confronto 340e - 382. mappe a –200 v yield: 74 % 340e 21 % yield: 21 % 382

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CONFRONTO 340e - 382

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Page 1: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

CONFRONTO340e - 382

Page 2: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Mappe a –200 V

Yield: 74 %

340eYield: 21 %

382

Page 3: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Mappe a -600V

Yield 68%Yield 16%

Page 4: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Caratteristiche dirette

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.01E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.01

0.1

1

SAMPLE 382n = 1.06 + 0.03 = (1.60 +0.03) eV

Cur

rent

(A

)

Forward bias (V)0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0

1E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.01

0.1

1

SAMPLE 340en = 1.10 + 0.04 = (1.54 + 0.05) eV

Cur

rent

(A

)

Forward bias (V)

Page 5: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

1.4 1.6 1.8 2.0 2.20.0

0.2

0.4

0.6

N

orm

aliz

ed Y

ield

(%

)

Voltage at I = 0.2 A

340e 382

Page 6: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Electron mobility

1.0 1.2 1.4 1.6 1.80

200

400

600

800

literature experimental

Ele

ctro

n m

obili

ty (

cm2 /V

s)

Dopant concentration (x 1016

cm-3)

Page 7: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Correnti inverse a –200V

-9 -8 -7 -60.0

0.2

0.4

0.6

0.8

1.0

Nor

mal

yzed

yie

ld

Sample: 340e

Iavg

= 3.25 x 10-8 A

10 10 10 10

Reverse leakage current at -200V (A)

-9 -8 -7 -60,0

0,2

0,4

0,6

0,8

1,0

Nor

mal

yzed

yie

ld

Sample: 382

Iavg= 9 x 10-9 A

10 10 10 10

Reverse leakage current at -200V (A)

Page 8: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Correnti inverse a -600V

-7 -6 -5 -40.0

0.2

0.4

0.6

0.8

1.0

Nor

mal

yzed

yie

ld

Sample: 340e

Iavg= 1.7 x 10-5 A

10 10 10 10

Reverse leakage current at -600V (A)

-7 -6 -5 -40.0

0.2

0.4

0.6

0.8

1.0

Nor

mal

yzed

yie

ld

Sample: 382

Iavg

= 2 x 10-6 A

10 10 10 1010 10 10 10

Reverse leakage current at -600V (A)

Page 9: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Caratteristiche inverse

-600 -500 -400 -300 -200 -100 010-10

10-9

10-8

10-7

10-6

10-5

10-4

340e

I (A

)

Reverse bias (V)-600 -500 -400 -300 -200 -100 0

10-10

10-9

10-8

10-7

10-6

1x10-5

1x10-4

382

I (A

)

Reverse bias (V)

Page 10: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Disuniformità 382

-600 -500 -400 -300 -200 -100 010-10

10-9

10-8

10-7

10-6

10-5

10-4

382 da 2 a 29 da 338 a 364

I (A

)

Reverse bias (V)

Page 11: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

-600 -500 -400 -300 -200 -100 010

-10

10-9

10-8

10-7

10-6

10-5

10-4

up

flat

382 #349 N

D = 1.73E16

#350 ND = 1.69E16

#343 ND = 1.52E16

#307 ND = 1.45E16

#291 ND = 1.33E16

#248 ND = 1.30E16

#228 ND = 1.22E16

the rest from 1.08E16 to 1.19E16

I (A

)

Reverse bias (V)0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8

10-7

10-6

10-5

10-4

Sample 382

I at

V=-

600

V (

A)

ND (1016 cm-3)

Non si apprezzano differenze significative nelle caratteristiche dirette al variare della concentrazione di drogante

Page 12: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

1.2 1.4 1.6 1.8 2.00

1

simulated

Dopant concentration

1.08E16 (cm-3)

1.73E16 (cm-3)

Cur

rent

(A

)

Forward bias (V)1.0 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8

0.0

0.2

0.4

0.6

0.8

1.0 experimental simulated

I on(1

.5 V

) (A

)

Dopant concentration (x 1016

cm-3)

Page 13: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

1.0 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.810

4

105

106

107

I on(2

V)/

I off(-

600

V)

Dopant concentration (x 1016

cm-3)

1.0 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.80.70

0.75

0.80

0.85

0.90

0.95

1.00

1.05

1.10errato

I on(2

V)

Dopant concentration (x 1016

cm-3)

Page 14: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

1x1015

10-7

10-6

10-5

10-4

Sample 382

Rev

erse

cur

rent

at V

= -6

00 V

(A

)

Trap concentration (cm-3)

Correlazione tra intensità di corrente e difetti

1x1015

0.4

0.5

0.6

0.7

0.8Sample 382

Forw

ard

curr

ent a

t V=

1.5

V (

A)

Trap concentration (cm-3)

Page 15: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

-600 -500 -400 -300 -200 -100 010

-9

10-8

10-7

10-6

10-5

10-4

382 diode n.13 simile al 41

ND = 1.19 x 1016

(cm-3)

T = 25°C

300°C

25°C

Rev

erse

cur

rent

(A)

Reverse bias (V)

-600 -500 -400 -300 -200 -100 0

1E-10

1E-9

1E-8

1E-7

1E-6

1E-5 Diode #184

25 C 50 C 75 C 100 C 125 C 150 C 175 C 200 C 225 C 250 C

I (A

)

reverse bias (V)

-600 -500 -400 -300 -200 -100 010-9

10-8

10-7

10-6

10-5

10-4

25°C

300°C

382 diode 248

ND = 1.30 x 1016

(cm-3)

T = 25°C

Rev

erse

cur

rent

(A

)

Reverse bias (V)

Page 16: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

-600 -500 -400 -300 -200 -100 010

-10

10-9

10-8

10-7

10-6

10-5

10-4

300°C

25°C

382 SAMPLE 242

I (A

)

Reverse bias (V)

-600 -500 -400 -300 -200 -100 010

-10

10-9

10-8

10-7

10-6

10-5

10-4

200°C

25°C

382-sample 347

ND=1.6E16/cm

3

I (A

)

Reverse bias (V)

Page 17: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

-200 -150 -100 -50 010

-11

10-10

10-9

10-8

10-7

340e 237 N

D=1.00e17

362 ND=1.44e16

282 ND=1.35e16

29 ND=1.34e16

89 ND=1.30e16

107 ND=1.29e16

I (A

)

Reverse bias (V)

Page 18: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

-600 -500 -400 -300 -200 -100 010

-10

10-9

10-8

10-7

10-6

10-5

10-4

340e 237 N

D=1.00e17

362 ND=1.44e16

282 ND=1.35e16

89 ND=1.30e16

107 ND=1.29e16

29 ND=1.34e16

I (A

)

Reverse bias (V)

Page 19: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.010-10

10-9

10-8

10-7

10-6

10-5

10-4

10-3

10-2

10-1

100

340e 237 N

D=1.00e17

362 ND=1.44e16

282 ND=1.35e16

29 ND=1.34e16

89 ND=1.30e16

107 ND=1.29e16

I (A

)

Reverse bias (V)

Non si notano correlazioni evidenti tra le caratteristiche dirette e le concentrazioni di drogante

Page 20: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Breakdown

-1000 -800 -600 -400 -200 010-9

10-8

10-7

10-6

1x10-5

1x10-4

10-3

10-2

382 (229-191) 340e (76-237up)

Cur

rent

Den

sity

(A

/cm

2 )

Reverse Bias (V)

Page 21: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

103 104 105 106 1071E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.01

0.1

1 382 340e

Cur

rent

den

sity

(A

/cm

2 )

Electrical field (V/cm)

Page 22: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

0,0 0,5 1,0 1,5 2,01E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0,01

0,1

1 382 340e

Cur

rent

den

sity

(A

/cm

2 )

Electrical field (MV/cm)

Page 23: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Barrier height vs ideality factor

1.00 1.02 1.04 1.06 1.08 1.10 1.121.50

1.52

1.54

1.56

1.58

1.60

1.62

1.64

1.66

1.68

1.70

382 340e

qB (

eV)

Ideality factor

Page 24: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Richardson plot

18 20 22 24 26 28 30 32 34 36 38 4010

-2810

-2710

-2610

-2510

-2410

-2310

-2210

-2110

-2010

-1910

-1810

-1710

-1610

-1510

-14

340e (118)

A*= (25 + 7) A/cm

2K

2

qB=(1.56 + 0.006) eV

382 (98)

A*= (41 + 25) A/cm

2K

2

qB=(1.63 + 0.009) eV

I s/T2 (

A/K

2 )

1/kBT (eV

-1)

Page 25: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Dopant concentration

0 10 20 30 40 501.0

1.2

1.4

1.6

1.8

2.0

382 340e

N c

once

ntra

tion

(x 1

016cm

-3)

Flat distance (mm)

Page 26: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.41E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.01

0.1

1

382diode n.185 N

D= 1.19E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

Cur

rent

(A

)

Forward bias (V)

0.6 0.8 1.0 1.2 1.41E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.01

0.1

1

382diode n.185 N

D= 1.19E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

Cur

rent

den

sity

(A

/mm

2 )

Forward bias (V)2 4 6 8

0.00

0.05

0.10

0.15

0.20

0.25

0.30 V = 1.5 V

J (A

/mm

2 )

p/A (mm-1)

2.0x10-6

4.0x10-6

6.0x10-6

8.0x10-6

1.0x10-5

V = 1 V

Diode area forward

characteristics

Page 27: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

Diode area reverse

characteristics

-200 -100 010

-11

10-10

10-9

10-8

10-7

382diode n.185 N

D= 1.15E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

Cur

rent

(A

)

Reverse bias (V)

-200 -100 010

-11

10-10

10-9

10-8

10-7

382diode n.185 N

D= 1.15E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

Cur

rent

den

sity

(A

/mm

2 )

Reverse bias (V)-200 -100 0

10-11

10-10

10-9

10-8

10-7

382diode n.185 N

D= 1.15E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

J/(p

/A)

(A/m

m)

Reverse bias (V)

Page 28: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.01E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.01

0.1

1

382diode n.185 N

D= 1.15E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

I/p

(A/m

m)

Forward bias (V)

Page 29: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.01E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.01

0.1

1

382diode n.307 N

D= 1.45E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

Cur

rent

(A

)

Forward bias (V)

382

diode n. 307

-200 -100 010

-11

10-10

10-9

10-8

10-7

382diode n.307 N

D= 1.45E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

Cur

rent

(A

)

Reverse bias (V)-200 -100 0

10-11

10-10

10-9

10-8

10-7

382diode n.307 N

D= 1.45E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

J/(p

/A)

Reverse bias (V)

Page 30: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.01E-10

1E-9

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.01

0.1

1

382diode n.343 N

D= 1.52E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

Cur

rent

(A

)

Forward bias (V)

382

diode n. 343

-200 -100 010-11

10-10

10-9

10-8

10-7

382diode n.343 N

D= 1.52E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

Cur

rent

(A

)

Reverse bias (V)-200 -100 0

10-11

10-10

10-9

10-8

10-7

382diode n.343 N

D= 1.52E16

A = 0.25 mm2

A = 1 mm2

A = 2 mm2

J/(p

/A)

Reverse bias (V)

Page 31: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

0 -100 -200 -300 -400 -500 -6001E-8

1E-7

1E-6

1E-5

1E-4

1E-3

experimental

0.25 mm2

1 mm2

2 mm2

382 sample 291ND= 1.33e16

Cu

rre

nt

de

nsi

ty (

A/c

m2 )

Reverse bias (V)0 -100 -200 -300 -400 -500 -600

1E-8

1E-7

1E-6

1E-5

1E-4

1E-3

experimental

0.25 mm2

1 mm2

2 mm2

382 sample 291N

D= 1.33e16

J/(p

/A)

(A/c

m)

Reverse bias (V)

Page 32: CONFRONTO 340e - 382. Mappe a –200 V Yield: 74 % 340e 21 % Yield: 21 % 382

0 -100 -200 -300 -400 -500 -6001E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.25 mm2

1 mm2

2 mm2

382 sample 291N

D= 1.33e16

Cur

ren

t den

sity

(A

/cm

2 )

Reverse bias (V)

0 -100 -200 -300 -400 -500 -6001E-8

1E-7

1E-6

1E-5

1E-4

1E-3

0.25 mm2

1 mm2

2 mm2

382 sample 291N

D= 1.33e16

J/(p

/A)

(A/c

m)

Reverse bias (V)