Download - Dip vacuum
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leyboldOerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013136
General
Vacuum coating
Research and development
Metallurgy/furnaces
Mechanical engineering
Sputtering process
Astrotorus baffle 148
Over-temperature protection switch 150
Contact thermometer 150
Resistance thermometer Pt100 150
Adsorption trap 151
Accessories
Pump
s
DIP 30
00
DIP 80
00
DIP 12
000
DIP 20
000
DIP 50
000
Page
Application
DIP 30
000
For generating an oil-free vacuum with oil sealed backing pumps
Applications and Accessoriesfor Oil Diffusion Pumps
LEYB
OJET
630
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leybold Oerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013 137
For information on oil specifications please refer to Catalog PartOils / Greases / Lubricants LEYBONOL.
LEYBONOL Oils
Oil for Diffusion Pumpsfor different fields of application
LVO 500
LVO 510
LVO 520
= Standard = Possible= Please contact Oerlikon Leybold Vacuum
The table only lists general applications. Your specific requirements might be subject to deeper analysis.For further questions, please contact our technical Sales support.
Appli
catio
n
Metal
lurgy
/furna
ces
Vacu
um co
ating
Rese
arch a
nd de
velop
ment
Sputt
er pro
cess
es
Mech
anica
l eng
ineeri
ng
-
leyboldOerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013138
For information on oil specifications please refer to Catalog PartOils / Greases / Lubricants LEYBONOL.
Oil for Diffusion Pumpsfor different pump types
LVO 500
LVO 510
LVO 520
= Standard = Possible= Please contact Oerlikon Leybold Vacuum
NoteAll oils may be used.The pumps are supplied as standard without oil.
The table only lists general applications. Your specific requirements might be subject to deeper analysis.For further questions, please contact our technical Sales support.
Pums
DIP 30
000
DIP 12
000
DIP 8
000
DIP 3
000
DIP 20
000
LEYB
OJET
630
DIP 50
000
LEYBONOL Oils
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leybold Oerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013 139
Operating Principle of FluidEntrainment Vacuum Pumps
The main components of diffusionpumps, the operation of which relieson vapor-phase pump fluids are:
- Cooled pump body with intake andexhaust ports
- System of nozzles
- Pump boiler
In the case of diffusion pumps a pumpfluid contained in a boiler is heated tosuch an extent that it is vaporized. Thevapor is then forced through nozzleswithin the pump. The nozzles are gen-erally designed in such a way, that theyaccelerate the vapor to a speed ex-ceeding the speed of sound (Lavalnozzles), thus creating a high speedvapor jet. The vapor is then deflectedby the nozzles at a specific angle ontothe pump body. The pump body is
cooled, so that the vaporized pumpfluid condenses and is returned backto the boiler as a liquid. The pumpingaction of diffusion pumps and fluid en-trainment pumps in general is basedon the transporting capacity of thevapor jet.
The gas which is to be pumped iscompressed sufficiently at the fore-vacuum port so that it can be pumpedout by a backing pump.
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leyboldOerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013140
Oil Diffusion Pumps
Compared to other fluid entrainmentpumps the density of the vapor in theboiler and in the vapor jet is fairly low so that the gas molecules may almostcompletely diffuse into the vapor jet.Thus most of the molecules which enterthe vapor jet are also pumped out.
For this reason, the pumping speed ofdiffusion pumps is extremely high withrespect to the intake area and con-stant starting at an inlet pressure ofapprox. 10-3 mbar (0.75 x 10-3 Torr)down to very low pressures as withinthe pressure range the vapor jet is notinfluenced in any way by the pressurewithin the vacuum vessel.
Operating Oil Diffusion Pumps
Forevacuum
In all cases diffusion pumps require asufficiently sized backing pump (seeTechnical Data). The size and type offorevacuum pump depends on theoperating conditions and the quantitiesof gas which are to be pumped.
1. Continuous operation at operatingpressures above 10-4 mbar (0.75 x 10-4 Torr) large quantities of gas.
2. Continuous operation at operatingpressures below 10-4 mbar (0.75 x 10-4 Torr) smallerquantities of gas.
In applications which rely on diffusionpumps, the vacuum chamber mustbe connected via a valve (3) and aroughing line directly to the backingpump. This is done so that the vacuumchamber may be pre-evacuated by thebacking pump down to a pressurewhere the diffusion pump can takeover. Until the high vacuum valve (4)opens, both diffusion pump and pumpfluid are preserved. Before venting thevacuum chamber the forevacuum valve(2) and the high vacuum valve (4) mustbe closed, whereby the diffusion pumpremains in the ready status.
Pumping Speed
The pumping speed of any pump isequivalent to the volume throughputthrough the intake opening of a pump.In the case of diffusion pumps thepumping speed for lighter gases is higher compared to heavier gases.
Backstreaming of the PumpFluid
Undesirable backstreaming of mole-cules from the pump fluid is caused bythe effect that some molecules areable to leave the vapor jet and thus donot arrive at the cooled pump body.Because of collisions between eachother and due to reflection at thepump body, these molecules are thenable to move in the direction of thevacuum chamber.
For DIP pumps the backstreamingeffect amounts only to a few g per cm2 of intake area per minute.Backstreaming may be almost com-pletely suppressed by including a coldcap baffle or an additional Astrotorusbaffle.
Backstreaming of Oil in theCase of Diffusion Pumps
- Pump without baffleapprox. 1 x 10-2 mg x cm-2 x min-1
- Pump with cold cap baffle approx. 1 x 10-3 mg x cm-2 x min-1
- Pump with Astrotorus baffle(T = 10 C (50 F)) approx. 1 x 10-5 mg x cm-2 x min-1
The values stated have been measuredat an intake pressure of < 1 x 10-4 mbarand apply to LEYBONOL LVO 500.
BV
2
3
1
HM
VM1
VM24
5
6
7
1 Two-stage rotary vane vacuum pump2 Forevacuum valve3 Rough vacuum valve4 High vacuum valve5 Baffle6 Oil diffusion pump7 Adsorption trapHM High vacuum gaugeVM1 Forevacuum gauge/diffusion pumpVM2 Forevacuum gauge/roughing lineBV Venting valve
Diagram of a pump system with diffusion pump
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leybold Oerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013 141
Attainable Ultimate Pressure
The attainable ultimate pressure for aparticular vacuum system depends notonly on the type and pumping speedrating of the diffusion pump, but alsoon the vapor pressure of the pumpfluid, shape and temperature of thebaffle, leaks at connecting flanges orwelded joints and the condition of thesurfaces within the vacuum chamber.
When excluding all effects which con-tribute to an increase in pressure within
the vacuum chamber due to leaks andcontamination of the vacuum chamberwalls, it will be possible to attain theultimate pressures stated in the tableAttainable Ultimate Pressures with OilDiffusion Pumps (DIP) given in chapterGeneral.
In practice the following combinationhas been found to work very well whenneeding a low vacuum free of oilvapors.
- Water-cooled cold cap baffle as aintegral part of the diffusion pumptogether with a water-cooled Astro-torus baffle which may be installedas an additional component on thehigh vacuum flange of the diffusionpump.
Sealing Methods
For ultimate pressures down to 10-8 mbar (0.75 x 10-8 Torr) bakeouttemperatures of up to 150 C (302 F)are sufficient. FPM [FKM (= Fluor caou-tchouc), temperature resistant up to 150 C (302 F)] sealing rings or ultrasealing rings made of aluminum mustbe used.
In order to prevent pressure variations,ultra sealing rings must be used in theconnections, between diffusion pumpand baffle.
Ultimate pressures below 10-8 mbar(0.75 x 10-8 Torr) require bakeout temperatures up to 400 C (752 F).However, it is only necessary to bakeout the vacuum chamber to 400 C(752 F) and to maintain a temperaturegradient across the baffle or the coldtrap so that a temperature of 150 C(302 F) is not exceeded at the intakeflange of the pump.
In this way, it is still acceptable to useFPM (FKM) sealing rings or ultrasealing rings made of aluminium.
Cooling
The cooling water temperature shouldnot exceed 25 C (77 F) at the intakeand 30 C (86 F) at the discharge,otherwise sufficient condensation ofthe pump fluid cannot be ensured.When connecting the cooling systemof the pump and the baffle in series,the cooling water must always bemade to flow through the baffle firstand then through the diffusion pump,because the attainable ultimate pres-sure in the vacuum chamber dependsstrongly on the condensation tempera-ture of the pump fluid in the baffle.
1.5 x 10-6 (1.1 x 10-6)
5.0 x 10-7 (3.8 x 10-7)
1.5 x 10-7 (1.1 x 10-7)
Attainable Ultimate Pressure 1)
Without baffle mbar (Torr)
With cold cap baffle mbar (Torr)
With Astrotorus baffle mbar (Torr)
1) Attained in consideration of the notes given under Sealing Methods in the chapter General para. Oil Diffusion Pumps and after degassing the connectedvacuum chamber for several hours at 200 C (392 F)
LEYBONOL LVO 500
Attainable Ultimate Pressures with Oil Diffusion Pumps
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leyboldOerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013142
DIP PumpsWater-Cooled
Advantages to the User
- High pumping speeds in the fineand high vacuum ranges
- Low attainable ultimate pressure
- Integrated, water-cooled cold capbaffle guarantees low oil back-streaming rates into the vacuumchamber
- Low oil losses (even at high gasthroughputs) by integrated water-cooled forevacuum baffle
- High forevacuum resistance even atreduced heating power
- The heating cartridges are accessi-ble from the outside via heating in-serts which are built into the boiler.This ensures a quick exchange ofsingle heating cartridges (even whenthe pump is hot)
- A separate automatic circuit breakerfor each heating cartridge ensures ahigh level of electrical safety
- A standard built-in thermostat actsas an thermal overload switch andensures that the heating cartridgescan not overheat
- All pumps are prepared for instal-lation with an over-temperatureswitch (optional) for checking thecooling water circuit, and a contactthermometer (optional) to monitorthe operating temperature of the dif-fusion pump
- Indication of the oil level by sight-glass permits simple checking ofthe current oil level
- All DIP pumps are delivered withtheir inside chamber cleaned insuch a manner that it is free of oil.The inside is evacuated. In the con-dition as delivered, the pumps maybe also operated with silicone oil
Typical Applications
The diffusion pumps from the DIPrange are used in coating systems,vacuum melting and drying systems aswell as in vacuum furnaces in the areaof metallurgy.
Supplied Equipment
The DIP pumps are supplied ready forconnection but without the filling ofpump fluid.
The inside of the pump is cleaned be-fore delivery to such an extent that it is free of oil. The inside is evacuated.High and forevacuum flanges areequipped with gaskets and centeringrings having shipping flanges and com-plete with clamping components.
DIP 12 000
The DIP range of pumps wasdeveloped for operation in industrialsystems. Excellent vacuum per-formance data combined with theinherent ruggedness of this kind ofpump, make our diffusion pumpspumps a reliable component in highand medium vacuum applications.
Products
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leybold Oerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013 143
d1d
DNh3
DN1h1
h4
h
d3
b1
b
a
G1/4"G3/8"
h2
1
DIP 3 000 8 000 12 000 20 000 30 000 50 000DN 250 ISO-K 400 ISO-K 500 ISO-K 630 ISO-F 800 ISO-F 1000 ISO-FDN1 63 ISO-K 63 ISO-K 100 ISO-K 100 ISO-K 160 ISO-K 160 ISO-Ka 240 (9.45) 350 (13.78) 420 (16.54) 540 (21.26) 600 (23.62) 800 (31.5)a1 250.5 (9.86) 375.5 (14.78) 432 (17) 496 (19.53) 536 (21.10) 636 (25.04)b 443 (17.44) 643 (25.31) 775 (30.51) 920 (36.22) 1090 (42.91) 1290 (50.79)b1 276 (10.87) 373 (14.69) 460 (18.11) 540 (21.26) 630 (24.8) 730 (28.74)d 290 (11.42) 450 (17.72) 550 (21.65) 750 (29.53) 920 (36.22) 1120 (44.09)d1 261 (10.28) 400 (15.75) 50119.72) 651 (25.63) 800 (31.5) 1000 (39.37)d2 405 (15.94) 506 (19.92) 636 (25.04) 716 (28.19) 916 (36.06)d3 278 (10.94) 530 (20.87) 630 (24.80) 760 (29.92) 840 (33.07) 1040 (40.94)d4 720 (28.35) 890 (35.04) 1090 (42.91)d5 14 (0.55) 14 (0.55) 14 (0.55)Quantityof holes 20 24 32
h 560 (22.05) 785 (30.91) 940 (37) 1130 (44.49) 1450 (57.09) 1880 (74.02)h1 250 (9.84) 400 (15.75) 470 18.5) 620 (24.41) 870 (34.25) 1275 (50.2)h2 68 (2.68) 88 (3.46) 92 (3.62) 97 (3.82) 102 (4.02) 102 (4.02)h3 75 (2.95) 102 (4.02) 106 (4.17) 110 (4.33) 116 (4.57) 116 (4.57)h4 45 (1.77) 68 (2.68) 68 (2.68) 74 (2.91) 70 (2.76) 70 (2.76) 45 30 30 30 20 25 1 20 30 30 30 30 45 2 25 3 15
Dimensional drawing for the DIP 3000 [top left], DIP 8000 to DIP 20 000 [top middle], DIP 30 000 [top right] and DIP 50 000 [bottom right]; Dimensions in brackets ( ) are in inch
d1d
DNh3h2
DN1
h1
h4
h
d3d2
a
1
a1
b
b1
d4d5G3/8"
G1/2"
OL EYB L D
d1d
DNh3h2
DN1
h1
h4
h
d3d2
a
3
a1
b
b12
1
d4d5
G3/8"
G1/2"
d1d
DNh3h2
DN1
h1
h4
h
d3d2
a
1
a1
b
b1
d4d5G3/8"
G1/2"
10-62 4 6 8
2
4
68
10-5 10-4 10-3 10-2mbarIntake pressure
Pum
ping
spe
ed
103
102
104
105
l x s-1
DIP 8000DIP 12000DIP 20000
DIP 50000DIP 30000
DIP 3000
Pumping speed characteristics of the DIP pumps as a function of intake pressure
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leyboldOerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013144
Ordering Information
Technical Data
High vacuum / forevacuum connection DN
Pumping speed for air 1)below 1 x 10-4 mbar l x s-1
Operating range mbar (Torr)
Ultimate total pressure 1) mbar (Torr)
Max. permissible forevacuum pressurembar (Torr)
Pump fluid filling, min. / max. l (qts)
Mains connectionStandard EURO, 50/60 Hz VStandard Americas, 50/60 Hz VSpecial, 50/60 Hz V
Heating power kW
Number of heating cartridges
Heating up time min
Cooling water (minimum)for pump 2) l x h-1 (gal/min)for cold cap baffle l x h-1 (gal/min)max. supply pressure bar (psig)
Number of cooling circuits(including cold cap baffle)
Cooling water connection for pump G (BPS)for cold cap baffle G (BPS)
Weight, approx. kg (lbs)
Recommended backing pump 3)at operating pressures > 10-4 mbar (> 0.75 x 10-4 Torr)at operating pressures < 10-4 mbar (< 0.75 x 10-4 Torr)
250 ISO-K / 63 ISO-K 400 ISO-K / 63 ISO-K 500 ISO-K / 100 ISO-K
3 000 8 000 12 000
< 10-2 to 10-7 < 10-2 to 10-7 < 10-2 to 10-7(0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7)
< 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7)
6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1)
1.0 / 1.4 (1.1 / 1.5) 1.7 / 3.4 (1.8 / 3.6) 2.4 / 5.3 (2.5 / 5.6)
230 ~ 1 Ph 400 ~ 3 Ph Y 400 ~ 3 Ph Y230 ~ 1 Ph 460 ~ 3 Ph Y 460 ~ 3 Ph Y
230 ~ 3 Ph V 230 ~ 3 Ph V2.4 4.8 7.2
2 6 9
< 25 < 25 < 25
160 (0.7) 290 (1.28) 500 (2.2)20 (0.09) 30 (0.13) 50 (0.22)
6 (87) 6 (87) 6 (87)
2 2 2
3/8" 1/2" 1/2"1/4" 3/8" 3/8"
29 (64) 70 (154) 102 (225)
TRIVAC D 65 B + W 251 DK 200 + W 251 DK 200 + W 501
TRIVAC NT 25 TRIVAC D 65 B + W 251 TRIVAC D 65 B + W 251
Oil diffusion pumpStandard EUROStandard AmericasSpecial
Astrotorus baffle
Over-temperature protection switch
Contact thermometer
Resistance thermometer Pt100 sensor
Pump fluid 4)
1) Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluid2) The required quantity of cooling water refers to VT = 10 C (50 F). The discharge temperature should not exceed 30 C (86 F)3) Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with
Roots vacuum pumps (RUVAC) in pump systems4) Oil must be puchased separately
DIP 3 000 DIP 8 000 DIP 12 000
DIP 3 000 DIP 8 000 DIP 12 000
Part No. Part No. Part No.
222 10 222 20 222 25222 10 500 670 500 591
500 649 500 651
227 50 227 60 227 65
122 84 122 84 122 84
218 81 218 81 218 81
200 02 958 200 02 958 200 02 958
see Catalog Part Oils / Greases / Lubricants LEYBONOL
-
leybold Oerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013 145
Ordering Information
Technical Data
High vacuum / forevacuum connection DN
Pumping speed for air 1)below 1 x 10-4 mbar l x s-1
Operating range mbar (Torr)
Ultimate total pressure 1) mbar (Torr)
Max. permissible forevacuum pressurembar (Torr)
Pump fluid filling, min. / max. l (qts)
Mains connectionStandard EURO, 50/60 Hz VStandard Americas, 50/60 Hz VSpecial, 50/60 Hz V
Heating power kW
Number of heating cartridges
Heating up time min
Cooling water (minimum)for pump 2) l x h-1 (gal/min)for cold cap baffle l x h-1 (gal/min)max. supply pressure bar (psig)
Number of cooling circuits(including cold cap baffle)
Cooling water connectionfor pump G (BPS)for cold cap baffle G (BPS)
Weight, approx. kg (lbs)
Recommended backing pump 3)at operating pressures > 10-4 mbar (> 0.75 x 10-4 Torr)at operating pressures < 10-4 mbar (< 0.75 x 10-4 Torr)
630 ISO-F / 100 ISO-K 800 ISO-F / 160 ISO-K 1000 ISO-F / 160 ISO-K
20 000 30 000 50 000
< 10-2 to 10-7 < 10-2 to 10-7 < 10-2 to 10-7(0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7)
< 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7)
6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1)
6.0 / 9.0 (6.3 / 9.5) 7.0 / 15.0 (7.4 / 15.9) 12.0 / 25.0 (12.7 / 26.4)
400 ~ 3 Ph Y 400 ~ 3 Ph Y 400 ~ 3 Ph Y460 ~ 3 Ph Y 460 ~ 3 Ph Y 460 ~ 3 Ph Y230 ~ 3 Ph V 230 ~ 3 Ph V 230 ~ 3 Ph V
12 18 24
12 18 24
< 25 < 30 < 30
600 (2.6) 900 (4.0) 1500 (6.6)60 (0.26) 80 (0.35) 150 (0.66)
6 (87) 6 (87) 6 (87)
2 3 3
1/2" 1/2" 1/2"3/8" 3/8" 3/8"
172 (379) 296 (653) 560 (1235)
SV 200 + W 501 SV 300 + W 1001 SV 630 B + W 2001
TRIVAC D 65 B + W 251 DK 200 + W 251 DK 200 + W 501
Oil diffusion pumpStandard EUROStandard AmericasSpecial
Astrotorus baffle
Over-temperature protection switch
Contact thermometer
Resistance thermometer Pt100 sensor
Pump fluid 4)
1) Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluid2) The required quantity of cooling water refers to VT = 10 C (50 F). The discharge temperature should not exceed 30 C (86 F)3) Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with
Roots vacuum pumps (RUVAC) in pump systems4) Oil must be puchased separately
DIP 20 000 DIP 30 000 DIP 50 000
DIP 20 000 DIP 30 000 DIP 50 000
Part No. Part No. Part No.
222 30 222 35 222 40500 882 500 665 500 728500 652 500 653 500 654
227 70 227 75 227 80
122 84 122 84 122 84
218 81 218 81 218 81
200 02 958 200 02 958 200 02 958
see Catalog Part Oils / Greases / Lubricants LEYBONOL
-
leyboldOerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013146
LEYBOJET 630Advantages for the User
- High and stable pumping speedwell into medium vacuum range
- Low ultimate pressure
- Low oil backstreaming due to inte-grated water-cooled cold cap baffle
- High forevacuum tolerance
- Each heating cartridge is protectedby a separate circuit breaker
- In maintaining the well provenheating system - heating insert withthermally conducting panels andheating cartridges - the LEYBOJET630 is now equipped with an addi-tional ejector nozzle for the purposeof obtaining a stable pumpingspeed well into the medium vacuum range
Typical Applications
The principal areas of application of theLEYBOJET 630 are modern sputteringprocesses as well as vacuum meltingand drying plants.
Supplied Equipment
The LEYBOJET 630 are supplied readyfor connection but without the filling ofpump fluid.
The inside of the pump is cleaned be-fore delivery to such an extent that it is free of oil. The inside is evacuated.High and forevacuum flanges areequipped with gaskets, centering rings,shipping flanges, and clamping com-ponents.
LEYBOJET 630
The oil diffusion pumps from OerlikonLeybold Vacuum are well proven inindustriall high vacuum applications.
They excel through their excellentvacuum performance data and owingto their rugged design are a reliablecomponent in many medium and highvacuum systems.
The water-cooled LEYBOJET 630 wasdeveloped especially with the mediumvacuum in mind.
10-4 10-3 10-2 10-10
2.000
4.000
6.000
8.000
10.000
12.000
14.000
10-5
Pum
ping
Spe
ed [l/
s]
Intake Pressure pHV [mbar]
Pumping speed curve of the LEYBOJET 630 as a function of the intake pressure
Dimensional drawing for the LEYBOJET 630
DN 160 ISO-K
D1
DN 630 ISO-FD2
D
l1
l
l2
D3
D4D5
G1/2"
H2
H1
H
30 45
30
15
27
15
G3/8"
LEYBOJET 630 D D1 D2 D3 D4 D5 H H1 H2mm 750 720 651 180 585 625 1144 650 423
in. 29.53 28.35 25.63 7.09 23.03 24.61 45.04 25.60 16.65l l1 l2
mm 1215 604 24in. 47.83 23.78 094
Top View
-
leybold Oerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013 147
Technical Data
High vacuum connection DN
Forevacuum connection DN
Pumping speed for air 1)at 1 x 10-2 mbar l x s-1at 1 x 10-3 mbar l x s-1< 1 x 10-4 mbar l x s-1
Operating range mbar (Torr)
Ultimate total pressure 1) mbar (Torr)
Max. permissible forevacuum pressurembar (Torr)
Pump fluid fillung, min. / max. l (qts)
Mains connection 50/60 Hz V
Heating power kW
Number of heating cartridges
Heating up time min
Cooling watermin. throughput 2) l x h-1 (gal/min)connection G
Number of cooling circuits(including cold cap baffle)
Cooling water connection for pump G (BPS)for cold cap baffle G (BPS)
Weight, approx. kg (lbs)
Recommended backing pump 3)at operating pressures > 10-4 mbar (> 0.75 x 10-4 Torr)at operating pressures < 10-4 mbar (< 0.75 x 10-4 Torr)
630 ISO-F
160 ISO-K
1 70012 00012 000
< 10-2 (< 0.75 x 10-2)
< 5 x 10-7 (< 3.75 x 10-7)
6 x 10-1 (4.5 x 10-1)
5.0 / 8.0 (5.3 / 8.5)
400, 3 Ph
10.8
9
< 30
500 (2.2)1/2"
2
1/2"3/8"
145 (320)
SV 200 + W 501
TRIVAC D 65 B + W 251
LEYBOJET 630
Ordering Information
Oil diffusion pumpLEYBOJET 630
Astrotorus baffle
Water flow monitorLR 20
Over-temperature protection switch
Contact thermometer
Resistance thermometer Pt100 sensor
Pump fluid 4)
1) Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluid2) The required quantity of cooling water refers to T = 10 C (50 F). The discharge temperature should not exceed 30 C (86 F)3) Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with
Roots vacuum pumps (RUVAC) in pump systems4) Oil must be puchased separately
LEYBOJET 630
Part No.
502 180
227 70
122 83
122 84
218 81
200 02 958
see Catalog Part Oils / Greases / Lubricants LEYBONOL
-
leyboldOerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013148
Astrotorus Baffles
Section through an astrotorus baffle
The cooling inserts of the astrotorusbaffles are made of copper, whereasthe housing and the connection flangeare made of standard steel.
14024
2d
2d
a
130
DN1d
d
24Hose nozzle, 14 mm ( 0.55 in.) dia.
57 14024
2d
2d
a
130
DN1d
d
24Hose nozzle, 14 mm ( 0.55 in.) dia.
57
Dimensional drawing for the astrotorus baffle ISO-K (left) and ISO-F (right)
DN a b d d1 d2250 ISO-K mm 265 30 416 290
in. 10.4 0.18 16.4 11.4 400 ISO-K mm 362 120 512 450
in. 14.25 4.72 20.2 17.7 500 ISO-K mm 412 120 612 550
in. 16.22 4.72 24.1 21.7 630 ISO-F mm 440 750 720 14
in. 17.32 29.53 28.35 0.55800 ISO-F mm 546 920 890 14
in. 21.5 36.22 35.04 0.551000 ISO-F mm 599 1120 1090 14
in. 23.58 44.09 42.91 0.55
DN Quantity h h1 1250 ISO-K mm 195 97
in. 7.68 3.82 400 ISO-K mm 193 96
in. 7.6 3.78 500 ISO-K mm 193 96
in. 7.6 3.78 630 ISO-F mm 20 140 18 9
in. 20 5.5 18 9 800 ISO-F mm 24 140 15 7,5
in. 24 5.5 15 7,5 1000 ISO-F mm 32 140 11.25 5.625
in. 32 5.5 11.25 5.625
Accessories for Oil Diffusion Pumps
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Ordering Information
Ordering Information
Technical Data
Connection to pump DIP
HV connection flanges DN
Throttling of the pumping speed, approx. %
Conductance l x s-1
Weight kg (lbs)
3 000 8 000 12 000
250 ISO-K 400 ISO-K 500 ISO-K
30 30 30
3 000 9 000 12 000
25.0 (55.2) 30.0 (66.2) 65.0 (143.5)
Part No. Part No. Part No.
227 50
227 60
227 65
Astrotorus baffle250 ISO-K400 ISO-K500 ISO-K
Astrotorus Baffles
Technical Data
Connection to pump DIP
HV connection flanges DN
Throttling of the pumping speed, approx.%
Conductance l x s-1
Weight kg (lbs)
20 000 30 000 50 000
630 ISO-F 800 ISO-F 1000 ISO-F
30 30 30
18 000 28 000 50 000
120.0 (264.9) 170.0 (375.3) 190.0 (419.4)
Part No. Part No. Part No.
227 70
227 75
227 80
Astrotorus baffle0630 ISO-F0800 ISO-F1000 ISO-F
Astrotorus Baffles
Astrotorus Baffles
Astrotorus Baffles
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The operational status of the diffusionpump depends on the temperature ofthe pump fluid in the pump boiler.Through temperature dependentswitching components which areinserted into the pump boiler it is pos-sible to monitor the operational statusof the diffusion pump and signal itsstatus to a process controller.
For this, the diffusion pump requirestwo thresholds. Depending on the typeof pump, the upper threshold shouldbe between 180 and 200 C (356 and 392 F) and the lower thresholdbetween 90 and 100 C (194 and 212 F).
The upper threshold indicates that thediffusion pump is ready for operationand thus actuates certain devices, forexample opening of the high vacuumvalve ahead of the diffusion pump.
The lower threshold indicates that thediffusion pump has cooled down tosuch an extent that the backing pumpand the cooling water supply may beswitched off.
Over-temperature protectionswitches are used to monitor the temperature of the cooling water in thecooling water circuit of the diffusionpumps. When the temperature rises tounacceptably high levels (for examplewhen the cooling water supply fails)the heater in the diffusion pump isswitched off (correct electrical connec-tion to the main supply is required).The use of over-temperature protectionswitches avoids unnecessary alarmsthat may be triggered by contaminatedwater when only a water flow monitoris used. The over-temperature protec-tion switch is screwed on to a contactplate which is soldered to the coolingpipe on the pumps body.
Max. switching current: 5 A (230 V,50/60 Hz).
Contact thermometer with a rangefrom 0 to 400 C (32 to 752 F).Through a trailing pointer twoswitching thresholds may be set upindependently. The current oil tempe-rature and the thresholds which havebeen set up can be read off at thelocation of the diffusion pump. Thecontacting thermometer is not suitedfor remote signalling of temperatures.
Resistance thermometer Pt100 sen-sor. The measurement range of thissensor depends on the temperaturedisplay unit used by the customerwhere also the required thresholds areset up. The Pt100 sensor is ideal forremote signalling of temperatures.
400
350
250
300
200150
100
50
0
d1
c
d2 d3a3
a2
a
l1d
l
a1b
30
Dimensional drawing for the contact thermometer
d2
l3
d1
l4
l
l2
l1
d d3
Dimensional drawing for the resistance thermometer Pt100 sensor
Part No.
122 84
218 81
200 02 958
Ordering Information
Over-temperature protection switch
Contact thermometer(Measurement range 0 to +400 C (+32 to +752 F), Rating at 220 V AC: 250 mA [resistive load], Weight: 1.7 kg (3.7 lbs))
Resistance thermometer Pt100 sensor
Monitoring Instruments
a a1 a2 a3 b c d d1 d2 d3 l l1mm 95.0 119.5 17.5 62.0 101.5 92.0 14.0 12.0 9.0 G 1/2 170.0 33.0in. 3.74 4.70 0.69 2.44 4.00 3.62 0.55 0.47 0.35 G 1/2 6.70 1.30
d d1 d2 d3 l l1 l2 l3 l4mm 12 6 G 1/2 22 230 115 170 25 30in. 0.47 0.24 G 1/2 0.87 9.06 4.53 6.69 0.98 1.18
Temperature dependant Switching Components forAutomatic Pump System Control
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Adsorption Traps with Aluminium Oxide InsertAdsorption traps are installed in allthose cases where an oil-free vacuum is to be produced with oil-sealed vacuum pumps.
Adsorption trap (left) and insert (right)
Ordering Information
Advantages to the User
- Backstreaming of oil is reduced by 99%
- Long service life
- High conductance
- Filling can be easily exchanged
- Improvement in the ultimate pres-sure attained by backing pumps byone order of magnitude
- Stainless steel housing and insert
- NBR gasket
Typical Applications
- Product of an oil-free vacuum
Supplied Equipment
- Complete with insert
- Without adsorbent
d
1
DN
a
h
1h
DNa
Technical Data Adsorption Traps
16 ISO-KF 25 ISO-KF 40 ISO-KF
Conductance at 10-2 mbar (Torr)l x s-1
Service live with Al oxide Months
Al oxide filling l (qts)
Weight, approx. kg (lbs)
4.0 6.0 12.0
3 3 3
0.5 (0.53) 1.0 (1.06) 2.0 (2.1)
1.3 (2.9) 1.3 (2.9) 4.0 (8.8)
Adsorption trap
Activated aluminum oxide in tin1.6 l (approx. 1.2 kg (2.65 lbs))
Part No. Part No. Part No.
854 14 854 15 854 16
854 10 854 10 854 10
Residual gas spectrum; top ahead of a rotaryvacuum pump, bottom ahead of a rotary vacuumpump with adsorption trap
Dimensional drawing for the adsorption traps
DN a a1 d h h116 ISO-KF mm 82 82 135 147 32
in. 3.23 3.23 5.31 5.79 1.2525 ISO-KF mm 102 102 175 155 33
in. 4.02 4.02 6.89 6.10 1.2640 ISO-KF mm 132 65 235 160 20
in. 5.19 2.56 9.25 6.3 0.79
Adsorption Traps
16 ISO-KF 25 ISO-KF 40 ISO-KF
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Notes