dip vacuum

leyboldOerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013136

General

Vacuum coating

Research and development

Metallurgy/furnaces

Mechanical engineering

Sputtering process

Astrotorus baffle 148

Over-temperature protection switch 150

Contact thermometer 150

Resistance thermometer Pt100 150

Adsorption trap 151

Accessories

Pump

s

DIP 30

00

DIP 80

00

DIP 12

000

DIP 20

000

DIP 50

000

Page

Application

DIP 30

000

For generating an oil-free vacuum with oil sealed backing pumps

Applications and Accessoriesfor Oil Diffusion Pumps

LEYB

OJET

630

leybold Oerlikon Leybold VacuumCatalog Part High Vacuum Pumps, Edition 2013 137

For information on oil specifications please refer to Catalog PartOils / Greases / Lubricants LEYBONOL.

LEYBONOL Oils

Oil for Diffusion Pumpsfor different fields of application

LVO 500

LVO 510

LVO 520

= Standard = Possible= Please contact Oerlikon Leybold Vacuum

The table only lists general applications. Your specific requirements might be subject to deeper analysis.For further questions, please contact our technical Sales support.

Appli

catio

n

Metal

lurgy

/furna

ces

Vacu

um co

ating

Rese

arch a

nd de

velop

ment

Sputt

er pro

cess

es

Mech

anica

l eng

ineeri

ng


For information on oil specifications please refer to Catalog PartOils / Greases / Lubricants LEYBONOL.

Oil for Diffusion Pumpsfor different pump types

LVO 500

LVO 510

LVO 520

= Standard = Possible= Please contact Oerlikon Leybold Vacuum

NoteAll oils may be used.The pumps are supplied as standard without oil.

The table only lists general applications. Your specific requirements might be subject to deeper analysis.For further questions, please contact our technical Sales support.

Pums

DIP 30

000

DIP 12

000

DIP 8

000

DIP 3

000

DIP 20

000

LEYB

OJET

630

DIP 50

000

LEYBONOL Oils


Operating Principle of FluidEntrainment Vacuum Pumps

The main components of diffusionpumps, the operation of which relieson vapor-phase pump fluids are:

- Cooled pump body with intake andexhaust ports

- System of nozzles

- Pump boiler

In the case of diffusion pumps a pumpfluid contained in a boiler is heated tosuch an extent that it is vaporized. Thevapor is then forced through nozzleswithin the pump. The nozzles are gen-erally designed in such a way, that theyaccelerate the vapor to a speed ex-ceeding the speed of sound (Lavalnozzles), thus creating a high speedvapor jet. The vapor is then deflectedby the nozzles at a specific angle ontothe pump body. The pump body is

cooled, so that the vaporized pumpfluid condenses and is returned backto the boiler as a liquid. The pumpingaction of diffusion pumps and fluid en-trainment pumps in general is basedon the transporting capacity of thevapor jet.

The gas which is to be pumped iscompressed sufficiently at the fore-vacuum port so that it can be pumpedout by a backing pump.


Oil Diffusion Pumps

Compared to other fluid entrainmentpumps the density of the vapor in theboiler and in the vapor jet is fairly low so that the gas molecules may almostcompletely diffuse into the vapor jet.Thus most of the molecules which enterthe vapor jet are also pumped out.

For this reason, the pumping speed ofdiffusion pumps is extremely high withrespect to the intake area and con-stant starting at an inlet pressure ofapprox. 10-3 mbar (0.75 x 10-3 Torr)down to very low pressures as withinthe pressure range the vapor jet is notinfluenced in any way by the pressurewithin the vacuum vessel.

Operating Oil Diffusion Pumps

Forevacuum

In all cases diffusion pumps require asufficiently sized backing pump (seeTechnical Data). The size and type offorevacuum pump depends on theoperating conditions and the quantitiesof gas which are to be pumped.

1. Continuous operation at operatingpressures above 10-4 mbar (0.75 x 10-4 Torr) large quantities of gas.

2. Continuous operation at operatingpressures below 10-4 mbar (0.75 x 10-4 Torr) smallerquantities of gas.

In applications which rely on diffusionpumps, the vacuum chamber mustbe connected via a valve (3) and aroughing line directly to the backingpump. This is done so that the vacuumchamber may be pre-evacuated by thebacking pump down to a pressurewhere the diffusion pump can takeover. Until the high vacuum valve (4)opens, both diffusion pump and pumpfluid are preserved. Before venting thevacuum chamber the forevacuum valve(2) and the high vacuum valve (4) mustbe closed, whereby the diffusion pumpremains in the ready status.

Pumping Speed

The pumping speed of any pump isequivalent to the volume throughputthrough the intake opening of a pump.In the case of diffusion pumps thepumping speed for lighter gases is higher compared to heavier gases.

Backstreaming of the PumpFluid

Undesirable backstreaming of mole-cules from the pump fluid is caused bythe effect that some molecules areable to leave the vapor jet and thus donot arrive at the cooled pump body.Because of collisions between eachother and due to reflection at thepump body, these molecules are thenable to move in the direction of thevacuum chamber.

For DIP pumps the backstreamingeffect amounts only to a few g per cm2 of intake area per minute.Backstreaming may be almost com-pletely suppressed by including a coldcap baffle or an additional Astrotorusbaffle.

Backstreaming of Oil in theCase of Diffusion Pumps

- Pump without baffleapprox. 1 x 10-2 mg x cm-2 x min-1

- Pump with cold cap baffle approx. 1 x 10-3 mg x cm-2 x min-1

- Pump with Astrotorus baffle(T = 10 C (50 F)) approx. 1 x 10-5 mg x cm-2 x min-1

The values stated have been measuredat an intake pressure of < 1 x 10-4 mbarand apply to LEYBONOL LVO 500.

BV

2

3

1

HM

VM1

VM24

5

6

7

1 Two-stage rotary vane vacuum pump2 Forevacuum valve3 Rough vacuum valve4 High vacuum valve5 Baffle6 Oil diffusion pump7 Adsorption trapHM High vacuum gaugeVM1 Forevacuum gauge/diffusion pumpVM2 Forevacuum gauge/roughing lineBV Venting valve

Diagram of a pump system with diffusion pump


Attainable Ultimate Pressure

The attainable ultimate pressure for aparticular vacuum system depends notonly on the type and pumping speedrating of the diffusion pump, but alsoon the vapor pressure of the pumpfluid, shape and temperature of thebaffle, leaks at connecting flanges orwelded joints and the condition of thesurfaces within the vacuum chamber.

When excluding all effects which con-tribute to an increase in pressure within

the vacuum chamber due to leaks andcontamination of the vacuum chamberwalls, it will be possible to attain theultimate pressures stated in the tableAttainable Ultimate Pressures with OilDiffusion Pumps (DIP) given in chapterGeneral.

In practice the following combinationhas been found to work very well whenneeding a low vacuum free of oilvapors.

- Water-cooled cold cap baffle as aintegral part of the diffusion pumptogether with a water-cooled Astro-torus baffle which may be installedas an additional component on thehigh vacuum flange of the diffusionpump.

Sealing Methods

For ultimate pressures down to 10-8 mbar (0.75 x 10-8 Torr) bakeouttemperatures of up to 150 C (302 F)are sufficient. FPM [FKM (= Fluor caou-tchouc), temperature resistant up to 150 C (302 F)] sealing rings or ultrasealing rings made of aluminum mustbe used.

In order to prevent pressure variations,ultra sealing rings must be used in theconnections, between diffusion pumpand baffle.

Ultimate pressures below 10-8 mbar(0.75 x 10-8 Torr) require bakeout temperatures up to 400 C (752 F).However, it is only necessary to bakeout the vacuum chamber to 400 C(752 F) and to maintain a temperaturegradient across the baffle or the coldtrap so that a temperature of 150 C(302 F) is not exceeded at the intakeflange of the pump.

In this way, it is still acceptable to useFPM (FKM) sealing rings or ultrasealing rings made of aluminium.

Cooling

The cooling water temperature shouldnot exceed 25 C (77 F) at the intakeand 30 C (86 F) at the discharge,otherwise sufficient condensation ofthe pump fluid cannot be ensured.When connecting the cooling systemof the pump and the baffle in series,the cooling water must always bemade to flow through the baffle firstand then through the diffusion pump,because the attainable ultimate pres-sure in the vacuum chamber dependsstrongly on the condensation tempera-ture of the pump fluid in the baffle.

1.5 x 10-6 (1.1 x 10-6)

5.0 x 10-7 (3.8 x 10-7)

1.5 x 10-7 (1.1 x 10-7)

Attainable Ultimate Pressure 1)

Without baffle mbar (Torr)

With cold cap baffle mbar (Torr)

With Astrotorus baffle mbar (Torr)

1) Attained in consideration of the notes given under Sealing Methods in the chapter General para. Oil Diffusion Pumps and after degassing the connectedvacuum chamber for several hours at 200 C (392 F)

LEYBONOL LVO 500

Attainable Ultimate Pressures with Oil Diffusion Pumps


DIP PumpsWater-Cooled

Advantages to the User

- High pumping speeds in the fineand high vacuum ranges

- Low attainable ultimate pressure

- Integrated, water-cooled cold capbaffle guarantees low oil back-streaming rates into the vacuumchamber

- Low oil losses (even at high gasthroughputs) by integrated water-cooled forevacuum baffle

- High forevacuum resistance even atreduced heating power

- The heating cartridges are accessi-ble from the outside via heating in-serts which are built into the boiler.This ensures a quick exchange ofsingle heating cartridges (even whenthe pump is hot)

- A separate automatic circuit breakerfor each heating cartridge ensures ahigh level of electrical safety

- A standard built-in thermostat actsas an thermal overload switch andensures that the heating cartridgescan not overheat

- All pumps are prepared for instal-lation with an over-temperatureswitch (optional) for checking thecooling water circuit, and a contactthermometer (optional) to monitorthe operating temperature of the dif-fusion pump

- Indication of the oil level by sight-glass permits simple checking ofthe current oil level

- All DIP pumps are delivered withtheir inside chamber cleaned insuch a manner that it is free of oil.The inside is evacuated. In the con-dition as delivered, the pumps maybe also operated with silicone oil

Typical Applications

The diffusion pumps from the DIPrange are used in coating systems,vacuum melting and drying systems aswell as in vacuum furnaces in the areaof metallurgy.

Supplied Equipment

The DIP pumps are supplied ready forconnection but without the filling ofpump fluid.

The inside of the pump is cleaned be-fore delivery to such an extent that it is free of oil. The inside is evacuated.High and forevacuum flanges areequipped with gaskets and centeringrings having shipping flanges and com-plete with clamping components.

DIP 12 000

The DIP range of pumps wasdeveloped for operation in industrialsystems. Excellent vacuum per-formance data combined with theinherent ruggedness of this kind ofpump, make our diffusion pumpspumps a reliable component in highand medium vacuum applications.

Products


d1d

DNh3

DN1h1

h4

h

d3

b1

b

a

G1/4"G3/8"

h2

1

DIP 3 000 8 000 12 000 20 000 30 000 50 000DN 250 ISO-K 400 ISO-K 500 ISO-K 630 ISO-F 800 ISO-F 1000 ISO-FDN1 63 ISO-K 63 ISO-K 100 ISO-K 100 ISO-K 160 ISO-K 160 ISO-Ka 240 (9.45) 350 (13.78) 420 (16.54) 540 (21.26) 600 (23.62) 800 (31.5)a1 250.5 (9.86) 375.5 (14.78) 432 (17) 496 (19.53) 536 (21.10) 636 (25.04)b 443 (17.44) 643 (25.31) 775 (30.51) 920 (36.22) 1090 (42.91) 1290 (50.79)b1 276 (10.87) 373 (14.69) 460 (18.11) 540 (21.26) 630 (24.8) 730 (28.74)d 290 (11.42) 450 (17.72) 550 (21.65) 750 (29.53) 920 (36.22) 1120 (44.09)d1 261 (10.28) 400 (15.75) 50119.72) 651 (25.63) 800 (31.5) 1000 (39.37)d2 405 (15.94) 506 (19.92) 636 (25.04) 716 (28.19) 916 (36.06)d3 278 (10.94) 530 (20.87) 630 (24.80) 760 (29.92) 840 (33.07) 1040 (40.94)d4 720 (28.35) 890 (35.04) 1090 (42.91)d5 14 (0.55) 14 (0.55) 14 (0.55)Quantityof holes 20 24 32

h 560 (22.05) 785 (30.91) 940 (37) 1130 (44.49) 1450 (57.09) 1880 (74.02)h1 250 (9.84) 400 (15.75) 470 18.5) 620 (24.41) 870 (34.25) 1275 (50.2)h2 68 (2.68) 88 (3.46) 92 (3.62) 97 (3.82) 102 (4.02) 102 (4.02)h3 75 (2.95) 102 (4.02) 106 (4.17) 110 (4.33) 116 (4.57) 116 (4.57)h4 45 (1.77) 68 (2.68) 68 (2.68) 74 (2.91) 70 (2.76) 70 (2.76) 45 30 30 30 20 25 1 20 30 30 30 30 45 2 25 3 15

Dimensional drawing for the DIP 3000 [top left], DIP 8000 to DIP 20 000 [top middle], DIP 30 000 [top right] and DIP 50 000 [bottom right]; Dimensions in brackets ( ) are in inch

d1d

DNh3h2

DN1

h1

h4

h

d3d2

a

1

a1

b

b1

d4d5G3/8"

G1/2"

OL EYB L D

d1d

DNh3h2

DN1

h1

h4

h

d3d2

a

3

a1

b

b12

1

d4d5

G3/8"

G1/2"

d1d

DNh3h2

DN1

h1

h4

h

d3d2

a

1

a1

b

b1

d4d5G3/8"

G1/2"

10-62 4 6 8

2

4

68

10-5 10-4 10-3 10-2mbarIntake pressure

Pum

ping

spe

ed

103

102

104

105

l x s-1

DIP 8000DIP 12000DIP 20000

DIP 50000DIP 30000

DIP 3000

Pumping speed characteristics of the DIP pumps as a function of intake pressure


Ordering Information

Technical Data

High vacuum / forevacuum connection DN

Pumping speed for air 1)below 1 x 10-4 mbar l x s-1

Operating range mbar (Torr)

Ultimate total pressure 1) mbar (Torr)

Max. permissible forevacuum pressurembar (Torr)

Pump fluid filling, min. / max. l (qts)

Mains connectionStandard EURO, 50/60 Hz VStandard Americas, 50/60 Hz VSpecial, 50/60 Hz V

Heating power kW

Number of heating cartridges

Heating up time min

Cooling water (minimum)for pump 2) l x h-1 (gal/min)for cold cap baffle l x h-1 (gal/min)max. supply pressure bar (psig)

Number of cooling circuits(including cold cap baffle)

Cooling water connection for pump G (BPS)for cold cap baffle G (BPS)

Weight, approx. kg (lbs)

Recommended backing pump 3)at operating pressures > 10-4 mbar (> 0.75 x 10-4 Torr)at operating pressures < 10-4 mbar (< 0.75 x 10-4 Torr)

250 ISO-K / 63 ISO-K 400 ISO-K / 63 ISO-K 500 ISO-K / 100 ISO-K

3 000 8 000 12 000

< 10-2 to 10-7 < 10-2 to 10-7 < 10-2 to 10-7(0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7)

< 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7)

6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1)

1.0 / 1.4 (1.1 / 1.5) 1.7 / 3.4 (1.8 / 3.6) 2.4 / 5.3 (2.5 / 5.6)

230 ~ 1 Ph 400 ~ 3 Ph Y 400 ~ 3 Ph Y230 ~ 1 Ph 460 ~ 3 Ph Y 460 ~ 3 Ph Y

230 ~ 3 Ph V 230 ~ 3 Ph V2.4 4.8 7.2

2 6 9

< 25 < 25 < 25

160 (0.7) 290 (1.28) 500 (2.2)20 (0.09) 30 (0.13) 50 (0.22)

6 (87) 6 (87) 6 (87)

2 2 2

3/8" 1/2" 1/2"1/4" 3/8" 3/8"

29 (64) 70 (154) 102 (225)

TRIVAC D 65 B + W 251 DK 200 + W 251 DK 200 + W 501

TRIVAC NT 25 TRIVAC D 65 B + W 251 TRIVAC D 65 B + W 251

Oil diffusion pumpStandard EUROStandard AmericasSpecial

Astrotorus baffle

Over-temperature protection switch

Contact thermometer

Resistance thermometer Pt100 sensor

Pump fluid 4)

1) Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluid2) The required quantity of cooling water refers to VT = 10 C (50 F). The discharge temperature should not exceed 30 C (86 F)3) Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with

Roots vacuum pumps (RUVAC) in pump systems4) Oil must be puchased separately

DIP 3 000 DIP 8 000 DIP 12 000

DIP 3 000 DIP 8 000 DIP 12 000

Part No. Part No. Part No.

222 10 222 20 222 25222 10 500 670 500 591

500 649 500 651

227 50 227 60 227 65

122 84 122 84 122 84

218 81 218 81 218 81

200 02 958 200 02 958 200 02 958

see Catalog Part Oils / Greases / Lubricants LEYBONOL



Technical Data

High vacuum / forevacuum connection DN

Pumping speed for air 1)below 1 x 10-4 mbar l x s-1




Pump fluid filling, min. / max. l (qts)

Mains connectionStandard EURO, 50/60 Hz VStandard Americas, 50/60 Hz VSpecial, 50/60 Hz V

Heating power kW


Heating up time min

Cooling water (minimum)for pump 2) l x h-1 (gal/min)for cold cap baffle l x h-1 (gal/min)max. supply pressure bar (psig)


Cooling water connectionfor pump G (BPS)for cold cap baffle G (BPS)



630 ISO-F / 100 ISO-K 800 ISO-F / 160 ISO-K 1000 ISO-F / 160 ISO-K

20 000 30 000 50 000

< 10-2 to 10-7 < 10-2 to 10-7 < 10-2 to 10-7(0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7)

< 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7)

6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1)

6.0 / 9.0 (6.3 / 9.5) 7.0 / 15.0 (7.4 / 15.9) 12.0 / 25.0 (12.7 / 26.4)

400 ~ 3 Ph Y 400 ~ 3 Ph Y 400 ~ 3 Ph Y460 ~ 3 Ph Y 460 ~ 3 Ph Y 460 ~ 3 Ph Y230 ~ 3 Ph V 230 ~ 3 Ph V 230 ~ 3 Ph V

12 18 24

12 18 24

< 25 < 30 < 30

600 (2.6) 900 (4.0) 1500 (6.6)60 (0.26) 80 (0.35) 150 (0.66)

6 (87) 6 (87) 6 (87)

2 3 3

1/2" 1/2" 1/2"3/8" 3/8" 3/8"

172 (379) 296 (653) 560 (1235)

SV 200 + W 501 SV 300 + W 1001 SV 630 B + W 2001

TRIVAC D 65 B + W 251 DK 200 + W 251 DK 200 + W 501

Oil diffusion pumpStandard EUROStandard AmericasSpecial

Astrotorus baffle


Contact thermometer


Pump fluid 4)

1) Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluid2) The required quantity of cooling water refers to VT = 10 C (50 F). The discharge temperature should not exceed 30 C (86 F)3) Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with


DIP 20 000 DIP 30 000 DIP 50 000

DIP 20 000 DIP 30 000 DIP 50 000


222 30 222 35 222 40500 882 500 665 500 728500 652 500 653 500 654

227 70 227 75 227 80

122 84 122 84 122 84

218 81 218 81 218 81

200 02 958 200 02 958 200 02 958



LEYBOJET 630Advantages for the User

- High and stable pumping speedwell into medium vacuum range

- Low ultimate pressure

- Low oil backstreaming due to inte-grated water-cooled cold cap baffle

- High forevacuum tolerance

- Each heating cartridge is protectedby a separate circuit breaker

- In maintaining the well provenheating system - heating insert withthermally conducting panels andheating cartridges - the LEYBOJET630 is now equipped with an addi-tional ejector nozzle for the purposeof obtaining a stable pumpingspeed well into the medium vacuum range


The principal areas of application of theLEYBOJET 630 are modern sputteringprocesses as well as vacuum meltingand drying plants.

Supplied Equipment

The LEYBOJET 630 are supplied readyfor connection but without the filling ofpump fluid.

The inside of the pump is cleaned be-fore delivery to such an extent that it is free of oil. The inside is evacuated.High and forevacuum flanges areequipped with gaskets, centering rings,shipping flanges, and clamping com-ponents.

LEYBOJET 630

The oil diffusion pumps from OerlikonLeybold Vacuum are well proven inindustriall high vacuum applications.

They excel through their excellentvacuum performance data and owingto their rugged design are a reliablecomponent in many medium and highvacuum systems.

The water-cooled LEYBOJET 630 wasdeveloped especially with the mediumvacuum in mind.

10-4 10-3 10-2 10-10

2.000

4.000

6.000

8.000

10.000

12.000

14.000

10-5

Pum

ping

Spe

ed [l/

s]

Intake Pressure pHV [mbar]

Pumping speed curve of the LEYBOJET 630 as a function of the intake pressure

Dimensional drawing for the LEYBOJET 630

DN 160 ISO-K

D1

DN 630 ISO-FD2

D

l1

l

l2

D3

D4D5

G1/2"

H2

H1

H

30 45

30

15

27

15

G3/8"

LEYBOJET 630 D D1 D2 D3 D4 D5 H H1 H2mm 750 720 651 180 585 625 1144 650 423

in. 29.53 28.35 25.63 7.09 23.03 24.61 45.04 25.60 16.65l l1 l2

mm 1215 604 24in. 47.83 23.78 094

Top View


Technical Data

High vacuum connection DN

Forevacuum connection DN

Pumping speed for air 1)at 1 x 10-2 mbar l x s-1at 1 x 10-3 mbar l x s-1< 1 x 10-4 mbar l x s-1




Pump fluid fillung, min. / max. l (qts)

Mains connection 50/60 Hz V

Heating power kW


Heating up time min

Cooling watermin. throughput 2) l x h-1 (gal/min)connection G


Cooling water connection for pump G (BPS)for cold cap baffle G (BPS)



630 ISO-F

160 ISO-K

1 70012 00012 000

< 10-2 (< 0.75 x 10-2)

< 5 x 10-7 (< 3.75 x 10-7)

6 x 10-1 (4.5 x 10-1)

5.0 / 8.0 (5.3 / 8.5)

400, 3 Ph

10.8

9

< 30

500 (2.2)1/2"

2

1/2"3/8"

145 (320)

SV 200 + W 501

TRIVAC D 65 B + W 251

LEYBOJET 630


Oil diffusion pumpLEYBOJET 630

Astrotorus baffle

Water flow monitorLR 20


Contact thermometer


Pump fluid 4)

1) Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluid2) The required quantity of cooling water refers to T = 10 C (50 F). The discharge temperature should not exceed 30 C (86 F)3) Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with


LEYBOJET 630

Part No.

502 180

227 70

122 83

122 84

218 81

200 02 958



Astrotorus Baffles

Section through an astrotorus baffle

The cooling inserts of the astrotorusbaffles are made of copper, whereasthe housing and the connection flangeare made of standard steel.

14024

2d

2d

a

130

DN1d

d

24Hose nozzle, 14 mm ( 0.55 in.) dia.

57 14024

2d

2d

a

130

DN1d

d

24Hose nozzle, 14 mm ( 0.55 in.) dia.

57

Dimensional drawing for the astrotorus baffle ISO-K (left) and ISO-F (right)

DN a b d d1 d2250 ISO-K mm 265 30 416 290

in. 10.4 0.18 16.4 11.4 400 ISO-K mm 362 120 512 450

in. 14.25 4.72 20.2 17.7 500 ISO-K mm 412 120 612 550

in. 16.22 4.72 24.1 21.7 630 ISO-F mm 440 750 720 14

in. 17.32 29.53 28.35 0.55800 ISO-F mm 546 920 890 14

in. 21.5 36.22 35.04 0.551000 ISO-F mm 599 1120 1090 14

in. 23.58 44.09 42.91 0.55

DN Quantity h h1 1250 ISO-K mm 195 97

in. 7.68 3.82 400 ISO-K mm 193 96

in. 7.6 3.78 500 ISO-K mm 193 96

in. 7.6 3.78 630 ISO-F mm 20 140 18 9

in. 20 5.5 18 9 800 ISO-F mm 24 140 15 7,5

in. 24 5.5 15 7,5 1000 ISO-F mm 32 140 11.25 5.625

in. 32 5.5 11.25 5.625

Accessories for Oil Diffusion Pumps




Technical Data

Connection to pump DIP

HV connection flanges DN

Throttling of the pumping speed, approx. %

Conductance l x s-1

Weight kg (lbs)

3 000 8 000 12 000

250 ISO-K 400 ISO-K 500 ISO-K

30 30 30

3 000 9 000 12 000

25.0 (55.2) 30.0 (66.2) 65.0 (143.5)


227 50

227 60

227 65

Astrotorus baffle250 ISO-K400 ISO-K500 ISO-K

Astrotorus Baffles

Technical Data

Connection to pump DIP

HV connection flanges DN

Throttling of the pumping speed, approx.%

Conductance l x s-1

Weight kg (lbs)

20 000 30 000 50 000

630 ISO-F 800 ISO-F 1000 ISO-F

30 30 30

18 000 28 000 50 000

120.0 (264.9) 170.0 (375.3) 190.0 (419.4)


227 70

227 75

227 80

Astrotorus baffle0630 ISO-F0800 ISO-F1000 ISO-F

Astrotorus Baffles

Astrotorus Baffles

Astrotorus Baffles


The operational status of the diffusionpump depends on the temperature ofthe pump fluid in the pump boiler.Through temperature dependentswitching components which areinserted into the pump boiler it is pos-sible to monitor the operational statusof the diffusion pump and signal itsstatus to a process controller.

For this, the diffusion pump requirestwo thresholds. Depending on the typeof pump, the upper threshold shouldbe between 180 and 200 C (356 and 392 F) and the lower thresholdbetween 90 and 100 C (194 and 212 F).

The upper threshold indicates that thediffusion pump is ready for operationand thus actuates certain devices, forexample opening of the high vacuumvalve ahead of the diffusion pump.

The lower threshold indicates that thediffusion pump has cooled down tosuch an extent that the backing pumpand the cooling water supply may beswitched off.

Over-temperature protectionswitches are used to monitor the temperature of the cooling water in thecooling water circuit of the diffusionpumps. When the temperature rises tounacceptably high levels (for examplewhen the cooling water supply fails)the heater in the diffusion pump isswitched off (correct electrical connec-tion to the main supply is required).The use of over-temperature protectionswitches avoids unnecessary alarmsthat may be triggered by contaminatedwater when only a water flow monitoris used. The over-temperature protec-tion switch is screwed on to a contactplate which is soldered to the coolingpipe on the pumps body.

Max. switching current: 5 A (230 V,50/60 Hz).

Contact thermometer with a rangefrom 0 to 400 C (32 to 752 F).Through a trailing pointer twoswitching thresholds may be set upindependently. The current oil tempe-rature and the thresholds which havebeen set up can be read off at thelocation of the diffusion pump. Thecontacting thermometer is not suitedfor remote signalling of temperatures.

Resistance thermometer Pt100 sen-sor. The measurement range of thissensor depends on the temperaturedisplay unit used by the customerwhere also the required thresholds areset up. The Pt100 sensor is ideal forremote signalling of temperatures.

400

350

250

300

200150

100

50

0

d1

c

d2 d3a3

a2

a

l1d

l

a1b

30

Dimensional drawing for the contact thermometer

d2

l3

d1

l4

l

l2

l1

d d3

Dimensional drawing for the resistance thermometer Pt100 sensor

Part No.

122 84

218 81

200 02 958



Contact thermometer(Measurement range 0 to +400 C (+32 to +752 F), Rating at 220 V AC: 250 mA [resistive load], Weight: 1.7 kg (3.7 lbs))


Monitoring Instruments

a a1 a2 a3 b c d d1 d2 d3 l l1mm 95.0 119.5 17.5 62.0 101.5 92.0 14.0 12.0 9.0 G 1/2 170.0 33.0in. 3.74 4.70 0.69 2.44 4.00 3.62 0.55 0.47 0.35 G 1/2 6.70 1.30

d d1 d2 d3 l l1 l2 l3 l4mm 12 6 G 1/2 22 230 115 170 25 30in. 0.47 0.24 G 1/2 0.87 9.06 4.53 6.69 0.98 1.18

Temperature dependant Switching Components forAutomatic Pump System Control


Adsorption Traps with Aluminium Oxide InsertAdsorption traps are installed in allthose cases where an oil-free vacuum is to be produced with oil-sealed vacuum pumps.

Adsorption trap (left) and insert (right)


Advantages to the User

- Backstreaming of oil is reduced by 99%

- Long service life

- High conductance

- Filling can be easily exchanged

- Improvement in the ultimate pres-sure attained by backing pumps byone order of magnitude

- Stainless steel housing and insert

- NBR gasket


- Product of an oil-free vacuum

Supplied Equipment

- Complete with insert

- Without adsorbent

d

1

DN

a

h

1h

DNa

Technical Data Adsorption Traps

16 ISO-KF 25 ISO-KF 40 ISO-KF

Conductance at 10-2 mbar (Torr)l x s-1

Service live with Al oxide Months

Al oxide filling l (qts)


4.0 6.0 12.0

3 3 3

0.5 (0.53) 1.0 (1.06) 2.0 (2.1)

1.3 (2.9) 1.3 (2.9) 4.0 (8.8)

Adsorption trap

Activated aluminum oxide in tin1.6 l (approx. 1.2 kg (2.65 lbs))


854 14 854 15 854 16

854 10 854 10 854 10

Residual gas spectrum; top ahead of a rotaryvacuum pump, bottom ahead of a rotary vacuumpump with adsorption trap

Dimensional drawing for the adsorption traps

DN a a1 d h h116 ISO-KF mm 82 82 135 147 32

in. 3.23 3.23 5.31 5.79 1.2525 ISO-KF mm 102 102 175 155 33

in. 4.02 4.02 6.89 6.10 1.2640 ISO-KF mm 132 65 235 160 20

in. 5.19 2.56 9.25 6.3 0.79

Adsorption Traps

16 ISO-KF 25 ISO-KF 40 ISO-KF


Notes

dip vacuum

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