IS PRESSED TO TURN ON PUMP
13
K7
EQUIPMENT
D1 FITTED INSIDE CONNECTOR
PIN2
PUMP START
ETHERNET
1
A2
PIN1
6
4
DP START NO
OG
BK
DP START COM
DP READY
+24V
+24V
+24V
+24V
0V
0V
RD
BU
0V
0V
GN
YE
WH
BK
DP SIGNAL 2
DP SIGNAL 4
DP SIGNAL 3
BN
VT
OG
PK
GN/YE
PK
TQ
GY
RD/BU
GN/RD
NOTE:
GN & YE = DRY PUMP READY/RUNNING
BK & BN = DRY PUMP SIGNAL 2
OG & PK = DRY PUMP SIGNAL 3
GY & RD/BU = DRY PUMP SIGNAL 4
LINK
BK
YE
RD
GN
BU
OG
VT
WH94-EWM0008
94-EWM0012
YE
RD
RD
RD
BU
BU
GN
GN
YE
YE
BU
WH
WH
BK
BN
BN
GY
OG
WH
OG
RD
RD
RD
BU
BU
GN
GN
RD/BU
PK
YE
YE
WH
WH
GN
BUBK
BN
VT
OG
GN
OG
GY
YE
MODIFIED 'N' TYPE
94-MA00D21316
94-EWC0393
70cm TO 72cm
94-EWC0393
PECVD LF GEN : REFERENCE DRG # SE00C25489
3 MTR
'N' TYPE
94-EPC0005C
94-EPC0009C94-EPC1002
RF COAX
BULKHEAD
CONNECTION
EXTERNAL RF CONNECTION BULKHEAD TO AMU
INTERNAL RF CONNECTION BULKHEAD TO RF GENERATOR
'N' TYPE
94-EPC0005C
ICP180 3K0 RF GEN
0.9-1.0 MTR - DRESSLER 133/136 RF GEN
BNC/PL
94-CA91D100
RFX600A
DRESSLER 133/136
CEX OUT
1.0 MTR
94-EWC0067
94-EWC0067
BK
94-EWC0067
RFX600A
DRESSLER 133/136
CEX IN
BN
94-EWC0076
RFX600A
CEX IN
BNC/PL
3.7-3.8 MTR - DRESSLER 133/136 RF GEN
PECVD
0.7 - 0.8 MTR - ALL TYPES RF GEN
EPC1002
94-EPC0716C
1.0 - 1.1 MTR - NON DRESSLER RF GEN
94-EPC0716C
94-EWM0108
94-EPC0716C
94-EPC0717C
94-EPC0717C
INTERNAL EXTERNAL
94-EPC0717C
60cm TO 61cm
ICP 65 (USE ICP180 1K2 COAX DETAIL)
ICP180 1K2 RF GEN
94-EPC0716C
94-EWC039394-EPC0717C
94-EWM0104
BNC/SMA FOR ICP 180
RIE
94-EWC0393
SMA
USE APPROPRIATE COAX CONNECTOR SUITABLE FOR RF GENERATOR / AMU
BNCRFG3001
CEX OUT
1.3 - 1.4 MTR - NON DRESSLER RF GEN
RF COAX
BULKHEAD
CONNECTION
94-EPC0719
EXTERNAL RF CONNECTION BULKHEAD TO AMU
INTERNAL RF CONNECTION BULKHEAD TO RF GENERATOR
180cm TO 181cm
ICP380
R.S.P.
YE
S/P 0V
RD
R.S.P.
I/P +V
S/P +V
I/P 0V
MODIFIED 'N' TYPE
94-MA00D2131694-EWC0393
BU
42cm TO 43cm
94-EWC0393
'N' TYPE
94-EPC0005CHN MALE
94-EPC1001
94-EPC0009C
WH
GN
94-EPC1002
CHILLER(S)
S/P +V
I/P +V
RF COAX
BULKHEAD
CONNECTION
EXTERNAL RF CONNECTION BULKHEAD TO AMU
INTERNAL RF CONNECTION BULKHEAD TO RF GENERATOR
I/P 0V
S/P 0V
READY
RD
BU
94-EWM0112
GN
YE
WH
GN
RD
BU
GN
RD
BU
RD
YE
BU
GN
YE
YE
WH WH
BK BK
BN BN
VT
VT
OG
OG
ENDPOINT(S)
JOIN AND SLEEVE WITH
IN CONNECTOR SHELL
RD
BU
3.5 mtr
EDWARDS IL70/IH80/IH600
0 VDC
BK
+ 24VDC
CAN G
BK
CAN L
VT/0.5mm
94-EWM0108
YE
94-EXP7242
BU
ALL VERITY ENDPOINTS
shield
CAN L
shield
CAN H
RD
GN
WH
RD
GN
WH
BU
TERM
CAN G
YE
0 VDC
CAN L
CAN H
+ 24VDC
TERM
CAN G
LOADLOCK CAN VAT VALVE/VAR HEIGHT CAN OR CAN A
X3 PIN 1 LINKED TO PIN 2
OF HIGHEST NUMBERED
CAN FITTED TO SYSTEM
X3 PIN 1 LINKED TO PIN 2
OF HIGHEST NUMBERED
CAN FITTED TO SYSTEM
GN/YE 0.5mm
GN/YE 0.5mmGN/YE 0.5mm
H
94-EWM8022 94-EWM8022
GL
G
COVER : ESR1731
BN(WH)
BU
MOUNTED TO PANEL ON THE REAR OF SYSTEM
EXZ0060/EXZ0062
ON
USE EFB2011 TO COVER
THERMAL SNAP SWITCH
H
OFF
ICP SPACER
L
STRESS RELEIF
ATTACH SCREEN
(BU)WH
415V SYS
NEUTRAL BUS BAR
FIT AC WARNING LABEL
INSIDE POWER BOX
(EWZ0005)
FIT WARNING LABEL
BU
BN
IF REQUIRED USE T/C PL & SKT TO EXTEND
BU(WH)
EWM0603
CHAMBER FIRERODS / 133 LOADLOCK
(BU)WH
(BN)GN
1 POLE CB/415V SYS
2 POLE CB/208V SYS +
SLEEVE BLUE WIRE
BLACK HEATSHRINK
BN
FIT TEMPERATURE SENSOR USING M5 MOUNTING HOLE
NEXT TO THERMAL SNAP SWITCH-EST0001C
M5 CAP HEAD SCREW & PLAIN WASHER TO BE USED ON ASSEMBLY
FIT AC WARNING LABEL ON THE
SOLID STATE RELAY COVER
EARTH BUS BAR
BN
(EWZ0005)
BU
FIT WARNING LABEL
94-EWM8022
94-EWM0208
GY
(BN)GN
GY
GY
GY
GY
FIT AC WARNING LABEL ON THE
SOLID STATE RELAY COVER
BU
GY
GY
GY
GN-YE
GN-YE
RD
94-EXZ0250 = CONTROLLER
BU
GN
EWM0002
94-EXZ0260 = COVER
FOR EARTH USE SUITABLE
POSITION ON PANEL
YE
WH
BK
BU
PUMPDOWN PIPE
+24V VIA IN'LOCK
+24V
+15V
-15V
0V
0V
GASPOD COMMS & POWER
RD
BN
94-EWM8107
BU
BN
BN
WH
YE
RD
SENSOR
GN
BU
RD
1.
BN
FIT AC WARNING LABEL
94-EXZ0250 = CONTROLLER
PTFE
BN
415V SYS
NEUTRAL BUS BAR
1 POLE CB/415V SYS
2 POLE CB/208V SYS +
SLEEVE BLUE WIRE
BLACK HEATSHRINK
BN
WH
BU
CB9/6A = 133 LOADLOCK
BK/PAIRED WH
BK/PAIRED GN
EWM0603
0v
GN
TAPE
OG
94-EWM0002
GN-YE
+24v
GN-YE
YE
BN
94-EXZ0260 = COVER
BK/PAIRED YE
BK/PAIRED GN
REF:94-SE91D27463
BU
HEATER MAT
CAN_L
CAN_H
FOR EARTH USE SUITABLE
POSITION ON PANEL
CAN_GND
BK/PAIRED RD
RD
0v
BK/PAIRED YE
LOADLOCK CAN PCB INTERFACE WIRING
BU
BK/PAIRED RD
+24 VDC
0 VDC
EWM0002
BK/PAIRED WH
+24V VIA IN'LOCK
BU
RD
BU
RD
OG
94-EQT0350
+15V
0V
-15V
+24V
0V
BK
RD
BU
+24v
4mm DIA YE
RING CRIMP5mm DIA YE
RING CRIMP
YE
GN
DIG IN
-15v
BK/PAIRED BN
LD-250 SOFIE ENDPOINT
CONTROL UNIT
MOTOR AUX
GN/YE 4mm
CAMERA MAINS
SIGNAL IN
4.5 MTR
WH
V out
ANA IN
0v
+15v
94-EWM8002
VAC
STAT
CAN H
CAN G
CAN L
BK/PAIRED BN
SIGNAL
INTERLOCK
SUPPLY
RDRD
BU
HEATER CONTROLLERS
BU
BUBU
BUBU
SYSTEM PC
94-EXP0800
94-EPC0007
GN GN
YE
SUPPLIED
SUPPLIED
SUPPLIED
YE
WH
LD-250 & LEM- G50 ENDPOINT FITTED ENSURE THAT
INTERNAL WIRING SHOWN IN BOX
HOIST CONTROLLED INTERLOCKS - ENDPOINT(S)
ARE FITTED
WH
BK BK
SYSTEM EARTH STUD
BN
BN
RD
GASPOD EARTH STUD
R.S.P.
PUMP3 START O/P
PUMP3 RUNNING I/P
INNER CORE
OUTER/SCREEN
CORE
PUMP3 FAIL I/P
0 VDC
TERM
0 VDC
L/L TURBO ON O/P
L/L TURBO AT SPEED I/P
TERM
CAN G
LOADLOCK CAN PCB
CAN L
RD
CAN H
shield
CAN H
RD
BU/0.5mm
shield
RD
0 VDC
+ 24VDC
BK
SOFIE CONTROLLER
LD-250 SOFIE ENDPOINT
INTERNALLY MOUNTED UNIT
RD/0.5mm
BU/0.5mm
JOIN & SLEEVE
INNER CORE
OUTER/SCREEN
INNER CORE
OUTER/SCREEN
CORE
WHEN W/O LD-250 SOFIE ENDPOINT BASE BUILD
JP34 DISCONNECTED AND LABLE - JP34 N/U
GN
BU
YE
RD
HAAKE/LAUDA
94-EWC0076
94-EWC0076
3.5 mtr
A1
A2
E1
E2
E3
E4
E5
E6
SUPPLIED
RD
RD
BU
BU
OMRON - K3MA-J
D6F
WH
WH
GN
GN
YE
LINK
BN
BU
BK
YE
PK
PK
RD
BU
GN
YE
YE
GN
+24V
0V
94-EWM0008
WH
WH
BK
BK
94-EWM0008
DILUTE N2 FLOW ALARM
GY
VT
TQ
DRY PUMP ROTATION START NO
DRY PUMP ROTATION START COM
DRY PUMP READY
GN/RD
YE/RD
WH
WH
OG
BK
0 VOLTS
0 VOLTSWH
RD
BU
GN
WH
0 VOLTS
0 VOLTS
LEAVE AND SLEEVE
PUMP START
PUMP START
PUMP RUN
JOIN AND SLEEVE WITHIN
CONNECTOR SHELL
DRY PUMP SIGNAL 4
TRIP-DRY PUMP SIGNAL 2
ALARM-DRY PUMP SIGNAL 3
DILUTE N2
FLOW ALARM
RL1
EBARA
BK1 BK1
BK2BK2
BK3 BK3
GN/YE GN/YE
94-EWM5004
P1
P2
P3
EARTH
MAINS SUPPLY VIA
CUSTOMER OUTLET
BK1 BK1
BK2BK2
BK3 BK3
GN/YE GN/YE
94-EWM5004
P1
P2
P3
EARTH
MAINS SUPPLY VIA
CUSTOMER OUTLET
BLK15
TEMPERATURE SENSOR - THERMO COUPLE - WATER CIRCUIT - RIE
WH
94-EWZ0005
SENSER SUPPLY
BU
BU
RDRD
94-EWM0102
SENSER SIGNAL
+
-+
-94-EXZ0060
SP
AN
ZE
RO
+
-
T/C mV SENSOR
CONNECT TO THERMOCOUPLE
PART # 94-EXZ0061 FITTED ON
SYSTEM WATER OUT
MOUNTED TO R.S.P. NEXT SYSTEM - WATER IN / OUT
MOUNTED TO LOWER ELECTRODE - SCREENING BOX.CONNECT TO THERMOCOUPLE
FITTED TO ELECTRODE
SENSER SIGNAL
T/C mV SENSOR
-
94-EWM0102
+
94-EXZ0065
RD
ZE
RO
-
SP
AN
-
++94-EWZ0005
94-EXP9350
SHORT AS POSSIBLE & REPAIR
RD
BU
BU
WH
SENSER SUPPLY
GN
TEMPERATURE SENSOR - THERMO COUPLE - ELECTRODE - PECVD
94-EXP9350
GN
PC91S27461
PC00S26866
LOADLOCK FORELINE TRAP HEATER
CHAMBER FORELINE TRAP HEATER
BU
RD
SHORT AS POSSIBLE & REPAIR
REFERENCE:
DRG. # SE91C29730
NOTE:208V SYSTEM - SLEEVE BLUE WIRE WITH BLACK HEATSHRINK
'N' TYPE
94-EPC0009C
'N' TYPE
94-EPC0005C
'N' TYPE
94-EPC0005C
MODIFIED 'N' TYPE
94-MA00D21316
'N' TYPE
94-EPC0005C
'N' TYPE
94-EPC0005C
PURGE SWITCH ASSEMBLY
94-EWM0108
NOTE:
DIODE FOR VALVE FITTED ON PCB
PUMP PURGE VALVE
RD
RD
WH
WH
BK
BK
94-G/VAC/PMP/652
94-G/VAC/PMP/650
94-G/VAC/PMP/651
94-MA00A30505 - STD
94-MA00A30506 - HALOGEN
ALD =2.0 MTR - DRESSLER 133/136 RF GEN
NOTE:TEST MAY REQUIRE A CUSTOM LENGHT OF ANY RF COAX, DUE TO PROCESS REQUIREMENTS
4.5 MTR
STANDARD PLC SYSTEMS
CPU-PLC1
CAN G
CAN L
VT/0.5mm
X3 PIN 1 LINKED TO PIN 2
OF HIGHEST NUMBERED
CAN FITTED TO SYSTEM
GN/YE 0.5mm
GN/YE 0.5mm
TERM
TERM
CAN G
CAN L
CAN H
shield
CAN H
BU/0.5mm 0 VDC
+ 24VDC
shield
CAN G
CAN L
VT/0.5mm
LOADLOCK CAN VAT VALVE/VAR HEIGHT CAN OR CAN A
X3 PIN 1 LINKED TO PIN 2
OF HIGHEST NUMBERED
CAN FITTED TO SYSTEM
GN/YE 0.5mm
GN/YE 0.5mm
94-EWM8022
TERM
TERM
CAN G
CAN L
CAN H
shield
CAN H
BU/0.5mm
shield
0 VDC
+ 24VDC
FITS INTO
BASE
2/CPU
94-EXP7242
H
GL
G
ON
H
OFF
L
STRESS RELEIF
ATTACH SCREEN
ALD PLC 1
CPU-PLC1
94-EWM8022
ALD PLC 2
COMMS - STANDARD SYSTEMS
STANDARDALD
CAN_H
CAN_L
SHLD
CAN T
GN/YE 0.5mm
94-EXP2704
B&R #=IFF1
94-EWM8022
LD-250
VOUT
SUPPLIED
RD
BU
INTERLOCK
SIGNAL
SYSTEM PC
94-EXP0800
94-EPC0007
DIG IN
DIGITOOL ENDPOINT
CONTROL UNIT
MOTOR AUX CAMERA MAINS
SIGNAL IN V out
ANA IN
SUPPLIED
INNER CORE
OUTER/SCREEN
CORE
SUPPLIED DC
POWER UNIT
POWER BOX
94-EFM1402
LEM-G50
ENDPOINT
HOIST CONT INTERLOCK
PLG 9W DG
PLG 9W DG
BK
BN
GY
PUMP ALARM
PUMP ALARM
PUMP WARNING
PUMP WARNING
PUMP RUN
PUMP RUN
PUMP START
PUMP START
YE
RD/BU
GN
RD
BU
NOTE:JP51-YE & BK MAY REQUIRE REMOVEL/LEAVE & SLEEVE
FOR INTERLOCK ON E-CHUCK-SE91B30903
EXTERNAL
CHILLER CONTROLJULABO FP88
HL/FP51 SERIES
ELECTRONICS MODULE
No. 8 900 100
RD
YE
BU
GN
LINK
BETTATECH CU500
RD
YE
BU
GN I/P 0V
I/P +V
S/P 0V
S/P +V
NESLAB RTE-7
RD
YE
GN
BU
I/P +V
0V
S/P +V
FITTED FOR VAT PM-5
REF:SHEET 1/2 VAT 612
4
3
2
1BN
BU
EWM0603
GN/RD
YE/RD
GN/RD
YE/RD
GN/RD
YE/RD
GN/RD
YE/RD
GN/RD
YE/RD
NOTE:
WHEN TWO WIRES ARE
INSERTED INTO ONE TERMINAL
OF ITEM 94-EXD3604.
USE 94-G-EPA3620
YE
WH
GN
BELDEN
LAPP YE WH GN
WH/OG BU/WH OG/WH
94-EWM8022 - SUPPLIER VARIATIONS
YE
WH
GN
YE
WH
GN
WH
GN
YE
YE
WH
GN
YE
WH
GN
YE
WH
GN
WH
GN
YE
WH
GN
YE
YE
WH
GN
WH
GN
YE
WH
GN
YE
WH
GN
YE
YE
WH
GN
94-EWM8022 - SUPPLIER VARIATIONS
BELDEN
LAPP YE WH GN
WH/OG BU/WH OG/WH
94-EWM8022 - SUPPLIER VARIATIONS
BELDEN
LAPP YE WH GN
WH/OG BU/WH OG/WH
94-G-VAC-PMP-653
YE
WH
GN
BU/0.5mm
REQUIRED WHEN SYSTEM
NOT W/O FROM DRY PUMP.
LOOMED JP47 TO REMAIN,
MARKED N/U.
3 MTR
94-EWM0008
OVER - HANGING LOADLOCK / SERVICE PANEL INTERFACE
94-G-EPS6000
SERVICE PANEL
RD
BU
GN
YE
WH
BK
RD
BU
GN
YE
WH
BK
1A0
PLASMA TECHNOLOGYANGLE
X.XX
X.X
X
Issue Date ECN Modification DrawnZone
2345
A
B
C
D
KLW DEB 25/05/05
PC2003 100 SYSTEM
INTERFACE WIRING
ES27512
2 OF 218
1:1
mm
EWM0603
BN
BU
BN
BU
BN
EWM0603
BU
BN
BN
BU
EWM0603
TAPESLEEVE
STICK TAPE ONTO PUMPDOWN PIPE
2. PUT THE SENSOR ONTO THE TAPE
3. ENSURE SENSOR WIRE NOT TOUCHING
PUMPDOWN PIPEWORK
4. STICK TAPE ONTO SENSOR
5. ENSURE PTFE FULLY ENCLOSE TEMP,
SENSOR WIRES UNDER HEATER MAT
NOTES.
HEATER MAT
PL
94-EPP7003
1
2
GDN
SKT
94-EPS7003
1
2
GDN
12T/C-
1L
EQT0002
BU
BN
5+
6-
11T/C+
2N
ESR1732
Solid State Relay
1
23
4
+
-
ac
ac
90 deg C
EST0001C
1
2
COVER : ESR1731
BN(WH)
MOUNTED TO PANEL ON THE REAR OF SYSTEM
EXZ0060/EXZ0062
USE EFB2011 TO COVER
THERMAL SNAP SWITCH
(BU)WH
FIT AC WARNING LABEL
(EWZ0005)
FIT WARNING LABEL
BU
BN
IF REQUIRED USE T/C PL & SKT TO EXTEND
BU(WH)
(BN)GN
FIT AC WARNING LABEL ON THE
SOLID STATE RELAY COVER
94-EXZ0250 = CONTROLLER
94-EXZ0260 = COVER
FOR EARTH USE SUITABLE
POSITION ON PANEL
PUMPDOWN PIPE
SENSOR
1.PTFE
TAPE
HEATER MAT
BU
EWM0002
RD
BU
RD
BN
BU
BN
BU
BN
EWM0603
BU
BN
BN
BU
EWM0603
TAPESLEEVE
STICK TAPE ONTO PUMPDOWN PIPE
2. PUT THE SENSOR ONTO THE TAPE
3. ENSURE SENSOR WIRE NOT TOUCHING
PUMPDOWN PIPEWORK
4. STICK TAPE ONTO SENSOR
5. ENSURE PTFE FULLY ENCLOSE TEMP,
SENSOR WIRES UNDER HEATER MAT
NOTES.
HEATER MAT
PL
94-EPP7003
1
2
GDN
SKT
94-EPS7003
1
2
GDN
EWM0603
27
26
25
24
N2 PURGESTAND
N2 PURGESTART
VT
122P/ADS602, A300H
PUMPFAIL
PUMP
RUN
PUMP TEMPALERT
PUMP I/O
PLG 37W DG
19
37
18
36
17
35
16
34
15
33
14
32
13
31
12
30
11
29
10
28
9
27
8
26
7
25
6
24
5
23
4
22
3
21
2
20
1
00
DRY PUMP (NON-ALCATEL)
DRY PUMP (ALCATEL)
RD
BU
GN
YE
WH
BK
BN
VT
GY
GY
94-CA38484V02
+12V
0 VOLTS
PUMPSTART
16 13/01/10 28409 N2 PURGE ADDED TO ALCATEL PUMPS. 122P & A300H CTL UNIFIED 2 - 3A P.J.M J.B.W
GY
RD/BU
OG
PK
JOIN AND SLEEVE WITH
IN CONNECTOR SHELL
GN/RD
YE/RD
TC PL
94-EXZ0062
+
-
VT1/2
94-EPP7003
L
N
E
TC SKT
94-EXZ0060
+
-
VT3/4/5
94-EPP7003
L
N
E
1L
11T/C+
94-EXD3604
4W terrm
12T/C-
2N
VT1/2
94-EPS7003
L
N
E
5+
CB11/4A
6-
ESR1732
Solid State Relay
1
23
4
+
-
ac
ac
VT3/4/5
94-EPS7003
L
N
E
BU/1.0mm/06
BN
COVER : ESR1731
BU
MOUNTED TO PANEL ON THE REAR OF SYSTEM
BU/1.0mm/06
FORELINE HEATING
(BU)WH
BN
380V SYS
NEUTRAL BUS BAR
BN/1.0mm/05
FIT AC WARNING LABEL
94-EWZ0005
(BN)GN1 POLE CB/380 V SYS
2 POLE CB/208V SYS +
SLEEVE BLUE WIRE
BLACK HEATSHRINK
BN
EWM0603
FIT AC WARNING LABEL ON THE
SOLID STATE RELAY COVER
EARTH BUS BAR
BN/1.0mm/04BN/1.0mm/04
1 POLE CB/380 V SYS
2 POLE CB/208V SYS +
SLEEVE BLUE WIRE
BLACK HEATSHRINK
GN-YE
94-EXZ0250 = CONTROLLER
94-EXZ0260 = COVER
FOR EARTH USE
SUITABLE POSITION
ON PANEL
EWM00302
BUBN
EWM0002
BU
RD
BU
RD
BU
BU
(BN)GN
BU
(BU)WH
BU
BU SUPPLIED
SUPPLIED
(BN)GN
(BU)WH
SUPPLIED
BN
TIE & TIDY NOT USED
THERMOCOUPLE
TIE & TIDY NOT USED
THERMOCOUPLE
SUPPLIED
BN
SUPPLIED
VT1 VT2
VT4VT3
BN
BN/1.0mm/05
TURBO ELBOW
VT5
FORELINE
ELBOW
FLEXI
BN
BU
TURBO TEE
EWM00302
SUPPLIED
R.S.P. ELBOW
BN
BU
GN-YE
BN/1.0mm
BN
BN
BU
BU/1.0mm
BU
1
2
3
4
HEATERS SUBJECT
TO W/O CHANGE
HEATERS SUBJECT
TO W/O CHANGE
TC PL2
94-EXZ0062
+
-
EXTERNAL HEAT
RSP SKT
A
B
C
D
TC PL2
94-EXZ0062
+
-
TC SKT2
94-EPZ0202
+
-
EXTERNAL HEAT
FREE PLUG
A
B
C
D
BN
BUBU
BN
EXTERNAL FLEXI
(BN)GN
(BU)WH
(BN)GN
(BU)WH
(BN)GN
(BU)WH
EWZ0005
EWM0302
SUPPLIED
SUPPLIED
OPTIONAL CONNECTION
TO TC SKT 1
BN
BNBU
BU
OPTIONAL FLEXI
94-EXZ0062
+
-
TC PL3
94-EXZ0062
+
-
TC SKT3
94-EPZ0202
+
-
FLEXI
VT2B
(BN)GN
(BU)WH
(BN)GN
(BU)WH
(BN)GN
(BU)WH
94-EWZ0005
OPTIONAL CONNECTION
TO TC SKT 1
OPTIONAL FLEXI
REG+E+PROG
CIRDIN_6-P SOLDER VIEW
1
2
3
5
6
4
FCW2500
RDYE
BU
GN
94-G-EPS6000
17 02/02/10 29413 LF5 GEN PIN F EDWARDS PUMPS SIGNALS JULABO FCW2500 ADDED JRM JBW
18 19/02/10 29544 PAGE 1 - ADD 330 OHM RESISTORS TO WATER FLOW SWITCH 2B JRM JBW
5
5
4
4
3
3
2
2
1
1
D D
C C
B B
A A
SIGN33SIGN34
SIGN11
SIGN31
SIGN12
SIGN30
SIGN17
SIGN12
SIGN17
SIGN[1..34]
SIGN2
SIGN22
SIGN18SIGN4
SIGN1
SIGN11
SIGN14
SIGN25
SIGN34
SIGN26
SIGN27
SIGN28
SIGN29
SIGN33
SIGN15
SIGN15
SIGN16
SIGN16
SIGN32
SIGN31
SIGN17SIGN18
SIGN23
SIGN19
SIGN13
SIGN20
SIGN30
SIGN24
SIGN21
SIGN32
SIGN22SIGN23
SIGN19
SIGN24SIGN25SIGN26SIGN27SIGN28SIGN29SIGN30
SIGN1SIGN2SIGN3SIGN4SIGN5SIGN6SIGN7SIGN8SIGN9SIGN10SIGN11SIGN12SIGN13SIGN14
SIGN3
SIGN31
SIGN7
SIGN10
SIGN9
SIGN8
SIGN21
SIGN20
SIGN6SIGN5
+24
DIG 0v
DIG 0v
+24
DIG 0v
DIG 0v
DIG 0v
DIG 0v
+24
+24
DIG 0v
+24
DIG 0v
DIG 0v
DIG 0v
DIG 0v
+24
DIG 0v
+24
+24+24
+24
+24
+24
DIG 0v
+24
DIG 0v
+24
+24
DIG 0v
DIG 0v
DIG 0v
+24
Size DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE91C27460 Friday, November 11, 2005
1 1
A2
100 SYS LOADLOCK CAN PCB SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\PDF FILES\100'S\CURRENT_BLUE\LOOMS\BLUE 100\LOADLOCK\LOADLOCK PCB REV0
Thursday, August 11, 2005 KLWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE91C27460 Friday, November 11, 2005
1 1
A2
100 SYS LOADLOCK CAN PCB SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\PDF FILES\100'S\CURRENT_BLUE\LOOMS\BLUE 100\LOADLOCK\LOADLOCK PCB REV0
Thursday, August 11, 2005 KLWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE91C27460 Friday, November 11, 2005
1 1
A2
100 SYS LOADLOCK CAN PCB SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\PDF FILES\100'S\CURRENT_BLUE\LOOMS\BLUE 100\LOADLOCK\LOADLOCK PCB REV0
Thursday, August 11, 2005 KLW
WAFER PRESENT I/P
F/TRAP ENABLE O/P
0v
0v
0v
0v
SOFT ROUGH PUMP O/P
0v
SPARE I/P 1 (I/P 15)SPARE I/P 2 (I/P 16)
PUMP 3 RUNNING I/PPUMP 3 FAIL I/P
MOTOR +
MOTOR +
MOTOR -
MOTOR -
SPARE O/P 1 (0/P 16)
PUMP 3 START O/P
WAFER LIFT UP I/P
WAFER LIFT DOWN I/P
WAFER UNCLAMPED I/P
WAFER CLAMPED I/P
ATMOSPHERE SW
ARM LOAD OPTICARM HOME OPTIC
ARM TO HOME ARM TO LOAD
+24VDC
0v I/P+24v I/P
ATMOSPHERE SW I/P
0v
+24VDC
+24VDC
ROUGH/TURBO (NON GATE VALVE) O/P
LID SW
TURBO BACKING (WITH GATE VALVE) O/P
ROUGH/TURBO (NON GATE VALVE)TURBO BACKING (WITH GATE VALVE)TURBO GATE VALVE
ANODE LOADCATHODE LOADCOLLECTOR LOAD
ANODE HOMECATHODE HOMECOLLECTOR HOMEEMITER
EMITER
SLIT VALVE OPENSLIT VALVE CLOSE
0v
0v
LOAD
HOME
0v
PUMP 3 START
WAFER CLAMP/UNCLAMPWAFER LIFT UP/DOWN
+24VDC
I = ARM AT LOAD0 = ARM NOT AT LOAD
SLIT VALVE OPENSLIT VALVE CLOSED
[LK19 NOT FITTED]PC00S26866 JP52 (+24v) >
SLIT VALVE PIN 7SLIT VALVE PIN 1
SLIT VALVE PIN 3
SLIT VALVE PIN 4
SLIT VALVE PIN 2SLIT VALVE PIN 8
L/L TURBO ON O/P< SPARE INTERLOCK 1 I/P
01 ---- FIRST ISSUE : REFERANCE W/O 814727
WAFER LIFT UPWAFER LIFT DOWN
WAFER CLAMPEDWAFER UNCLAMPED
+24VDC
TURBO AT SPEED
LOAD ARM AT HOMELOAD ARM AT LOAD
PUMP 3 RUNNINGPUMP 3 FAIL
SLIT VALVE OPEN O/P
SLIT VALVE CLOSE O/P
WAFER CLAMP/UNCLAMP O/P
WAFER LIFT UP/DOWN O/P0v
0v
0v
0v
LID SW COM O/P (+24VDC)LID SW NC I/P
0v
WAFER PRESENT
TURBO AT SPEED I/P
SOFT ROUGH PUMPVENTSOFT VENT
0v
0v O/P
+24VDC
23/07/2004
ARM TO HOMEARM TO LOAD
+24VDC
ARM TO LOAD
+24v O/P
TURBO GATE VALVE O/P
+24VDC
FORELINE TRAP ENABLE
+24v
I = ARM AT HOME
0v O/P+24v O/P
+24VDC
0 = ARM NOT AT HOME
+24v
ARM TO HOME
VENT O/P
0v
SOFT VENT O/P
L/L TURBO ON O/P
0v
0v
0v
0v
SPARE O/P 1 (0/P 16)
SPARE I/P 1 (I/P 15)SPARE I/P 2 (I/P 16)
OPEN CLOSED
SW1
SW2
1 1
3 3
7 7
4 4
2 2
8 8
VAT - SERIES 021SW#
02 30/10/05 REF: ECO17623:MOTOR SIGNALS CORRECTED, SLIT VALVE INTERLOCK CORRECTED.17623
DEB
C10.1uf/63vC10.1uf/63v
R19
10K/0.25W
R19
10K/0.25W
R8
27K/0.25W
R8
27K/0.25W
Q1ETB0450Q1
ETB0450
R3
4K7/0.25W
R3
4K7/0.25W
JP17
ARM OPTIC I/P
JP17
ARM OPTIC I/P
12345678
R13
2K2/0.5W
R13
2K2/0.5W
JP5
PUMPING SMC VLV
JP5
PUMPING SMC VLV
12345678910
JP16
WAFER PRESENT
JP16
WAFER PRESENT
12345
JP13
SPARE I/O
JP13
SPARE I/O
12345
R7
470R/1W
R7
470R/1W
JP7
F/TRAP
JP7
F/TRAP
12
R5
470R/1W
R5
470R/1W
D4
LED
D4
LED
Q7ETB0550Q7ETB0550
R9
27K/0.25W
R9
27K/0.25W
JP9
SLIT VLV SW
JP9
SLIT VLV SW
123456
R16
10K/0.25W
R16
10K/0.25W
JP15
LOADING VALVES
JP15
LOADING VALVES
12345678
R10
27K/0.25W
R10
27K/0.25W
D5
LED
D5
LED
F1
1A
F1
1A
JP2
CAN I/P PWR
JP2
CAN I/P PWR
12
R11
27K/0.25W
R11
27K/0.25W
Q3ETB0450Q3
ETB0450
JP11
F/LINE VENT
JP11
F/LINE VENT
12
JP8
PUMP CONTROL
JP8
PUMP CONTROL
1234567
Q5ETB0450Q5ETB0450
JP4
CAN O/P PWR
JP4
CAN O/P PWR
12
JP6
ATOM SW
JP6
ATOM SW
12345
R14
15K/0.25W
R14
15K/0.25W
JP10
INTERLOCK
JP10
INTERLOCK
12
R4
150R/4W
R4
150R/4W
R17
15K/0.25W
R17
15K/0.25W
R6
470R/1W
R6
470R/1W
Q2ETB0450
Q2ETB0450
JP1
CAN I/P
JP1
CAN I/P
12345678910111213141516
Q6ETB0450
Q6ETB0450
BLK3
MOTOR
BLK3
MOTOR
12
JP14
WAFER SW
JP14
WAFER SW
12345678
D3
LED
D3
LED
Q4ETB0450
Q4ETB0450
R18
2K2/0.25W
R18
2K2/0.25W
R15
2K2/0.25W
R15
2K2/0.25W
BLK2
T/GATE VLV
BLK2
T/GATE VLV
12
JP3
CAN O/P
JP3
CAN O/P
12345678910111213141516
JP18
X3 SUPPLY
JP18
X3 SUPPLY
12
Q8ETB0550Q8ETB0550
BLK1
SUPPLY
BLK1
SUPPLY
1234
D1
1N4004
D1
1N4004
JP12
LID SW
JP12
LID SW
12
+ C222uf/35v
+ C222uf/35v
R12
2K2/0.5W
R12
2K2/0.5W
SKT
A
B
C
D
E
F
H
J
K
L
14SM
C1
2
11SM
C1
2
JP14-100/133
EPM0208C
1
2
3
4
5
6
7
8
F/LINE
94-EPM3102
1
2
JP15-100/133
EPM0208C
1
2
3
4
5
6
7
8
7SM
C1
2
JP9-100/133
SLIT VLV SW
1
2
3
4
5
6
10SM
C1
215
SM
C1
2
20SM
C1
2
PL
A
B
C
D
E
F
H
J
K
L
5
9
4
8
3
7
2
6
1
00
L/L LID u SW
JP5-100/133
EPM0210C
1
2
3
4
5
6
7
8
9
10
SKT WC
94-EPM3204
1
2
3
4
3SM
C1
2
PL WC1
94-EPM3104
1
2
3
4
JP17-100
EPM0208C
1
2
3
4
5
6
7
8
JP12-100
EPM0202C
1
2
9W D PL
PL - SLIT VLV
5
9
4
8
3
7
2
6
1
BLK3-100
1
2
BLK2-100/133
TURBO G/VLV
1
2
9W D SKT
SKT - SLIT VLV
5
9
4
8
3
7
2
6
1
16SM
C
1
2
COLOUR CHART
BK
BU
GN
GY
OG
RD
VT
WH
YE
VIOLET
WHITE
YELLOW
ORANGE
GREEN
BROWN
BLACK
BLUE
GREY
RED
BN
5
9
4
8
3
7
2
6
1
00
21SM
C1
2
8SM
C1
2
MOTOR
A -+
9W D SKT
SKT - SLIT VLV
5
9
4
8
3
7
2
6
1
EMC1
OR
SCREEN CABLE USING P CLIP
OR TO CABLE SHELL
EWT2120C - 3.0mm TO 3.5mm
EWT2122C - 5.0mm TO 5.5mm
EWT2123C - 8.0mm TO 8.5mm
IF A PLASTIC P CLIP IS USED COPPER TAPE
IS REQUIRED TO LINE INSIDE OF CLIP
9SM
C1
2
F/LINE
94-EPM3202
1
2
PK
TQ TURQUOISE
PINK
JP11-100/133
F/LINE VENT
1
2
94-EIQ0055
NOTE:
1. UNLESS STATED OR SUPPLIED ALL PCB / CAN 1 LOADLOCK
WIRE TO BE EXTRACTED FROM MULTI-CORE CABLE.
2. ALL SMC VALVES ARE SUPPLIED WITH CONNECTION CABLES.
133 LOADLOCK - ARM SENSORS CABLBE SUPPLIED.
3. REFERENCE DIAGRAM # SE91A27512 FOR REMAINING INTERFACE WIRING.
LOADLOCK PCB TO INTERFACE PCB AND COMMS.
4. UNLESS STATED - ALL WIRING DETAIL USE FOR 100 & 133 LOADLOCKS.
SHEET 2/2 FOR 133 LOADLOCK MOTOR DRIVEN
94-EIQ0055
A
C E
K
A
C E
K
BU
.
YE
VT
BU
EWM0008
GN
BN
YE
BN
RD
GN
WH
VT
RD
BU
BKBK
100 SYS LOADLOCK SENSER WIRING
10 PIN SEAL
WH
BK
.
AND LOOM IN PTFE SPIRO WRAP
LOADLOCK 100 SYSTEM
INTERNAL WIRING
.
WH
BK
.GN
OG
.
VT
BU
HOME OPTIC
RD
VT
YE
WH
RD
.
OG
10 PIN SEAL
LOAD OPTIC
YE
GN
TOP VIEWLOAD
OPTIC
HOME
OPTIC
EWM0002
COM
RD
BU
N.C.
BU
EWM0002
N.O.
BU
BU
WAFER
CLAMP
RD
RD
WAFER
LIFT
TURBO
BACKING
WITH GATE VLV
SOFT
ROUGH
SOFT
VENT
RD
EWM0004
SLIT VLV
OPEN
SLIT VLV
CLOSE
L/LOCK
VENT
L/LOCK
ROUGH
RD
BK
BK
BK
BK
RD
RD
RD
DIODE FITTED ON PCB
WAFERCLAMP ACTUATOR
TURBO GATE VALVE
EWM8002
RD
RD
BU
BU
PIN1
PIN2
CONNECTOR SUPPLIED
BN
BN
WAFERLIFT ACTUATOR
BU
RF COVER
WAFER LIFT
SENSOR DOWN
EPM0813C
BU
WAFER LIFT
SENSOR UP
WAFER CLAMP
SENSOR UPRD
GN
BU
WAFER CLAMP
SENSOR DOWN
BU
YE
BN
BN
MOUNTED AT CLAMP ACTUATOR (100 ONLY)
BU
BU
GN
RD
YE
EWM0004
BK
RD
BK
RD
BK
RD
7
14
14
20
20
11
11
21
21
BK
RD
BK
RD
BK
RD
BK
RD
BK
RD
8
8
9
9
10
10
3
3
RD
GN
BU
YE
RD
RD
BK
BK
RD
GN
BU
YE
RD
BU
GN
YE
WH
BK
EWM0008
CHECK
GN
EWM0008
YE
RD
BU
GN
YE
WH
BK
YE
RD RD
WHWH
BK BK
ADDITIONAL WIRING FOR
OVER-HANGING LOADLOCK
BUBU
GN
133 MOTOR DRIVEN LOADLOCK USE SHEET 2/2
133 MOTOR DRIVEN LOADLOCK USE SHEET 2/2
BK
RD
BK
RD
RD
RD
BK
BK
USE PTFE WIRE 94-EWS09##INTERNAL WIRING
7
OPERATION
CABLE & CONNECTOR TO REMAIN
WITHIN CONFINDS OF MOUNTING PLATE
RD
N/CBK
N/O
RD
BU
RD
BK
EWM0002
RD
BU
EPM0202C
SERVICE PANEL
94-EPM0909
94-EPM0809
94-EPH1209
94-EPH1209
94-EPH1209
94-EPM0809
94-EPM0809
94-EPH1209
W/LIFT PLW/LIFT SKT
87654321
A
B
C
D
E
F
A3
PLASMA TECHNOLOGYANGLE
X.XX
X.X
X
Issue Date ECN Modification DrawnZone KLW JBW 11/06/2009
100/133 SYSTEM LOADLOCK CAN LOOM SE91D27463
1 OF 210
1:1
mm
6
5
4
3
2
1
WAFER CLAMP ACTUATOR SENSORS (133 ONLY)
BU
BU
BN
BN
BN
BN
BU
BU
ACTUATOR 1
UP
ACTUATOR 2
UP
ACTUATOR 1
DOWN
ACTUATOR 2
DOWN
1
3
4
6
SKT WC PL WC1MOUNTED NEAR CLAMP ACTUATORS (133 ONLY)
EWM0004
GN
YE
BU
RD
94-G-EPM3206 94-G-EPM3306
(100 ONLY)
(100 ONLY)
(133 ONLY)EWM0004
8 12/06/09 27367 RV1 VARISTOR 94-G-ERZ0140 ADDED TO RL3/10K RESISTORS ADDED TO MD123 Plus.
9 09/07/09 28340 ADD EXTRA WAFER CLAMP SWT FOR 133 SYSTEMS + CONVERT TO ACAD 8A JBW PJM
10 04/02/10 28964 REMOVE DETAILS OF WIRING TO PCB. SPACE OTHER ITEMS OUT (SHT1) A4 - D4 RDE JBW
X2
EXP2718
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
10K
JP17
ARM OPTIC I/P
1
2
3
4
5
6
7
8
PL1
94-EPM3104C
1
2
3
4
PL-LLM
94-EPM3112
1
2
3
4
5
6
7
8
9
10
11
12
RV1
94-G-ERZ0140
GUARDMASTER
SW DPST
R18
LINK
ICS1
94-ERZ0064
7 8 9
D4
LED
4K7/0.25W
94-ERB0347C
R19
10K/0.25W
R15
LINK
PL LLSEN
94-EPM3306
1
2
3
4
5
6
JP16-94-PC91S27461
WAFER PRESENT
1
2
3
4
5
SKT-LLM
94-EPM3212
1
2
3
4
5
6
7
8
9
10
11
12
SKT LLSEN
94-EPM3206
1
2
3
4
5
6
D5
LED
BLK1-94-PC91S27461
SUPPLY
1
2
3
4
SKT1
94-EPM3204C
1
2
3
4
R12
LINK
R16
10K/0.25W
10K
EMC1
OR
SCREEN CABLE USING P CLIP
OR TO CABLE SHELL
EWT2120C - 3.0mm TO 3.5mm
EWT2122C - 5.0mm TO 5.5mm
EWT2123C - 8.0mm TO 8.5mm
IF A PLASTIC P CLIP IS USED COPPER TAPE
IS REQUIRED TO LINE INSIDE OF CLIP
123456
R13
LINK
RL3
JP12-94-PC91S27461
LID SW
1
2
BK
BU
GN
GY
OG
RD
VT
WH
YE
VIOLET
WHITE
YELLOW
ORANGE
GREEN
BROWN
BLACK
BLUE
GREY
RED
BN
10K
JP17-94-PC91S27461
EPM0208C
1
2
3
4
5
6
7
8
D1
94-EDA4004C
CB16
SIGN11
SIGN12
DIG 0v
DIG 0v
DIG 0v
+24+24
+24+24 +24+24
94-EWM0002
BU
94-EWM0002
BU
RD
BN
BU
BU
94-G-ESR0010
94-G-ESR0011
BN
21
A2
A1
6
3
11
BU
RD
BU
MDI23Plus
BN
BU
RD
BK
YE/WH
OG/WH
PE/WH
GN
BU/WH
RD
12 RD
21 22BU RD
ENSURE OPERATION
BU 11
RD
YE
GN
BK
WH
BU
BU
GN
YE
WH
BK
RD
94-EWM0008
SLIT/VAT VLV
ARM AT HOME
FAR FROM
CLOSE TO
SLIT/VAT VLV
ARM AT LOAD
BN
BN
BK
BK
BU
BU
- - + + Rdy
LN
DRA240-48x
BN
BU
GN
-YE
94-EWM0302
BN
BU
DC OUTPUT
AC INPUT
94-EXP4805
RD
RD
BU
SUPPLIED
SUPPLIED
RD
BU
94
-EW
M0002
BU
BUBU
BU
BU
RD RD
RD
94-EWM0002
94-EWM0002
94-EWM0302
RD
BU
+24VDC O/P
0VDC O/P
<+24VDC
+24VDC>
+24VDC I/P
0VDC I/P
94-EWM0603
TO NEUTRAL BUSBAR
TO EARTH BUSBAR
BN/2.5mm
GN-YE/2.5mm
BU/2.5mm
240VAC = 94-EFM1404
110VAC = 94-EFM1406
LOAD
HOME
I = ARM AT LOAD
0 = ARM NOT AT LOAD
I = ARM AT HOME
0 = ARM NOT AT HOME
b
b
c
c
e
e
Q7-REMOVE
Q8-REMOVE
LINK
LINK
R14-REMOVE
R17-REMOVE
MOD to 94-PC91S27461
REPLACE WITH LINK - R12, R13, R15, R18.
REMOVE R14, R17, Q7 & Q8.
LINK Q7 BASE TO Q7 EMITTER (D4).
LINK Q8 BASE TO Q8 EMITTER (D5).
94
-EW
M0002
POWER BOX
COVER & MOUNTING KIT:
94-G-MD93B29682
94-G-MD93B29681
0V94-G-EMM0045
REMOVE & SLEEVE
YE/RD-REF SHT 1/2
94-ERB0410 x 3
BK
RD
GN
BU/WH
YE/WH
PE/WH
OG/WH
NOTE:
10K RESISTORS - 94-ERB0410
MUST BE FITTED ON MOTOR.
REF:D.SHERGOLD
SUPPLIED
BN
BK
BU
WAFER TRACKING-133
MOUNTED ON
LOADLOCK
VIEWPORT
LOADLOCK PCB
87654321
A
B
C
D
E
F
A3
PLASMA TECHNOLOGYANGLE
X.XX
X.X
X
Issue Date ECN Modification DrawnZone KLW JBW 11/06/2009
100/133 SYSTEM LOADLOCK CAN LOOM SE91D27463
2 OF 210
1:1
mm
8 12/06/09 27367 RV1 VARISTOR 94-G-ERZ0140 ADDED TO RL3/10K RESISTORS ADDED TO MD123 Plus.
9 09/07/09 28340 ADD EXTRA WAFER CLAMP SWT FOR 133 SYSTEMS + CONVERT TO ACAD 8A JBW PJM
10 04/02/10 28964 REMOVE DETAILS OF WIRING TO PCB. SPACE OTHER ITEMS OUT (SHT1) A4 - D4 RDE JBW
5
5
4
4
3
3
2
2
1
1
D D
C C
B B
A A
SIGN32
SIGN1SIGN29
SIGN3
SIGN34
SIGN5SIGN6
SIGN27
SIGN28
SIGN38
SIGN7SIGN8SIGN9SIGN10SIGN11SIGN12SIGN13SIGN14SIGN15
SIGN13
SIGN20SIGN22SIGN24
SIGN16
SIGN14
SIGN23
SIGN11
SIGN2
SIGN15
SIGN36
SIGN37
SIGN35
SIGN21
SIGN[1..38]
SIGN16
SIGN5
SIGN33
SIGN7
SIGN37
SIGN36
SIGN6SIGN38
SIGN19
SIGN12
SIGN8
SIGN2
SIGN4
SIGN17
SIGN19
SIGN30
SIGN33
SIGN34
SIGN18SIGN19SIGN20
SIGN35
SIGN21
SIGN21
SIGN22SIGN23SIGN24
SIGN9
SIGN33
SIGN25
SIGN10
SIGN3
SIGN26
SIGN1
SIGN27
SIGN25SIGN26
SIGN28
SIGN17
SIGN18
SIGN29SIGN30SIGN31SIGN32
SIGN31
SIGN20
DIG 0v
+24
DIG 0v
DIG 0v
DIG 0v
+24
DIG 0v
+24
+24
+15
+24-15
DIG 0v
DIG 0v
-15
DIG 0v
+15
+24
DIG 0v
+24
DIG 0v
DIG 0v
+15
+15
-15
DIG 0vDIG 0v
+24
+24
Size DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE91D28346 Thursday, June 14, 2007
1 1
A3
VARIABLE TABLE AND VAT CAN SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\PDF FILES\100'S\CURRENT_BLUE\LOOMS\BLUE 100\VAT_VAR\CA
Monday, October 17, 2005 KLWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE91D28346 Thursday, June 14, 2007
1 1
A3
VARIABLE TABLE AND VAT CAN SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\PDF FILES\100'S\CURRENT_BLUE\LOOMS\BLUE 100\VAT_VAR\CA
Monday, October 17, 2005 KLWSize DWG NO Rev
Sheet of
This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology
Drawn on
North End, Yatton,
Bristol BS49 4AP
UK
Last Modified:
Filename:
Rev Date ECO Modification
by
Checked on by
Oxford Instruments
Plasma Technology
Design review No Sign
02SE91D28346 Thursday, June 14, 2007
1 1
A3
VARIABLE TABLE AND VAT CAN SCH
\\UKPTSERVER03\ELECTRICAL DRAWINGS\PDF FILES\100'S\CURRENT_BLUE\LOOMS\BLUE 100\VAT_VAR\CA
Monday, October 17, 2005 KLW
02 30/10/05 REF. ECO17624 - RL5, RL6 ADDED = IMPROVED CONTROL OF VAT PM-5
ZERO ENABLE
<PRESS S/P
<POS S/PPOS R/B >
< LEARN ENA< PRESS/POS ENA
<PRESS S/P<POS S/P
TABLE HEIGHT >
PRESS R/B >
PRES & POS S/P >
PRESS R/B
< DIGITAL VAT COMMON
ZERO ENABLE >
< ZERO ENABLE
0v
+24v
+24v
+24v 0v
+15v
-15v0v
0v+24v
+24v
MODE SELECT PRESS/POS
+24v
LOWER SW
LEARN ENA >
+24v
MODE SELECT LOCAL/REM
DIGITAL VAT COMMON >ANALOGUE VAT COMMON >
UPPER SW
0v
PANEL SW
0v
PRESS S/P
SPARE DIG I/P - 2SPARE DIG I/P - 3SPARE DIG I/P - 4
SPARE DIG I/P - 5SPARE ANA O/P - 1
T/H ON-OFFT/H DIRECTION
T/H SPEED
0v
POS S/P
< DIGITAL VAT COMMON
LOWER SW >
UPPER SW >
POS R/B
<OPEN<CLOSE
OPENCLOSE
PANEL SW >
CM + >
< CM +
LOCAL/REM >
MODE SELECT LEARN
10v DC REF0v
PRESS/POS ENA >
0v
0v
0v
0v 0v
0v
<PRES & POS S/P
0v
0v
SPARE DIG I/P - 1
0v
<10v DC REF
NOTE: RELAY 1. PINS 10, 8 & 7.USED FOR VAT 612
NOTE:RELAY 4.AUTOMATIC ZEROCONTACT CLOSED FOR0.5s MIN.
<LOCAL/REM
TABLE HEIGHT
M/S LEARNM/S LOCAL/REMM/S PRESS/POS
94-PC91S28347 = UNPOPULATED PCB94-MA91Z28468 = B.O.M.
<M/S LEARN
< ZERO ENABLE
<T/H ON-OFF<T/H DIRECTION
<M/S LOCAL/REM
<T/H SPEED
<M/S PRESS/POS
0v
0v
0v
0v
0v
01
0v
DEB
15/07/05 ----- FIRST ISSUE
SPARE ANA O/P - 1
SPARE DIG I/P - 1SPARE DIG I/P - 2SPARE DIG I/P - 3SPARE DIG I/P - 4SPARE DIG I/P - 5
0v
< OPEN< CLOSE
+24v0v
0v
0v+24v
17624
JP9
APC INT'FACE 2
JP9
APC INT'FACE 2
12345678910
JP11
T/HEIGHT
JP11
T/HEIGHT
123
LED5LOCAL
LED5LOCAL
R4
4K7 / 0.25W
R4
4K7 / 0.25W
D6
1N4004
D6
1N4004
LED1
+15V RED
LED1
+15V RED
JP2
CAN O/P
JP2
CAN O/P
123456789
10111213141516
BLK1
SUPPLY IN
BLK1
SUPPLY IN
123456
R6
4K7 / 0.25W
R6
4K7 / 0.25W
R2
1K2 / 0.25W
R2
1K2 / 0.25W
R1
1K2 / 0.25W
R1
1K2 / 0.25W
LED2
-15V YEL
LED2
-15V YEL
LK4LK4
R3
2K0 / 0.25W
R3
2K0 / 0.25W
JP14
PANEL SW TO PWR BOX
JP14
PANEL SW TO PWR BOX
12
-+
RL5
-+
RL5
1
3
567
8
10
12
D5
1N4004
D5
1N4004
JP5
X2
JP5
X2
12
U1REF01U1REF01
OUT 6V+2
V-4
AD
J5
R5
4K7 / 0.25W
R5
4K7 / 0.25W
LK2LK2
LED3
+24V GRN
LED3
+24V GRN
JP6
CM TO VAT
JP6
CM TO VAT
12
R7
100R
R7
100R
D2
1N4004
D2
1N4004
JP1
CAN I/P
JP1
CAN I/P
123456789
10111213141516
D4
1N4004
D4
1N4004
JP13
PANEL SW
JP13
PANEL SW
12
D1
1N4004
D1
1N4004
JP4
X1
JP4
X1
12
-+
RL1
-+
RL1
1
3
567
8
10
12
LK1LK1
JP8
APC INT'FACE 1
JP8
APC INT'FACE 1
123456789101112
-+
RL3
-+
RL3
1
3
567
8
10
12
BLK2
SPARE PWR
BLK2
SPARE PWR
123456
JP7
CM I/P
JP7
CM I/P
12
-+
RL4
-+
RL4
1
3
567
8
10
12
JP15
SPARE IO
JP15
SPARE IO
123456789
10
-+
RL2
-+
RL2
1
3
567
8
10
12
LK3LK3
LED4
PRESS
LED4
PRESS
JP12
650
JP12
650
12345678
JP10
T/LIMIT
JP10
T/LIMIT
1234
-+
RL6
-+
RL6
1
3
567
8
10
12
LED6LEARN
LED6LEARN
JP3
X3
JP3
X3
12
D3
1N4004
D3
1N4004
+
-
U2
OP07+
-
U2
OP073
26
7 14 8