crc mems handbook - stanford microfluidics laboratorymicrofluidics.stanford.edu/publications... ·...

39

Upload: ngophuc

Post on 12-May-2018

216 views

Category:

Documents

1 download

Report

Download

Embed Size (px):

TRANSCRIPT

Page 1: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 2: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 3: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 4: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 5: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 6: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 7: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 8: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 9: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 10: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 11: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 12: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 13: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 14: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 15: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 16: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 17: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 18: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 19: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 20: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 21: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 22: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 23: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 24: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 25: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 26: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 27: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 28: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 29: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 30: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 31: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 32: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 33: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 34: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 35: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 36: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 37: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 38: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

Page 39: CRC MEMS Handbook - Stanford Microfluidics Laboratorymicrofluidics.stanford.edu/Publications... · · 2012-08-13The MEMS Handbook FIGURE 6.6 T-Sensor ... suspensions to produce

MEMS and Reliability - Carnegie Mellon Universitykoopman/des_s99/mems/presentation.pdf · What is MEMS(MicroElectroMechanical Systems) • Microelectromechanical systems (MEMS): –

ME 141B: The MEMS Class Introduction to MEMS …sumita/courses/Courses/ME141B/ME141… · ME 141B: The MEMS Class Introduction to MEMS and MEMS Design Sumita Pennathur UCSB . Outline

Handbook of Silicon Based MEMS Materials and Technologies

Application domain: the MEMS RF : a reviegalayko/MEMS/cour3_4pages.pdf · 1 MEMS RF : a review Master SESI, UE MEMS, Cours 3 Dimitri Galayko 2 Outline • Introduction • MEMS RF

MEMS Packaging HandBook

The MEMS Handbook - GBV

OptoplexTM MEMS Tunable Filter Products - Optoplex ... MEMS Tunable Filters...Optoplex C O R P O R A T I O N TM MEMS Tunable Filter Products MEMS Technology Optoplex’s MEMS Tunable

Introduction to MEMS (Microelectromechanical Systems)mil.ee.nctu.edu.tw/course/MEMS/MEMS__2_20_2013.pdf · What Are MEMS ? • MEMS: Microelectromechanical Systems are miniature,

RF MEMS Devices - ibersensor.org MEMS... · RF MEMS Devices MEMS Switch and Tunable Capacitor Dr. Jeffrey DeNatale, Manager, MEMS Department Electronics Division [email protected]

MEMS Microphones - Future Electronicsmedia.futureelectronics.com/doc/CUI-Devices-MEMS... · 02 MEMS Microphone Outputs 03 Key Specifications 04 MEMS Microphone Arrays 05 Available

Statistical Analysis Tools GET/MEMS/*MEMS Elliott Linder

MEMS AT LETI: NEW TRENDS - SEMI.ORG Robert - MEMS... · MEMS AT LETI: NEW TRENDS Ph. Robert Head of Section –MEMS & Packaging July 2014 © CEA. All rights reserved Outline MEMS

ME 141B: The MEMS Class Introduction to MEMS and MEMS …sumita/courses/... · ME 141B: The MEMS Class Introduction to MEMS and MEMS Design Sumita Pennathur UCSB . Outline • Class

Bosch Sensortec - Consumer MEMS Technology - IoT ONE · PDF fileAutomotive Electronics Bosch Sensortec MEMS for automotive applications MEMS for ... Consumer MEMS Technology Bosch

MEMS Materials and Processes Handbook - Home - …978-0-387-47318-5/1.pdf · MEMS Materials and Processes Handbook 123. Editors ... microturbine, Analog Devices ... culminated in

Current MEMS Technology and MEMS Sensors

ME 141B: The MEMS Class Introduction to MEMS and MEMS Design

Vibration Monitoring, Testing, and Instrumentationpreview.kingborn.net › 646000 › d1a74678d91943e5ba1d5e... · The MEMS Handbook, Second Edition MEMS: Introduction and Fundamentals

ME 141B: The MEMS Class Introduction to MEMS and …sumita/courses/Courses/ME141B/ME141… · ME 141B: The MEMS Class Introduction to MEMS and MEMS ... Batch PCR • Daniel reactor

Introduction to MEMS and MEMS Fabricationcse.secs.oakland.edu/hanna/cse495-595SU06/Lectures/GLin1_Introduction.pdf · Introduction to MEMS and MEMS Fabrication Gisela Lin, Ph.D. Department

MEMS and Sensors Whitepaper Series · 2019-01-23 · MEMS and Sensors Whitepaper Series An Overview of MEMS and non-MEMS High Performance Gyros January 2013 Whitepaper Topics: MEMS,

MEMS - Indico · MEMS Applications & Market What is MEMS? MEMS Technology For Accelerometer, Gyroscope, E-compass, Microphone For Pressure Sensor Conclusion 2. ST: ONE STOP MEMS SUPPLIER

Tenth Annual MEMS Technology Symposium - meptec.org MEMS Proceedings.pdf · Tenth Annual MEMS TECHNOLOGY SYMPOSIUM Sensors: A Foundation for Accelerated MEMS Market Growth to $1 Trillion

MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

Polyimide reinforcement of capped MEMS devices : … reinforcement of capped MEMS devices : ... Polyimide reinforcement of capped MEMS devices : ... 1.2 MEMS resonator as a timing

MEMS and Sensors Whitepaper Series - Fortronicold.fortronic.it/user/file/Tronics-MEMS-and-non-MEMS...MEMS and Sensors Whitepaper Series An Overview of MEMS and non-MEMS High Performance

MEMS 2002 MEMS Fabrication Sensor Review

•Overview • Making MEMSMaking MEMS • Using MEMS ...pioneer.netserv.chula.ac.th/~ksongpho/584/8.pdf · MEMS •Overview • Making MEMSMaking MEMS • Using MEMS • Integrating

Introduction to MEMS and MEMS PRO

Introduction to MEMS and Micro devices for Photonics · 2018. 10. 15. · MEMS proof - of-concept › MEMS back-end services › MEMS manufacturing › MEMS & Micro Devices services

3rd Quarter 2013Lesson 13The Promised Revival God's Mission Completed

MEMS Silicon MEMS Piezoresistive Accelerometer

MEMS Start-ups in Silicon Valley - sites.ieee.orgsites.ieee.org/scv-mems/files/2018/08/Kurt_Petersen-SFBA-MEMS-Final.pdf · Early MEMS Companies in SV •National Semiconductor –Pressure

VACUUM PACKAGING FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) · Vacuum Packaging, Microelectromechanical Systems, MEMS, MEMS Sensors, Inertial MEMS MEMS Accelerometers, MEMS Gyros,

Motion MEMS and environmental sensor expansion board ......• LIS2MDL: MEMS 3D magnetometer (±50 gauss) • LIS2DW12: MEMS 3D accelerometer (±2/±4/±8/±16 g) • LPS22HH: MEMS