chapter 03 dual-fluid spray cleaning technique for particle removal 1copyright owned by james t....

Chapter 03

Dual-Fluid Spray Cleaning Technique for Particle Removal

1Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka.

FIGURE 3.1 Cleaning process window depicting particle adhesion force distribution (left) compared with structural integrity force (right) with optimized cleaning forces located in between.

James T. Snow , Masanobu Sato , Takayoshi Tanaka

Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal

Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138

http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0

Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 2

FIGURE 3.2 Droplet jet and ultrasonic (US) shock wave forces exceeding van der Waals particle attachment force.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.3 Comparison of the shock wave drag force necessary to remove all particles with the structural strengths of bulk and deposited structures.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.4 Test structures of amorphous-Si on SION (a) and polysilicon on SiO2 (b) surfaces for AFM measurements.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.5 Cleaning process window showing less energy required to remove particles vs damage structures. Figure provided courtesy of Tae-Gon Kim and used with permission.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.6 Examples of spray cleaning nozzles.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.7 (a) Liquid drop impact on solid surface showing formation of a shock front. (b) Close-up view moments after impact and start of sideways liquid jetting.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.8 Photograph of crown resulting from droplet impact on liquid surface.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.9 Droplet impact on liquid layer showing propagation of shock waves.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.10 Pressure curves (in bar) from shock wave formed from droplet impact on a surface coated with a 10 µm liquid film at different velocities with different droplet diameters.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.11 Dynamic pressure curves (in bar) formed from droplet impact on a surface coated with a 10 µm liquid film at different velocities and droplet diameters.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.12 Averaged PRE for removal of silicon nitride particles for various fluids dispensed through Soft Spray nozzle.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.13 Droplet size and velocity distribution from atomized liquid spray with gas flow rate of 25 L/min.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.14 Schematic drawings of Nanospray (a) and Soft Spray (b) nozzles.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.15 (a) Effect of nitrogen flow on droplet size for Soft Spray and Nanospray nozzles. (b) Droplet size distribution for Soft Spray and Nanospray nozzles at 80 L/min nitrogen flow.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.16 Effect of N 2 flow on PRE and typical damage to 70 nm poly lines using Nanospray (a). Example of typical damage to 70 nm poly line (b).




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.17 High-speed camera images of droplets from Nanospray2 (a) and NanosprayÅ (b) nozzles.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.18 Droplet size (a) and velocity distributions (b) for Nanospray2 and NanosprayÅ.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.19 Damage to photoresist structures for two droplet sizes at varying velocity.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.20 Correlation of droplet energy density with number of damage sites.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.21 Threshold energy curve separating damage-free from damage-potential zone.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.22 Damage threshold curve with Nanospray2 droplets. Below the threshold curve is a damage-free zone and above the curve is the damage-potential zone.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.23 Relationship between droplet velocity and number of removed 78 nm SiO2 particles.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.24 Relationship between droplet energy density and PRE.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.25 Threshold curves for particle removal and pattern damage generation with dual-fluid Nanospray2 and NanosprayÅ nozzles.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.26 The PRE performance of Nanospray2 and NanosprayÅ nozzles for removal of PSL spheres.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


FIGURE 3.27 PRE results from removal of PSL spheres using conventional dual-fluid spray cleaning and frozen water.




http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0


chapter 03 dual-fluid spray cleaning technique for particle removal 1copyright owned by james t....

Documents

cleaning methods

masanobu sato

takayoshi tanaka chapter

cleaning process window

optimized cleaning forces

surface contamination

particle removal developments

cleanliness verification