deal-grove data sheet - chris mack · deal-grove model: , - for (111) silicon table and gra phs...

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Deal-Grove Model: , - For (111) silicon Table and Graphs from S. Campbell, Fabrication Engineering at the Micro- and Nanoscale, 3 rd edition.

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Page 1: Deal-Grove Data Sheet - Chris Mack · Deal-Grove Model: , - For (111) silicon Table and Gra phs from S. Campbell, Fabrication Engineering at the Micro - and Nanoscale, 3rd edition

Deal-Grove Model: �� , �

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- For (111) silicon

Table and Graphs from S. Campbell, Fabrication Engineering at the Micro- and Nanoscale, 3rd

edition.

Deal-Grove Model Predictions

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