applied materials today · system and aja atc-1800 sputtering tool (aja international inc, north...

13
Applied Materials Today 12 (2018) 402–414 Contents lists available at ScienceDirect Applied Materials Today j ourna l ho me page: www.elsevier.com/locate/apmt Papertronics: Multigate paper transistor for multifunction applications Rodrigo Martins a,, Diana Gaspar a , Manuel J. Mendes a , Luis Pereira a,, Jorge Martins a , Pydi Bahubalindruni b , Pedro Barquinha a , Elvira Fortunato a,a CENIMAT/I3N, Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade NOVA de Lisboa and CEMOP/UNINOVA, Campus de Caparica, 2829-516 Caparica, Portugal b IIIT Delhi, Okhla Industrial Estate, Phase III, New Delhi 110020, India a r t i c l e i n f o Article history: Received 3 June 2018 Received in revised form 29 June 2018 Accepted 8 July 2018 Keywords: Paper functionalization Paper electronics Dual gate paper transistors Multifunction paper transistors Papertronics a b s t r a c t The use of disposable recyclable, eco-friendly, sustainable and low-cost devices with multiple functions is becoming a demand in the emerging area of the Internet of Things as a way to decrease the degree of complexity of the electronic circuits required to serve a plethora of applications. Moreover, for low-cost disposable applications, it is relevant the systems to be recyclable. The idea beyond the present study concerns to exploit our imagination with simple questions such as: What happens if it is possible to have a simple and universal device architecture, easy to implement on paper substrates, but capable to provide different multiple functionalities? It would be possible to have a common template for electronic systems on paper that would be then easily customized depending on the final application? The present study answers to these demands by reporting the physics and electronics behavior of a multigate paper transis- tor where paper is simultaneously the substrate and the dielectric, while a metal-oxide-semiconductor (IGZO) is used as the active channel. Moreover, the same device is able to present logic functionalities simply by varying the amplitude and frequency of the input gate signals. These transistors operate at drain voltages of 1 V with low power, exhibiting I ON /I OFF > 10 4 and a mobility 2 cm 2 V 1 s 1 , serving the specifications for a broad range of smart disposable low power electronics. To sustain all this, an analyt- ical compact model was developed able to precisely reproduce the response of paper-based dual-gate FETs and provide full understanding of their unique and innovative operational characteristics. © 2018 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/). 1. Introduction The demands of the Internet of things (IoT) aiming to bring com- fort and welfare to citizens, enhances the needs concerning the availability in manufacturing low-cost smart systems for a plethora of disposable applications that should be eco-friendly. As more functions are required to turn the systems smart, larger will be the number of electronics devices required, enhancing so the level of systems complexity. Besides that, the power losses associated will also increase, limiting so the type of substrates where the same can be realized. This may turn infeasible using low-cost substrates like paper, the ideal candidate for a viable “green” alternative to plastic, unless we can develop a simple and universal device archi- tecture, easy to implement on paper substrates, but capable to provide different multiple functionalities, decreasing substantially Corresponding authors. E-mail addresses: [email protected] (R. Martins), [email protected] (L. Pereira), [email protected] (E. Fortunato). the number of devices to be integrated and so, the power losses associated to the same. Cellulose paper is an eco-friendly material, reasonably low priced (10 3 D /m 2 , more than two orders of magnitude lower than polyethylene terephthalate, PET, or polyimide, PI, the most common flexible substrates in electronics), lightweight, flexible, foldable, biodegradable and 100% recyclable, which does not hap- pen with most of polymer-based materials. Additionally, cellulose is the Earth’s major biopolymer, the yearly production of paper is about 100 million tons and its production technology is state of the art, where the process speed (roll-to-roll –R2R manu- facturing) can exceed 100 km h 1 , more than enough to produce in less than few days the same surface area as that of the sili- con wafers produced in one year to serve all electronics markets [1–4]. Today, for low electronic complexity, despite technical chal- lenges, paper has already proven to be the only substrate capable of hosting electronics, sensors, solar cells, antenna and display func- tions on its surface [5–8], to support electronics blocks, working like a printed circuit board [9], or by exploiting paper porosity as a scaffold to immobilize photoactive nanomaterials, while being able https://doi.org/10.1016/j.apmt.2018.07.002 2352-9407/© 2018 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).

Upload: others

Post on 11-Aug-2020

0 views

Category:

Documents


0 download

TRANSCRIPT

Page 1: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

P

RPa

Cb

a

ARRA

KPPDMP

1

faofnsaclptp

e

h2

Applied Materials Today 12 (2018) 402–414

Contents lists available at ScienceDirect

Applied Materials Today

j ourna l ho me page: www.elsev ier .com/ locate /apmt

apertronics: Multigate paper transistor for multifunction applications

odrigo Martinsa,∗, Diana Gaspara, Manuel J. Mendesa, Luis Pereiraa,∗, Jorge Martinsa,ydi Bahubalindrunib, Pedro Barquinhaa, Elvira Fortunatoa,∗

CENIMAT/I3N, Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade NOVA de Lisboa and CEMOP/UNINOVA, Campus de Caparica, 2829-516aparica, PortugalIIIT Delhi, Okhla Industrial Estate, Phase III, New Delhi 110020, India

r t i c l e i n f o

rticle history:eceived 3 June 2018eceived in revised form 29 June 2018ccepted 8 July 2018

eywords:aper functionalizationaper electronicsual gate paper transistorsultifunction paper transistors

apertronics

a b s t r a c t

The use of disposable recyclable, eco-friendly, sustainable and low-cost devices with multiple functionsis becoming a demand in the emerging area of the Internet of Things as a way to decrease the degree ofcomplexity of the electronic circuits required to serve a plethora of applications. Moreover, for low-costdisposable applications, it is relevant the systems to be recyclable. The idea beyond the present studyconcerns to exploit our imagination with simple questions such as: What happens if it is possible to havea simple and universal device architecture, easy to implement on paper substrates, but capable to providedifferent multiple functionalities? It would be possible to have a common template for electronic systemson paper that would be then easily customized depending on the final application? The present studyanswers to these demands by reporting the physics and electronics behavior of a multigate paper transis-tor where paper is simultaneously the substrate and the dielectric, while a metal-oxide-semiconductor(IGZO) is used as the active channel. Moreover, the same device is able to present logic functionalities

simply by varying the amplitude and frequency of the input gate signals. These transistors operate atdrain voltages of 1 V with low power, exhibiting ION/IOFF > 104 and a mobility ≈2 cm2 V−1 s−1, serving thespecifications for a broad range of smart disposable low power electronics. To sustain all this, an analyt-ical compact model was developed able to precisely reproduce the response of paper-based dual-gateFETs and provide full understanding of their unique and innovative operational characteristics.

© 2018 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY license

. Introduction

The demands of the Internet of things (IoT) aiming to bring com-ort and welfare to citizens, enhances the needs concerning thevailability in manufacturing low-cost smart systems for a plethoraf disposable applications that should be eco-friendly. As moreunctions are required to turn the systems smart, larger will be theumber of electronics devices required, enhancing so the level ofystems complexity. Besides that, the power losses associated willlso increase, limiting so the type of substrates where the samean be realized. This may turn infeasible using low-cost substratesike paper, the ideal candidate for a viable “green” alternative tolastic, unless we can develop a simple and universal device archi-

ecture, easy to implement on paper substrates, but capable torovide different multiple functionalities, decreasing substantially

∗ Corresponding authors.E-mail addresses: [email protected] (R. Martins), [email protected] (L. Pereira),

[email protected] (E. Fortunato).

ttps://doi.org/10.1016/j.apmt.2018.07.002352-9407/© 2018 The Authors. Published by Elsevier Ltd. This is an open access article u

(http://creativecommons.org/licenses/by/4.0/).

the number of devices to be integrated and so, the power lossesassociated to the same.

Cellulose paper is an eco-friendly material, reasonably lowpriced (≈10−3 D /m2, more than two orders of magnitude lowerthan polyethylene terephthalate, PET, or polyimide, PI, the mostcommon flexible substrates in electronics), lightweight, flexible,foldable, biodegradable and 100% recyclable, which does not hap-pen with most of polymer-based materials. Additionally, celluloseis the Earth’s major biopolymer, the yearly production of paperis about 100 million tons and its production technology is stateof the art, where the process speed (roll-to-roll –R2R – manu-facturing) can exceed 100 km h−1, more than enough to producein less than few days the same surface area as that of the sili-con wafers produced in one year to serve all electronics markets[1–4].

Today, for low electronic complexity, despite technical chal-lenges, paper has already proven to be the only substrate capable ofhosting electronics, sensors, solar cells, antenna and display func-

tions on its surface [5–8], to support electronics blocks, workinglike a printed circuit board [9], or by exploiting paper porosity as ascaffold to immobilize photoactive nanomaterials, while being able

nder the CC BY license (http://creativecommons.org/licenses/by/4.0/).

Page 2: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

aterial

tffe

eitelur(so[

rcsbaob

ftisattva

bccws

FcSCb

R. Martins et al. / Applied M

o transport fluids in the bulk [10]. At the same time, it is well suitedor disposable, single or few times – use type of applications andor large-area/high volume manufacturing, to alleviate some of thenvironmental burden of silicon.

Indeed paper holds a unique potential to bring intelligence intoveryday objects such as radio-frequency identification (RFID) tagsn shipping and inventory management, and self-updating planeickets, business cards and food labels, offering so cost-saving,nergy-efficient and fully recyclable alternatives to silicon chips atow cost and disposable electronics market segment, where the prod-ct/systems lifetime is reduced [11–22]. Here, it is of paramountelevance that the devices to be processed can be multifunctionalto decrease complexity when devices integration is required ando the power losses); are reliable and viable (guarantee stabilityf the films/devices processed and proper robustness of the same)10,23–27].

Nowadays is clear that to turn electronic systems on paper aeality there are two routes: hybridization of conventional IC sili-on chips, or the direct production of electronic components on theubstrate [5,6]. The fist provides high performance, but the assem-ly costs are still high and surpass the cost of the materials usednd silicon chip itself, besides turning recyclability harder. More-ver, some reliability issues exist, namely in what concerns to theonding between the paper substrate and the IC.

The second approach is still far from providing the same per-ormance but can be considered for simpler functionalities, as it ishe case of sensing systems [6,7]. However, to turn this into real-ty manufacturing must be simplified and costs reduced. In thisense, common and universal circuits can be design making use ofbundant, highly stable and not harmful materials to result into aemplate for electronic circuits that can be then customized “on-he-fly” by printing or eliminating conductive/resistive tracks in aery fast way. R2R production of such systems will be then possiblet low cost and high throughput as expected for paper substrates.

In this work paper is also used as an electronic component,ehaving as a dielectric and a storage media of cation and anion

harges, responsible to control electrons transport along an activehannel layer based on an oxide semiconductor. In that sense, theork here presented represents a breakthrough since it demon-

trates that with a unique architecture for a paper field effect

ig. 1. Device configuration, structure and current-voltage transfer characteristics of tomponents: floating back gate based on IZO conductive film; the paper dielectric; the traource. (A2) Illustrative cross-section of the device depicting the formation of the EDL beross section showing the step coverage of the IGZO oxide layer deposited on paper; (C)

etween the gates, drain and source electrodes (RP1 and RP2 and RPDS).

s Today 12 (2018) 402–414 403

transistor (FET), the same can provide several functionalities thatgo from a simple switch with tunable On voltage up to multiplelogic operations. Moreover, the “double-sided” configuration andthe fact the operation mode of the device is controlled by the poten-tial established at the floating electrode that we do not need toaccess (see Fig. 1A), turns possible to use it as sensing layer. This willpave the way for the development of sensing elements for smartpackaging, for instance, avoiding direct contact between the ali-mentary goods and the electronic components. Here we are notlimited only to systems response speed but cost-effective tech-nology instead, besides exploiting the materials multifunction’s asdescribed above.

The approach used to reach these demands exploits the char-acteristics of a transistor architecture, which uses multifunctionalgates (see Fig. 1A1) and has the ability to tune the threshold volt-age (VT) for the lowest possible value: In this architecture the paperbehaves as reservoir to store charges through cation exchange atthe negatively charged carboxyl and phenolic hydroxyl sites in thepaper matrix (see Movie S1).

Such architecture consists in a planar double gate indium-gallium-zinc-oxide (IGZO) FET with a back floating gate electrode(PDG/BFG-FET) that controls the carrier’s movement, either ionsor electrons, along the paper interfaces and the device’s channel,respectively. In this way, this FET behaves as a dynamic combina-tion of three possible transistor arrangements, tuned by the set ofcontrol gate and drain voltages used (see Fig. 1A), decreasing so thedegree of complexity required to process control logic gates for lowcost and disposable electronics applications.

2. Materials and methods

2.1. Paper

The paper used in this work is constituted by long eucalyptus

fibbers (99.1% carbon based, with an average diameter of 19 �m).The mass starch is 10 kg/t and the starch at surface is between 2.0and 2.8 g/m2. The paper grammage, thickness, estimated porosity,mass fraction of the filler (mainly CaCO3) and the remaining lignin

he PDG/BFG-FET. (A1) 3D schematic of the device geometry, showing the mainnsistor channel based on the metal contacts (Al) for the two planar Gates, Drain andneath an electrode due to the presence of mobile ions (protons and hydroxyls). (B)Schematic representation of the resistances associated to carriers within the paper

Page 3: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

4 aterial

ta

2

fls1Il2pB8a

(dw

2

gt(wic

2

rrXsSS

wsmf4

uI1ibMfc

bmam

ctti

04 R. Martins et al. / Applied M

hat could not be removed [28,29] are 80 g/m2, 0.50, 70 �m, 22%nd 3%, respectively.

.2. Oxides and metal contacts

The oxide films used for the channel layer and for the back-oating gate (BFG) electrode were processed by RF magnetronputtering without intentional substrate heating in an AJA ATC-300F system and AJA ATC-1800 sputtering tool (AJA Internationalnc, North Scituate, MA, USA), respectively. The active channelayer is composed by a 40 nm thick IGZO (In2O3-Ga2O3-ZnO;:1:2 mol% – purity of the target 99.99%). The IGZO films were pre-ared in an Ar + O2 atmosphere with the ratio 14/3 sccm, while theFG is constituted by a 200 nm thick conductive IZO (In2O3-ZnO;9.3:10.7 wt.% – purity of the target 99.99%) film (sheet resistanceround 50 �/�). Both films were cured at 150 ◦C by 30 min.

The source/drain (S/D) and the two gate (G1/G2) electrodesAl with 200 nm thickness – purity of the pellets 99.99%) wereeposited by e-beam evaporation at room temperature. Both layersere patterned using shadow masks.

.3. Experimental design: device architecture and fabrication

The PDG/BFG-FETs were produced on paper using an in-planeate structure as depicted in Fig. 1A. The transfer characteristics ofhe PDG/BFG-FETs with a channel width (W) of 1035 �m and lengthL) of 170 �m (W/L = 6.1) and spacing G1/D and G2/S of 360 �m,ere measured at atmospheric pressure (23 ◦C and relative humid-

ty of 40%), using a microprobe station (Cascade Microtech M150)onnected to a semiconductor parameter analyzer (Agilent 4155C).

.4. Materials and device analysis

The Paper Structure and Composition has been evaluated by X-ay diffraction (XRD) using a PANalytical X’Pert PRO with Cu K�adiation (� = 1.540598 A), for XRF elemental analysis, a PANalyticalRF-WDS 4 kW AXIOS (PANalytical B.V., Almelo, The Netherlands)equential spectrometer (Rh X-ray tube) under He flow was used.tandardless semiquantitative analysis was performed with theuperQ IQþ software package (PANalytical B.V.).

Fourier-transformed infrared (FTIR) spectroscopy acquisitionsere performed using an attenuated total reflectance (ATR)

ampling accessory (Smart iTR) equipped with a single-bounce dia-ond crystal on a Thermo Nicolet 6700 spectrometer, with the

ollowing conditions: incident angle of 45◦; 4000–650 cm−1 range; cm−1 resolution; 32 scans; 20 ◦C.

The variation of paper’s capacitance with frequency (C–f) (Fig-re S.3) was determined by impedance spectroscopy using a Gamry

nstruments Reference 600 Potentiostat in a frequency range of0 mHz to 1 MHz, with an a.c. excitation voltage of 500 mV. Metal-

nsulator-metal structures were fabricated for these measurementsy evaporating an aluminum (Al) mask on both sides of the paper.oreover, extrapolating the value of capacitance per unit area for

= 0 Hz, it was possible to extract the value of the relative dielectriconstant [13,30].

The paper’s surface morphology (see Fig. 3A) was assessedy scanning electron microscopy (SEM – Zeiss Auriga Crossbeamicroscope). The micrograph shows an entangled fiber matrix with

n average width of 10 �m and a RMS roughness of 6.4 �m, deter-ined by 3D profilometry (Ambios XP-Plus 200 Stylus).To prepare the samples for SEM analysis pieces of paper were

ut with 0.5 cm × 0.5 cm and glued on the SEM holder using carbonape. Afterwards, a thin film of amorphous carbon with 30 nmhick was deposited using a Quorum Q150T ES equipment. Themage magnifications were 100×, 1000× and 4000×, with SEM

s Today 12 (2018) 402–414

acceleration voltage of 5 kV, aperture size f 30 �m and workingdistance of 5.9 mm.

Hence, as the coating oxide thin film is amorphous, it does notcompromise the observed features of the paper. Moreover, lowmagnification images were taken, which emphasises that there isno external contributions to the measurements. For the Focus IonBean (FIB) experiments, the samples were previously coated withan Au/Pd sacrificial layer of 30 nm, and Ga+ ions were acceleratedto 30 kV at 50 pA with an etching depth around 1.5 �m.

Apart from that, a Zeiss Libra 200 MC Cs STEM (Scanning Trans-mission Electron Microscopy), operating at an acceleration voltageof 200 kV, using the scanning beam in STEM mode was used todetermine the element distribution in depth. The EDX scanning wasperformed by the Oxford Inca EDX system attached on the TEM.A scanning line was drawn on the image taken from the region ofinterest, i.e., across the cross section in the in-depth direction of thepaper electronics sample. Then EDX line scanning was performedalong the drawn line, the total acquisition time was about 300 s.The lift-out sample was produced by FIB milling in a Zeiss NVision40 tool.

3. Analytical model for the current-voltage characteristicof paper-based dual-gate field effect transistors

The field effect transistors (FETs) used in the present work can bespecifically defined as metal-insulator-semiconductor field effecttransistors (MISFET), whose working principles are transversal tothin film transistors, TFTs and FETs. For simplification purposes,they will be henceforth designated as FETs, since the transistorsemployed in this work should not be described as thin-film tran-sistors (TFTs) due to the high thickness of the paper layer, which isan active part of the device.

3.1. Review of analytical model applied to organic thin filmtransistors

Having the same principles of operation, the equations for mod-eling the paper based FET characteristics were successfully adaptedfrom a previously-derived formalism applied to organic single-gateTFTs [31]. According to such derivation, the generic charge driftmodel is:

IDS = �0CW

L

1� + 2

[(VG − VT − VS)�+2 − (VG − VT − VDS)�+2] (1.1)

where ϒ > 0 is a coefficient that takes into account a possibleincrease in the mobility with bias voltage (� = �0(VG − VT)� ). Thisequation does not consider the sub-threshold regime, but it can beadded by an asymptotical interpolation function:

IDS = �0CW

L

1� + 2

[(f (VG − VT − VS))�+2 − (f (VG − VT − VDS))�+2]

(1.2)

where f (VG, V) = VSS ln[1 + Exp

(VG−VT −V

VSS

)], with V = VS/DS.

The source voltage is grounded (VS = 0), so a voltage drops, VC,occurring across the transistor terminals, replaces it. Such voltagedrop is common in organic-based transistors due to the existenceof non-Ohmic contacts, attributed to Schottky barriers or defect-rich surface regions close to the organic–metal interfaces. Contactresistances on the order of k� or M� have been measured andinvestigated with analytical models [32]. Such resistances can leadto VC values on the order of the volts (V) for the typical range of IDScurrents (�A-mA) flowing in the devices. It has been found that the

higher the contact resistance the larger is the threshold voltage.

In addition, we also consider the effect of channel length mod-ulation by replacing L → L − �L = L/(1 + �VDS), being � [in V−1] thechannel “length” modulation coefficient.

Page 4: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

aterials Today 12 (2018) 402–414 405

I

3p

cmogiwat

3d

odtac

V

wst[ctvsT(

a

mt

gat

it

V

His

V

w

V

yat

R. Martins et al. / Applied M

Incorporating both these phenomena, the model becomes:

DS = �CW

L

1+�VDS

�+2

[(f (VG−VT −VC ))�+2−(f (VG−VT −VDS))�+2]

(1.3)

.2. Adaptation of analytical model to the present dual-gateaper FETs

To explain the current behavior in the linear, sub-threshold andut-off regimes of the PDG/BFG-FET, a modified analytical driftodel was developed, based on the previous model applied to

rganic devices [31,33,34], which takes into account the doubleate and hybrid structure (the oxide and the dielectric, respectivelynorganic and organic materials) under analysis. In the following we

ill define the key parameters that influence the adaptation, whichre the role potential/voltage distribution and how the density ofrap states influence the same.

.2.1. Adaptation of the voltage distribution and the role of theensity of trap states

In the dual-gate FET, the effective threshold voltage (VT) dependsn: the voltage drop (VC) due to contact resistances associated toefect rich surface regions close to the dielectric-metal interfaceshat behave as Schottky like contact; the drain-source voltage (VDS)nd the cross voltage developed along the planar structure andonnected to the second gate bias (VG2):

T = VT0 − VDS + VTG2. (1.4a)

here VT0 is the threshold voltage when VDS = VG2 = 0 V and g is aensitivity parameter linearly dependent on VDS, interconnectinghe movement of the carrier due to VG2, defined as g = g0 + g1 × VDS35]. That is, VDS affects the carriers’ distribution and thereby theapacitance between the upper gates G1/G2 and the IZO equipo-ential bottom floating gate, and so VT. The second bias thresholdoltage (VTG2 = gVG2) is taken to depend linearly on VG2, with a sen-itivity parameter (g = g0 + g1VDS) [36], which also depends on VDS.herefore, the expression for VT becomes a function of 3 parametersVT0, g0 and g1):

VT = VT0 − VDS + (g0 + g1 × VDS) × VG2. (1.4b)

eaning that VT can be shifted as a function of the voltage appliedo the second gate, as experimentally observed.

On the other hand, we have to take into account that the appliedate voltages and VDS promote the movement of ions along the bulknd paper surface. Therefore, close to the channel/paper interface,he density of trap states (Nit) increases with VDS.

Empirically, it was also found that the density of trap states (Nit)ncreases with VDS. Therefore, a linear dependence is assumed forhe sub-threshold slope voltage:

SS = VSS0 + s × VDS (1.5)

ere VSS is related to the steepness of the sub-threshold character-stics of the transistor, and it can be associated to the density of traptates (Nit) in the material [37]:

SS = kbT

qln 10

(1 + qNit

C

)→ Nit = C

q

(qVSS

kBT ln(10)− 1

)(1.6)

here we assume that VSS depends linearly with VDS

SS = VSS0 + s × VDS (1.7)

The resulting linear dependency of Nit on VDS is plotted in Fig. 2,ielding a trap states density on the order of 1014 cm−2, which isbout 3 orders of magnitude higher than that of Si-based transis-ors.

Fig. 2. Plot of the sub threshold voltage VSS and estimated surface defects density,Nit as a function of the drain voltage, VDS , according to Eq. (1.6).

3.2.2. Analytical model to fit the PDG/BFG-FET transfercharacteristics

Taking the aforementioned considerations into account andhaving as reference the analytical drift model developed for organicFET as already mentioned, empirically, it was found that the bestmodel fits were attained neglecting the ϒ parameter in the expo-nents of the generic model used for organic based devices (see Eq.(1.3), where we consider ϒ = 0). Under these conditions the genericmodel for dual-gate paper FETs in the linear and sub-thresholdregime is given by:

IDS = �0CW

L

1 + �VDS

2

[(f (VG1 − VT (VG2, VDS) − VC ))2

−(f (VG1 − VT (VG2, VDS) − VDS))2] (1.8)

where � (in V−1) is the channel “length” modulation coefficient and

: f (VG1, V) = VSS ln[

1 + Exp(

VG1 − VT − V

VSS0 + sVDS

)]with V = VC/DS,

Here, the role of the sub-threshold regime [38] is considered via theasymptotical interpolation function given by Eq. (1.8) that dependson the swing voltage VSS, which defines the steepness of the transfercharacteristics between the OFF and the ON states.

3.2.3. Determination of cut-off current (IOFFDS )

To fit the data in the cut-off regime (IOFFDS ) we follow the approach

observed in organic thin film transistors where commonly a secondaccumulation channel can be formed when the two gates are biasedwith opposite polarities, which produces a smaller transistor-likeresponse (depletion region), whose field-effect mobility is usuallya factor of 104 lower than the primary channel [39]. This sec-ondary transistor behavior explains the experimentally observedincrease in drain current in the cut-off regime as VG1 decreasesto more negative values (see experimental and fitting data section,Fig. 5A–C). In this way, the drain current obtained in this regime canbe treated with the same expression as used for the primary chan-nel but inverting the bias voltages (VG1 → −VG1 and VG2 → −VG2)and considering a distinct �C pre-factor → �OFF × COFF = � × �0 × C.The parameter � is expected to decrease with VDS, so a linear depen-dency (� = �0 + �1 × VDS) is assumed:

�OFF × COFF = �0 × C × (�0 + �1 × VDS) (1.9)

As such, the current in the OFF state is determined employingonly two additional parameters (�0 and �1):

IOFFDS

= (�0 + �1 × VDS) × IDS(−VG1, −VG2) (1.10)

Page 5: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

406 R. Martins et al. / Applied Materials Today 12 (2018) 402–414

F aper sr

4

4c

psapfiiat(scS

ttslofitfittttm

ticetdswca

4p

cwcaw

ig. 3. SEM images of (A) paper surface; (B) cross section from a market point on the pevealing the back gate floating electrode based on IZO film deposited on paper.

. Results

.1. Paper as a substrate and a dielectric layer that controlsharge carriers transport

In the present study, the paper used is similar to a copy typeaper as described by Bloch group [40]. Further details on papertructure and composition are given in the supplementary materi-ls information (see also Figures S.1 and S.2). As we aim to exploitaper as an active component of the device structure, the metalllers (Na, Ca, Al; Fe, see Table S.1) and the hydroxyl groups present

n the paper matrix are the main responsible for promoting theppearance of cation-anion pairs, when an electrical field is appliedo any of the surface sides of the paper via a conductive electrodeGate, see Fig. 1A1). This allows also paper to act as reservoir totore charges through cation exchange at the negatively chargedarboxyl and phenolic hydroxyl sites in the paper matrix (see Movie1).

For paper, the standard limit for the electric field that it can sus-ain it is of about 16 V/�m. Thus, for the 70 �m thick paper usedhe breakdown voltage is above 1000 V and so the applied voltageshould be at least one order of magnitude below this value, also toimit power losses associated to the use of high voltages. On thether hand, we must also take into account the maximum electriceld allowable to establish the proper carriers’ collection throughhe oxide layer that it is in the range of 1–5 V/�m. For the gap con-guration used (>100 �m) the applied limits of the voltages are inhe range of 500 V, which are at least one order of magnitude aboveo the voltages used in the present work, either to control carrierransport through drain and source or the gate voltages used to con-rol carriers induced on the channel layer, and so to its conductance

odulation.The use of these electric fields leads to the formation of elec-

ron double layers, EDL (see Fig. 1A2) on both sides of the papernterfaces that will control the electron transport along the activehannel layer as well as the charges storage along the floating gatelectrode (see Fig. 1A). The fillers will also promote the smooth ofhe paper surface. Concerning the role of the fiber structure andistribution in the paper matrix, they will mainly determine thepecific surface area, (estimated to be about 7.5 × 105 m−1), whichill impact on the final paper capacity in retaining charges, as dis-

ussed along the present study (see the Supplementary informationnd Figure S.3).

.2. Stability of the oxide layers deposited on both sides of theaper

The oxide films used as active (channel of the transistor) andonductive (floating gate electrode) layers (see Fig. 1A1) in this

ork where fabricated by rf magnetron sputtering, following the

onditions described in materials methods, respectively based on 40 nm thick IGZO film and a 200 nm thick conductive IZO filmith a sheet resistance around 50 �/�. The films deposited on the

urface, showing in detail the Pt coating used for FIB/STEM analysis; (C) cross-section

paper surface exhibit a quite nice step coverage, as depicted inFigs. 1B and 2, respectively for the IGZO and IZO films.

Taking into account the paper porous nature and the way inwhich paper matrix is formed [40], with the application of a bias,electrostriction or conformational changes may occur, as it happensin polymers [41]. Therefore, the paper boundary layers associatedto both paper surfaces could play an important role in determiningin-depth pathways for the films deposited by creating possible tinyfilaments that bridge the gap between cross electrodes, changingso the paper conductivity, laterally and transversally, as it happenswith organic deposited films [42].

To investigate possible atoms diffusion or migration of the oxidespecies deposited, STEM analysis (horizontally, along with papersurface, and transversally, along coating and paper thickness) wasperformed for films that undertook several bias stresses, aimingto determine their stability and reliability and so of the devicesmanufactured.

For better understanding the analysis performed, below weshow SEM images of the paper surface coated with IZO film thatwas in-depth scanned starting from a previous market point, goingfrom fibers to fibers, which includes also the space/porous betweenthem (see Fig. 3).

The images on the TEM mode show that the surface of the paperis not smooth, where nice step coverage of the same is achievedby the IZO coated layer. Fig. 4 shows the line scanning EDX acrossthe paper substrate and IZO layer before or after sustaining a highelectrical field (between 10 and 100 kV/cm) confirms that there isno Zinc and or Indium migration gradient in depth into paper sub-strate, as well as along the surface gap scanned, revealing so thestability of the oxide composition deposited. Also, almost no oxygendiffusion could be observed across the paper material. Only noisylevel of oxygen could be observed, and so, no diffusion gradient ofoxygen from IZO into paper material was observed.

Bearing in mind that cellulose readily swells under different sol-vents, which could facilitate atoms penetration inside the papermatrix under hydrothermal stress, in this particular paper used itwas also analysed a substrate coated with liquid semiconductorink based on ZnO nanoparticles that it is depicted in the supple-mentary information (see Figure S.4). After proper temperaturecuring at 150 ◦C, we notice the same type of features as the onesrevealed above for the IZO film. That is, the line scanning EDXacross the paper substrate and ZnO layer confirms that there is noZinc and oxygen migration gradient in depth into paper substrate,or any changes along the scanned gap along the paper surface,confirming that the coverage of the paper occurs but no impreg-nation/penetration or diffusion of the ink within the paper wasobserved. Therefore, no obvious zinc and oxygen diffuse into papersubstrate, or another type of compositions are formed.

4.3. Field effect paper transistor architecture

The transistor architecture selected uses multifunctional gatesand the paper acts simultaneously as substrate and dielectric, with

Page 6: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

R. Martins et al. / Applied Materials Today 12 (2018) 402–414 407

results concerning O, Zn; in distribution along the paper thickness (scale in nm).

t(g(ortcntaitsgutltt

4

4

dviau

t+r

Table 1Experimental measured values (fixed parameters) for the studied paper FETs. Thecapacitance (C) was determined from C–f measurements; L and W were determinedby profilometry measurements; VT0 was determined by linear extrapolation of themeasured VT values for VDS = VG2 = 0.

TFT specifications Values Notes

C 4.6 × 10−7 F/cm2 Capacitance per unit areaL 170 �m Channel lengthW 1035 �m Channel width

Fa

Fig. 4. (A) Cross section image of the in-depth analysis performed; (B) EDX

he ability to storage charges and so, to tune the threshold voltageVT). The architecture consists in a planar double gate indium-allium-zinc-oxide (IGZO) FET with a back floating gate electrodePDG/BFG-FET) that controls the carrier’s movement, either ionsr electrons, along the paper interfaces and the device’s channel,espectively. In this way, the FET behaves as a dynamic combina-ion of three possible transistor arrangements, tuned by the set ofontrol gate and drain voltages used (see Fig. 1A). Here, paper isot only the support but behaves also as solid-state electrolyte ableo provide a high EDL capacitance [43–46] established at both topnd bottom surfaces. This is achieved by the spatial movement ofons, whose distribution depends on the set of applied voltages athe device terminals’ (see Movie S1). This FET architecture allows aimplified planar electrode structure where the source, drain, andate terminals are all located on the same plane, thereby are nat-rally self-aligned. In addition, it permits an easy adjustment ofhreshold voltage [47,48] since the floating gate enables the estab-ishment of EDL on both sides of the paper sheet, which controlshe electric fields established transversely and horizontally alonghe main regions of the device structure.

.4. PDG/BFG-FET transfer current-voltage characteristics

.4.1. Experimental dataThe values in Table 1 were measured from the fabricated FET

evices. There is some degree of uncertainty in the capacitance (C)alue, as it is extrapolated to low (DC) frequencies (see Section 1n SI). Here, the extrapolated value for C indicated in Table 1 is inccordance with values measured for similar paper materials thatsually lie in the 10−7–10−6 F/cm2 range [30,49].

The experimental transfer current–voltage characteristics ofhe device using gate voltages (VG1) in the range from −30 V to30 V under 1 V and 15 V drain–source voltages (VDS) are depicted,espectively, in Fig. 5A and B) (dotted lines). The off current (IOFF

DS )

ig. 5. The transfer characteristics (IDS vs VG1 where −30 V ≤ VG1 ≤ 30 V) for different VG

nalytical model proposed (solid lines) for: (A) VDS = 1 V; (B) VDS = 15 V. (C) Simulated tran

VT0 9.0 ± 0.11 V Threshold voltage at VDS = VG2 = 0

increases as the value of the module of the applied gate voltages(VG1 and VG2) and VDS increase.

4.4.2. Fitting of the experimental dataConsidering the 4 measured quantities of Table 1 and using

the 9 fitting parameters listed in Table 2, the sets of experimen-tal transfer curves of the transistors depicted in Fig. 5A and B wereaccurately fit by Eq. (1.8), for the two cases measured experimen-tally of VDS = 1 V and VDS = 15 V (solid lines). With the same modeland fitting parameters, the results for different drain-source voltagevalues can be calculated, as depicted in Fig. 5C for VDS of 5 and 10 V.There, IOFF

DS increases with VDS as expected (see Eq. (1.10)). The ninefitting parameters extracted from the model are shown in Table 2and compared with the experimentally measured or reference val-ues taken from literature. The variations observed are below 17%,which is a margin within the error associated to the measured.

4.4.3. Extrapolation of the Field effect mobility – �FE

The empirical value taken for the field effect mobility and

depicted in Table 2 is extracted from the maximum point of�FE(VG1) obtained from the IDS(VG1) transfer characteristic curves

2 (−15 V ≤ VG2 ≤ 15 V) determined experimentally (dotted lines) and fitted by thesfer curve characteristics for the intermediate voltages VDS = 5 V and VDS = 10 V.

Page 7: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

408 R. Martins et al. / Applied Materials Today 12 (2018) 402–414

Table 2Comparison between the fitting parameters used in the proposed model and their corresponding values determined either from the experimental curves or from approximatevalues (∼) in the literature.

Physical quantities Fitting parameters Fitting values Experimental/reference values Variation (%)

�FE �0 0.155 cm2/Vs �MAXFE

∼1 − 2 cm2/V s <16(a)� 0.3 V−1

VT g0 −0.85 −0.834 1.9g1 0.011 V−1 0.010 V−1 10.0

VSS VSS0 1.9 V 1.6 V(b) 15.8s 0.08 0.096(b) 16.7

VC VC −8.0 V ∼−VT0 [1,2] 11.1� �0 1.4 × 10−4 � ∼ 10−4 [4] (c)

�1 −7.7 × 10−6 V−1

a The comparison between the calculated (1.33–1.86 cm2/V s) and measured values of the field effect mobility (see Fig. 5).b The experimental values of the VSS parameter (VSS0 and s) were obtained from the mean VSS values for the different IDS(VG1) curves with distinct VG2, determined from

their slope in the sub-threshold regime.c The parameter � is scarcely analyzed experimentally as it corresponds to the OFF state of the transistor. Therefore, it can be simply concluded that the attained values

for this parameter are within the expected order of magnitude [39].

Fig. 6. �FE(VG1) curves calculated with the proposed model, for VG2 = 0 V (solid lines)and −15 V (dashed) and VDS = 1 V (blue lines) and 15 V (green). The values of the max-ima of the curves (�MAX

FE, indicated in the plot) are close to those determined from the

measured results (indicated by the symbols). An error bar of ±0.3 cm2/V s is assumedfor the experimental �MAX values due to uncertainties in the determination of thema

u

fr

dvriVcpsfcho

Fig. 7. Linear plot of the simulated transfer characteristics presented in Fig. 5A–BD for different VG2 and for VDS = 1 V (solid lines) and 15 V (dashed lines). The linearrepresentation of the IDS(VG1) curves show that their slopes in the sub-thresholdand linear regimes are independent of VG2 and increase for higher VDS . This trendsupports the mobility values presented in Fig. 6, as expected from Eq. (1.11).

FEaximum point of the measured curves. The variation between the experimental

nd calculated values of �MAXFE

is below 16%, as indicated in the first row of Table 2.

sing the expression [13,50]:

FE(VG1) = 1C

L

W

1VDS

(∂IDS

∂VG1

)⇒ �MAX

FE = 1C

L

W

1VDS

(∂IDS

∂VG1

)MAX(1.11)

The same procedure was applied to determine this quantityrom the IDS(VG1) curves calculated by the proposed model, as rep-esented in Fig. 6.

It is observed that the maximum point of the �FE(VG1) curves,etermined from the model equations, shifts towards higher VG1alues when VG2 is reduced from 0 to −15 V, as expected from theesults of Fig. 6. However, the values of �MAX

FE remain practicallynvariant with VG2, since such maxima are chiefly dependent onDS. The invariance of �MAX

FE with VG2 is expected from the transferurves, since the slope of the curves for each VDS is the same inde-endently of VG2. This is clearly seen when the curves are linearcale represented instead of a logarithmic scale, as shown in Fig. 7

or the cases of Fig. 5A and B. Thus, the effect of distinct VG2 in suchurves is similar to that of VT, as it mainly shifts the curves sideways;owever, the shift performed with increasing VG2 is opposite to thatf VT as it moves the curves to lower VG1 values. This behavior can

be further exploited aiming to promote different functionalities tothe PDG/BFG-FET device.

4.5. Operating principles of the PDG/BFG-FET

The dual gate architecture used yields a non-symmetric poten-tial distribution along the two gates, whenever VDS /= 0V, as thesource is grounded and closer to one of the gates, which leads todifferent charge carriers’ modulation (see Movie S1 and Fig. 8A andB). This can be viewed as the combination of more than one FET,interconnected by the same floating gate that behaves as a mod-ulated charge load, whose behavior is mastered according to theinput signals applied to the gate voltages, keeping constant VDS.The same happens to the electric field, current and potential dis-tributions within the bulk of the paper for each of the regions ofinterest, as depicted in Figs. 8 and 9.

With this interesting property, just by playing with voltage lev-els applied to VG1 (VIN1) and VG2 (VIN2), and keeping the frequency,f(VIN2) ≡ 2 × f(VIN1) and VDD = 6V, one can enable the single tran-

sistor to operate as different logic gates, corresponding to severalpossible combinations of transistors (see Fig. 11).
Page 8: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

R. Martins et al. / Applied Materials Today 12 (2018) 402–414 409

Fig. 8. Operating principle of PDG/BFG-FET showing in-plane and transverse electric field distributions. (A) Electric field longitudinal profile along the device for VG1 = VG2,VG1 > VG2 and VG1 < VG2 corresponding to the cross-section view (dashed lines) of the longitudinal electric field profile within the device for: (A1) VG1 = VG2 – blue line; (A2)VG1 > VG2 – green line; (A3) VG1 < VG2 – orange line, for a positively biased drain and source grounded (VS = 0V). (B) Zoom of the distribution of electron concentration alongthe channel region for VG1 > VG2 (for current densities, channel electric field and potential distribution, see SI). The electric field and electron concentration were simulatedusing SILVACO software, as described in the SI.

Fig. 9. Graphical representation of the electric field, current density, and potential along the FETs’ channel for VG1 > VG2 with VDS = 15 V and source grounded. At the middle,the corresponding cross-section of the channel of the simulated PDG/BFG-FET.

Page 9: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

4 aterial

4a

atgv

t(ttbatmiv

1

2

3

R

10 R. Martins et al. / Applied M

.6. Resistances of the carriers associated to the PDG/BFG-FETrchitecture

To the electrical fields above referred we associate the chargesccumulated, which will determine the corresponding path resis-ances through which induced carriers will be driven by the planarate voltages applied, as well as by the drain to source appliedoltage, taken as reference the source electrode (see Fig. 1C).

Associated to the above fields and carriers’ distribution alonghe planar structure (horizontal) and the cross section of the papertransversal), it appears a modulated conductance that depends onhe charges accumulated in the channel due to the potential dis-ribution along the channel layer (�VDS) and that can be giveny �n ∼= VDs

q × CA . Those extra carriers will modulate the over-

ll channel conductance (RPSD), mirror the same set of carriers athe floating gate (RFG) that are responsible for establishment of ion

ovement and transport in the bulk of the paper structure and son defining the expected values for the distributed horizontally andertically resistances (see Fig. 1B).

Horizontally we have:

. The floating gate resistance RFG ≈ [q × � × (n + �n) × L/A]−1,whose final value is modulated by the �n electrons inducedby the paper capacitance per unit area (A), whose value couldbe as low as a virtual short circuit for high conductive backcontact layer. This will lead to the establishment of an equipo-tential voltage that controls the EDL extension on both interfaces(respectively channel/paper, thELD1, and paper/floating gate,thELD2), associated to the movement of the ions in the paper(Fig. 1A1).

. The drain to source conductance, RPDS that corresponds to theimage of RFG but now the resistivity of the channel is higherthan that of the floating gate back contact and so the chargemovement between drain and source depends on the potentialdifference established.

. The resistances associated to gate 1 and drain, source and gate2, respectively RP1 and RP2, whose value is controlled by theion charge accumulated at the corresponding interfaces, highlyrelevant for the electrical field distribution (see Figs. 9 and 10,respectively). This will influence the free charge distributionalong the channel region. Moreover, due to the high paper resis-tance, the metal contact established with the paper surface hasSchottky like behavior that will condition the charge carrier’stransport along the paper interface, involving ion diffusion and

some electrons at surface (see Movie S1).

Apart from that, we have a vertical resistance (paper resistance,Paper) that is by far larger than the other components and ideally,

Fig. 10. Graphical representation of the current density along the FE

s Today 12 (2018) 402–414

it is assumed to be infinite (see Movie S1 and Fig. 1C). Thoseresistances will condition how current will flow along the differentregions and so will impact on the transfer characteristics of theFET device.

4.7. Electrical parameters simulation by TechnologyComputer-Aided Design (TCAD)

For numerical simulation purposes, the TCAD Silvaco’s 2DATLASTM was used. A similar configuration than that of the fab-ricated devices was employed. All electrodes are 200 nm thickand have a length of 420 �m, with the exception of the backelectrode, which is as long as the simulated device. The distancebetween source/drain and the closer gate electrode is 365 �m. Theequivalent capacitance was corrected by the specific area ratioenhancement (Sf) due to the fibrous paper sponge-like structure[51]. Taking into account the specific surface area (estimated tobe around 75 �m−1) and the paper thickness, d = 70 �m Sf ≈ 5250.Considering the value for the capacitance per unit area of Table 1and that

(C = Sf

ε0×εrd

)we obtain an equivalent relative permittiv-

ity (εr ∼ 8), not far from the optical relative permittivity (εr ∼ 7–14)[52] of a broad range of paper materials. Indeed, the low fre-quency EDL capacitance that must be used to accurately calculatethe mobility does not result from the geometrical capacitance thatwould be only about 129–165 pF/cm2 (more than 3 orders of mag-nitude smaller than the real value) leading so to unrealistic mobilityof ∼4000–5100 cm2 (V s)−1, as already pointed out in previous work[51,53].

In the present simulation we used for the oxide semiconductora thickness of 35 nm, with an electron mobility of 2.5 cm2 (V s)−1,a carrier concentration of 1016 cm−3 and an effective Density OfStates (DOS) in the Conduction Band Minimum of 1018 cm−3, asexperimentally deduced. The channel length is of 170 �m and thereis an overlap of 210 �m between the semiconductor and the sourceand drain electrodes. The back-electrode was set with a floatingpotential, being thus dependent on the other electrodes’ potential.The results of the 2D simulation are factored in order to correspondto a 1035 �m width channel transistor.

Considering these values and the device architecture (seeFig. 1C), simulations for the cases of VG1 = VG2, VG1 > VG2, andVG1 < VG2 were carried out and the longitudinal electric field profilealong the device was determined.

For the case of VG1 > VG2, the electron concentration along thechannel region of the device is depicted in Fig. 9. For the same con-dition, the current density, channel electric field and potential were

extracted as shown in Fig. 9.

Similarly, for the cases of VG1 = VG2, VG1 > VG2, and VG1 < VG2 (withVDS = 15 V), the current density along the channel was extracted,as shown in Fig. 10. The TCAD simulation clearly shows that the

Ts’ channel for VDS = 15 V, VGS1 = 15 V and VGS2 = 0, 15, and 30 V.

Page 10: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

R. Martins et al. / Applied Materials Today 12 (2018) 402–414 411

Fig. 11. Circuit-level demonstrations of logic circuits of the PDG/BFG-FET under different input signals applied to VG1 and VG2. The frequency of signal applied to VG1 is20 mHz, while that of VG2 is twice higher (40 mHz). (A) OR operation logic circuit, showing the output current, IDS signal as a function of time (s). In the plots, it is signalizedthe logic states “0” and “1”, as well as in the corresponding truth tables. (B) AND operation logic circuit, similar to (A) but now using different combinations for the inputvoltages. (C) NOR operation logic circuit, showing now the output voltage (VOUT ) as a function of the time. (D) NAND operation logic circuit, similar to (A), but now usingdifferent combinations for the input signals. (E) E – equivalent circuit for the NOR, NAND and NOT, E and E depict the planar image of the device, where it is drawn R . (F)N and thi

cvi

4

io

−meoiflwH

1

OT operation (inverter), showing the voltage transfer characteristics (VOUT vs VG1)s presented with the respective output.

urrent density is affected by VG2, as expected, as the thresholdoltage is modulated by VG2, shifting towards lower values as VG2ncreases.

.8. PDG/BFG-FET as universal logic circuit

The different possible configuration arrangements are depictedn Fig. 11 for all 5 possible logic circuits architectures, as a functionf the applied voltages.

The OR operation (Fig. 11A) is obtained using12 V(LOW) ≤ VIN1&2 ≤ 8 V(HIGH) as logic levels, where LOWeans logic “0” and HIGH, means logic “1”, to obtain the proper

lectric field role on the carriers’ transport associated to thexide-FET (see Fig. 6). Here, when VIN1 and VIN2 are low, there

s no conductive channel in the transistor and hence no currentow in the device. Therefore, IDS is at logic “0”. On the other hand,hen the voltage applied at any of gates (either VIN1 or VIN2) isIGH, a conductive channel is formed in the oxide semiconductor,

2 3 D

e gain dependence on VG1 for different VG2. For all logic operations, the truth table

resulting in finite IDS. In this state, IDS is four times higher than theOFF current, showing robust OR logic operation.

The AND operation (Fig. 11B) is obtained by using−13 V(LOW) ≤ VIN1&2 ≤ 0 V(HIGH), When at least one of theinputs is LOW, there is no conductive channel in the transistor andtherefore no current flow in the device. On the other hand, whenVG1 and VG2 are both HIGH, RFG increases as well as the control gatevoltage upon the oxide-FET, turning it ON, and so the increase onIDS by more than 4 times that corresponds to logic “1”. From theseresults, it can be understood that VIN2 has higher control on thedrain current, IDS, when compared to VIN1.

For the NOR (Fig. 11C), NAND (Fig. 11D) and NOT (inverter)operations, a pencil drawn resistance of about 140 k� was intro-duced, as depicted in Fig. 11E2. Typically, a high load resistancevalue is employed to achieve a quick transition between logic

states (high gain) as the gain is proportional to this resistance(

Gain ∝ RLoad/gm

), allowing achieving low values for the logic “0”.

However, VOut for the logic “1” decreases with the load resis-tance value as: VOut = VDD − RLoad × IDS, since IDD will always have a

Page 11: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

4 aterial

snwara

igIHta

w−b(owdbou

5

flsmavp

pIdthitcco

oistcpmfiisptv

mvwFo

12 R. Martins et al. / Applied M

ignificant current level due to the fact that the PDG/BFG-FET can-ot be properly turned off. This trade-off was taken into accounthen designing the pencil drawn resistance by measuring the

chieved logic levels for different resistance lengths, and the finalesistance value was calculated by measuring the I–V characteristiccross the resistance which showed a perfect ohmic behavior.

The NOR logic gate is a combination of an OR gate followed by annverter. For the NOR operation, the same levels defined for the ORate were tested, −12 V(LOW) ≤ VIN1&2 ≤ 8 V(HIGH), leading to the

DS behavior depicted in Fig. 11C, where when any of the input isIGH IDS will be also HIGH. Therefore, VOUT will be at logic “0”. On

he other hand, when both inputs are at logic “0”, IDS is low, and were expected to see VOUT = VDD and so a logic “1” state.

Following the same approach, we obtain the NAND operation,hich consists in an AND gate combined with a NOT gate, by having13 V(LOW) ≤ VIN1&2 ≤ 0 V(HIGH) and where Vout is low only whenoth inputs are high (see Fig. 11D). Finally, for the NOT operationinverter operation) we have single variable input (VIN1) and a sec-nd input (VIN2) is fixed at a constant voltage. For this operation,e obtain the output/input voltage curves depicted in Fig. 11F, forifferent VG2, showing that the voltage transfer characteristics cane shifted by the second gate biasing. Fig. 11F also shows the gainbtained, whose value is LOW due to the macro-size of the devicesed.

. Discussion

Overall, the proposed multigate paper transistor with a backoating electrode based on IZO film (see Fig. 1), where paper isimultaneously the substrate, the dielectric and a charge storageedia, while a metal-oxide-semiconductor (IGZO) is used as the

ctive channel, is able to exhibit logic functionalities simply byarying the amplitude and frequency of the input gate signals,roofs to be reliable and sustainable.

The results show that paper is quite suitable substrate and com-onent to manufacture low cost and reliable electronic devices.

ndependent of the paper fibber structure and asymmetric porousistribution, the data reveal a nice step coverage of the fibbers byhe oxide layers (see Fig. 3), with thicknesses varying from tens toundreds of nanometers. Moreover, the data proves that there is no

nfiltration of the paper by the deposited materials hence a chanceo form filaments that could affect the paper behavior, namely it’sonductive, does not occur. Data depicted in Fig. 4 and Figure S.4,onfirm that no atoms migration happens, revealing so the stabilityf the oxides compositions formed.

The multigate transistors fabricated operate at drain voltagesf 1 V with low power, exhibiting ION/IOFF > 104 and a mobil-ty ≈ 2 cm2 V−1 s−1, serving the specifications for a broad range ofmart disposable low power electronics applications. To sustain allhis study, an analytical compact model was developed able to pre-isely reproduce the response of paper-based dual-gate FETs androvide full understanding of their unique and innovative perfor-ances. In this model, the role of cations and anions (paper metal

llers), together of the fiber structure on the transport mechanisms well explained. Moreover, the proposed architecture decreasesubstantially the degree of complexity of the electronic circuits onaper. That is, the devices are able to provide several functionali-ies, that goes far beyond a simple switch device with tunable Onoltage and a high ON/OFF ratio.

Concerning the field effect mobility, �FE, recorded and esti-ated by the analytical model, we observed that the maximum

alue (�MAXFE ) for the �FE(VG1) plot shifts towards higher VG1

hen VG2 is reduced from 0 to −15 V, as expected fromig. 5A–C. However, the values of �MAX

FE (indicated in the plotf Fig. 6) remain almost invariant with VG2 (in the range of

s Today 12 (2018) 402–414

1.33 − 1.86 ± 0.33 cm2 V−1 s−1). Those values are reliable and repro-ducible for all set of devices fabricated.

In order to understand the different device operation modes asa function of the applied voltages, the PDG/BFG-FET is regarded asan intrinsic combination of three interacting transistors. The threegate electrodes, G1, G2 and BFG, associated to D and S, respectively,represent these transistors. The G1 electrode forms the first transis-tor and influences the whole channel region from source to drain.The second FET can operate on the enhancement or depletion mode,as a function of the applied voltages. On the other hand, the thirdtransistor formed by the G2/FG electrodes influences mainly theway how charges are collected, resembling a transistor that, whenin the depletion mode, affects the charge distribution associatedto the center of the main oxide-FET and so the channel carriers’modulation built. Analogous behavior has been observed in Si-based devices with a similar architecture, where now the channelaccumulation/depletion layers [48] are substituted by the channelresistance modulation. Here, one has to take into account that dueto the device architecture selected (source grounded), the system isnot symmetric and therefore VG2 and VG1 require different appliedvoltages to promote the spatial carrier transport control, where thecarriers flow between drain and source depends on VDS [54].

Therefore, due to the characteristics of operation of thePDG/BFG-FET, different logic operations can be implementedemploying only one transistor. This universality makes it attractivefor application in concepts as the IoT, where multi-functionalityusing only a reduced number of devices (and area) is desired.The PDG/BFG-FET exhibits working conditions compatible withlow power consumption, where the transfer characteristics can beproperly modeled by adapting existing models applied to organicsthin film transistors. In addition, the operating principles allow us totailor the devices/systems performances, according to the desiredapplication, bringing a new device architecture paradigm for build-ing new smart systems on foils. This opens a plethora of innovativepossibilities of this device architecture in low cost and disposableelectronics, where cellulose-based sheets will play a key role forthe next generation of creative industry for all.

6. Conclusions

In the present study we prove the ability to use paper simul-taneously as a substrate and an electronic component (dielectric)in producing reliable multifunctional multigate paper transistor,where the transfer characteristics of the devices can be adequatelyshift by proper control of the gate voltages, for multifunction appli-cations, impacting also on the working power losses of the devices.The oxide layers deposited on paper at low temperatures (≤150 ◦C)show an excellent step coverage, are highly stable and reliable, notbeen observed any type of atoms diffusion or migration in depth,or conformational changes of the deposited layers. Apart from that,the fibber structure of the paper enhances its capacity in storagecharges and so, in defining and controlling the performances of thedevices fabricated.

Moreover, we successfully developed an analytical model byadapting existing models applied to organics thin film transis-tors, able to explain the electronics operating principles of thePDG/BFG-FET multifunctional device here developed that can workas a universal logic circuit. That is, different logic operations canbe implemented employing only one transistor. This universalitymakes it attractive for application in concepts as the IoT, wheremulti-functionality using only a reduced number of devices (and

area) is desired.

Overall the PDG/BFG-FET exhibits working conditions com-patible with low power consumption, In addition, the operatingprinciples allow us to tailor the devices/systems performances,

Page 12: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

aterial

atoalwa

A

S6(ttsTPteMEtp

A

t

R

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

[

R. Martins et al. / Applied M

ccording to the desired application, bringing a new device archi-ecture paradigm for building new smart systems with low degreef complexity on low cost and disposable foils as paper. This opens

plethora of innovative possibilities in exploiting this concept inow cost and disposable electronics, where cellulose-based sheets

ill play a key role for the next generation of creative industry forll.

cknowledgements

This work was funded by European Projects NewFun (ERC-tG-2014, grant GA 640598); BET-EU (H2020-TWINN-2015, GA92373); TREND (ERC-StG-2016, grant GA 716510); 1D NeonH2020-NMP-2015-IA, grant 685758-21D). We also acknowledgehe FEDER funds through the COMPETE 2020 Programme underhe project UID/CTM/50025/2013). D. Gaspar acknowledges theupport from FCT – Portuguese Foundation for Science andechnology through the AdvaMTech PhD program scholarshipD/BD/52627/2014. J. Martins acknowledges the support from FCThrough the grant SFRH/BD/122286/2016. M. J. Mendes acknowl-dges funding from FCT through the grant SFRH/BPD/115566/2016.oreover, the authors would like to thanks to Zhongquan Liao and

hrenfried Zschech from Fraunhofer, IKTS, Dresden, Germany, forhe support given in performing the STEM analysis and their inter-retation of the structures produced.

ppendix A. Supplementary data

Supplementary material related to this article can be found, inhe online version, at doi:10.1016/j.apmt.2018.07.002.

eferences

[1] J.-H.J.J.H. Kim, B.S. Shim, H.S. Kim, Y.-J.J. Lee, S.-K.K. Min, D. Jang, Z. Abas,J.-H.J.J.H. Kim, Review of nanocellulose for sustainable future materials, Int. J.Precis. Eng. Manuf. Technol. 2 (2015) 197–213.

[2] H.-E. Nilsson, T. Unander, J. Siden, H. Andersson, A. Manuilskiy, M.Hummelgard, M. Gulliksson, System integration of electronic functions insmart packaging applications, IEEE Trans. Compon. Packag. Manuf. Technol. 2(2012) 1723–1734.

[3] L. Jiang, Z. Tang, R.M. Clinton, D.W. Hess, V. Breedveld, Fabrication of highlyamphiphobic paper using pulp debonder, Cellulose 23 (2016) 3885–3899.

[4] S.K. Mahadeva, K. Walus, B. Stoeber, Paper as a platform for sensingapplications and other devices: a review, ACS Appl. Mater. Interfaces 7 (2015)8345–8362.

[5] P. Sahatiya, S. Badhulika, Wireless, smart, human motion monitoring usingsolution processed fabrication of graphene-MoS2 transistors on paper, Adv.Electron. Mater. (2018).

[6] S. Kanaparthi, S. Badhulika, Solvent-free fabrication of a biodegradableall-carbon paper based field effect transistor for human motion detectionthrough strain sensing, Green Chem. (2016).

[7] P. Sahatiya, S.S. Jones, S. Badhulika, 2D MoS2–carbon quantum dot hybridbased large area, flexible UV–vis–NIR photodetector on paper substrate, Appl.Mater. Today (2018).

[8] A.T. Vicente, A. Araújo, M.J. Mendes, D. Nunes, M.J. Oliveira, O.Sanchez-Sobrado, M.P. Ferreira, H. Águas, E. Fortunato, R. Martins,Multifunctional cellulose-paper for light harvesting and smart sensingapplications, J. Mater. Chem. C 6 (2018) 3143–3181.

[9] R. Bollström, A. Määttänen, D. Tobjörk, P. Ihalainen, N. Kaihovirta, R.Österbacka, J. Peltonen, M. Toivakka, A multilayer coated fiber-based substratesuitable for printed functionality, Org. Electron. 10 (2009) 1020–1023.

10] Y.-Z. Zhang, Y. Wang, T. Cheng, W.-Y. Lai, H. Pang, W. Huang, Flexiblesupercapacitors based on paper substrates: a new paradigm for low-costenergy storage, Chem. Soc. Rev. 44 (2015) 5181–5199.

11] H. Zhu, W. Luo, P.N. Ciesielski, Z. Fang, J.Y. Zhu, G. Henriksson, M.E. Himmel, L.Hu, Wood-derived materials for green electronics, biological devices, andenergy applications, Chem. Rev. 116 (2016) 9305–9374.

12] R. Martins, I. Ferreira, E. Fortunato, Electronics with and on paper, Phys. StatusSolidi – Rapid Res. Lett. 5 (2011) 332–335.

13] E. Fortunato, P. Barquinha, R. Martins, Oxide semiconductor thin-filmtransistors: a review of recent advances, Adv. Mater. 24 (2012) 2945–2986.

14] F. Pettersson, D. Adekanye, R. Österbacka, Stability of environmentallyfriendly paper electronic devices, Phys. Status Solidi 212 (2015) 2696–2701.

15] F. Pettersson, T. Remonen, D. Adekanye, Y. Zhang, C.-E. Wilén, R. Österbacka,Environmentally friendly transistors and circuits on paper, ChemPhysChem16 (2015) 1286–1294.

[

[

s Today 12 (2018) 402–414 413

16] A.D. Mazzeo, W.B. Kalb, L. Chan, M.G. Killian, J.-F.F. Bloch, B.A. Mazzeo, G.M.Whitesides, Paper-based, capacitive touch pads, Adv. Mater. 24 (2012)2850–2856.

17] M.M. Hamedi, A. Ainla, F. Güder, D.C. Christodouleas, M.T. Fernández-Abedul,G.M. Whitesides, Integrating electronics and microfluidics on paper, Adv.Mater. 28 (2016) 5054–5063.

18] M.M. Hamedi, V.E. Campbell, P. Rothemund, F. Güder, D.C. Christodouleas, J.-F.Bloch, G.M. Whitesides, Electrically activated paper actuators, Adv. Funct.Mater. 26 (2016) 2446–2453.

19] A. Hardy, M.K. Van Bael, Oxide electronics: like wildfire, Nat. Mater. 10 (2011)340–341.

20] R.F.P. Martins, A. Ahnood, N. Correia, L.M.N.P. Pereira, R. Barros, P.M.C.B.Barquinha, R. Costa, I.M.M. Ferreira, A. Nathan, E.E.M.C. Fortunato, Recyclable,flexible, low-power oxide electronics, Adv. Funct. Mater. 23 (2013)2153–2161.

21] E. Fortunato, N. Correia, P. Barquinha, L. Pereira, G. Goncalves, R. Martins,High-performance flexible hybrid field-effect transistors based on cellulosefiber paper, IEEE Electron Device Lett. 29 (2008) 988–990.

22] J. Yoon, J. Lee, B. Choi, D. Lee, D.H. Kim, D.M. Kim, D.-I. Moon, M. Lim, S. Kim,S.-J. Choi, Flammable carbon nanotube transistors on a nitrocellulose papersubstrate for transient electronics, Nano Res. 10 (2017) 87–96.

23] S. Lee, A. Nathan, Subthreshold Schottky-barrier thin-film transistors withultralow power and high intrinsic gain, Science (80-) 354 (2016) 302–304.

24] T. Shinzaki, I. Morikawa, Y. Yamaoka, Y. Sakem, IoT security for utilization ofbig data: mutual authentication technology and anonymization technologyfor positional data, Fujitsu Sci. Tech. J. 52 (2016) 52–60 https://www.fujitsu.com/global/documents/about/resources/publications/fstj/archives/vol52-4/paper08.pdf.

25] R. Gravina, P. Alinia, H. Ghasemzadeh, G. Fortino, Multi-sensor fusion in bodysensor networks: state-of-the-art and research challenges, Inf. Fusion 35(2017) 68–80.

26] G. Whiteman, The zero marginal cost society: the internet of things, thecollaborative commons, and the eclipse of capitalism, Nature 511 (2014) 154.

27] Y. Khan, M. Garg, Q. Gui, M. Schadt, A. Gaikwad, D. Han, N.A.D. Yamamoto, P.Hart, R. Welte, W. Wilson, S. Czarnecki, M. Poliks, Z. Jin, K. Ghose, F. Egitto, J.Turner, A.C. Arias, Flexible hybrid electronics: direct interfacing of soft andhard electronics for wearable health monitoring, Adv. Funct. Mater. 26 (2016)8764–8775.

28] V.I. Popa (Ed.), Pulp Production and Processing: From Papermaking toHigh-Tech Products, 1st ed., iSmithers Rapra Publishing, Shawbury,Shrewsbury, Shropshire, 2013.

29] H. Theliander, Pulping Chemistry and Technology, vol. 2, Walter de Gruyter,Berlin, New York, 2009.

30] L. Pereira, D. Gaspar, D. Guerin, A. Delattre, E. Fortunato, R. Martins, Theinfluence of fibril composition and dimension on the performance of papergated oxide transistors, Nanotechnology 25 (2014).

31] O. Marinov, M.J. Deen, U. Zschieschang, H. Klauk, Organic thin-filmtransistors: part I – compact DC modeling, IEEE Trans. Electron Devices 56(2009) 2952–2961.

32] J.W. Jin, A. Nathan, P. Barquinha, L. Pereira, E. Fortunato, R. Martins, B. Cobb,Interpreting anomalies observed in oxide semiconductor TFTs under negativeand positive bias stress, AIP Adv. 6 (2016) 085321.

33] M.J. Deen, O. Marinov, U. Zschieschang, H. Klauk, Organic thin-filmtransistors: part II – parameter extraction, IEEE Trans. Electron Devices 56(2009) 2962–2968.

34] O. Marinov, M. Jamal Deen, C. Feng, Y. Wu, Precise parameter extractiontechnique for organic thin-film transistors operating in the linear regime, J.Appl. Phys. 115 (2014) 034506.

35] S. Mansouri, M. Mahdouani, A. Oudir, S. Zorai, S. Ben Dkhil, G. Horowitz, R.Bourguiga, Analytic model for organic thin film transistors (OTFTs): effect ofcontact resistances application to the octithiophene, Eur. Phys. J. Appl. Phys.48 (2009) 30401.

36] H. Jeong, M. Won, W. Shi, J.A. Weldon, X. Li, K. Wang, Feasibility study of adual-gate photosensitive thin-film transistor for fingerprint sensor integratedactive-matrix display, SID Symp. Dig. Tech. Pap. 46 (2015) 1131–1134.

37] M.K. Ryu, S. Yang, S.-H.K. Park, C.-S. Hwang, J.K. Jeong, Impact of Sn/Zn ratioon the gate bias and temperature-induced instability of Zn-In-Sn-O thin filmtransistors, Appl. Phys. Lett. 95 (2009) 173508.

38] M. Estrada, A. Cerdeira, A. Ortiz-Conde, F.J. García Sanchez, B. Iniguez,Extraction method for polycrystalline TFT above and below threshold modelparameters, Solid State Electron. 46 (2002) 2295–2300.

39] G.H. Gelinck, E. van Veenendaal, R. Coehoorn, Dual-gate organic thin-filmtransistors, Appl. Phys. Lett. 87 (2005) 073508.

40] S. Rolland du Roscoat, M. Decain, X. Thibault, C. Geindreau, J.-F. Bloch,Estimation of microstructural properties from synchrotron X-raymicrotomography and determination of the REV in paper materials, ActaMater. 55 (2007) 2841–2850.

41] Z.J. Donhauser, Conductance switching in single molecules throughconformational changes, Science (80-) 292 (2001) 2303–2307.

42] R.F. Service, Next-generation technology hits an early midlife crisis, Science(80-) 302 (2003) 556–559.

43] C. Qian, J. Sun, J. Yang, Y. Gao, Flexible organic field-effect transistors onbiodegradable cellulose paper with efficient reusable ion gel dielectrics, RSCAdv. 5 (2015) 14567–14574.

44] T. Fujimoto, K. Awaga, Electric-double-layer field-effect transistors with ionicliquids, Phys. Chem. Chem. Phys. 15 (2013) 8983.

Page 13: Applied Materials Today · system and AJA ATC-1800 sputtering tool (AJA International Inc, North Scituate, MA, USA), respectively. The active channel layer is composed by a 40nm thick

4 aterial

[

[

[

[

[

[

[

[

[53] R. Martins, P. Barquinha, L. Pereira, N. Correia, G. Gonc alves, I. Ferreira, E.

14 R. Martins et al. / Applied M

45] W. Dou, L. Qiang Zhu, J. Jiang, Q. Wan, Flexible protonic/electronic coupledneuron transistors self-assembled on paper substrates for logic applications,Appl. Phys. Lett. 102 (2013) 093509.

46] F. Shao, P. Feng, C. Wan, X. Wan, Y. Yang, Y. Shi, Q. Wan, Multifunctional logicdemonstrated in a flexible multigate oxide-based electric-double-layertransistor on paper substrate, Adv. Electron. Mater. 3 (2017) 1600509.

47] J. Jiang, A.C. Ahyi, S. Dhar, Dual-Gate MoS2 FET with a coplanar-gateengineering, IEEE Trans. Electron Devices 63 (2016) 573–577.

48] T. Krauss, F. Wessely, U. Schwalke, Dual Metal-Gate Planar Field-Effect

Transistor for Electrostatically Doped CMOS Design, 2014, ar*X*iv:1405.7562.

49] D. Gaspar, S.N. Fernandes, A.G. De Oliveira, J.G. Fernandes, P. Grey, R.V. Pontes,L. Pereira, R. Martins, M.H. Godinho, E. Fortunato, Nanocrystalline celluloseapplied simultaneously as the gate dielectric and the substrate in flexible fieldeffect transistors, Nanotechnology 25 (2014).

[

s Today 12 (2018) 402–414

50] P. Barquinha, R. Martins, L. Pereira, E. Fortunato, Transparent OxideElectronics: From Materials to Devices, 1st ed., Wiley, West Sussex, 2012.

51] R. Martins, L. Pereira, P. Barquinha, N. Correia, G. Gonc alves, I. Ferreira, C. Dias,E. Fortunato, Floating gate memory paper transistor, in: F.H. Teherani, D.C.Look, C.W. Litton, D.J. Rogers (Eds.), Proc. SPIE – Int. Soc. Opt. Eng, 2010, pp.1–11.

52] A. Campbell, On the electric inductive capacities of dry paper and of solidcellulose, Proc. R. Soc. A: Math. Phys. Eng. Sci. 78 (1906) 196–211.

Fortunato, Write-erase and read paper memory transistor, Appl. Phys. Lett. 93(2008) 203501.

54] S. Mil’shtein, L. Devarakonda, B. Zanchi, J. Palma, 3D modeling of dual-gateFinFET, Nanoscale Res. Lett. 7 (2012) 625.