an innovative design and implementation of vertical probe
TRANSCRIPT
An Innovative Design and Implementation of Vertical Probe Card for High Speed
Loopback(12Gbps) Application
Morgan KuAlex Wei
Seenew Lai
Agenda• Background• Introduction• Electrical Performance • Design of Taguchi Methods• Experiment Validation• Conclusion
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There are several types of high-speed transmission interface which areshown at chart below. In order to achieve the required speed on the waferlevel testing, the demand of the advanced loopback design is certainly moreand more important.
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Background
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Background How to improve the performance of the probe cardThere are several factors, such as1. PCB2. SUB.3. Needles
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Background
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I/O channel
Conventional P/C
Channel 1
Tx
Rx
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Probe Head Wafer SideUD
LD
To tester
PCB
SUB.
Tester Side
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The channel1. of P/C measurement result and eye diagram Channel 1.
Channel 1. 10GbpsChannel 1. 2Gbps
Channel 1. 6Gbps
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Sdd21
Sdd11
Worse!
Blind!
Background
Introduction
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What is Super Eye TM technology ?
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Conventional P/C
Probe Head Wafer Side
To tester
PCB
SUB.
Tester Side
UD
LD
Super Eye TM
technology P/C
Probe Head Wafer SideUD
LD
To tester
PCB
SUB.
Tester Side
Introduction
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About Super Eye TM technologyMPI design the impedance matching on the transmission line.
Super Eye TM technology is patented and patents pending.
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3D EM Design
Electrical Performance (Sim.) By using 3D EM software and Super Eye TM technology, it will help to
progress the conventional electrical performance.
Current Mag. Surf.
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S21, S11
12Gbps
2Gbps
6Gbps
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Super Eye Tech. P/CConventional P/C
Sdd21Sdd11
Sdd21Sdd11
Better!
Better!
Electrical Performance (Sim.)
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Measurement result of P/CThe simulation and measurement results are inconsistent.
Electrical Performance
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There are several sensitive factors which cause the inconsistency betweenthe measurement result and simulation. MPI analyzed those factors andmade an improvement to the simulation resulting in more accurate results.
Electrical Performance
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We found 4 sensitive factors during the process of sensitivity analysis.
Design of Taguchi Methods
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Design of Taguchi Methods We found 4 sensitive factors during the process of sensitivity analysis.
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Each sensitive factor might impact different Via, Metal, or landing pad.
Landing pad M3M2 M1
SUB.
Via1Via2Via3
Design of Taguchi Methods
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Taguchi Methods : Orthogonal Arrays & Experimental Data log, S/N Ratios.
Experiment A B C DS/N
Ratios
1 1 1 1 1
2 1 2 2 2
3 1 3 3 3
4 2 1 2 3
5 2 2 3 1
6 2 3 1 2
7 3 1 3 2
8 3 2 1 3
9 3 3 2 1
Design of Taguchi Methods
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Analysis ResultAccording to the sensitive factors, we use Taguchi Methods to improve thedesign and let the performance better.
Design of Taguchi Methods
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Measurement system
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Experiment Validation
Tx Rx
Network Analyzer
Probe CardProbe Head
Reference plane after calibration.
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Experiment Validation Measurement systemWe adopted SOLT calibration method and de-embedded each probe togenerate measurement result.
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Experiment Validation
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Measurement resultThe measurement result shows the characteristics are improved.
Experiment Validation
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Eye diagram of 5 Gbps
Rise/Fall time = 50 psData rate = 5 GbpsData type = PRBS(232-1)Vo/Vi *100% = 74%
Super Eye TM 5Gbps
Experiment Validation
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Eye diagram of 6 Gbps
Rise/Fall time = 41.667 psData rate = 6 GbpsData type = PRBS(232-1)Vo/Vi *100% = 72%
Super Eye TM 6Gbps
Conventional P/C 6Gbps
Experiment Validation
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Eye diagram of 8 Gbps
Rise/Fall time = 31.25 psData rate = 8 GbpsData type = PRBS(232-1)Vo/Vi *100% = 66%
Super Eye TM 8Gbps
Experiment Validation
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Eye diagram of 10 Gbps
Rise/Fall time = 25 psData rate = 10 GbpsData type = PRBS(232-1)Vo/Vi *100% = 64%
Super Eye TM 10Gbps
Conventional P/C 10Gbps
Experiment Validation
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Eye diagram of 12 Gbps
Rise/Fall time = 20.8 psData rate = 12 GbpsData type = PRBS(232-1)Vo/Vi *100% = 60%
Super Eye TM 12Gbps
Conventional P/C 12Gbps
Conclusion
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Super Eye TM technology
1. Super Eye TM technology can support 12Gbps for verticalprobe card loopback application on high speed transmissioninterface (USB3.0: 5Gbps, SATA3: 6Gbps, PCI-E 3.0: 8Gbps,Ethernet: 10Gbps…etc.).
2. Improve conventional loopback design: Impendencematching on the transmission line to improve electricalperformance.
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Special thanks
Jason Ho, Cary Chen, Nate Chen, Jacky LiuOmar Chang, Akey Chen, Ada HsuSteven Wu, Cahris Lin, Joey WuAlbert Fan, Yock Hsu, Anderson Huang( MPI )
Y. S. Kuo , Kenny Tang( tsmc )
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Acknowledgements
Thank you
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For more info. ,please contact :[email protected] : 886-3-555-1771FAX : 886-3-555-2882
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Q & A