australian national fabrication facility 2015 annual ... national fabrication facility 2015 annual...

Australian National Fabrication Facility 2015 Annual Research Showcase

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Welcome

Welcome to Brisbane and the 2015 ANFF Annual Research Showcase.

This year’s event emphasises innovation and celebrates the contribution the ANFF’s talented staff and users are making towards Australia’s future prosperity. Across our facilities, over five thousand up-and-coming researchers have been trained in micro and nano fabrication skills since our first showcase event. Those researchers are investigating and developing new ideas and solutions in fields as diverse as telecommunications, agriculture and medicine.

By equipping researchers with the skills to prototype devices and advanced materials the ANFF is playing a key role in the ability of Australia’s entrepreneurs to bring those solutions to market and realise commercial outcomes that will ensure the competitiveness of the Australian economy into the future. Our role in that future is recognised in this year’s theme ‘ANFF – the home of tomorrow’s entrepreneurs.’

Our showcase presentations spotlight some of the world class research being carried out in our facilities as well as the collaboration with industry that increasingly supports tomorrow’s entrepreneurs. I hope you will enjoy this opportunity to gain and share knowledge and explore further collaborative opportunities.

Rosie Hicks

CEO, Australian National Fabrication Facility

Cover images

Background. Brisbane city, courtesy of Brisbane Convention & Exhibition Centre.

Top. Brisbane Convention & Exhibition Centre, Grey Street Entrance, courtesy of Brisbane Convention & Exhibition Centre.

Centre. Taking Solar Paint to Market, Dr Ben Vaughn, page 36.

Bottom. Time-of-flight secondary ion mass spectrometry (ToF-SIMS): Spectroscopy – Imaging – Depth Profiling, A/Prof. Paul Pigram, page 49.

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Contents

Welcome ..................................................................................................................................... 3 Contents ...................................................................................................................................... 4 Program and abstract index.......................................................................................................... 5 Sponsorship acknowledgement .................................................................................................... 9 Photonics ................................................................................................................................... 11 Micro-manufacturing (I).............................................................................................................. 18 Sensor technology ...................................................................................................................... 24 Our entrepreneurs ..................................................................................................................... 30 Nano-electronics ........................................................................................................................ 38 Micro-manufacturing (II) ............................................................................................................. 43 Showcasing our new capabilities ................................................................................................ 49 Advanced Materials .................................................................................................................... 54 Nanobio .................................................................................................................................... 58

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Program and abstract index 5

Program and abstract index

Day one Wednesday 25 November 2015, Room B1

Time Speaker Title Page

10.15 Rosie Hicks Welcome

10.20 Photonics, Chair Prof. Michael Withford

10.25 Prof. François Ladouceur Development of optical electrodes for the brain/machine interface

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10.40 Mr Christopher Bolton Light-polarisation effects arising in optically transparent 3D printed materials

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10.55 Dr Martin Ams Optical Bragg Gratings: Sources and Sensors 13

11.10 Dr Christopher Baker A microtoroid based integrated cavity opto-electromechanical system

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11.25 Dr Nicolas Riesen Three-Dimensional C+L Band Integrated Tapered Mode Couplers for Mode-Division Multiplexing

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11.40 Dr Duk-Yong Choi 3D integration of silicon photonic circuits 16

11.55 Sponsor presentation

12.00 Lunch

1.00 Micro-Manufacturing (I), Chair A/Prof. Francesca Iacopi

1.05 Mr Jiong Yang Atomically thin optical lenses and gratings 18

1.20 Mr Afaq Piracha High-quality Ultrathin Single Crystal Diamond Membranes for MEMS and Nanophotonics

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1.35 Ms Shu Zhang Hydrodynamic of micro-objects near curved surfaces 20

1.50 Dr Marta Krasowska Droplet-Interface Collisions for Studies of Stability, Coalescence, and Spreading

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2.05 Dr Majid Warkian Inertial microfluidic systems for high-throughput cell sorting

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2.20 Afternoon tea


2.45 Our Entrepreneurs, Chair Dr Gareth Moorehead

2.50 Dr Adrian Gestos From Lab to Pilot Scale, AquaHydrex at the UOW ANFF Materials Node

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3.05 Dr Cathy Foley Are HTS Josephson junction devices ever going to be able to suitable for a mass market?

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3.20 Mr Evan Johnson Getting Down to Business – The Art of Glass Machining 32

3.35 A/Prof. Heike Ebendorff-Heidepriem

Getting Down to Business – The Trajan Story 33

3.50 Dr Li Wang Growth technology of large-scale low-cost epitaxial cubic silicon carbide and its wide applications

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4.05 A/Prof. Maryanne Large Prototyping and Entrepreneurship: making it big on the nanoscale

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4.20 Dr Ben Vaughan Taking Solar Paint to Market 36

4.35 End of presentations day one

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Day one Wednesday 25 November 2015, Room B2


1.00 Sensor Technology, Chair Dr Gino Putrino

1.05 Dr Gino Putrino Combining silicon photonics and microelectromechanical systems to create chemical & biological sensors

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1.20 Mr Haifeng Mao Microelectromechanical systems based tuneable Fabry-Perot filters for adaptive multispectral thermal imaging

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1.35 Dr Renjie Gu Recent Progress and tendency in Mercury Cadmium Telluride IR Detector Technology

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1.50 Dr Ziyuan Li Room temperature GaAsSb single nanowire photodetectors

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2.05 Ms Kun Peng Single Nanowire Terahertz Detectors with Tunable Bandwidth

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Day one Wednesday 25 November 2015, Room M1&2

6.00 Pre-dinner drinks

7.00 Research showcase and Frater Awards presentation dinner

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Program and abstract index

Day two Thursday 26 November 2015, Room B1


9.00 Prof. Thomas Nann Opportunities for international collaboration with the MacDiarmid Institute, New Zealand

9.30 Nano-electronics, Chair Prof. Andrew Dzurak

9.35 Dr Menno Veldhorst A two-qubit logic gate in silicon 38

9.50 Dr Alvaro Casas-Bedoya

CMOS-compatible RF notch filter enabled by SBS in silicon

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10.05 Mr Hemendra Kala Mobility Spectrum Analysis of Electronic Transport in Emerging and Future Nanostructured Materials and Devices

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10.20 Mr Sanjoy Nandi

NbO2 based Integrated Selector-Memory and Neuristor Circuit Elements

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10.40 Morning tea

10.55 Micro-Manufacturing (II), Chair Mr Douglas Mair

11.00 Dr Zahra. Faraji Rad Open Channel Microneedle Array Fabrication by 3D Laser Lithography and Micromoulding Techniques

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11.15 Mrs Stella Aslanoglou Porous silicon micro-conical tips for gene delivery 44

11.30 Mr Alex Stokes Dust and diamonds: getting to the core of the problem 45

11.45 Dr Jiawen Li 3D printing of minaturised lenses with sub-wavelength print resolution

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12.00 Lunch

1.00 Advanced Materials, Chair Dr Craig Priest

1.05 Prof. Simon Fleming Metamaterials to Medicine 54

1.20 Dr Ivan Perez-Wurfl Tandem Solar cells on Silicon substrates for a new industrially competitive PV technology

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1.35 Mr Ashley Slattery Characterisation of visible light driven nanoplate photocatalysts

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1.50 Sponsor Presentation

1.55 Afternoon tea

2.15 Nanobio, Chair Prof. Justin Cooper-White

2.20 Dr Karyn Jarvis Developing Functional Surfaces at the ANFF-Vic Biointerface Engineering Hub

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2.35 Dr David M. Carberry Chiral objects within optical fields as mimics for biological motion

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2.50 Mr Geoffrey Lawrence Soft-Templated Synthesis of Highly Ordered Nanoporous Heme Proteins for Selective Sensing of Vapours

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3.05 A/Prof. Paul Pigram High-throughput Production of Transition Metal Complexes for Antibody Immobilization

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Day two Thursday 26 November 2015, Room B2


10.55 Showcasing our new capabilities, Chair A/Prof. Paul Pigram

11.00 A/Prof. Paul Pigram Time-of-flight secondary ion mass spectrometry (ToF-SIMS): Spectroscopy – Imaging – Depth Profiling

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11.15 Dr Jeffrey Cheung Epitaxial growth of advanced materials at ANFF-NSW 50

11.30 Dr Mark Lockrey Cathodoluminescence Characterisation of Nano Structures

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11.45 Mr Adam Fahy Imaging with a Deft Touch: the Scanning Helium Microscope

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Sponsorship 9

Sponsorship acknowledgement

Thank you to our sponsors.

These events cannot be held without the assistance of our sponsors, and the ANFF gratefully acknowledges their support.

Our 2015 Research Showcase Gold sponsors

Phone 02 9956 2666

www.hdrinc.com/markets/architecture/disciplines/laboratory-planning

02 9858 0190

www.dynaflow.com.au Our silver sponsors

Phone 1800 251 799 www.johnmorrisgroup.com

0424 502 789 www.coltronics.com.au

1800 GO EZZI (1800 46 3994)

www.ezzivacuum.com.au 1300 661 344

www.evgroup.com/en


Sponsorship 10

Our bronze sponsors

www.scitek.com.au www.osp1.com.au www.avtservices.com.au www.raymax.com.au

resonateacoustics.com.au www.axt.com.au www.protectoralsafe.com.au www.atascientific.com.au

www.mmrc.com.au www.coregas.com www.warsash.com.au


Photonics 11

Photonics

Development of optical electrodes for the brain/machine interface

Prof François Ladouceur*†, Prof Nigel Lovell‡ † EE&T, The University of New South Wales, Sydney, NSW 2052, Australia ‡ GSBME, The University of New South Wales, Sydney, NSW 2052, Australia *[email protected] Abstract

Our overall long-term objective is to design, manufacture and characterise an innovative optical-electrode (a.k.a. optrode) for the recording of biological potentials (biopotentials). Its successful realisation could revolutionise the way technology is implanted in the body. To advance the neuroprosthetic field, fundamental constraints related to packaging, wiring and interfacing need to be overcome. Such interfaces exist both in vitro and in vivo and in nearly all cases rely on a physical wire that connects an electrode to electronics for recording or stimulation.

New classes of liquid crystals – so called deformed helix ferroelectric liquid crystals – have shown the ability to offer extraordinary sensitivity and linear response to electrical stimulations down to the microvolt range. These liquid crystals can smoothly, continuously and passively transduce small electrical signals into the optical domain thus affording all the advantages typically associated with optical communications.

This technology, entirely developed at UNSW (Prof Ladouceur) is actively being researched and commercialised in the context of optical sensing networks and has found strong support from industry. Using the same technology, it would be possible develop optical transducer arrays that can act as embeddable conformal optrode. The final version would consist of arrays of transducers (e.g 100 x 100) embedded into a polymer superstrate on which would lie the biological tissue. The fabrication and enabling technologies (fabrication, addressing, multiplexing, etc) will be reviewed during the presentation.

Presenter’s biography

Professor François Ladoucer is head of the photonics group within Electrical Engineering at UNSW and has played an active role in the commercialisation of photonics technologies over the past 20 years with involvement in the creation of Virtual Photonics, the Bandwith Foundry, Silanna and more recently in Zedelef Pty Ltd.


Photonics 12

Light-polarisation effects arising in optically transparent 3D printed materials

Christopher G. Bolton and Raymond R. Dagastine* Particulate Fluids Processing Centre, University of Melbourne, Parkville VIC 3010, Australia Department of Chemical & Biomolecular Engineering, University of Melbourne, Parkville VIC 2010, Australia *[email protected] Abstract

Our group has been developing a laser-based technique to probe the Brownian dynamics of strangely shaped, anisotropic particles as they diffuse and interact within nanoscale confinement architectures. A crucial element of this approach is the need to couple polarized lasers into our system at carefully controlled angles so that the light can interact with the particles under observation. The spatial constraints involved in building the apparatus for our new technique mean that traditional methods of machining optical components (e.g. prisms, lenses) are impractical. In this work, we describe our approach for fabricating optically transparent components using the Objet Eden 260V 3D printer housed at the Melbourne Centre for Nanofabrication in order to expedite the prototyping stage of our method development. While the bulk strength and qualitative light transmission characteristics of transparent 3D printed materials are often touted when describing this technology, the impact of bulk structural defects on the coherence, phase and polarisation of incident light has been largely overlooked. We have developed techniques for polishing and finishing printed optical components to a standard that permits their use in experiments involving Class-3A/B low-noise lasers, and attempted to characterise light-polarisation effects induced by the bulk of these materials. The insights drawn from this work augment our understanding of the internal structure in a wide range of both transparent and opaque materials produced through additive manufacturing.


Christopher completed his BSc in Physics and BEng in Chemical Engineering at the University of Melbourne in 2012, and has been doing research with the PFPC since mid-2011 after spending a couple of years in design-consulting (Stantec) and on-site agrochemical process engineering (Nufarm). Commencing a PhD in 2013, his research is concerned with the way strangely shaped or composed nanoparticles move, interact with each other and assemble into macroscale objects. Understanding this behavior is useful because when designing and fabricating materials for applications in solar cells, consumable electronics or even drug delivery, we typically don't encounter idealized spherical particles in perfectly clean systems. By understanding how more complex particles behave, we can design processes/materials with functionality to augment existing commercial technologies and enable new ones.


Photonics 13

Optical Bragg Gratings: Sources and Sensors Martin Ams†,‡,*, Matthias Fabian§, Sergei Antipov‡, Robert J. Williams‡, Atasi Pal¶, Ranjan Sen¶, Peter Dekker‡, Thomas Calmano#, Simon Gross‡, Alex Fuerbach‡, Tong Sun§, Kenneth T. V. Grattan§, Christian Kränkel#, Günter Huber#, and Michael J. Withford†,‡ † OptoFab node of the Australian National Fabrication Facility (ANFF) ‡ Centre for Ultrahigh Bandwidth Devices for Optical Systems (CUDOS), MQ Photonics Research Centre, Department of Physics & Astronomy, Macquarie University, New South Wales 2109, Australia § School of Engineering & Mathematical Sciences, City University London, Northampton Square, London EC1V 0HB, United Kingdom ¶ Central Glass and Ceramic Research Institute (CGCRI), Jadavpur, Kolkata 700032, India # Institut für Laser-Physik, The Hamburg Centre for Ultrafast Imaging, Universität Hamburg, Luruper Chaussee 149, 22761 Hamburg, Germany * [email protected] Abstract

An optical Bragg grating is a transparent device with a periodic variation of refractive index. This periodic perturbation (grating period) can be tailored to reflect particular wavelengths of light whilst transmitting all other wavelengths. The grating period can be uniform or graded, and either localised or distributed in a superstructure.

Utilising the ultrafast laser facilities of the Macquarie University OptoFab node of the ANFF, Bragg gratings have been fabricated in both the core of various optical fibres and also inside bulk glass substrates. Fabrication techniques include inscribing gratings into fibre cores in a point-by-point (PbP) or core-scanning fashion, and by modulating the writing beam to create waveguide Bragg gratings (WBGs) in bulk glass. Due to their reflection and transmission properties being wavelength dependent, Bragg gratings fabricated at OptoFab have found use in many applications.

Fibre Bragg gratings (FBGs) can be used as direct sensing elements calibrated to a shift in their reflection/transmission spectra. Such sensors can be used in harsh environments to measure temperature and/or strain for example. In particular, a comparative study of various FBGs and their response to gamma radiation has been studied. FBGs have also been used as high reflectors and/or output couplers in fibre laser systems. WBGs in active glasses form the basis for monolithic compact laser sources. Furthermore, WBGs have been used for narrowing the emission wavelength of high power crystal-based lasers. A review of the above grating applications will be presented.


Dr Martin Ams received the B.Sc. degree in physics and the Ph.D. degree in optical laser physics from Macquarie University, Sydney Australia, in 2001 and 2008, respectively. He then worked as a Research Associate at the MQ Photonics Research Centre and the Centre for Ultrahigh bandwidth Devices for Optical Systems (CUDOS), Macquarie University until mid-2011. Following this Dr Ams took a 2 year post-doctoral position at City University London in advanced optical fibre sensors and their applications. He is currently the business development manager for the OptoFab node of the Australia National Fabrication Facility (ANFF) at Macquarie University. His research interests include laser fabrication of photonic waveguide devices and Bragg-gratings for use in telecommunication, sensing, astronomy, quantum information and biophotonic applications.


Photonics 14

A microtoroid based integrated cavity opto-electromechanical system Christopher Baker*, David McAuslan, Christiaan Bekker, Eoin Sheridan, and Warwick P. Bowen Queensland Quantum Optics Laboratory, University of Queensland, Brisbane, Queensland 4072, Australia. *[email protected]

Abstract

Optical resonators only interact with certain narrow, regularly spaced wavelengths of light called optical resonances. The ability to control (‘tune’) the wavelength of these resonances is a subject of great importance. For example a laser beam can only couple to a resonator if its wavelength precisely matches one of the resonances, and two distinct optical resonators cannot interact with each other unless they share a common resonance wavelength. Silica microtoroids (see image below) and silica disk resonators set the benchmark for the highest optical Qs resonators achievable on a chip, with Q values reaching almost 1 billion. These devices have many applications ranging from optomechanics, nanoparticle sensing to frequency comb generation. However they currently lack an efficient and fast method to spectrally tune their resonance frequencies. We propose and experimentally demonstrate an efficient way to tune the high quality resonances these resonators, based upon capacitive actuation. Metallic electrodes are patterned upon the top surface of the device to be tuned. When a bias voltage is applied, the attractive capacitive force between the electrodes results in a shrinking of the device and a shifting of the position of the optical resonances, enabling application in optical switching, reconfigurable optical routing, efficient RF to optical signal conversion and the fabrication of on-chip networks of interacting high Q resonators.


Christopher Baker is a Postdoctoral research fellow at the University of Queensland, currently working on cavity opto-electromechanics and superfluid helium optomechanics with ultra-high Q resonators. He received a PhD from the University of Paris for work on optomechanics, nanomechanics, nanophotonics and microfluidics with III-V GaAs disk WGM resonators.


Photonics 15

Three-Dimensional C+L Band Integrated Tapered Mode Couplers for Mode-Division Multiplexing Nicolas Riesen†,‡, Simon Gross§, John D. Love‡ and Michael J. Withford§,* †The Institute for Photonics and Advanced Sensing (IPAS), The University of Adelaide, North Terrace, Adelaide 5005, Australia. ‡Research School of Physics and Engineering, The Australian National University, Canberra, ACT 0200, Australia. §Centre for Ultrahigh bandwidth Devices for Optical Systems (CUDOS), MQ Photonics Research Centre, Department of Physics and Astronomy, Macquarie University, Sydney, Australia. *[email protected] Abstract

In recent years significant effort has been put into mode-division multiplexing for scaling the transmission capacities of optical networks. Mode-division multiplexing involves the use of few-mode optical fibres, where each transverse mode carries different information. One of the main challenges of using few-mode optical fibres, however, remains the selective excitation and detection of the higher-order modes. Current demonstrations of few-mode fibre networks typically rely on the use of bulk optical setups. However, simpler, more compact, broader bandwidth and lower loss waveguide-based multiplexing solutions are still sought to make mode-division multiplexing more practical. We report on the fabrication of integrated tapered mode couplers inscribed into boroaluminosilicate glass chips using the femtosecond laser direct-write approach. These compact mode multiplexers offer ultra-broadband performance with high mode extinction ratios and low insertion loss. The photonic chips also interface well with standard single- and few-mode optical fibre, providing a practical means of addressing the individual modes in few-mode fibre networks. We discuss the fabrication and commercialisation of C+L band and EDFA-pump band devices through the Australian venture of Modular Photonics.

Figure 1. Schematics of integrated tapered mode couplers fabricated using the femtosecond laser direct-write technique. Source: www.ModularPhotonics.com.


Dr. Nicolas Riesen gained his PhD from The Australian National University, Australia with his thesis focusing on Spatial Mode-Division Multiplexing for increasing optical fibre capacity and Advanced Distributed Fibre Sensing. His research has led to the development of various elegant waveguide-based solutions for mode multiplexing including tapered velocity mode couplers and multi-core couplers. He recently joined the Institute for Photonics and Advanced Sensing (IPAS) at the University of Adelaide as a Postdoctoral Fellow, where he is researching nonlinear phenomena in whispering gallery mode microresonators. He is affiliated with the Australian start-up Modular Photonics.


Photonics 16

3D integration of silicon photonic circuits

Duk-Yong Choi*, Xin Gai, Barry Luther-Davies Laser Physics Centre, Australian National University, ACT 2601, Australia *corresponding author: [email protected] Abstract

Silicon photonics has become the dominant technology for integrated photonic devices. It supports low power consumption, dense integration with CMOS electronics, low cost and is, therefore, promising for high-performance communication and computing. Crystalline silicon (c-Si) has been the main platform which not only transports the light signals, but also incorporate light sources and detectors. High-quality c-Si, however, is impossible to grow on a foreign substrate, implying that it cannot be used for advanced multilayer photonic integration. Hydrogenated amorphous silicon (a-Si:H) is emerging as an alternative in this perspective. A distinct advantage of a-Si:H comes from the fact that it can be deposited easily at low temperature on almost any substrates, facilitating back-end integration of a-Si:H photonic components on top of pre-processed CMOS electronic chips without any damage to the underlying metal wires.

Despite of the recent progress in fabricating high quality devices, however there have been few studies of a-Si:H for 3-dimensional integrated photonic chips. In this work we successfully demonstrated a vertically-stacked, amorphous silicon micro-ring resonators and Bragg gratings for the first time. Here, SU-8 polymer was employed as a planarization and cladding layer, and the gap between bus waveguide and rings (or gratings) was precisely controlled by plasma etching of the polymer. We verified the performances of so-produced devices are comparable to those of conventional ones. Our technique benefits from a simple fabrication married with low temperature deposition of a-Si:H, and could find wide applications, for instance in hybrid integration with c-Si photonics structures.


Dr. Duk-Yong Choi is an associate professor at the Laser Physics Centre in the Australian National University. He has been a member of CUDOS (Centre for Ultra-High Bandwidth Devices in Optical System) program since 2005. In the program his role is to develop the fabrication process of nonlinear optic devices utilizing chalcogenide glass films and to study the structural, optical and electrical properties of the materials. Recently his research has extended to silicon photonics – Germanium laser & photo-detector, hydrogenated amorphous silicon. He got his PhD at 1998 from Materials science and engineering in Seoul National University in Korea, and then worked at Samsung electronics.

University of Maryland, USA

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Micro-manufacturing (I) 18

Micro-manufacturing (I)

Atomically thin optical lenses and gratings Jiong Yang†#, Zhu Wang‡#, Fan Wang§, Renjing Xu†, Jin Tao†, Shuang Zhang†, Qinghua Qin†, Barry Luther-Davies¶, Chennupati Jagadish§, Zongfu Yu, ‡* and Yuerui Lu†* †Research School of Engineering, College of Engineering and Computer Science, the Australian National University, Canberra, ACT, 0200, Australia ‡Department of Electrical and Computer Engineering, University of Wisconsin, Madison, Wisconsin 53706, USA §Department of Electronic Materials Engineering, Research School of Physics and Engineering, the Australian National University, Canberra, ACT, 0200, Australia ¶CUDOS, Laser Physics Centre, Research School of Physics and Engineering, the Australian National University, Canberra, ACT 0200, Australia # These authors contributed equally to this work * To whom correspondence should be addressed: Zongfu Yu ([email protected]) and Yuerui Lu ([email protected])

Abstract

Two-dimensional (2D) materials have emerged as promising candidates for miniaturized optoelectronic devices, due to their strong inelastic interactions with light. On the other hand, a miniaturized optical system also requires strong elastic light-matter interactions to control the flow of light. Here, we report giant optical path length (OPL) from a single-layer molybdenum disulfide (MoS2), which is around one order of magnitude larger than that from a single-layer graphene. Using such giant OPL to engineer the phase front of optical beams, we demonstrated, to the best of our knowledge, the world’s thinnest optical lens consisting of a few layers of MoS2 less than 6.3 nm thick. By taking advantage of the giant elastic scattering efficiency in ultra-thin high-index 2D materials, we demonstrated high-efficiency gratings based on a single- or few-layers of MoS2. The capability of manipulating the flow of light in 2D materials opens an exciting avenue towards unprecedented miniaturization of optical components and the integration of advanced optical functionalities. More importantly, the unique and large tunability of the refractive index by electric field in layered MoS2 will enable various applications in electrically tunable atomically thin optical components, such as micro-lenses with electrically tunable focal lengths, electrical tunable phase shifters with ultra-high accuracy, which cannot be realized by conventional bulk solids.


Mr. Jiong Yang is currently a PhD student of NEMS lab in Australian National University, and he received his bachelor’s degree in Fudan University, China before moving to Australia. His PhD project is on high-index induced properties of 2D materials and optical device fabrication and characterization based on such properties. His research interests include 2D materials, fabrication and characterization, nanolithography techniques and device design based on 2D materials.



High-quality Ultrathin Single Crystal Diamond Membranes for MEMS and Nanophotonics

A.H. Piracha1*, K. Ganesan1, D.W.M. Lau1,2, S. Tomljenovic-Hanic1, S. Prawer1 1School of Physics, University of Melbourne, Victoria 3010, Australia 2School of Applied Sciences, RMIT University, Victoria, Australia *Corresponding author: Email [email protected]

Abstract

Single crystal diamond (SCD) is a unique material with exceptional physical, mechanical, chemical, thermal and optical properties. It shows high refractive index ~2.4, and wide band gap (5.5 eV at room temperature). It is known to host more than 500 colour centers ranging from UV to infrared. SCD is one of the most promising materials for integrated photonic, MEMS and quantum information processing (QIP) devices. Diamond based photonics and MEMS technologies require high quality ultra-thin SCD membranes. The membrane thickness is a critical parameter in satisfying the single mode operation for optical waveguiding and cavity performance. In general, membranes that have a thickness in the sub-micron range are of growing interest for a number of device applications.

Researchers from the University of Melbourne have developed a commercially-viable technique to fabricate ultra-thin (100nm) single crystal diamond membranes that offers improved membrane characteristics that enable applications previously not possible. The combination of SCD with thicknesses of 100nm, parallel surfaces and structural robustness has until now been difficult to fabricate reliably and consistently for a wide range of applications including optical and sensing. The technique utilises a unique method in addition to microwave plasma CVD process to grow high-quality diamond windows on the ion-implanted substrate, and thinning of the membrane through Reactive Ion Etching (RIE).

The technique has now been consistently and reliably used to fabricate a range of ultra-thin SCD membranes and windows for a variety of research applications. The technology and its method of fabrication are the subject of a patent application, and further research and development is underway to explore new applications of the technology.


This technique for fabricating ultra-thin SCD membranes was developed by Afaq Piracha, Prof Steven Prawer and colleagues in the School of Physics in the Faculty of Science at the University of Melbourne, Australia.

Afaq is principal inventor of this technique and currently completing his PhD in the School of Physics at the University of Melbourne. Prof Prawer has a world-wide reputation in advanced diamond science and technology with over 25 years of experience and over 250 scientific publications, and is the Director of the Melbourne Material Institute.



Hydrodynamic of micro-objects near curved surfaces Shu Zhang, David Carberry, Timo Nieminen, Halina Rubinsztein-Dunlop* School of Mathematics and Physics, The University of Queensland, St. Lucia, Brisbane, Queensland 4072, Australia. [email protected].

Abstract

Boundary walls have a strong influence on the drag force on optically trapped object near surface. Faxen’s correction has shown how a flat surface modifies the hydrodynamic drag. However, to date, the effect of curved walls at microscopic scale on both translational and rotational movement of micro-objects has not been studied. Here we describe our experiments which aim to study the drag force on optically trapped particles moving near walls with different curvatures.

The curved walls were made using 3D laser nano-printing (Nanoscribe), and optical tweezers were used to trap micro-objects near the walls. The translational and rotational motion of the optically trapped particle is related to the drag coefficients. By monitoring the change in the motion of particle, we determined the increase in drag force for particles translating or rotating at different distances from surfaces with different curvatures.

These results are essential for calibrating the drag force on particles, and thus enable accurate rheology at the micron-scale. This opens the potential for microrheology under different conditions, such as within microdevices, biological cells and studies of biological processes.


Education:

2013 to date: PhD student in Physics, the University of Queensland, Australia.

Conferences:

1. Invited talk at AIP conference, Canberra, Australia, December 2014, Viscoelastic measurements inside liposomes. Zhang, S., Gibson, L., Preece, D., Carberry, D., Nieminen, T. A. and Rubinsztein-Dunlop, H.

2. Poster presentation at SPIE Optics and Photonics, San Diego, USA, August 2014, Viscoelasticity measurements inside liposomes. Zhang, S., Gibson, L., Preece, D., Nieminen, T. A. and Rubinsztein-Dunlop, H.

3. Oral presentation at SPIE Optics and Photonics, San Diego, USA, August 2014. Hydrodynamic of micro-objects near curved surfaces, Zhang, S., Gibson, L., Preece, D., Nieminen, T. A. and Rubinsztein-Dunlop, H.



Droplet-Interface Collisions for Studies of Stability, Coalescence, and Spreading Marta Krasowska*, David A. Beattie, Tracey T.M. Ho, Muireann O’Loughlin, Pasindu M.F. Sellapperumage Future Industries Institute, University of South Australia, Building MM, Mawson Lakes Campus, Mawson Lakes, SA 5095. [email protected]

Abstract

Oily liquid droplets in aqueous suspension (emulsions) represent a large number of natural and industrial products and materials. Many of the applications of emulsions are dependent on the interaction of the oily droplets with other interfaces, be they oil, air, or solid materials. In spite of the critical nature of this interaction, there are few experimental techniques that can directly probe this interaction, or connect the droplet-interface interaction to the molecular characteristics of the interfaces. In this work, we have used high speed video microscopy of oil droplet rise and oil droplet collisions with interfaces to determine the influence of interfacial properties on thin film hydrodynamics and droplet attachment, coalescence, and spreading at interfaces. Microfluidic devices have been used to create droplets of consistent and reproducible size, which enables more accurate analysis of droplet collision parameters. The relevance of the experiments for applications in food science will be discussed.


Dr Marta Krasowska) is a physical chemist. She graduated in 2006 with a PhD from the Jerzy Haber Institute of Catalysis and Surface Chemistry, Polish Academy of Science, Krakow. She then joined UniSA as a Research Associate, and is now a Foundation Fellow at the Future Industries Institute, and co-Group Leader of the Surface Interactions and Soft Matter Group at UniSA.



Inertial microfluidic systems for high-throughput cell sorting Majid Ebrahimi Warkiani School of Mechanical and Manufacturing Engineering, Australian Centre for NanoMedicine, University of New South Wales, Sydney, NSW 2052, Australia

Abstract

Cell sorting is critical for many applications ranging from stem cell research to cancer therapy. Isolation and fractionation of cells using microfluidic platforms have been flourishing areas of development in recent years. The need for efficient and high-throughput cell enrichment, which is an essential preparatory step in many chemical and biological assays, has led to the recent development of numerous microscale separation techniques. Size-based passive particle filtration using inertial microfluidics have recently received great attention as a promising approach for particle focusing, filtration and fractionation due to its robustness and high rates of operation. The main advantage of inertial-based microfluidics approaches is that continues-flow separation without clogging can be realized using relatively large microchannels with relatively high resolution. In this seminar, I will describe our recent efforts in development of ultra-high throughput microfluidics systems for separation and fractionation of stem cells. Further, I will show that that high-throughput inertial microfluidics enables efficient sorting of Mesenchymal stem cells (MSCs) as a function of cell diameter, and show that this enables selection and sorting of osteoprogenitor cells from marrow for applications such as bone regeneration. Finally, I will present some of our efforts for large-scale manufacturing and enrichment of MSCs inside perfusion bioreactores.


Dr Majid Ebrahimi Warkiani is a new lecturer in the School of Mechanical and Manufacturing Engineering, University of New South Wales (UNSW). He received his PhD in Mechanical Engineering from Nanyang Technological University (NTU), and undertook postdoctoral training at Massachusetts Institute of Technology (MIT). Dr Warkiani’s current research activities focus on two key areas of (i) Microfluidics involving the design and development of novel platforms for rare cell sorting (e.g., circulating tumor cells, fetal cells & stem cells) and the development of novel 3D devices for investigation of angiogenesis and tumor formation, (ii) Bio-MEMS involving the fabrication and characterization of novel isopore membranes and the design and development of novel micro PCR chips.

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Dynaflow is an Australian based company specialising in the design, manufacture, installation and maintenance of Fume cupboards, scrubbers and specialised ventilation equipment for laboratory applications.

Dynaflow recognises the unique needs of every project or End User and leveraging on the right technologies and their technical expertise , they put forward the best and most balanced option in terms of Compliance, Operator Safety, Energy Conservation , Sustainable benefits and Cost.

Dynaflow is the only company in Australia to carry third party Product Certification by SAI Global with Standardsmark License to AS2243.8:2014 for the Dynaflow Fume cupboard. This is in addition to the SAI Global ISO9000 Quality Accreditation and NATA Accreditation.

With the award winning Dynaflow Fume cupboard, the company has decades of history and experience of large and specialised projects in Australia and Overseas and prides itself on having operational Dynaflow fume cupboards in over 40 countries across 6 continents including Antarctica.

Dynaflow Pty Ltd services the entire laboratory industry in Australia with Offices or Distributors in Sydney, Melbourne, Adelaide, Perth, Brisbane and Hobart. In Overseas markets Dynaflow has official distributors in Singapore, Hong Kong, Thailand, New Zealand, Dubai, Philippines and Chile.

AS2243.8 SMK02145 SAI Global

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QEC23606

www.dynaflow.com.au

Dynaflow is an Australian based company specialising in the design, manufacture, installation and maintenance of Fume cupboards, scrubbers and specialised ventilation equipment for laboratory applications.

Dynaflow recognises the unique needs of every project or End User and leveraging on the right technologies and their technical expertise , they put forward the best and most balanced option in terms of Compliance, Operator Safety, Energy Conservation , Sustainable benefits and Cost.

Dynaflow is the only company in Australia to carry third party Product Certification by SAI Global with Standardsmark License to AS2243.8:2014 for the Dynaflow Fume cupboard. This is in addition to the SAI Global ISO9000 Quality Accreditation and NATA Accreditation.

With the award winning Dynaflow Fume cupboard, the company has decades of history and experience of large and specialised projects in Australia and Overseas and prides itself on having operational Dynaflow fume cupboards in over 40 countries across 6 continents including Antarctica.

Dynaflow Pty Ltd services the entire laboratory industry in Australia with Offices or Distributors in Sydney, Melbourne, Adelaide, Perth, Brisbane and Hobart. In Overseas markets Dynaflow has official distributors in Singapore, Hong Kong, Thailand, New Zealand, Dubai, Philippines and Chile.

AS2243.8 SMK02145 SAI Global

Accreditation No: 2910

Dynaflow Pty Ltd ABN 28 008 493 178 Email: [email protected] Website: www.dynaflow.com.au

QEC23606


Sensor technology 24

Sensor technology

Combining silicon photonics and microelectromechanical systems to create chemical & biological sensors

Gino Putrino†*, Mariusz Martyniuk†, Adrian Keating‡, Dilusha Silva†, Roger Jeffrey§, Adam Dickson§, Sanchitha Fernando§, Lorenzo Faraone†, John Dell† †School of Electrical, Electronic and Computer Engineering, The University of Western Australia, 35 Stirling Hwy, Crawley, WA 6009. ‡School of Mechanical Engineering, The University of Western Australia, 35 Stirling Hwy, Crawley, WA 6009. §Panorama Synergy Ltd, Level 7, 99 Macquarie St, Sydney, NSW 2000. * [email protected] Abstract

Chemical sensors based on microelectromechanical systems (MEMS) provide a unique pathway to robust sensing systems with high selectivity and sensitivity. More specifically, nanomechanical movements of suitably functionalized MEMS cantilevers and microbridges act as sensing transducers. Determination of these nanomechanical movements with suitable precision in a portable device concept capable of addressing large arrays of MEMS sensors has been an obstacle to wider adoption of this style of chemical sensor. Here we demonstrate the combination of MEMS and silicon photonics to create an integrated on-chip optical interferometer capable of measuring the out-of-plane movements of MEMS structures with picometer precision. This technology has been named lumiMEMS and is now being developed in conjunction with Panorama Synergy Ltd. to create a new class of high precision, robust and mass manufacturable chemical sensing device. Current development is focussed towards the creation of Panorama Synergy’s first commercial chemical sensing device.


Dr Gino Putrino is a researcher at The University of Western Australia (UWA). He received the B.Sc. degree in computer science and B.E. degree in electrical and electronic engineering from UWA in 1999, and the Ph.D. degree from UWA in 2014. From 1999-2010, he worked in industry in a variety of roles across the USA and Australia. His current research activities involve optical microelectromechanical systems (MEMS), terahertz MEMS, silicon photonics, and chemical/biological sensing.



Microelectromechanical systems based tuneable Fabry-Perot filters for adaptive multispectral thermal imaging

Haifeng Mao*¬1, Mariusz Martyniuk1, Dilusha Silva1, Jarek Antoszewski1, Dhirendra Thripathi1, Ed Smith2, Justin Wehner2, John M. Dell1 and Lorenzo Faraone1 1School of Electrical, Electronic and Computer Engineering, The University of Western Australia, M018, 35 Stirling Highway, Crawley WA 6009. *[email protected] 2Raytheon Vision Systems, Goleta, CA 93117, USA

Abstract

Microelectromechanical systems (MEMS) based long-wavelength infrared (LWIR) tuneable Fabry-Perot filters collect spectral information over multiple discrete wavelength bands of interest within 8-12 μm spectral range under an electrical stimulus. Such devices can be hybridized with a two-dimensional imaging focal plane array (FPA) towards the realization of miniature multispectral thermal imaging sensors for target recognition applications. Successful development of MEMS-based LWIR Fabry-Perot filters is technologically challenging due to the stress induced bowing of suspended mirrors compounded by the incorporation of complicated stress control mechanisms. Microelectronics Research Group at the University of Western Australia in partnership with Raytheon Vision Systems has developed a novel MEMS-based LWIR Fabry-Perot filter, which employs a single-layer tensile-strained germanium membrane for the suspended top mirror and can achieve nanometre-scale mirror flatness after release across a large mirror area of several hundred square microns without using any extraneous stress management techniques. The 200 μm sized square filter is capable of electrically tuning across 8.5-11.5 μm wavelength range using an actuation voltage under 160 V, which accounts for 75% of the thermal infrared imaging band. This filter is demonstrated with near-theoretical spectral characteristics over the entire tuning range, including a peak transmission above 80%, an FWHM of 500 nm, and an out-of-band rejection greater than 40:1. Optical modelling shows that this filter can achieve a pixel-to-pixel transmission peak wavelength variation of less than 1.2% across the entire 200 μm × 200 μm optical imaging area. These spectral parameters sufficiently fulfil the optical performance requirements for passive multispectral thermal imaging applications based on large-area focal plane arrays.


Haifeng Mao received the B. Eng. Degree in physics from the Dalian University of Technology, China, in 2007, and the M. Sc. Degree in sensor system technology from the Karlsruhe University of Applied Sciences, Germany, in 2010. He is currently pursuing the Ph. D. degree with the School of Electrical, Electronic and Computer Engineering, University of Western Australia. His current research activities involve design, fabrication, and characterization of optical microelectromechanical systems based filters for multispectral imaging applications.



Recent Progress and tendency in Mercury Cadmium Telluride IR Detector Technology

R.Gu †, J.Antoszewski †, A. Rogalski ‡, W.Lei † *, Axel Lorke §, I.Madni †, G.Umana-Membreno †, M.Martyniuk †, L.Farone † †School of Electrical, Electronic and Computer Engineering, The University of Western Australia, Western Australia 6009, Australia ‡Institute of Applied Physics, Military University of Technology, 2 Kaliskiego St., 00-908 Warsaw, Poland §Department of Physics and CeNIDE, University of Duisburg-Essen, Lotharstraße 1, 47048 Duisburg, Germany *[email protected]

Abstract

In the frontier area of infrared detectors, HgCdTe has dominated the high performance end of the market for decades. At present, the research in this field is directed towards high pixel density, high yield, reduced cooling and hyperspectral operation, as well as towards the choice for the substrate for HgCdTe epitaxy: the high cost and high performance lattice-matched CdZnTe versus limited performance of lower cost lattice-mismatched alternatives (eg. Si, GaAs, etc.). Although large size CdZnTe wafer technology has been developed recently, it is still associated with an extremely high cost. Meanwhile, the performance of HgCdTe detectors on alternative substrates is still significantly below that achievable on CdZnTe due to large lattice mismatch leading to high defect density. Another key issue for HgCdTe is that the normal working temperature is 77K, which requires a huge cooling system. To solve these problems, we developed a technique, the so called barrier structures on GaSb substrates, which is attracting significant recent attention. This ‘hybrid’ concept combines unipolar n-type/barrier/n-type detector structures and semilattice-matched GaSb as substrates allowing significantly higher IR detector operating temperatures at significantly lower costs. The use of unipolar n-type/barrier/n-type detector structure in HgCdTe grown on GaSb as a substrate alternative to CdZnTe is presented in this paper by ANFF WA node in strong collaboration with leading European institutions in this field.


Dr. Renjie Gu is working as ANFF MBE engineer in Microelectronic Research Group (MRG) at School of Electrical, Electronic and Computer Engineering, University of Western Australia (ANFF WA Node). He joined MRG as ARC super science fellow after finishing his PhD in Chinese Academy of Science (2012), working on the MBE epitaxial growth and characterization of semiconductor thin film materials, whose applications are in devices such as infrared detectors, lasers, and solar cells.



Room temperature GaAsSb single nanowire photodetectors

Ziyuan Li†,*, Xiaoming Yuan†, Lan Fu†,*, Kun Peng†, Fan Wang‡, Xiao Fu§, Philippe Caroff†, Thomas P. White§, Hark Hoe Tan† and Chennupati Jagadish† † Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 2601, Australia ‡ ARC Centre for Nanoscale BioPhotonics (CNBP), Department of Physics and Astronomy, Faculty of Science, Building E6F, Macquarie University, Sydney, NSW 2109, Australia § Center of Sustainable Energy Systems, Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia * E-mail: [email protected] [email protected]

Abstract

III-V semiconductor nanowires (NWs) are of great interest as versatile building blocks for nano-devices such as lasers, solar cells, and photodetectors, due to their advantages of small footprint, efficient strain relaxation in the formation of axial heterostructures, and superior optical and electrical properties. In particular, antimonide-based III-V ternary NWs can offer wide tunable bandgaps and associated flexibility in bandgap engineering, which is highly interesting for optoelectronic applications, especially infrared photodetection. In our work, single GaAs0.56Sb0.44 NWs were synthesized using gold-seeded metalorganic vapour phase epitaxy (MOVPE) technique and successfully demonstrated to operate as high performance infrared photodetectors at room temperature. The NWs were grown on GaAs(111)B substrates with 40 nm Au colloids as seed particles, using a horizontal flow MOVPE reactor (Aixtron 200/4). After growth, NWs were mechanically dispersed on a thermally oxidized p+-Si substrate. Then a Raith 150 electron-beam lithography (EBL) system was used to define the contact patterns on the NWs, followed by wet etching in 9% HCl for 1 min to remove the native oxide formed on the NW surface. Finally, Ti/Au (10/220 nm) electrodes were formed by metallization (employing a Temescal BJD-2000 electron-beam evaporator) and lift-off. Such single GaAs0.56Sb0.44 NW-based photoconductive devices present linear current-voltage (I-V) characteristics and broadband photoresponse in the infrared regions covering both the 1.3 and 1.55 µm telecommunication wavelengths. These photodetectors also exhibit good responsivity and detectivity with potential future applications in nanoscale optical telecommunication systems and optoelectronic integration.

We acknowledge the Australian Research Council for financial support, and Australian National Fabrication Facility (ANFF) ACT node for facility support. Thanks to ANFF ACT node staff for their help, support and assistance in growth and characterization of nanowires and device fabrication.


Dr. Ziyuan Li obtained her B.Eng. degree in Electrical Engineering from Beijing Institute of Technology (BIT) in 2009 and Ph.D. from the University of New South Wales (UNSW) in 2013. During her Ph.D., her work mainly focused on design, modelling, fabrication and characterisation of optical nano-antennas with applications in opto-electronic devices. Currently she is working at the Australian National University (ANU) as a device processing engineer to develop various fabrication/characterisation processes for a broad range of optoelectronic devices based on different semiconductor nanowire materials.



Single Nanowire Terahertz Detectors with Tunable Bandwidth Kun Peng†*, Patrick Parkinson‡, Lan Fu†*, Qiang Gao†, Nian Jiang†, Ya-Nan Guo†, Fan Wang§, Hannah J Joyce¶, Jessica L. Boland#, Michael. B. Johnston#, Hark. H. Tan† and Chennupati Jagadish† † Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 2601, Australia ‡ School of Physics and Astronomy, University of Manchester, M13 9PL, Manchester, United Kingdom §Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia. ¶ Department of Engineering, University of Cambridge, Cambridge, United Kingdom. # Department of Physics, University of Oxford, Clarendon Laboratory, Parks Road, Oxford, OX1 3PU, United Kingdom *Email: [email protected] [email protected]

Abstract

Terahertz time-domain spectroscopy (THz-TDS) and imaging have found unique use in scientific, medical, biological and security applications in recent years. To further improve the spatial resolution of a typical THz system as well as to explore advanced applications such as near-field THz microscopy and ‘on-chip’ THz spectroscopy, miniaturisation of THz emitters/detectors in highly compact THz-TDS systems is required. In this work, we report the design, fabrication and investigation of room-temperature photoconductive THz detectors based on single GaAs/AlGaAs core-shell nanowires. The nanowires were grown by the vapour-liquid-solid technique in a metalorganic chemical vapour deposition system, and the devices were fabricated on quartz substrates by conventional ultraviolet photolithography and customised direct-laser-writing lithography, to form electrical contacts with various electrode (antenna) geometry designs. The single nanowire detectors show comparable sensitivity to those of conventional devices (such as the photoconductive ion-implanted InP receivers). Finite-difference time-domain simulations were performed to understand the influence of detector antenna geometry design and compared with our experimental results. The correlations between device performance, nanowire optoelectronic properties, and antenna design will be discussed to provide further design guidance for the future work.

5th ANFF Annual Showcase Abstracts

Acknowledgement

We thank the Australian Research Council and EPSRC (UK) for financial support. We acknowledge the Australian National Fabrication Facility (ANFF) ACT node for access to the fabrication facilities used in this work, and the National Computational Infrastructure (NCI) for providing the computational resource and the Bandwidth Foundry International Pty Ltd for their product service.


Kun Peng obtained her BSc degree in Materials Physics from Xi’an Jiaotong University and M.Sc in Atomic and Molecular Physics from Fudan University in China. Currently she is a PhD student of the Department of Electronic Materials Engineering at the Australian National University. Her research project is on design, fabrication and investigation of III-V semiconducting nanowire based electronic and optoelectronic devices, especially terahertz detectors. During her PhD study, Kun and her collaborators have successfully demonstrated single-GaAs-nanowire-based photoconductive THz detectors with high sensitivity and tunable detection bandwidth by using specific device geometry design.

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Our entrepreneurs 30

Our entrepreneurs

From Lab to Pilot Scale, AquaHydrex at the UOW ANFF Materials Node Adrian A. Gestos*, Paul Barrett AquaHydrex, 56 Montague St, North Wollongong, NSW, 2500. [email protected] Abstract

AquaHydrex is a spin out company that built on the culmination of years of research that took taken place within the University of Wollongong (UOW) and Monash University nodes of ACES

The company, which was formed in late 2013, partnered closely with ANFF at the UOW Materials node for over 2 years to help develop and de-risk the technology. As a result of this partnership, AquaHydrex was able to explore a range of potential manufacturing options in an efficient and cost effective manner. This work not only helped AquaHydrex develop powerful proof of concept data, but it also helped define the equipment and design of its new custom built pilot facility which was opened in May 2015.


Adrian Gestos completed his PhD in Materials Science with ACES, IPRI at UOW in 2011 before starting as a Postdoctoral Research Fellow at Deakin University. In 2013 he returned to the UOW AIIM facility as the ANFF Fabrication Technician. At ANFF he worked on a range of projects including electrochromic devices and graphene coatings in addition to other external commercial projects including part time with AquaHydrex. In January 2015 Adrian joined AquaHydrex full time as an R&D Engineer working to scale up the technology to be ready for manufacturing.



Are HTS Josephson junction devices ever going to be able to suitable for a mass market? C.P. Foley*, J. Du, E.E. Mitchell, S.H.K. Lam, S.T. Keenan, J. Lazar, M. Bick and K.E. Leslie CSIRO P.O. Box 218, Lindfield, NSW 2070 Australia * email: [email protected] Abstract

Since the discovery of the YBCO high temperature superconducting (HTS) materials, step-edge junctions on MgO substrates have been used in a range of devices. These include RF and DC SQUIDs, THz detectors, mm wave receivers and most recently SQUID arrays. These particular HTS junctions have several advantages over other HTS junctions prepared by other techniques as they have high IcRN values, can be placed anywhere on a substrate, and they have proven to be robust in magnetically unshielded applications. HTS Step edge junctions on MgO substrates have proven to be an excellent technology for application in arrays and devices what need multiple junctions on a single chip. The Josephson junction is created across a grain boundary that forms at the top edge of the MgO substrate step. TEM micrographs of these junctions show small numbers of dislocations but further work is needed to refine this junction technology to reduce the junction’s critical current variation across the chip. CSIRO developed this patented step edge junction technology in the late 1990’s and has been refining it ever since. This junction technology has an argon ion etched step formed in the MgO substrate. The approach enables the formation of a single grain boundary at the top of the step and uses small lattice distortions at the rounded bottom of the step and on the return path. The fabrication, properties and their application in new detectors will be described at the conference.


Dr Cathy Foley, Deputy and Science Director of CSIRO Manufacturing Flagship, has made distinguished contributions to the understanding of superconducting materials and to the development of devices using superconductors to detect magnetic fields and locate valuable deposits of minerals. She has made significant contributions to the scientific community as president of several scientific societies and as a member of committees such as PMSEIC giving advice to Government on scientific and technological matters. She the International IEEE Award for Continuing and Significant Contributions to Applied Superconductivity 2014. In May 2015 she will be awarded the Clunies Ross Medal of the Australian Academy of Technological Science and Engineering. She is the Cahir of the ANFF Vic Node Collaboration Committee.



Getting Down to Business – The Art of Glass Machining Evan Johnson, Luis Lima-Marques Institute for Photonics and Advanced Sensing and School of Physical Sciences, The University of Adelaide, Adelaide, SA5005, Australia [email protected] Abstract

New high-tech materials, and increasing demands on surface quality and precision have made the utilisation of new manufacturing technologies and machining methods indispensable. The DMG Ultrasonic 20 Linear located at the the University of Adelaide’s ANFF’s Optofab facilities, offers the perfect solution by combining precision and versatility, at a level of efficiency that was inconceivable only a few years ago. By the kinematic superposition of the tool rotation with an additional oscillation, traditionally difficult to machine high-performance materials can now be machined with excellent results. The art of machining glass is a perfect demonstration of this versatility and potential for both research and industry.


Evan Johnson has 10 years of 5-axis industry experience including simultaneous programming and machining.



Getting Down to Business – The Trajan Story Heike Ebendorff-Heidepriem, Piers Lincoln, Luis Lima-Marques Institute for Photonics and Advanced Sensing and School of Physical Sciences, The University of Adelaide, Adelaide, SA5005, Australia [email protected] Abstract

Trajan Scientific and Medical (Trajan) and the Institute for Photonics and Advanced Sensing (IPAS) have successfully collaborated in a Photonics Catalyst Program research project aimed at optimising the glass extrusion technology at the University of Adelaide's ANFF facilities to fabricate novel ion transfer tubes for mass spectrometry with high geometrical precision. This joint project demonstrated the significant synergies between Trajan and IPAS, which encouraged a strategic collaborative relationship to develop. Trajan Scientific and Medical is a leading manufacturer of components and consumables for analytical and life sciences, with a global network of offices and staff to serve its customer base. Trajan was founded in 2011, and has its global headquarters in Melbourne. Trajan is now at an advanced stage of establishing an R&D and manufacturing node at the University of Adelaide, which will leverage the glass and fibre fabrication facilities within the Adelaide Facility of the ANFF Optofab Node. This collaboration will foster development of scientific and manufacturing excellence in the field of glass and fibre production, thus furthering the University of Adelaide’s standing as a global leader in glass and fibre research, as well as demonstrating the ANFF’s high level of industry engagement. The model created for this relationship with Trajan can form a useful tool for other collaborative relationships within the ANFF.


Heike Ebendorff-Heidepriem received the Ph.D. degree in glass chemistry from the University of Jena, Germany, in 1994. Since 2005, she has been with the University of Adelaide, Australia. Currently, she is Deputy Director of IPAS, The Institute for Photonics and Advanced Sensing, leader of IPAS’s Optical Materials & Structures Theme, and the Associate Director of the Optofab Adelaide node of ANFF at Adelaide University. Heike is also a Senior Investigator of the ARC Centre of Excellence for Nanoscale BioPhotonics. Her research focuses on the development of mid-infrared, high-nonlinearity and active glasses; glass, preform and fibre fabrication techniques and surface functionalisation of glass.



Growth technology of large-scale low-cost epitaxial cubic silicon carbide and its wide applications Li Wang*, Glenn Walker, Jessica Chai, Leonie Hold, Sima Dimitrijev, Nam-Trung Nguyen and Alan Iacopi Queensland Micro- and Nanotechnology Centre, Griffith University, Nathan, QLD, 4111, Australia. *[email protected] Abstract

As the energy needs of the planet are likely to double with the next 50 years, the stage is set for a major energy shortage. As a result, the design and manufacture of post-Si generation energy efficient devices and production of clean renewable energy are in great need. Cubic silicon carbide (SiC) has a band gap of 2.36 eV, high electron mobility, excellent chemical stability and mechanical properties, and can be epitaxially grown on large-diameter Si substrates to utilize the existing Si fabs. The combination of all these properties makes it an economically viable approach to fabricate energy efficient SiC devices to reduce the energy consumption and to produce renewable energy. In this presentation, the unique growth technology of high quality 3C-SiC on large-diameter Si substrate is presented, it can deposit SiC uniformly on up to 300-mm Si wafers with a thickness non-uniformity of 98.5±0.8 %. The SiC films are grown by alternating supply epitaxy (ASE) method, the specific growth mechanism is proposed in this presentation. The unique reactor design enables a double-side deposition on Si substrates, which significantly reduces the wafer bow value and makes them suitable to be processed in semiconductor processing equipment. The proof of concept of micro-electro-mechanical system (MEMS) devices, distributed Bragg reflector (DBR) structures, and solar water splitting cells made of 3C-SiC on Si are demonstrated.


Dr. Li Wang is currently a Research Fellow working at Griffith University. She received a B. Eng. degree in Materials Science and Engineering from Shandong University in P.R. China, and her Ph.D. in Engineering from Griffith University, Australia. Her research interests include the preparation, characterisation, and applications of post-silicon semiconductor materials, especially silicon carbide. The unique properties of SiC make it a promising material for the applications in the following area: (1) as photoelectrodes for solar water splitting cells; (2) as templated for the fabrication of energy-efficient blue light emitting diode (LED) and high electron mobility transistor (HEMT); (3) micro-electro-mechanical systems (MEMS), such as negative temperature coefficient thermistors. Dr Wang also has extensive expertise with industry projects.



Prototyping and Entrepreneurship: making it big on the nanoscale Maryanne Large* Sydney Nanoscience Hub, Faculty of Science, University of Sydney, NSW 2006 *[email protected] Abstract

The scientific and technological impact of micro- and nano fabrication is becoming increasingly clear. A recent report by the Australian Academy of Sciences [1] highlighted the role that nanotechnology could play in transforming both science and the economy, with nanomedicine, photonics materials science and manufacturing being particularly highlighted. Augmenting Australia’s research strengths in these areas with state-of-the-art fabrication tools has the potential to not only enable research to address “grand challenges” facing our nation, but also address markets for nanotechnologies that are estimated to be worth 3 Trillion globally by 2020 [2].

The Sydney Nanoscience Hub (SNH) at the University of Sydney has recently been completed, and aims to support both Australian academic and industry users. At the core of the SNH is a research and prototyping facility (RPF), housed within a state-of-the-art, dedicated clean-room. The facilities being established in the RPF will dramatically expand the University of Sydney’s contribution to the ANFF.

However, facilities are only a part of the solution. Historically there have been substantial cultural barriers impeding researchers from commercialising their work. To address this, the SNH is developing an innovative program of educational and outreach activities, including a new interdisciplinary course covering product ideation and design, development of a business plan and prototyping using SNH resources. The course will culminate in a “demo day” presentation to experts, including industry representatives and investors.

[1] National Nanotechnology Strategy, Australian Academy of Sciences, 2012

[2] Roco MC, Mirkin CA, Hersam MC (eds) Nanotechnology research directions for societal needs in 2020: retrospective and outlook (2011)


Maryanne Large is a physicist with extensive research experience in optics and materials science in both the university and corporate sector. She is currently Associate Professor for Innovation and Commercialization in Faculty of Science at the University of Sydney, and assists with the development of the SNH.



Taking Solar Paint to Market Ben Vaughan* Centre for Organic Electronics, ANFF Materials Node, University of Newcastle, Callaghan, NSW, 2308. *[email protected] Abstract

Water based organic photovoltaic (OPV) modules present a real opportunity to redefine the role solar energy plays in our community. These OPV modules are low cost, flexible and able to be produced in multi kilometre runs per day. The Centre for Organic Electronics at the University of Newcastle is developing OPV modules on a pilot-scale, using the ANFF roll-to-roll (R2R) coating facilities. These facilities provide a strong platform to demonstrate the commercialisation possibilities of this exciting technology. This talk will outline progress in the development of this new energy technology. These new developments will be discussed in the context of the broader energy market and the need for low cost renewable energy sources.


Dr Vaughan completed his undergraduate degree in Microelectronic Engineering in 2000 with honours. He worked for several years for a Brisbane based engineering firm developing fire control and train communication systems. In 2005 Dr Vaughan relocated to the University of Newcastle to develop a radio tracking system to follow ‘Flossy’ the possum. He completed his PhD in Physics in 2011, focused on organic solar cells and has continued this research, recently completing a post-doctoral position with the COE at the University of Newcastle. Dr Vaughan is the COE ANFF Materials Node laboratory manager.

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Nano-electronics 38

Nano-electronics

A two-qubit logic gate in silicon Menno Veldhorst*†, Chih-Hwan Yang†, Jason C.C. Hwang†, Wei Huang†, Juan-Pablo Dehollain†, Juha T. Muhonen, † Stephanie Simmons†, Arne Laucht†, Fay E. Hudson†, Kohei M. Itoh‡, Andrea Morello† and Andrew S. Dzurak† †Centre for Quantum Computation and Communication Technology, School of Electrical Engineering and Telecommunication, The University of New South Wales, Sydney, NSW 2052, Australia ‡School of Fundamental Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan *[email protected] Abstract

We present universal quantum logic using single electron spins in silicon quantum dots and discuss the outlook on realising a large-scale quantum processor using the same silicon manufacturing technologies that have enabled the current information age.

Quantum computation requires qubits that can be coupled and realized in a scalable manner, together with universal one- and two-qubit logic gates. Strong effort across interdisciplinary fields has led to an impressive array of qubit realizations. Despite this, high-fidelity two-qubit gates in the solid-state that can be manufactured using standard lithographic techniques have so far been limited to superconducting qubits, as semiconductor systems have suffered from difficulties in coupling qubits and dephasing.

We show that the qubit coherence time can be greatly enhanced using single spins in isotopically enriched silicon [1,2], and demonstrate single- and two-qubit operations in a quantum dot system using the exchange interaction[3]. Direct gate-voltage control provides single-qubit addressability, together with a switchable exchange interaction that is employed in the two-qubit controlled phase gate. By performing simultaneous readout on both qubits, we are able to measure two-spin probabilities and show clear anticorrelations between the qubits due to the CNOT gate.

References

[1] M. Veldhorst et al., “An addresable quantum dot qubit with fault-tolerant control-fidelity,” Nature Nanotechnology, vol 9, pp.981-985, 2014. [2] M. Veldhorst et al., “Spin-orbit coupling and operation of multi-valley spin qubits, arXiv.1505.01213. [3] M. Veldhorst et al., “A two qubit logic gate in silicon”, Nature, in press. Presenter’s biography

Menno Veldhorst (1984) obtained his masters’ degree in physics at the University of Twente, The Netherlands. He received his PhD with honours in the group of Prof. Dr A. Brinkman and Prof. Dr. H. Hilgenkamp and was awarded the PhD Overijssel award for best PhD of the university. Consequently, he was awarded an NWO Rubicon grant to work for his postdoctoral research on silicon quantum computation at the University of New South Wales.


Nano-electronics 39

CMOS-compatible RF notch filter enabled by SBS in silicon Alvaro Casas-Bedoya,* Blair Morrison, Mattia Pagani, David Marpaung, Benjamin J. Eggleton Center for Ultrahigh Bandwidth Devices for Optical Systems (CUDOS), Institute of Photonics and Optical Science (IPOS), School of Physics, University of Sydney, NSW 2006, Australia *Corresponding author: [email protected] Abstract

We demonstrate the first, to the best of our knowledge, functional signal processing device based on stimulated Brillouin scattering in a silicon nanowire. We use only 1 dB of on-chip stimulated Brillouin scattering gain to create an RF photonic notch filter with 48 dB of suppression, 98 MHz linewidth, and 6 GHz frequency tuning. This device has potential applications in on-chip microwave signal processing and establishes the foundation for the first CMOS-compatible high-performance RF photonic filter.


Alvaro Casas Bedoya is currently a Postdoctoral research fellow and the OSA/SPIE student chapter advisor in CUDOS. He received his PhD in physics from the University of Sydney in 2013 where he investigated photonic crystals and optofluidics. He received a double MSc degree in Photonics (through the Erasmus Mundus program) from St Andrews & Heriot-Watt universities in Scotland (2008) and Gent & VUB Universities in Belgium (2009) (Distinction level). His MSc research was based in Silicon-On-Insulator and photonic sensing architectures. He obtained a BSc. (Physics) (Hons) from Universidad del Valle in Colombia (2005). Dr Casas Bedoya current research interests are based on design, simulation and fabrication of integrated optical circuits for stimulated Brillouin scattering, optomechanics, and sensing.


Nano-electronics 40

Mobility Spectrum Analysis of Electronic Transport in Emerging and Future Nanostructured Materials and Devices Gilberto A. Umana-Membreno1, Hemendra Kala1*, Amit Choudhary1, Gregory Jolley1, Nima Dehdashti Akhavan1, Mikhail A. Patrashin2, Kouichi Akahane2, Brianna Klein3, G. Gautam3, M. N. Kutty3, E. Plis3, S. Krishna3, S. J. Chang4, M. Bawedin5, S. Cristoloveanu5, Jarek Antoszewski1, and Lorenzo Faraone1. 1School of Electrical, Electronic and Computer Engineering, The University of Western Australia, 35 Stirling Highway, Crawley, Western Australia 6009. 2National Institute of Information and Communications Technology, Koganei, Tokyo 1848795, Japan. 3Centre for High Technology Materials, University of New Mexico, Albuquerque, NM 87106, United States. 4Department of Electrical Engineering, Yale University, New Haven, 06511 CT, United States. 5IMEP-LAHC, Grenoble INP Minatec, BP 257, 38016 Grenoble, France. * [email protected] Abstract

The concentration and velocity of charge carriers (electrons or holes) determine the performance in all micro/nano electronic and optoelectronic devices, and thus can be employed as parameters to evaluate and optimize material synthesis and fabrication processes. Advanced multilayer semiconductor devices usually contain multiple populations of distinct carrier species which makes the accurate determination of these parameters highly complex. The characterization of these novel semiconductor materials and devices requires more sophisticated analysis procedures than the classical Hall measurement at a single magnetic field. The mobility spectrum analysis methodology is based on the analysis of magnetic-field dependent conductivity and Hall measurements, often performed as function of sample temperature, obtained from optimized test structures. The high-resolution mobility spectrum analysis methodology deployed at the WA-node of the ANFF has been demonstrated to yield unique insight into the transport properties of devices such as InAs/GaSb superlattices for photodetector applications and ultra-thin silicon-on-insulator MOSFETs, among others. It is arguably the most accurate technique for the extraction of electronic transport parameters in advanced electronic and optoelectronic materials and devices, and represents a significant resource for the design, optimization and manufacturing of such devices. The availability of the mobility spectrum analysis methodology will enhance the ability to advance the manufacturing of advanced sensors and detectors which find applications in fields such as astronomy, health-care, communications and defence.


Hemendra Kala received his B.E. degree in Electronics and Communications Engineering from the Birla Institute of Technology, India, in 2007. He then went on to obtain a Master’s degree in Microelectronics Engineering from the University of Western Australia in 2010, where he is currently completing his Ph.D. degree. His main research interests include characterization of semiconductor materials for infrared detectors.


Nano-electronics 41

NbO2 based Integrated Selector-Memory and Neuristor Circuit Elements S. K. Nandi*, S. Li, X. Liu, D. K. Venkatachalam, R. G. Elliman Department of Electronic Materials Engineering, The Research School of Physics and Engineering, The Australian National University, ACT-2601, Australia Abstract

Resistive random access memories (ReRAM) are considered promising alternatives to conventional charge storage-based devices because of their low production cost, simple fabrication, and excellent scalability. However, the realization of these simple crossbar architectures is hindered by an inherent problem called sneak current paths. These arise from the fact that resistive memory devices pass current in either direction when in the ‘on’ (low resistance) state and can thereby give rise to unintended addressing of memory elements via indirect addressing routes. To address this limitation it is necessary to integrate a selector device with each memory element. Our recent studies have shown that the metal to insulator transition (MIT) in NbO2 thin films satisfies these requirements. Specifically, we have shown that HfO2-based resistive switching memory elements can be integrated with NbO2 based selector devices to provide integrated structures with low threshold voltages/currents and large RON/ROFF ratios. The threshold switching characteristics of the MIT in NbO2 have also been found suitable for applications such as: signal repetition, active transmission and other neuristor logic. These applications derive from the fact that the MIT devices exhibit negative differential resistance and therefore form the basis of a voltage controlled oscillator. Appropriate coupling of oscillators then enables the neuristor response. These devices exhibit many of the characteristics of biological neurons, including: threshold spiking, voltage dependent frequency modulation and spike-timing-dependent plasticity. To this end we have voltage-controlled frequency modulation in single NbO2-based oscillators and achieved oscillation frequencies of up to 20 MHz, the highest reported to date.


Sanjoy Nandi obtained MPhil in Physics from Bangladesh University of Engineering and Technology. Before that, he completed BSc (Hons) and MS at the University of Chittagong. He is currently pursuing the PhD degree at The Australian National University working on resistive switching in transitional metal oxides. The aim of his research is to understand the microstructural origin of resistive switching properties in transitional metal oxides. Additionally, he is working in an industrial linkage project with Applied-Materials to investigate potential of ion-beam synthesised ReRAM. His research interests include high-permittivity gate dielectric films, resistive switching and neuromorphic computing. Nandi has authored more than a dozen papers on resistive switching published including in Physical Review Letters, Applied Physics Letters, and Journal of Physics D-Applied Physics etc.

www.scitek.com.au02 9420 [email protected]

Nano Fabrication Surface Characterisation

Vacuum Technology

New!


Micro-manufacturing (II) 43

Micro-manufacturing (II)

Open Channel Microneedle Array Fabrication by 3D Laser Lithography and Micromoulding Techniques Zahra. Faraji Rad1, 2*, Graham J. Davies1, Carl Anthony2, Philip D. Prewett2, Robert E. Nordon1 1 Graduate School of Biomedical Engineering, University of New South Wales, Sydney, NSW, 2052, Australia 2 School of Mechanical Engineering, University of Birmingham, Birmingham, B15 2TT, UK *Email: [email protected] Abstract

Microneedle patch arrays are a necessary component for point-of-care diagnostics by addressing the clinical need for unskilled, painless collection of blood or interstitial fluid. Optimal microneedle geometry for this application has not been achieved by Deep Reactive Ion Etching (DRIE) or conventional 3D printing. The aim of this study was to evaluate the utility of 3D lithography for the manufacture of master moulds, and to manufacture this geometry from medical grade thermoplastics by replica moulding.

Microneedle master moulds were fabricated by two-photon polymerization using the Photonic Professional GT system (Nanoscribe GmbH, Germany). A ‘soft’ negative impression of the master was cast using silicone elastomer (polydimethylsiloxane, PDMS), followed by soft embossing of thermoplastic microneedles using PDMS as a negative mould.

Soft embossed thermoplastic arrays had the same geometries as the master microneedles. Preliminary studies have shown that it was not possible to emboss hollow microneedles by the soft embossing method as the central PDMS cores remains inside some of the internal channels after de-moulding. However open channel microneedles with microchannels connecting to a reservoir were easily replicated by soft embossing. For the first time a series of novel designs of out-of-plane microneedles consisting of open channel networks and fluid reservoirs has been precisely manufactured and replicated. The elastomeric mould can be reused without affecting the quality of the final structure; the PDMS moulds remained undamaged after at least 22 replication cycles. It was concluded that polymeric microneedles fabricated have the mechanical strength to penetrate biological tissues without failure.

This manufacturing technique allows implementation of geometric designs directly without manufacturing constraints imposed by machining or etching processes.


Zahra Faraji Rad is a research associate at the school of mechanical engineering in the University of New South Wales. She received her PhD from the University of Birmingham and the University of New South Wales. She was the first and only student who did a joint PhD at both universities under U21 joint PhD arrangement. She received her MEng with First Class Honour from the University of Birmingham at 2010. Her research interest is microfluidics and microsystems technologies and applications with focus on microfabrication of microneedles.



Porous silicon micro-conical tips for gene delivery Stella Aslanoglou†‡, Dr Maria Alba-Martin†, Dipankar Chugh§, Dr Roey Elnathan†, Dr Bahman Delalat†, Prof Nico Voelcker† (*) † University of South Australia, Mawson Lakes 5095, South Australia ‡ Institute of Electronic Structure and Laser – Foundation for Research and Technology Hellas, P.O. Box 1527, GR-711 10 Heraklion, Greece § The Australian National University, Canberra, ACT 0200 Australia (*)[email protected]

Abstract

The delivery of genes to mammalian cells using non-viral methods has become a very promising approach for gene therapy in the last few years [1]. One of the current impediments of successful gene therapy is the inefficient delivery of the corrective nucleic acid code into target cells. New methods are required to deliver nucleic acid reagents into diverse cell types effectively and with high yields.

We report on the fabrication of a delivery platform for cell transfection studies, comprising of porous silicon micro-conical tips of up to 8μm in height. Fabrication starts with self-assembly of a hexagonal close-packed (hcp) 2D array of polystyrene nanospheres (PSNS) over a large area of a Si wafer via convective assembly. The resulting hcp monolayer array is then converted into non-close-packed monolayer arrays using O2 plasma etching. The etched PSNS then serve as a mask for the Deep Reactive Ion Etching (DRIE) of the sample using the “Bosch” process. The next step in the fabrication of the micro-conical arrays is the formation of a smoother and sharper morphology using a combination of thermal oxidation and wet etching.

Finally, pores are created by performing electrochemical etching of Si in a hydrofluoric-based solution. Preliminary results of cell transfection studies were acquired using HEK293 cells.

References:

1. Glover, D.J., H.J. Lipps, and D.A. Jans, Towards safe, non-viral therapeutic gene expression in humans. Nature Reviews Genetics, 2005. 6(4): p. 299-310.


Mrs Stella Aslanoglou graduated from the Physics Department of National and Kapodistrian University of Athens in September 2013. During her studies she focused on Solid State Physics and Materials Science. She conducted her Honours with title: "Construction and characterization of thin Al2O3 films, constructed by oxygen plasma" at the NCSR 'Demokritos' in Athens. Following that, she completed her Internship with title: "Laser-based fabrication of scaffolds for tissue engineering" at IESL – FORTH in Heraklion city in Greece. In October 2013 she started her Master in "Micro-Optoelectronics" at the Physics Department of University of Crete in Greece. At the moment she is a Visiting student at FII– UniSA working on her Master Thesis, whereas she remains a member of the Biophotonics Group at IESL-FORTH in Greece.



Dust and diamonds: getting to the core of the problem Alex Stokes†,‡*, Robert Williams†,‡, Daniel Howell§, Bill Griffin§, Danielle Camenzuli¶, Damien Gore¶ †. MQPhotonics Research Centre, Macquarie University, NSW, 2109 ‡. OptoFab node, Australian National Fabrication Facility §. ARC Centre of Excellence for Core to Crust Fluid Systems (CCFS) and GEMOC, Department of Earth & Planetary Science, Macquarie University, NSW 2109, Australia ¶. Department of Environmental Science, Macquarie University NSW, 2109. *[email protected] Abstract

Utilising the Argon-ion cross-section (JEOL-CP) and benchtop-SEM/EDS (Hitachi/Bruker) facilities at the OptoFab node, several students and researchers have been assisted in solving key questions their research was posing. In this presentation we will give an overview of the tools and techniques these researchers are accessing, and highlight some of the findings from the broad range of disciplines we service. These highlights include, aiding the investigation into the authenticity of natural "Ophiolite" diamonds from Tibet - which can be similar to synthetic diamonds. The facilities have also been used to help analyse the efficacy of soil de-contamination treatments to remove metals and petro-chemicals in harsh environments. The application of these facilities to the fabrication and analysis of photonic devices such as diamond waveguides and Bragg gratings will also be overviewed in brief.

Figure 1. Hitachi Bench top SEM images of before and after JEOL cross-sectional polishing a Tibetan Diamond to expose metal-alloy inclusions.

Figure 2. Bruker EDS elemental analysis highlights the varied components in a contaminated Antarctic soil sample.




Alex received his B. Sci from Macquarie University in 2013 and has been working as facility technician for laser machining and microscopy in the OptoFab facilities since then. His work at the ANFF facilities has resulted in several published findings for our users, and several commercial R&D outcomes for ANFF users.



3D printing of minaturised lenses with sub-wavelength print resolution Peter Fejes†, Jiawen Li†,*, Bryden C. Quirk†, Rodney W. Kirk†, Dirk Lorenser‡, David D. Sampson†,§, and R.A. McLaughlin† †Optical+Biomedical Engineering Lab, University of Western Australia, Crawley, WA 6009, Australia. ‡Cylite, Clayton, VIC 3168, Australia. §Centre for Microscopy, Characterisation & Analysis, The University of Western Australia, Crawley, WA 6009, Australia.*[email protected] Abstract

3D printing technology has become widespread in the past decade. However, there is very limited use of this technology in Optics. A fundamental obstacle that has hindered the penetration of this technology in optical engineering is the poor print resolution, which greatly deteriorates the imaging quality of a lens. Recently, a novel technology, commercialised by Nanoscribe (Germany) and available at the ANFF Queensland node (ANFF-Q), allows 3D printing with a spatial resolution of 50-100 nanometres. This 3D printing technology is based on direct laser writing (DLW) by multi-photon polymerisation, a nonlinear absorption process in which a high-intensity, ultra-short pulse laser is tightly focused into a photo-sensitive monomer, causing polymerisation of the lens material. This technology offers the potential to print highly miniaturised lenses with sub-millimetre size, and is suitable for rapid prototyping of lenses with innovative optical designs. Lenses with complicated geometries can be fabricated in tens of hours. Through collaboration with ANFF-Q, we have fabricated prototypes of miniaturized imaging endoscope lenses, designed for acquiring images inside the airway in biomedical applications. Several technical challenges of this technology were overcome and will be presented at the Research Showcase. In addition, we will demonstrate the effect of the print resolution on imaging quality. Preliminary ex vivo scans of airways images will be presented and compared with those acquired using a traditional lens.

Presenter’s biography of the potential speaker

Dr. Jiawen Li received her BS degree in Optical Engineering from Zhejiang University in 2010, and her PhD degree in Biomedical Engineering from University of California Irvine in 2015. She recently joined the Optical+Biomedical Engineering Lab at the University of Western Australia as a postdoctoral researcher. Her PhD work focused on the development of highly novel dual-modality ultrasound/optical coherence tomography imaging probes for assessment of coronary artery disease. Her research interests include optical coherence tomography (OCT), microscope-in-a-needle, Doppler OCT, multimodality imaging and ultra-thin endoscopes.


Showcasing our new capabilities 49

Showcasing our new capabilities

Time-of-flight secondary ion mass spectrometry (ToF-SIMS): Spectroscopy – Imaging – Depth Profiling Paul Pigram Centre for Materials and Surface Science and Department of Chemistry and Physics, La Trobe University, Victoria, 3086, Australia [email protected] Abstract

La Trobe University operates two ANFF-funded time-of-flight secondary ion mass spectrometers (ToF-SIMS). High precision surface mass spectrometry, imaging and depth profiling may be used to explore any type of solid material. Highlights and new opportunities include high sensitivity analysis of semiconductor structures and multilayers, 3D depth profiling of OPVs and OLEDS using argon gas clusters, and monolayer characterisation of biomaterials. Extensive in situ sample preparation capabilities, such as heating, cooling, and molecular deposition, offer unmatched flexibility for designing experiments.


Paul Pigram is the Director of the Centre for Materials and Surface Science at La Trobe University. His research interests lie in creating, controlling and understanding molecular structures at surfaces. He has developed a comprehensive surface analysis facility at La Trobe University, complemented by a range of in situ materials fabrication and modification capabilities and the capacity to design and fabricate novel high precision instrumentation. Prior to his appointment at La Trobe University, A/Prof Pigram held research appointments at UNSW. He completed a Ph.D. in Physics at the University of Sydney.



Epitaxial growth of advanced materials at ANFF-NSW Dr Jeffrey Cheung [email protected] Abstract

The materials fabrication capabilities available via the NSW Node have been expanded significantly with the addition of three new epitaxial growth tools: a Veeco GEN930 molecular beam epitaxy (MBE) system dedicated to III-V semiconductor heterostructures, and two Pascal pulsed laser epitaxial growth systems delivering a range of functional oxide and nitride heterostructures and nanocomposites.

This talk will detail the specifications and in-situ functionalities of each system and explore the process of design, growth and optimisation of epitaxial structures according to specific research goals. This tool-set will support a range of emerging research areas including: quantum technologies; clean energy conversion technologies, such as photovoltaics and thermoelectrics; Terahertz emitters and detectors; and new materials for spintronics, sensing and memory technologies.


Jeffrey Cheung is the process engineer responsible for the epitaxial growth tools at ANFF-NSW. His role involves user training and process optimisation for a wide range of materials grown in the Pascal pulsed laser epitaxial growth systems as well as growth of III-V heterostructures in the Veeco MBE.

Jeffrey’s background is in oxide heteroepitaxy via pulsed laser deposition. His previous research involved epitaxial nanocrystal growth of functional oxides using in-situ chemical and phase control of the epitaxial species. This research was the focus of his PhD in materials science at UNSW Australia.



Cathodoluminescence Characterisation of Nano Structures Mark N. Lockrey*†, Bijun Zhao‡, Philippe Caroff‡, H. Hoe Tan‡, Chennupati Jagadish‡ †1Australian National Fabrication Facility ACT Node, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 2601, Australia ‡Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 2610, Australia *Corresponding author: Email [email protected] Abstract

As the size of electronic devices are reduced, techniques available for the characterisation of individual device structures become limited. Recently the ANFF ACT node has acquired a high-resolution scanning electron microscope-cathodoluminescence (SEM-CL) system. This system allows for the optical properties of a range of materials to be investigated with nanometre resolution.

CL is a technique where a focused electron beam is used to excite optical emissions from a material. This technique allows for structural and optical features to be observed simultaneously with high resolution.

At the ANFF ACT node, CL has been utilised to characterise a variety of nano-structured materials, including both GaN and GaAs based materials. In this work the capabilities of a high-resolution SEM-CL system will be discussed and the results of CL characterisation of GaN and GaAs nanostructures will be presented.


Mark Lockrey is a Microanalysis Research Officer and CL-SEM Process Engineer for the ANFF ACT node, specialising in cathodoluminescence characterisation of materials. Mark has recently completed his PhD at the University of Technology, Sydney, where he studied the effects of low-energy electron-beam irradiation on the optical properties of III-nitride LEDs using cathodoluminescence.



Imaging with a Deft Touch: the Scanning Helium Microscope Adam Fahy*, Matthew Barr+, Paul C. Dastoor Centre for Organic Electronics, ANFF Materials Node, University of Newcastle, Callaghan, NSW, 2308. *[email protected]; [email protected] Abstract

Delicate structures (such as biological samples, organic films for polymer electronics and adsorbate layers) can suffer degradation under the energetic probes of traditional microscopies. Furthermore, the charged nature of these probes presents difficulties when imaging with electric or magnetic fields, or for insulating materials where the addition of a conductive coating is not desirable. Scanning helium microscopy (SHeM) is a new imaging technique which is able to investigate such structures completely non-destructively by taking advantage of a neutral helium beam as a chemically, electrically, and magnetically inert probe of the sample surface.

The talk will introduce the motivation, conceptual design and final realisation of the technique. As an entirely new addition to the field of microscopy, the SHeM required innovative approaches in terms of the source, optics and detection. As such, support from the ANFF network was crucial to development, not only in terms of the instrument construction, but also fabrication of specific samples with which to investigate the underlying physics behind image contrast. With the promise of atom microscopy now borne out through experimental studies, SHeM seeks wider adoption as a complementary technique to the surface science toolset.

Matthew Barr is currently undertaking his PhD candidacy at the University of Newcastle, in the Centre for Organic Electronics (COE). He completed his Honours Degree in Physics at Newcastle in 2010 and was the recipient of the awards of First Class Honours and University Medal. In 2011 he received an Australian Nanotechnology Network travel fellowship which allowed him to travel to the University of Cambridge UK where he was involved in the successful construction of a first generation helium microscope. His research interests include the design and development of a new type of microscope utilising neutral helium atoms as the probe particle. He specialises in microscope design and has a particular interest in free jet atomic and molecular beam sources.


Adam Fahy is a PhD (Physics) student at the University of Newcastle, Australia, within the Priority Research Centre for Organic Electronics (COE). He completed his Honours degree in Physics at Newcastle in 2010, achieving First Class Honours. His research interests include applications of carbon nanotubes, ionisation mechanisms for neutral species, and novel instrument design. In particular, his PhD project concerns the construction and operation of a new type of microscope utilising neutral helium as the probe particle.

Nanotechnology Solutionswww.axt.com.au

Nanomanipulators & Precision Stages

Microanalysis & Surface Analysis

EM Sample Preparation

FIB, SEM & Holographic Microscopy

Holographic Tomography3D Digital Microscopy

SPM, TERS & SNOM


Advanced Materials 54

Advanced Materials

Metamaterials to Medicine Simon C. Fleming†*, Alexander Argyros†, Juliano Hayashi†, Xiaoli Tang†, Christopher Davey†, Shicheng Xue‡, Geoff Barton‡ and Boris Kuhlmey†,§ † Institute of Photonics and Optical Science (IPOS), School of Physics, The University of Sydney, NSW 2006 ‡ School of Chemical and Biomolecular Engineering, The University of Sydney, NSW 2006 § Centre for Ultrahigh bandwidth Devices for Optical Systems (CUDOS), School of Physics, The University of Sydney, NSW 2006 [email protected] Abstract

In past ANFF Showcases I have described work using the ANFF OptoFab polymer draw tower facility to develop metamaterials. This has been largely to support curiosity driven research and has successfully demonstrated a practical and scalable way to fabricate metamaterials and metamaterial based devices. A key outcome was the demonstration of a THz hyperlens, capable of

level in this important spectral range.

At this Showcase I will provide an update on this research and focus on how we are expanding our capabilities to address several needs in the medical area, including work with Australian SMEs.

The THz has important spectral signatures, and we have been improving the resolution of the hyperlenses by shifting from hundreds of fine wires to tens of thousands.

The mid-IR also has important spectral signatures, and sources and detectors are more readily available than the THz. We have made significant progress in translating our capability into this spectral region by shrinking the dimensions substantially and changing materials.

The ability to make dense and/or custom arrays of extremely fine wires embedded in dielectrics has multiple potential applications in biomedical devices and research. We have been adapting our metamaterial fabrication to support this application area, in particular by adopting materials more appropriate to these applications.

Key features of each of these advances and the needs of the applications will be described. This information may permit the identification yet further opportunities.


Simon Fleming has researched photonics and optics for thirty years at Leeds University, British Telecom Labs and the University of Sydney. From 1996 to 2008 he headed the Optical Fibre Technology Centre, and from 2004 to 2006 was CEO of the Australian Photonics CRC. He is currently a Professor and Deputy Head of the School of Physics at the University of Sydney. His research includes induced optical nonlinearity, fibre devices and metamaterials. He has authored ~300 publications, including many patents, and has been involved in organising ~60 conferences. He has served on company and advisory boards and is involved in the commercialisation of university research. He is Vice President of the Australian Optical Society and a Fellow of the Institution of Engineering and Technology.



Tandem Solar cells on Silicon substrates for a new industrially competitive PV technology Ivan Perez-Wurfla*, Li Wanga*, Brianna Conrada, Anastasia Soeriyadia, Xin Zhaoa, Dun Lia, Martin Diaza, Anthony Lochtefeldb, Andrew Gergerb and Allen Barnetta aSchool of Photovoltaic and Renewable Energy Engineering (SPREE), UNSW Australia, Sydney, NSW 2052, Australia bAmberWave Inc., Salem, NH 03079, USA Abstract

Silicon solar cells comprise 91% of today’s PV market due to their economic competitiveness and reliability despite the efficiency of the best silicon solar cells having stayed at around 25% for the last 15 years. Conversely, cells made of materials in the 3rd and 5th column of the periodic table (III/V) have reached efficiencies close to 45% but their high cost has limited their application mostly to space. We have combined for the first time the best of both worlds: the affordability of silicon with the high efficiency of the III/V materials. Epitaxially growing III/V materials on Si substrates is a big challenge due to their large lattice and thermal mismatch. To tackle the atomic mismatch, we have gradually changed the atomic spacing in the substrate to match that of the III/V materials using germanium as an intermediary. The growth has been finely tunned to overcome issues related to thermal mismatch. Using this approach, and leveraging the matureness of the Si semiconductor industry and state of the art LED epitaxy, our industrial partners have produced almost perfect layers of III/V material on silicon substrates. ANNF UNSW provided the unique combination of lithography, etching and metal evaporation not available at standard solar cell fabrication facilities making it possible to fabricate solar cells with efficiencies that rival those of the best Si cells in the market today. With a demonstrated 20.6% efficiency and 26% forecasted for the near future, we have now a clear pathway for a new and disruptive PV technology.


Dr. Perez Wurfl is a senior lecturer at SPREE where he has taught High Efficiency Silicon Solar Cells and Advanced Solar Cell Characterisation. His research is primarily focused on 3rd Generation and III/V photovoltaics overviewing the work of 13 PhD students. Between 2002 and 2006 he was Chief Staff Scientist at Power Sicel Inc. (part of Microsemi Corporation), a spin-off company that stemmed from his patent on Silicon Carbide transistor fabrication. There he developed an expertise on bringing products from laboratory demonstrations to commercial prototypes. He was a Fulbright fellow from 1996 to1999 at the University of Colorado Boulder. He has 44 scientific publications in the area of electronics and photovoltaics.



Characterisation of visible light driven nanoplate photocatalysts Ashley D. Slattery†, Haifeng Feng‡, *Yi Du‡ †Flinders Centre for NanoScale Science and Technology, Flinders University, South Australia, 5042, Australia. ‡Institute for Superconducting and Electronic Materials, University of Wollongong, New South Wales, 2522, Australia. *[email protected] Abstract

Nanoplate photocatalysts have promising applications in areas such as wastewater purification and water splitting for renewable energy generation. Understanding the structure and chemical composition of these nanoplates is critical for tuning their performance, but their small size makes characterisation difficult.

Here we report the investigation of bismuth oxybromide nanoplates, using various nano-characterisation techniques to elucidate the structural and chemical properties of this material. In particular, tip-enhanced Raman spectroscopy was used to image the chemical features of individual nanoplates, resolving the varying structure between the centre and the outer edge of the nanoplate. The results of this study move toward deciphering the over 40 year old mystery of photocatalytic dynamics at the atomic-level, behind conventional photocatalysts.


Ashley Slattery has a background in atomic force microscopy while studying a PhD at Flinders University, and now manages several instruments including a tip-enhanced Raman microscope in the centre for nanoscale science and technology.

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Nanobio 58

Nanobio

Developing Functional Surfaces at the ANFF-Vic Biointerface Engineering Hub Karyn Jarvis*, Martin Abrigo, Thomas Ameringer, Hannah Askew, Adoracion Pegalajar-Jurado, Sally McArthur ANFF-Vic Biointerface Engineering Hub, Swinburne University of Technology, John Street, Hawthorn, Victoria 3122 *[email protected] Abstract

The ANFF-Vic Biointerface Engineering Hub at Swinburne University of Technology has a suite of plasma reactors and surface characterization instruments which enables the development of surfaces for a variety of applications. An industrial collaboration with DSTO and Catapult Sports investigated the modification of miniaturised optoelectronic sensors to increase hydrophilicity and thus preventing droplet induced light scattering. The sensors treated with air plasma exhibited a significant increase in hydrophilicity and sensor response at high humidity. Antibacterial plasma polymerised cineole (ppCo) films have been produced and exposed to both S. aureus and E. Coli bacteria which resulted in reductions in the number of bacteria by 63% and 99% respectively. ppCo also reduced the growth of biofilm where less than 1 % of the surface was covered after 5 days in comparison to 23 % for glass slides. A variety of plasma polymerised coatings have been used to modify the surface of electrospun polystyrene fibers for wound dressings and flat substrates for supported lipid bilayers. The coated fibers were exposed to E. Coli bacteria which resulted in the highest proportion of live cells on the allylamine coated fibers while ppCo coated fibers had only minor bacterial cell attachment. For supported lipid bilayers, acrylic acid coated surfaces could be used to form a variety of lipid structures while allylamine coated surfaces produced immobile vesicular layers. Plasma polymerisation is a versatile technique that enables the modification of a variety of surfaces for a number of applications.


Karyn is a research engineer at the ANFF-Vic Biointerface Engineering Hub at Swinburne University of Technology. She completed her PhD at the Ian Wark Research Institute (UniSA) and postdoctoral appointments at the Mawson Institute (UniSA) and Institute of Materials Engineering (ANSTO). Her main research interests are surface modification and characterisation, having previous experience working with materials for drug delivery, water treatment and solar cell applications.


Nanobio 59

Chiral objects within optical fields as mimics for biological motion David M. Carberry*, Vincent L. Y. Loke, Timo A. Nieminen, Halina Rubinsztein-Dunlop School of Mathematics and Physics, The University of Queensland, St Lucia, QLD 4072. *[email protected] Abstract

Since the discovery of micro-organisms, their motion has been both a source of wonder and a puzzle for researchers. Now, more than 300 years later, there is still a great deal to be learned. In particular, the understanding of bacterial motility is of great current interest for the treatment of many diseases. Additionally, bacteria and their motion also provide a design basis for a range of micro- and nanotechnologies; from microswimmers, to pumps and flow-meters for use on lab-on-a-chip devices as new sensors and machines. Chiral structures, which couple rotational and translational motion, are of particular interest.

Using 2-photon photopolymerisation (Nanoscribe), we produce helical objects to act as model systems for the bacterial motion of spirochetes. Initial characterisation demonstrates that helices can be made readily, with cross-sections comparable to those of spirochetes. These helices are optically trapped in a Gauss-Laguerre beam, where they orient themselves such that their length coincides with the direction of the laser beams propagation. The combination of the shape-induced chirality, the angular momentum imposed by the trapping beam, and laser power makes it possible to determine the coupling between the optical forces and the hydrodynamics.

By varying the helix pitch and diameter we are able to understand how the structure of spirochetes affects its motion. We will present results demonstrating the steady-state optical trapping position of the helices in particular Gauss-Laguerre states, the coupling of the optical forces to the hydrodynamic forces, and rotation rates.


David obtained his BSc and BEng from ANU in 2000. He followed this with a PhD in Physical Chemistry, also at ANU. His PhD topic used optical tweezers to demonstrate the fluctuation theorem – the 100-year elusive link between thermodynamics and statistical mechanics. He then moved to University of Bristol for his postdoc, helping to establish a holographic optical tweezers lab. During his 6-year stay he established a number of collaborations spanning numerous fields, including physics, electrical engineering, human-computer interfacing, biomedical research, and chemistry. He now works as a lecturer at University of Queensland. His primary research interests are 3D printing, microfluidics, and their interactions with optical fields.


Nanobio 60

Soft-Templated Synthesis of Highly Ordered Nanoporous Heme Proteins for Selective Sensing of Vapours Geoffrey Lawrence1, Kripal S. Lakhi1, Kinnari J. Shelat1,3, Kalimuthu Palraj2, Bernhardt Paul V2 and Ajayan Vinu1* 1Australian Institute of Bioengineering & Nanotechnology, The University of Queensland, St Lucia, Queensland, Australia 2School of Chemistry and Molecular Biosciences, The University of Queensland, St Lucia, Queensland, Australia 3Australian National Fabrication Facility – Queensland Node, Australian Institute of Bioengineering & Nanotechnology, The University of Queensland, St Lucia, Queensland, Australia Abstract

A novel fabrication method has been developed for the creation of nanoporosity in heme protein films such as cytochrome C, hemoglobin and myoglobin. The protein films are prepared by using a one-pot approach via soft templating technique wherein polystyrene (PS) beads with different molecular diameters are used as the structure directing agents (Scheme1). The obtained protein films are subjected to thorough physico-chemical characterization employing sophisticated techniques such as HRSEM, AFM and FT-IR. HRSEM and AFM results reveal that the films have highly ordered nanopores that are arranged in an orderly fashion (Figure1). FT-IR results confirm that the local structure of the proteins is maintained even after removal of the template. Moreover, the pore diameter and the thickness of the films can be finely controlled by varying the diameter of the PS spheres. The protein films were also grown on a quartz crystal microbalance (QCM) and used for sensing of organic vapours. Due to the simple basic nature of these protein films, it was found that they showed a high selectivity towards acidic vapour molecules with high levels of affinity and sensitivity. The amount of adsorption was found to decrease with increasing length of the carbon chain of the organic acids. The extent of adsorption was also found to be influenced by the concentration and the pore diameters of the nanoporous protein films. Among the protein films studied, cytochrome c, which has the smallest diameter, was found to be the best films for the selective sensing for acidic organic vapours.



Nanobio 61

Geoffrey has just submitted his PhD thesis at UQ. Had his Bachelors in Biotechnology followed by Masters in Nanoscience and Nanotechnology from Anna University, India. Some of the list of awards since the beginning of his PhD here at AIBN are

1) NIMS Internship Fellow at National Institute for Materials Science(NIMS), Tsukuba, Japan, 2014 2) Travel Grant Award for participating at 2nd International Conference on Green Energy Conversion, Yamanishi, Japan, September 2013. 3) Best Poster Award at the 2nd International Conference on Green Energy Conversion, Yamanashi, Japan, September 2013. 4) Best Oral Presentation award(350 euros) at the 21st International Conference on Materials and Technology, Portoroz, Slovenia, November 2013 5) Best Poster Award (500 AUD) at the 9th International Mesostructured Materials Symposium (IMMS-9), Brisbane, August, 2015


Nanobio 62

High-throughput Production of Transition Metal Complexes for Antibody Immobilization Nicholas Welch†, Judy Scoble‡, Chris Easton‡, Robert Madiona†, Robert Jones†, Paul J. Pigram†, and Benjamin Muir‡ † Centre for Materials and Surface Science and Department of Chemistry and Physics, La Trobe University, Victoria, 3086, Australia ‡ CSIRO Manufacturing Locked bag 10, Clayton South Vic 3169, Australia [email protected] Abstract

High-throughput methodology was employed to produce chromium (III) complexes suitable for surface modification of a commercially available 96 well plate. The complexes were immobilized to the native functionality of the well plate and first screened using a horse radish peroxidase-tagged (HRP) antibody to quantify binding. The top “hits” were further assessed for their ability to present the antibody in a functional state using an enzyme-linked immunosorbent assay (ELISA). “Hits” from the second screen yielded four complexes capable of improving the signal intensity of the ELISA by greater than 500%. The metal:ligand ratio of these complexes was also investigated isolating the most reproducible candidate, a chromium (III) complex. Surface modification protocols and bound species were investigated using ToF-SIMS and XPS to confirm the factors underlying improved ELISA performance.


Paul Pigram is the Director of the Centre for Materials and Surface Science at La Trobe University. His research interests lie in creating, controlling and understanding molecular structures at surfaces. He has developed a comprehensive surface analysis facility at La Trobe University, complemented by a range of in situ materials fabrication and modification capabilities and the capacity to design and fabricate novel high precision instrumentation. Prior to his appointment at La Trobe University, A/Prof Pigram held research appointments at UNSW. He completed a Ph.D. in Physics at the University of Sydney.

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