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• Client Locations

Professional Services Only

No Product Sales!

Ted Dangelmayer

www.dangelmayer.com

Class 0 – Who’s at Risk &

How to Avoid Quality and Reliability Failures

Copyright © 2013 Dangelmayer Associates 2

Agenda

• Preliminaries

• Class 0 Definition

• Brief Review: CDM & CBE

• Who’s At Risk

• Class 0 Technologies

• Class 0 Failure Mitigation

Copyright © 2013 Dangelmayer Associates 3

ESD Acronyms • EPM:

• ESD Program Management:

A Total EPM Quality System

• Best Practices Benchmarking™

• Relative Compliance to Best Practices

• Quantifies Yield Improvement Opportunity

• EOS – Electrical Overstress

• IC Damage due to Electrical Over Voltage or Current

• HBM – Human Body Model

• CDM – Charged Device Model

• CBE – Charged Board Event

• CDE – Cable Discharge Event

Copyright © 2013 Dangelmayer Associates 4

DA ESD Class 0 Definition

• Class 0

• Withstand Voltages Less than 250 volts HBM or CDM

• Class 00

• Withstand Voltages Less than 125 volts HBM or CDM

• Class 000

• Withstand Voltages Less than 50 volts HBM or CDM

Note: Class 0 Devices Prone To Higher Levels of

Test Failures, Test Escapes and Latent Failures

Copyright © 2013 Dangelmayer Associates 5

IC Design Target Levels

Model 2009 2010

HBM 2000V 500V

CDM 500V 250V

Average Device Thresholds

Model 1992 1998 2003 2007 2013 2014

HBM 3800V 3000V 2200V 1500V 1000V 750V

CDM 800V 700V 675V 625V 325V 240V

ESDA Technology Roadmap

Device Thresholds Are Declining

Copyright © 2013 Dangelmayer Associates 6

• Catastrophic

• Device failure that is both

sudden and complete. It

involves complete loss of the

required function

• Cumulative

• Device failure resulting from

multiple sub-threshold

exposures to ESD

• Latent

• Device failure over time

due to prior ESD damage

ESD Damage

A Quality & Reliability Issue

Copyright © 2013 Dangelmayer Associates 10

Brief Review: CDM – CBE

Copyright © 2013 Dangelmayer Associates 11

Charged Device Model

Conductive Surface

CDM Video

Device Contact Resistance

Capacitance of

Device

Charge

“Flow” Q

Ground

“99.9% of ESD Failures are CDM/CBE/CDE!”

Andrew Olney, Analog Devices, Quality Director

& Industry Council, TI, Intel, etc.

Copyright © 2013 Dangelmayer Associates 13

S20.20 - Class 0 and CDM/CBE Limitations

Yield Improvements by Adding CDM & CBE Best Practices

0

5

10

15

20

25

1 5 9 13 17 21 25 29 33 37 41 45 49 1 5 9 13 17 21 25 29 33 37 41 45 49

Week

CDM & CBE

Controls Added

22%

ESD

Yield

Loss

S20.20 Program

(HBM Focused)

39% Best

Practices

Benchmarking™

Note: Courtesy Herald Datanetics Itd. - 1st Class 0 Certified Manufacturing Operation

http://www.dangelmayer.com/class-0-certification.php Each data point is confirmed ESD damage

during production (typically 65 volt CDM/HBM ESD sensitivity) and different colors represent

different products.

P

E

R

C

E

N

T

D

E

F

E

C

T

I

V

E

94% Best

Practices

Benchmarking

Copyright © 2013 Dangelmayer Associates 14

CBE (Charged Board Event) Test Set-Up

Olney et al (Analog Devices)

Field Plate

Thin Dielectric

Film

Sensitive Device Pin

Copyright © 2013 Dangelmayer Associates 15 Courtesy: Andrew Olney, Quality Director, Analog Devices

Charged Board Event ESD Damage

Most FA Experts Misdiagnose as EOS!!!!

Up to 50% of EOS Failures are CBE ESD! (2008)

CDM Device Damage CBE Device Damage on Circuit Board

X200 X4000

Peak Currents of 25 amps Have Been Measured!

video

Copyright © 2013 Dangelmayer Associates 16

How to Classify Circuit Boards

• Based on Most Sensitive Component

• Class I, 0, 00, 000

• Must Have Both HBM & CDM Thresholds

• Estimates Are Not Sufficient • W/O Data You are At Risk

• Consider Class 0 For Boards Due to CBE

• Based on Criticality of Application

• 25 Amp Discharge Currents Possible

Copyright © 2013 Dangelmayer Associates 18 p18

Are You On

A Collision Course Too?

“The Perfect Storm”

Entire East Coast of USA

October 1991

• Without Typical “Hurricane Warnings”!

• Fishermen At Sea Caught Off-guard

• 2000 Miles of Hurricane Like Conditions

• ESD Analogy:

• CDM Generally Not Understood

• Class 0 Trend Approaching Now

• A Very ESD Real Threat!

• More Dangerous than Individually

CDM

+ Class 0

= The Perfect ESD Storm!

Copyright © 2013 Dangelmayer Associates 19

Class 0 - Who’s At Risk

Copyright © 2013 Dangelmayer Associates 20

Best Practices Benchmarking™

0

20

40

60

80

100

17 12 6 4 21 11 8 5 2 26 25 19 15 24 37 20 10 29 14 28 18 32 31 33 42 16 3 36 27 7 13 38 41 1 34 30 9 40 37 35 12 44

EP

M P

erf

orm

an

ce

Preferred

Acceptable

Conditional

Unacceptable

Defense

Aerospace

Manufacturing Sites Contract

None of the Sites Assessed Since 2001 had adequate

CDM/CBE Controls in place initially!

High

Risk

Zone

Copyright © 2013 Dangelmayer Associates 21

Class 0 - CDM Threshold Dependencies

Ref: Industry Council WPII 2009

Larger Device Package Size

Higher

Operating

Speeds

Copyright © 2013 Dangelmayer Associates 22

Class 0 Technologies

• ICs

• Nanoscale CMOS

• RF

• GaAs

• Optoelectronics

• Lasers

• LEDs

• Detectors (PIN, APD)

• MEMS

• MR Heads Sylvania

Application

Notes

Copyright © 2013 Dangelmayer Associates 23

Class 0:

Who’s At Risk

• Semiconductor Backend

• Automation

• HBM Programs

• S20.20 Programs

• Manufacturing w/o

• HBM & CDM Thresholds

• CDM Best Practices

• CBE Best Practices

• Circuit Board Manufacturing & Integration

• Contract Manufacturing

• Defense Manufacturing

• Aerospace Manufacturing

• NASA

• Consumer Electronics Manufacturing

• Medical Manufacturing

• Automotive Manufacturing

• Wafer Fabrication & Wafer Saw

• New Construction & Outfitting New Lines

Copyright © 2013 Dangelmayer Associates 24

Circuit Board Manufacturing & Integration

• Myth:

Circuit Boards are Less Sensitive to ESD than Devices

• Widely Assumed True - False Sense of Security

• Boards Are More Sensitive than Components

• Up To 25 Amp Discharge Currents

• Nokia Asserts All ESD Failures Happen at Board Level

• Rapidly Escalating Probability of at least One Class 0

Component per Board

• 50% of EOS Board Failures are ESD (CBE/CDE)

Copyright © 2013 Dangelmayer Associates 26

Variation in CBE

Waveforms

A - High L, C

B - Lower L, C; higher R

C - Faster discharge (small C)

D - Slower discharge (large C)

E - Two RLC sources

F - High L, R

Data Courtesy Nokia

Copyright © 2013 Dangelmayer Associates 27

At Risk - Contract Manufacturing (CM)

• CM Programs are HBM – S20.20

• On a Collision Course

• Customer Generally Do Not Specify Class 0 Requirements

• Customers Leave CDM & Class 0 Mitigation to CMs

• CMs Require Customers Requirements to Take Action

• Therefore – a Collision Course

Copyright © 2013 Dangelmayer Associates 28

At Risk - Defense & Aerospace Manufacturing

• CDM & CBE Mitigation Not Required

• Generally Not Well Understood at Factories

• Mil Standards 30 Years Outdated

• S20.20 an HBM Standard

• Resistant To Change

Copyright © 2013 Dangelmayer Associates 29

At Risk - Consumer Electronics Manufacturing

• Often Performance & Cost Driven

• High Speed

• Technology Node Feature Sizes

• Circuit Functionality

• I/O Density

• Combination Prone to Class 0 Thresholds

Copyright © 2013 Dangelmayer Associates 30

At Risk - Medical Manufacturing

• FDA Recognizes S20.20

• CDM & CBE Not Recognized

• Failures Life Threatening

Copyright © 2013 Dangelmayer Associates 31

At Risk - Automotive Manufacturing

• Expanding Application of Electronics

• Less Experience with Electronics Manufacturing

• Transitions from Mechanical to Electronic Difficult

• ESD Controls New to Automotive Repair Operations

• Often Insufficient Controls

Copyright © 2013 Dangelmayer Associates 32

At Risk - New Construction & Outfitting New Lines

• Class 0 Often Overlooked for New Construction

• ESD Engineers Often not Involved Early

• Architects & Facility Engineers Make Decisions without ESD Input

• Can Result in Significant Cost Penalties to Correct Errors

• e.g. - Segregation of Class 0 Lines May be Necessary

• Class 0 Material Properties Generally Not Considered

• Flooring

• High vs. Low Charging Selection

• Conveyors, Material Transports, Automation & Workstations etc.

• Can Result in Replacement of Costly Items for Class 0 Applications

Copyright © 2013 Dangelmayer Associates 33

At Risk - Wafer Fabrication &

Wafer Saw Operations

Copyright © 2013 Dangelmayer Associates 34

Wafer ESD Model

Field plate at V

Arc model, I(t)- Includes

inductance

Small features Large

bus

Bulk resistance

V(t)

surface resistance

small cap large cap

neglected

neglected

Are ESD failures

happening at

wafer level?

Copyright © 2013 Dangelmayer Associates 35

Typical Wafer Potential Difference Distributions

Difference in potential from zap point

5000 volt zap

-250

-200

-150

-100

-50

0

0 0.001 0.002 0.003 0.004 0.005

position (mm)

vo

ltag

e

Potential differences between neighboring points

-80

-60

-40

-20

0

20

40

60

80

0 0.001 0.002 0.003 0.004 0.005

wafer position (mm)

po

int-

to-p

oin

t vo

ltag

e (

v)

Copyright © 2013 Dangelmayer Associates 36

Class 000 – Wafer Saw Example

Unexpected Results!

• CDM Threshold – 35 Volts

• 92.2% Defective at Wafer Saw

• Failure Analysis

• CDM Damage

Copyright © 2013 Dangelmayer Associates 39

Class 0 Failure Mitigation

Copyright © 2013 Dangelmayer Associates 40

Class 0 Mitigation Considerations

• Industry Standards Do Not Include CDM For Class 0!

• Unlikely They Will in Foreseeable Future

• Not Conducive to Standardization

• Customization Essential

• CDM Mitigation Techniques Not Well Known

• Not Planned for 2014 Issue of S20.20

• 99.9% of ESD Component Failures are CDM/CBE/CDE

• CDM & CBE Techniques Virtually the Same

• Therefore:

• Class 0 Controls ~ CDM Controls

• CDM Mitigation Techniques Must Be Fully Understood

• Proven CDM Best Practices Requirements

• In Private Sector – Limited Access by Public

• Class 0, 00, 000 Requirements

• Escalate at 250 V, 125 V, 50 V

Copyright © 2013 Dangelmayer Associates 41

Best Industry

Manufacturing Standard

ANSI/ESDA S20.20

Scope: HBM >100V

Thus:

S20.20 Customization

is Essential for :

Class 0, CBE, CDE &

CDM

Industry Standards

Lag Technology

10 to 15 years

Copyright © 2013 Dangelmayer Associates 42

CDM Mitigation Two Strategies – Which One is S20.20?

Lower device voltage or higher surface resistance in the

discharge path can reduce discharge current.

Solder

Video

Copyright © 2013 Dangelmayer Associates 44

S20.20 - Class 0 and CDM/CBE Limitations

Yield Improvements by Adding CDM & CBE Best Practices

0

5

10

15

20

25

1 5 9 13 17 21 25 29 33 37 41 45 49 1 5 9 13 17 21 25 29 33 37 41 45 49

Week

CDM & CBE

Controls Added

22%

ESD

Yield

Loss

S20.20 Program

(HBM Focused)

39% Best

Practices

Benchmarking™

Note: Courtesy Herald Datanetics Itd. - 1st Class 0 Certified Manufacturing Operation

http://www.dangelmayer.com/class-0-certification.php Each data point is confirmed ESD damage

during production (typically 65 volt CDM/HBM ESD sensitivity) and different colors represent

different products.

P

E

R

C

E

N

T

D

E

F

E

C

T

I

V

E

94% Best

Practices

Benchmarking

Copyright © 2013 Dangelmayer Associates 45

Questions?

Ted Dangelmayer

Dangelmayer Associates, LLC

ted@dangelmayer.com

www.dangelmayer.com

978 282 8888

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