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DEVELOPMENT AND APPLICATION OF HIGH
TEMPERATURE SENSORS AND ELECTONICS
Gary W. Hunter, Ph.D.
NASA Glenn Research Center
Cleveland, OH 44135
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CONTRIBUTORS
NASA GLENN RESEARCH CENTER
Jih-Fen Lei, G. Fralick, L. Martin, G. Behiem, R. Okojie,Phil G. Neudeck
L.Y. Chen, Ohio Aerospace Institute
D. Lukco, Dynacs Corp.
D. J. Spry, D. Androjna, and C. Blaha, Akima Corp/NASA GRC
C. C. Liu, B. Ward, and Q. H. Wu, Case Western Reserve University
P. Dutta, M. Frank, M. Frank, J. Trimbol, M. Fulkerson , Ohio State
University
D. Makel, Makel Engineering Inc.
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OUTLINE
INTRODUCTION
PHYSICAL SENSOR TECHNOLOGYTHIN FILM SENSORS
LEAD WIRES
SiC HIGH TEMPERATURE ELECTRONICS/SENSORSPRESSURE SENSOR
CHEMICAL SENSOR TECHNOLOGY
TIN-OXIDE BASED GAS SENSORSHIGH TEMPERATURE ELECTRONIC NOSE
SUMMARY/COMMON THEMES
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SCOPE OF WORK
CHEMICAL SENSORSSILICON CARBIDE HIGH
TEMPERATURE ELECTRONICSSTRAIN GAGES
MICROELECTROMECHANICAL
SYSTEMS (MEMS)
TEMPERATURE SENSORSHEAT FLUX GAGES
SENSORS & ELECTRONICS TECHNOLOGY BRANCH
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THIN FILM SENSOR TECHNOLOGY
VERY THIN, MINIMALLY INTRUSIVE SENSORS ABLE TO PROVIDE HIGH TEMPERATURE
DATA WITHOUT DISTURBING AIR FLOW
CAN BE FABRICATED DIRECTLY ON CERAMIC AND METAL ENGINE PARTS WITHOUT THE
NEED TO CUT INTO THE PART.
CAN BE APPLIED TO METAL BASED MATERIALS, CERAMIC MATERIALS, AND CERAMIC
MATRIX COMPOSITES.
MULTIFUNTIONAL, INFORMATION RICH SENSORS CURRENTLY UNDER DEVELOPMENT
PdCr THIN FILM GAUGE
APPLIED ON ALLIED-SIGNAL
ENGINES CERAMIC TURBINE
BLADE
1995 R&D 100 Award
THIN FILM
THERMOCOUPLES ON
SPACE SHUTTLE MAIN
ENGINE TURBINE BLADES
HEAT FLUX GAGE ONSILICON NITRIDE PLUG
THIN FILM THERMOCOUPLESON CERMIC MATRIX
COMPOSITE HOOP
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HIGH TEMPERATURE STRAIN SENSOR TECHNOLOGY
PdCr thin film gauge applied on Allied-
Signal Engines ceramic turbine blade
1995 R&D 100 Award1991 R&D 100 Award
PdCr wire strain gauge applied on
Ford Motor Co. exhaust manifold
High temperature strain sensors developed based on a newly developed alloy, PdCr.
Wire gauge operates to 800 C and thin film gauge operates to 1100 C, compared to 400C of the commercially available technologies. Technology transferred to Pratt & Whitney, GEAE, AlliedSignal Engine, Allison,
Ford Motor et al. for advanced materials and engine testing.
Wire strain gauge technology commercialized.
New ceramic gauge materials being explored for higher temperature applications.
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LEAD WIRE CONNECTIONS
SIGNIFICANT PROBLEM
STANDARD APPROACH
CONVOLUTED APPROACH
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Long-lived Convoluted Thermocouples
For Ceramics Temperature Measurements1998 R&D 100 Award
Unique convoluted design and installation technique successfully
provided the needed thermal stress relief
Good adhesion on ceramic based materials such as ceramicmatrix composite
Operating in a hostile environment (1300 C 4560 torrs) for
a long period of time (>20 hrs)
A better, faster, cheaper enabling technology
Commercialized by HiTec Products Inc.
Sensor configuration Burner rig evaluation
Applied to a C/SiC cylinder
Applied to a GEAE IHPTET
SiC/SiC combustor liner
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SiC-BASED MICROSYSTEM BENEFITSOperation in High Temperatures, High Power, High Radiation, andHarsh Environments
Reduced Size, Weight, and Power Consumption- Electronics in HarshEnvironments
Use Si Based Processing Techniques
INTEGRATED SYSTEMS FOR USE IN HARSH ENVIRONMENTS
ELECTRONICSACTUATORS SENSORS
SiC-based electronics and sensors can operate in hostile environments (600 C = 1112 FGLOWING RED HOT!) where conventional silicon-based electronics (limited to 350 C)
cannot function.
SiC-BASED MICROSYSTEMS
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SiC-BASED PRESSURE SENSORS
SiC HAS EXCELLENT MECHANICAL PROPERTIES FORUSE AS A HARSH ENVIRONMENT PRESSURE SENSOR
(T > 500 C, SILICON UNDERGOES PLASTIC DEFORMATION)
STRONG MATERIAL
LARGE PIEZORESISTIVE COEFFICIENTS
FORM DIAPHRAM OF SiC AND INTEGRATE WITH ELECTRONICS
WIDE RANGE OF APPLICATIONS
AERONAUTIC ENGINE APPLICATIONS
AUTOMOTIVE APPLICATIONS
WIND TUNNELS MATERIAL PROCESSING
TWO APPROACHES
SiC DIAPHRAM ON Si
SiC DIAPHRAM ON SiC SiC Pressure Sensor
with Electronics
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HIGH TEMPERATURE SIC PRESSURE SENSORS:
KEY TECHNOLOGIES
Key technolog ies:
SiC micromachining
High temperature contacts
High temperature packaging
SiC pressure sensor, magnified Diagram of SiC pressure sensor
metal contactsTi / TaSi2/ Pt
strain gages
n-type SiC
isolation layerp-type SiC
substrate
n-type SiC
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TECHNOLOGY DEVELOPMENT: SIC MICROMACHINING
SiC is chem ically inert and therefore di f f icul t to m icrom achine
Micromachin ing m ethods for SiC:
Electrochemical etching
- developed by Kulite, early 1990s
Backside of SiC diaphragm fabricated
by electrochemical etching
60 m etch depth; 1 mm diam
Backside of SiC diaphragm fabricated
by DRIE
50 m etch depth; 1 mm diam
Deep reactive ion etching (DRIE)
- developed by GRC, 1999
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TECHNOLOGY DEVELOPMENT: SIC MICROMACHINING
Advantages of DRIE m icrom achining pro cess for SiC:
Provides vertical sidewalls, smooth etched surfaces
Uses a durable and readily applied etch mask (nickel or indium-tin-oxide)
High rate (0.3 m/min); uses automated equipment
DRIE system in GRC cleanroom Hole etched by DRIE through a 100 m thickSiC wafer
The DRIE process f or SiC is an enabl ing technolog y for harsh environment MEMS
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TECHNOLOGY DEVELOPMENT: HIGH TEMPERATURE CONTACTS
A three layer con tact struct ure, t i tanium /tantalum si l ic id e/plat inum , has shownm in imal deg radati on in performance after m ore than 1000 hrs at 600 C
Contact resistance as a function of
time exposed to 600 C. Recently,
1000 hrs at 600 C has been
demonstrated.
Auger depth profile of contact exposed to
600 C for 100 hrs. Following burn-in,
a platinum silicide diffusion barrier is
formed, which protects the underlying
layers from oxidation.
0
5
10
15
20
25
30
35
40
45
50
0 100 200 300 400 500 600 700 800 900 1000
Time (hours)
Averagespec
ificcontactResistivity(10-5
-cm
2)
n-type 6H-SiC n-type 4H-SiC
Measured after treatment at 600oC in Air 100 Hours @600 C/Air
0
10
20
30
40
50
60
70
80
0 50 100 150 200 250 300 350 400 450 500 550 600 650 700
Depth (nm)
AtomicConc.(%)
C O Pt Si Ti Ta
Pt
Si
Ta Ti
C
Si
O
Ti
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TECHNOLOGY DEVELOPMENT:HIGH TEMPERATURE SiC PRESSURE SENSOR PACKAGING
Cross section of SiC pressure sensor package
Hi h T SiC P S E i T
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High Temperature SiC Pressure Sensor: Engine Test
Above: 500 C SiC pressure sensor
Above: data from the engine test is superimposed on
calibration data for the sensor. A 4 mV output shift is
produced upon exposure to the peak temperature.
Further work will aim to decrease sensor drift.
Left: SiC pressure sensor installed in compressor
deswirl region of Honeywell AS907 core engine.
SiC Pressure Sensor Engine Test
100
110
120
130
140
150
160
170
180
0 100 200 300 400 500 600
Temperature (degrees C)
SensorO
utput(mV)
0 psig
300 psig
Power Up
Power Down
Off
IdleFull
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MICROFABRICATED TIN OXIDE BASEDMICROFABRICATED TIN OXIDE BASED
NOx AND CO SENSOR TECHNOLOGYNOx AND CO SENSOR TECHNOLOGYMICROFABRICATED FOR MINIMAL SIZE, WEIGHT AND POWER CONSUMPTION
MICROMACHINED TO MINIMIZE POWER CONSUMPTION AND IMPROVE RESPONSE TIME
TEMPERATURE DETECTOR AND HEATER INCORPORATED INTO SENSOR STRUCTURE
NANOFABRICATION OF TIN-OXIDE TO INCREASE SENSOR STABILITY
STRUCTURE OF A MICROFABRICATED TIN-OXIDE SENSOR
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ALTERNATE PROCESSING YIELDS
IMPROVED SENSOR PROPERTIES
PROPERTIES OF NANOCRYSTALLINE SNO2 THIN FILM FROMSOL-GEL PROCESS
SMALL PARTICLE SIZE
HIGH POROSITY
LARGE SURFACE AREA
HOMOGENEOUS CHEMICAL AND PHYSICAL STRUCTURE
ADVANTAGES FOR SENSOR APPLICATIONS
HIGH SENSITIVITY
FAST RESPONSE
STABLE OPERATION
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Nanocrystalline SnO2 after annealing at 600C for 30 minutes.
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THE RESPONSE OF A DOPED SNO2
SENSOR TO CYCLED CONCENTRATIONS OF NOX
STEPS: 0 TO 3 TO 6 TO 12 TO 25 TO 50 PPM AND BACK TO 0 IN AIR
T= 350C
PACKAGING TAILORED FOR THE
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SnO2 on Interdigitated
Fingers
Temperature Detector
SnO2 SENSORS ON CERAMIC SUBSTRATE
RATHER THAN SILICON FOR ENGINE TESTING
APPLICATION
Makel Engineering, Inc .
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Demonstration Testing Of NOx Sensor In Gas Turbine
Exhaust Stream
0
500
1000
1500
2000
2500
0 20 40 60 80 100 120 14
Time (min)
Sig
nalCounts
sensor off scale high with
no air dillution of exhaust
NOx sensor off scale low asair dillution is adjusted
engine load is
increased
Approximately 540 PPM
NOx (30 PPM measured)
end of test
Oxygen Sensor Signal
(approximately 5%)
Species CEMMeasurement
MSESMeasurement
NOx 593 PPM 540 PPM
CO 3000 PPM N/A
O2 4.57% 5%
Industry Standard
Continuous Emission
Monitoring Equipment
50 Hp Gas Turbine
Makel Engineering, Inc .
GLENNAN MICROSYSTEM INITIATIVE
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SnO2
Resistor
TiO2
Resistor
Metal-SiC
Schottky diodes
Metal-Reactive Insulator
SiC Schottky diodes
Electrochemical Oxygen
Sensor
SelectivelyFiltered
SnO2 Resistors
GLENNAN MICROSYSTEM INITIATIVE
MICROFABRICATED EMISSION SENSOR ARRAY CONCEPT
HIGH TEMPERATURE ELECTRONIC NOSE
SiC-BasedPressure Sensor
Makel Eng ineering , Inc .
B b d I t t d El t i N S t
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Brassboard Integrated Electronic Nose System
High Temperature Nose Requires Packaging BeyondRoom Temperature Systems
Sensor Operating Temperature400 C with +/- 8 C stability in
dynamic environment
Sensors Tested
Oxygen (0 to 21%)
CO (0 to 3000 PPM) Hydrocarbons (0 to 2500 PPM C2H2)
NOx (0 - 300 PPM)
SiC
Hydrocarbon
Sensors FromNASA GRC
SnO2 Sensor
From CWRUPrototype Sensor Head
OSU
Sensor
Electronics and Sensor Head
Makel Eng ineering , Inc .Makel Eng ineering , Inc .
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Harsh Environment Demonstration Testing
1.9 liter, four cylinder HCCI at U.C. Berkeley (propane/air)
0
500
1000
1500
2000
2500
3000
0 5 10 15 20 25 30 35 40
Time (minutes)
Signal(m
V)
Oxygen SensorSnO2 Sensor
SiC Hydrocarbon Sensor
Engine Start
Expected Drop In
O2 Signal
Rise in UnburnedHydrocarbons At Start Up
And Throttle Adjustment
Steady Engine Operation
Engine Turned
Off
Exhaust Gas Temperature = 337 C
Phi= 0.35
O2=14%
NOx
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SUMMARY
RELIABILITY IS A SIGNIFICANT ISSUE IN HIGH TEMPERATURE
SENSORS AND ELECTRONICS
PHYSICAL AND CHEMICAL SENSORS
HIGH TEMPERATURE ELECTRONICS/SENSORS
SENSOR AND ELECTRONICS DEVELOPMENT
TAILOR DEVICE TO APPLICATION/WHOLE SYSTEM APPROACH
MULTILAYER LAYER APPROACHES NECESSARY
NEW MATERIALS DEVELOPMENT
CONNECTIONS WITH FROM DEVICE TO OUTSIDE USER A MAJOR
COMPONENT OF DEVICE RELIABILITY
LEAD WIRES
CONTACTS
PACKAGING
DEMANDS ON RELIABLITY OF INDIVIDUAL COMPONENTS WILLINCREASE WITH THE DEVELOPMENT OF INTEGRATED
MICROSYSTEMS