the mems handbook - gbv
TRANSCRIPT
The
MEMS Handbook Edited by
Mohamed Gad-el-Hak University of Notre Dame
(g) CRC PRESS
Boca Raton London New York Washington, D.C.
Contents
Preface v
Editor-in-Chief vii
Contributors ix
I Background and Fundamentals
1 Introduction Mohamed Gad-el-Hak 1-1
2 Scaling of Micromechanical Devices William Trimmer
and Robert H. Stroud 2-1
3 Mechanical Properties of MEMS Materials William N. Sharpe, Jr. 3-1
4 Flow Physics Mohamed Gad-el-Hak 4-1 5 Integrated Simulation for MEMS: Coupling Flow-
Structure-Thermal-Electrical Domains Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko and Kartikeya Mayaram 5-1
6 Liquid Flows in Microchannels Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago and Joshua I. Molho 6-1
7 Burnett Simulations of Flows in Microdevices Ramesh К Agarwal
and Keon-Young Yun 7-1
8 Molecular-Based Microfluidic Simulation Models AH Beskok 8-1
9 Lubrication in MEMS Kenneth S. Breuer 9-1 xiii
1 0 Physics of Thin Liquid Films Alexander Own 10-1
1 1 Bubble/Drop Transport in Microchannels Hsueh-Chia Chang 11-1
1 2 Fundamentals of Control Theory Bill Goodwine 12-1
1 3 Model-Based Flow Control for Distributed
Architectures Thomas R. Bewley 13-1
1 4 Soft Computing in Control Mihir Sen and Bill Goodwine 14-1
II Design and Fabrication
1 5 Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany 15-1
1 6 MEMS Fabrication Marc J. Madou 16-1
1 7 LIGA and Other Replication Techniques Marc J. Madou 17-1
1 8 X-Ray-Based Fabrication Todd Christenson 18-1
1 9 Electrochemical Fabrication (EFAB™) Adam L. Cohen 19-1
2 0 Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS Roberts. Okojie .' 20-1
2 1 Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide Glenn M. Beheim 21-1
2 2 Microfabricated Chemical Sensors for Aerospace Applications Gary W. Hunter, Chung-Chiun Liu and Darby B. Makel 22-1
2 3 Packaging of Harsh-Environment MEMS Devices Liang-Yu Chen and Jih-Fen Lei 23-1
xiv
Ill Applications of MEMS
2 4 Inertial Sensors Paul L. Bergstrom and Gary G. Li 24-1
2 5 Micromachined Pressure Sensors Jae-Sung Park, Chester Wilson and Yogesh B. Gianchandani 25-1
2 6 Sensors and Actuators for Turbulent Flows Lennart Löfdahl and Mohamed Gad-el-Hak 26-1
2 7 Surface-Micromachined Mechanisms Andrew D. Oliver
and David W. Plummer 27-1
2 8 Microrobotics Thorbjörn Ebefors and Göran Stemme 28-1
2 9 Microscale Vacuum Pumps E. Phillip Muntz and Stephen E. Vargo 29-1
3 0 Microdroplet Generators Fan-Gang Tseng 30-1
3 1 Micro Heat Pipes and Micro Heat Spreaders G.P. "Bud" Peterson 31-1
3 2 MicroChannel Heat Sinks Yitshak Zohar 32-1
3 3 Flow Control Mohamed Gad-el-Hak 33-1
IV The Future
3 4 Reactive Control for Skin-Friction Reduction Haecheon Choi 34-1
3 5 Towards MEMS Autonomous Control of Free-Shear Flows Ahmed Naguib 35-1
3 6 Fabrication Technologies for Nanoelectromechanical Systems Gary H. Bernstein, Holly V. Goodson and Gregory L. Snider 36-1
Index 1-1
XV