claudio piemonte firenze, 10-13 oct. 2004 resmdd 04 simulation, design, and manufacturing tests of...

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Claudio Piemonte Firenze, oct RESMDD 04 Introduction Technological development of 3D silicon sensors has recently been started at ITC-irst (Trento-Italy). Funding support from an agreement between INFN and the Autonomous Province of Trento. ITC-irst is also inside RD50 collaboration. This talk describes the work carried out so far.