stc tcs conversion reactor - susunggn

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STC→TCS Conversion Reactor SCR – 36R

STC → TCS Conversion Reactor SCR – 36R

Benefit of SST’s Conversion Reactor1. Customer can produce 2 times of TCS than market existing Converter 2. Customer can save the running cost to a half (electric cost, consumable material cost, man power etc.) 3. Customer can save the plant capital cost through reducing the equipment number. 4. Customer can adopt SST’s Converter to running plant 5. SST support the stabilized running Sequence. 6. SST supply the most up-to date heater design and other materials.

SST、s SCR-36R is used for converting the clean STC to TCS gas whatformed during Si deposition in Silicon deposition reactor(CVD).

In these days for converting STC to TCS gas two well known process areused. One is hydrogenation and the other is hydro-chlorination.among of them SST、s Conversion reactor is used at Hydrogenationprocess which known as clean process.

The main reaction mechanism is

SiCl4 + H2 → SiHCl3 + HCl

Normally this process is used at small capacity poly-silicon plantbecause of its economic competitiveness

But SST、s SCR-36R overcomes the process weakness throughremarkable up to date technology

Head Office. #139-13, Sandong-ri, Eumbong-myeon, Asan-si, Chungnam,336-863,KoreaHome page : http://www.susungtech.co.kr

Tel : 82-41-584-3955 Fax : 82-41-584-7465

China. Guancheng Science & Technology Park Shilong Road Guanlong Road’s Section Dongguan, Guangdong, China

Tel : 86-769-2266-7702 Fax : 86-769-2226-1659

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Basic SpecificationConversion Rate : 18% ~ 25%

STC Feed Rate : 7,600kg/hr

TCS Conversion Rate : Ave. 1,350kg/hr

Electric Power Consumption : 2.2kW/kg(TCS)

Shield & Heater Material : Graphite

Maintenance : once per 6 Month

Power Supply Unit - Main Transformer - Main Power Supply Unit

Basic Engineering PackageProcess Description

PFD & PNID for CVD System

Process Design Basic(Batch time, Civil Data etc.)

Operation Manual & Operation Sequence

Instrument Data sheet for CVD system

Piping Material Specification

Rod & Electric section Diagram

Heat _ Exchanger Data sheet

CVD Building Design Scheme

STC →TCS Conversion Reactor SCR – 36R

Equipment STC → TCS Conversion Reactor- Bell jar & Base Plate

Power Supply System

Power Transmitting Unit- Electrode - Insulation Parts

Temperature Control Unit- Pyrometer & Install Bracket

[ Ampere Characteristic ]

[ Voltage Characteristic ]